JP4315032B2 - Solid-state imaging device and driving method of solid-state imaging device - Google Patents

Description

  The present invention relates to a solid-state imaging device and a driving method of the solid-state imaging device, and more particularly, a configuration in which a signal output for each column of a matrix-like array of unit pixels is amplified by a readout circuit and then sequentially output in horizontal scanning The present invention relates to a solid-state imaging device and a driving method of the solid-state imaging device.

  In an imaging apparatus that converts light into an electrical signal and outputs an image signal, such as a digital still camera, a solid-state imaging apparatus used as the imaging device includes a MOS (Metal-Oxide Semiconductor) type image sensor, There are CCD (Charge Coupled Device) type image sensors. Among these, the MOS type image sensor has a structure called a passive type composed of only a pixel and a selection switch at the beginning of development, and thus has a drawback that it is weak against noise because a read signal is weak. there were.

  However, a CMOS image sensor that can be manufactured by a process similar to that of a CMOS integrated circuit has been developed, and an active structure having an amplifier for each pixel can be easily created by a miniaturization technique associated with the CMOS process. The above disadvantages could be overcome. Further, the CMOS image sensor has a feature that a drive circuit and a signal processing circuit other than the pixel portion can be integrated on the same chip. For this reason, in recent years, more research and development has been made on CMOS image sensors.

  A conventional example of a pixel signal readout circuit in a CMOS image sensor is shown in FIG. In FIG. 8, the charge accumulated in the pixel 101 is read out by the switched capacitor type integration circuit 102 via the selection transistor N1 arranged for each pixel, and a circuit for reading out the pixel signal is provided for each column. (For example, refer patent document 1). The switched capacitor integration circuit 102 includes a differential amplifier 103 to which a reference voltage Vref is applied to a non-inverting (+) input terminal, and an input capacitor 104 connected to the inverting (−) input terminal of the differential amplifier 103. The feedback amplifier 105 and the switch 106 are connected between the output terminal and the inverting input terminal of the dynamic amplifier 103.

  Here, assuming that the capacitance value of the input capacitor 104 is Ci and the capacitance value of the feedback capacitor 105 is Cf, the switched capacitor integration circuit 102 resets the pixel signal Vt accumulated in the pixel 101 and the pixel 101 when initialized. The difference value (Vt−Vn) of the signal Vn is multiplied by the capacitance ratio of Ci / Cf and inverted with reference to the reference voltage Vref to read out as a signal of the pixel 101. In this switched capacitor integration circuit 102, the feedback capacitor Cf of the differential amplifier 103 is arbitrarily selected by the switch 105, and the amplification ratio of the image signal can be arbitrarily changed by changing the capacitance ratio of Ci / Cf. .

  Here, a case where the pixel 101 is configured as a passive type is taken as an example, but in the case of an active type, the pixel 201 has a configuration as shown in FIG. A conventional example of a readout circuit corresponding to the active pixel 201 is shown in FIG.

  In the circuit shown in FIG. 10, the charge accumulated in the pixel 201 is received by the gate of the transistor M2, which is arranged for each pixel and forms a source follower with the transistor M4, and the read signal is received by the switched capacitor integration circuit 202. It is configured to read. The switched capacitor integration circuit 202 includes a differential amplifier 203 to which a reference voltage Vref1 is applied to a non-inverting input terminal, an input capacitor 204 connected to the inverting input terminal of the differential amplifier 203, and an output terminal of the differential amplifier 203. And a inverting input terminal, a feedback capacitor 205 and a switch 206 are connected in parallel.

  Here, assuming that the capacitance value of the input capacitor 204 is C1 and the capacitance value of the feedback capacitor 505 is C2, the switched capacitor integration circuit 202 resets the pixel signal Vd accumulated in the pixel 201 and the pixel 201 when it is initialized. The difference value (Vd−Vp) of the signal Vp is multiplied by a capacitance ratio of C1 / C2, and is inverted with reference to the reference voltage Vref1, thereby reading out the signal of the pixel 201. Therefore, as in FIG. 8, amplifying the read image signal can be realized by changing the capacitance ratio of C1 / C2.

JP2003320146A

  However, in the CMOS image sensor according to the above-described conventional example, the amplification value of the image signal is changed by adjusting the capacitance value of the feedback capacitance Cf / C2. Therefore, there are two problems described below. It is done. One of the problems is that noise (fixed pattern noise, random noise) input to the pixel signal readout circuit is also simply amplified by the capacitance ratio (Ci / Cf, C1 / C2).

  That is, if the capacity ratio is 4 times and the amplification factor is 4 times, the image signal is 4 times, but the noise is also 4 times, so the S / N is not improved. Noise characteristics S / N, which is one of the performances of solid-state imaging devices, appears directly as an image, and gains are often applied especially when shooting in dark scenes. Therefore, it is desirable to improve the characteristics.

