JP4388859B2 - Reflow device - Google Patents

Reflow device Download PDF

Info

Publication number
JP4388859B2
JP4388859B2 JP2004175316A JP2004175316A JP4388859B2 JP 4388859 B2 JP4388859 B2 JP 4388859B2 JP 2004175316 A JP2004175316 A JP 2004175316A JP 2004175316 A JP2004175316 A JP 2004175316A JP 4388859 B2 JP4388859 B2 JP 4388859B2
Authority
JP
Japan
Prior art keywords
heat insulation
circuit board
printed circuit
insulation chamber
support frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004175316A
Other languages
Japanese (ja)
Other versions
JP2005353965A (en
Inventor
武彦 村上
Original Assignee
ミナミ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ミナミ株式会社 filed Critical ミナミ株式会社
Priority to JP2004175316A priority Critical patent/JP4388859B2/en
Publication of JP2005353965A publication Critical patent/JP2005353965A/en
Application granted granted Critical
Publication of JP4388859B2 publication Critical patent/JP4388859B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Wire Bonding (AREA)

Description

本発明はリフロー装置に関するものである。   The present invention relates to a reflow apparatus.

プリント基板への実装装置においては、先ず印刷装置によりスクリーンマスクとスキージによってプリント基板の表面に所定のパターンにクリーム半田が印刷される。そしてその後電子部品であるチップを置き、加熱してクリーム半田を溶かし、該チップをプリント基板に実装する。   In an apparatus for mounting on a printed circuit board, cream solder is first printed in a predetermined pattern on the surface of the printed circuit board by a printing device using a screen mask and a squeegee. Thereafter, a chip which is an electronic component is placed, heated to melt the cream solder, and the chip is mounted on a printed board.

図9に斯かる実装装置の配置構成を示す。100はローダーであり、プリント基板(図示せず。)を供給するものである。101は印刷装置であり、プリント基板の表面にクリーム半田を印刷するものである。102、103はマウンタであり、プリント基板のクリーム半田印刷部分にチップを置くものである。104はリフロー装置であり、クリーム半田を加熱して溶かすものである。105はアンローダーであり、処理済のプリント基板を収容するものである。   FIG. 9 shows an arrangement configuration of such a mounting apparatus. A loader 100 supplies a printed circuit board (not shown). A printing apparatus 101 prints cream solder on the surface of a printed board. Reference numerals 102 and 103 denote mounters for placing chips on the cream solder printed portion of the printed circuit board. Reference numeral 104 denotes a reflow apparatus for heating and melting cream solder. An unloader 105 accommodates a processed printed board.

ところで、プリント基板に電子部品を固定させる半田バンプを形成した場合、これをリフローするとき、図10に示す如く、含まれているフラックスや溶剤等が気化して気泡となり、半田バンプ106のポスト部106aにボイドと称される空洞107ができる。尚、図において108はプリント基板、109は再配線回路である。   By the way, when a solder bump for fixing an electronic component is formed on a printed circuit board, when reflowing the solder bump, as shown in FIG. A cavity 107 called a void is formed in 106a. In the figure, 108 is a printed circuit board, and 109 is a rewiring circuit.

そして、このようにボイドと称される空洞107ができると、導電性が悪くなり、実用上支障を来すことになる。   And if the cavity 107 called a void is made in this way, the conductivity will be deteriorated, causing a problem in practical use.

また、前記従来の実装装置にあっては、リフロー装置104の長さL1が6m以上、時には9mといったものもあり、そして入口104aと出口104bが両サイドにあることから、アンローダー105がリフロー装置104に続けて設置されることになる。このためこの分の長さL2も加わることになる。このようにリフロー装置とアンローダーとで相当な長さの設置スペースを必要としていた。   In the conventional mounting apparatus, the reflow device 104 has a length L1 of 6 m or more, sometimes 9 m, and the inlet 104a and the outlet 104b are on both sides. It will be installed following 104. For this reason, this length L2 is also added. Thus, the installation space of considerable length was required with the reflow apparatus and the unloader.

また、リフロー装置にあっては断熱室内を窒素ガスの雰囲気下で所定の温度に加熱するが、入口104aと出口104bという二つの口が開いていることから、内部に入れた窒素ガスの外部への漏れ出し量が多いという問題点がある。   In the reflow apparatus, the heat insulation chamber is heated to a predetermined temperature in an atmosphere of nitrogen gas. Since the two ports of the inlet 104a and the outlet 104b are open, the nitrogen gas put in the inside is exposed to the outside. There is a problem that the amount of leakage is large.

