JP4370378B2 - 多孔質膜およびその生成装置と生成方法 - Google Patents
多孔質膜およびその生成装置と生成方法 Download PDFInfo
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- JP4370378B2 JP4370378B2 JP2004045546A JP2004045546A JP4370378B2 JP 4370378 B2 JP4370378 B2 JP 4370378B2 JP 2004045546 A JP2004045546 A JP 2004045546A JP 2004045546 A JP2004045546 A JP 2004045546A JP 4370378 B2 JP4370378 B2 JP 4370378B2
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- liquid
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- 239000012528 membrane Substances 0.000 title claims description 27
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 239000007788 liquid Substances 0.000 claims description 48
- 239000000126 substance Substances 0.000 claims description 30
- 239000002994 raw material Substances 0.000 claims description 26
- 239000011148 porous material Substances 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 19
- 239000003638 chemical reducing agent Substances 0.000 claims description 10
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 239000003921 oil Substances 0.000 claims description 5
- 229910021426 porous silicon Inorganic materials 0.000 claims description 2
- 239000010408 film Substances 0.000 description 55
- 239000007789 gas Substances 0.000 description 11
- 239000000463 material Substances 0.000 description 10
- 238000002156 mixing Methods 0.000 description 8
- 229910010271 silicon carbide Inorganic materials 0.000 description 7
- 238000009413 insulation Methods 0.000 description 6
- 239000006185 dispersion Substances 0.000 description 5
- SNRUBQQJIBEYMU-UHFFFAOYSA-N dodecane Chemical compound CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 230000001603 reducing effect Effects 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- SNRUBQQJIBEYMU-NJFSPNSNSA-N dodecane Chemical group CCCCCCCCCCC[14CH3] SNRUBQQJIBEYMU-NJFSPNSNSA-N 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Other Surface Treatments For Metallic Materials (AREA)
- Plasma Technology (AREA)
- Turbine Rotor Nozzle Sealing (AREA)
Description
2.容器
3.原料液体
4.超音波照射手段
5.電磁波照射手段
6.基板
7.空孔形成物供給手段
8.ポンプ
9.還元剤分散混合装置
10.配管
Claims (6)
- 膜を形成する物質を含む原料液体を保持するための容器と、膜中に空孔を生じさせる物質を供給するための空孔形成物供給手段と、液体中に電磁波を照射して液中でプラズマを発生させるための電磁波照射手段と、液体中で基板を保持する基板取り付け部とを有する多孔質膜生成装置。
- 膜を形成する物質を含む原料液体中に基板を保持し、膜中に空孔を生じさせる物質を原料液体中に供給しながら原料液体中に電磁波を照射して基板表面でプラズマを発生させ、基板上に多孔質膜を生成することを特徴とする多孔質膜生成方法。
- 原料液体としてシリコンオイルを含む液体を使用し、多孔質のシリコンカーバイド膜を生成する請求項2に記載の多孔質膜生成方法。
- 膜中に空孔を生じさせる物質として水を使用する請求項2または請求項3に記載の多孔質膜生成方法。
- 液体中に還元剤を供給することを特徴とする請求項2乃至請求項4のいずれ記載の多孔質膜生成方法。
- 請求項2乃至請求項5のいずれかに記載の多孔質膜生成方法によって生成される多孔質膜。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2004045546A JP4370378B2 (ja) | 2004-02-23 | 2004-02-23 | 多孔質膜およびその生成装置と生成方法 |
Applications Claiming Priority (1)
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JP2004045546A JP4370378B2 (ja) | 2004-02-23 | 2004-02-23 | 多孔質膜およびその生成装置と生成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005232555A JP2005232555A (ja) | 2005-09-02 |
JP4370378B2 true JP4370378B2 (ja) | 2009-11-25 |
Family
ID=35015810
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004045546A Expired - Lifetime JP4370378B2 (ja) | 2004-02-23 | 2004-02-23 | 多孔質膜およびその生成装置と生成方法 |
Country Status (1)
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JP (1) | JP4370378B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI405608B (zh) * | 2005-03-25 | 2013-08-21 | Mitsubishi Rayon Co | 表面處理方法以及被表面處理的物品 |
JP4611914B2 (ja) * | 2006-02-28 | 2011-01-12 | トーカロ株式会社 | 圧縮機翼及びその製造方法、並びに、火力発電用ガスタービン |
JP5246710B2 (ja) * | 2009-06-16 | 2013-07-24 | 国立大学法人愛媛大学 | 液中プラズマを用いた成膜方法および液中プラズマ成膜装置 |
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2004
- 2004-02-23 JP JP2004045546A patent/JP4370378B2/ja not_active Expired - Lifetime
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Publication number | Publication date |
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JP2005232555A (ja) | 2005-09-02 |
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