CN1156870C

CN1156870C - Metal member sealed with ceramic

Info

Publication number: CN1156870C
Application number: CNB011104120A
Authority: CN
Inventors: 任建昌
Original assignee: BOE Technology Group Co Ltd
Current assignee: Beijing Orient Vacuum Electric Co Ltd
Priority date: 2001-04-03
Filing date: 2001-04-03
Publication date: 2004-07-07
Anticipated expiration: 2021-04-03
Also published as: CN1378228A

Abstract

The present invention relates to a metal member sealed with ceramic. The body section structure of the sealed metal member is provided with a convex cavity in the central part, and the inner side and the outer side of the convex cavity are provided with horizontal extending parts sealed with ceramic metallization layers; the convex cavity is an integral convex loop or a plurality of separated convex loops for positioning and attaching a metal cover plate to the outer side of the convex loop; the inner horizontal extending part is provided with positioning sheets bending inwards, and the positioning sheets are positioned and pushed against the inner wall of the ceramic. The present invention has the advantages of good gas tightness, long service life, high reliability, low cost and easy fabrication, and simultaneously realizes simple, convenient and accurate coaxial positioning of electrodes.

Description

Hardware with crunch seal

Technical field

The present invention relates to a kind of can with the hardware that has the metal layer crunch seal, especially a kind of by with the common sealing-in hardware that constitutes bubble-tight vacuum chamber and can bear certain air pressure of the tight sealing-in of pottery.

Background technology

At present, in many products, for example in some electron tubes, light supply apparatus and some semiconductor device, the especially electron tube, how ceramic material is as insulating material, hardware is a conductive component, so just pottery and metal sealing need be got up, and mostly be both need be sealed up to constitute a bubble-tight chamber usually, and guarantee that chamber is a vacuum environment, therefore pottery not only will be connected closely with metal sealing, also will bear certain atmospheric pressure.Present general way, as shown in Figure 1, be scolder 2 to be set having metal layer 11 ceramic 1 surfaces, a kind of structured metal layer of specific materials-can cut down material 3 is set on the scolder 2, can cut down at this scolder 2 is set on the material 3 again, scolder 2 ' is gone up to press and is established the pottery 1 ' that has metal layer 11 ', so that absorb the stress that can cut down heat expansion, the syndeton of this pottery and metal constitutes so-called dried seal structure.This material that cuts down is a kind of iron cobalt nickel alloy, has strict composition restriction.The cobalt metal is very expensive, and the price that can cut down material approximately is stainless 10 times.And the surface that can cut down material members must nickel plating, annealing in hydrogen atmosphere, could with other solder bonding metals, and need repeatedly annealing, the cost of whole manufacturing process is higher.Have again and can cut down the material ratio and be easier to corrosion, therefore use the product of this made shorter useful life, gas leakage easily, the percent defective height, reliability is low, the technology instability.Also having a kind of pottery and metal sealing structure is upright seal structure, as shown in Figure 2, just hardware 3 is erected, by scolder 2 directly with metal layer 11 sealing-ins of pottery 1, this structure is often because the metal envelope is hung the local stress corrosion greatly, thereby useful life is shorter.Abroad in recent years, proposed a kind of new pottery and metal sealing structure, Figure 4 shows that vacuum tube part section perspective view, metal cover board 6 is a stainless steel material, connection by sealing-in hardware 4 is arranged on ceramic 1 two ends, and cavity 7 is the vacuum shape.Concrete sealing structure as shown in Figure 3, sealing-in hardware 4 has the horizontal sealing-in sticking part 41 of the jut 42 and the outside, the horizontal sealing-in sticking part 41 in the outside is by metal layer 11 sealing-ins of scolder 2 with pottery 1, metal cover board 6 fits tightly with sealing-in hardware 4 juts 42 outer walls, thereby constitutes whole sealing structure.Utilize this sealing-in hardware 4 can realize adopting different metals, constitute sealing structure, for example, because metal cover board 6 is not direct and ceramic 1 sealing-in, therefore can utilize material such as stainless steel as metal cover board, can reduce the cost of material greatly, and simplify the manufacture craft of sealing-in.But jut 42 owing to the sealing-in hardware 4 that designs for applying with metal cover board 6, and the inner ring extension 43 that plays shielding action of the inboard of sealing-in hardware, work in-process not only, and in use influenced the sealing-in effect of the horizontal sealing-in sticking part 41 in sealing-in hardware 4 outsides and the metal layer 11 of pottery 1, the junction such as the same fulcrum that cause sticking part 41 and jut 42, sticking part 41 is bearing the active force that the rear portion is upturned all the time, add the thermal stress of vacuum extinction generation and the effect of external pressure simultaneously, the weld of sticking part 41 splits easily, be upturned, cause gas leakage, product rejection.Have, being provided with of this whole hardware work in-process needs mould to fix again, and the electrode coaxial positioning at two ends needs constantly to adjust just can finish up and down, and complex procedures, precision are not high.Just so-called two end electrodes axiality problem.Because the mechanical dimension's precision behind the uncontrollable forming process of ceramics of processing technology of pottery, and being provided with of ceramic component two end electrodes must be on the same axis, just two end electrodes requires coaxial positioning, solution of the prior art is the coaxial position of determining relatively along coarse ceramic wall adjustment, be actually according to size is coarse and adjust deviation with reference to object, whole process is time-consuming, the effort of ten minutes often, and be difficult to reach the requirement of axiality, thereby having a strong impact on the important performance of product.

