JP4353912B2 - Composite wiring cable - Google Patents

Description

  The present invention relates to a composite wiring cable laid so as to exchange a signal and an air source between a fixed side and a movable side.

  In recent years, the miniaturization of semiconductor elements has progressed, and the demand for strict dust management has increased also in an assembly apparatus for a post-process for mounting a semiconductor element on a circuit board. For example, in an assembling apparatus for an image sensor having more than 1 million pixels, it has been reported that image defects occur due to dust having a particle diameter of φ1 μm, resulting in a decrease in yield, and strict dust management is required.

FIG. 11 shows a conventional assembly apparatus for mounting a semiconductor element on a circuit board.
A work head 3 that sucks the semiconductor element 2 and conveys it above the circuit board 1 and presses the semiconductor element 2 against the circuit board 1 is mounted on a single-axis robot 4 that reciprocates linearly horizontally. A part of the work head 3 is screwed onto a ball screw 5 rotatably supported on the single-axis robot 4, and the work head 3 is moved up and down by rotating the ball screw 5 with a motor 6.

  The working head 3 is equipped with an air cylinder and a valve having a nozzle 8 for vacuum-sucking the semiconductor element 2, a sensor 9 for detecting the presence or absence of the semiconductor element 2 at the nozzle 8 by vacuum suction pressure, and the like. . Connected to the working head 3 are cables 11A and 11B for supplying power and transmitting signals, a hose 12 for transmitting fluid energy such as compressed air, vacuum, and oil. These cable 11 and hose 12 are incorporated in the cable carrier 10 so as to follow the reciprocating linear movement of the work head 3 (see FIG. 12).

  The cable bearer 10 shown in the following (Patent Document 1) holds hoses and cables inside a cable bear formed by connecting a plurality of frame-shaped cases with pins, links and bendable plates. The cable bear holding the hoses and cables is coupled to one end of the working head 3 as a movable body, and is coupled to the fixed side 7 at the other end with a predetermined bending radius on the support body. It follows the reciprocating linear movement of the movable body while bending.

Further, dust generation due to friction with the components of the cable bear 10 during the reciprocating linear movement of the work head 3 and dust generation due to friction between the cables 11A and 11B and the hose 12 during the reciprocating linear movement of the work head 3 are reduced. In order to achieve this, it is conceivable to use a composite cable disclosed in (Patent Document 2). The composite cable referred to here is one in which the pressure tube 13 and the optical fiber cable 14 are wrapped in a common sheath 15 as shown in FIG.
JP-A-9-177902 Japanese Utility Model Publication No. 56-45805

  However, in the conventional assembling apparatus as described above, generation of dust that affects the quality of the product occurs, resulting in a decrease in yield. Dust is generated due to contact or rubbing of each component of the equipment. Especially in cable bears that bend on the support body following the reciprocating linear movement of the work head, the hose and cable coatings, the cable bear itself Generation of dust containing material components is large. The following four points can be cited as causes of dust generation from the cable track.

1) Rubbing between cables and hoses and the inner wall of the cable carrier 2) Rubbing between cables, hoses, and between cables and hoses 3) Rubbing of the connecting parts of each case constituting the cable carrier 4) Friction between the cable carrier and the support 1) to 3) may cause device failure such as cable disconnection or leakage of fluid flowing in the hose. In the cable bear described in (Patent Document 1), a support plate having elasticity is used as a link for connecting cases, and the effect of reducing dust generation due to the factor of 3) is exhibited. There is no effective solution to other dust generation factors.

  Further, even when the composite cable shown in (Patent Document 2) or the like is used in place of the cable bear, the thickness of the composite cable sheath 15 is large, and the sheath 15 of the sheath 15 accompanying the reciprocating linear movement of the work head is used. The rubbing area increases and the generated dust increases. Furthermore, there is no effective solution for such dust generation factors.

  This invention solves the said problem, and it aims at providing the composite wiring cable which can reduce dust generation and can also suppress the disconnection of a cable and the leakage from a hose.

