JP4354259B2 - Slag separation method in silicon refining - Google Patents

Slag separation method in silicon refining Download PDF

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JP4354259B2
JP4354259B2 JP2003397375A JP2003397375A JP4354259B2 JP 4354259 B2 JP4354259 B2 JP 4354259B2 JP 2003397375 A JP2003397375 A JP 2003397375A JP 2003397375 A JP2003397375 A JP 2003397375A JP 4354259 B2 JP4354259 B2 JP 4354259B2
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slag
silicon
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JP2005154217A (en
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健介 岡澤
潔 後藤
正樹 岡島
次郎 近藤
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Nippon Steel Chemical and Materials Co Ltd
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Description

本発明は、太陽電池用高純度シリコンの製造工程に用いるスラグによるシリコン精錬方法に関する。   The present invention relates to a silicon refining method using slag used in a process for producing high-purity silicon for solar cells.

従来、スラグを用いたシリコンの精錬方法は種々提案されている。この中で、スラグとシリコンを分離することを明記している提案は、(特許文献1)と(特許文献2)が挙げられる。しかし、これらはスラグ精錬の工程の一部として分離を述べているだけであり、具体的方法については記述していない。   Conventionally, various silicon refining methods using slag have been proposed. Among these, (Patent Document 1) and (Patent Document 2) can be cited as proposals that specify the separation of slag and silicon. However, these only describe separation as part of the slag refining process, and do not describe specific methods.

また、(特許文献3)は、シリコンの酸化又は揮発精錬方法においての容器を提案しており、図1に示すように、容器1の底に設けた穴2からシリコン3を外に出す方法を提案している。しかし、この提案は、シリコンを注出する方法であり、シリコンを残存させたままスラグを容器外に除去する方法ではない。   Further, (Patent Document 3) proposes a container in a method for oxidizing or volatilizing silicon, and as shown in FIG. 1, a method for bringing silicon 3 out from a hole 2 provided in the bottom of the container 1 is proposed. is suggesting. However, this proposal is a method of pouring out silicon, not a method of removing slag outside the container while leaving the silicon remaining.

したがって、スラグによるシリコンの精錬において、容器内に精錬シリコンを残したままスラグをルツボ外に除去する方法についての従来提案はない。
特開2003−12317号公報 特開平8−73209号公報 特開平11−189407号公報
Therefore, in the refining of silicon by slag, there is no conventional proposal for a method of removing slag outside the crucible while leaving the refined silicon in the vessel.
JP 2003-12317 A JP-A-8-73209 JP-A-11-189407

シリコンのスラグ精錬では、図2に示すように、主にシリコン3中の不純物(ボロン、燐)4をスラグ5に移行させ、シリコン3を高純度化していく。この精錬工程において、ある一定時間を経過するとスラグ5中の不純物4の除去能力は低下してくる。そこで、図3に示すように除去能力の低下したスラグ6を容器1外に除去し、新しいスラグ7を添加する必要性が生じるものの、これまで効率のよいスラグ除去方法がなかった。   In the slag refining of silicon, as shown in FIG. 2, the impurities (boron, phosphorus) 4 in the silicon 3 are mainly transferred to the slag 5, and the silicon 3 is highly purified. In this refining process, the ability to remove the impurities 4 in the slag 5 decreases after a certain period of time. Therefore, as shown in FIG. 3, there is a need to remove the slag 6 with reduced removal ability outside the container 1 and add a new slag 7, but there has been no efficient slag removal method so far.

そこで、本発明は、スラグによるシリコンの精錬において、効率よくスラグを除去する方法を提供することを目的とするものである。   Therefore, an object of the present invention is to provide a method for efficiently removing slag in refining silicon using slag.