  Here, the CMOS image sensor is structurally likely to generate fixed pattern noise (FPN) due to variations in transistor characteristics for each pixel and a dark current generated regardless of the amount of incident light. Among these fixed pattern noises, inter-pixel fixed pattern noise and fixed pattern noise for each column can be suppressed by a well-known technique such as CDS (Correlated Double Sampling). What is desired is random noise.

  Next, another problem of the prior art is an increase in variation in amplification factor caused by dividing the capacity in order to adjust the amplification factor. As shown in FIG. 8, in order to adjust the amplification factor, it is necessary to divide the feedback capacitor Cf into a plurality of capacitors. For example, in order to obtain an amplification factor of 8 times, the capacity of 1/8 of the input capacitor Ci is set. It is necessary to prepare. The capacitance value is proportional to the area, and the variation in capacitance value increases as the area decreases. Therefore, if the capacitance is reduced, the capacitance value variation increases, and therefore, it is directly reflected in the variation of the amplification factor Ci / Cf. This gain variation makes it difficult to guarantee a monotonous increase when the gain can be changed in multiple stages, which leads to a decrease in yield.

  The present invention has been made in view of the above problems, and an object of the present invention is to obtain good noise characteristics (high S / N) and a gain variation in amplifying a pixel signal to be read. It is an object to provide a solid-state imaging device and a driving method of the solid-state imaging device capable of setting a high gain with high accuracy.

In order to achieve the above object, in the present invention, unit pixels that include a photoelectric conversion element and output a reset signal at the time of resetting and a pixel signal corresponding to a charge photoelectrically converted by the photoelectric conversion element are arranged in a matrix. In a solid-state imaging device having a three-dimensional arrangement, a readout circuit arranged for each column with respect to the matrix arrangement of unit pixels has the following configuration.
That is, the readout circuit is
First switch means for sampling the reset signal and the pixel signal output from the unit pixel;
An input capacitor having an input end connected to the output side of the first switch means;
A differential amplifier in which an inverting input terminal is connected to an output terminal of the input capacitor, and a clamp voltage is applied to a non-inverting input terminal;
Second switch means for selectively connecting an input terminal of the input capacitor to a node of a fixed potential;
Third switch means connected between an inverting input terminal and an output terminal of the differential amplifier;
A feedback capacitor having one end connected to the inverting input terminal of the differential amplifier;
A fourth switch means having one end connected to the other end of the feedback capacitor and the other end connected to the output terminal of the differential amplifier;
Or
First switch means for sampling the reset signal and the pixel signal output from the unit pixel;
An input capacitor having an input end connected to the output side of the first switch means;
A single-ended inverting amplifier having an input terminal connected to the output terminal of the input capacitor;
Second switch means for selectively connecting an input terminal of the input capacitor to a node of a fixed potential;
A feedback capacitor having one end connected to the input terminal of the inverting amplifier;
Third switch means having one end connected to the other end of the feedback capacitor and the other end connected to the output terminal of the inverting amplifier;
A fourth switch means connected between an input terminal and an output terminal of the inverting amplifier;
And fifth switch means for applying a clamp voltage to a common connection node between the feedback capacitor and the third switch means.
It has a configuration.
The readout circuit samples the reset signal and the pixel signal by the first switch means a plurality of times per one of the unit pixels, and the inverting input of the differential amplifier via the input capacitor. A process of adding the reset signal sampled a plurality of times and the pixel signal to the terminal (or the input terminal of the inverting amplifier) by the feedback capacitor is performed.

In the solid-state imaging device having the above configuration, the reset signal output from the unit pixel and the pixel signal are sampled and added multiple times for each pixel, so that the capacitance value of the feedback capacitor can be switched without switching. The amplification factor can be changed depending on the number of samplings. That is, an arbitrary amplification factor n can be obtained by setting the number of samplings. At this time, even if the pixel signal is multiplied by n, the random noise becomes only noise √n times.

  According to the present invention, by setting an arbitrary amplification factor n depending on the number of sampling times, the pixel signal is multiplied by n and the random noise becomes only √n times. Therefore, the noise is smaller than switching the capacitance value of the feedback capacitor. The characteristic S / N can be improved, and since there is no need to divide the capacitance, gain variation can be suppressed and a highly accurate amplification factor can be set.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  FIG. 1 is a block diagram showing an outline of the configuration of a CMOS image sensor to which the present invention is applied. As is clear from FIG. 1, the CMOS image sensor according to this application example includes a pixel array unit 12 in which unit pixels 11 are two-dimensionally arranged in a matrix, a vertical drive circuit 13, and a readout circuit (column signal processing circuit) 14. The horizontal drive circuit 15, the horizontal signal line 16, and the output circuit 17 are configured.