The composite wiring cable according to claim 1 of the present invention is a composite wiring cable connected to a working head that moves horizontally and reciprocates linearly with vertical movement, sucks a semiconductor element, transports it above the substrate, and is pressed. A composite wiring cable laid to transmit and receive a signal and an air source between the movable side and the movable side, wherein a plurality of suction ports communicating the internal passage of the air pipe with the outside are connected to the flexible air pipe. is drilled along the longitudinal direction of the air piping, said in the inner passage of the air pipe, the intermediate shelves spaced the distance from the suction port longitudinally along drilled in the air piping of the air pipe The signal cable is laid along the longitudinal direction of the air pipe on the intermediate shelf, and the end of the signal cable is drawn out from the internal passage in an airtight state. That.

The composite wiring cable according to claim 2 of the present invention is a cable carrier connected to a work head that is reciprocated linearly horizontally along with vertical movement, sucks a semiconductor element, conveys it to the upper side of the substrate, and is pressed against the work head. Is constructed with a composite wiring cable comprising a hose for transmitting fluid energy and a plurality of signal wires for transmitting and receiving signals between the fixed side and the movable side. A plurality of pipes along the longitudinal direction of the cylindrical bottom plate in an internal passage formed by covering the upper surface of the flexible cylindrical bottom plate formed with air passages with a cover material satisfying flexibility and airtightness The signal cable is laid, and a means for connecting to the vacuum source is formed in the air passage of the cylindrical bottom plate, and a plurality of suction ports for communicating the internal passage and the outside are formed in the cover material, Front to the cylindrical bottom plate And wherein the bored air passage and the outside and the suction port communicating with said internal passage.

The composite wiring cable according to claim 3 of the present invention is characterized in that a support protrusion is formed on the exterior of the composite wiring cable according to claim 1 or claim 2 .
A composite wiring cable according to claim 4 of the present invention is characterized in that in any one of claims 1 to 3 , the signal cable is an optical fiber cable.

According to a fifth aspect of the present invention, there is provided an assembling apparatus that outputs at least a signal and an air source between the fixed side and the movable side via the composite wiring cable according to any one of the first to fourth aspects. It is configured to give and receive.

  According to this configuration, when the signal cable is laid in the internal passage of the flexible air pipe, the contact with the fixed side of the intermediate portion of the composite wiring cable accompanying the reciprocating linear movement on the movable side is flexible. Dust air can be reduced. In addition, when a plurality of signal lines are laid in an internal passage formed by covering the upper surface of the belt-like flexible bottom plate with a cover material satisfying flexibility and airtightness, the reciprocation on the movable side is performed. Since the dust generated with the linear movement can be sucked from the suction port, dust generation can be reduced.

Hereinafter, the composite wiring cable of the present invention will be described based on each embodiment.
(Embodiment 1)
1 to 4 show an assembling apparatus using the composite wiring cable of the present invention.

This assembly apparatus for mounting semiconductor elements on a circuit board is configured as follows.
A work head 3 that sucks the semiconductor element 2 and conveys it above the circuit board 1 and presses the semiconductor element 2 against the circuit board 1 is mounted on a single-axis robot 4 that reciprocates linearly horizontally. A part of the work head 3 is screwed onto a ball screw 5 rotatably supported on the single-axis robot 4, and the work head 3 is moved up and down by rotating the ball screw 5 with a motor 6.

  The working head 3 is equipped with an air cylinder and a valve having a nozzle 8 for vacuum-sucking the semiconductor element 2, a sensor 9 for detecting the presence or absence of the semiconductor element 2 at the nozzle 8 by vacuum suction pressure, and the like. . Connected to the working head 3 are cables 11A and 11B for supplying power and transmitting signals, a hose 12 for transmitting fluid energy such as compressed air, vacuum, and oil.