本発明は、上記課題を解決するためになされたもので、
(1)シリコンの精錬の途中又は終了後の一方又は両方で、シリコン及びスラグの入った容器を90°未満に傾け、ジグを用いてスラグをかき出すことによってスラグを除去することを特徴とするシリコン精錬におけるスラグ分離方法、
(2)前記ジグが、棒の先端に板が付いた形状で、板の幅は容器内径あるいは一辺の1/3以下、高さが10mm以上100mm以下である(1)記載のシリコン精錬におけるスラグ分離方法、
(3)前記ジグの材質がカーボンである(1)又は(2)に記載のシリコン精錬におけるスラグ分離方法、
(4)前記スラグの粘性が0.1poise以上、5poise以下である(1)記載のシリコン精錬におけるスラグ分離方法、
(5)スラグをかき出す直前にスラグ成分を調節し、粘性を制御する(4)記載のシリコン精錬におけるスラグ分離方法、
である。
The present invention has been made to solve the above problems,
(1) Silicon characterized in that the slag is removed by tilting the container containing silicon and slag to less than 90 ° during or after the refining of silicon and tilting the slag with a jig. Slag separation method in refining,
(2) The slag in silicon refining as described in (1), wherein the jig has a shape with a plate attached to the tip of the rod, the width of the plate is 1/3 or less of the inner diameter of the container or one side, and the height is 10 mm to 100 mm. Separation method,
(3) The slag separation method in silicon refining according to (1) or (2), wherein the jig is made of carbon.
(4) The method for separating slag in silicon refining according to (1), wherein the viscosity of the slag is 0.1 poise or more and 5 poise or less,
(5) The slag separation method in silicon refining according to (4), wherein the slag component is adjusted immediately before the slag is scraped, and the viscosity is controlled.
It is.

本発明のシリコン精錬におけるスラグ分離方法を用いることにより、スラグによるシリコンの精錬のときに、スラグのみを効率よく取り出し、精錬効果を高めることが可能になる。   By using the slag separation method in the silicon refining of the present invention, it is possible to efficiently take out only the slag and enhance the refining effect when silicon is refined by slag.

本発明の方法は、スラグによるシリコン精錬のときに使用する。スラグ精錬は、図2に示したように、容器1に溶融シリコン3とスラグ5とを入れておき、シリコン中の不純物(ボロン、燐)4をスラグに移行させる工程である。スラグ5には、NaO,CaOなどのアルカリ系、アルカリ土類系の酸化物を主成分とするもの等が用いられるが、その組成によってスラグ5がシリコン4に浮く場合と沈む場合とに分けられる。本発明は浮く場合のみに限定し、用いる方法である。 The method of the present invention is used for silicon refining with slag. As shown in FIG. 2, the slag refining is a process in which molten silicon 3 and slag 5 are placed in a container 1 and impurities (boron, phosphorus) 4 in silicon are transferred to slag. The slag 5 is composed mainly of an alkaline or alkaline earth oxide such as Na 2 O or CaO, and the slag 5 may float on the silicon 4 or sink depending on the composition. Divided. The present invention is a method that is used only when floating.

図4に示すように本発明方法は、スラグ5とシリコン3の入った容器1を傾け、ジグ8を用いることによってスラグ5をかき出し、スラグ5を除去する。このとき容器のスラグをかき出す側の内面12が、重力方向13を基準として、その角度14は90°以上にしない。90°以上にするとシリコンも流れ出てしまうからである。   As shown in FIG. 4, in the method of the present invention, the container 1 containing the slag 5 and the silicon 3 is inclined, and the jig 8 is used to scrape out the slag 5 and remove the slag 5. At this time, the angle 14 of the inner surface 12 on the side for scraping the slag of the container is not 90 ° or more with respect to the direction of gravity 13. This is because silicon flows out when the angle is 90 ° or more.

図5に示すように、ジグ8は棒9の先端部に板10を付けた形状であり、この板をスラグに挿入し引き抜くことによって、スラグをかき出す。この板の幅が容器の内径あるいは一辺の1/3より大きいとき又は高さが100mmを超える場合は、作業中頻繁に、板が容器の内壁に接触し、作業性が著しく低下する。また、高さが10mmよりも小さいときや板の幅が30mmよりも小さいときは一度の引き抜きでかき出すスラグの量が少なく、スラグ除去の効率が悪い。また、板の厚みが3mmよりも薄い場合は亀裂や破損することが多く作業の妨げとなる。よって、板の幅は容器内径あるいは一辺の1/3以下で30mm以上、高さは10mm以上100mm以下、厚みは3mm以上30mm以下であることが望ましい。   As shown in FIG. 5, the jig 8 has a shape in which a plate 10 is attached to the tip portion of the rod 9, and the slag is scraped out by inserting the plate into the slag and pulling it out. When the width of the plate is larger than 1/3 of the inner diameter or one side of the container or when the height exceeds 100 mm, the plate frequently comes into contact with the inner wall of the container, and workability is significantly reduced. Further, when the height is smaller than 10 mm or the width of the plate is smaller than 30 mm, the amount of slag to be scraped out by one drawing is small, and the efficiency of slag removal is poor. In addition, when the thickness of the plate is less than 3 mm, the plate is often cracked or broken, which hinders the work. Therefore, it is desirable that the width of the plate is 30 mm or more at the inner diameter of the container or 1/3 or less of one side, the height is 10 mm or more and 100 mm or less, and the thickness is 3 mm or more and 30 mm or less.

