JP4305700B2 - Molding material for sealing Rotary powder compression molding machine for tablet production - Google Patents

Molding material for sealing Rotary powder compression molding machine for tablet production Download PDF

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Publication number
JP4305700B2
JP4305700B2 JP31535999A JP31535999A JP4305700B2 JP 4305700 B2 JP4305700 B2 JP 4305700B2 JP 31535999 A JP31535999 A JP 31535999A JP 31535999 A JP31535999 A JP 31535999A JP 4305700 B2 JP4305700 B2 JP 4305700B2
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Japan
Prior art keywords
sealing
molding material
mold
molding machine
compression molding
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JP31535999A
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JP2001135656A (en
Inventor
節 稲川
和好 角田
洋三 佐藤
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Showa Denko Materials Co Ltd
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Hitachi Chemical Co Ltd
Showa Denko Materials Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B30PRESSES
    • B30BPRESSES IN GENERAL
    • B30B15/00Details of, or accessories for, presses; Auxiliary measures in connection with pressing
    • B30B15/0023Drive arrangements for movable carriers, e.g. turntables
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B30PRESSES
    • B30BPRESSES IN GENERAL
    • B30B11/00Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses
    • B30B11/02Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses using a ram exerting pressure on the material in a moulding space
    • B30B11/08Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses using a ram exerting pressure on the material in a moulding space co-operating with moulds carried by a turntable
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B30PRESSES
    • B30BPRESSES IN GENERAL
    • B30B15/00Details of, or accessories for, presses; Auxiliary measures in connection with pressing
    • B30B15/02Dies; Inserts therefor; Mounting thereof; Moulds
    • B30B15/026Mounting of dies, platens or press rams
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B30PRESSES
    • B30BPRESSES IN GENERAL
    • B30B15/00Details of, or accessories for, presses; Auxiliary measures in connection with pressing
    • B30B15/02Dies; Inserts therefor; Mounting thereof; Moulds
    • B30B15/028Loading or unloading of dies, platens or press rams

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Description

【0001】
【発明の属する技術分野】
本発明は、部品交換が容易で耐磨耗性の回転式粉末圧縮成形機に関する。
【0002】
【従来の技術】
封止用成形材料タブレットを成形するための粉末圧縮成形機には、油圧式と回転式がある。油圧式はタブレットを油圧で成形するため、高密度品の製造には適しているが、生産能力に乏しい。一方、回転式は半導体パッケージ等の電子部品装置の高効率モールド方式であるマルチプランジャ方式に対応したタブレットを効率良く生産できることから、現在主流となっている。
粉末圧縮成形機においては、異品種の封止用成形材料タブレットの製造に用いる場合、異品種の混入を避けるために、品種切替え時に金型やレール等の部品交換及び成形機内の清掃が必要である。回転式粉末圧縮成形機では交換が必要な部品が多数あり、現在は複数の金型やレール等の部品を1個1個取り外し、内部の清掃を行い、その後別の部品を取りつけるという手順で部品交換を行っているが、全ての部品交換が終了するまでには多大な手間と時間を要する上、この内部清掃ではレール固定ベースの隙間に入り込んだ粉末を排除することが困難であり、異品種混入を完全には防ぐことができていない。レールと加圧ロール周辺の清掃作業を完全に実施するためには、全部品を分解する必要があるが、この分解作業を日常実施することは困難である。レールと加圧ロール周辺の清掃作業を長期間行わないと、磨耗によって回転式粉末圧縮成形機の性能が落ち、一定規格のタブレットの製造が困難になるという問題もあった。