Summary of the invention

Main purpose of the present invention is to provide a kind of various deficiencies of hardware technology of and crunch seal, and air-tightness is good, and cost is low, and the reliability height is easy to manufacture.

Another purpose of the present invention is to provide a kind of and hardware crunch seal, and it can realize the coaxial accurate location of electrode, and the location is simple, convenient, and this location in welding of member is without any need for mould simultaneously.

The object of the present invention is achieved like this: a kind of hardware of and crunch seal, it comprises sealing-in hardware body, wherein said body is provided with protruding cavity, the both sides of cavity have horizontal-extending portion, the both sides extension all with the ceramic metallized layer sealing-in.

Further, described protruding cavity can be more than one.

The projection cavity is the bulge loop of whole bulge loop or plurality of separate, makes metal cover board can locate and fit in the outside portion of this bulge loop.

Further, protruding cavity is for separating the jut that is provided with, and for example the second road cavity is for separating the jut that is provided with.

Extension is provided with the inwardly curved positioning element on ceramic inner walls of conflicting in the level of being confused.

Described positioning element is the annular groove of one or one above indent, or one or more separate the interior recess that is provided with; Also can be one or more positioning cards of offering.

In addition, the material of the body of being confused is for can cut down material or copper or silver or nickel.

Compared with prior art, the present invention has following tangible advantage:

1, owing to has twice even the sealing surface more than the twice with ceramic metallized layer, and protruding cavity becomes to have and prevents the load lock of leaking gas, make that sealing-in is airtight to have had multiple guarantee design, so the qualification rate of product and reliability improved greatly all, prolong useful life.

2, manufacturing process is simplified, and when member is provided with, can finish positioning and fixing, therefore no longer needs to use auxiliary mould to fix in the welding.

3, owing to the setting of spacer, remedy, adjusted the coarse shortcoming of ceramic machinery size, realize the accurate coaxial positioning of electrode, further ensured the requirement of satisfying important performance indexes such as the electrical characteristics of product, mechanical dynamic characteristic.

Description of drawings

Fig. 1 is one of prior art structural representation;

Fig. 2 is two of a prior art structural representation;

Fig. 3 is three of a prior art structural representation;

Fig. 4 is a vacuum tube part section perspective view;

Storing up 5 is an embodiment of the present invention structural representation;

Fig. 6 is another example structure schematic diagram of the present invention.

