JP4307895B2 - Optical encoder - Google Patents

Optical encoder Download PDF

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Publication number
JP4307895B2
JP4307895B2 JP2003112937A JP2003112937A JP4307895B2 JP 4307895 B2 JP4307895 B2 JP 4307895B2 JP 2003112937 A JP2003112937 A JP 2003112937A JP 2003112937 A JP2003112937 A JP 2003112937A JP 4307895 B2 JP4307895 B2 JP 4307895B2
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JP
Japan
Prior art keywords
light receiving
light
pitch
receiving region
regions
Prior art date
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Expired - Fee Related
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JP2003112937A
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Japanese (ja)
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JP2004317357A (en
Inventor
利典 中原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Tottori Sanyo Electric Co Ltd
Sanyo Electric Co Ltd
Sanyo Consumer Electronics Co Ltd
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Priority to JP2003112937A priority Critical patent/JP4307895B2/en
Publication of JP2004317357A publication Critical patent/JP2004317357A/en
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  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
  • Optical Transform (AREA)

Description

【0001】
【発明の属する技術分野】
本発明は、受光素子及びそれを備える光エンコーダに関する。
【0002】
【従来の技術】
従来の光エンコーダは特許文献1に記載のように、スケールにピッチPの透光部が設けられ、受光素子に前記透光部のピッチPの1/4倍のピッチでの受光領域を一列に配列している。
【0003】
【特許文献1】
特開昭61−292016号公報
【0004】
【発明が解決しようとする課題】
従来の光エンコーダは、各受光領域がその長さ方向において互いに隣接しているので、隣の受光領域の影響を受けるクロストークが発生しやすい。隣り合うべき受光領域を上下に配置することによって受光領域を2列に分けて配列すれば、クロストークの影響を受けにくくなる。しかしながら、受光領域を上下に2段に分けて配列すると、取付誤差などによってスケールの透光部と受光領域の間に傾きが生じた場合に、出力信号の状態が不安定になりやすい。また、受光領域の長さ方向に素子の長さが長くなり、素子の形状が大型化し、1つのウエハから取れる素子数が減少する。
【0005】
そこで本発明は、素子形状の大型化を防止するとともに、クロストークの発生を抑制することを課題とする。
【0007】
【課題を解決するための手段】
本発明の光エンコーダは請求項に記載のように、透光部がピッチPで配列されたスケールが光源と受光素子の間に配置された光エンコーダにおいて、前記受光素子は、同一形状の第1受光領域をX方向に一列にピッチP/2で配列した第1の受光領域列と、同一形状の第2受光領域をX方向にピッチP/2で一列に配列した第2の受光領域列とを備え、隣接する前記第1受光領域の間に前記第2受光領域が位置するとともに、前記X方向と直交するY方向において前記第1受光領域と前記第2受光領域が部分的に重なるように第1の受光領域列と第2の受光領域列とを段差をもって配置したことを特徴とする。
【0008】
本発明の光エンコーダは請求項に記載のように、透光部がピッチPで配列されたスケールが光源と受光素子の間に配置された光エンコーダにおいて、前記受光素子は、同一形状の第1受光領域をX方向に一列にピッチP/2で配列した第1の受光領域列と、同一形状の第2受光領域をX方向にピッチP/2で一列に配列した第2の受光領域列とを備え、隣接する前記第1受光領域の間に前記第2受光領域が位置するとともに、前記X方向と直交するY方向において前記第1受光領域と前記第2受光領域が部分的に重なるように配置され、隣接する前記第1受光領域の出力が第1の比較器に与えられ、隣接する前記第2受光領域の出力が第2の比較器に与えられることを特徴とする。
【0009】
【発明の実施の形態】
以下本発明の実施形態について、図面を参照して説明する。図1は、光エンコーダの概略構成を示す図である。
【0010】
この光エンコーダは、受光素子1と光源2の間に、スケール3を配置して構成される。光源2は、発光ダイオードを利用しているが、それ以外の光源を利用することもできる。光源2の光は、コリメートレンズ21等の光学手段によって平行な光に揃えてからスケール3に照射する構成とすることができる。
【0011】
スケール3は、基材31に複数の透光部32をピッチP(例えば170μm)で配列している。基材31は、金属板のような遮光性の板によって構成し、そこに透光部32としての穴を形成しても良いし、ガラスやプラスチックのような透明な板によって構成し、そこに遮光性の被膜をパターン形成しても良い。透光部32の幅は、前記ピッチPの略半分の長さの例えば85μmに設定している。透光部32の長さは、前記ピッチPよりも十分に長い例えば2000μmに設定している。隣接する透光部32の間に位置する遮光性の部分は、透光部32と同等の形状に設定している。スケール3は、X方向に往復移動する細長い板状のものとしているが、透光部がX方向に沿って回転する円状の板によって構成することもできる。
【0012】
受光素子1は、複数の受光領域A、Bを整列して有する受光部11を備える。受光素子1は、受光部11と回路部12を集積して構成される。受光部11は、同一形状の受光領域A,Bを一方向(X方向)に配列し、前記X方向と直交するY方向に前記受光領域A,Bを交互に突出させることによって、前記受光領域A,Bをジグザグ状に配置している。前記突出させる長さL1は、前記受光領域A,BのY方向の長さLよりも短い長さに設定している。
【0013】
受光部11の1段目に位置する第1受光領域Aの列は、前記ピッチPの半分のピッチ(P/2)で配列されている。受光部11の2段目に位置する第2受光領域Bの列は、前記ピッチPの半分のピッチ(P/2)で配列されている。隣接する第1受光領域Aの間に第2受光領域Bが位置する。Y方向において前記第1受光領域Aと第2受光領域Bが部分的に重なるとともに、第1の受光領域列と第2の受光領域列が段差(長さL1)をもって配列される。
【0014】
第1、第2の受光領域A、Bの幅は、前記ピッチPの1/4の長さ(P/4)よりも若干短い長さの例えば30μmに設定される。第1、第2の受光領域A,Bの長さLは、例えば260μmに設定される。第1、第2の受光領域A,Bの間には、P/4から第1(第2)の受光領域A(B)の幅を差し引いた長さの間隔、この例では12.5μmの間隔が設けられる。
【0015】
第1受光領域Aと第2受光領域BがY方向において部分的に重なる長さL2は、第1受光領域Aもしくは第2受光領域Bの長さLの半分よりも長い長さに設定しいている。この重なる長さL2が長ければ長いほど、受光素子1のY方向の長さを短く設定することができるので、1つのウエハから得られる受光素子の数を増加することができる。ただし、長さL2が長ければ長くなるほど、隣接する受光領域の間において、一方の受光信号が他方に影響を与えるクロストーク現象が現れやすくなる。そこで、受光素子1のY方向の長さに制約がなければ、前記重なる長さL2を第1、第2の受光領域A,Bの長さの半分の長さL/2よりも短くすることができる。このようにすれば、クロストーク現象をより多く抑制することができる。
【0016】
受光部11は、受光領域A,Bを除いた部分の表面を遮光性の被膜によって覆っている。
【0017】
受光素子1は、図2に示すような構成の回路部12を受光部11に隣接するようにして半導体基板上に集積し、受光部11と回路部12一体的に形成している。
【0018】
回路部12上には、電源供給用のVcc端子と接地用のGND端子と出力用のVoutA、VoutBを備えている。
【0019】
回路部12は、図2に示すように、受光領域Aと、その出力と反転の関係にある出力を得る受光領域A−(ここで−は、バーと呼ばれる反転出力を示す意味で使用している。以下同様)の各出力を増幅器で増幅後、比較器COMP−Aにて比較して出力VoutAを得る構成としている。同様に、受光領域Bと、その出力と反転の関係にある出力を得る受光領域B−の各出力を増幅器で増幅後、比較器COMP−Bにて比較して出力VoutBを得る構成としている。
【0020】
受光領域B−,A,B,A−は、連続する4つの受光領域で構成され、隣接する受光領域B−,Aがスケールの透光部32に同時に重なるとき、隣接する受光領域B,A−がスケール遮光部に重なるように構成される。すなわち、受光領域B−,A,B,A−によって構成される1つのブロックが前記スケールのピッチP内に収まるように配置される。この受光素子1は、前記ブロックをX方向に複数、この例では4つ配列した構成である。受光領域A、Bに付した番号がブロックの番号を示す。ブロック数は増減することができる。各ブロックの対応する受光領域は、それぞれが並列の関係になるように電気的に接続される。例えば、図2のAにて示す素子(フォトダイオード)は、受光領域A1〜A4を並列に接続した状態を代表して示している。図2のA−,B,B−にて示す素子についても同様である。
【0021】
図3は、スケール3と受光素子1を相対的に移動させた場合において、図2に示す回路の各部の信号波形を示している。同図(1)は、素子AとA−の出力信号を、同図(2)は、比較器COMP-Aの出力VoutAを、同図(3)は、素子BとB−の出力信号を、同図(4)は、比較器COMP-Bの出力VoutBを示している。このようにして、出力VoutAと出力VoutBの間に90度の位相差を持たせることができる。
【0022】
上述のように、X方向に配列した受光領域を、隣接する受光領域とY方向に重なりを持たせた状態で交互に千鳥状(ジグザグ状)に配置しているので、受光素子(受光部)のY方向の寸法を抑えつつ、隣接する受光領域間のクロストークを抑制することができる。
【0023】
【発明の効果】
以上のように本発明によれば、寸法が小さく、クロストークを抑制した受光素子、あるいはそれを備える光エンコーダを提供することができる。
【図面の簡単な説明】
【図1】本発明の実施形態を示す光エンコーダの概略構成図である。
【図2】同実施形態の回路図である。
【図3】同実施形態の回路図における信号波形図である。
【符号の説明】
1 受光素子
11 受光部
12 回路部
2 光源
3 スケール
32 透光部
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a light receiving element and an optical encoder including the same.
[0002]
[Prior art]
As described in Patent Document 1, the conventional optical encoder is provided with a translucent portion having a pitch P on the scale, and the light receiving elements are arranged in a row with light receiving areas at a pitch 1/4 times the pitch P of the translucent portion. Arranged.
[0003]
[Patent Document 1]
Japanese Patent Laid-Open No. 61-292016 [0004]
[Problems to be solved by the invention]
In the conventional optical encoder, the respective light receiving areas are adjacent to each other in the length direction, so that crosstalk that is affected by the adjacent light receiving areas is likely to occur. If the light receiving regions are arranged in two rows by arranging the light receiving regions that should be adjacent to each other, it is less likely to be affected by crosstalk. However, if the light receiving area is arranged in two stages in the vertical direction, the state of the output signal is likely to become unstable when an inclination occurs between the light transmitting part of the scale and the light receiving area due to an attachment error or the like. In addition, the length of the element increases in the length direction of the light receiving region, the size of the element increases, and the number of elements that can be taken from one wafer decreases.
[0005]
Accordingly, it is an object of the present invention to prevent an increase in element shape and to suppress the occurrence of crosstalk.
[0007]
[Means for Solving the Problems]
Light encoder of the present invention as described in claim 1, scale transparent portion are arranged at a pitch P is the optical encoder disposed between the light receiving element and the light source, the light receiving element of the same shape the A first light receiving region array in which one light receiving region is arranged in a row in the X direction at a pitch P / 2, and a second light receiving region row in which second light receiving regions having the same shape are arranged in a row in the X direction at a pitch P / 2. The second light receiving region is located between the adjacent first light receiving regions, and the first light receiving region and the second light receiving region partially overlap in the Y direction orthogonal to the X direction. Further, the first light receiving region row and the second light receiving region row are arranged with a step.
[0008]
According to an optical encoder of the present invention, as described in claim 2 , in the optical encoder in which the scale in which the light transmitting portions are arranged at the pitch P is disposed between the light source and the light receiving element, A first light receiving region array in which one light receiving region is arranged in a row in the X direction at a pitch P / 2, and a second light receiving region row in which second light receiving regions having the same shape are arranged in a row in the X direction at a pitch P / 2. The second light receiving region is located between the adjacent first light receiving regions, and the first light receiving region and the second light receiving region partially overlap in the Y direction orthogonal to the X direction. And the output of the adjacent first light receiving region is supplied to a first comparator, and the output of the adjacent second light receiving region is supplied to a second comparator.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a schematic configuration of an optical encoder.
[0010]
This optical encoder is configured by arranging a scale 3 between a light receiving element 1 and a light source 2. The light source 2 uses a light emitting diode, but other light sources can also be used. The light of the light source 2 can be configured to irradiate the scale 3 after being aligned with parallel light by optical means such as the collimating lens 21.
[0011]
The scale 3 has a plurality of light transmitting portions 32 arranged on a base material 31 at a pitch P (for example, 170 μm). The base material 31 is constituted by a light-shielding plate such as a metal plate, and a hole as the light transmitting portion 32 may be formed therein, or may be constituted by a transparent plate such as glass or plastic. A light-shielding film may be patterned. The width of the translucent part 32 is set to, for example, 85 μm, which is substantially half the pitch P. The length of the translucent part 32 is set to 2000 μm, for example, which is sufficiently longer than the pitch P. The light-shielding part located between the adjacent translucent parts 32 is set in the same shape as the translucent part 32. The scale 3 has a long and narrow plate shape that reciprocates in the X direction. However, the scale 3 may be formed of a circular plate in which the light transmitting portion rotates along the X direction.
[0012]
The light receiving element 1 includes a light receiving unit 11 having a plurality of light receiving regions A and B aligned. The light receiving element 1 is configured by integrating a light receiving unit 11 and a circuit unit 12. The light receiving unit 11 arranges the light receiving regions A and B having the same shape in one direction (X direction), and alternately projects the light receiving regions A and B in the Y direction orthogonal to the X direction, thereby the light receiving region. A and B are arranged in a zigzag shape. The protruding length L1 is set to be shorter than the length L in the Y direction of the light receiving areas A and B.
[0013]
The rows of the first light receiving regions A located at the first stage of the light receiving unit 11 are arranged at a pitch (P / 2) that is half the pitch P. The rows of the second light receiving regions B located in the second stage of the light receiving unit 11 are arranged at a pitch (P / 2) that is half the pitch P. The second light receiving region B is located between the adjacent first light receiving regions A. The first light receiving region A and the second light receiving region B partially overlap in the Y direction, and the first light receiving region row and the second light receiving region row are arranged with a step (length L1).
[0014]
The widths of the first and second light receiving regions A and B are set to, for example, 30 μm, which is slightly shorter than the length (P / 4) of ¼ of the pitch P. The length L of the first and second light receiving areas A and B is set to 260 μm, for example. Between the first and second light receiving areas A and B, an interval having a length obtained by subtracting the width of the first (second) light receiving area A (B) from P / 4, which is 12.5 μm in this example An interval is provided.
[0015]
The length L2 at which the first light receiving region A and the second light receiving region B partially overlap in the Y direction is set to be longer than half the length L of the first light receiving region A or the second light receiving region B. Yes. The longer the overlapping length L2, the shorter the length of the light receiving element 1 in the Y direction, so that the number of light receiving elements obtained from one wafer can be increased. However, as the length L2 is longer, a crosstalk phenomenon in which one received light signal affects the other is more likely to appear between adjacent light receiving regions. Therefore, if the length of the light receiving element 1 in the Y direction is not restricted, the overlapping length L2 is made shorter than the length L / 2 which is half the length of the first and second light receiving regions A and B. Can do. In this way, the crosstalk phenomenon can be further suppressed.
[0016]
The light receiving unit 11 covers the surface of the portion excluding the light receiving regions A and B with a light shielding film.
[0017]
In the light receiving element 1, the circuit unit 12 having the configuration shown in FIG. 2 is integrated on the semiconductor substrate so as to be adjacent to the light receiving unit 11, and the light receiving unit 11 and the circuit unit 12 are integrally formed.
[0018]
On the circuit unit 12, a Vcc terminal for power supply, a GND terminal for grounding, and VoutA and VoutB for output are provided.
[0019]
As shown in FIG. 2, the circuit unit 12 receives the light receiving area A, and the light receiving area A- (where-is an inverted output called a bar) to obtain an output that is in an inverted relationship with the output. The same is applied to the output, and the output VoutA is obtained by amplifying the outputs with an amplifier and comparing them with a comparator COMP-A. Similarly, each output of the light receiving region B and the light receiving region B- that obtains an output in an inverted relationship with the output thereof is amplified by an amplifier and then compared by a comparator COMP-B to obtain an output VoutB.
[0020]
The light receiving areas B-, A, B, A- are composed of four continuous light receiving areas. When the adjacent light receiving areas B-, A overlap the light transmitting part 32 of the scale at the same time, the adjacent light receiving areas B, A -Is configured to overlap the scale shading part. That is, one block constituted by the light receiving areas B-, A, B, A- is arranged so as to be within the pitch P of the scale. The light receiving element 1 has a configuration in which a plurality of the blocks are arranged in the X direction, four in this example. The numbers given to the light receiving areas A and B indicate the block numbers. The number of blocks can be increased or decreased. The corresponding light receiving areas of each block are electrically connected so that they are in a parallel relationship. For example, the element (photodiode) indicated by A in FIG. 2 represents a state in which the light receiving regions A1 to A4 are connected in parallel. The same applies to the elements indicated by A-, B, and B- in FIG.
[0021]
FIG. 3 shows signal waveforms at various parts of the circuit shown in FIG. 2 when the scale 3 and the light receiving element 1 are relatively moved. (1) shows the output signals of the elements A and A-, (2) shows the output VoutA of the comparator COMP-A, and (3) shows the output signals of the elements B and B-. FIG. 4 (4) shows the output VoutB of the comparator COMP-B. In this manner, a phase difference of 90 degrees can be provided between the output VoutA and the output VoutB.
[0022]
As described above, the light receiving areas arranged in the X direction are alternately arranged in a zigzag shape with the adjacent light receiving areas overlapped in the Y direction, so that the light receiving elements (light receiving portions) The crosstalk between adjacent light receiving regions can be suppressed while suppressing the dimension in the Y direction.
[0023]
【The invention's effect】
As described above, according to the present invention, it is possible to provide a light receiving element having a small size and suppressing crosstalk, or an optical encoder including the same.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram of an optical encoder showing an embodiment of the present invention.
FIG. 2 is a circuit diagram of the embodiment.
FIG. 3 is a signal waveform diagram in the circuit diagram of the same embodiment;
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Light receiving element 11 Light receiving part 12 Circuit part 2 Light source 3 Scale 32 Translucent part

Claims (2)

透光部がピッチPで配列されたスケールが光源と受光素子の間に配置された光エンコーダにおいて、前記受光素子は、同一形状の第1受光領域をX方向に一列にピッチP/2で配列した第1の受光領域列と、同一形状の第2受光領域をX方向にピッチP/2で一列に配列した第2の受光領域列とを備え、隣接する前記第1受光領域の間に前記第2受光領域が位置するとともに、前記X方向と直交するY方向において前記第1受光領域と前記第2受光領域が部分的に重なるように第1の受光領域列と第2の受光領域列とを段差をもって配置したことを特徴とする光エンコーダ。  In an optical encoder in which a scale having light transmitting portions arranged at a pitch P is arranged between a light source and a light receiving element, the light receiving element arranges first light receiving regions having the same shape in a line in the X direction at a pitch P / 2. And a second light receiving region row in which second light receiving regions having the same shape are arranged in a line at a pitch P / 2 in the X direction, and the first light receiving region row between the adjacent first light receiving regions. The first light receiving region row and the second light receiving region row are positioned so that the first light receiving region and the second light receiving region partially overlap in the Y direction orthogonal to the X direction. An optical encoder characterized in that the step is arranged with a step. 透光部がピッチPで配列されたスケールが光源と受光素子の間に配置された光エンコーダにおいて、前記受光素子は、同一形状の第1受光領域をX方向に一列にピッチP/2で配列した第1の受光領域列と、同一形状の第2受光領域をX方向にピッチP/2で一列に配列した第2の受光領域列とを備え、隣接する前記第1受光領域の間に前記第2受光領域が位置するとともに、前記X方向と直交するY方向において前記第1受光領域と前記第2受光領域が部分的に重なるように配置され、隣接する前記第1受光領域の出力が第1の比較器に与えられ、隣接する前記第2受光領域の出力が第2の比較器に与えられることを特徴とする光エンコーダ。  In an optical encoder in which a scale having light transmitting portions arranged at a pitch P is arranged between a light source and a light receiving element, the light receiving element arranges first light receiving regions having the same shape in a line in the X direction at a pitch P / 2. And a second light receiving region row in which second light receiving regions having the same shape are arranged in a line at a pitch P / 2 in the X direction, and the first light receiving region row between the adjacent first light receiving regions. The second light receiving area is located, and the first light receiving area and the second light receiving area are partially overlapped with each other in the Y direction orthogonal to the X direction. An optical encoder provided to one comparator, and an output of the adjacent second light receiving region is provided to a second comparator.
JP2003112937A 2003-04-17 2003-04-17 Optical encoder Expired - Fee Related JP4307895B2 (en)

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KR101240792B1 (en) 2005-10-13 2013-03-07 하마마츠 포토닉스 가부시키가이샤 Encoder and light receiving device for encoder
JP4890190B2 (en) 2006-10-10 2012-03-07 浜松ホトニクス株式会社 Encoder
JP2017058239A (en) * 2015-09-16 2017-03-23 ハイデンハイン株式会社 Optical rotary encoder

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