本発明は上記の点に鑑みなされたものであって、プリント基板に電子部品を固定させる半田バンプを形成した場合、これをリフローするときに、同時に真空脱泡して半田バンプ内の気泡を抜き、もって半田バンプ内にボイドと称される空洞ができないようになし、また予熱、本加熱、冷却の各処理を水平方向に円を描くようにして順次なさしめることによって加熱に要するスペースを従来より大幅に縮小すると共に、入口と出口を共用する一つの口だけでプリント基板の出入りをするようになすことによって漏出する窒素ガスの量を極力減少させることができるようになしたリフロー装置を提供せんとするものである。   The present invention has been made in view of the above points. When a solder bump for fixing an electronic component to a printed circuit board is formed, when reflowing the solder bump, a vacuum deaeration is performed at the same time to remove bubbles in the solder bump. Therefore, voids called voids are not formed in the solder bumps, and the preheating, main heating, and cooling processes are sequentially performed in a horizontal circle so that the space required for heating can be increased. We do not provide a reflow device that can greatly reduce the amount of nitrogen gas leaked out by making the printed circuit board go in and out with only one port sharing the inlet and outlet, while greatly reducing the size. It is what.

而して、本発明の要旨とするところは、側壁の後記プリント基板移送装置の支持枠と一致する高さの位置の一箇所にプリント基板出入口を設けた平面円形の箱形の基枠内に、供給・取り出し兼用スペース、予熱用断熱室、本加熱用断熱室、冷却用断熱室を水平方向に円を描くようにして等間隔に並設し、これら予熱用断熱室、本加熱用断熱室、冷却用断熱室には後記プリント基板移送装置の支持枠が自由に出入りすることができるように内壁と側壁に切欠きを設けると共に、夫々の内部におけるプリント基板移送装置の支持枠が旋回する位置よりも下部に、適宜の加熱手段を設置し、また前記基枠の中心部に所要の駆動機構をもって水平方向に間欠回転せしめられるプリント基板移送装置を設置し、該プリント基板移送装置に、前記供給・取り出し兼用スペース、予熱用断熱室、本加熱用断熱室、冷却用断熱室の夫々に入り込む支持枠を放射状に取り付けてなるリフロー装置であって、本加熱用断熱室に、所定のタイミングで、支持枠に支持したプリント基板の半田バンプ形成面に対して真空脱泡を行う真空脱泡装置を備えてなるリフロー装置にある。   Therefore, the gist of the present invention is that a flat circular box-shaped base frame provided with a printed circuit board entrance / exit at one position at a height corresponding to the support frame of the post-printed circuit board transfer device on the side wall. A space for supplying and taking out, a heat insulation room for preheating, a heat insulation room for main heating, and a heat insulation room for cooling are arranged in parallel at equal intervals in a horizontal direction. These heat insulation room for preheating and heat insulation room for main heating The cooling heat insulation chamber is provided with notches in the inner wall and the side wall so that the support frame of the printed board transfer device described later can freely enter and exit, and the position where the support frame of the printed board transfer device in each interior rotates. An appropriate heating means is installed in the lower part, and a printed circuit board transfer device that is intermittently rotated in the horizontal direction with a required drive mechanism is installed in the center of the base frame.・ Take A reflow device in which a support frame that goes into each of a take-out space, a preheating heat insulation chamber, a main heat insulation chamber, and a cooling heat insulation chamber is attached radially, and is supported by the main heat insulation chamber at a predetermined timing. A reflow apparatus comprising a vacuum defoaming device for performing vacuum defoaming on a solder bump forming surface of a printed circuit board supported by a frame.

また、上記構成における真空脱泡装置は、より具体的には、基枠における本加熱用断熱室の頂部開口の位置に固定した支承枠と、該支承枠の上部水平板に開設し、適宜の真空装置に接続した通気口と、適宜の昇降手段をもって前記支承枠内において所定のタイミングで昇降せしめられ、下部開口をプリント基板の直径より大きくなすと共に、上部開口をベローズをもって前記支承枠の通気口に連通せしめた筒状真空室形成体とをもって構成してなるものを挙げることができる。
More specifically, the vacuum defoaming device having the above-described structure is established on a support frame fixed at the position of the top opening of the heat-insulating chamber for heating in the base frame and an upper horizontal plate of the support frame. a vent connected to a vacuum device, is caused to lift at a predetermined timing in an appropriate lifting means and said support frame have, with eggplant hear Redirecting a by the diameter of the printed circuit board the lower opening, the supporting frame of the upper opening with the bellows And a cylindrical vacuum chamber forming body communicated with the vent.