The composite wiring cable 16 laid so as to transmit and receive a signal and a power air source between the fixed side and the movable side is configured as follows.
As shown in FIGS. 2 and 3, the composite wiring cable 16 is constructed by laying two optical fibers 19A and 19B as signal cables in an internal passage 18 of a flexible air pipe 17 for supplying a power air source. It is configured. Specifically, terminal portions 21 and 22 each having an air hose connection port 20 are attached to end portions of the flexible air pipe 17. Optical fiber relay connectors 23a, 23b, 23aa, 23bb having a hammetic seal structure are attached to the terminals 21 and 22, and one end of the optical fiber 19A is connected to the optical fiber relay connector 23a. The end is connected to the optical fiber relay connector 23aa. One end of the optical fiber 19B is connected to the optical fiber relay connector 23b, and the other end of the optical fiber 19B is connected to the optical fiber relay connector 23bb. In consideration of the addition of optical fibers, the terminal units 21 and 22 are provided with optical fiber relay connectors 23c and 23cc.

  As shown in FIG. 3, the exterior shape of the intermediate portion of the flexible air pipe 17 is formed in a quadrangular shape having a bottom surface 17b wider than the top surface 17a, and the inner passage 18 communicates with the outside at the center of the bottom surface 17b. A suction port 24 is drilled along the longitudinal direction of the flexible air pipe 17.

  The air hose connection port 20 of the terminal part 21 on the fixed side of the composite wiring cable 16 is connected to a vacuum source (not shown), and the air hose connection port 20 of the terminal part 22 on the movable side of the composite wiring cable 16 is connected to the work head 3. Are connected to the nozzle 8. The input / output optical fibers 11A and 11B of the sensor 9 and the like are connected via the optical fiber relay connectors 23aa and 23bb, the optical fibers 19A and 19B, and the optical fiber relay connectors 23a and 23b of the movable end portion 22 of the composite wiring cable 16. It is pulled out to the fixed side and optically coupled to a control circuit (not shown). As shown in FIG. 4, by covering the suction port 24 with the filter 25, it is possible to avoid an accident in which the suction port 24 is blocked by the optical fibers 19 </ b> A and 19 </ b> B.

  As described above, since the optical fibers 19A and 19B are laid in the internal passage of the flexible air pipe, the contact with the fixed side of the intermediate portion of the composite wiring cable accompanying the reciprocating linear movement of the working head 3 is flexible. Only the air pipe 17 can be used, and dust generation can be reduced.

  In addition, the bottom surface 17b of the flexible air pipe 17 comes into contact with the fixed side 26 by the reciprocating linear movement of the work head 3, and some dust is generated. The dust generated by this contact passes through the suction port 24. Therefore, it is possible to prevent the contamination from being expanded because the suction is discharged to the internal passage 18 each time.

(Embodiment 2)
FIG. 5 shows (Embodiment 2) of the present invention.
In (Embodiment 1), the entire bottom surface 17b of the intermediate portion of the flexible air pipe repeatedly contacts and separates from the fixed side 26 by the reciprocating linear movement of the work head 3, but this is shown in FIG. In form 2), since a support protrusion 27 is formed in the middle of the flexible air pipe with the suction port 24 at the center, the flexible air pipe 17 is fixed to the fixed side along with the reciprocating linear movement of the work head 3. The contact area is reduced and dust generation is reduced.

(Embodiment 3)
FIGS. 6A and 6B show (Embodiment 3) of the present invention.
In (Embodiment 1), as shown in FIG. 4, the suction port 24 is covered with a filter 25 to avoid an accident in which the suction port 24 is blocked by the optical fibers 19A and 19B. In (Embodiment 3) shown in b), an intermediate shelf 28 is provided in the internal passage 18 so as to cover the upper position of the suction port 24, and the optical fibers 19A and 19B are laid on the intermediate shelf 28. The suction port 24 can be prevented from being blocked by the fibers 19A and 19B. Reference numeral 29 denotes a suction path from the suction port 24.