【0003】
【発明が解決しようとする課題】
従来は、封止用成形材料タブレットの品種切替え時に、回転式粉末圧縮成形機の部品交換に多大な時間を要するため、生産性が低かった。また、異品種が混入した封止用成形材料タブレットは信頼性に問題があった。さらに、磨耗した回転式粉末圧縮成形機を使用して製造された規格ふぞろいのタブレットを用いて、電子部品装置の素子封止を行った場合、充填不足で成形困難になるという問題があった。本発明はかかる状況に鑑みなされたもので、部品交換が容易で異品種混入の可能性が少なく、耐磨耗性の回転式粉末圧縮成形機を提供しようとするものである。
【0004】
【課題を解決するための手段】
発明者らは上記の課題を解決するために鋭意検討を重ねた結果、少なくとも金型及びレールが一体脱着可能な回転式粉末圧縮成形機を用いて封止用成形材料タブレットを製造することにより上記の目的を達成しうることを見出し、本発明を完成するに至った。
【0005】
すなわち、本発明は、(1)金型、金型を摺動するレール及び回転盤を有し、少なくとも金型及びレールを一体として一度に脱着可能な構造とした回転式粉末圧縮成形機であって、前記金型及び前記レールが前記回転盤に取り付けられ、前記回転盤が立てシャフトを有し、前記立てシャフトが立てシャフト取り付け台の上下面に設けられている油圧クランプユニットで固定され、前記油圧クランプユニットが前記回転盤の縦方向の芯ズレ防止のための固定キーを有する封止用成形材料タブレット製造用回転式粉末圧縮成形機及び、(2)金型、レール、レール固定台、回転盤及び立てシャフトを一体として一度に脱着可能な構造とした、上記(1)記載の封止用成形材料タブレット製造用回転式粉末圧縮成形機に関する。
【0006】
【発明の実施の形態】
本発明における回転式粉末圧縮成形機は、少なくとも金型及びレールを一体として一度に脱着可能な構造とされれば、その他の部位についての制限はない。
以下に図面を用いて、本発明の実施の形態を説明する。本発明における回転式粉末圧縮成形機は、例えば、図1に示す態様をなし、上杵金型11、臼金型12、下杵金型13の3種の金型、これらの金型を摺動するレール14、レール固定台15、及びこれらを回転させる回転盤4を備えた立てシャフト16等を有し、少なくとも金型11〜13及びレール14を一体として一度に脱着可能な構造となっている。図2は、図1の回転式粉末式圧縮成形機の成形部を示したもので、この金型11〜13、レール14、レール固定台15、回転盤4及び立てシャフト16を含む成形部を一体として、回転式粉末式圧縮成形機から一度に脱着可能な構造とすることがより好ましい。上杵金型11、臼金型12、下杵金型13、レール14及びレール固定台15は、回転盤4に取り付けられている。回転盤4は立てシャフト16を有しており、立てシャフト取り付け台(上)10と立てシャフト取り付け台(下)17の上下面に設けられている油圧クランプユニット21で固定されている。油圧クランプユニット21は、回転盤4の縦方向の芯ズレ防止のための固定キー22を有している。
【0007】
金型11〜13及びレール14を取り外すと、加圧ロール固定台(上)1、加圧ロール固定台(下)7、加圧ロール(上)シャフト2及び加圧ロール(下)シャフト6の周辺及び隙間を容易に清掃することができる。さらに、レール固定台15、回転盤4及び立てシャフト16を取り外すと、この清掃はより容易となり好ましい。
取り外した回転盤4に取り付けられた上杵金型11、臼金型12、下杵金型13、レール14及びレール固定台15は別途、取り外して清掃し、再度回転盤4に取り付けて保管することが好ましい。
【0008】
本発明における回転式粉末圧縮成形機により封止用成形材料タブレットに成形される粉末状の封止用エポキシ樹脂成形材料としては、一般に封止用エポキシ成形材料として用いれられるもので特に制限はなく、エポキシ樹脂、硬化剤、硬化促進剤、無機充填剤等を含むものである。
【0009】
本発明の封止用エポキシ樹脂成形材料に用いられるエポキシ樹脂としては、封止用エポキシ樹脂成形材料に一般に使用されているもので特に制限はないが、例えば、フェノールノボラック型エポキシ樹脂、オルソクレゾールノボラック型エポキシ樹脂をはじめとするフェノール、クレゾール、キシレノール、レゾルシン、カテコール、ビスフェノールA、ビスフェノールF等のフェノール類及び/又はα−ナフトール、β−ナフトール、ジヒドロキシナフタレン等のナフトール類とホルムアルデヒド、アセトアルデヒド、プロピオンアルデヒド、ベンズアルデヒド、サリチルアルデヒド等のアルデヒド基を有する化合物とを酸性触媒下で縮合又は共縮合させて得られるノボラック樹脂をエポキシ化したもの、ビスフェノールA、ビスフェノールF、ビスフェノールS、アルキル置換又は非置換のビフェノール等のジグリシジルエーテル、スチルベン型ジグリシジルエーテル、フェノール・アラルキル樹脂、ナフトール・アラルキル樹脂をエポキシ化したもの、フェノール類とジシクロペンタジエンやテルペン類との付加物または重付加物をエポキシ化したもの、フタル酸、ダイマー酸等の多塩基酸とエピクロルヒドリンの反応により得られるグリシジルエステル型エポキシ樹脂、ジアミノジフェニルメタン、イソシアヌル酸等のポリアミンとエピクロルヒドリンの反応により得られるグリシジルアミン型エポキシ樹脂、トリメチロールプロパン型エポキシ樹脂、ナフタレン環を有するエポキシ樹脂、オレフィン結合を過酢酸等の過酸で酸化して得られる線状脂肪族エポキシ樹脂、及び脂環族エポキシ樹脂などが挙げられ、これらを単独で用いても2種以上を組み合わせて用いてもよい。
【0010】
本発明の封止用エポキシ樹脂成形材料に用いられる硬化剤としては、封止用エポキシ樹脂成形材料に一般に使用されているもので特に制限はないが、例えば、フェノール、クレゾール、レゾルシン、カテコール、ビスフェノールA、ビスフェノールF、フェニルフェノール、アミノフェノール等のフェノール類及び/又はα−ナフトール、β−ナフトール、ジヒドロキシナフタレン等のナフトール類とホルムアルデヒド等のアルデヒド基を有する化合物とを酸性触媒下で縮合又は共縮合させて得られる樹脂、フェノール類及び/又はナフトール類とジメトキシパラキシレンやビス(メトキシメチル)ビフェニルから合成されるフェノール・アラルキル樹脂、ナフトール・アラルキル樹脂などが挙げられ、これらを単独で用いても2種類以上を組み合わせて用いてもよい。
【0011】
エポキシ樹脂と硬化剤との当量比、すなわち、エポキシ樹脂中のエポキシ基数/硬化剤中の水酸基数の比は、特に制限はないが、それぞれの未反応分を少なく抑えるために0.5〜2の範囲に設定されることが好ましく、0.7〜1.3がより好ましい。耐リフロークラック性に優れる封止用成形材料を得るためには、この比を0.8〜1.2の範囲に設定することがさらに好ましい。
【0012】
