JP4346776B2 - High efficiency device cooling system and cooling method - Google Patents

Description

[0001]
[Industrial application fields]
The present invention relates to a high-efficiency apparatus cooling system and a cooling method for transporting cooling water in a temperature zone effective for a cooling apparatus that is an object to be processed.
[0002]
BACKGROUND OF THE INVENTION
There are various methods such as radiation, water cooling, and air cooling as cooling methods for cooling a cooled object having a heat source and keeping the temperature of the cooled object constant. Of these, water cooling is mainly used for cooling a cooled object having a large heat generation load. Water cooling is essentially a very efficient cooling method because water, which is a liquid having a very large specific heat and thermal conductivity, is used as a refrigerant.
[0003]
Moreover, in the cooling by the conventional cooling water system, the cooling target to be cooled has a cooling water inlet and an outlet, and the cooling water flowing in from the inlet is led to the cooled part through the pipe, and from the proportional customer part. After depriving of heat, it has a simple structure that is led to the cooling water outlet through the pipe.
[0004]
The flow rate of cooling water that flows to the body to be cooled is determined with a margin so that the temperature of the body to be cooled is below a predetermined temperature when the body to be cooled generates the maximum heat load, and the flow rate is individually controlled. Is not usually done. Also, the amount of heat generation load varies greatly depending on the operating condition of the cooled object, and even though the object to be cooled does not generate heat while it is stopped, a constant flow rate of cooling water is always flowed according to the maximum heat generation load amount. This is the current situation. That is, most of the cooling water flows wastefully depending on the operating state of the object to be cooled.
[0005]
Furthermore, the inflow temperature of the cooling water is usually room temperature, and the outflow temperature is about 5 ° C. higher than that. Since the temperature difference between the inflow temperature and the outflow temperature must be reduced, a large flow of cooling water is required. For these reasons, a factory with a large number of objects to be cooled requires a cooling system that circulates a huge amount of cooling water. In order to flow a large amount of cooling water, it is necessary to thicken the circulation line piping of the cooling water to reduce the conductance of the piping, but since there is a limit, a method of increasing the pumping pressure of the pumping pump is an effective method. It is.
[0006]
However, the power consumption of the pressure pump increases depending on the discharge speed of the pump and the number of installed pumps, so the costs associated with the increase in pump size, large-diameter piping, etc., increase in occupied area, and vibrations generated from the large pump, etc. The problem has become impossible to ignore.
[0007]
In future building air-conditioning equipment and equipment cooling equipment, energy-saving equipment is strongly demanded. In particular, the running cost of a clean room accounts for about one-third of the total electricity bill, and most of it is power consumed by air conditioning and process equipment. Therefore, it is indispensable for low-cost production to reduce the air conditioning and power consumption of the apparatus.
[0008]
[Problems to be solved by the invention]
It is an object of the present invention to provide an energy-saving high-efficiency device cooling system and a cooling method with a compact cooling system.
[0009]
[Means for Solving the Problems]
The high efficiency device cooling system of the present invention is
Divide multiple cooled objects into groups for each cooling temperature range of the cooled objects,
In addition to providing an independent primary cooling water supply pipe for each group, a heat exchanger is provided in each primary cooling water supply pipe,
A secondary cooling water supply pipe different from the primary cooling water supply pipe is arranged so as to sequentially pass through each heat exchanger in the order of low temperature of the cooling temperature range,
The line of the primary cooling water supply pipe and the line of the secondary cooling water supply pipe are closed systems,
A means for supplying water dissolved with hydrogen gas (hereinafter referred to as “hydrogen water”) to the primary cooling water supply pipe or the secondary cooling water supply pipe is provided.
[0010]
The highly efficient apparatus cooling method of the present invention is:
Divide multiple cooled objects into groups for each cooling temperature range of the cooled objects,
Cool the object to be cooled by primary cooling water independently for each group,
A high-efficiency device cooling method that sequentially cools the cooled primary cooling water in order of lower temperature in the cooling temperature range, using secondary cooling water different from the primary cooling water,
The primary cooling water and the secondary cooling water are supplied by a closed line,
Hydrogen water is used as the primary cooling water and / or secondary cooling water.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to FIG.
[0012]
Since the device cooling medium is designed to send a common temperature to each device, the temperature zone of the conventional cooling water is set to a supply temperature of around 20 ° C. and a return temperature of around 25 ° C. The temperature difference between the supply temperature and the return temperature is around 5 ° C.