(Embodiment 4)
7 and 8 show (Embodiment 4) of the present invention.
In each of the above embodiments, the optical fibers 19A and 19B are laid in the internal passage of the flexible air pipe 17 that connects the nozzle 8 and the vacuum source. However, as shown in FIG. In addition to the hose 12 that transmits fluid energy such as vacuum or oil, a composite wiring cable 30 including optical fibers 19A and 19B is provided, and the internal passage 31 of the composite wiring cable 30 is connected to a vacuum source. Compared to dust generation.

Specifically, as shown in FIG. 7B, a hose 12 and a composite wiring cable 30 are laid on the cable bear 10.
In this composite wiring cable 30, optical fibers 19A and 19B are laid in an internal passage 34 formed by covering the upper surface of a strip-like flexible bottom plate 32 with a cover material 33 satisfying flexibility and airtightness. In addition, a means for connecting to a vacuum source is formed in the internal passage, and a suction port 24 is formed in the flexible bottom plate 32 along the longitudinal direction of the composite wiring cable 30. The cover member 33 can compensate for the suction ability from the suction port 24 by using a material having a rigidity that prevents the corner portion of the internal passage 34 from being crushed even by suction by the vacuum source of the internal passage. Further, a suction port 35 is formed in the cover member 33 along the longitudinal direction of the composite wiring cable 30.

  As shown in FIG. 8, the internal passage 34 is closed by a movable end 38, but the fixed end is connected to a vacuum source (not shown) through the air hose connection port 20 of the terminal 21. Has been. The suction ports 34 and 35 are provided with filters 36 and 37 for the purpose of avoiding an accident that is blocked by the optical fibers 19A and 19B. The optical fiber relay connectors 23a to 23c and 23aa to 23cc are the same as those in the above embodiment.

  With this configuration, even if the optical fibers 19A and 19B come into contact with the reciprocating linear movement of the work head 3, the dust generated is not scattered to the outside because it is covered with the cover material 33, and the internal passage 34 And sucked out by a vacuum source. Even if the hose 12 and the cover member 33 come into contact with the reciprocating linear movement of the work head 3, the dust generated thereby is sucked from the suction port 35 and sucked by the vacuum source through the internal passage 34. Discharged.

(Embodiment 5)
FIG. 9 shows (Embodiment 5) of the present invention.
In (Embodiment 4), the strength of the cover member 33 is a material having a rigidity that prevents the corners of the internal passage 34 from being crushed even by suction by the vacuum source of the internal passage, but as shown in FIG. Even when a material having rigidity such that the corner portion of the internal passage 34 is crushed by suction by a vacuum source is used, suction is performed below the optical fibers 19A and 19B by suction by the vacuum source of the internal passage. By considering the outer diameters of the optical fibers 19A and 19B so as to secure the path, it is possible to reduce the outer shape of the composite wiring cable 30 and to compensate the dust suction capability. Others are the same as (Embodiment 4).

(Embodiment 6)
FIG. 10 shows (Embodiment 6) of the present invention.
In (Embodiment 5), when a cover material 33 that is easily deformed by suction by a vacuum source is used, the suction path is secured in consideration of the outer diameters of the optical fibers 19A and 19B, but as shown in FIG. In addition, an optical fiber is formed in an internal passage 34 formed by covering the upper surface of a flexible cylindrical bottom plate 40 having a strip shape and an air passage 39 formed therein with a cover material 33 satisfying flexibility and airtightness. 19A and 19B are laid, and a means for connecting to a vacuum source is formed in the internal passage 39 of the cylindrical bottom plate 40. 41 is a suction port. In addition, the terminal means 21 and the air hose connection port 20 in the previous embodiment can be cited as specific examples of the connection means. Reference numeral 35 denotes a suction port.

According to this configuration, the size of the outer shape of the composite wiring cable 30 can be further reduced, and the dust suction capability can be compensated. Others are the same as (Embodiment 4).
In each of the above embodiments, the signal cable is an optical fiber, but the same applies to an electric wire or an optical fiber and an electric wire.

  The composite wiring cable of the present invention can prevent dust generation and increase of contamination due to contact with the fixed side, and can contribute to improvement of the yield of the assembling apparatus.

