CN219709300U - Filtering system of equipment cooling system - Google Patents

Filtering system of equipment cooling system Download PDF

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Publication number
CN219709300U
CN219709300U CN202221328607.9U CN202221328607U CN219709300U CN 219709300 U CN219709300 U CN 219709300U CN 202221328607 U CN202221328607 U CN 202221328607U CN 219709300 U CN219709300 U CN 219709300U
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water
tank
pipeline
water inlet
water outlet
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CN202221328607.9U
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陈超
史小奇
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Wuxi Weishi Semiconductor Technology Co ltd
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Wuxi Weishi Semiconductor Technology Co ltd
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Abstract

The equipment cooling system comprises a pure water filtering system and a heat exchange device, wherein the pure water filtering system comprises a water inlet tank, a filter group, a softened water tank, an RO water tank, a security filter, an RO water tank and a mixed bed which are connected in sequence through pipelines; the water supply pump sets are respectively arranged on the pipeline connected between the water outlet of the water inlet tank and the filter group and the pipeline connected between the water outlet of the softening water tank and the security filter and the pipeline connected between the RO water tank and the mixed bed; the first water inlet of the water inlet tank is externally connected with a water source, the water outlet of the heat exchange device is connected with the second water inlet of the water inlet tank, and the water inlet of the heat exchange device is connected with the water outlet of the mixed bed. The device has the advantages that: the device does not generate extra hot air, thereby reducing energy consumption; the installation operation is simple, and the cooling circulation stability is good.