本発明は上記の如き構成であるから、プリント基板に電子部品を固定させる半田バンプを形成した場合、これをリフローするときに同時に真空脱泡して半田バンプ内の気泡を抜き、もって半田バンプ内にボイドと称される空洞ができないようにすることができるものである。   Since the present invention is configured as described above, when a solder bump for fixing an electronic component to a printed circuit board is formed, when the reflow is performed, vacuum deaeration is performed at the same time to remove bubbles in the solder bump. It is possible to prevent the formation of voids called voids.

また予熱、本加熱、冷却の各処理を水平方向に円を描くようにして順次行うようにしたものであるから、従来装置におけるが如く長くならず、設置スペースを縮小することができる。また基枠に設けた入口と出口を共用する一つのプリント基板出入口だけでプリント基板の出入りをするようになしたから、漏出する窒素ガスの量を極力減少させることができる。   Further, since the preheating, main heating, and cooling processes are sequentially performed in a horizontal circle, the length is not increased as in the conventional apparatus, and the installation space can be reduced. In addition, since the printed circuit board enters and exits only by one printed circuit board entrance / exit that shares the entrance and exit provided in the base frame, the amount of nitrogen gas that leaks out can be reduced as much as possible.

本発明を実施するための最良の形態は、側壁の後記プリント基板移送装置の支持枠と一致する高さの位置の一箇所にプリント基板出入口を設けた平面円形の箱形の基枠内に、供給・取り出し兼用スペース、予熱用断熱室、本加熱用断熱室、冷却用断熱室を水平方向に円を描くようにして等間隔に並設し、これら予熱用断熱室、本加熱用断熱室、冷却用断熱室には後記プリント基板移送装置の支持枠が自由に出入りすることができるように内壁と側壁に切欠きを設けると共に、夫々の内部におけるプリント基板移送装置の支持枠が旋回する位置よりも下部に、適宜の加熱手段を設置し、また前記基枠の中心部に所要の駆動機構をもって水平方向に間欠回転せしめられるプリント基板移送装置を設置し、該プリント基板移送装置に、前記供給・取り出し兼用スペース、予熱用断熱室、本加熱用断熱室、冷却用断熱室の夫々に入り込む支持枠を放射状に取り付け、更に本加熱用断熱室に、所定のタイミングで、支持枠に支持したプリント基板の半田バンプ形成面に対して真空脱泡を行う真空脱泡装置を備えることにある。   In the best mode for carrying out the present invention, a flat circular box-shaped base frame provided with a printed circuit board entrance / exit at one position at a height coinciding with a support frame of a post-printed circuit board transfer device on the side wall, Space for supplying and taking out, heat insulation room for preheating, heat insulation room for main heating, heat insulation room for cooling are arranged in parallel at equal intervals in a horizontal direction. These heat insulation room for preheating, heat insulation room for main heating, The cooling heat insulation chamber is provided with notches on the inner wall and the side wall so that the support frame of the printed board transfer device described later can freely enter and exit, and from the position where the support frame of the printed board transfer device in each interior turns. In addition, an appropriate heating means is installed at the lower part, and a printed board transfer device that is intermittently rotated in the horizontal direction with a required drive mechanism is installed at the center of the base frame. Take A printed circuit board that is supported by the support frame at a predetermined timing in the heating insulation chamber, which is attached to each of the extraction space, the preheating insulation chamber, the main heating insulation chamber, and the cooling insulation chamber in a radial manner. And providing a vacuum defoaming device for performing vacuum defoaming on the solder bump forming surface.

以下、本発明の実施例について、説明する。
図1は本発明の一部切欠して示した側面図、図2は図1中A−A線断面図、図3は本発明における真空脱泡装置部分の拡大断面図、図4は図3中B−B線断面図、図5は真空脱泡装置部分の平面図、図6は真空脱泡装置の脱泡時の状態の部分拡大断面図、図7は真空脱泡装置部分の非脱泡時の状態の断面図、図8は本リフロー装置の実装装置における配置説明図である。
Examples of the present invention will be described below.
1 is a partially cutaway side view of the present invention, FIG. 2 is a cross-sectional view taken along the line AA in FIG. 1, FIG. 3 is an enlarged cross-sectional view of a vacuum degassing apparatus portion in the present invention, and FIG. FIG. 5 is a plan view of the vacuum defoaming device portion, FIG. 6 is a partially enlarged sectional view of the vacuum defoaming device during defoaming, and FIG. Sectional drawing of the state at the time of foaming, FIG. 8 is arrangement | positioning explanatory drawing in the mounting apparatus of this reflow apparatus.