ジグの材質として求められる特性は、熱衝撃割れが無い、汚染が無い、スラグとの反応が少ない等が挙げられる。これらの観点からジグの材質としてはカーボンが最適である。   The properties required for the jig material include no thermal shock cracking, no contamination, and little reaction with the slag. From these viewpoints, carbon is the optimum material for the jig.

また、スラグを除去する際には、最適なスラグの粘性がある。図6(a)に示すように、粘性が大きいと、容器1を傾けたときにシリコン3のみが流出し易い。また、かき出す際に、シリコン3を巻き込んでかき出すことがある。逆に、粘性が小さいと、図6(b)に示すように、細かなスラグ11がシリコン3中に混入してしまい、これらが不純物となってしまう。これらのことから、スラグの粘性は、0.1poise以上5poise以下であることが望ましい。   Also, when removing the slag, there is an optimum viscosity of the slag. As shown in FIG. 6A, when the viscosity is large, only the silicon 3 tends to flow out when the container 1 is tilted. Further, when scraping out, the silicon 3 may be rolled out. On the contrary, if the viscosity is small, as shown in FIG. 6B, fine slag 11 is mixed in the silicon 3 and these become impurities. For these reasons, it is desirable that the viscosity of the slag is not less than 0.1 poise and not more than 5 poise.

さらに、スラグ除去の直前にスラグ粘性を制御することも、スラグ除去を行う上で非常に有効である。アルカリ系、アルカリ土類系酸化物と二酸化珪素を主成分とする組成のスラグでは、二酸化珪素等の酸性酸化物を添加することで粘性を高めることができ、アルカリ系、アルカリ土類系等の塩基性酸化物を添加すると粘性を低くすることができる。スラグ除去の直前にこれらの操作を行い、スラグ粘性を0.1poise以上5poise以下にすれば、より良好なスラグの除去が可能になる。   Furthermore, controlling the slag viscosity immediately before slag removal is very effective in removing slag. In slags composed mainly of alkaline and alkaline earth oxides and silicon dioxide, the viscosity can be increased by adding acidic oxides such as silicon dioxide. When a basic oxide is added, the viscosity can be lowered. If these operations are performed immediately before slag removal and the slag viscosity is set to 0.1 poise to 5 poise, better slag removal can be achieved.

以上のスラグ除去方法を用いることにより、効率よくスラグのみを除去することが可能になる。   By using the above slag removal method, it is possible to efficiently remove only the slag.

以下、実施例により本発明を詳細に説明する。   Hereinafter, the present invention will be described in detail by way of examples.

(実施例1)
250mm径の容器で30kgのSiを溶解し、酸化ナトリウムと二酸化珪素がモル比1:1の組成とする同量のスラグを用いて精錬を行い、精錬後、シリコンとスラグの分離を試みた。分離方法として、容器をスラグのみが容器から流し出るように傾動を除々に行う方法(比較方法)と、容器を傾斜したまま静止させ、ジグを用いてスラグをかき出す方法(本発明方法)とである。容器の傾斜角度は、比較方法では50°から70°まで徐々に傾けた。一方、本発明方法では65°で実施した。このとき、スラグにSiO又はNaOを添加することによって、スラグ粘性を0.05poise、0.1poise、1poise、5poise、10poiseの5通りに調整した。また、かき出しに用いたジグは、カーボン製で、先についている板は、厚み5mm、幅高さともに80mmである。
(Example 1)
30 kg of Si was dissolved in a 250 mm diameter container, and refining was performed using the same amount of slag in which sodium oxide and silicon dioxide had a molar ratio of 1: 1. After refining, separation of silicon and slag was attempted. As a separation method, a method of gradually tilting the container so that only the slag flows out of the container (comparative method) and a method of standing still with the container tilted and scraping out the slag using a jig (method of the present invention) is there. The inclination angle of the container was gradually inclined from 50 ° to 70 ° in the comparative method. On the other hand, the method of the present invention was carried out at 65 °. At this time, by adding SiO 2 or Na 2 O to the slag, the slag viscosity was adjusted in five ways of 0.05 poise, 0.1 poise, 1 poise, 5 poise, and 10 poise. The jig used for scraping is made of carbon, and the plate attached to the tip has a thickness of 5 mm and a width and height of 80 mm.

