JP4343616B2 - ナノ構造体の製造方法及びナノ構造体 - Google Patents

ナノ構造体の製造方法及びナノ構造体 Download PDF

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Publication number
JP4343616B2
JP4343616B2 JP2003290538A JP2003290538A JP4343616B2 JP 4343616 B2 JP4343616 B2 JP 4343616B2 JP 2003290538 A JP2003290538 A JP 2003290538A JP 2003290538 A JP2003290538 A JP 2003290538A JP 4343616 B2 JP4343616 B2 JP 4343616B2
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substrate
nanostructure
thin film
film
columnar
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Japanese (ja)
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JP2005060755A5 (https=
JP2005060755A (ja
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馨 小中原
透 田
和彦 福谷
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Canon Inc
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Canon Inc
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Priority to JP2003290538A priority Critical patent/JP4343616B2/ja
Priority to US10/912,082 priority patent/US7545010B2/en
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JP2003290538A 2003-08-08 2003-08-08 ナノ構造体の製造方法及びナノ構造体 Expired - Fee Related JP4343616B2 (ja)

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Application Number Priority Date Filing Date Title
JP2003290538A JP4343616B2 (ja) 2003-08-08 2003-08-08 ナノ構造体の製造方法及びナノ構造体
US10/912,082 US7545010B2 (en) 2003-08-08 2004-08-06 Catalytic sensor structure

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Application Number Priority Date Filing Date Title
JP2003290538A JP4343616B2 (ja) 2003-08-08 2003-08-08 ナノ構造体の製造方法及びナノ構造体

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JP2005060755A JP2005060755A (ja) 2005-03-10
JP2005060755A5 JP2005060755A5 (https=) 2006-09-14
JP4343616B2 true JP4343616B2 (ja) 2009-10-14

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4965835B2 (ja) * 2005-03-25 2012-07-04 キヤノン株式会社 構造体、その製造方法、及び該構造体を用いたデバイス
FR2885913B1 (fr) * 2005-05-18 2007-08-10 Centre Nat Rech Scient Element composite comprenant un substrat conducteur et un revetement metallique nanostructure.
JP2009057518A (ja) * 2007-09-03 2009-03-19 Institute Of Physical & Chemical Research 異方性フィルムおよび異方性フィルムの製造方法
JP5261475B2 (ja) * 2008-03-07 2013-08-14 独立行政法人科学技術振興機構 複合材料及びその製造方法、並びにその製造装置

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