JP4337729B2 - Antenna manufacturing apparatus and manufacturing method thereof - Google Patents

Description

  This invention is a large thin-walled workpiece such as a low-rigidity aluminum material that is prone to deformation due to cutting resistance or a large parabolic antenna that is prone to its own weight deformation. The present invention relates to an apparatus and a manufacturing method thereof.

  A radio wave having a frequency of 100 GHz or more requires a mirror accuracy of several μm RMS level because its wavelength is as short as millimeters to submillimeters. Since it is difficult to obtain this accuracy in forming a plate used in a normal antenna panel, attempts have been made to obtain a desired accuracy by cutting.

In FIG. 1, the back surface A12 of the antenna panel A1 is fixed to the processing surface plate 12 by a basic fixture 3 having a self-aligning bearing such as a spherical bearing 32, and the reflection surface A11 thereof is An antenna manufacturing apparatus processed by the processing tool 11 is disclosed.

In FIG. 6, the back surface A12 of the antenna panel A1 is fixed to the processing surface plate 12 by a normal basic fixture 3, and the antenna panel A1 is easily deformed by the processing force of the processing tool 11 of the antenna panel A1. Reflective surface with a hardness variable support 6 comprising a hardness variable portion 61 and a Peltier element (heating / cooling portion) 62 formed of a heat-deformable material between the back surface A12 and the processing surface plate 12 It describes that A11 is processed.

  In FIG. 2 and FIG. 3, in step ST11, the thin plate 4 is fixed on the surface plate 1 with wax 3 and ground on one side (ST12), the wax 3 is melted (ST13), and the thin plate 4 is fixed again. Wax 3 is fixed on the board 1 (ST14), the same surface is ground and mirror-finished (ST15), the flow chart showing the grinding method of the thin plate in which the wax 3 is melted and the thin plate 4 is removed in step ST16 and its explanatory diagram (FIG. 3). ) Is disclosed.

FIG. 1 shows a base that is placed and fixed on a table 4 of a machine tool, a support means for supporting the work W on the base, and a work W supported by the support means. The clamping means 20, 21, 22 for holding and fixing on the base, the deformation detecting means 40 for detecting the deformation state of the work W held and fixed, and the detected deformation state of the work W On the basis of this, there is disclosed a work mounting and holding device provided with a clamp control means 35 for adjusting and controlling the pressing force of the clamp means 20, 21 and 22.

JP 2004-34262 A

Japanese Patent Laid-Open No. 10-217075

JP 2000-308933 A

  In the conventional apparatus and method disclosed in Japanese Patent Application Laid-Open No. 2004-34262, it is described that a workpiece is fixed by a heat-deformable material using a Peltier element. However, the solidification fixing method has been sufficiently studied. In other words, there is a problem that the fixing portion is disengaged, there is a change in position, there is room for further study on high accuracy, and a mechanical clamping method must be mainly considered.

In JP-A-10-217075, wax is applied to a rotating platen through a thin plate, the thin plate is ground with a grindstone, heated to melt the wax, and then the wax is naturally cooled, fine ceramic, etc. However, there is no mention of the wax application area, the container for storing it, and the specific heating / cooling method.

In Japanese Patent Application Laid-Open No. 2000-308933, a deformation detecting means for detecting a deformation state of a work held and fixed by a clamping means, and a pressing force of the clamping means based on the deformation state of the work detected by the deformation detecting means. The clamp control means that adjusts and controls the workpiece prevents deformation of the workpiece within the allowable range and prevents the workpiece from being displaced by the processing load. There is a problem that it becomes necessary and the apparatus becomes complicated.

  The antenna manufacturing apparatus and the manufacturing method thereof according to the present invention were made to solve the above-described problems, and in order to achieve a suitable low distortion of the antenna panel that requires high-precision cutting, An object of the present invention is to provide an antenna manufacturing apparatus that uses a heat-deformable material (such as WAX) and incorporates an algorithm for improving accuracy and a manufacturing method thereof.