本発明の封止用エポキシ樹脂成形材料に用いられる硬化促進剤としては、封止用エポキシ樹脂成形材料に一般に使用されているもので特に制限はないが、例えば、1,8−ジアザ−ビシクロ[5.4.0]ウンデセン−7、1,5−ジアザ−ビシクロ[4.3.0]ノネン−5、6−ジブチルアミノ−1,8−ジアザ−ビシクロ[5.4.0]ウンデセン−7、6−n−ヘキシル−1,8−ジアザビシクロ[5.4.0]ウンデセン−7等のシクロアミジン化合物及びこれらの化合物に無水マレイン酸、1,4−ベンゾキノン、2,5−トルキノン、1,4−ナフトキノン、2,3−ジメチルベンゾキノン、2,6−ジメチルベンゾキノン、2,3−ジメトキシ−5−メチル−1,4−ベンゾキノン、2,3−ジメトキシ−1,4−ベンゾキノン、フェニル−1,4−ベンゾキノン等のキノン化合物、ジアゾフェニルメタン、フェノール樹脂等のπ結合をもつ化合物を付加してなる分子内分極を有する化合物、ベンジルジメチルアミン、トリエタノールアミン、ジメチルアミノエタノール、トリス(ジメチルアミノメチル)フェノール等の3級アミン類及びこれらの誘導体、2−メチルイミダゾール、2−フェニルイミダゾール、2−フェニル−4−メチルイミダゾール等のイミダゾール類及びこれらの誘導体、トリブチルホスフィン、ジブチルフェニルホスフィン、ブチルジフェニルホスフィン、エチルジフェニルホスフィン、メチルジフェニルホスフィン、トリフェニルホスフィン、トリス(4−メチルフェニル)ホスフィン、トリス(4−メトキシフェニル)ホスフィン、トリス(2,6−ジメトキシフェニル)ホスフィン、ジフェニルホスフィン、フェニルホスフィン等の有機ホスフィン類及びこれらの有機ホスフィン類に無水マレイン酸、上記キノン化合物、ジアゾフェニルメタン、フェノール樹脂等のπ結合をもつ化合物を付加してなる分子内分極を有するリン化合物、テトラフェニルホスホニウムテトラフェニルボレート、トリフェニルホスフィンテトラフェニルボレート、2−エチル−4−メチルイミダゾールテトラフェニルボレート、N−メチルモルホリンテトラフェニルボレート等のテトラフェニルボロン塩及びこれらの誘導体などが挙げられ、これらを単独で用いても2種以上を組み合わせて用いてもよい。
硬化促進剤の配合量は、硬化促進効果が達成される量であれば特に限定されるものではないが、封止用エポキシ樹脂成形材料全体に対して0.005〜2重量%が好ましく、より好ましくは0.01〜1重量%、さらに好ましくは0.05〜0.5重量%である。0.005重量%未満では短時間での硬化性に劣る傾向があり、2重量%を超えると硬化速度が速すぎて良好な成形品を得ることが困難になる傾向がある。
【0013】
本発明の封止用エポキシ樹脂成形材料に用いられる無機充填剤としては、封止用エポキシ樹脂成形材料に一般に使用されているもので特に制限はないが、例えば、溶融シリカ、結晶シリカ、アルミナ、ジルコン、珪酸カルシウム、炭酸カルシウム、チタン酸カリウム、炭化珪素、窒化珪素、窒化アルミ、窒化ホウ素、ベリリア、ジルコニア、ジルコン、フォステライト、ステアタイト、スピネル、ムライト、チタニア等の粉体、又はこれらを球形化したビーズ、ガラス繊維などが挙げられる。さらに、難燃効果のある無機充填剤としては水酸化アルミニウム、水酸化マグネシウム、硼酸亜鉛、モリブデン酸亜鉛等が挙げられる。これらの無機充填剤は単独で用いても2種類以上を組み合わせて用いてもよい。
無機充填剤の配合量は、難燃性の観点、耐リフロークラック性、成形性、吸湿性、線膨張係数の低減及び強度向上の観点から、封止用エポキシ樹脂成形材料全体に対して70重量%以上が好ましく、耐リフロークラック性及び流動性の観点からは80〜95重量%の範囲がより好ましく、88〜92重量%がさらに好ましい。
【0014】
本発明の封止用エポキシ樹脂成形材料には、必要に応じて従来公知の難燃剤を配合することができる。例えば、赤燐、リン酸エステル、メラミン、メラミン誘導体、トリアジン環を有する化合物、シアヌル酸誘導体、イソシアヌル酸誘導体等の窒素含有化合物、シクロホスファゼン等の燐/窒素含有化合物、酸化亜鉛、酸化鉄、酸化モリブデン、フェロセン等の金属化合物、酸化アンチモン、ブロム化樹脂などが挙げられ、これらを単独で用いても2種以上を組み合わせて用いてもよい。
【0015】
また、本発明の封止用エポキシ樹脂成形材料には、IC等の半導体素子の耐湿性、高温放置特性を向上させる観点から陰イオン交換体を配合することもできる。陰イオン交換体としては特に制限はなく、従来公知のものを用いることができるが、例えば、ハイドロタルサイト類や、マグネシウム、アルミニウム、チタン、ジルコニウム、ビスマスから選ばれる元素の含水酸化物等が挙げられ、これらを単独で又は2種類以上を組み合わせて用いることができる。
【0016】
さらに、本発明の封止用エポキシ樹脂成形材料には、その他の添加剤として、高級脂肪酸、高級脂肪酸金属塩、エステル系ワックス、ポリオレフィン系ワックス、ポリエチレン、酸化ポリエチレン等の離型剤、染料、カーボンブラック等の着色剤、エポキシシラン、アミノシラン、ウレイドシラン、ビニルシラン、アルキルシラン、有機チタネート、アルミニウムアルコレート等のカップリング剤、シリコーンオイルやシリコーンゴム粉末等の応力緩和剤などを必要に応じて配合することができる。
【0017】
以上のような各種配合成分を所定の配合量に秤量し、まず、ミキサー等によって十分混合した後、ミキシングロール、押出機、らいかい機などによって混練を行う一般的方法を用いて加熱混練することにより、本発明に用いられる粉末状の封止用エポキシ樹脂成形材料が調製できる。各種配合成分は、全て同時に添加しても良いが、添加順序を適宜設定することもできる。また、必要に応じて各種配合成分を予備混練することもできる。例えば、エポキシ樹脂と硬化剤、硬化剤と硬化促進剤、エポキシ樹脂及び/又は硬化剤と離型剤、エポキシ樹脂及び/又は硬化剤と応力緩和剤、充填剤とカップリング剤等を室温で又は加熱下に予備混練して用いてもよい。
調製された封止用エポキシ樹脂成形材料を、必要に応じて冷却粉砕し、本発明における回転式粉末圧縮成形機により、封止条件に合うような寸法及び重量でタブレット化することによって、本発明の封止用成形材料タブレットが製造される。タブレットの成形条件としては、用途に合わせたサイズに成形できれば特に制限はないが、回転式粉末圧縮成形機の回転数を1〜50rpmに設定することが好ましく、3〜30rpmがより好ましく、5〜20rpmがさらに好ましい。
【0018】
本発明で得られる封止用成形材料タブレットにより素子を封止して得られる電子部品装置としては、リードフレーム、配線済みのテープキャリア、配線板、ガラス、シリコンウエハ等の支持部材に、半導体チップ、トランジスタ、ダイオード、サイリスタ等の能動素子、コンデンサ、抵抗体、抵抗アレイ、コイル、スイッチ等の受動素子などの素子を搭載し、必要な部分を本発明の封止用成形材料タブレットで封止して得られる電子部品装置などが挙げられる。