  In the pixel array unit 12, a vertical signal line 18 is wired for each column with respect to the matrix-like pixel arrangement. The vertical drive circuit 13 includes a shift register or the like, and performs processing such as selecting each unit pixel 11 of the pixel array unit 12 for each row. The readout circuit 14 is provided for each column of the matrix-like pixel arrangement, and performs various signal processing on the pixel signals output in units of rows from the unit pixels 11 via the vertical signal lines 18. The present invention is characterized by the configuration of the readout circuit 14, and details thereof will be described later.

  The horizontal drive circuit 15 is configured by a shift register or the like, and sequentially selects the readout circuit 14 by sequentially outputting horizontal selection pulses φH1 to φHn, and the pixel signal output from the selected readout circuit 14 is a horizontal signal line. Lead to 16. The horizontal signal line 16 transmits pixel signals sequentially output from the readout circuit 14 to the output circuit 17. The output circuit 17 performs various processes on the pixel signal transmitted through the horizontal signal line 16 and outputs the processed signal. As an example, the output circuit 17 performs black level adjustment, column variation correction, signal amplification, color-related processing, and the like, or only buffering processing may be performed.

  A specific embodiment of the readout circuit 14 that characterizes the present invention will be described below. In the following description, for simplification of the drawing, only the reading circuit 14 for one column connected to the two unit pixels 11, 11 adjacent in the row direction and the one unit pixel 11 via the vertical signal line 18. Is illustrated and described.

[First Embodiment]
FIG. 2 is a circuit diagram showing a configuration of the read circuit 14A according to the first embodiment of the present invention. In FIG. 2, the unit pixel 11 has an active configuration, and a photoelectric conversion element that converts light into electric charges, for example, a photodiode PD, and charges accumulated in the photodiode PD are transferred to an FD (floating diffusion). A transfer transistor Q1, an amplification transistor Q2 that receives and amplifies the charge of the FD at the gate, a reset transistor Q3 that resets the charge of the FD, and control signal lines L1 to L3 that control each node of the transistors Q1 to Q3. It is the composition which has.

  The unit pixel 11 is selected by receiving a select control signal Vs through the control signal line L2. In this selected state, the reset control signal Vr is applied to the gate of the reset transistor Q3 via the control signal line L3, whereby the reset transistor Q3 is turned on and the charge of the FD is reset. The potential of the FD at this time is output as the reset signal Vp through the amplification transistor Q2. Thereafter, the transfer control signal Vt is applied to the gate of the transfer transistor Q1 via the control signal line L1, whereby the transfer transistor Q1 is turned on to transfer the charge of the photodiode PD to the FD. The potential of the FD at this time is output as the pixel signal Vd through the amplification transistor Q2.

  In this example, the unit pixel 11 has three transistors, ie, the transfer transistor Q1, the amplification transistor Q2, and the reset transistor Q3. However, the unit pixel 11 further includes an amplification transistor Q2 and a vertical signal line. 18 may be configured to have a total of four transistors including selection transistors.

The readout circuit 14A according to this embodiment is connected between a switch (first switch means) 21 having one end connected to the vertical signal line 18, and the other end of the switch 21 and a node of an arbitrary fixed potential V1. Switch ( second switch means) 22, an input capacitor 23 having an input terminal connected to the other end of the switch 21, and an inverting (−) input terminal connected to the output terminal of the input capacitor 23 for non-inversion A differential amplifier 24 to which a clamp voltage Vclp is applied to the (+) input terminal, a switch ( third switch means) 25 connected between the inverting input terminal and the output terminal of the differential amplifier 24, and a differential The amplifier 24 includes a feedback capacitor 26 and a switch ( fourth switch means) 27 connected in series between the inverting input terminal and the output terminal of the amplifier 24.

  The output terminal of the readout circuit 14A is connected to the horizontal signal line 16 (see FIG. 1) via the horizontal selection switch 19. The horizontal selection switch 19 is driven on (closed) / off (open) by horizontal selection pulses φH1 to φHn sequentially output from the horizontal drive circuit 15.

In the conventional technique shown in FIG. 8, the feedback capacitor is divided into a plurality of parts, and the pixel signal is amplified by adjusting the capacitance ratio between the input capacitor and the feedback capacitor. In this case, if the random noise input to the read circuit is Vnin, the random noise Vnout output from the read circuit is
Vnout = (Ci / Cf) * Vnin
Thus, the signal is amplified by the capacitance ratio of the input capacitance and the feedback capacitance.