[0013]
In the present invention, as shown in FIG. 1, a plurality of cooled objects 111a, 111b, and 111c are divided into groups for each cooling temperature region. An independent cooling water supply loop is assembled for each temperature zone by the primary cooling water supply pipes 110a, 110b, and 110c, and a temperature range suitable for each device is set. FIG. 1 shows a cooling system according to an embodiment of the present invention. FIG. 1 shows an example in the case of being divided into three groups 102, 103, and 104. For example, in group 1 (102), the supply temperature is 20 ° C. and the return temperature is 25 ° C., in group 2 (103), the supply temperature is 25 ° C., the return temperature is 30 ° C., and in group 3 (104), the supply temperature is 35 ° C. Like a temperature of 40 ° C.
[0014]
Each group is provided with a plurality of bodies to be cooled, and the primary cooling water supply pipes 110a, 110b, and 110c and the bodies to be cooled 111a, 111b, and 111c are connected to each other through valves.
[0015]
On the other hand, raw water (city water, industrial water, tap water, etc.) is stored in a tank 130, and water in the tank 130 is sent to a pretreatment device 132 by a pump 131. In the pretreatment device 132, processing such as turbidity is performed as necessary.
[0016]
The pretreatment device 132 and the secondary cooling water supply pipe 107 are connected via a valve, and the water after the pretreatment is sent to the secondary cooling water supply pipe 107. In addition, the pretreatment device 132 and the primary cooling water supply pipes 110a, 110b, 110c of each group are connected to each other by a pipe 135 through valves, and the pretreated water is supplied to the primary cooling water supply pipes 110a, 110b, Also sent to 110c. The surplus water after the pretreatment is stored in a separate tank and supplied to various water use bodies (parts using water, for example, various washings) outside the system.
[0017]
The primary cooling water supply pipes 110a, 110b, and 110c and the cooled bodies 111a, 111b, and 111c are respectively connected via valves, and the cooling water is cooled by the primary cooling water supply pipes 110a, 110b, and 110c, respectively. It is supplied to the bodies 11a, 11b, 11c.
[0018]
A pipe 135 is provided in front of the heat exchangers 108a, 108b, 108c on the downstream side of the primary cooling water supply pipes 110a, 110b, 110c, and the primary cooling water supply pipes 110a, 110b, 110c and the tank 130 are provided by the pipe 134. Are connected via a valve, a tank 133, a pump 136, and a water treatment device 137. Therefore, the primary cooling water can be circulated to the tank 130 as needed after cooling. Further, the pipe 135 is branched, and can be drained to the outside or supplied to other water use parts besides circulating to the tank 130. Note that the water treatment apparatus 137 removes ions in the water.
[0019]
Note that the number of objects to be cooled in the group may be one, but by using a plurality of objects, the efficiency of heat exchange can be further improved. In the example shown in FIG. 1, three to-be-cooled bodies are provided for each group. The cooling loop is provided with one line on which no non-cooling body is arranged, and water is constantly flowing through the loop using this line. As a result, it is possible to prevent water from decaying due to water retention, and to reduce the amount of electricity consumed.
[0020]
The purpose of this system is to supply the cooling temperature cooling water to the devices in the respective cooling temperature zones and to cool the devices with the minimum energy. Reference numeral 101 denotes a secondary side cooling loop constituted by the secondary cooling water supply pipe 107, and reference numerals 102, 103 and 104 denote primary side cooling loops constituted by the primary cooling water supply pipes 110a, 110b and 110c. Reference numeral 105 denotes a cold heat source main body, which cools each device group connected to the loop 101 by sending the cooling water to the heat exchangers 108a, 108b, and 108c through the cooling water supply pipe 107 by the pump 106 that transfers the cooling water. Create cooling water for the purpose. In the example shown in FIG. 1, another object to be cooled 112 is provided along the primary cooling water supply pipe 107.
[0021]
In the primary side cooling loop 102, it is sent to each apparatus 111a by the cold water supply piping 110a by the cooling water feed pump 109a. The other device groups 103 and 104 are similarly cooled.
[0022]
In the present invention, the object to be cooled is particularly preferably a production device necessary for the manufacturing process, an evaluation device, and / or a space including them.
[0023]
In the present invention, the primary cooling water pipe and the secondary cooling water pipe are separate bodies. That is, the primary cooling water pipe and the secondary cooling water pipe are completely independent through the heat exchanger.
[0024]
In the present invention, it is preferable that one or both of the primary cooling water supply pipe and the secondary cooling water supply pipe line be a closed system. By using a closed system, it is possible to prevent gas from entering the cooling water from the outside, and it is possible to prevent the dissolved hydrogen from escaping.