According to a first aspect of the present invention, there is provided an antenna manufacturing apparatus disposed to face a basic fixture for supporting a back surface of a workpiece having a front surface as a machining surface, and a plurality of protrusions provided on the back surface of the workpiece. A wax container filled with the heat-deformable material formed therein, heating and cooling means for reversibly melting and solidifying the heat-deformable material by heating and cooling the individual wax containers, and the protrusions and movable in the extending direction, said heated by heating and cooling means, when the heat deformable material is melted, with dipping the projecting portion in the wax housing filled in instrument the heat deformation resistance in the material a stage for embedding in a position that does not contact the protrusion on the bottom surface of the wax accommodation tool, said cooled by heating and cooling means, when the heat deformable material is solidified, the wax housing and said protrusion Doo is that a displacement measuring means for measuring the displacement of the rear of the workpiece in a state of being fixed.

According to a second aspect of the present invention, there is provided an antenna manufacturing apparatus comprising: a variable displacement obtained by measuring a back surface of the workpiece in a state where the protrusion and the wax container are fixed; and a displacement measurement before being fixed. The stage is moved so as to cancel the difference from the initial value, the displacement difference before and after the movement is used as a correction value, and when the correction value is less than the allowable value, the cutting of the work surface of the workpiece is started. It is a thing of Claim 1 characterized by the above-mentioned.

  In the antenna manufacturing apparatus according to claim 3 of the present invention, the correction value is created corresponding to each case where the individual stages are sequentially moved, and the workpiece is processed when each correction value is equal to or less than an allowable value. Cutting of the processed surface of a thing is started, The thing of Claim 2 characterized by the above-mentioned.

  The antenna manufacturing apparatus according to claim 4 of the present invention is the antenna manufacturing apparatus according to claim 2 or 3, wherein the correction value is an average value of displacements at a plurality of measurement positions of the workpiece. .

According to a fifth aspect of the present invention, there is provided an antenna manufacturing apparatus that is disposed opposite to a basic fixture that supports a back surface of a workpiece having a front surface as a processing surface, and a plurality of protrusions provided on the back surface of the workpiece. A wax container filled with the heat-deformable material formed therein, and a gap detection means installed on the bottom surface of the wax container filled with the heat-deformable material and detecting a gap between the protrusions; Heating and cooling means for reversibly melting and solidifying the heat-deformable material by heating and cooling the individual wax containers, and moving in the extending direction of the protrusions , and heated by the heating and cooling means , when the heat deformation material is melted, the protrusion at a position which does not abut the projections with immersion in the wax housing filled in instrument the heat deformation resistance in the material on the bottom of the wax accommodation tool Buried A stage for the is cooled by heating and cooling means, when the heat deformable material has solidified, the measured displacement amount of the back surface of the workpiece in a state where the projecting portion and said wax accommodation tool is fixed it is obtained by a displacement measuring means for.

  In the antenna manufacturing apparatus according to claim 6 of the present invention, when the gap amount by the gap detection means is not an allowable value, the stage is configured such that the heating deformable material is remelted by the heating and cooling means, and then a reference It returns to a position, It is a thing of Claim 5 characterized by the above-mentioned.

According to a seventh aspect of the present invention, there is provided an antenna manufacturing apparatus manufacturing method comprising: providing a plurality of protrusions on a workpiece; supporting the workpiece with a basic fixture; and heating the workpiece to a position facing the protrusions on a stage. A first step of bringing a wax container filled with a deformable material in the vicinity thereof; a second step of melting the heat deformable material by heating the wax container; and During the melting period, the protrusion is immersed in the heat-deformable material on the stage, and the state in which the protrusion is embedded to a position where it does not contact the bottom surface of the wax container is the workpiece of the displacement measuring means. a third step of the displacement measurement initial value of the displacement amount measurement of the object, by cooling the wax storage equipment, a fourth step of coagulating the heat deformable material, the heat deformation resistant material During solidification, the amount of displacement of the back surface of the workpiece is measured in a state where the protrusion and the wax container are fixed, and the difference from the initial displacement measurement value measured before being fixed is canceled. The stage is moved as described above, and a displacement difference before and after the movement is set as a correction value. When the correction value is equal to or less than an allowable value, a fifth step of starting cutting of the processed surface of the workpiece is included.

  In the method for manufacturing an antenna manufacturing apparatus according to claim 8 of the present invention, the correction value is created corresponding to each case where the individual stages are sequentially moved, and each correction value is less than an allowable value. The cutting of the processed surface of the workpiece is started.