図中、1は平面円形の箱形をなす基枠であり、支持台2上に設置されている。また、該基枠1の側壁の後記プリント基板移送装置の支持枠と一致する高さの位置の一箇所にはプリント基板出入口3を設けている。   In the figure, reference numeral 1 denotes a base frame having a flat circular box shape, which is installed on the support base 2. In addition, a printed circuit board entrance 3 is provided at one position at a height that coincides with a support frame of the printed circuit board transfer device described later on the side wall of the base frame 1.

4は前記基枠1の内部において前記基枠1の出入口3と一致する位置に位置する供給・取り出し兼用スペース、5、6、7は順次加熱温度が高くなる予熱用断熱室、8は後記加熱手段によりクリーム半田が溶ける温度に加熱する本加熱用断熱室、9は本加熱用断熱室8より低い温度で加熱する冷却用断熱室である。   4 is a supply / extraction space located inside the base frame 1 at a position coinciding with the entrance / exit 3 of the base frame 1, 5, 6 and 7 are preheating heat insulation chambers in which the heating temperature is sequentially increased, and 8 is heating described later A main heating heat-insulating chamber 9 is heated to a temperature at which the cream solder is melted by means, and a cooling heat-insulating chamber 9 is heated at a lower temperature than the main heat-insulating chamber 8.

そして、これら供給・取り出し兼用スペース4、予熱用断熱室5、6、7、本加熱用断熱室8、冷却用断熱室9は水平方向に円を描くように等間隔に並設されている。そしてこれらには水平方向に間欠回転する後記プリント基板移送装置の支持枠が自由に出入りすることができるように内壁と側壁に切欠き10を設けている。   The supply / extraction space 4, the preheating heat insulation chambers 5, 6, and 7, the main heating heat insulation chamber 8, and the cooling heat insulation chamber 9 are arranged in parallel at equal intervals so as to draw a circle in the horizontal direction. These are provided with notches 10 on the inner wall and the side wall so that the support frame of the post-printing board transfer device which rotates intermittently in the horizontal direction can freely enter and exit.

また、前記予熱用断熱室5、6、7は夫々窒素ガスの雰囲気下で後記ホットプレートをもって所定温度で加熱するようになされており、本実施例においては、順次150℃、170℃、190℃に加熱温度が設定されている。また、本加熱用断熱室8は、後記ホットプレート等の加熱手段をもってクリーム半田が溶ける230℃の温度に設定されている。また、冷却用断熱室9は170℃に加熱温度が設定されている。   The preheating heat insulation chambers 5, 6, and 7 are each heated at a predetermined temperature with a hot plate to be described later in an atmosphere of nitrogen gas. In this embodiment, 150 ° C., 170 ° C., 190 ° C. Is set to the heating temperature. Further, the main heat insulation chamber 8 is set to a temperature of 230 ° C. at which the cream solder is melted by a heating means such as a hot plate described later. Further, the heating temperature of the cooling heat insulation chamber 9 is set to 170 ° C.

そしてまた、これら予熱用断熱室5、6、7と冷却用断熱室9には、その内部における後記プリント基板移送装置の支持枠の旋回する位置よりも下部に、上下方向移動自在に加熱用のホットプレート11を設置している。   In addition, the preheating heat insulation chambers 5, 6, 7 and the cooling heat insulation chamber 9 have heating portions that are movable in the vertical direction below the position where the support frame of the printed board transfer device described later turns. A hot plate 11 is installed.

12、13は本加熱用断熱室8内に設置する加熱手段であり、一方の加熱手段12は、後記プリント基板移送装置の支持枠の旋回する位置よりも下部に、上下方向移動自在に設置されたホットプレートであり、またもう一方の加熱手段13は、後記真空脱泡装置における筒状真空室形成体内に配置されたヒータである。尚、該加熱手段13であるヒータは、後記真空脱泡装置における支承枠の上部水平板から垂設された支持杆14及びこれの下端部に固着された円形支持板15をもって支持されている。   Reference numerals 12 and 13 denote heating means installed in the heat insulation chamber 8 for heating. One heating means 12 is installed below the position where the support frame of the printed board transfer device, which will be described later, turns so as to be vertically movable. The other heating means 13 is a heater disposed in a cylindrical vacuum chamber forming body in a vacuum degassing apparatus described later. The heater as the heating means 13 is supported by a support rod 14 suspended from an upper horizontal plate of a support frame and a circular support plate 15 fixed to the lower end of the support frame in a vacuum defoaming apparatus described later.