  On the other hand, in the readout circuit 14A according to the present embodiment, the capacitance value of the feedback capacitor 26 is fixed and the capacitance ratio between the input capacitor 23 and the feedback capacitor 26 is not adjusted, but is output from the unit pixel 11. By setting the amplification factor for the pixel signal according to the number of times the signal is sampled, the random noise Vnout can be suppressed more than in the case of the prior art. The read operation of the read circuit 14 will be described with reference to the timing chart of FIG.

  FIG. 3 shows the timing relationship in the horizontal blanking period. In FIG. 3, t2 is a reset signal readout period, and t3 is a pixel signal readout period. In this driving, when the capacitance value C1 of the input capacitor 23 and the capacitance value C2 of the feedback capacitor 26 are set to the same value, a double pixel signal can be obtained.

  First, the readout operation of the readout circuit 14 will be briefly described. First, in the reset signal readout period t2, the reset signal Vp is sampled and held a plurality of times, for example, twice, and added and held, and then in the pixel signal readout period t3 Sample and hold the signal Vd twice. Then, 2 (Vp−Vd), that is, CDS processing is realized by subtracting the pixel signal Vd twice from the double reset signal 2Vp read during the previous period. However, the number of times the reset signal Vp and the pixel signal Vd are sampled by the sampling operation of the switch 21 is not limited to two. Hereinafter, the detailed read operation in the read circuit 14 will be described.

  First, during the period A, the switches 22, 25 and 27 are turned on. At this time, the potential across the feedback capacitor 26 becomes the clamp voltage Vclp, and the charge accumulated in the feedback capacitor 26 is initialized to zero. Next, during the period B in the reset signal readout period t2, the reset control signal Vr rises to reset the FD of the pixel 11. At the same time, the switches 21 and 25 are turned on. As a result, the reset signal Vp and the clamp voltage Vclp from the pixel 11 are applied to both ends of the input capacitor 23, and the charge of C 1 · (Vp−Vclp) is sampled and held in the input capacitor 23.

  Next, in the period C, the switches 21 and 25 are turned off and the switches 22 and 27 are turned on. At this time, since negative feedback is applied to the differential amplifier 24 through the feedback capacitor 26, the potential of the node N (the inverting input terminal potential of the differential amplifier 24) becomes the clamp voltage Vclp. As a result, the charge of the input capacitor 23 changes to C1 · (V1−Vclp), and the changed charge C1 · (Vp−V1) is sampled and held in the feedback capacitor 26. At this time, the output V3 of the differential amplifier 24 becomes Vclp + (Vp−V1) · C1 / C2.

  Further, in the period D, the switches 22 and 27 are turned off and the switches 21 and 25 are turned on. Here, the reset signal Vp and the clamp voltage Vclp from the pixel 11 are applied to both ends of the input capacitor 23, and the charge C 1 · (Vp−Vclp) is sampled and held in the input capacitor 23. At this time, since the switch 27 is turned off, the feedback capacitor 26 still holds the variable charge C1 · (Vp−V1).

  Next, in the period E, the switches 21 and 25 are turned off and the switches 22 and 27 are turned on. At this time, since negative feedback is applied to the differential amplifier 24 through the feedback capacitor 26, the charge C 1 · (Vp−V 1) is newly added to the feedback capacitor 26 in addition to the charge C 1 · (Vp−V 1) previously held. ) Are added, the charge of 2 · C1 · (Vp−V1) is accumulated. Therefore, the output V3 of the differential amplifier 24 is Vclp + 2 · (Vp−V1) · C1 / C2. In the period F, the switches 21 and 27 are turned off and the switches 22 and 25 are turned on. At this time, the charge of C1 · (V1−Vclp) is sampled and held in the input capacitor 23.

  Next, the transfer control signal Vt rises in the first period G of the pixel signal readout period t3, and the pixel signal Vd is read out to the vertical signal line 18 via the amplification transistor Q2. At this time, when the switches 21 and 27 are turned on and the switches 22 and 25 are turned off, the charge of the input capacitor 23 becomes C1 · (Vd−Vclp), and the variable charge −C1 · (Vd−V1) is newly fed back. It is added to the capacity 26. As a result, the output V3 of the differential amplifier 24 changes in voltage by − (Vd−V1) · C1 / C2 from the previous output voltage.

  Further, in the next period H, the switches 21 and 27 are turned off and the switches 22 and 25 are turned on, whereby the charge of C1 · (V1−Vclp) is sampled and held in the input capacitor 23, and the next period I Thus, when the switches 21 and 27 are turned on and the switches 22 and 25 are turned off, the charge −C1 · (Vd−V1) is newly added to the feedback capacitor 26. Therefore, the voltage of the output V3 of the differential amplifier 24 changes by − (Vd−V1) · C1 / C2 from the previous output voltage.