  The method for manufacturing an antenna manufacturing apparatus according to claim 9 of the present invention is characterized in that the correction value is an average value of displacements at a plurality of measurement positions of the workpiece. Is.

According to a tenth aspect of the present invention, there is provided a method for manufacturing an antenna manufacturing apparatus, wherein a plurality of protrusions are provided on a workpiece, the workpiece is supported by a basic fixture, and heated to a position facing the protrusions on a stage. A first step of bringing a wax container filled with a deformable material in the vicinity thereof; a second step of melting the heat deformable material by heating the wax container; and During the melting period, based on the indication value of the gap detection means for detecting the gap between the protrusion and the protrusion previously installed on the bottom surface of the wax container while immersing the protrusion in the heat deformable material on the stage, a third step of the displacement measurement initial value of the displacement amount measurement of the workpiece displacement measuring means a state in which is embedded the protrusion to a position that does not contact the bottom surface of the wax accommodation tool, wherein A fourth step of solidifying the heat-deformable material by cooling the box-detainer, and the protrusion and the wax container are fixed while the heat-deformable material is solidified. The displacement of the back surface of the workpiece is measured, the stage is moved so as to cancel the difference from the initial displacement measurement value before being fixed, and the displacement difference before and after the movement is used as a correction value. Includes a fifth step of starting the cutting of the processed surface of the workpiece when is below the allowable value.

  In the antenna manufacturing apparatus manufacturing method according to claim 11 of the present invention, the correction value is created corresponding to each case where the individual stages are sequentially moved, and each correction value is equal to or less than an allowable value. The cutting of the processed surface of the workpiece is started.

  The antenna manufacturing apparatus manufacturing method according to claim 12 of the present invention is characterized in that the correction value is an average value of displacements at a plurality of measurement positions of the workpiece. Is.

  In the antenna manufacturing apparatus according to the present invention, the basic fixture for supporting the back surface of the workpiece having the front surface as the processing surface, and the heat deformability installed facing the plurality of protrusions provided on the back surface of the workpiece. A wax container filled with a material; heating and cooling means for reversibly melting and solidifying the heat-deformable material by heating and cooling the individual wax containers; and when the heat-deformable material is melted In the extending direction of the protrusion, the protrusion is immersed in the heat-deformable material filled in the wax container and the protrusion is embedded at a position not contacting the bottom surface of the wax container. A movable stage; and a displacement measuring means including measuring the amount of displacement of the back surface of the workpiece while the protrusion and the wax container are fixed when the heat-deformable material is solidified. Preparation Since, it is possible to achieve a suitable low distortion antenna panels highly accurate cutting process is required, there is an effect capable of producing high-quality, high-precision antenna panels little variation.

  In the method for manufacturing an antenna manufacturing apparatus according to the present invention, a plurality of protrusions are provided on a workpiece, the workpiece is supported by a basic fixture, and a heat-deformable material is placed at a position facing the protrusion on a stage. During the melting period of the heat deformable material, the first step of bringing the wax container filled in the vicinity, the second step of melting the heat deformable material by heating the wax container, The projection is immersed in the heat-deformable material on the stage, and the projection is embedded to a position where it does not come into contact with the bottom surface of the wax container, and is used as a displacement measurement initial value of the workpiece. A step of solidifying the heat-deformable material by cooling the wax container, and the protrusion and the wax container are fixed when the heat-deformable material is solidified. In this state, the amount of displacement of the back surface of the workpiece is measured, the stage is moved so as to cancel the difference from the displacement measurement initial value measured before being fixed, and the displacement difference before and after the movement Is included as a correction value, and when the correction value is equal to or less than the allowable value, the fifth step of starting cutting the work surface of the workpiece is included. Even for workpieces, it has been defined to a value that can suppress deformation during processing as much as possible, so that the amount and variation of deformation during processing can be kept small, and high-quality and high-accuracy antenna panels with little variation in processing accuracy are manufactured. There is an effect that can be done.