The front view of the assembly apparatus using the composite wiring cable of (Embodiment 1) of this invention Sectional drawing along the longitudinal direction of the composite wiring cable of the embodiment Partial cutaway perspective view of the composite wiring cable of the embodiment Sectional drawing of the direction which cross | intersects the longitudinal direction of the composite wiring cable of the embodiment Sectional drawing of the direction which cross | intersects the longitudinal direction of the composite wiring cable of (Embodiment 2) of this invention Sectional drawing of the direction which cross | intersects the longitudinal direction of the composite wiring cable of (Embodiment 3) of this invention, and sectional drawing along a longitudinal direction Sectional drawing of the direction which cross | intersects the front view of the assembly apparatus which uses the composite wiring cable of (Embodiment 4) of this invention, and the longitudinal direction of a cable bear Sectional drawing along the longitudinal direction of the composite wiring cable of the embodiment Sectional drawing of the direction which cross | intersects the longitudinal direction of the composite wiring cable of (Embodiment 5) of this invention Sectional drawing of the direction which cross | intersects the longitudinal direction of the composite wiring cable of (Embodiment 6) of this invention Front view of conventional assembly equipment Sectional view of the conventional cable carrier Sectional view of the conventional composite cable

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Circuit board 2 Semiconductor element 3 Work head 4 1 axis robot 5 Ball screw 6 Motor 8 Nozzle 9 Sensor 10 Cable bearer 11A, 11B Cable 12 Hose 16 Composite wiring cable 17 Flexible air piping 17a Flexible air piping 17 Upper surface 17b Bottom surface 18 of flexible air piping 17 Internal passages 19A and 19B Optical fiber (signal cable)
20 Air hose connection ports 21, 22 Terminal portions 23 a, 23 b, 23 c, 23 aa, 23 bb, 23 cc Optical fiber relay connector 24 Suction port 25 Filter 27 Support protrusion 28 Intermediate shelf 30 Composite wiring cable 31 Internal passage 32 of composite wiring cable 30 Flexible bottom plate 33 Cover material 34 Internal passage

Claims (5)

A signal and air source are sent and received between the fixed side and the movable side of the composite wiring cable connected to the work head that moves back and forth horizontally along with the vertical movement, sucks the semiconductor element, transports it above the substrate, and presses it. A composite wiring cable laid to
A plurality of suction ports communicating the internal passage and the outside of the air pipe to the flexible air pipe are formed along the longitudinal direction of the air pipe,
In the internal passage of the air pipe, an intermediate shelf is provided at a distance from the suction port formed in the air pipe along the longitudinal direction of the air pipe, and the air pipe is provided on the intermediate shelf. A composite wiring cable in which a signal cable is laid along the longitudinal direction of the signal cable and an end portion of the signal cable is drawn out from the internal passage in an airtight state. A cable bearer connected to a work head that moves horizontally and reciprocates linearly along with the vertical movement, sucks the semiconductor element, transports it to the top of the substrate, and press-contacts the hose that transmits fluid energy to the cable bear, and a fixed side And a composite wiring cable consisting of a plurality of signal lines for transmitting and receiving signals between the movable side and the movable side,
In the longitudinal direction of the cylindrical bottom plate in the internal passage formed by covering the upper surface of the flexible cylindrical bottom plate with the air passage formed in the inside with a cover material satisfying flexibility and airtightness Lay multiple signal cables along the
While connecting means to a vacuum source is formed in the air passage of the cylindrical bottom plate,
Drilling a plurality of suction ports communicating the internal passage and the outside in the cover material;
A composite wiring cable in which a suction port for communicating the air passage with the outside and the internal passage is formed in the cylindrical bottom plate. The composite wiring cable which formed the support protrusion in the exterior of the composite wiring cable in any one of Claim 1 or Claim 2.   The composite wiring cable according to claim 1, wherein the signal cable is an optical fiber cable. 5. An assembling apparatus configured to transmit and receive at least one of a signal and an air source between the fixed side and the movable side via the composite wiring cable according to claim 1.

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