  Eventually, the charge accumulated in the feedback capacitor 26 becomes 2 · C1 · (Vp−V1) −2 · C1 · (Vd−V1) = 2 · C1 · (Vd−Vd). The output V3 is Vclp + 2 · (Vp−Vd) · C1 / C2. Therefore, the pixel signal (Vd−Vp) from which the reset noise is read out when C1 = C2 is doubled and output with the clamp voltage Vclp as a reference.

  Here, paying attention to the random noise Vnout output at this time, since the input random noise Vnin is sampled and added twice, the variance of the noise is doubled and the output random noise Vnout. Becomes √ (2 · Vnin). Therefore, even if the pixel signal from which the reset noise is removed is doubled, the random noise is only √2 times, so that the noise characteristic S / N can be improved.

  Further, in order to triple the pixel signal, the operations of the periods D and E are repeated between the periods E and F, the operations of the periods H and I are repeated between the periods I and J, and the reset signal 3 are sampled and added, and the pixel signal 3 is subtracted three times to obtain the difference value between them, thereby obtaining a pixel signal 3 (Vd−Vp) from which reset noise of 3 times is removed. . 4 times and 5 times can be obtained by repeating the same operation. Conversely, by skipping the periods D and E and the periods H and I, a gain of 1 can be realized. A timing chart at this time is shown in FIG.

  As is clear from the above description, by using the readout circuit 14A according to the present embodiment, the reset signal Vp and the pixel signal Vd are sampled and added multiple times respectively, so that any number of samplings can be obtained. An amplification factor can be obtained. Further, even if the pixel signal Vd is multiplied by n, the random noise is only √n times, so that the noise characteristic S / N is set more than when the amplification factor is set by adjusting the capacitance value of the feedback capacitor as in the prior art. Can be improved. Furthermore, the capacitance value of the feedback capacitor 26 is fixed, and it is not necessary to divide the feedback capacitor 26 and adjust the capacitance ratio with the input capacitor 23 in order to obtain an arbitrary amplification factor. Can be suppressed. Therefore, variation in amplification factor can be suppressed, and a higher accuracy amplification factor can be set.

  In the readout circuit 14A according to the present embodiment, the terminal (input end) on the vertical signal line 18 side of the input capacitor 23 is selectively connected to a node of an arbitrary fixed potential V1 via the switch 22. The CDS process can be performed in parallel with the process of amplifying the pixel signal Vd. Here, the arbitrary fixed potential V1 is desirably set to a value close to the level of the reset signal Vp output from the unit pixel 11 during the reset operation.

  This is because when the reset signal Vp is read, the difference between the reset signal Vp and the fixed potential V1 is held in the feedback capacitor 26 as many times as the number of samplings, and then when the pixel signal Vd is read, A process for obtaining a difference from the signal Vd (CDS process) is performed, but the difference between the reset signal Vp and the fixed potential V1 becomes smaller when the value of the fixed potential V1 is closer to the level of the reset signal Vp. This is because the amount of electric charge held in the feedback capacitor 26 when reading the signal Vp is small, so that the CDS process can be realized more reliably within the limited dynamic range of the differential amplifier 24.

[Second Embodiment]
FIG. 5 is a circuit diagram showing a configuration of a read circuit 14B according to the second embodiment of the present invention. In FIG. 5, the same parts as those in FIG. Also in this embodiment, the unit pixel 11 has an active configuration including the transfer transistor Q1, the amplification transistor Q2, and the reset transistor Q3.

The readout circuit 14B according to the present embodiment is connected between a switch (first switch means) 31 having one end connected to the vertical signal line 18, and the other end of the switch 31 and a node of an arbitrary potential V1. A switch ( second switch means) 32, an input capacitor 33 having an input terminal connected to the other end of the switch 31, a single-ended inverting amplifier 34 having an input terminal connected to the output terminal of the input capacitor 33, A switch ( fourth switch means) 35 connected between the input terminal and the output terminal of the inverting amplifier 34, and a feedback capacitor 36 connected in series between the input terminal and the output terminal of the inverting amplifier 34. and the switch (third switch means) 37, a switch connected between the common connection node and the clamping voltage Vclp node of the feedback capacitor 36 and a switch 37 (fifth Sui It has a configuration having a switch means) 38.

  As is clear from the configuration described above, the read circuit 14B according to the present embodiment has a configuration using a single-ended inverting amplifier 34 instead of the differential amplifier 24 of the read circuit 14A according to the first embodiment. . Since the readout circuit 14B is arranged for each column of the pixel array unit 12, the chip area is reduced by using a single-ended inverting amplifier 34 having a simpler circuit configuration than the differential amplifier 24. There is a merit that can be done.