Example 1.
Embodiment 1 of the present invention will be described below. FIG. 1 is a side view showing a configuration around a processing section of an antenna manufacturing apparatus according to the present invention. In FIG. 1, reference numeral 1 denotes an antenna panel as a workpiece, and reference numeral 1a denotes a front surface and a processed surface of the antenna panel 1. 1b is the back surface (back surface) of the antenna panel 1. Reference numeral 2 denotes a basic fixture provided on the antenna panel back surface 1 b for supporting the antenna panel 1. Reference numeral 3 denotes a plurality of protrusions provided on the back surface 1 b of the antenna panel 1. 4 is a heat-deformable material such as wax installed in the vicinity of the protrusion 3, 5 is a wax container for storing the wax 4, 6 is a Peltier element, and heats the wax 4 filled in the wax container 5. Heating / cooling means for cooling, 7 is a stage for changing the wax storage part 5 installed close to the protrusion part 3 up and down, 8 is a displacement measuring means composed of a displacement sensor such as a laser displacement meter, and its output is digital. Is output. Reference numeral 9 denotes a reference surface such as a surface plate on which the basic fixture 2, the stage 7, the displacement measuring means 8, and the like are installed.

FIG. 2 is a top plan view for explaining the configuration of the processed surface of the antenna manufacturing apparatus of the present invention. The same reference numerals as those in FIG. 1 denote the same or corresponding parts. In FIG. 2, 2 a is an installation area of the basic fixture 2 that supports the antenna panel 1, 8 a to 8 h are displacement measurement positions of the antenna panel 1, and 11 is provided at four corners of the antenna panel 1. Is a wax clamp position (clamp position) to be clamped, and is expressed by ABCDEFGH. FIG. 3 is a partially enlarged view showing the configuration of the processing portion in the vicinity of the wax clamp position 11.

In general, low rigidity materials such as deformation due to dead weight or cutting resistance, such as antenna panels that are typical examples of large-area thin plate shapes with a thickness of about 900 mm square and a thickness of about 2 mm, ensure the required mechanical strength. For this purpose, an aluminum alloy plate is attached to the upper part of the frame to form a reflective surface. Such an antenna panel is supported at about three points on at least the panel surface side, and is fixed to a surface plate or the like via a fixture. Thereafter, the reflecting surface is machined by cutting and grinding.

However, since only the above-described three points of support cause deformation due to its own weight or cutting resistance, it is necessary to clamp other portions. Therefore, as shown in FIG. 2, the four corners of the antenna panel 1 that are estimated to be mechanically weak are clamped at two points AB, CD, EF, and GH. Specifically, as shown in the partial enlarged view of FIG. 3, a temporary fixing protrusion, for example, a bolt, is screwed onto the back surface (back surface) of the antenna panel 1 to form the protrusion 3. On the other hand, as shown in FIG. 1, a protrusion 3 is provided with a wax container 5 in which a heat-deformable material 4 such as a low melting point wax is filled on a Peltier element 6 with a cooling fan whose height is adjusted by a spacer 7 from a surface plate 9. Install in close proximity to.

Next, the operation will be described. In FIG. 3, when the Peltier element 6 with a cooling fan is energized, the wax container 5 is heated, and the wax 4 filled therein is melted. In this state, the protrusion 3 is put into the wax 4 by the spacer 7 that can move up and down, and the energization of the Peltier element 6 with the cooling fan is stopped. As a result, the solidification of the wax 4 starts, and after a few minutes, the wax 4 is completely solidified, and the protrusion 3 is clamped. The deformation of the antenna panel 1 that occurs at this time is several μm to several tens of μm, which is a small value compared to a mechanical clamp. 1 processing is started. This series of processes is performed automatically. In FIG. 3, the gap between the tip of the protrusion 3 and the bottom surface of the wax container 5 filled with the wax 4 is t.

FIG. 4 shows the antenna panel 1 at each displacement measurement position 8a, 8b, 8c, 8d and 8e when the CD clamping position shown in FIG. 2 is fixed with wax 4 using the gap (t) shown in FIG. 3 as a parameter. The displacement (deformation amount) is shown. The gap (t) was manually set for the cases of 0.03 mm, 0.05 mm, 0.1 mm, 0.3 mm, 0.5 mm, and 4 mm. From the figure, the point of the displacement measurement position (part) 8c in the vicinity of the CD clamp position is displaced the most. Moreover, it becomes small, so that it leaves | separates from a CD clamp position, and it turns out that a deformation | transformation direction reverses in the site | part 8a and the site | part 8e. Further, the amount of deformation tends to decrease as the gap (t) decreases.