Figure 0004354259
Figure 0004354259

以上の条件で、シリコンからのスラグの分離を実施した結果を表1に示す。比較方法では、スラグ粘性が0.05poise、0.1poise、1poiseの場合には、シリコンにスラグが細かく混合した状態で流れ出た。一方、スラグ粘性が5poise、10poiseの場合には、スラグは流出せず、シリコンのみが流出した。いずれにしても、比較方法ではスラグのみを容器から出すことはできなかった。   Table 1 shows the results of separation of slag from silicon under the above conditions. In the comparative method, when the slag viscosity was 0.05 poise, 0.1 poise, and 1 poise, the slag flowed out in a finely mixed state with silicon. On the other hand, when the slag viscosity was 5 poise and 10 poise, slag did not flow out and only silicon flowed out. In any case, only the slag could not be taken out of the container by the comparison method.

一方、本発明方法では、スラグを容器から取り出すことができた。ただし、ほぼ全量取り出せたのは、スラグ粘性が0.1poise、1poise、5poise、10poiseのときで、0.05poiseのときはスラグの一部がシリコン中に粒子となって混じって残留した。また、0.05poiseと10poiseの場合、逆に一部のシリコンがスラグに混入して排出してしまった。   On the other hand, in the method of the present invention, the slag could be taken out from the container. However, almost all of the slag was removed when the slag viscosity was 0.1 poise, 1 poise, 5 poise, 10 poise, and when 0.05 poise, a part of the slag remained mixed and remained in the silicon. On the other hand, in the case of 0.05 poise and 10 poise, part of silicon was mixed into the slag and discharged.

以上のことから、比較方法に比べ、本発明方法は、スラグのみを取り出すのに非常に有利であること、さらに、本発明方法の中でも、特にスラグ粘性が0.1poise、1poise、5poiseの場合がシリコンを注出せずに、ほぼ全量のスラグを取り出せることが判明した。   From the above, compared with the comparative method, the method of the present invention is very advantageous for taking out only the slag. Furthermore, among the methods of the present invention, the slag viscosity is particularly 0.1 poise, 1 poise, 5 poise. It was found that almost the entire amount of slag could be taken out without pouring silicon.

(実施例2)
250mm径の容器で30kgのSiを溶解し、酸化ナトリウムと二酸化珪素がモル比1:1の組成とする同量のスラグを用い精錬を行い、精錬後、シリコンとスラグの分離を試みた。分離方法として容器を傾斜したまま静止させ、ジグを用いてスラグをかき出す方法(本発明方法)を実施した。このとき、容器の角度は65°とし、スラグにSiO又はNaOを添加することによって、スラグ粘性は1poiseに調整した。かき出しにはカーボン製のジグを用いた。ジグのサイズについては、先端部の板の厚みが5mm、幅と高さが、80mm×80mm、110mm×80mm、9mm×80mm、80mm×100mmのものを用いて比較した。
(Example 2)
30 kg of Si was dissolved in a 250 mm diameter container and refined using the same amount of slag having a molar ratio of 1: 1 of sodium oxide and silicon dioxide. After refining, separation of silicon and slag was attempted. As a separation method, the container was kept stationary while being tilted, and a method of scraping slag using a jig (the method of the present invention) was carried out. At this time, the angle of the container was 65 °, and the slag viscosity was adjusted to 1 poise by adding SiO 2 or Na 2 O to the slag. A carbon jig was used for scraping. Regarding the size of the jig, the thickness of the plate at the tip was 5 mm, and the width and height were 80 mm × 80 mm, 110 mm × 80 mm, 9 mm × 80 mm, and 80 mm × 100 mm.