このような電子部品装置としては、例えば、リードフレーム上に半導体素子を固定し、ボンディングパッド等の素子の端子部とリード部をワイヤボンディングやバンプで接続した後、本発明の封止用成形材料を用いてトランスファ成形などにより封止してなる、DIP(Dual Inline Package)、PLCC(Plastic Leaded Chip Carrier)、QFP(Quad Flat Package)、SOP(Small Outline Package)、SOJ(Small Outline J-lead package)、TSOP(Thin Small Outline Package)、TQFP(Thin Quad Flat Package)等の一般的な樹脂封止型IC、テープキャリアにバンプで接続した半導体チップを、本発明の封止用成形材料タブレットで封止したTCP(Tape Carrier Package)、配線板やガラス上に形成した配線に、ワイヤーボンディング、フリップチップボンディング、はんだ等で接続した半導体チップ、トランジスタ、ダイオード、サイリスタ等の能動素子及び/又はコンデンサ、抵抗体、コイル等の受動素子を、本発明の封止用成形材料タブレットで封止したCOB(Chip On Boad)モジュール、ハイブリッドIC、マルチチップモジュール、裏面に配線板接続用の端子を形成した有機基板の表面に素子を搭載し、バンプまたはワイヤボンディングにより素子と有機基板に形成された配線を接続した後、本発明の封止用成形材料タブレットで素子を封止したBGA(Ball Grid Array)、CSP(Chip Size Package)などが挙げられる。また、プリント回路板にも本発明の封止用成形材料タブレットは有効に使用できる。
【0019】
本発明の封止用成形材料タブレットを用いて素子を封止する方法としては、低圧トランスファー成形法が最も一般的であるが、インジェクション成形法、圧縮成形法等を用いてもよい。
【0020】
【実施例】
次に実施例により本発明を説明するが、本発明の範囲はこれらの実施例に限定されるものではない。
【0021】
部品交換時間の測定
金型及びレールを一体として一度に脱着可能な構造となっていない点を除けば本発明における回転式粉末圧縮成形機と同様の構造である従来式の回転式粉末圧縮成形機を用いた場合、金型及びレールの脱着に要する時間は8時間/台であった。これに対して、図1に示した本発明の回転式粉末圧縮成形機を用いて、上杵金型11、臼金型12、下杵金型13及びレール14、レール固定台15、回転盤4及び立てシャフト16を一体として脱着するのに要する時間を測定したところ、1時間/台で、従来式の1/8に短縮できた。また、これらの金型11〜13及びレール14を取り外すことによって、従来清掃できなかった場所も清掃することができ、異品種混入の可能性を削減できた。
【0022】
封止用成形材料タブレットの製造
エポキシ樹脂としてクレゾールノボラック型エポキシエポキシ樹脂(住友化学工業株式会社製商品名ESCN195)85重量部、及び臭素化エポキシ樹脂(日本化薬株式会社製商品名BREN−S)15重量部、硬化剤としてフェノールノボラック樹脂(明和化成株式会社製商品名H−1)51重量部、硬化促進剤としてトリフェニルホスフィン2重量部、無機充填剤として平均粒径17.5μm、比表面積3.8m2/gの球状溶融シリカ680重量部、その他の添加剤としてカルナバワックス(クラリアント社製)1重量部、カーボンブラック(三菱化学株式会社製商品名MA−100)2重量部、三酸化アンチモン6重量部、γ−グリシドキシプロピルトリメトキシシラン(エポキシシランカップリング剤)2重量部をドライブレンドで予備混合した後、混練温度80℃、混練時間10分の条件でニ軸ロールで加熱混練を行い、冷却粉砕した。得られた粉砕物を、新品金型又は2,700時間稼動後の金型を取り付けた図1に示す回転式粉末圧縮成形機を用いて回転数10rpmで成形し、新品金型で100個、2,700時間稼動後の金型で100個、総計200個の実施例の封止用成形材料タブレットを製造した。タブレットサイズは直径13mmΦ、高さ15mmとした。同様にして新品金型又は2,700時間稼動後の金型を取り付けた従来式の回転式粉末圧縮成形機を用いて、新品金型で100個、2,700時間稼動後の金型で100個、総計200個の比較例の封止用成形材料タブレットを製造した。
製造した実施例、比較例の封止用成形材料タブレットのタブレット高さを測定して、工程能力指数(CPk:Process Capability index)で評価した。工程能力指数は次式により計算され、高い値ほど工程能力が良好と判断され、回転式粉末圧縮成形機の金型磨耗を評価する指標として用いられている。
CPk=(1−k)×(公差÷6σ)
ここで、σは標準偏差(本実地例ではタブレット高さを測定した時の標準偏差)を示す。公差は規格幅を示す値で、規格上限値(以下、SUと示す)と規格下限値(以下、SLと示す)の差により定義される。例えば、タブレット高さの規格が規定値±0.6(mm)の場合、SUは規定値+0.6で、SLは規定値−0.6であるので、公差は1.2となる。本実施例において、規定値は15(mm)である。kはかたより度を示す値で、{(SU+SL)/2−平均測定値}÷{(SU−SL)/2}で定義される。
新品金型を用いた場合のCPk値は、実施例、比較例とも同等の値を示した。2,700時間稼動後の金型を用いた場合のCPk値を新品金型を用いた場合のCPk値で除した値は、実施例で0.99、比較例で0.75であった。すなわち、従来式の回転式圧縮成形機では、2,700時間稼動後には金型磨耗によってタブレット工程能力が初期値の75%に低下したのに対して、本発明における回転式圧縮成形機では2,700時間稼動後も初期値とほぼ同等のタブレット工程能力を有しており、規格通りの封止用成形材料タブレットが製造できたことが示された。
【0023】
電子部品装置の製造
2,700時間稼動後の回転式圧縮成形機で製造した実施例、比較例の封止用成形材料タブレットを用いて、54ピンQFP(外寸20mm×14mm×2mm、リードフレーム材質42アロイ、半導体素子寸法8mm×10mm)を、175℃、7MPa、90秒の条件でトランスファ成形したところ、比較例では充填不良で成形できなかった。これに対して実施例では良好な成形性を有していた。
【0024】
【発明の効果】
本発明になる封止用成形材料タブレットは、実施例で示したように部品交換が容易な回転式粉末圧縮成形機を用いて製造しているので生産性が高く、異品種混入の可能性、規格ふぞろいも少なく、この封止用成形材料タブレットを用いて素子を封止すれば、成形性、信頼性に優れる電子部品装置を得ることができるので、その工業的価値は大である。
【図面の簡単な説明】
【図1】本発明における回転式粉末圧縮成形機の一実施例を示す概略図
【図2】図1の回転式粉末圧縮成形機の成形部を示す概略図
【符号の説明】
1:加圧ロール(上)固定台 2:加圧ロール(上)シャフト
3:加圧ロール(上) 4:回転盤
5:加圧ロール(下) 6:加圧ロール(下)シャフト
7:加圧ロール(下)固定台 8:Vプーリ
9:Vベルト 10:立てシャフト取り付け台(上)
11:上杵金型 12:臼金型
13:下杵金型 14:レール
15:レール固定台 16:立てシャフト
17:立てシャフト取り付け台(下) 18:ウォームホイル
19:主動モータ 20:モータプーリ
21:油圧クランプユニット 22:固定キー
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to easy part replacement wear resistance of the rotary powder compression molding machine.