FIG. 5 shows the relationship between the gap (t) according to another experimental result and the displacement at each of the parts 8a to 8e, and there is a large fluctuation (deformation) between the figure and the gap (t) of 0.5 mm. It can also be seen that the gap (t) hardly changes when it exceeds 0.5 mm. From the above, roughly, the smaller the gap (t), the more stable the variation of the displacement of the antenna panel 1. However, if the gap (t) changes due to the temperature change of the apparatus and becomes zero, the processing is hindered. Therefore, 0.05 or more is an appropriate gap reference value (setting instruction value) experimentally. If the required accuracy is not relatively high, the reference value of the gap (t) may be increased in order to ensure a sufficient gap (t) so that adjustment is easy.

Example 2
In the first embodiment, the antenna panel 1 is supported at approximately the center of the antenna panel 1 using the three basic fixtures 2 and clamped at positions provided at the four corners of the antenna panel 1. A basic configuration is shown in which the displacement is measured by the displacement measuring means 8. The clearance is measured by raising the stage 7 and visually measuring the displacement position detected by the displacement sensor 8 with the projection 3 clamped, or based on a preset value of the stage movement distance. However, since the reference plane of the gap is the bottom surface of the wax container 5, in order to obtain the reference plane, it is necessary to make a precise measurement by bringing the protrusion 3 into contact with the bottom surface (bottom side) of the wax container 5 once. There is.

In Example 2, a method for measuring the gap between the wax container 5 and the tip of the protrusion 3 in a non-contact manner will be described. FIG. 6 is a partially enlarged view showing the configuration around the processing portion of the antenna manufacturing apparatus according to the present invention. The same reference numerals as those in FIGS. 1 to 3 denote the same or corresponding portions. In FIG. 6, reference numeral 12 denotes an eddy current type ultra-thin gap sensor installed on the bottom surface of the wax container 5 filled with the wax 4.

Next, the operation will be described. Since the protrusion 3 uses a conductive material such as a bolt, the gap sensor 12 calculates the distance from the protrusion 3 via the wax 4 that is an insulator. This distance (gap) information is digitally output to set and detect the optimum gap. If the wax 4 is transparent, an optical sensor may be used, and an equivalent gap detecting means 12 can be obtained even if it is an ultrasonic type or an electrostatic type. If an appropriate gap cannot be detected, the stage 7 returns to the original reference value.

As described above, by installing the gap detecting means 12 inside the wax container 5, the gap can be accurately set in the molten state of the wax 4, so that the collision with the protrusion 3 due to the upward movement of the stage 7 is prevented. In addition to eliminating the error of the displacement measurement reference value for the minute deformation of the antenna panel 1, the complexity of re-operation of the stage 7 due to the deviation of the measured gap from the optimum value is also eliminated.

Example 3
In the first embodiment, it is described that the amount of displacement of the processed surface of the workpiece is measured in a state where the protrusion 3 and the wax container 5 are fixed. In the third embodiment, a method for correcting the displacement of the antenna panel 1 is described. Will be described in detail. FIG. 7 shows the relationship between the cooling time of the wax 4 and the displacement variation of the antenna panel 1 at each of the parts 8a to 8e in the process of stopping the energization of the Peltier element 6 and cooling the wax container 5. . The setting condition is a case where the CD clamp position is fixed with wax 4 as in the first embodiment, and the gap by the gap sensor 12 is set to 0.05 mm. The displacement fluctuation (deformation) of the antenna panel 1 starts from 100 seconds after FIG. 7 and becomes a stable value after 600 seconds. The fluctuation range is about 9 μm, and the fluctuation value is converted from the displacement measurement reference value (displacement measurement initial value is usually 0000) of each part (measurement point) before the protrusion 3 is fixed.