Figure 0004354259
Figure 0004354259

以上の条件で、シリコンからのスラグの分離を実施した結果は、表2に示すように、先端部の板のサイズが110mm×80mm、80mm×100mmのものはジグが容器の壁に頻繁に接触し、取り出せるシリコン量が減った。また、9mm×80mmのジグは一度にかぎ出すスラグ量が少ないために、作業時間が長くなった。80mm×80mmのジグは作業時間が短く、ほぼ全量のシリコンをかぎ出すことができた。   As shown in Table 2, the results of the separation of slag from silicon under the above conditions are as follows. As shown in Table 2, when the tip plate size is 110 mm x 80 mm, 80 mm x 100 mm, the jig frequently contacts the wall of the container. However, the amount of silicon that can be taken out has decreased. In addition, since the 9 mm × 80 mm jig has a small amount of slag to be squeezed at a time, the working time becomes longer. The 80 mm × 80 mm jig has a short working time and can squeeze out almost the entire amount of silicon.

以上のことから、本発明方法の分離方法でも、サイズが80mm×80mmであることが最も効率よくスラグを取り出せることが判明した。   From the above, it has been found that the slag can be extracted most efficiently when the size is 80 mm × 80 mm even in the separation method of the present invention.

従来方法の一例を説明する図面。The figure explaining an example of the conventional method. スラグによるシリコンの精錬方法を説明する図面。Drawing explaining a method for refining silicon using slag. スラグによるシリコンの精錬においてスラグ交換の必要性を説明する図面。Drawing explaining the necessity of slag replacement in silicon refining with slag. 本発明方法の概要を示す図面。The drawing which shows the outline | summary of this invention method. 本発明方法で使用するジグを示す図面。Drawing which shows the jig | tool used by the method of this invention. 本発明方法でスラグ粘性の影響を示す図面、ただし、(a)粘性が5poiseを超える場合、(b)粘性が0.1poiseを下回る場合である。The figure which shows the influence of slag viscosity by the method of this invention, However, (a) When a viscosity exceeds 5 poise, (b) When a viscosity is less than 0.1 poise.

符号の説明Explanation of symbols

1 容器、
2 穴、
3 シリコン、
4 不純物(ボロン、燐)、
5 スラグ、
6 除去能力の低下したスラグ、
7 新しいスラグ、
8 ジグ、
9 棒、
10 板、
11 細かなスラグ、
12 スラグをかき出す側の内面、
13 重力方向、
14 角度。
1 container,
2 holes,
3 Silicon,
4 Impurities (boron, phosphorus),
5 Slag,
6 Slag with reduced removal capacity,
7 New slag,
8 jigs,
9 sticks,
10 boards,
11 Fine slag,
12 The inner surface of the slag side,
13 Gravity direction,
14 angles.

Claims (5)

シリコンの精錬の途中又は終了後の一方又は両方で、シリコン及びスラグの入った容器を90°未満に傾け、ジグを用いてスラグをかき出すことによってスラグを除去することを特徴とするシリコン精錬におけるスラグ分離方法。   Slag in silicon refining characterized in that slag is removed by tilting a container containing silicon and slag to less than 90 ° and / or scraping out slag with a jig during or after refining silicon Separation method. 前記ジグが、棒の先端に板が付いた形状で、板の幅は容器内径或いは一辺の1/3以下、高さが10mm以上100mm以下である請求項1記載のシリコン精錬におけるスラグ分離方法。   2. The slag separation method in silicon refining according to claim 1, wherein the jig has a shape with a plate attached to the tip of the rod, the width of the plate is 1/3 or less of the inner diameter of the container or one side, and the height is 10 mm or more and 100 mm or less. 前記ジグの材質が、カーボンである請求項1又は2に記載のシリコン精錬におけるスラグ分離方法。   The slag separation method in silicon refining according to claim 1 or 2, wherein a material of the jig is carbon. 前記スラグの粘性が0.1poise以上、5poise以下である請求項1記載のシリコン精錬におけるスラグ分離方法。   The method for separating slag in silicon refining according to claim 1, wherein the viscosity of the slag is 0.1 poise or more and 5 poise or less. スラグをかき出す直前にスラグ成分を調節し、粘性を制御する請求項4記載のシリコン精錬におけるスラグ分離方法。   The method for separating slag in silicon refining according to claim 4, wherein the viscosity is controlled by adjusting a slag component immediately before the slag is discharged.
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