16は基枠1の中心部に設け、所要の駆動機構をもって水平方向に間欠回転せしめられるプリント基板移送装置であり、前記供給・取り出し兼用スペース4、予熱用断熱室5、6、7、本加熱用断熱室8、冷却用断熱室9の夫々に入り込む支持枠17、17、17・・・を放射状に取り付けている。また、該プリント基板移送装置16は、20〜30秒間毎に隣接する断熱室間の距離に相当する分のストロークで回転するものである。   Reference numeral 16 denotes a printed circuit board transfer device which is provided at the center of the base frame 1 and is intermittently rotated in the horizontal direction with a required drive mechanism. The supply / removal space 4, the preheating heat insulation chambers 5, 6, 7 and the main heating. Support frames 17, 17, 17... Entering the heat insulation chamber 8 and the cooling heat insulation chamber 9 are attached radially. The printed circuit board transfer device 16 rotates at a stroke corresponding to the distance between adjacent heat insulating chambers every 20 to 30 seconds.

18は本加熱用断熱室8に備えた真空脱泡装置であり、所定のタイミングで、前記支持枠17、17、17・・・に支持したプリント基板Pの半田バンプ形成面に対して真空脱泡を行うものである。   Reference numeral 18 denotes a vacuum defoaming device provided in the heat insulation chamber 8 for heating. At a predetermined timing, vacuum degassing is performed on the solder bump forming surface of the printed circuit board P supported by the support frames 17, 17, 17. It is what foams.

また、該真空脱泡装置18は、本実施例においては、基枠1における本加熱用断熱室8の頂部開口8aの位置に固定した支承枠19と、該支承枠19の上部水平板19aに開設し、適宜の真空装置(図示せず。)に接続した通気口20と、適宜の昇降手段をもって前記支承枠19内において所定のタイミングで昇降せしめられ、下部開口21をプリント基板Pの直径より大きくなすと共に、上部開口22をベローズ23をもって前記支承枠19の通気口20に連通せしめた筒状真空室形成体24とをもって構成している。

Further, in this embodiment, the vacuum defoaming device 18 is attached to a support frame 19 fixed to the position of the top opening 8a of the main heat insulation chamber 8 in the base frame 1 and an upper horizontal plate 19a of the support frame 19. Opened and vented at a predetermined timing in the support frame 19 with a vent 20 connected to a suitable vacuum device (not shown) and a suitable lifting means, the lower opening 21 is made to match the diameter of the printed circuit board P. Redirecting a together listening eggplant, and an upper opening 22 with a bellows 23 constructed with a cylindrical vacuum chamber forming body 24 which allowed communication with the vent 20 of the bearing frame 19.

また、前記昇降手段は、本実施例においては、支承枠19の上部水平板19aに垂直に固着したシリンダ25と、支承枠19の上部水平板19aに設けたガイドポスト26をもって垂直方向移動自在に支持され、下端部を前記筒状真空室形成体24の頂部外縁部に接続すると共に上端部を連結板27を介して前記シリンダ25のピストンロッド25aに接続した支持杆28とをもって構成している。そしてまた、前記筒状真空室形成体24の下端外縁部にパッキン29を備えると共に、支持枠17の下面に、プリント基板支持部を取り囲むようにパッキン30を備えている。   In the present embodiment, the elevating means is vertically movable by a cylinder 25 fixed perpendicularly to the upper horizontal plate 19a of the support frame 19 and a guide post 26 provided on the upper horizontal plate 19a of the support frame 19. The lower end is connected to the top outer edge of the cylindrical vacuum chamber forming body 24 and the upper end is connected to the piston rod 25a of the cylinder 25 via the connecting plate 27. . In addition, a packing 29 is provided on the outer edge of the lower end of the cylindrical vacuum chamber forming body 24, and a packing 30 is provided on the lower surface of the support frame 17 so as to surround the printed circuit board support.

また、その他図中31はローダー、32は印刷装置、33、34はマウンタ、35はアンローダーである。また、該アンローダー35は、本実施例にあっては基枠1の側部に並べて配置している。これにより従来の上記L2の長さ分の設置スペースを少なくすることができる。   In the other figures, 31 is a loader, 32 is a printing device, 33 and 34 are mounters, and 35 is an unloader. The unloader 35 is arranged side by side on the side of the base frame 1 in this embodiment. Thereby, the installation space for the length of the conventional L2 can be reduced.