[0002]
[Prior art]
There are two types of powder compression molding machines for molding a sealing molding material tablet: a hydraulic type and a rotary type. The hydraulic type is suitable for manufacturing high-density products because the tablet is molded hydraulically, but its production capacity is poor. On the other hand, the rotary type is currently the mainstream because it can efficiently produce tablets corresponding to the multi-plunger method, which is a high-efficiency molding method for electronic component devices such as semiconductor packages.
In powder compression molding machines, when used to manufacture tablets of different types of sealing materials, it is necessary to replace parts such as molds and rails and clean the inside of the molding machine at the time of product type switching in order to avoid mixing different types. is there. There are many parts that need to be replaced in a rotary powder compression molding machine. Currently, parts such as multiple dies and rails are removed one by one, the inside is cleaned, and then another part is attached. However, it takes a lot of time and effort to complete the replacement of all parts, and this internal cleaning makes it difficult to eliminate the powder that has entered the gaps in the rail fixing base. Mixing is not completely prevented. In order to perform the cleaning operation around the rail and the pressure roll completely, it is necessary to disassemble all parts, but it is difficult to perform this disassembly operation on a daily basis. If the cleaning work around the rail and the pressure roll is not performed for a long time, there is a problem that the performance of the rotary powder compression molding machine deteriorates due to wear, and it becomes difficult to manufacture a tablet of a certain standard.
[0003]
[Problems to be solved by the invention]
Conventionally, when switching the type of the molding material tablet for sealing, it takes a lot of time to replace parts of the rotary powder compression molding machine, so the productivity is low. Moreover, the sealing molding material tablet mixed with different varieties has a problem in reliability. Furthermore, when the device of the electronic component device is sealed by using a standard-sized tablet manufactured using a worn rotary powder compression molding machine, there is a problem that molding becomes difficult due to insufficient filling. The present invention has been made in view of such circumstances, less possibility of easy replacement of parts different varieties mixed, is intended to provide the abrasion resistance of rotary powder compression molding machine.
[0004]
[Means for Solving the Problems]
As a result of intensive studies in order to solve the above-mentioned problems, the inventors have manufactured a sealing molding material tablet by using a rotary powder compression molding machine in which at least a mold and a rail can be integrally detached. The inventors have found that the object can be achieved, and have completed the present invention.
[0005]
That is, the present invention is a (1) mold, have a rail and turntable slides molds, rotary powder compression molding machine to which a detachable structure in one portion as integrally at least the mold and rails The mold and the rail are attached to the turntable, the turntable has a vertical shaft, and the vertical shaft is fixed by a hydraulic clamp unit provided on the upper and lower surfaces of the vertical shaft mounting base, A rotary powder compression molding machine for manufacturing a molding material tablet for sealing, in which the hydraulic clamp unit has a fixed key for preventing vertical misalignment of the rotary disk, and (2) mold, rail, rail fixing base, rotation The present invention relates to a rotary powder compression molding machine for producing a sealing molding material tablet according to the above (1), wherein a board and a standing shaft are integrated into a structure that can be detached at once .
[0006]
DETAILED DESCRIPTION OF THE INVENTION
The rotary powder compression molding machine in the present invention is not limited with respect to other parts as long as it has a structure in which at least the mold and the rail are integrated and detachable at a time.
Embodiments of the present invention will be described below with reference to the drawings. The rotary powder compression molding machine according to the present invention has, for example, the form shown in FIG. 1 and is composed of three types of molds, an upper mold 11, a mortar mold 12, and a lower mold 13, and these molds are slid. It has a structure such that it has a rail 14 that moves, a rail fixing base 15, a standing shaft 16 that includes a turntable 4 that rotates these, and the like, and at least the molds 11 to 13 and the rail 14 can be attached and detached at once. Yes. FIG. 2 shows a molding part of the rotary powder compression molding machine of FIG. 1, and the molding part including the molds 11 to 13, the rail 14, the rail fixing base 15, the turntable 4 and the standing shaft 16 is shown. It is more preferable that the structure is detachable from the rotary powder compression molding machine at once. The upper metal mold 11, the mortar metal mold 12, the lower metal mold 13, the rail 14, and the rail fixing base 15 are attached to the turntable 4. The turntable 4 has a vertical shaft 16 and is fixed by hydraulic clamp units 21 provided on the upper and lower surfaces of the vertical shaft mounting base (upper) 10 and the vertical shaft mounting base (lower) 17. The hydraulic clamp unit 21 has a fixed key 22 for preventing the vertical misalignment of the turntable 4.
[0007]
When the dies 11 to 13 and the rail 14 are removed, the pressure roll fixing base (upper) 1, the pressure roll fixing base (lower) 7, the pressure roll (upper) shaft 2 and the pressure roll (lower) shaft 6 The periphery and the gap can be easily cleaned. Further, it is preferable to remove the rail fixing base 15, the turntable 4 and the standing shaft 16 because this cleaning becomes easier.
The upper mold 11, mortar mold 12, lower mold 13, rail 14, and rail fixing base 15 attached to the removed rotating plate 4 are separately removed and cleaned, and then attached to the rotating plate 4 and stored again. It is preferable.
[0008]
As a powdery epoxy resin molding material for sealing molded into a molding material tablet for sealing by a rotary powder compression molding machine in the present invention, there is no particular limitation as it is generally used as an epoxy molding material for sealing, An epoxy resin, a curing agent, a curing accelerator, an inorganic filler, and the like are included.