  Next, the operation of the readout circuit 14B according to the present embodiment having the above configuration will be described with reference to the timing chart of FIG. Here, the capacitance value of the input capacitor 33 is C1, and the capacitance value of the feedback capacitor 36 is C2.

  First, the switches 32, 35, and 38 are turned on during the period A. At this time, the input / output terminals of the inverting amplifier 34 are short-circuited by the switch 35, so that the voltage at the input / output terminals becomes the logical threshold voltage Vlth of the inverting amplifier 34 as shown in FIG. Therefore, the potential at both ends of the input capacitor 33 becomes the clamp voltage Vclp and the logical threshold voltage Vlth, and when the potential at the input terminal of the inverting amplifier 34 is the logical threshold voltage Vlth, the initial charge Q0 whose potential at the output terminal becomes the clamp voltage Vclp is fed back. Accumulated in the capacitor 26.

  Next, the reset signal Vr rises during the period B in the reset signal readout period t2, so that the reset transistor Q3 is turned on and the FD of the pixel 11 is reset. At the same time, when the switches 31 and 35 are turned on, the reset signal Vp and the logical threshold voltage Vlth from the pixel 11 are applied to both ends of the input capacitor 33, and the charge of C 1 · (Vp−Vlth) is input to the input capacitor 33. Be

  Next, in a period C, the switches 31 and 35 are turned off, and the switches 32 and 37 are turned on. At this time, negative feedback is applied to the inverting amplifier 34 through the feedback capacitor 36, and the fluctuation of the potential of the node V (the input terminal potential of the inverting amplifier 34) is suppressed to 1 / gain of the inverting amplifier 34 and is approximately Vlth. It becomes. As a result, the charge of the input capacitor 33 changes to C1 · (V1−Vlth), and the changed charge C1 · (Vp−V1) is newly added to the feedback capacitor 26. At this time, the output V3 of the inverting amplifier 34 becomes Vclp + (Vp−V1) · C1 / C2.

  Further, in the period D, the switches 32 and 37 are turned off and the switches 31 and 35 are turned on. Here, the reset signal Vp from the pixel 11 and the logical threshold voltage Vlth are applied to both ends of the input capacitor 33, and the charge C 1 · (Vp−Vlth) is sampled and held in the input capacitor 33.

  In the period E, the switches 31 and 35 are turned off and the switches 32 and 37 are turned on. At this time, since negative feedback is applied to the differential amplifier 24 through the feedback capacitor 36, the charge C1 · (Vp−V1) is newly added to the input capacitor 33 in addition to the charge previously held. Therefore, charges of 2 · C1 · (Vp−V1) are accumulated in addition to the initial charge Q0. Therefore, the output V3 of the inverting amplifier 34 is Vclp + 2 · (Vp−V1) · C1 / C2. In the period F, the switches 31 and 37 are turned off and the switches 32 and 35 are turned on. At this time, the charge of C1 · (V1−Vlth) is sampled and held in the input capacitor 33.

  Next, the transfer control signal Vt rises in the first period G of the pixel signal readout period t3, and the pixel signal Vd is read out to the vertical signal line 18 through the amplification transistor Q2 of the pixel 11. At this time, when the switches 31 and 37 are turned on and the switches 32 and 35 are turned off, the charge of the input capacitor 33 changes to C1 · (Vd−Vlth), and this changed charge −C1 · (Vd−V1). Is newly added to the feedback capacitor 26. At this time, the output V3 of the inverting amplifier 34 changes in voltage by − (Vd−V1) · C1 / C2 from the previous output voltage.

  Further, in the next period H, the switches 31 and 37 are turned off and the switches 32 and 35 are turned on, whereby the charge of C1 · (V1−Vlth) is sampled and held in the input capacitor 33, and the next period I When the switches 31 and 37 are turned on and the switches 32 and 35 are turned off, the charge −C1 · (Vd−V1) is newly added to the feedback capacitor 36. Therefore, the voltage of the output V3 of the inverting amplifier 34 changes by-(Vd-V1) · C1 / C2 from the previous output voltage.

  Finally, the electric charge accumulated in the feedback capacitor 36 becomes 2 · C1 (Vp−V1) −2 · C1 · (Vd−V1) = 2 · C1 · (Vd−Vd). As a result, the output V3 of the inverting amplifier 34 becomes Vclp + 2 · (Vp−Vd) · C1 / C2. Accordingly, as in the case of the readout circuit 14A according to the first embodiment using the differential amplifier 24, the pixel signal (Vd−Vp) from which the reset noise is read out when C1 = C2 is removed is doubled. The output is inverted with respect to the clamp voltage Vclp.