次に、本実施例の作用について説明する。
基枠1のプリント基板出入口3からハンドラー(図示せず。)をもって供給・取り出し兼用スペース4内にプリント基板Pを供給する。このときプリント基板移送装置16は回転を停止しており、プリント基板Pはプリント基板移送装置の支持枠17によって保持される。次にプリント基板移送装置16は上部から看て時計方向に一ストローク分回転し、前記のプリント基板Pは予熱用断熱室5に移動する。そしてここにおいて予備加熱される。そしてまた予熱用断熱室5から順次より高温の予熱用断熱室6、7を経て本加熱用断熱室8に送り込まれ、ここにおいてクリーム半田が溶ける温度での加熱が行われる。そしてその後冷却用断熱室9において冷却され、一連の処理工程を終了するものである。そしてその後再び基枠1のプリント基板出入口3からハンドラーをもって取り出され、基枠1の側部に配置したアンローダー35に送り込まれるものである。また、基枠1のプリント基板出入口3からは、プリント基板移送装置16が一ストローク分回転する毎にプリント基板Pを一枚宛出し入れするが、一連の処理工程を終了したものを出した後に次の新しいプリント基板Pを入れるようにするものである。
Next, the operation of this embodiment will be described.
The printed circuit board P is supplied into the supply / removal space 4 from the printed circuit board entrance 3 of the base frame 1 with a handler (not shown). At this time, the printed board transfer device 16 stops rotating, and the printed board P is held by the support frame 17 of the printed board transfer device. Next, the printed circuit board transfer device 16 rotates clockwise by one stroke as viewed from above, and the printed circuit board P moves to the preheating heat insulation chamber 5. And it preheats here. Then, the heat is transferred from the preheating heat insulating chamber 5 to the main heating heat insulating chamber 8 sequentially through the higher temperature preheating heat insulating chambers 6 and 7, where heating at a temperature at which the cream solder is melted is performed. And it cools in the heat insulation chamber 9 for cooling after that, and complete | finishes a series of process steps. Then, it is taken out again from the printed circuit board entrance 3 of the base frame 1 with a handler and sent to an unloader 35 arranged on the side of the base frame 1. Further, each time the printed circuit board transfer device 16 is rotated by one stroke, the printed circuit board P is addressed to / from the printed circuit board entrance / exit 3 of the base frame 1. The new printed circuit board P is inserted.

そしてまた、前記本加熱用断熱室8においては、プリント基板Pに対して、二つの加熱手段12、13によって上下から加熱が行われ、そしてこれと同時に真空脱泡装置18によってプリント基板Pの半田バンプ形成面に対して真空脱泡が行われるものである。   In the main heat insulation chamber 8, the printed board P is heated from above and below by the two heating means 12 and 13, and at the same time, the vacuum degassing device 18 solders the printed board P. Vacuum defoaming is performed on the bump forming surface.

また、この真空脱泡の点について更に詳細に説明すると、次に処理すべきプリント基板Pが本加熱用断熱室8内に送られるまでは図7に示す如く、真空脱泡装置18における筒状真空室形成体24は上昇している。尚、この上昇は、シリンダ25を作動させることによって行い、シリンダ25が作動してそのピストンロッド25aが伸出すると、連結板27と支持杆28を介して筒状真空室形成体24が引き上げられるものである。そして、次に処理すべきプリント基板Pが本加熱用断熱室8内に送られると、図3及び図6に示す如く、シリンダ25が上記と逆に作用し、真空脱泡装置18における筒状真空室形成体24が降下して、その下端部のパッキン29が支持枠17に当接する。そしてこの状態において加熱しつつ支承枠19の通気口20から真空装置により内部の空気を吸引し、真空脱泡を行うものである。   Further, this vacuum defoaming point will be described in more detail. Until the printed board P to be processed next is sent into the heat insulation chamber 8 for heating, as shown in FIG. The vacuum chamber forming body 24 is raised. The ascending is performed by operating the cylinder 25. When the cylinder 25 is operated and the piston rod 25a extends, the cylindrical vacuum chamber forming body 24 is pulled up via the connecting plate 27 and the support rod 28. Is. Then, when the printed board P to be processed next is sent into the main heat insulation chamber 8, the cylinder 25 acts in the reverse direction as shown in FIGS. The vacuum chamber forming body 24 is lowered, and the packing 29 at the lower end thereof comes into contact with the support frame 17. And in this state, while heating, the inside air is sucked from the vent 20 of the support frame 19 by a vacuum device to perform vacuum defoaming.