[0009]
The epoxy resin used in the sealing epoxy resin molding material of the present invention is not particularly limited as it is generally used for the sealing epoxy resin molding material. For example, phenol novolac type epoxy resin, orthocresol novolak Phenols such as epoxy resin, cresol, xylenol, resorcin, catechol, bisphenol A, bisphenol F and / or naphthols such as α-naphthol, β-naphthol, dihydroxynaphthalene and formaldehyde, acetaldehyde, propionaldehyde Epoxidized novolak resin obtained by condensation or cocondensation with a compound having an aldehyde group such as benzaldehyde and salicylaldehyde under an acidic catalyst, bisphenol A, bisphenol F, bisphenol S, diglycidyl ether such as alkyl-substituted or unsubstituted biphenol, stilbene-type diglycidyl ether, epoxidized phenol / aralkyl resin, naphthol / aralkyl resin, phenols with dicyclopentadiene and terpenes Epoxidized adduct or polyaddition product, glycidyl ester type epoxy resin obtained by reaction of polybasic acid such as phthalic acid and dimer acid and epichlorohydrin, obtained by reaction of polyamine such as diaminodiphenylmethane, isocyanuric acid and epichlorohydrin A glycidylamine type epoxy resin, a trimethylolpropane type epoxy resin, an epoxy resin having a naphthalene ring, a linear aliphatic epoxy resin obtained by oxidizing an olefin bond with a peracid such as peracetic acid, and Such as alicyclic epoxy resins. These may be used in combination of two or more even with these alone.
[0010]
The curing agent used in the epoxy resin molding material for sealing of the present invention is not particularly limited as it is generally used for epoxy resin molding materials for sealing. For example, phenol, cresol, resorcin, catechol, bisphenol Condensation or cocondensation of phenols such as A, bisphenol F, phenylphenol, aminophenol and / or naphthols such as α-naphthol, β-naphthol, dihydroxynaphthalene and compounds having an aldehyde group such as formaldehyde under an acidic catalyst And phenol / aralkyl resins and naphthol / aralkyl resins synthesized from phenols and / or naphthols and dimethoxyparaxylene or bis (methoxymethyl) biphenyl. More than types They may be used in combination.
[0011]
The equivalent ratio of the epoxy resin and the curing agent, that is, the ratio of the number of epoxy groups in the epoxy resin / the number of hydroxyl groups in the curing agent is not particularly limited, but is 0.5 to 2 in order to keep each unreacted component small. Is preferably set in the range of 0.7 to 1.3. In order to obtain a molding material for sealing excellent in reflow crack resistance, it is more preferable to set this ratio in the range of 0.8 to 1.2.
[0012]
The curing accelerator used in the epoxy resin molding material for sealing of the present invention is generally used in the epoxy resin molding material for sealing and is not particularly limited. For example, 1,8-diaza-bicyclo [ 5.4.0] Undecene-7, 1,5-diaza-bicyclo [4.3.0] nonene-5,6-dibutylamino-1,8-diaza-bicyclo [5.4.0] undecene-7 , 6-n-hexyl-1,8-diazabicyclo [5.4.0] undecene-7 and the like, and these compounds include maleic anhydride, 1,4-benzoquinone, 2,5-toluquinone, 1, 4-naphthoquinone, 2,3-dimethylbenzoquinone, 2,6-dimethylbenzoquinone, 2,3-dimethoxy-5-methyl-1,4-benzoquinone, 2,3-dimethoxy-1,4-benzoquino , Quinone compounds such as phenyl-1,4-benzoquinone, diazophenylmethane, compounds having intramolecular polarization formed by adding a compound having a π bond such as phenol resin, benzyldimethylamine, triethanolamine, dimethylaminoethanol , Tertiary amines such as tris (dimethylaminomethyl) phenol and derivatives thereof, imidazoles such as 2-methylimidazole, 2-phenylimidazole and 2-phenyl-4-methylimidazole and derivatives thereof, tributylphosphine, dibutyl Phenylphosphine, butyldiphenylphosphine, ethyldiphenylphosphine, methyldiphenylphosphine, triphenylphosphine, tris (4-methylphenyl) phosphine, tris (4-methoxyphenyl) phosphine, tri Organic phosphines such as (2,6-dimethoxyphenyl) phosphine, diphenylphosphine, and phenylphosphine, and compounds having a π bond such as maleic anhydride, quinone compounds, diazophenylmethane, and phenol resin are added to these organic phosphines. Phosphorus compounds having intramolecular polarization, tetraphenyl boron salts such as tetraphenylphosphonium tetraphenyl borate, triphenylphosphine tetraphenyl borate, 2-ethyl-4-methylimidazole tetraphenyl borate, N-methylmorpholine tetraphenyl borate And derivatives thereof. These may be used alone or in combination of two or more.
The blending amount of the curing accelerator is not particularly limited as long as the curing acceleration effect is achieved, but is preferably 0.005 to 2% by weight with respect to the whole epoxy resin molding material for sealing, Preferably it is 0.01 to 1 weight%, More preferably, it is 0.05 to 0.5 weight%. If it is less than 0.005% by weight, the curability in a short time tends to be inferior, and if it exceeds 2% by weight, the curing rate tends to be too high and it tends to be difficult to obtain a good molded product.
[0013]
The inorganic filler used for the epoxy resin molding material for sealing of the present invention is not particularly limited as it is generally used for the epoxy resin molding material for sealing. For example, fused silica, crystalline silica, alumina, Zircon, calcium silicate, calcium carbonate, potassium titanate, silicon carbide, silicon nitride, aluminum nitride, boron nitride, beryllia, zirconia, zircon, fosterite, steatite, spinel, mullite, titania powder, or spherical Bead, glass fiber and the like. Furthermore, examples of the inorganic filler having a flame retardant effect include aluminum hydroxide, magnesium hydroxide, zinc borate, and zinc molybdate. These inorganic fillers may be used alone or in combination of two or more.
The blending amount of the inorganic filler is 70% with respect to the whole epoxy resin molding material for sealing from the viewpoint of flame retardancy, reflow crack resistance, moldability, hygroscopicity, reduction of linear expansion coefficient and improvement of strength. % Or more is preferable, and from the viewpoint of reflow crack resistance and fluidity, the range of 80 to 95% by weight is more preferable, and 88 to 92% by weight is more preferable.