  The effects obtained by the read circuit 14B according to the second embodiment are the same as the effects obtained by the read circuit 14A according to the first embodiment. That is, even if the pixel signal is multiplied by n, the random noise becomes only √n times, so that the noise characteristic S / N can be improved as compared with the case of amplifying by adjusting the value of the feedback capacitance of the prior art. Furthermore, since the feedback capacitor 36 is not divided to adjust the capacitance ratio with the input capacitor 33, variation in the feedback capacitor 36 can be suppressed, and thus variation in amplification factor can be suppressed. .

  In each of the above embodiments, not only the amplification process of the pixel signal Vd but also the CDS process for removing the fixed pattern noise by subtracting the reset signal Vr from the pixel signal Vd is performed in parallel in the readout circuits 14A / 14B. Although the read operation in this case has been described as an example, it is not essential to perform the CDS processing in parallel in the read circuits 14A / 14B. That is, with respect to the CDS processing, the signal processing circuit in the subsequent stage, for example, the output circuit 17 holds the reset signal Vr that has been amplified and read, and then resets the reset signal from the pixel signal Vd that has been amplified and read. It can also be realized by performing a process of subtracting Vr.

  Further, in each of the above embodiments, the pixel information of each unit pixel 11 is output via the vertical signal line 18, amplified by the readout circuits 14A / 14B, output, and then sequentially output in horizontal scanning. Although the case where the present invention is applied to an image pickup apparatus has been described as an example, the present invention is not limited to the application example. For example, the charge read out from a unit pixel that basically has no amplification transistor and includes only a photoelectric conversion element is vertical. Transfer is performed by a transfer unit (CCD; Charge Coupled Device), converted into an electric signal by a charge detection unit provided for each vertical transfer unit, amplified by a readout circuit 14A / 14B, output, and then sequentially scanned in a horizontal scan. The present invention can be similarly applied to a solid-state imaging device configured to output.

  The solid-state imaging device in which the readout circuits 14A and 14B according to each of the above embodiments are arranged for each column of the pixel array unit is suitable for use as an imaging device in an imaging device such as a digital still camera.

It is a block diagram which shows the outline of a structure of the CMOS image sensor to which this invention is applied. 1 is a circuit diagram showing a configuration of a readout circuit according to a first embodiment of the present invention. 4 is a timing chart for explaining a read operation in the read circuit according to the first embodiment. 6 is a timing chart for explaining a read operation according to a modification of the first embodiment. It is a circuit diagram which shows the structure of the read-out circuit which concerns on 2nd Embodiment of this invention. 10 is a timing chart for explaining a read operation in the read circuit according to the second embodiment. It is an equivalent circuit diagram of the inverting amplifier when the input / output terminals are short-circuited. 10 is a circuit diagram illustrating a configuration of a read circuit according to Conventional Example 1. FIG. It is a circuit diagram showing a configuration of an active pixel. FIG. 10 is a circuit diagram illustrating a configuration of a read circuit according to Conventional Example 2.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 11 ... Unit pixel, 12 ... Pixel array part, 13 ... Vertical drive circuit, 14, 14A, 14B ... Read-out circuit, 15 ... Horizontal drive circuit, 16 ... Horizontal signal line, 18 ... Vertical signal line, 19 ... Horizontal selection switch, 23, 33 ... Input capacitance, 24 ... Differential amplifier, 26,36 ... Feedback capacitance, 34 ... Single-ended inverting amplifier, Q1 ... Transfer transistor, Q2 ... Amplification transistor, Q3 ... Reset transistor

Claims (9)