Next, the stage 7 is moved again to minimize the fluctuation range (variation) at each measurement point. That is, since the stress is applied in addition to the weight in the downward direction at the CD clamp position due to the condensation of the wax 4, elastic deformation occurs, and each part of the antenna panel 1 is displaced from the initial position around the CD clamp position. The variation increases, and there is a displacement variation due to the inclination as the distance from the CD clamping position increases. In the present embodiment, since the displacement of the portion (measurement point) 8c near the CD clamp position is in the minus direction (minus displacement), the stage 7 is moved upward, and the displacement of each measurement point 8a to 8e is in the initial state. Correct in the return direction.

FIG. 8 shows the measurement points 8a to 8e when the stage 7 is raised with respect to the fluctuation value (referred to as the value before correction) obtained from the displacement measurement reference values of the measurement points 8a to 8e shown in FIG. Displacement. In FIG. 8, when the correction amount by the stage 7 is 80 pulses and the displacement change of the measurement point 8c near the CD clamp position becomes zero, if this is set as the upper limit of correction, the displacement of other parts (measurement points) varies by about 3 μm. It has been improved to.

The stage 7 can be moved accurately with a 1-pulse resolution of 0.1 μm. Then, a difference between the displacement value of each part obtained by moving the stage 7 and the above-mentioned numerical value before correction of each part is set as a corrected numerical value. Since the numerical value after the correction is variation data depending on the fixed state of the protrusion 3 before and after the stage 7 is movable, it becomes basic correction data at each clamp position 11 of the antenna panel 1 and this value is a simple average or RMS average of individual part displacements. The correction process is performed.

In this embodiment, the displacement of the measurement point 8c in the vicinity of the CD clamp position is canceled so as to be substantially zero and is corrected so as to approach the initial value. However, it is necessary to set the displacement to be zero. However, the setting value of the stage 7 may be adjusted according to the variation distribution of the deformation amount of other parts, and the correction method of this embodiment can also be changed by using a softening material such as the wax 4. By using it, it can be expected that the variation of displacement with less variation can be expected, and it is possible to realize high accuracy of processing of the workpiece by the antenna manufacturing apparatus.

Example 4
In the first to third embodiments, the correction value studied from the position of the pair of clamp positions has been described. However, a case where there are a large number of clamp positions will be described together with the overall configuration of the antenna manufacturing apparatus. FIG. 9 shows an apparatus configuration diagram of the antenna manufacturing apparatus. An ordinary processing machine (including a control system) performs processing by positioning a table and a tool with respect to a workpiece by an NC program. In the present invention, a wax clamp part, a displacement sensor part, and a correction mechanism part are provided in a jig for fixing a work piece to the table, and the wax clamp is turned on / off by a low distortion clamp control device, and is also displaced. Provided are an antenna manufacturing apparatus and a manufacturing method thereof for correcting a deformation of an antenna panel by controlling a correction mechanism while viewing a value of a sensor.

FIG. 10 is a flowchart showing the above series of processes or manufacturing methods. Hereinafter, the flowchart of FIG. 10 will be described.

(1) Energize the Peltier element 6 to dissolve the WAX (wax) 4 (8 places in total). When the WAX is completely melted, (2) the precision stage 7 is raised, and the WAX fixing projection 3 is inserted into the WAX.

(3) In order to start the displacement measurement of the antenna panel 1 by the displacement sensor 8, the data is reset (value 0).

(4) The energization to the Peltier element 6 at the AB position is stopped, the WAX 4 is solidified, and the WAX fixing projection 3 is clamped.

(5) When the WAX 4 at the AB position is solidified, the WAX fixing protrusion 3 moves due to the solidification contraction, and the antenna panel 1 is elastically deformed. The value of the displacement sensor 8 that changes accordingly is taken into the control device.

(6) The precision stage 7 at the AB position is slightly moved in the direction opposite to the deformation direction of the antenna panel 1 to correct the deformation amount.

(7) The changed value of the displacement sensor 8 is taken into the control device.

(8) The deformation amount of the antenna panel is calculated from the difference before and after correction (an average value of the deformation amount of each part is obtained). Here, an example in which a simple average is obtained has been shown, but a numerical value may be used based on the RMS average or the portion with the largest deformation.

