JP4370854B2 - 圧電アクチュエータおよびこれを備えた装置 - Google Patents

圧電アクチュエータおよびこれを備えた装置 Download PDF

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Publication number
JP4370854B2
JP4370854B2 JP2003297820A JP2003297820A JP4370854B2 JP 4370854 B2 JP4370854 B2 JP 4370854B2 JP 2003297820 A JP2003297820 A JP 2003297820A JP 2003297820 A JP2003297820 A JP 2003297820A JP 4370854 B2 JP4370854 B2 JP 4370854B2
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piezoelectric element
contact
contact member
vibration
piezoelectric actuator
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JP2003297820A
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Japanese (ja)
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JP2005073341A (ja
JP2005073341A5 (enrdf_load_stackoverflow
Inventor
浩一 上條
昇 櫻井
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2003297820A priority Critical patent/JP4370854B2/ja
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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2003297820A 2003-08-21 2003-08-21 圧電アクチュエータおよびこれを備えた装置 Expired - Fee Related JP4370854B2 (ja)

Priority Applications (1)

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JP2003297820A JP4370854B2 (ja) 2003-08-21 2003-08-21 圧電アクチュエータおよびこれを備えた装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003297820A JP4370854B2 (ja) 2003-08-21 2003-08-21 圧電アクチュエータおよびこれを備えた装置

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JP2005073341A JP2005073341A (ja) 2005-03-17
JP2005073341A5 JP2005073341A5 (enrdf_load_stackoverflow) 2006-10-05
JP4370854B2 true JP4370854B2 (ja) 2009-11-25

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JP2003297820A Expired - Fee Related JP4370854B2 (ja) 2003-08-21 2003-08-21 圧電アクチュエータおよびこれを備えた装置

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JP (1) JP4370854B2 (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008297677A (ja) * 2007-06-01 2008-12-11 Toyota Industries Corp 紡機における繊維束案内装置
JP2009254198A (ja) 2008-04-10 2009-10-29 Sharp Corp 超音波モータおよび超音波振動子
JP5479027B2 (ja) * 2009-10-28 2014-04-23 京セラ株式会社 発電部材およびこれを用いた発電装置
JP5499695B2 (ja) * 2009-12-25 2014-05-21 セイコーエプソン株式会社 圧電振動体、圧電アクチュエーター、電子機器及び圧電振動体の製造方法
JP5776270B2 (ja) 2011-03-29 2015-09-09 セイコーエプソン株式会社 圧電アクチュエーター、モーター、ロボットハンドおよびロボット
JP5929138B2 (ja) 2011-12-06 2016-06-01 セイコーエプソン株式会社 圧電モーターおよびロボット
JP2017034782A (ja) * 2015-07-30 2017-02-09 セイコーエプソン株式会社 圧電駆動装置、ロボット、ポンプ、及び圧電駆動装置の製造方法
JP2018019529A (ja) * 2016-07-28 2018-02-01 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボットおよび電子部品搬送装置

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JP2005073341A (ja) 2005-03-17

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