A pixel array unit including a photoelectric conversion element, and unit pixels that output a reset signal at the time of resetting and a pixel signal corresponding to a charge photoelectrically converted by the photoelectric conversion element are two-dimensionally arranged in a matrix;
A readout circuit arranged for each column with respect to the matrix arrangement of the unit pixels ,
The readout circuit is
First switch means for sampling the reset signal and the pixel signal output from the unit pixel;
An input capacitor having an input end connected to the output side of the first switch means;
A differential amplifier in which an inverting input terminal is connected to an output terminal of the input capacitor, and a clamp voltage is applied to a non-inverting input terminal;
Second switch means for selectively connecting an input terminal of the input capacitor to a node of a fixed potential;
Third switch means connected between an inverting input terminal and an output terminal of the differential amplifier;
A feedback capacitor having one end connected to the inverting input terminal of the differential amplifier;
A fourth switch means having one end connected to the other end of the feedback capacitor and the other end connected to the output terminal of the differential amplifier;
The reset signal and the pixel signal are sampled a plurality of times per one of the unit pixels by the first switch means, and input to the inverting input terminal of the differential amplifier via the input capacitor. A solid-state imaging device that adds the sampled reset signal and the pixel signal by the feedback capacitance . A pixel array unit including a photoelectric conversion element, and unit pixels that output a reset signal at the time of resetting and a pixel signal corresponding to a charge photoelectrically converted by the photoelectric conversion element are two-dimensionally arranged in a matrix;
A readout circuit arranged for each column with respect to the matrix arrangement of the unit pixels,
The readout circuit is
First switch means for sampling the reset signal and the pixel signal output from the unit pixel;
An input capacitor having an input end connected to the output side of the first switch means;
A single-ended inverting amplifier having an input terminal connected to the output terminal of the input capacitor;
Second switch means for selectively connecting an input terminal of the input capacitor to a node of a fixed potential;
A feedback capacitor having one end connected to the input terminal of the inverting amplifier;
Third switch means having one end connected to the other end of the feedback capacitor and the other end connected to the output terminal of the inverting amplifier;
A fourth switch means connected between an input terminal and an output terminal of the inverting amplifier;
Fifth switch means for applying a clamp voltage to a common connection node between the feedback capacitor and the third switch means;
The reset signal and the pixel signal are sampled multiple times per one of the unit pixels by the first switch means, and input to the input terminal of the inverting amplifier via the input capacitor, and sampled multiple times. A solid-state imaging device that adds the reset signal and the pixel signal by the feedback capacitor. The read circuit, the reset signal and the pixel signal and the process of adding the solid-state imaging device of the parallel claim 1, wherein performing the process of subtracting the reset signal from the pixel signal. The solid-state imaging device according to claim 3 , wherein the readout circuit performs the pulling process by reading out the reset signal with a reverse polarity with respect to the pixel signal. The fixed potential is a solid-state imaging device according to claim 1 or 2, wherein is set to a value close to the level of the reset signal. A pixel array unit including a photoelectric conversion element, and unit pixels that output a reset signal at the time of resetting and a pixel signal corresponding to a charge photoelectrically converted by the photoelectric conversion element are two-dimensionally arranged in a matrix ;
First reset means for sampling the reset signal and the pixel signal output from the unit pixel; an input capacitor having an input terminal connected to an output side of the first switch means; and an inverting input terminal for the input A differential amplifier connected to the output terminal of the capacitor and applied with a clamp voltage to the non-inverting input terminal; second switch means for selectively connecting the input terminal of the input capacitor to a node of a fixed potential; and the differential Third switch means connected between the inverting input terminal and the output terminal of the amplifier, a feedback capacitor having one end connected to the inverting input terminal of the differential amplifier, and one end connected to the other end of the feedback capacitor And a fourth switch means having the other end connected to the output terminal of the differential amplifier, and a readout circuit arranged for each column with respect to the matrix arrangement of the unit pixels;
When driving a solid-state imaging device equipped with
The reset signal and the pixel signal are sampled a plurality of times per one of the unit pixels by the first switch means, and input to the inverting input terminal of the differential amplifier via the input capacitor. The solid-state imaging device driving method , wherein the sampled reset signal and the pixel signal are added by the feedback capacitance . A pixel array unit including a photoelectric conversion element, and unit pixels that output a reset signal at the time of resetting and a pixel signal corresponding to a charge photoelectrically converted by the photoelectric conversion element are two-dimensionally arranged in a matrix;
First reset means for sampling the reset signal and the pixel signal output from the unit pixel, an input capacitor having an input terminal connected to an output side of the first switch means, and an input terminal serving as the input capacitor A single-ended inverting amplifier connected to the output terminal, a second switch means for selectively connecting the input terminal of the input capacitor to a fixed potential node, and one end connected to the input terminal of the inverting amplifier. A feedback capacitor, a third switch having one end connected to the other end of the feedback capacitor and the other end connected to the output terminal of the inverting amplifier, and connected between the input terminal and the output terminal of the inverting amplifier Fourth switch means, and fifth switch means for applying a clamp voltage to a common connection node between the feedback capacitor and the third switch means, and a matrix arrangement of the unit pixels. In the driving of the solid-state imaging device provided with a read circuit disposed for each column with respect to,
The reset signal and the pixel signal are sampled multiple times per one of the unit pixels by the first switch means, and input to the input terminal of the inverting amplifier via the input capacitor, and sampled multiple times. A method for driving a solid-state imaging device, wherein the reset signal and the pixel signal are added by the feedback capacitor. The method for driving a solid-state imaging device according to claim 6 or 7 , wherein a process of adding the reset signal and the pixel signal and a process of subtracting the reset signal from the pixel signal are performed in parallel. The method for driving a solid-state imaging device according to claim 8 , wherein the pulling process is executed by reading the reset signal with a reverse polarity with respect to the pixel signal.

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