(9) Repeat (6) to (8) until the average value is equal to or less than a predetermined allowable value from the required specification accuracy. Next, when the value is less than the allowable value, (10) CD⇒EF⇒GH and the wax clamp position 11 are increased, and (6) to (9) are repeated in the same manner as AB.

If the deformation data of the entire antenna panel 1 is equal to or less than the allowable value determined in advance from the required specification accuracy at the stage where all the locations are solidified, (11) the cutting process is started. If it is equal to or greater than the allowable value, the process returns to the dissolution of WAX4 by the Peltier element 6 in (1). That is, the process from the start to the beginning (10) is repeated. After the cutting process, (12) WAX4 is redissolved to release distortion caused by the process. The amount of deformation generated at this time is similarly measured by the displacement sensor 8 and data is taken in. If the amount of deformation is less than the allowable value, the processing is completed or an additional processing step is entered. If the amount of deformation is greater than or equal to the allowable value, the process returns to step (3) and the following steps are repeated. In this way, it is possible to manufacture products such as high-quality and high-precision antenna panels with little variation even at the mass production level by automatic control.

In the present embodiment, the two locations of the wax clamp position 11 have been described together, but it goes without saying that they may be performed alone. Further, even if two adjacent points are clamped at the same time, or all points are clamped at the same time and correction is performed, there is a corresponding effect.

It is a side view which shows the structure of the process part periphery of the antenna manufacturing apparatus by Example 1 of this invention. It is an upper surface top view which shows the structure of the processing surface of the antenna manufacturing apparatus by Example 1 of this invention. It is the elements on larger scale of the antenna manufacturing apparatus by Example 1 of this invention. It is a figure explaining the processing surface displacement of the antenna manufacturing apparatus by Example 1 of this invention. It is a figure explaining the processing surface displacement of the antenna manufacturing apparatus by Example 1 of this invention. It is the elements on larger scale of the antenna manufacturing apparatus by Example 2 of this invention. It is a figure explaining the processing surface displacement of the antenna manufacturing apparatus by Example 3 of this invention. It is a figure explaining the processing surface displacement of the antenna manufacturing apparatus by Example 3 of this invention. The block diagram of the antenna manufacturing apparatus by Example 4 of this invention is shown. It is a flowchart which shows the antenna manufacturing apparatus and manufacturing method by Example 4 of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Antenna panel (workpiece), 1a Front surface (processed surface), 1b Back surface (back surface), 2 Basic fixing tool, 2a Installation area of basic fixing tool, 3 Protrusion part (WAX fixing protrusion part), 4 Wax (heating) Deformable material), 5 Wax container, 6 Peltier element (heating / cooling means), 7 Stage (precision stage), 8 Displacement sensor (displacement measuring means), 8a to 8h Displacement measurement position (part), 9 Reference plane (fixed) Panel), 11 wax clamp position (A to H), 12 gap sensor (gap detection means).

Claims (12)