本発明の一部切欠して示した側面図である。It is the side view shown notched in part of the present invention. 図1中A−A線断面図である。It is the sectional view on the AA line in FIG. 本発明における真空脱泡装置部分の拡大断面図である。It is an expanded sectional view of the vacuum deaerator part in the present invention. 図3中B−B線断面図である。FIG. 5 is a sectional view taken along line BB in FIG. 3. 真空脱泡装置部分の平面図である。It is a top view of a vacuum deaerator part. 真空脱泡装置の脱泡時の状態の部分拡大断面図である。It is a partial expanded sectional view of the state at the time of defoaming of a vacuum defoaming apparatus. 真空脱泡装置の非脱泡時の状態の断面図である。It is sectional drawing of the state at the time of the non-defoaming of a vacuum degassing apparatus. 本リフロー装置の実装装置における配置説明図である。It is arrangement | positioning explanatory drawing in the mounting apparatus of this reflow apparatus. 従来の実装装置の配置構成の説明図である。It is explanatory drawing of the arrangement configuration of the conventional mounting apparatus. ボイドができた半田バンプの断面図である。It is sectional drawing of the solder bump in which the void was made.

符号の説明Explanation of symbols

1 基枠
3 プリント基板出入口
4 供給・取り出し兼用スペース
5、6、7 予熱用断熱室
8 本加熱用断熱室
9 冷却用断熱室
11 ホットプレート
12、13 本加熱用断熱室内の加熱手段
16 プリント基板移送装置
17、17 支持枠
18 真空脱泡装置
19 支承枠
20 通気口
21 下部開口
22 上部開口
23 ベローズ
24 筒状真空室形成体
25 シリンダ
28 支持杆
DESCRIPTION OF SYMBOLS 1 Base frame 3 Printed board entrance / exit 4 Supply / take-out space 5, 6, 7 Heat insulation room for preheating 8 Heat insulation room for heating 9 Heat insulation room for cooling 11 Hot plate 12, 13 Heating means in heat insulation room for heating 16 Printed circuit board Transfer device 17, 17 Support frame 18 Vacuum defoaming device 19 Support frame 20 Vent 21 Lower opening 22 Upper opening 23 Bellows 24 Cylindrical vacuum chamber forming body 25 Cylinder 28 Support rod

Claims (1)

側壁の後記プリント基板移送装置の支持枠と一致する高さの位置の一箇所にプリント基板出入口を設けた平面円形の箱形の基枠内に、供給・取り出し兼用スペース、予熱用断熱室、本加熱用断熱室、冷却用断熱室を水平方向に円を描くようにして等間隔に並設し、これら予熱用断熱室、本加熱用断熱室、冷却用断熱室には後記プリント基板移送装置の支持枠が自由に出入りすることができるように内壁と側壁に切欠きを設けると共に、夫々の内部におけるプリント基板移送装置の支持枠が旋回する位置よりも下部に、適宜の加熱手段を設置し、また前記基枠の中心部に所要の駆動機構をもって水平方向に間欠回転せしめられるプリント基板移送装置を設置し、該プリント基板移送装置に、前記供給・取り出し兼用スペース、予熱用断熱室、本加熱用断熱室、冷却用断熱室の夫々に入り込む支持枠を放射状に取り付け、更に本加熱用断熱室に、所定のタイミングで、支持枠に支持したプリント基板の半田バンプ形成面に対して真空脱泡を行う真空脱泡装置を備えてなるリフロー装置であって、前記真空脱泡装置が、基枠における本加熱用断熱室の頂部開口の位置に固定した支承枠と、該支承枠の上部水平板に開設し、適宜の真空装置に接続した通気口と、適宜の昇降手段をもって前記支承枠内において所定のタイミングで昇降せしめられ、下部開口をプリント基板の直径より大きくなすと共に、上部開口をベローズをもって前記支承枠の通気口に連通せしめた筒状真空室形成体とをもって構成してなる真空脱泡装置であるリフロー装置。
In the flat circular box-shaped base frame provided with a printed circuit board entrance / exit at one location at a height that matches the support frame of the printed circuit board transfer device described later on the side wall, a supply / extraction space, a heat insulation chamber for preheating, a book The heat insulation chamber for heating and the heat insulation chamber for cooling are arranged in parallel at equal intervals so as to draw a circle in the horizontal direction. These heat insulation chamber for preheating, heat insulation chamber for main heating, and heat insulation chamber for cooling are described below. In addition to providing notches on the inner wall and side walls so that the support frame can freely enter and exit, appropriate heating means are installed below the position where the support frame of the printed circuit board transfer device in each interior turns, In addition, a printed circuit board transfer device that is intermittently rotated in the horizontal direction with a required drive mechanism is installed at the center of the base frame. The printed circuit board transfer device includes the supply / removal space, the preheating heat insulation chamber, the book The support frames that enter the heat insulation chamber and the cooling insulation chamber are attached in a radial pattern, and the vacuum insulation is removed from the solder bump formation surface of the printed circuit board supported by the support frame at a predetermined timing in the heat insulation chamber. A reflow apparatus comprising a vacuum defoaming apparatus for performing foaming, wherein the vacuum defoaming apparatus is fixed at a position of the top opening of the heat insulating chamber for heating in the base frame, and an upper horizontal portion of the support frame. opened to the plate, and appropriate vent connected to a vacuum device, is caused to lift at a predetermined timing in an appropriate lifting means and said support frame have, with eggplant hear Redirecting a by the diameter of the printed circuit board the lower opening, the upper opening A reflow device which is a vacuum degassing device comprising a cylindrical vacuum chamber forming body which is communicated with a vent of the support frame with a bellows.
JP2004175316A 2004-06-14 2004-06-14 Reflow device Expired - Fee Related JP4388859B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004175316A JP4388859B2 (en) 2004-06-14 2004-06-14 Reflow device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004175316A JP4388859B2 (en) 2004-06-14 2004-06-14 Reflow device