Embodiment

Referring to Fig. 5, be a kind of preferred embodiment structural representation of the present invention.It comprises sealing-in hardware body 5, wherein body 5 cross-section structure central portions have a protruding cavity 52, the interior outside of cavity 52 has horizontal-extending

portion

51,53,

extension

51,53 and ceramic 1 metal layer 11 are by scolder 2 sealing-ins, so sealing-in hardware 5 and pottery 1, metal layer 11 has the weld part of two seals combination.Projection cavity 52 is whole bulge loop, thereby constitutes the separate chamber of a perforation.The outside portion of whole bulge loop and metal cover board 6 are fitted, and the sticking part binding site also can add scolder 21.According to this structure, be not difficult to analyze, if the weld of outside extension 51 splits, leaking air, is to enter air in the protruding cavity 52 so, and still tightening seal is then as the welding of the inboard extension 53 in defence line, second road, (stereochemical structure signal combination is referring to Fig. 4) in the Nei Ce vacuum chamber like this, still keeping vacuum state, can not leak air, product still can normally use.Have, owing to have the twice welding ring between sealing-in hardware 5 and ceramic 1 metal layer 11, therefore the welding position of outside extension 51 no longer is subjected to the active force that makes progress again, can be more docilely and 11 sealing-ins of ceramic 1 metal layer.

The material of sealing-in hardware 5 bodies of the present invention is the metal material that any ductility is good, vacuum-tightness is good, so that adapt to STRESS VARIATION, satisfies the sealing-in requirement.For reducing product cost, for example sealing-in hardware 5 can be the manufacturing of oxygen-free copper material.Metal cover board 6 is a stainless steel, and not only material is cheap, and all members no longer need to electroplate, and has simplified technology greatly, reduces production costs more.

Further, as shown in Figure 5, in the inner ring portion 54 of the present invention's extension bending downwards in sealing-in hardware 5 levels, offer the location conflict spacer 55 on ceramic 1 inwall that to bend inwards more than.The setting of this spacer 55 not only can be omitted in the chess tool of assisting the fixedly usefulness of sealing-in hardware 5 and ceramic 1 parts in the welding procedure, after the location snaps in, directly sealing-in hardware 5 and ceramic 1 parts are put into the ultra-clean chamber welding, and this structure is also directly located the axiality of having adjusted two end electrodes, remedy the coarse defective of ceramic machinery size, solved the problem of two end electrodes axiality once.

In addition, the present invention's projection cavity can be more than one.Referring to another preferred embodiment shown in Figure 6, bulge loop can be designed to two circles, has increased by second projection 56, can further improve the effect of sealing-in like this, forms multiple tracks sealing-in, multilayer isolated chamber, further improves product reliability, increases the service life.

Again, in order to strengthen air-tightness of the present invention, adapt to the STRESS VARIATION of different parts, second projection 56 can be the local crowning cavity of separation, rather than an integral ring-shaped bulge loop.This projection 56 can be a plurality of.

Have, as shown in Figure 6, the positioning element in the inner ring portion 54 is the annular groove 57 of one or one above indent, its effect and above-mentioned spacer basically identical again.Certainly, the positioning element in the inner ring portion 54 also can be that one or more separate the interior recess that is provided with, to adapt to different application demands.

Claims

1, a kind of hardware of and crunch seal, it comprises sealing-in hardware body, it is characterized in that: described body is provided with protruding cavity, the both sides of cavity have horizontal-extending portion, the both sides extension all with the ceramic metallized layer sealing-in.

2, the hardware of according to claim 1 and crunch seal is characterized in that described protruding cavity is more than one.

3, the hardware of according to claim 1 and 2 and crunch seal, it is characterized in that: described protruding cavity is whole bulge loop.

4, the hardware of according to claim 1 and crunch seal is characterized in that: described protruding cavity is to separate the jut that is provided with more than one.

5, the hardware of according to claim 1 and crunch seal is characterized in that: extension is provided with the inwardly curved positioning element on ceramic inner walls of conflicting in the described level.

6, the hardware of according to claim 5 and crunch seal is characterized in that: described positioning element is the annular groove of above indent together or together.

7, the hardware of according to claim 5 and crunch seal is characterized in that: described positioning element is that one or more separate the indent that is provided with.

8, the hardware of according to claim 5 and crunch seal, it is characterized in that: described positioning element is one or more positioning cards of offering.

9, the hardware of according to claim 1 and crunch seal, it is characterized in that: the material of described body is for can cut down material or copper or silver or nickel.