[0014]
A conventionally known flame retardant can be blended with the epoxy resin molding material for sealing of the present invention as necessary. For example, red phosphorus, phosphate ester, melamine, melamine derivatives, compounds having a triazine ring, nitrogen-containing compounds such as cyanuric acid derivatives and isocyanuric acid derivatives, phosphorus / nitrogen-containing compounds such as cyclophosphazene, zinc oxide, iron oxide, oxidation Examples thereof include metal compounds such as molybdenum and ferrocene, antimony oxide, and brominated resin. These may be used alone or in combination of two or more.
[0015]
Moreover, an anion exchanger can also be mix | blended with the epoxy resin molding material for sealing of this invention from a viewpoint of improving the moisture resistance of a semiconductor element, such as IC, and a high temperature leaving property. The anion exchanger is not particularly limited, and conventionally known anion exchangers can be used. Examples thereof include hydrotalcites and hydrous oxides of elements selected from magnesium, aluminum, titanium, zirconium, and bismuth. These can be used alone or in combination of two or more.
[0016]
Further, in the epoxy resin molding material for sealing of the present invention, as other additives, a release agent such as higher fatty acid, higher fatty acid metal salt, ester wax, polyolefin wax, polyethylene, polyethylene oxide, dye, carbon Add colorants such as black, coupling agents such as epoxy silane, amino silane, ureido silane, vinyl silane, alkyl silane, organic titanate, aluminum alcoholate, stress relaxation agents such as silicone oil and silicone rubber powder, etc. as required. be able to.
[0017]
Weigh the various ingredients as described above to a prescribed amount, first mix well with a mixer, etc., and then heat-knead using a general method of kneading with a mixing roll, an extruder, a raking machine, etc. Thereby, the powdery epoxy resin molding material for sealing used in the present invention can be prepared. The various blending components may be added all at the same time, but the order of addition can also be set as appropriate. Moreover, various compounding components can be pre-kneaded as required. For example, an epoxy resin and a curing agent, a curing agent and a curing accelerator, an epoxy resin and / or a curing agent and a release agent, an epoxy resin and / or a curing agent and a stress relaxation agent, a filler and a coupling agent at room temperature or It may be used by pre-kneading under heating.
The prepared epoxy resin molding material for sealing is cooled and pulverized as necessary, and tableted with a rotary powder compression molding machine according to the present invention in a size and weight suitable for the sealing conditions. The molding material tablet for sealing is manufactured. The tablet molding conditions are not particularly limited as long as the tablet can be molded to a size suitable for the application, but the rotational speed of the rotary powder compression molding machine is preferably set to 1-50 rpm, more preferably 3-30 rpm, 20 rpm is more preferable.
[0018]
As an electronic component device obtained by sealing an element with a sealing molding material tablet obtained in the present invention, a lead frame, a wired tape carrier, a wiring board, glass, a silicon wafer, a support member such as a semiconductor chip It is equipped with active elements such as transistors, diodes, thyristors, etc., passive elements such as capacitors, resistors, resistor arrays, coils, switches, etc., and the necessary parts are sealed with the sealing molding material tablet of the present invention. An electronic component device obtained in this way can be mentioned. As such an electronic component device, for example, a semiconductor element is fixed on a lead frame, and a terminal part and a lead part of an element such as a bonding pad are connected by wire bonding or bump, and then the sealing molding material of the present invention DIP (Dual Inline Package), PLCC (Plastic Leaded Chip Carrier), QFP (Quad Flat Package), SOP (Small Outline Package), SOJ (Small Outline J-lead package) ), TSOP (Thin Small Outline Package), TQFP (Thin Quad Flat Package), and other general resin-encapsulated ICs, and semiconductor chips connected to the tape carrier by bumps are sealed with the sealing molding material tablet of the present invention. Stopped TCP (Tape Carrier Package), wiring formed on wiring boards and glass, wire bonding, flip chip bonding, soldering, etc. COB (Chip On Boad) module in which active elements such as semiconductor chips, transistors, diodes, thyristors and / or passive elements such as capacitors, resistors, coils, etc. are sealed with the molding material tablet for sealing of the present invention, A device is mounted on the surface of a hybrid IC, a multi-chip module, an organic substrate on which a terminal for connecting a wiring board is formed on the back surface, and after connecting the device and the wiring formed on the organic substrate by bump or wire bonding, Examples thereof include BGA (Ball Grid Array) and CSP (Chip Size Package) in which the element is sealed with a molding material tablet for sealing. Also, the sealing molding material tablet of the present invention can be effectively used for a printed circuit board.
[0019]
As a method for sealing an element using the sealing molding material tablet of the present invention, a low-pressure transfer molding method is most common, but an injection molding method, a compression molding method, or the like may be used.
[0020]
【Example】
EXAMPLES Next, although an Example demonstrates this invention, the scope of the present invention is not limited to these Examples.
[0021]
Measurement of part replacement time Conventional rotary powder compression molding machine having the same structure as the rotary powder compression molding machine of the present invention except that the mold and rail are not integrated and removable at once. Was used, the time required for detaching the mold and rail was 8 hours / unit. On the other hand, using the rotary powder compression molding machine of the present invention shown in FIG. 1, the upper mold 11, the mortar mold 12, the lower mold 13 and the rail 14, the rail fixing base 15, the turntable As a result of measuring the time required to attach and detach 4 and the standing shaft 16 as one body, it was reduced to 1/8 of the conventional type at 1 hour / unit. Moreover, by removing these dies 11 to 13 and the rail 14, it was possible to clean a place that could not be cleaned in the past, and to reduce the possibility of mixing different varieties.