Description

Filtering system of equipment cooling system
Technical Field
The utility model relates to the field of semiconductor devices, in particular to a filtering system of a cooling system of equipment, and particularly relates to the filtering system.
Background
With the special requirements of chip test product application, the chip test environment provides strict requirements, a multi-temperature test flow is realized, the test requirements are provided for test equipment, the existing multi-temperature test flow is divided into a normal high temperature test mode and a low temperature test mode, the existing equipment is divided into a liquid nitrogen mode and a refrigerant mode, the performance price ratio of the existing market selection refrigerant equipment is highest, the method of adopting the low temperature equipment in the refrigerant mode faces a defect, the cooling circulation system configured by the equipment is high in price, and in the heat exchange process, if a pipeline is blocked due to the excessively hard water quality, a large amount of hot air and high electricity consumption are additionally released in the working process, the temperature of the workshop environment is increased, the requirement of the test environment temperature is broken, the working of personnel is uncomfortable, an additional air conditioning system is required to be added for cooling the workshop, and the running cost of the factory is increased intangibly.
Disclosure of Invention
In order to reduce the cost of the cooling system and improve the cooling efficiency, the utility model adopts the following technical scheme:
the filtering system of the equipment cooling system comprises a pure water filtering system and a heat exchange device, wherein the pure water filtering system comprises a water inlet tank, a filter group, a softened water tank, an RO water tank, a security filter, an RO water tank and a mixed bed which are connected in sequence through pipelines; the water supply pump sets are respectively arranged on the pipeline connected between the water outlet of the water inlet tank and the filter group and the pipeline connected between the water outlet of the softening water tank and the security filter and the pipeline connected between the RO water tank and the mixed bed;
the first water inlet of the water inlet tank is externally connected with a water source, the water outlet of the heat exchange device is connected with the second water inlet of the water inlet tank, and the water inlet of the heat exchange device is connected with the water outlet of the mixed bed.
Specifically, the heat exchange device is a plate heat exchanger.
Specifically, the filter group comprises an anthracite filter, a carbon filter tank and a softener which are connected in sequence through a pipeline; ball valves are respectively arranged on the pipelines connected between the filter and the carbon filter tank and the pipelines connected between the carbon filter tank and the softener.
Specifically, the water supply pump set comprises a first pipeline and a second pipeline; the water inlet of the water supply pump set comprises a water inlet of a first pipeline and a water inlet of a second pipeline, the water outlet of the first pipeline and the water outlet of the second pipeline are connected into a whole through a three-way elbow and output, and a first stop valve, a water supply pump, a second stop valve, a check valve and an electric valve are sequentially arranged on the first pipeline and the second pipeline along the downstream direction of water flow.
The scale inhibitor tank is filled with a scale inhibitor solution, a water outlet of the scale inhibitor tank is sequentially connected with a water pump, an electric valve and a check valve along a water outlet direction through a pipeline, and a water outlet of the softening water tank is sequentially connected with the electric ball valve and the first water supply pump set along a water flow direction through a pipeline; the water outlet of the first water supply pump set is connected with the water outlet of the check valve through a three-way pipeline, and the three-way pipeline is connected with the water inlet of the security filter through a pipeline.
Specifically, the humidifier further comprises a second water supply pump set, wherein the water outlet of the electric ball valve is connected with the water inlet of the second water supply pump set and the water inlet of the first water supply pump set respectively through four-way switching elbows, and the water outlet of the second water supply pump set is connected with an external humidifier.
Specifically, the anthracite filter, the carbon filter tank, the softening water tank and the mixed bed are respectively provided with a second water outlet, and the second water outlet is connected with a stop valve through a pipeline.
In summary, the system has the following advantages: the pure water filtering system can effectively prevent the pipeline blockage caused by the excessively hard water quality of the cooling device in the heat exchange process. The system does not generate extra hot air, so that the energy consumption is reduced; the pure water filtering system can be used independently, is externally connected with different cooling devices, achieves universality of pure water filtering, and is simple in installation and operation and good in cooling circulation stability.
Drawings
FIG. 1 is a schematic diagram of a filtration system of a plant cooling system;
FIG. 2 is a schematic view of a plate heat exchanger in a filtration system of an equipment cooling system;
FIG. 3 is a schematic view of a water supply pump set in a plate heat exchanger in a filtration system of an equipment cooling system;
reference numerals: 1, a water inlet tank; 2 an anthracite filter; 3, softening the water tank; 4, a scale inhibitor box; 5, a cartridge filter; a 6RO water tank; 7, mixing the beds; 8RO dense water discharge port; 9 an external water source; 10, a water outlet; 11 plate heat exchanger; a 12 carbon canister; 13 a softener; a 14RO filter; 15 a humidifier; 16 water supply pump group; 1601 first stop valve; 1602 water supply pump; 1603 a second stop valve; 1604 a check valve; 1605 electric ball valve; a water inlet of the 17-plate heat exchanger; and a water outlet of the 18-plate heat exchanger.
Detailed Description
The utility model is further described below with reference to fig. 1 to 3.
A filtering system of a cooling system of equipment comprises a pure water filtering system and a plate heat exchanger 11.
The pure water filtering system comprises a water inlet tank 1, a filter group, a softened water tank 3, a security filter 5, an RO filter 14, an RO water tank 6 and a mixed bed 7 which are connected in sequence through pipelines. Water enters from the water inlet tank 1 and then flows out of the mixed bed 7 to realize filtration and softening of the water.
The water inlet tank 1 comprises a first water inlet and a second water inlet, an external water source 9 enters the water inlet tank 1 from the first water inlet, and the water after heat exchange of the plate heat exchanger 11 is required to be filtered again, so that the second water inlet of the water inlet tank 1 is connected with the water outlet 18 of the plate heat exchanger, the water inlet 17 of the plate heat exchanger is connected with the water outlet of the mixed bed 7, the water flowing through the plate heat exchanger 11 is softened, and the blockage of the plate heat exchanger 11 due to scale formation after the water is heated in the heat exchange process is prevented.
The filter group comprises an anthracite filter 2, a carbon filter tank 12 and a softener 13 which are connected in sequence through pipelines. Ball valves are respectively installed on the pipes connecting the anthracite filter 2 and the carbon canister 12 and between the carbon canister 12 and the softener 13 so that the circulation between the filters can be controlled in stages. When the filter, the softened water tank 3 and the mixed bed 7 are overhauled, water in the container can be discharged, so that second water outlets are respectively arranged on the anthracite filter 2, the carbon filter tank 12, the softener 13, the softened water tank 3 and the mixed bed 7, and the second water outlets are connected with stop valves through pipelines.
In order to realize the automatic circulation of water flow and prevent backflow, a water supply pump set 16 is respectively arranged on a pipeline connected between the water outlet of the water inlet tank 1 and the filter group and a pipeline connected between the water outlet of the softening water tank 3 and the cartridge filter 5 and a pipeline connected between the RO water tank 6 and the mixed bed 7. Wherein the water supply pump assembly 16 comprises a first conduit and a second conduit; the water inlet of the water supply pump set 16 comprises a water inlet of a first pipeline and a water inlet of a second pipeline, the water outlet of the first pipeline and the water outlet of the second pipeline are connected into a whole through a three-way elbow and output, and a first stop valve is sequentially arranged and connected on the first pipeline and the second pipeline along the downstream direction of water flow
1601. A water supply pump 1602, a second shut-off valve 1603, a check valve 1604, and an electric valve 1605.
The water outlet of the softened water tank 3 is connected with an electric ball valve through a pipeline, and the water outlet of the electric ball valve is respectively connected with the water inlet of the second water supply pump set 16 and the water inlet of the first water supply pump set through four-way switching elbows. In order to prevent the water in the softened water tank 3 from entering the RO filter 14 and causing the damage of the RO filter 14 due to the too high hardness of the water, a scale inhibitor tank is further arranged, a scale inhibitor solution is filled in the scale inhibitor tank, a water outlet of the scale inhibitor tank 4 is sequentially connected with a water pump, an electric valve and a check valve along the water outlet direction through pipelines, a water outlet of the first water supply pump set is connected with a water outlet of the check valve through a three-way pipeline, and the three-way pipeline is connected with a water inlet of the security filter 5 through a pipeline. In order to directly take out the water in the softened water tank 3 for use, the water outlet of the second water supply pump set is connected with an external humidifier 15, so that the humidifying effect is realized.
The working flow of the cooling system is as follows: the external water source 9 enters the water inlet tank 1 from the first water inlet of the water inlet tank 1, the ball valve and the hydraulic valve are sequentially connected between the external water source 9 and the first water inlet along the forward flow direction of the water flow through the pipeline, then the water is softened through the filter group, the softened water is stored in the softened water tank 3, the softened water and the solution in the scale inhibitor tank 4 are simultaneously transmitted to the security filter 5 for coarse filtration, then the water is transmitted to the RO filter 14 for reverse osmosis filtration, the water after reverse osmosis is transmitted to the RO water tank 6 for storage, and the water in the RO water tank 6 is transmitted to the mixed bed 7, so that the hardness of the water is further reduced. The water passing through the mixed bed 7 can be transmitted into the plate heat exchanger 11, the plate heat exchanger cools the high-temperature object, the plate heat exchanger transmits the cooled water to the second water inlet of the water inlet tank 1, and the water is filtered again.
In summary, the system has the following advantages: the pure water filtering system can effectively prevent the pipeline blockage caused by the excessively hard water quality of the cooling device in the heat exchange process. The system does not generate extra hot air, so that the energy consumption is reduced; the pure water filtering system can be used independently, is externally connected with different cooling devices, achieves universality of pure water filtering, and is simple in installation and operation and good in cooling circulation stability.
It is to be understood that the foregoing detailed description of the utility model is merely illustrative of the utility model and is not limited to the embodiments of the utility model. It will be understood by those of ordinary skill in the art that the present utility model may be modified or substituted for elements thereof to achieve the same technical effects; as long as the use requirement is met, the utility model is within the protection scope of the utility model.