[0025]
Moreover, it is preferable to provide means for utilizing the heat of the secondary cooling water on the downstream side of the heat exchanger of the highest temperature group on the line of the secondary cooling water supply pipe. Since the secondary cooling water that has received heat from the primary cooling water in the heat exchanger of the highest temperature group has a high temperature, the heat can be reused. A separate heat exchanger may be provided as a means for using heat.
[0026]
Moreover, it is preferable to provide a cooling tower. This cooling tower is also preferably sealed from the outside.
[0027]
On the other hand, it is effective to use deaerated water as the cooling water flowing through the primary cooling water supply pipe in order to increase the conversion efficiency. Here, deaerated water is water obtained by removing gas (particularly oxygen) from tap water. The oxygen concentration after deaeration is preferably 3 mg / liter or less, more preferably 1.5 mg / liter or less, and even more preferably 1 mg / liter or less. However, since the effect is saturated at less than 0.001 mg / liter, 0.001 to 3 mg / liter is a preferable range.
[0028]
In addition, it is preferable to use hydrogen water as the cooling water flowing through the primary cooling water supply pipes 110a, 110b, and 110c. The hydrogen water is water obtained by adding hydrogen to water, but it is more preferable to use water obtained by adding hydrogen to the degassed water. The hydrogen concentration in the hydrogen water is preferably 0.1 to 1.6 mg / liter.
[0029]
The means for degassing the water supplied to the primary cooling water supply pipe or the secondary cooling water supply pipe or the means for dissolving hydrogen gas in the water may be provided in series or in parallel with the system. In particular, it is preferable to provide it between the pump and the heat exchanger.
[0030]
【Example】
Hereinafter, the results when the apparatus of the present invention cools the apparatus by the cooling system will be described. As a relative evaluation device, an example of cooling the apparatus by a conventional cooling system will be shown, and the effect of this system will be described.
[0031]
Example 1
Cooling water at 7 ° C. is supplied to the secondary cooling circulation system 101 constituted by the secondary cooling water supply pipe 107, and the primary cooling circulation systems 102, 103 constituted by the primary cooling water supply pipes 110a, 110b, 110c, The power consumption was calculated by setting 104 to an apparatus outlet temperature of 7 ° C. to an apparatus outlet temperature of 15 ° C., an apparatus inlet temperature of 20 ° C. to an apparatus outlet temperature of 30 ° C., and an apparatus inlet temperature of 30 ° C. to an apparatus outlet temperature of 40 ° C.
[0032]
As parameters at that time, experiments were conducted in the case of using degassed water and hydrogen water as cooling water, and comparisons were made.
[0033]
This experiment shows the measurement results when tap water is used as cooling water.
In FIG. 2, the right side shows the result of the present example, and the left side shows the result of the comparative example.
[0034]
The power consumption when this system is adopted (right side) is lower than that when the conventional system is adopted (left side), and it is confirmed that this system is more effective than the conventional system. It was. That is, the electricity consumption ratio was about 0.9 in the conventional system, but about 0.6 in this system, and a dramatic decrease was recognized.
[0035]
(Example 2)
By using deaerated water, generation of scale in the apparatus heat exchange pipe can be prevented, and reduction in conversion efficiency due to generation of scale can be prevented.
[0036]
A comparison was made between tap water and deaerated water as cooling water flowing through the cooling system.
[0037]
As deaerated water, tap water from which oxygen was removed was used. The oxygen concentration after deaeration is 0.9 mg / liter.
[0038]
The test results are shown in FIG.
[0039]
The measurement was performed after the cooling water was continuously supplied to the cooling system for 2000 hours.
[0040]
Since the gas outlet temperature when deaerated water is flowed (the center of FIG. 3) is higher than that of tap water (the left side of FIG. 3), the case where deaerated water is used and the case where tap water is used It was confirmed that the effect is high.
[0041]
In addition, when the experiment was conducted by changing the oxygen concentration in the range of 0.0005 to 6 mg / liter, particularly good results were obtained at 3 mg / liter or less.
[0042]
(Example 3)
By using hydrogen water, not only can the generation of rust in the equipment heat exchange pipe be prevented, but also the generation of slime attributed to, for example, viable bacteria can be suppressed, and the reduction in conversion efficiency due to the generation of slime can be prevented. can do. Moreover, since no chemicals are used, the used water can be used as raw water for the water treatment apparatus, and the amount of water used can be reduced.
[0043]
A comparison was made between tap water and hydrogen water as cooling water flowing through the apparatus heat exchange pipe.
[0044]
As hydrogen, after removing oxygen from tap water, hydrogen was added. The hydrogen concentration after hydrogenation is 0.6 mg / liter.
[0045]
The test results are shown in FIG.
[0046]
The measurement was performed after the cooling water was continuously supplied to the cooling system for 2000 hours.
[0047]
When hydrogen water is flowed (right side of Fig. 3), the gas outlet temperature is higher than that of tap water (left side of Fig. 3), so using hydrogen water is more effective than using tap water. Was confirmed to be high.
[0048]
(Example 4)
In this example, first, degassing from the cooling water was performed under the same conditions as in Example 2, and then hydrogen gas was dissolved under the same conditions as in Example 3.
[0049]
In this example, the electricity consumption ratio was further reduced by about 30% compared to the case of Example 3.
[0050]
【The invention's effect】
According to the present invention, the heat exchange efficiency of the heat exchange part is increased, the amount of cooling water can be reduced, the pipe diameter and the water pump power can be reduced, and the initial cost and running cost of the cooling system can be reduced. Become.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing a high-efficiency cooling system flow according to the present invention.
FIG. 2 is a graph showing experimental results according to the present invention.
FIG. 3 is a graph showing experimental results according to the present invention.
[Explanation of symbols]
101 Secondary cooling water circulation system 102 Primary cooling water circulation system 1
103 One cooling water circulation system 2
104 One cooling water circulation system 3
105 Cooling heat source body 106 Secondary cooling water feed pump 107 Secondary cooling water supply piping 108a, 108b, 108c Primary heat exchange devices 109a, 109b, 109c Primary cooling water feed pumps 110a, 110b, 110c Primary cooling water supply piping 111a, 111b , 111c Cooled object (cooled device)

Claims (11)

Divide multiple cooled objects into groups for each cooling temperature range of the cooled objects,
In addition to providing an independent primary cooling water supply pipe for each group, a heat exchanger is provided in each primary cooling water supply pipe,
A secondary cooling water supply pipe different from the primary cooling water supply pipe is arranged so as to sequentially pass through each heat exchanger in the order of low temperature of the cooling temperature range ,
The line of the primary cooling water supply pipe and the line of the secondary cooling water supply pipe are closed systems,
A high-efficiency apparatus cooling system comprising means for supplying hydrogen gas-dissolved water (hereinafter referred to as “hydrogen water”) to the primary cooling water supply pipe or the secondary cooling water supply pipe . The cooled body may produce equipment required for the production process, the evaluation device and / or high efficiency cooling system according to claim 1, characterized in that the space containing them. 3. A high unit according to claim 1, further comprising means for supplying deaerated water (hereinafter referred to as “deaerated water”) to the primary cooling water supply pipe or the secondary cooling water supply pipe. Efficiency device cooling system. The high-efficiency cooling system according to any one of claims 1 to 3 , wherein a plurality of bodies to be cooled are provided in the group. The high efficiency cooling system according to any one of claims 1 to 4 , wherein another object to be cooled is provided on the secondary cooling water piping line. The means for utilizing the heat of the secondary cooling water is provided on the downstream side of the heat exchanger of the highest temperature group on the line of the secondary cooling water supply pipe. The high efficiency cooling system according to any one of 5 . The high efficiency cooling system according to any one of claims 1 to 6 , wherein a cooling tower is provided on the downstream side of the heat exchanger of the highest temperature group on the line of the secondary cooling water supply pipe. . Divide multiple cooled objects into groups for each cooling temperature range of the cooled objects,
Cool the object to be cooled by primary cooling water independently for each group,
According to another secondary cooling water from the primary cooling water, a high-efficiency apparatus cooling way to sequentially cool the primary coolant after cooling to a temperature lower order of the cooling temperature range,
The primary cooling water and the secondary cooling water are supplied by a closed line,
A highly efficient apparatus cooling method using hydrogen water as said primary cooling water and / or secondary cooling water. The high-efficiency apparatus cooling method according to claim 8, wherein water obtained by degassing hydrogen water is used as the primary cooling water and / or secondary cooling water. The high-efficiency temperature and humidity adjustment method according to claim 8 or 9, wherein a hydrogen concentration in the hydrogen water is 0.1 to 1.6 mg / liter. The high-efficiency cooling system according to claim 9, wherein the oxygen concentration in the deaerated water is 0.001 to 3 mg / liter.

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