Publications (2)

Publication Number Publication Date
JP2005353965A JP2005353965A (en) 2005-12-22
JP4388859B2 true JP4388859B2 (en) 2009-12-24

Family

ID=35588151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004175316A Expired - Fee Related JP4388859B2 (en) 2004-06-14 2004-06-14 Reflow device

Country Status (1)

Country Link
JP (1) JP4388859B2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007214165A (en) * 2006-02-07 2007-08-23 Casio Comput Co Ltd Reflow device and reflow method
KR100984322B1 (en) 2008-08-20 2010-09-30 삼성전기주식회사 reflow device
GB2473600B (en) 2009-08-25 2013-09-25 Pillarhouse Int Ltd Quick-loading soldering apparatus
JP2011245527A (en) * 2010-05-28 2011-12-08 Yokota Technica:Kk Treatment device
DE112011103874T5 (en) * 2010-11-23 2013-08-22 Mitsubishi Electric Corporation Reflow soldering and reflow soldering
KR101491992B1 (en) * 2013-01-08 2015-02-10 (주)에스티아이 Continuous treatment method of semiconductor wafer
KR101839717B1 (en) 2013-12-25 2018-03-16 센주긴조쿠고교 가부시키가이샤 Vacuum soldering apparatus and control method therefor
JP2015123503A (en) * 2014-08-21 2015-07-06 千住金属工業株式会社 Vacuum soldering apparatus, and control method therein
KR101704260B1 (en) 2015-09-14 2017-02-07 엘지전자 주식회사 A Semiconductor Module and A Manufacturing method thereof
CN116967559B (en) * 2023-09-21 2023-12-08 微网优联科技(成都)有限公司 Device and method for rapidly and precisely welding connector lug on PCB for camera

Also Published As

Publication number Publication date
JP2005353965A (en) 2005-12-22

Similar Documents

Publication Publication Date Title
JP4388859B2 (en) Reflow device
US8268074B2 (en) Method and device for producing oriented solidified blocks made of semi-conductor material
WO2012086533A1 (en) Reflow soldering apparatus and method therefor
JPWO2015011785A1 (en) Soldering apparatus and vacuum soldering method
JP5801047B2 (en) Reflow soldering apparatus and method
JPH11233934A (en) Soldering apparatus
CN113405990A (en) Method for detecting welding spot of integrated circuit
JP2011171714A5 (en)
WO2006048931A1 (en) Column suction head and column mounting method
JP4569485B2 (en) Reflow soldering method and apparatus
KR101213644B1 (en) Apparatus for withdrawing flux for reflow soldering machine
JP6341625B2 (en) Heat treatment equipment
US20040211817A1 (en) System for fabricating an integrated circuit package on a printed circuit board
JP3944438B2 (en) Reflow device
JP2006116824A (en) Printing method of electrically conductive ink and printing equipment of electrically conductive ink
JP2004111517A (en) Reflowing apparatus
US6499994B1 (en) Heating apparatus in reflow system
JP3014989B2 (en) Electronic component manufacturing equipment
JP2014047391A (en) Pretreatment method and pretreatment apparatus
JP2008284557A (en) Heating/cooling apparatus
CN213531296U (en) Camera module welding equipment
KR100627948B1 (en) Heating device of a reflow device
KR200284170Y1 (en) Boat for Semiconductor Wafer Deposition Equipment
JP4888097B2 (en) Soldering method and electronic device manufacturing method
KR100860276B1 (en) Plasma Display Panel cooling system

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20061218

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090416

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090513

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090706

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090824

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090824

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20090914

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20091005

R150 Certificate of patent or registration of utility model

Ref document number: 4388859

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121009

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121009

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131009

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131009

Year of fee payment: 4

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131009

Year of fee payment: 4

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees