JP4312187B2 - Inductor element - Google Patents

Description

  The present invention relates to an inductor element, and more particularly to an inductor element suitable for use in removing common mode noise.

  In recent years, the USB 2.0 standard and the IEEE 1394 standard are widely used as high-speed signal transmission interfaces, and are used in many digital devices such as personal computers and digital cameras. Unlike the single-ended transmission method that has been common for a long time, interfaces such as the USB 2.0 standard and the IEEE 1394 standard adopt a differential signal method that transmits a differential signal using a pair of signal lines.

  The differential transmission system has an excellent feature that not only the radiation electromagnetic field generated from the signal line is small compared to the single-end transmission system, but also that the differential transmission system is less susceptible to external noise. For this reason, it is easy to reduce the amplitude of the signal, and by shortening the rise time and the fall time due to the small amplitude, it becomes possible to perform signal transmission at a higher speed than the single-ended transmission method.

  FIG. 21 is a circuit diagram of a general differential transmission circuit.

  The differential transmission circuit shown in FIG. 21 includes a pair of signal lines 11 and 12, an output buffer 13 that supplies differential signals to the signal lines 11 and 12, and an input buffer that receives differential signals from the signal lines 11 and 12. 14. With this configuration, the input signal IN given to the output buffer 13 is transmitted to the input buffer 14 via the pair of signal lines 11 and 12, and is reproduced as the output signal OUT. Such a differential transmission circuit has a feature that the radiated electromagnetic field generated from the signal lines 11 and 12 is small as described above, but noise common to the signal lines 11 and 12 (common mode noise) is generated. When superposed, a relatively large radiated electromagnetic field is generated. In order to reduce the radiated electromagnetic field generated by the common mode noise, it is effective to insert the common mode filter 20 into the signal lines 11 and 12 as shown in FIG.

  The common mode filter 20 has a characteristic that the impedance to the differential component (signal) transmitted through the signal lines 11 and 12 is low and the impedance to the in-phase component (common mode noise) is high. For this reason, by inserting the common mode filter 20 into the signal lines 11 and 12, the common mode noise transmitted through the pair of signal lines 11 and 12 can be blocked without substantially attenuating the differential signal. As the common mode filter 20, for example, an element described in Patent Document 1 is known.

  However, since the impedance of the common mode filter with respect to the in-phase component is generally high in the high frequency range and low in the low frequency range, there is a problem that the common mode noise in the low frequency range cannot be sufficiently removed. In order to solve such a problem, as shown in FIG. 22, it is effective to connect a filter element 30 that bypasses low-frequency common mode noise between the signal lines 11 and 12 and the ground (non-patent document). Reference 1).

  As such a filter element 30, a common common mode filter can be used. As shown in FIG. 22, terminal electrodes 31 and 32 that are normally used as a pair of input terminals are respectively connected to the signal line 11 and the ground. The terminal electrodes 33 and 34 normally connected as a pair of output terminals may be connected to the ground and the signal line 12, respectively. As a result, the frequency characteristic for the in-phase component of the filter element 30 is the same as the frequency characteristic for the differential component of the common mode filter 20, so that a low impedance is obtained in a low frequency range. That is, low-frequency common mode noise can be bypassed to the ground.

On the other hand, since the frequency characteristic for the differential component of the filter element 30 is the same as the frequency characteristic for the common-mode component of the common mode filter 20, a high impedance is obtained for the differential signal. Therefore, if such a filter element 30 is added, the frequency characteristics of the common mode filter 20 can be complemented and common mode noise can be removed over a wide area without substantially affecting the differential signal. It becomes possible.
JP-A-8-203737 The Institute of Electrical Engineers of Japan, "Noise Immunity of Information and Communication Equipment-For Prevention of Electromagnetic Interference-", First Edition, Japan, Issued by Corona, Inc., July 18, 2002, page 186

  However, in order to use a general common mode filter as the filter element 30 shown in FIG. 22, it is necessary to use a different connection method as described above. The pattern is significantly different from the normal pattern. For this reason, problems such as the symmetry of the signal lines 11 and 12 being lost and the occupied area of the wiring pattern on the printed circuit board being increased more than necessary have occurred.

  In addition, the circuit shown in FIG. 22 requires two filter elements 20 and 30, which increases the number of parts.

  The present invention has been made to solve such a problem, and includes a filter unit capable of blocking high-frequency common mode noise and a filter capable of bypassing low-frequency common mode noise. It is an object of the present invention to provide an inductor element in which parts are integrated.

  An inductor element according to one aspect of the present invention includes a substrate, first to fourth terminal electrodes, at least one fifth terminal electrode, and first and second magnetic couplings provided on the substrate and magnetically coupled to each other. A spiral conductor and a third and a fourth spiral conductor provided on the substrate and magnetically coupled to each other, the first spiral conductor having one end connected to the first terminal electrode; The other end is connected to the third terminal electrode, and the second spiral conductor has one end connected to the second terminal electrode and the other end connected to the fourth terminal electrode. The third spiral conductor has one end connected to the first terminal electrode and the other end connected to the fifth terminal electrode. The fourth spiral conductor has one end connected to the first terminal electrode. 2 is connected to the second terminal electrode, and the other end is connected to the fifth electrode. A winding direction from one end of the first spiral conductor viewed from one direction to the other end, and from the one end of the second spiral conductor viewed from the one direction. The winding direction toward the other end is the same as each other, the winding direction from the one end to the other end of the third spiral conductor viewed from the one direction, and the fourth spiral viewed from the one direction. The winding direction from the one end to the other end of the conductor is opposite to each other.

  As described above, in the present invention, the winding direction of the first spiral conductor starting from the first terminal electrode and the winding direction of the second spiral conductor starting from the second terminal electrode are determined. The winding direction of the third spiral conductor starting from the first terminal electrode is the same as the winding direction of the fourth spiral conductor starting from the second terminal electrode. Therefore, the first and second terminal electrodes are connected to the pair of input signal lines, and the third and fourth terminal electrodes connected to the other ends of the first and second spiral conductors are output as a pair. A filter capable of blocking high-frequency common mode noise by connecting to the signal line and further connecting the fifth terminal electrode connected to the other ends of the third and fourth spiral conductors to the ground. And a low-pass common mode noise can be bypassed. Data unit it is possible to use as an integrated inductor.

  Moreover, since it has a structure in which four spiral conductors are formed on the substrate, the overall size can be reduced as compared with an inductor element of a type in which a winding is wound around a core. .

  In this case, it is preferable that the first terminal electrode and the second terminal electrode are disposed adjacent to each other, and the third terminal electrode and the fourth terminal electrode are disposed adjacent to each other. According to this, the symmetry of the signal line can be further increased, and the occupied area of the wiring pattern formed on the printed board or the like can be further reduced.

  A filter element according to another aspect of the present invention is provided on a substrate, first and second input lines, first and second output lines, a ground line, and magnetically coupled to each other. First and second spiral conductors, and third and fourth spiral conductors provided on the substrate and magnetically coupled to each other, one end of the first spiral conductor being the first spiral conductor. The other end is connected to the first output line, and the second spiral conductor has one end connected to the second input line and the other end connected to the second output line. The third spiral conductor is connected to an output line, one end of the third spiral conductor is connected to the first input line, the other end is connected to the ground line, and the fourth spiral conductor is One end is the second input label The other end is connected to the ground line, the winding direction from the one end to the other end of the first spiral conductor as viewed from one direction, and the second as viewed from the one direction. Winding direction from the one end to the other end of the spiral conductor is the same, and the winding direction from the one end to the other end of the third spiral conductor as viewed from the one direction, The winding direction from the one end to the other end of the fourth spiral conductor as viewed from one direction is opposite to each other.

  Even in such a configuration, the winding direction of the first spiral conductor starting from the first input line is the same as the winding direction of the second spiral conductor starting from the second input line. And the winding direction of the third spiral conductor starting from the first input line is opposite to the winding direction of the fourth spiral conductor starting from the second input line. Therefore, it is possible to use as an inductor element in which a filter unit capable of blocking high-frequency common mode noise and a filter unit capable of bypassing low-frequency common mode noise are integrated.

  In the present invention, the first to fourth spiral conductors are preferably planar coils. Since the planar coil can be formed by a so-called thin film process such as a sputtering method, a vapor deposition method, or a plating method, the size of the inductor element can be reduced. Further, if a thin film process is used, a spiral conductor can be formed with high processing accuracy.

  In this case, the first and second spiral conductors and the third and fourth spiral conductors may be formed in different layers via an insulating layer, or may be formed along each other in the same layer. It does not matter. According to the former, since parasitic capacitance can be suppressed, it is possible to obtain good characteristics. On the other hand, according to the latter, it is possible to reduce the planar size of the entire device or to reduce the number of layers formed on the substrate.

  In the former case, the first and third spiral conductors may be formed on the same plane, and the second and fourth spiral conductors may be formed on the other same plane. The spiral conductor may be formed on the same plane, and the second and third spiral conductors may be formed on the other same plane.

  In the inductor element according to the present invention, at least two of the first to fourth spiral conductors may be formed across a plurality of layers. Since such a spiral conductor can be formed by a so-called thick film process such as a screen printing method, the manufacturing cost can be reduced.

  In the present invention, the substrate is preferably a magnetic material. According to this, since a magnetic circuit with less leakage is formed, better characteristics can be obtained. In this case, it is preferable to further include another substrate provided on the side opposite to the substrate as viewed from the first to fourth spiral conductors, and the other substrate is a magnetic material. According to this, since a magnetic circuit with less leakage is formed, even better characteristics can be obtained.

  In addition, the inductor element according to the present invention preferably further includes a magnetic body provided in the central portion of the first to fourth spiral conductors. Also in this case, a magnetic circuit with less leakage is formed, so that even better characteristics can be obtained.

  In the present invention, the substrate may be a printed circuit board. In this case, it is not necessary to mount the common mode filter on the printed circuit board as a separate component, so that the number of components can be reduced. In the present invention, the substrate may be a semiconductor substrate. In this case, since the electronic circuit such as a transistor and the inductor element according to the present invention can be integrated on the same chip, the number of components can be reduced.

  As described above, when the inductor element according to the present invention is used, there is a problem in that the symmetry of the pair of signal lines transmitting the differential signal is lost, or the occupied area of the wiring pattern formed on the printed circuit board is increased more than necessary. Thus, it is possible to effectively remove both the high-frequency common mode noise and the low-frequency common mode noise. In addition, since the filter unit that can block high-frequency common mode noise and the filter unit that can bypass low-frequency common mode noise are integrated, the number of parts can be reduced. It becomes possible. The inductor element according to the present invention can be used not only as a common mode filter but also for other purposes.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

  [First Embodiment]

  FIG. 1 is a schematic exploded perspective view showing a structure of an inductor element 100 according to a preferred first embodiment of the present invention, and FIG. 2 is a schematic perspective view showing a state in which the inductor element 100 according to the first embodiment is assembled. It is.

  As shown in FIG. 1, the inductor element 100 according to the present embodiment includes substrates 111 and 112, insulating layers 121 to 125 provided between the substrates 111 and 112, and a conductor pattern formed on a predetermined insulating layer. It is prepared for. The material of the substrates 111 and 112 is not particularly limited, but it is preferable to use a material with high magnetic permeability, such as ferrite. The material of the insulating layers 121 to 125 is not particularly limited, but it is preferable to use polyimide or the like.

  The conductor pattern formed on the insulating layer includes first to fourth internal electrodes 131 to 134 formed on the surfaces of the insulating layers 121 to 125 and a fifth pattern formed on the surfaces of the insulating layers 121 to 125. Internal electrodes 135a and 135b, first and third spiral conductors 141 and 143 formed on the surface of the insulating layer 123, second and fourth spiral conductors 142 formed on the surface of the insulating layer 122, 144, lead conductors 151 and 152 formed on the surface of the insulating layer 124, and lead conductors 153 and 154 formed on the surface of the insulating layer 121. The first spiral conductor 141 and the second spiral conductor 142 are disposed so as to face each other with the insulating layer 123 interposed therebetween. For this reason, both are magnetically coupled to each other. Similarly, the third spiral conductor 143 and the fourth spiral conductor 144 are also arranged so as to face each other with the insulating layer 123 interposed therebetween. For this reason, both are magnetically coupled to each other. As will be described later, these conductor patterns can be formed on the insulating layer by a so-called thin film process such as sputtering, vapor deposition, or plating.

  Of these conductor patterns, the first to fifth internal electrodes 131 to 134, 135a and 135b are connected to the first to fifth terminal electrodes 101 to 104, 105a and 105b shown in FIG. It is a conductor pattern (in FIG. 1, illustration of the 1st-5th terminal electrodes 101-104, 105a, 105b is abbreviate | omitted. Hereafter, it is the same in each exploded perspective view). As shown in FIG. 2, the first and second terminal electrodes 101 and 102 are disposed adjacent to each other, and the third and fourth terminal electrodes 103 and 104 are also disposed adjacent to each other. Further, two fifth terminal electrodes 105a and 105b are provided, but the number of the fifth terminal electrodes is not limited to this in the present invention, and may be one, for example.

  Returning to FIG. 1, the first spiral conductor 141 is a planar coil, and one end 141 a thereof is connected to the first internal electrode 131. On the other hand, the other end 141 b of the first spiral conductor 141 is connected to the third internal electrode 133 through a through hole formed in the insulating layer 124 and a lead conductor 151. As described above, since the first internal electrode 131 is connected to the first terminal electrode 101 and the third internal electrode 133 is connected to the third terminal electrode 103, the first spiral conductor One end 141 a of 141 is connected to the first terminal electrode 101, and the other end 141 b is connected to the third terminal electrode 103.

  The second spiral conductor 142 is also a planar coil, and one end 142 a thereof is connected to the second internal electrode 132. On the other hand, the other end 142 b of the second spiral conductor 142 is connected to the fourth internal electrode 134 through a through hole formed in the insulating layer 122 and a lead conductor 153. As described above, since the second internal electrode 132 is connected to the second terminal electrode 102 and the fourth internal electrode 134 is connected to the fourth terminal electrode 104, the second spiral conductor One end 142 a of 142 is connected to the second terminal electrode 102, and the other end 142 b is connected to the fourth terminal electrode 104.

  The third spiral conductor 143 is also a planar coil, and one end 143 a thereof is connected to the first internal electrode 131. On the other hand, the other end 143 b of the third spiral conductor 143 is connected to the fifth internal electrodes 135 a and 135 b through a through hole formed in the insulating layer 123 and the lead conductor 152. As described above, since the fifth internal electrodes 135a and 135b are connected to the fifth terminal electrodes 105a and 105b, one end 143a of the third spiral conductor 143 is connected to the first terminal electrode 101. The other end 143b is connected to the fifth terminal electrodes 105a and 105b.

  The fourth spiral conductor 144 is also a planar coil, and one end 144 a thereof is connected to the second internal electrode 132. On the other hand, the other end 144 b of the fourth spiral conductor 144 is connected to the fifth internal electrodes 135 a and 135 b through a through hole formed in the insulating layer 122 and the lead conductor 154. Therefore, one end 144a of the fourth spiral conductor 144 is connected to the second terminal electrode 102, and the other end 144b is connected to the fifth terminal electrodes 105a and 105b.

  In the present embodiment, the fifth inner electrodes 135a and 135b are connected to each other by the lead conductors 152 and 154. That is, the fifth terminal electrodes 105a and 105b are internally short-circuited. However, the present invention is not limited to this, and the other end 143b of the third spiral conductor 143 is connected to at least one of the fifth internal electrodes 135a and 135b, and the fourth spiral shape is formed. It is sufficient that the other end 144b of the conductor 144 is connected to at least one of the fifth internal electrodes 135a and 135b. Therefore, one of the fifth internal electrodes 135a and 135b may be an unused electrode.

  In the present embodiment, the number of turns of each of the first to fourth spiral conductors 141 to 144 is about 3 times. Of course, in the present invention, the number of turns of the first to fourth spiral conductors 141 to 144 is not limited to this, and may be any number of turns. However, in order to maintain the symmetry of the first and second spiral conductors 141 and 142, the number of turns of the first spiral conductor 141 and the number of turns of the second spiral conductor 142 need to be the same. . Similarly, in order to maintain the symmetry of the third and fourth spiral conductors 143 and 144, the number of turns of the third spiral conductor 143 and the number of turns of the fourth spiral conductor 144 need to be the same. is there. The number of turns of the first and second spiral conductors 141 and 142 and the number of turns of the third and fourth spiral conductors 143 and 144 may be different from each other.

  Further, when viewed from the arrow A shown in FIG. 1, the first and second spiral conductors 141 and 142 are wound clockwise (clockwise) from the one end 141a and 142a to the other end 141b and 142b. It has been turned. Therefore, the winding direction of the first spiral conductor 141 starting from the first terminal electrode 101 and the winding direction of the second spiral conductor 142 starting from the second terminal electrode 102 are the same. Direction.

  The winding directions of the first and second spiral conductors 141 and 142 are not particularly limited as long as they are the same as each other. Therefore, both of them may be counterclockwise (counterclockwise). I do not care.

  On the other hand, when viewed from the arrow A shown in FIG. 1, the third spiral conductor 143 is wound clockwise (clockwise) from one end 143a to the other end 143b, while the fourth spiral The conductor 144 is wound counterclockwise (counterclockwise) from one end 144a to the other end 144b. Therefore, the winding direction of the third spiral conductor 143 starting from the first terminal electrode 101 and the winding direction of the fourth spiral conductor 142 starting from the second terminal electrode 102 are opposite to each other. Direction.

  The winding directions of the third and fourth spiral conductors 143 and 144 are not particularly limited as long as they are opposite to each other. Therefore, the directions are opposite, that is, the third spiral conductor 143 is It may be counterclockwise (counterclockwise) and the fourth spiral conductor 144 may be clockwise (clockwise). Further, the relationship between the winding direction of the first and second spiral conductors 141 and 142 and the winding direction of the third or fourth spiral conductors 143 and 144 is not particularly limited.

  In addition, two through holes 121a to 125a and 121b to 125b are formed in the insulating layers 121 to 125, respectively. Among these, the magnetic body 161 is inserted into the through holes 121a to 125a, and the magnetic body 162 is inserted into the through holes 121b to 125b. As shown in FIG. 1, the through-holes 122a and 123a formed in the insulating layers 122 and 123 are located in the central part of the spiral conductors 141 and 142. Therefore, the spiral conductors 141 and 142 are magnetic. It will be in the state wound around the body 161. FIG. Similarly, the through holes 122b and 123b are located at the center of the spiral conductors 143 and 144. Therefore, the spiral conductors 143 and 144 are wound around the magnetic body 162. In the present invention, it is not essential to provide such magnetic bodies 161 and 162, but by providing this, a magnetic circuit with less leakage can be formed.

  FIG. 3 is an equivalent circuit diagram of the inductor element 100 according to the present embodiment.

  As shown in FIG. 3, the inductor element 100 according to the present embodiment constitutes an element in which the first and second filter circuit portions F1 and F2 are integrated. The first filter circuit portion F1 is a circuit composed of first and second spiral conductors 141 and 142, and includes first and second terminal electrodes 101 and 102, and third and fourth terminal electrodes. 103 and 104. On the other hand, the second filter circuit portion F2 is a circuit constituted by the third and fourth spiral conductors 143 and 144, and includes the first and second terminal electrodes 101 and 102 and the fifth terminal electrode 105a. , 105b.

  Here, in the first filter circuit portion F1, the winding directions of the two coils (first and second spiral conductors 141 and 142) starting from the first and second terminal electrodes 101 and 102 are the same. Therefore, the impedance for the differential component is low and, conversely, the impedance for the in-phase component is high. On the other hand, in the second filter circuit portion F2, the winding directions of the two coils (third and fourth spiral conductors 143 and 144) starting from the first and second terminal electrodes 101 and 102 are opposite to each other. Because of the direction, the impedance for the differential component is high, and conversely, the impedance for the in-phase component is low.

  For this reason, as shown in FIG. 4 showing the usage pattern of the inductor element 100, the output buffer 13 is used to differentially change from the pair of signal lines 11a and 12a on the input side to the pair of signal lines 11b and 12b on the output side. When the signal is transmitted, the common mode noise superimposed on the differential signal is blocked by the first filter circuit portion F1, or bypassed to the ground by the second filter circuit portion F2. Thereby, the common mode noise is removed without being transmitted to the input buffer 14.

  Moreover, the first filter circuit portion F1 has a frequency characteristic that the impedance to the in-phase component increases as the frequency increases, while the second filter circuit portion F2 has an impedance to the in-phase component as the frequency decreases. Since it has a frequency characteristic of being low, high-frequency common mode noise is blocked by the first filter circuit portion F1, and low-frequency common mode noise is bypassed by the second filter circuit portion F2. Therefore, common mode noise can be effectively removed over a wide area.

  The circuit diagram shown in FIG. 4 is substantially the same as the circuit diagram shown in FIG. 22 except that the first and second filter circuit portions F1 and F2 are integrated. The score can be reduced.

  Moreover, as described with reference to FIG. 2, the first and second terminal electrodes 101 and 102 are disposed adjacent to each other, and the third and fourth terminal electrodes 103 and 104 are disposed adjacent to each other. Therefore, as shown in FIG. 5, the pair of signal lines 11a and 12a and the pair of signal lines 11b and 12b can be laid in parallel on the printed circuit board 190, and the wiring pattern on the printed circuit board 190 can be changed. There is no need for detours. For this reason, the occupation area of the wiring pattern on the printed circuit board 190 does not increase more than necessary, and high symmetry can be ensured. As a result, it is possible to simultaneously reduce the size of the entire apparatus and improve the signal quality.

  Next, a preferred method for manufacturing the inductor element 100 will be described.

  6A to 6C are process diagrams for explaining a preferred method for manufacturing the inductor element 100. FIG.

  First, as shown in FIG. 6A, a substrate 111 made of a magnetic material such as ferrite is prepared, and an insulating layer 121 is formed by applying a resin such as polyimide on the surface thereof. Although not shown in FIG. 6 (a), a part of the insulating layer 121 is patterned, thereby forming the through holes 121a and 121b shown in FIG.

  Next, a base conductor 159 is formed on the entire surface of the insulating layer 121 by sputtering or the like, and a photoresist 191 is further formed on the surface. The underlying conductor 159 functions as a power feeding body in a plating process described later, and also functions as an adhesion layer for improving the adhesion between the conductor pattern and the insulating layer. In order to fulfill such a function, for example, the base conductor 159 is preferably composed of a laminated film of chromium (Cr) and copper (Cu).

  Next, as shown in FIG. 6B, the photoresist 191 is patterned by a photolithography method to expose a part of the base conductor 159. Thereafter, by performing electrolytic plating using the base conductor 159 as a power feeding body, lead conductors 153 and 154 (conductive pattern) are formed in the exposed portion of the base conductor 159. The conductive pattern material is not particularly limited as long as it is a metal that can be formed by plating. For example, copper (Cu), silver (Ag), gold (Au), titanium (Ti), chromium (Cr), nickel ( Ni), nickel chromium alloy (Ni-Cr), solder, tin (Sn), or the like can be used. Among them, it is very preferable to use copper (Cu) in consideration of cost, electrical conductivity, and the like. When copper (Cu) is selected as the conductive pattern material, a copper sulfate bath or the like may be used as the plating solution.

  Then, as shown in FIG. 6C, the photoresist 191 is removed, and an unnecessary base conductor 159 where the lead conductor 152 is not formed is removed (soft etching) using an etching solution such as an acid. Processing of the first layer is completed.

  Hereinafter, by forming the insulating layers 122 to 125 and other conductive patterns (such as spiral conductors 141 to 144) by repeating the same process, the through holes 121a to 125a formed in the insulating layers 121 to 125, Magnetic bodies 161 and 161 are embedded in 121b to 125b. Then, after attaching the upper substrate 112 made of a magnetic material such as ferrite and then forming the first to fifth terminal electrodes 101 to 104, 105a and 105b, the inductor element 100 according to the present embodiment is completed.

  Thus, if the conductor patterns such as the spiral conductors 141 to 144 are formed by a plating method, the entire thickness of the inductor element 100 can be reduced as compared with a case where a thick film process such as a screen printing method is used. It becomes.

  In the manufacture of the inductor element 100, for example, a large substrate 111, 112 having a wafer shape is used, and after a large number of inductor elements 100 are simultaneously formed on the same wafer, the individual inductor elements 100 are used using a dicer or the like. It is preferable to separate them. According to this, since a large number of inductor elements 100 can be taken out from one wafer, the manufacturing cost can be greatly reduced.

  The method for forming the conductor pattern is not limited to the plating method described above, and other thin film processes such as a sputtering method and a vapor deposition method can also be used. In this case, a conductor film 150 is formed on the entire surface as shown in FIG. 7A, and then a photoresist 191 is formed. As shown in FIG. 7B, the conductor film 150 is formed using the photoresist 191. Conductive patterns (for example, lead conductors 153 and 154) may be formed by patterning. Furthermore, as shown in FIG. 8, a conductor pattern (eg, lead conductors 153 and 154) may be selectively formed by performing sputtering or vapor deposition using a metal mask 192.

  As described above, the inductor element 100 according to the present embodiment has the low impedance for the differential component and the high impedance for the in-phase component, and the high impedance for the differential component. Since the second filter circuit portion F2 having a low impedance to the component is integrated, the number of parts can be reduced.

  Further, since the first and second terminal electrodes 101 and 102 are disposed adjacent to each other and the third and fourth terminal electrodes 103 and 104 are disposed adjacent to each other, wiring on the printed circuit board 190 is performed. There is no need to bypass patterns. For this reason, the occupation area of the wiring pattern on the printed circuit board 190 does not increase more than necessary, and high symmetry can be ensured. As a result, it is possible to simultaneously reduce the size of the entire apparatus and improve the signal quality.

  Moreover, in the inductor element 100 according to the present embodiment, the spiral conductors 141 to 144 are sandwiched between the substrates 111 and 112 made of a magnetic material such as ferrite, and pass through the central portion of the spiral conductors 141 to 144. Since the magnetic bodies 161 and 162 are provided, a magnetic circuit with little leakage can be formed. Thereby, even if it is a case where it reduces in size, it becomes possible to acquire a favorable characteristic.

  Furthermore, in the present embodiment, the first and second spiral conductors 141 and 142 are formed in different layers via an insulating layer, and the third and fourth spiral conductors 143 and 144 are interposed via an insulating layer. Are formed in different layers, parasitic capacitance generated between the two spiral conductors that are magnetically coupled can be suppressed, and as a result, good characteristics can be obtained. In addition, there is an advantage that it is easy to increase the number of turns of the spiral conductors 141 to 144.

  Further, in the present embodiment, the first and third spiral conductors 141 and 143 are formed on the same plane, and the second and fourth spiral conductors 142 and 144 are formed on the other same plane. The number of insulating layers can be reduced, and as a result, the manufacturing cost can be reduced.

  In this embodiment, the winding direction from the inner periphery to the outer periphery of the third spiral conductor 143 is opposite to the winding direction from the inner periphery to the outer periphery of the fourth spiral conductor 144. In the present invention, this point is not essential, and both may be the same. This aspect will be described in detail in a second embodiment described later.

  In this embodiment, the other ends 141b and 142b of the first and second spiral conductors 141 and 142 are connected to the third and fourth terminal electrodes 103 and 104, respectively. The reverse is also acceptable. In this case, as shown in FIG. 9 which is a modification of the present embodiment, the conductor pattern of the conductor pattern is connected so that the lead conductor 151 is connected to the fourth inner electrode 134 and the lead conductor 153 is connected to the third inner electrode 133. What is necessary is just to change a pattern shape. Also in this case, as shown in FIG. 5, a pair of signal lines 11 b and 12 b can be laid in parallel on the printed circuit board 190.

  [Second Embodiment]

  FIG. 10 is a schematic exploded perspective view showing the structure of an inductor element 200 according to the second preferred embodiment of the present invention. The assembled state of the inductor element 200 according to the second embodiment is as shown in FIG.

  The inductor element 200 according to the present embodiment is different from the inductor element 100 according to the first embodiment in that the shape of the conductor pattern formed on the insulating layers 121 and 122 is different. Since the other points are the same as those of the inductor element 100 according to the first embodiment, the same elements are denoted by the same reference numerals, and redundant description is omitted.

  As shown in FIG. 10, in the present embodiment, unlike the first embodiment, the fourth spiral conductor 244 is formed clockwise (clockwise) from the outer periphery toward the inner periphery. This is the same winding method as the third spiral conductor 143. That is, in the present embodiment, the third spiral conductor 143 and the fourth spiral conductor 244 coincide with each other in the winding direction from the inner periphery to the outer periphery.

  In addition to the lead conductor 153, lead conductors 251 and 252 are formed on the insulating layer 121. The lead conductor 251 is a conductor that connects the second inner electrode 132 and one end 244a of the fourth spiral conductor 244, and the lead conductor 252 is the fifth inner electrodes 135a, 135b and the fourth spiral conductor. It is a conductor that connects the other end 244b of 244. In the present embodiment, one end 244a of the fourth spiral conductor 244 is located on the inner periphery, and the other end 244b of the fourth spiral conductor 244 is located on the outer periphery.

  Thereby, the connection relationship between the first to fifth terminal electrodes 101 to 104, 105a, 105b and the first to fourth spiral conductors 141 to 143, 244 is the same as the connection relationship in the first embodiment. To do. That is, when viewed from the arrow A shown in FIG. 10, the third spiral conductor 143 is wound clockwise (clockwise) from the one end 143a to the other end 143b, while the fourth spiral conductor 244 is wound counterclockwise (counterclockwise) from one end 244a to the other end 244b.

  For this reason, the inductor element 200 according to the present embodiment performs exactly the same function as the inductor element 100 according to the first embodiment. Thus, in the present invention, the winding direction from the inner periphery to the outer periphery of each spiral conductor is not limited. In both the first and second embodiments, the first and second spiral conductors 141 and 142 have the same winding direction from the inner periphery to the outer periphery, but this may also be reversed. Absent.

  [Third Embodiment]

  FIG. 11 is a schematic exploded perspective view showing the structure of an inductor element 300 according to a preferred third embodiment of the present invention. The assembled state of the inductor element 300 according to the third embodiment is also as shown in FIG.

  The inductor element 300 according to the present embodiment is different from the inductor element 100 according to the first embodiment in that the shape of the conductor pattern formed on the insulating layers 121 to 123 is different. Since the other points are the same as those of the inductor element 100 according to the first embodiment, the same elements are denoted by the same reference numerals, and redundant description is omitted.

  As shown in FIG. 11, in the present embodiment, the third spiral conductor 343 is formed on the insulating layer 122, and the fourth spiral conductor 344 is formed on the insulating layer 123. That is, the first and fourth spiral conductors 141 and 344 are formed on the same plane, and the second and third spiral conductors 142 and 343 are formed on the other same plane. Also in this case, the number of insulating layers can be reduced, and as a result, the manufacturing cost can be reduced.

  One end 343 a of the third spiral conductor 343 is connected to the first internal electrode 131 via a lead conductor 351 formed in the insulating layer 121, and the other end 343 b is formed in the insulating layer 121. The lead conductors 154 are connected to the fifth internal electrodes 135a and 135b. That is, the connection relationship of the third spiral conductor 343 is exactly the same as in the first embodiment.

  One end 344 a of the fourth spiral conductor 344 is connected to the second internal electrode 132, and the other end 344 b is connected to the fifth internal electrode via the lead conductor 152 formed in the insulating layer 124. 135a and 135b. That is, the connection relationship of the fourth spiral conductor 344 is exactly the same as in the first embodiment.

  Thereby, the connection relationship between the first to fifth terminal electrodes 101 to 104, 105a, 105b and the first to fourth spiral conductors 141, 142, 343, 344 is the connection relationship in the first embodiment. It will be the same. That is, when viewed from the arrow A shown in FIG. 11, the third spiral conductor 343 is wound counterclockwise (counterclockwise) from the one end 343a to the other end 343b, while the fourth spiral shape The conductor 344 is wound clockwise (clockwise) from the one end 344a toward the other end 344b, and the winding directions of the two are opposite to each other.

  For this reason, the inductor element 300 according to the present embodiment also performs exactly the same function as the inductor element 100 according to the first embodiment. Thus, even when the first and fourth spiral conductors 141 and 344 are formed on the same plane and the second and third spiral conductors 142 and 343 are formed on the other same plane, the insulating layer The number can be reduced, and as a result, the manufacturing cost can be reduced.

  [Fourth Embodiment]

  FIG. 12 is a schematic exploded perspective view showing the structure of an inductor element 400 according to a preferred fourth embodiment of the present invention. The state in which the inductor element 400 according to the fourth embodiment is assembled is also as shown in FIG.

  The inductor element 400 according to the present embodiment is different from the inductor element 100 according to the first embodiment in that the shape of the conductor pattern formed on the insulating layers 121 to 123 is different. Since the other points are the same as those of the inductor element 100 according to the first embodiment, the same elements are denoted by the same reference numerals, and redundant description is omitted. The same elements as those of the inductor element 200 according to the second embodiment are denoted by the same reference numerals.

  As shown in FIG. 12, in the present embodiment, the third spiral conductor 443 is formed on the insulating layer 122 and the third spiral conductor 444 is the insulating layer, as in the third embodiment described above. 123 is formed. That is, the first and fourth spiral conductors 141 and 444 are formed on the same plane, and the second and third spiral conductors 142 and 443 are formed on the other same plane.

  In the present embodiment, unlike the third embodiment, the fourth spiral conductor 444 is formed clockwise (clockwise) from the outer periphery toward the inner periphery. This is the same winding method as the third spiral conductor 443. That is, in the present embodiment, the third spiral conductor 443 and the fourth spiral conductor 444 coincide in the winding direction from the inner periphery to the outer periphery. This point is the same as in the second embodiment.

  Specifically, one end 443a of the third spiral conductor 443 is connected to the first internal electrode 131 via a lead conductor 451 formed in the insulating layer 121, and the other end 443b is connected to the insulating layer The fifth internal electrodes 135 a and 135 b are connected to each other through a lead conductor 252 formed in 121. In addition, one end 444 a of the fourth spiral conductor 444 is connected to the second internal electrode 132, and the other end 444 b is connected to the fifth internal electrode via the lead conductor 152 formed in the insulating layer 124. 135a and 135b.

  Thereby, the connection relationship between the first to fifth terminal electrodes 101 to 104, 105a, 105b and the first to fourth spiral conductors 141, 142, 443, 444 is the connection relationship in the first embodiment. It will be the same. That is, when viewed from the arrow A shown in FIG. 12, the third spiral conductor 443 is wound counterclockwise (counterclockwise) from the one end 443a to the other end 443b, while the fourth spiral shape. The conductor 444 is wound clockwise (clockwise) from the one end 444a to the other end 444b, and the winding directions of the two are opposite to each other.

  For this reason, the inductor element 400 according to the present embodiment also performs exactly the same function as the inductor element 100 according to the first embodiment.

  [Fifth Embodiment]

  FIG. 13 is a schematic exploded perspective view showing the structure of an inductor element 500 according to a preferred fifth embodiment of the present invention.

  The inductor element 500 according to the present embodiment is different from the inductor elements 100, 200, 300, and 400 according to the above-described embodiment in the arrangement of the first to fifth internal electrodes 131 to 134, 135a, and 135b. That is, as shown in FIG. 13, in the present embodiment, the first internal electrode 131 and the second internal electrode 132 are arranged at positions facing each other, and the third internal electrode 133 and the fourth internal electrode 134 are arranged. The thighs are arranged at positions facing each other. Thus, when the inductor element 500 according to the present embodiment is assembled, as shown in FIG. 14, the first to fifth terminal electrodes 101 to 104, 105a, and 105b are also arranged differently from the above embodiments.

  As shown in FIG. 13, one end 141a of the first spiral conductor 141 is connected to the first internal electrode 131, and the other end 141b is connected via a lead conductor 551 formed on the insulating layer 124. Are connected to the third internal electrode 133. In addition, one end 542 a of the second spiral conductor 542 is connected to the second internal electrode 132, and the other end 542 b is connected to the fourth internal electrode via a lead conductor 553 formed on the insulating layer 121. It is connected to the electrode 134.

  Furthermore, one end 143 a of the third spiral conductor 143 is connected to the first internal electrode 131, and the other end 143 b is connected to the fifth internal electrode via the lead conductor 552 formed on the insulating layer 124. It is connected to the electrode 135b. One end 544 a of the fourth spiral conductor 544 is connected to the second internal electrode 132 via a lead conductor 554 formed on the insulating layer 121, and the other end 544 b is connected to the insulating layer 121. Is connected to the fifth internal electrode 135a through a lead conductor 555 formed in the first electrode. In the present embodiment, the fifth terminal electrodes 105a and 105b are not short-circuited inside, but they may be short-circuited inside as in the above embodiments. In addition, the same code | symbol is attached | subjected to the element same as the inductor element 100 by 1st Embodiment, and the overlapping description is abbreviate | omitted.

  Also in this embodiment, when viewed from the arrow A shown in FIG. 13, the first and second spiral conductors 141 and 542 are clockwise (clockwise) from the one end 141a and 542a toward the other end 141b and 542b. It is wound. The third spiral conductor 143 is wound clockwise (clockwise) from one end 143a to the other end 143b, while the fourth spiral conductor 544 is wound from one end 544a to the other end 544b. It is wound counterclockwise (counterclockwise).

  FIG. 15 is a diagram for explaining a wiring pattern on a printed board when the inductor element 500 is used.

  As shown in FIG. 15, even when the inductor element 500 according to the present embodiment is used, the pair of signal lines 11a and 12a and the pair of signal lines 11b and 12b can be laid in parallel on the printed circuit board 190. This eliminates the need for bypassing the wiring pattern on the printed circuit board 190.

  In the inductor element 500 according to the present embodiment, the first and third spiral conductors 141 and 143 are formed on the same plane as in the first and second embodiments, and the second and fourth spiral conductors are formed. 542 and 544 are formed on the same plane, but the first and fourth spiral conductors 141 and 544 are formed on the same plane as in the third and fourth embodiments. Three spiral conductors 142 and 543 may be formed on another same plane. In any case, the number of insulating layers can be reduced.

  In addition, in the inductor element 500 according to the present embodiment, the winding direction from the inner periphery to the outer periphery of the third spiral conductor 143 and the inner part of the fourth spiral conductor 544 are the same as in the first and third embodiments. Although the winding direction from the circumference to the outer circumference is opposite to each other, they may be the same direction as in the second and fourth embodiments.

  [Sixth Embodiment]

  FIG. 16 is a schematic exploded perspective view showing the structure of an inductor element 600 according to a preferred sixth embodiment of the present invention. The assembled state of the inductor element 600 according to the sixth embodiment is also as shown in FIG.

  In the inductor element 600 according to the present embodiment, the first and second spiral conductors 641 and 642 are both formed on the insulating layer 122 along each other. For this reason, both are magnetically coupled to each other. Furthermore, the third and fourth spiral conductors 643 and 644 are both formed along the insulating layer 123 along each other. For this reason, both are magnetically coupled to each other. Moreover, in this embodiment, the through-holes 121a-125a formed in each insulating layer 121-125 are one each. In addition, the same code | symbol is attached | subjected to the element same as the inductor element 100 by 1st Embodiment, and the overlapping description is abbreviate | omitted.

  As shown in FIG. 16, one end 641 a of the first spiral conductor 641 is connected to the first internal electrode 131, and the other end 641 b is connected via a lead conductor 651 formed on the insulating layer 121. Are connected to the third internal electrode 133. In addition, one end 642 a of the second spiral conductor 642 is connected to the second internal electrode 132 via a lead conductor 652 formed on the insulating layer 121, and the other end 642 b is connected to the insulating layer 121. Is connected to the fourth internal electrode 134 through a lead conductor 653 formed in the first electrode.

  Furthermore, one end 643 a of the third spiral conductor 643 is connected to the first internal electrode 131, and the other end 643 b is connected to the fifth internal electrode via a lead conductor 654 formed on the insulating layer 124. The electrodes 135a and 135b are connected. One end 644 a of the fourth spiral conductor 644 is connected to the second internal electrode 132 via a lead conductor 655 formed on the insulating layer 124, and the other end 644 b is connected to the insulating layer 124. The fifth internal electrodes 135a and 135b are connected to each other through a lead conductor 654 formed in the above.

  Also in this embodiment, when viewed from the arrow A shown in FIG. 16, the first and second spiral conductors 641 and 642 are clockwise (clockwise) from the one end 641a and 642a toward the other end 641b and 642b. It is wound. The third spiral conductor 643 is wound clockwise (clockwise) from one end 643a to the other end 643b, while the fourth spiral conductor 644 is wound from one end 644a to the other end 644b. It is wound counterclockwise (counterclockwise).

  Thereby, the connection relationship between the first to fifth terminal electrodes 101 to 104, 105a and 105b and the first to fourth spiral conductors 641 to 644 is the same as the connection relationship in the first embodiment. . For this reason, the inductor element 600 according to the present embodiment also performs exactly the same function as the inductor element 100 according to the first embodiment. Moreover, according to the configuration of this embodiment, the first and second spiral conductors 641 and 642 are formed along the same layer on the same layer, and the third and fourth spiral conductors 643 and 644 are formed. Are formed along one another on the same layer, the planar size of the inductor element 600 can be reduced.

  Moreover, according to the configuration of the present embodiment, the mask pattern for forming the first and second spiral conductors 641 and 642 and the mask for forming the third and fourth spiral conductors 643 and 644 are provided. It is possible to share the pattern, which can reduce the manufacturing cost. However, in this embodiment, it is not essential to have a configuration in which the mask pattern can be shared.

  In addition, in the inductor element 600 according to the present embodiment, the arrangement of the terminal electrodes is the same as that in the first to fourth embodiments, but this may be the same as that in the fifth embodiment. That is, the first to fifth terminal electrodes 101 to 104, 105a, and 105b may be arranged as shown in FIG.

  In the present embodiment, the first and second spiral conductors 641 and 642 and the third and fourth spiral conductors 643 and 644 are adjacent to each other in the vertical direction. Some magnetic coupling occurs. When it is necessary to weaken this magnetic coupling, the distance between them may be widened, or a material with high magnetic permeability may be interposed between them. Conversely, when it is necessary to increase the magnetic coupling between the two, the distance between them may be narrowed, or a material with low permeability may be interposed between them. That is, the magnetic coupling between the two can be appropriately adjusted according to the application.

  Further, in the present embodiment, the first and second spiral conductors 641 and 642 and the third and fourth spiral conductors 643 and 644 are vertically adjacent to each other, but they are formed on the same plane. It doesn't matter. An example in which the first to fourth spiral conductors 641 to 644 are all formed on the same plane is shown in FIG.

  As shown in FIG. 17, when all of the first to fourth spiral conductors 641 to 644 are formed on the same plane, lead conductors 656 to 659 are formed on the insulating layer 121, and predetermined spiral conductors 641 to 644 are predetermined. These end portions may be connected to predetermined internal electrodes corresponding thereto. Specifically, one end 642a of the second spiral conductor 642 and one end 644a of the fourth spiral conductor 644 are connected to the second internal electrode 132 by the lead conductor 656, and the first conductor 657 The other end 641b of one spiral conductor 641 may be connected to the third internal electrode 133. Further, the other end 642b of the second spiral conductor 642 and the fourth inner electrode 134 are connected by the lead conductor 658, and the other end 642b of the third spiral conductor 643 and the fourth inner electrode 134 are connected by the lead conductor 659. The other end 644b of the spiral conductor 644 may be connected to the fifth internal electrodes 135a and 135b.

  According to this, the number of insulating layers can be reduced, and as a result, a reduction in height can be realized. In addition, the manufacturing cost can be reduced. Further, since there is almost no magnetic coupling between the first and second spiral conductors 641 and 642 and the third and fourth spiral conductors 643 and 644, it is necessary to weaken the magnetic coupling between them. Even in this case, it is particularly suitable.

  [Seventh Embodiment]

  FIG. 18 is a schematic exploded perspective view showing the structure of an inductor element 700 according to a preferred seventh embodiment of the present invention. The assembled state of the inductor element 700 according to the seventh embodiment is also as shown in FIG.

  The inductor element 700 according to the present embodiment is different in that the number of insulating layers sandwiched between the substrates 111 and 112 is six (721 to 726), and the shape of the conductor pattern formed in these insulating layers is different. This is different from the inductor element 100 according to the first embodiment. Since the other points are the same as those of the inductor element 100 according to the first embodiment, the same elements are denoted by the same reference numerals, and redundant description is omitted. Through holes 721a to 726a and 721b to 726b are formed in the insulating layers 721 to 726, respectively.

  As shown in FIG. 18, in this embodiment, the spiral conductor is formed over a plurality of layers. More specifically, the first spiral conductor is composed of conductors 741a, 741b, 741c, 741d, and 741e formed on different layers, and the second spiral conductor is formed on different layers. The conductors 742a, 742b, 742c, 742d, and 742e are configured. The first spiral conductor and the second spiral conductor have a double helix structure, and therefore both are magnetically coupled to each other.

  The third spiral conductor is composed of conductors 743a, 743b, 743c, 743d, and 743e formed on different layers, and the fourth spiral conductor is conductors 744a and 744b formed on different layers. , 744c, 744d, and 744e. The third spiral conductor and the fourth spiral conductor also have a double helix structure, and therefore both are magnetically coupled to each other.

  One end 741x of the first spiral conductor constituted by the conductors 741a, 741b, 741c, 741d, and 741e is connected to the first internal electrode 131, and the other end 741y of the first spiral conductor is 3 internal electrodes 133. On the other hand, one end 742x of the second spiral conductor constituted by the conductors 742a, 742b, 742c, 742d, 742e is connected to the second internal electrode 132, and the other end 742y of the second spiral conductor is , Connected to the fourth internal electrode 134.

  One end 743x of the third spiral conductor constituted by the conductors 743a, 743b, 743c, 743d, and 743e is connected to the first internal electrode 131, and the other end 743y of the third spiral conductor is Are connected to the fifth internal electrode 135b. On the other hand, one end 744x of the fourth spiral conductor constituted by the conductors 744a, 744b, 744c, 744d, 744e is connected to the second internal electrode 132, and the other end 744y of the fourth spiral conductor is Are connected to the fifth internal electrode 135a.

  In the present embodiment, when viewed from the arrow A shown in FIG. 18, the first spiral conductors (741a, 741b, 741c, 741d, 741e) rotate counterclockwise (counterclockwise) from one end 741x to the other end 741y. ) And the second spiral conductors (742a, 742b, 742c, 742d, 742e) are also wound counterclockwise (counterclockwise) from one end 742x to the other end 742y. . Therefore, the winding direction of the first spiral conductor (741a, 741b, 741c, 741d, 741e) starting from the first terminal electrode 101 and the second spiral shape starting from the second terminal electrode 102 are used. The winding directions of the conductors (742a, 742b, 742c, 742d, 742e) are the same.

  On the other hand, when viewed from the arrow A shown in FIG. 18, the third spiral conductors (743a, 743b, 743c, 743d, 743e) are counterclockwise (counterclockwise) from the one end 743x to the other end 743y. On the other hand, the fourth spiral conductor (744a, 744b, 744c, 744d, 744e) is wound clockwise (clockwise) from one end 744x to the other end 744y. Therefore, the winding direction of the third spiral conductor (743a, 743b, 743c, 743d, 743e) starting from the first terminal electrode 101 and the fourth spiral shape starting from the second terminal electrode 102 are used. The winding directions of the conductors (744a, 744b, 744c, 744d, 744e) are opposite to each other.

  Thereby, the connection relationship between the first to fifth terminal electrodes 101 to 104, 105a and 105b and the first to fourth spiral conductors 741 to 744 is the same as the connection relationship in the first embodiment. . For this reason, the inductor element 700 according to the present embodiment also performs exactly the same function as the inductor element 100 according to the first embodiment. Moreover, according to the configuration of the present embodiment, the shape of the conductor pattern on each insulating layer is not so complicated, and a high pattern accuracy is not required, so that a thick film process such as a screen printing method is used. It becomes possible. As a result, manufacturing costs can be reduced.

  In the inductor element 700 according to the present embodiment, the connection relationship between the terminal electrode and the spiral conductor is the same as that in the first to fourth embodiments, but the connection relationship may be the same as that in the fifth embodiment. I do not care. That is, the first to fifth terminal electrodes 101 to 104, 105a, and 105b may be arranged as shown in FIG.

  [Eighth Embodiment]

  FIG. 19 is a schematic exploded perspective view showing the structure of an inductor element 800 according to a preferred eighth embodiment of the present invention. The inductor element 800 according to the present embodiment has a structure formed on a printed circuit board.

  The inductor element 800 according to the present embodiment is substantially the same as the first embodiment shown in FIG. 1 with respect to the structure of the first to fourth spiral conductors 841 to 844, and the first spiral conductor 841 The second spiral conductor 842 and the third spiral conductor 843 and the fourth spiral conductor 844 are magnetically coupled to each other, and these are the resin layers 190-1 to 190- constituting the printed circuit board. 3 in that the element itself is not a separate part but has a structure integrated on a printed circuit board.

  More specifically, the first spiral conductor 841 is formed on the resin layer 190-2, one end of which is connected to the first input line 801 and the other end is connected to the first output line 803. ing. The second spiral conductor 842 is formed on the resin layer 190-1, one end of which is connected to the second input line 802 and the other end is connected to the second output line 804. The first and second input lines 801 and 802 are a pair of wires to which a differential signal is supplied. For example, the signal lines 11a and 12a shown in FIG. 4 correspond to this. On the other hand, the first and second output lines 803 and 804 are also a pair of wires, for example, the signal lines 11b and 12b shown in FIG.

  The third spiral conductor 843 is formed on the resin layer 190-2, one end of which is connected to the first input line 801 and the other end is connected to the ground line 805a. The fourth spiral conductor 844 is formed on the resin layer 190-1, one end of which is connected to the second input line 802 and the other end is connected to the ground line 805b. The ground lines 805a and 805b may be a common conductor.

  In the present embodiment, when viewed from the arrow A shown in FIG. 19, the first spiral conductor 841 is connected from the one end connected to the first input line 801 to the other end connected to the first output line 803. Winding clockwise (clockwise). Similarly, the second spiral conductor 842 is also wound clockwise (clockwise) from one end connected to the second input line 802 toward the other end connected to the second output line 804. ing. Therefore, the winding direction of the first spiral conductor 841 starting from the first input line 801 and the winding direction of the second spiral conductor 842 starting from the second input line 802 are the same. It has become a direction.

  On the other hand, when viewed from the arrow A shown in FIG. 19, the third spiral conductor 843 rotates clockwise from one end connected to the first input line 801 toward the other end connected to the ground line 805a. On the other hand, the fourth spiral conductor 844 is wound counterclockwise (counterclockwise) from one end connected to the second input line 802 to the other end connected to the ground line 805b. It is wound clockwise). Therefore, also in the present embodiment, the winding direction of the third spiral conductor 843 starting from the first input line 801 and the winding of the fourth spiral conductor 844 starting from the second input line 802 are used. The turning directions are opposite to each other.

  Thereby, the inductor element 800 according to the present embodiment performs the same function as the inductor element 100 according to the first embodiment. Moreover, according to this embodiment, since the element itself is formed on the printed board, the number of components to be mounted on the printed board can be reduced.

  In the inductor element 800 according to the present embodiment, the first and third spiral conductors 841 and 843 are formed on the same plane as in the first and second embodiments, and the second and fourth spiral conductors are formed. 842 and 844 are formed on the other same plane. However, as in the third and fourth embodiments, the first and fourth spiral conductors 841 and 844 are formed on the same plane, and the second and second spiral conductors are formed. The three spiral conductors 842 and 843 may be formed on another same plane.

  In addition, in the inductor element 800 according to the present embodiment, the winding direction from the inner periphery to the outer periphery of the third spiral conductor 843 and the inner part of the fourth spiral conductor 844 are the same as in the first and third embodiments. Although the winding direction from the circumference to the outer circumference is opposite to each other, they may be the same direction as in the second and fourth embodiments.

  In this embodiment, the inductor element is formed on the printed circuit board. However, the inductor element may be embedded in the semiconductor chip by being integrated on the semiconductor chip. In this case, as shown in FIG. 20 which is a schematic cross-sectional view, first and third spiral conductors 941 and 943 are formed between interlayer insulating films 921 and 922 provided on a semiconductor substrate 911, and interlayer insulating films are formed. The second and fourth spiral conductors 942 and 944 may be formed between 922 and 923. Also in this case, when viewed from the arrow A shown in FIG. 20, the winding direction from one end (input line) of the first spiral conductor 941 to the other end (output line) and the second spiral conductor 942 The winding directions from one end (input line) to the other end (output line) are the same as each other, and from one end (input line) of the third spiral conductor 943 to the other end (ground line). The winding direction and the winding direction from one end (input line) to the other end (ground line) of the fourth spiral conductor 944 may be opposite to each other.

  The preferred embodiments of the present invention have been described above, but the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the present invention. Needless to say, it is included in the range.

  For example, in the first to sixth and eighth embodiments, two spiral conductors are formed on two planes, respectively, but the present invention is not limited to this, and various other aspects are also possible. You may adopt. Therefore, a filter circuit portion (see the first to fifth and eighth embodiments) of a type in which a pair of spiral conductors that are magnetically coupled are formed in different layers via an insulating layer, and a pair of spiral conductors that are magnetically coupled May be mixed in one inductor element. The filter circuit portion (see the sixth embodiment) is of the type that forms the same in the same plane. Similarly, a filter circuit portion (see the seventh embodiment) of a type in which a pair of spiral conductors that are magnetically coupled are formed over a plurality of layers and a filter circuit portion of another type are mixed in one inductor element. It does not matter.

  Further, the number of turns of the spiral conductor and the number of insulating layers exemplified in the above embodiments are merely examples, and the present invention is not limited thereto.

  Furthermore, although the spiral conductor exemplified in each of the above embodiments has a substantially rectangular periphery, the shape of the spiral conductor is not limited to this, and may be a circle or a polygon.

  The inductor element according to the present invention can be used not only as an element for removing common mode noise but also for other uses.

1 is a schematic exploded perspective view showing a structure of an inductor element 100 according to a preferred first embodiment of the present invention. 1 is a schematic perspective view showing a state where an inductor element 100 is assembled. 3 is an equivalent circuit diagram of the inductor element 100. FIG. 4 is a circuit diagram showing a usage pattern of the filter element 100. FIG. It is a figure for demonstrating the wiring pattern on a printed circuit board in the case of using the inductor element 100. FIG. FIG. 6 is a process diagram for explaining a preferred method for manufacturing the inductor element 100. FIG. 10 is a process diagram for explaining another preferable method for manufacturing the inductor element 100. FIG. 10 is a process diagram for explaining still another preferred manufacturing method of the inductor element 100. 6 is a schematic exploded perspective view showing a modification of the filter element 100. FIG. It is a substantially exploded perspective view which shows the structure of the inductor element 200 by preferable 2nd Embodiment of this invention. It is a substantially exploded perspective view which shows the structure of the inductor element 300 by preferable 3rd Embodiment of this invention. It is a substantially exploded perspective view which shows the structure of the inductor element 400 by preferable 4th Embodiment of this invention. FIG. 10 is a schematic exploded perspective view showing a structure of an inductor element 500 according to a preferred fifth embodiment of the present invention. FIG. 5 is a schematic perspective view showing a state in which an inductor element 500 is assembled. It is a figure for demonstrating the wiring pattern on a printed circuit board in the case of using the inductor element 500. FIG. It is a substantially exploded perspective view which shows the structure of the inductor element 600 by preferable 6th Embodiment of this invention. 10 is a schematic exploded perspective view showing a modification of the filter element 600. FIG. FIG. 20 is a schematic exploded perspective view showing the structure of an inductor element 700 according to a preferred seventh embodiment of the present invention. FIG. 20 is a schematic exploded perspective view showing the structure of an inductor element 800 according to a preferred eighth embodiment of the present invention. It is a schematic sectional view showing an example in which first to fourth spiral conductors 941 to 944 are formed on a semiconductor substrate. It is a circuit diagram of a general differential transmission circuit. FIG. 22 is a diagram in which an element 30 for bypassing low-frequency common mode noise is added to the circuit of FIG. 21.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11, 12 Signal line 11a, 12a Input signal line 11b, 12b Output signal line 13 Output buffer 14 Input buffer 20 Common mode filter 30 Filter element 31-34 Terminal electrode 100,200,300,400,500,600,700,800 Inductor element 101 First terminal electrode 102 Second terminal electrode 103 Third terminal electrode 104 Fourth terminal electrodes 105a and 105b Fifth terminal electrodes 111 and 112 Substrate 121 to 125, 721 to 726 Insulating layers 121a to 125a , 121b to 125b, 721a to 726a, 721b to 726b Through-hole 131 First internal electrode 132 Second internal electrode 133 Third internal electrode 134 Fourth internal electrode 135a, 135b Fifth internal electrodes 141, 641, 841, 941 First spiral conductor 141 , 641a, 741x One end 141b, 641b, 741y of the first spiral conductor 142, 542, 642, 842, 942 of the first spiral conductor 142a, 542a, 642a, 742x Second One end 142b, 542b, 642b, 742y of the second spiral conductor 143,343,443,643,843,943, 943 of the second spiral conductor Third spiral conductors 143a, 343a, 443a, 643a, 743x Third One end 143b, 343b, 443b, 643b, 743y of the third spiral conductor The other end 144, 244, 344, 444, 544, 644, 844, 944 of the third spiral conductor The fourth spiral conductor 144a, 244a, 344a , 444a, 544a, 644a, 744x One end of the fourth spiral conductor 144b, 244b, 344b, 444b, 544b, 644b, 744y The other end of the fourth spiral conductor 150 Conductor films 151-154, 251, 252, 351, 451, 551-555 651 to 659 Lead conductor 159 Base conductor 161, 162 Magnetic body 190 Printed circuit board 190-1 to 190-3 Resin layer 191 Photoresist 192 Metal mask 741a to 741e, 742a to 742e, 743a to 743e, 744a to 744e Conductor 801 First Input line 802 second input line 803 first output line 804 second output lines 805a, 805b ground line 911 semiconductor substrate 921-923 interlayer insulating film

Claims (14)

A substrate,
A plurality of insulating layers provided on the substrate;
First to fourth terminal electrodes;
At least one fifth terminal electrode;
First to fourth spiral conductors,
Each of the first to fourth spiral conductors is formed on at least one surface of the plurality of insulating layers,
And said first spiral conductor and second spiral conductor magnetically coupled to each other,
And the third spiral conductor and the fourth spiral conductor magnetically coupled to each other,
The first spiral conductor has one end connected to the first terminal electrode and the other end connected to the third terminal electrode;
The second spiral conductor has one end connected to the second terminal electrode and the other end connected to the fourth terminal electrode.
The third spiral conductor has one end connected to the first terminal electrode and the other end connected to the fifth terminal electrode.
The fourth spiral conductor has one end connected to the second terminal electrode and the other end connected to the fifth terminal electrode.
A winding direction from the one end of the first spiral conductor viewed from one direction toward the other end, and a winding direction from the one end of the second spiral conductor viewed from the one direction toward the other end Are identical to each other,
A winding direction from the one end to the other end of the third spiral conductor viewed from the one direction, and a winding direction from the one end to the other end of the fourth spiral conductor viewed from the one direction. And an inductor element characterized by being opposite to each other.   The first terminal electrode and the second terminal electrode are disposed adjacent to each other, and the third terminal electrode and the fourth terminal electrode are disposed adjacent to each other. 1. The inductor element according to 1. A substrate configured to include a plurality of insulating layers ;
First and second input lines;
First and second output lines;
The ground line,
First to fourth spiral conductors,
Each of the first to fourth spiral conductors is formed on at least one surface of the plurality of insulating layers,
The first spiral conductor and the second spiral conductor are magnetically coupled to each other ;
The third spiral conductor and the fourth spiral conductor are magnetically coupled to each other ;
The first spiral conductor has one end connected to the first input line and the other end connected to the first output line.
The second spiral conductor has one end connected to the second input line and the other end connected to the second output line;
The third spiral conductor has one end connected to the first input line and the other end connected to the ground line.
The fourth spiral conductor has one end connected to the second input line and the other end connected to the ground line.
A winding direction from the one end of the first spiral conductor viewed from one direction toward the other end, and a winding direction from the one end of the second spiral conductor viewed from the one direction toward the other end Are identical to each other,
A winding direction from the one end to the other end of the third spiral conductor viewed from the one direction, and a winding direction from the one end to the other end of the fourth spiral conductor viewed from the one direction. And an inductor element characterized by being opposite to each other.   4. The inductor element according to claim 1, wherein the first to fourth spiral conductors are planar coils. 5. The first and second spiral conductors are formed in different layers through one of the plurality of insulating layers , and the third and fourth spiral conductors are formed of the plurality of insulating layers . The inductor element according to claim 4, wherein the inductor element is formed in a different layer through one of the layers .   6. The first and third spiral conductors are formed on the same plane, and the second and fourth spiral conductors are formed on another same plane. Inductor element.   6. The first and fourth spiral conductors are formed on the same plane, and the second and third spiral conductors are formed on another same plane. Inductor element. The first and second spiral conductors are formed along each other in the same insulating layer, and the third and fourth spiral conductors are formed along each other in the same insulating layer. The inductor element according to claim 4, wherein: 4. The inductor element according to claim 1 , wherein at least two of the first to fourth spiral conductors are formed across a plurality of the insulating layers. 5. The inductor element according to any one of claims 1 or 2, wherein the substrate is a magnetic material. 2. The semiconductor device according to claim 1, further comprising another substrate provided on a side opposite to the substrate when viewed from the first to fourth spiral conductors, wherein the other substrate is a magnetic material . The inductor element according to any one of 10 .   The inductor element according to any one of claims 1 to 11, further comprising a magnetic body provided at a central portion of the first to fourth spiral conductors. The inductor element according to claim 3, wherein the board is a printed board. The inductor element according to claim 3, wherein the substrate includes a semiconductor substrate , and each of the insulating layers is an interlayer insulating film provided on the semiconductor substrate .

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