A basic fixture that supports the back surface of the workpiece with the front surface as the processing surface, and a wax storage that is internally filled with a heat-deformable material that is installed facing a plurality of protrusions provided on the back surface of the workpiece. And a heating / cooling means for reversibly melting and solidifying the heat-deformable material by heating and cooling the individual wax storage tools, and a movable portion in the extending direction of the protrusion, and the heating / cooling means is heated, when the heat deformation material is melted, contact the projections on the bottom surface of the wax accommodation tool with immersing the projections in the wax housing filled in instrument the heat deformation resistance in the material a stage for embedded at a position at which it is not, the is cooled by heating and cooling means, when the heat deformable material has solidified, the rear surface of the workpiece in a state in which said projection and said wax accommodation tool is fixed Strange Antenna manufacturing apparatus and a displacement measuring means for measuring the amount. The stage is arranged so as to cancel the difference between the variable displacement measured on the back surface of the workpiece with the protrusion and the wax container fixed, and the displacement measurement initial value before being fixed. The antenna manufacturing apparatus according to claim 1, wherein a displacement difference between before and after the movement is used as a correction value, and when the correction value is equal to or less than an allowable value, cutting of the processed surface of the workpiece is started. The correction value is created corresponding to each case where the individual stages are sequentially moved, and cutting of the work surface of the workpiece is started when each correction value is equal to or less than an allowable value. The antenna manufacturing apparatus according to claim 2. The antenna manufacturing apparatus according to claim 2, wherein the correction value is an average value of displacements at a plurality of measurement positions of the workpiece. A basic fixture that supports the back surface of the workpiece with the front surface as the processing surface, and a wax storage that is internally filled with a heat-deformable material that is installed facing a plurality of protrusions provided on the back surface of the workpiece. A tool, and a gap detecting means for detecting a gap between the protrusion and the protrusion, and the wax storage tool is heated and cooled. and heating and cooling means for reversibly melt-fix said heat deformable material, and movable in the extending direction of the protrusion, the is heated by heating and cooling means, when the heat deformable material is melted, the protrusion a stage for embedding the projections in a position that does not contact the bottom surface of the wax accommodation tool together with the part is immersed in the wax housing the heat deformation properties within the material filled in the device, the cooling by the heating and cooling means Is, an antenna manufactured with when the heat deformable material has solidified, the displacement measuring means and the projecting portion and the wax storing tool to measure the amount of displacement of the rear of the workpiece in a state of being fixed apparatus. 6. The stage is returned to a reference position after the heating deformable material is remelted by the heating / cooling means when the gap amount by the gap detecting means is not an allowable value. Antenna manufacturing equipment. A plurality of protrusions are provided on a workpiece, and the workpiece is supported by a basic fixture, and a wax container that is filled with a heat-deformable material is placed close to a position opposed to the protrusions on a stage. And the second step of melting the heat-deformable material by heating the wax container, and during the melting period of the heat-deformable material, the projecting portion is heated and deformed by the stage. A third step in which a state in which the protrusion is immersed up to a position where it does not come into contact with the bottom surface of the wax container is used as a displacement measurement initial value in the displacement measurement of the workpiece by the displacement measuring means. And a fourth step of solidifying the heat-deformable material by cooling the wax container, and the protrusion and the wax container are fixed when the heat-deformable material is solidified. Measure the amount of displacement of the back surface of the workpiece in the state, move the stage so as to cancel the difference from the initial displacement measurement value measured before being fixed, and correct the displacement difference before and after this movement A method for manufacturing an antenna manufacturing apparatus, including a fifth step of starting cutting of a processed surface of a workpiece when the correction value is equal to or less than an allowable value. The correction value is created corresponding to each case where the individual stages are sequentially moved, and cutting of the work surface of the workpiece is started when each correction value is equal to or less than an allowable value. A method for manufacturing an antenna manufacturing apparatus according to claim 7. 9. The method of manufacturing an antenna manufacturing apparatus according to claim 7, wherein the correction value is an average value of displacements at a plurality of measurement positions of the workpiece. A plurality of protrusions are provided on a workpiece, and the workpiece is supported by a basic fixture, and a wax container that is filled with a heat-deformable material is placed close to a position opposed to the protrusions on a stage. And the second step of melting the heat-deformable material by heating the wax container, and during the melting period of the heat-deformable material, the projecting portion is heated and deformed by the stage. Based on the indicated value of the gap detection means for detecting the gap with the protrusion previously installed on the bottom surface of the wax container, and immersing in the material, until the position where the protrusion does not contact the bottom surface of the wax container a third step of the buried allowed state and the displacement measurement initial value of the displacement amount measurement of the workpiece displacement measurement means, by cooling the wax accommodation tool, the heat deformation resistant material In the fourth step of solidifying and solidifying the heat-deformable material, the amount of displacement of the back surface of the workpiece is measured and fixed in a state where the protrusion and the wax container are fixed. The stage is moved so as to cancel the difference from the previous displacement measurement initial value, and the displacement difference before and after the movement is used as a correction value. When this correction value is less than the allowable value, the work surface of the workpiece is cut. The manufacturing method of the antenna manufacturing apparatus containing the 5th process of starting. The correction value is created corresponding to each case where the individual stages are sequentially moved, and cutting of the work surface of the workpiece is started when each correction value is equal to or less than an allowable value. The method for manufacturing an antenna manufacturing apparatus according to claim 10. The method for manufacturing an antenna manufacturing apparatus according to claim 10, wherein the correction value is an average value of displacements at a plurality of measurement positions of the workpiece.

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