[0022]
Manufacture of molding material tablets for sealing 85 parts by weight of cresol novolac type epoxy epoxy resin (trade name ESCN195, manufactured by Sumitomo Chemical Co., Ltd.) and brominated epoxy resin (trade name BREN-S, manufactured by Nippon Kayaku Co., Ltd.) as epoxy resins 15 parts by weight, 51 parts by weight of a phenol novolac resin (trade name H-1 manufactured by Meiwa Kasei Co., Ltd.) as a curing agent, 2 parts by weight of triphenylphosphine as a curing accelerator, an average particle diameter of 17.5 μm as an inorganic filler, a specific surface area 3.8 parts by weight of spherical fused silica of 3.8 m 2 / g, 1 part by weight of carnauba wax (manufactured by Clariant) as an additive, 2 parts by weight of carbon black (trade name MA-100, manufactured by Mitsubishi Chemical Corporation), trioxide 6 parts by weight of antimony, γ-glycidoxypropyltrimethoxysilane (epoxysilane coupling) 2 parts by weight of pre-mixing agent) was premixed by dry blending, followed by heat kneading with a biaxial roll under conditions of a kneading temperature of 80 ° C. and a kneading time of 10 minutes, and cooling and pulverizing. The obtained pulverized product was molded at a rotational speed of 10 rpm using a rotary powder compression molding machine shown in FIG. 1 to which a new mold or a mold after operation for 2,700 hours was attached, and 100 new molds were used for 2,700 hours. 100 molds after operation, and a total of 200 molding molding material tablets for examples were produced. The tablet size was 13 mm in diameter and 15 mm in height. Similarly, using a conventional rotary powder compression molding machine fitted with a new mold or a mold after 2,700 hours of operation, 100 new molds, 100 after 2,700 hours of operation, a total of 200 The comparative molding material tablet of the comparative example was manufactured.
The tablet height of the molding material tablets for sealing of the produced Examples and Comparative Examples was measured and evaluated by a process capability index (CPk). The process capability index is calculated according to the following formula, and the higher the value, the better the process capability is judged. The process capability index is used as an index for evaluating mold wear of a rotary powder compression molding machine.
CPk = (1−k) × (tolerance ÷ 6σ)
Here, σ indicates a standard deviation (in this example, the standard deviation when the tablet height is measured). The tolerance is a value indicating a standard width, and is defined by a difference between a standard upper limit (hereinafter referred to as SU) and a standard lower limit (hereinafter referred to as SL). For example, when the tablet height standard is the specified value ± 0.6 (mm), SU is the specified value +0.6, and SL is the specified value −0.6, so the tolerance is 1.2. In this embodiment, the specified value is 15 (mm). k is a value indicating a degree, and is defined by {(SU + SL) / 2−average measured value} ÷ {(SU−SL) / 2}.
The CPk value when a new mold was used showed the same value in both the examples and comparative examples. The value obtained by dividing the CPk value when using a mold after operation for 2,700 hours by the CPk value when using a new mold was 0.99 in the example and 0.75 in the comparative example. That is, in the conventional rotary compression molding machine, the tablet process capacity decreased to 75% of the initial value due to mold wear after operating for 2,700 hours, whereas in the rotary compression molding machine of the present invention, it operated for 2,700 hours. Later, the tablet process capability was almost the same as the initial value, and it was shown that the molding material tablet for sealing according to the standard could be manufactured.
[0023]
Manufacture of electronic component equipment
Using the compression molding machine tablet of Examples and Comparative Examples manufactured with a rotary compression molding machine after operation for 2,700 hours, 54 pin QFP (external dimensions 20 mm x 14 mm x 2 mm, lead frame material 42 alloy, semiconductor element dimensions) 8 mm × 10 mm) was subjected to transfer molding under the conditions of 175 ° C., 7 MPa, 90 seconds. In the comparative example, molding could not be performed due to poor filling. On the other hand, the examples had good moldability.
[0024]
【The invention's effect】
The sealing molding material tablet according to the present invention is manufactured using a rotary powder compression molding machine in which parts can be easily exchanged as shown in the examples, so the productivity is high, and the possibility of mixing different varieties, There are few standards, and if an element is sealed using this molding material tablet for sealing, an electronic component device having excellent moldability and reliability can be obtained, and its industrial value is great.
[Brief description of the drawings]
FIG. 1 is a schematic view showing an embodiment of a rotary powder compression molding machine according to the present invention. FIG. 2 is a schematic view showing a molding part of the rotary powder compression molding machine shown in FIG.
1: Pressure roll (upper) fixed base 2: Pressure roll (upper) shaft 3: Pressure roll (upper) 4: Turntable 5: Pressure roll (lower) 6: Pressure roll (lower) shaft 7: Pressure roll (lower) fixing base 8: V pulley 9: V belt 10: Standing shaft mounting base (upper)
11: Upper metal mold 12: Mill metal mold 13: Lower metal mold 14: Rail 15: Rail fixing base 16: Vertical shaft 17: Vertical shaft mounting base (lower) 18: Worm wheel 19: Main motor 20: Motor pulley 21 : Hydraulic clamp unit 22: Fixed key

Claims (2)

金型、金型を摺動するレール及び回転盤を有し、少なくとも金型及びレールを一体として一度に脱着可能な構造とした回転式粉末圧縮成形機であって、前記金型及び前記レールが前記回転盤に取り付けられ、前記回転盤が立てシャフトを有し、前記立てシャフトが立てシャフト取り付け台の上下面に設けられている油圧クランプユニットで固定され、前記油圧クランプユニットが前記回転盤の縦方向の芯ズレ防止のための固定キーを有する封止用成形材料タブレット製造用回転式粉末圧縮成形機。Mold, have a rail and turntable slide mold, and at least the mold and the rotary powder compression molding machine was removable structure at once as a single rail, the mold and the rails It is attached to the turntable, the turntable has a vertical shaft, the vertical shaft is fixed by a hydraulic clamp unit provided on the upper and lower surfaces of the vertical shaft mounting base, and the hydraulic clamp unit is A rotary powder compression molding machine for producing a molding material tablet for sealing having a fixed key for preventing misalignment of the direction. 金型、レール、レール固定台、回転盤及び立てシャフトを一体として一度に脱着可能な構造とした、請求項1記載の封止用成形材料タブレット製造用回転式粉末圧縮成形機。The rotary powder compression molding machine for manufacturing a molding material for sealing according to claim 1, wherein the mold, rail, rail fixing base, turntable, and vertical shaft are integrated and can be detached at a time.
JP31535999A 1999-11-05 1999-11-05 Molding material for sealing Rotary powder compression molding machine for tablet production Expired - Fee Related JP4305700B2 (en)

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