JP4339866B2 - Manufacturing method for getter box - Google Patents

Description

The present invention relates to a getter box that evacuates a sealed container mainly composed of glass, such as a high-definition flat panel display.

In recent years, a glass sealed container having a high-functional vacuum element formed on the inner surface by a semiconductor microfabrication technique has been used as a high-definition flat display device, a sensor, a high-frequency amplifier, and the like. In such a sealed container, generally, two glass substrates on which fine cathode or anode elements are formed on the surface are arranged at predetermined intervals so that the elements face each other, and the periphery is sealed with sealing glass. Composed. After that, a getter box is attached and the inside is evacuated. Such a getter box is disclosed in the following patent document, for example.

FIG. 6 is a perspective view of a getter box 20 manufactured by a conventional general method. The getter box is made of glass and has a shallow box shape. First, the side frame portion is assembled into a square ring shape by adhering four side members 21, 21, 22, 22 obtained by cutting a glass plate with a sealing glass 24. Next, the bottom member 23 obtained by cutting the glass plate is bonded with sealing glass to form a shallow box shape. An exhaust hole 25 penetrating the front and back is formed in the bottom member 23, and a glass exhaust cylinder 26 is bonded to the back side thereof with sealing glass.
Japanese Patent Laid-Open No. 9-45243 Japanese Patent Laid-Open No. 11-233027

The above-described getter box manufacturing method has to process and assemble a large number of parts, resulting in poor manufacturing efficiency and high cost. Further, the getter box is required to have high airtightness, but air leakage is likely to occur at the portion of the sealing glass 24 to which the side members 21 and 22 are bonded, and the yield is poor. An object of the present invention is to develop a method for manufacturing a getter box that reduces the number of components and facilitates assembly work, and that has a low yield of air leakage and a high yield.

The present invention includes a step of forming a glass bottle, cutting the body portion of the glass bottle into a ring shape to form a side frame member, and bonding a bottom surface member to the side frame member to form a box shape. This is a method for manufacturing a getter box .

In the getter box manufacturing method of the present invention, since the side frame members are integrally formed in a ring shape, the number of parts is small compared to the conventional manufacturing method, and the assembling work is facilitated. Further, since there is no side member seamless as in the prior art, the possibility of air leakage is extremely reduced, and the yield is improved. Since the glass bottle used as the material of the side frame member can be easily manufactured using a conventionally known molding machine, the side frame member can be easily manufactured.

1 is a side view of the glass bottle 8, FIG. 2 is a perspective view of the side frame member 2 and the bottom surface member 3, and FIG. 3 is a cross-sectional view of the getter box 1 manufactured by the manufacturing method of the embodiment. The glass bottle can be easily molded by a conventionally known molding machine such as a so-called IS machine. The barrel portion of the glass bottle is designed so that the cross-sectional shape is the shape of the desired side frame portion. The body portion of the glass bottle 8 is cut along the cutting line 9 to form the ring-shaped side frame member 2. This cutting can be performed by, for example, a multi-wire saw. Next, as shown in FIGS. 2 and 3, the bottom member 3 is bonded to the side frame member 2 to form a shallow box shape. The bottom member can be obtained by cutting a sheet glass that is usually marketed or a sheet glass formed by a general glass press molding machine by cracking or the like. An exhaust hole 4 penetrating front and back is formed in the bottom member 3. Adhesion between the side frame member 2 and the bottom member 3 can be performed with the low melting point sealing glass 7 as in the conventional product. A glass exhaust tube 6 is bonded to the back side of the bottom member 3 with a sealing glass 7. A getter 5 such as barium can be attached to the inner surface side of the bottom member 3 as necessary.

FIG. 4 is an explanatory diagram of a usage example of the getter box 1. Reference numeral 10 denotes an airtight container (high-definition flat panel display device), in which glass substrates 11 and 12 having a large number of elements (not shown) formed on the inner surface face each other, and the periphery is sealed with a sealing glass 13. It is a thing. The glass substrate 11 is provided with an exhaust hole 14, and the getter box 1 is bonded and fixed to the portion with sealing glass. The air inside the container is exhausted from the exhaust cylinder 6, and then the exhaust hole 4 is sealed, so that the inside of the container is almost evacuated. Next, getter flash is performed by high frequency heating. The getter 5 such as barium is flushed by high-frequency heating, and a deposited film such as metal barium adsorbs the residual gas in the container, and the inside of the container is in a high vacuum state.

As a reference example, a case where a glass tube is used instead of the glass bottle of the present invention will be described. FIG. 5 is a side view of the glass tube 15. The glass tube can be formed by, for example, a so-called Danner machine. The glass tube is designed so that the cross-sectional shape is the shape of the desired side frame portion. The glass tube 15 is cut | disconnected like the cutting line 16, and a ring-shaped side frame member is formed. This cutting can be performed by, for example, a multi-wire saw. Subsequent processes can produce a getter box in exactly the same manner as the above method using a glass bottle.

It is a side view of the glass bottle 8. 4 is a perspective view of a side frame member 2 and a bottom surface member 3. FIG. It is sectional drawing of the getter box 1 manufactured with the manufacturing method of the Example. It is explanatory drawing of the usage example of the getter box 1. FIG. 2 is a side view of a glass tube 15. FIG. It is a perspective view of the getter box 20 manufactured by the conventional method.

1 Getter box 2 Side frame member 3 Bottom member 4 Exhaust hole 5 Getter 6 Exhaust cylinder 7 Sealing glass 8 Glass bottle 9 Cutting line 10 Sealed container 11 Glass substrate 12 Glass substrate 13 Sealing glass 14 Exhaust hole 15 Glass tube 16 Cutting line 20 getter box 21 side member 22 side member 23 bottom member

Claims (1)

Forming a glass bottle, cutting the body portion of the glass bottle into a ring shape to form a side frame member, and bonding a bottom surface member to the side frame member to form a box shape, A method for manufacturing a getter box .

Images