Claims (7)

1. The filtering system of the equipment cooling system is characterized by comprising a pure water filtering system and a heat exchange device, wherein the pure water filtering system comprises a water inlet tank, a filter group, a softened water tank, a cartridge filter, an RO water tank and a mixed bed which are connected in sequence through pipelines; a water supply pump set is respectively arranged on a pipeline connected between the water outlet of the water inlet tank and the filter group and a pipeline connected between the water outlet of the softening water tank and the security filter, and a pipeline connected between the RO water tank and the mixed bed;
the first water inlet of the water inlet tank is externally connected with a water source, the water outlet of the heat exchange device is connected with the second water inlet of the water inlet tank, and the water inlet of the heat exchange device is connected with the water outlet of the mixed bed.
2. The filtration system of a facility cooling system of claim 1 wherein the heat exchange device is a plate heat exchanger.
3. The filtration system of a facility cooling system of claim 1 wherein the filter group comprises an anthracite filter, a carbon canister, a softener connected in sequence by a conduit; ball valves are respectively arranged on a pipeline connected between the filter and the carbon filter tank and a pipeline connected between the carbon filter tank and the softener.
4. The filtration system of an equipment cooling system of claim 1 wherein the water supply pump stack comprises a first conduit and a second conduit; the water inlet of the water supply pump set comprises a water inlet of a first pipeline and a water inlet of a second pipeline, wherein a water outlet of the first pipeline and a water outlet of the second pipeline are connected into a whole through a three-way elbow and output, and a first stop valve, a water supply pump, a second stop valve, a check valve and an electric valve are sequentially arranged on the first pipeline and the second pipeline along the downstream direction of water flow.
5. The filtering system of the equipment cooling system according to claim 4, further comprising a scale inhibitor tank, wherein a scale inhibitor solution is contained in the scale inhibitor tank, a water outlet of the scale inhibitor tank is sequentially connected with a water pump, an electric valve and a check valve along a water outlet direction through a pipeline, and a water outlet of the softening water tank is sequentially connected with the electric ball valve and the first water supply pump set along a water flow direction through a pipeline; the water outlet of the first water supply pump set is connected with the water outlet of the check valve through a three-way pipeline, and the three-way pipeline is connected with the water inlet of the cartridge filter through a pipeline.
6. The filtering system of the equipment cooling system according to claim 5, further comprising a second water supply pump set, wherein the water outlet of the electric ball valve is respectively connected with the water inlet of the second water supply pump set and the water inlet of the first water supply pump set through a four-way switching elbow, and the water outlet of the second water supply pump set is connected with an external humidifier.
7. The filtration system of the equipment cooling system according to claim 3, wherein the anthracite filter, the carbon filter tank, the softener and the mixed bed are respectively provided with a second water outlet, and the second water outlet is connected with a stop valve through a pipeline.
CN202221328607.9U 2022-05-30 2022-05-30 Filtering system of equipment cooling system Active CN219709300U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221328607.9U CN219709300U (en) 2022-05-30 2022-05-30 Filtering system of equipment cooling system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221328607.9U CN219709300U (en) 2022-05-30 2022-05-30 Filtering system of equipment cooling system

Publications (1)

Publication Number Publication Date
CN219709300U true CN219709300U (en) 2023-09-19

Family

ID=87982996

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221328607.9U Active CN219709300U (en) 2022-05-30 2022-05-30 Filtering system of equipment cooling system

Country Status (1)

Country Link
CN (1) CN219709300U (en)

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