JP4277471B2 - Tracked cart system - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a tracked cart system that travels a track on a goods transport cart by a non-contact power feeding method, and more particularly to a mounting structure of a position detection sensor for the tracked cart.
[0002]
[Prior art]
Conventionally, in a tracked carriage system comprising a track, a tracked carriage that conveys an article along the track, and a feeder holder that is arranged along the track and supplies power to the tracked truck without contact, A power supply holder for holding two parallel power supply lines is disposed along a running rail laid on the surface.
On the other hand, a tracked carriage is generated by a wheel traveling on a traveling rail, a power source for driving the wheel and for use in onboard communication, and a power supply line disposed along the traveling rail. A power receiving coil that receives the induced electromotive force in a non-contact manner and supplies power to the power supply unit is mounted.
In addition, the tracked carriage is equipped with a position detection sensor for running management. Based on this position detection information, the tracked carriage is stopped at a predetermined position, or an appropriate transport command is controlled from the current position. I was doing.
[0003]
[Problems to be solved by the invention]
As the position detection method, for example, a reflective sensor is disposed on the lower surface of the tracked carriage, and a detected member called a dock (in this case, a reflector) is reflected on the rail surface, floor surface, or feeder line holder. The method of arrange | positioning so that a type | mold sensor may be opposed is employ | adopted.
However, in this method, when the tracked cart is vibrated during running due to unevenness such as a floor joint, the distance between the reflective sensor and the reflecting plate fluctuates every time the tracked cart reaches the position of the reflecting plate. And not constant. As a result, the timing at which the sensor is activated is not constant, and it is difficult to manage traveling such as stopping at a predetermined position with high accuracy.
Further, when a traveling rail is laid on the floor in a clean room and a tracked carriage is used, a spacer or the like may be appropriately interposed between the rail and the floor in order to adjust the horizontal level of the traveling rail.
However, when a tracked carriage reaches this part, the rail sinks and curves due to the vehicle weight. This is because the clean room floor is usually a grating floor, and the floor itself is used as an exhaust path, so that it is desirable to reduce the reinforcing material as much as possible from the viewpoint of securing the exhaust area.
As a result, the distance between the detected member (reflecting plate) arranged on the rail surface, floor surface, or feeder line holder and the reflective sensor varies, or the angle of the reflective plate relative to the reflective sensor changes. The timing at which the sensor is activated may not be constant.
In particular, in recent years, there are increasing opportunities to handle heavier transported objects such as large liquid crystal panels and large-diameter semiconductor wafers, and it is required to ensure position detection accuracy.
The present invention has been made paying attention to such problems existing in the prior art, and provides a tracked cart system capable of accurately detecting the position of a tracked cart.
[0004]
[Means for Solving the Problems]
The problems to be solved by the present invention are as described above. Next, means for solving the problems will be described.
[0005]
That is, in claim 1, the track includes a track, a tracked carriage that conveys the article along the track, and a power supply line holder that is disposed along the track and supplies electric power to the tracked cart without contact. A tracked bogie system,
The tracked carriage is equipped with a light-transmitting photoelectric sensor for position detection, and the feed line holder is provided with a detected part that blocks or transmits the optical path of the irradiation light of the light-transmitting photoelectric sensor ,
The feeder line holder includes a pair of parallel leg wall portions that respectively hold the feeder lines, and a shelf that protrudes inward from each other on the side surfaces of the pair of leg wall portions,
The detected portion includes a detected member that is detachably attached to a predetermined position of the feeder holder, with a shelf portion sandwiched between a detected base portion and a fixed plate that protrude laterally.
[0006]
According to a second aspect of the present invention, the feeder line holder includes the leg wall portion, a base portion connecting the leg wall portions, and an engaging portion for engaging and fixing the feeder line holder to the track. It is made by integral extrusion.
[0008]
In the invention according to claim 1, the tracked carriage receives power in a non-contact manner from a power supply line arranged along the track, and obtains its power to travel on the track. In addition, a light-transmitting photoelectric sensor is mounted on the tracked carriage, and a detected portion is provided in the power supply line holder on the track side so as to block or transmit the light emitted from the light-transmitting photoelectric sensor. Therefore, even if the tracked vehicle is vibrated or the floor surface or the track is curved due to the vehicle weight, the light transmission type photoelectric sensor is reliably operated at a predetermined position without deteriorating the position detection accuracy.
Further, the shelf provided on the side surface of the leg wall part functions as a reinforcing rib to reinforce the leg wall part, and this shelf part can be effectively used as the attachment part of the detected member. In addition, since the attachment portion of the detected member exists in the space between the pair of leg wall portions, it does not obstruct the traveling function of the tracked carriage, and it is not necessary to newly provide the attachment portion of the detected member around the track. .
[0009]
In the invention according to claim 2, in addition to the operation of the invention according to claim 1, the feeder holder including the detected portion is supplied at low cost and the engaging portion of the feeder holder is engaged with the track. Thus, the feeder holder can be easily disposed on the track.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
Next, embodiments of the invention will be described.
1 is a side view of a tracked carriage in the tracked carriage system of the present invention, FIG. 2 is an enlarged sectional view taken along line II-II in FIG. 1, FIG. 3 is an enlarged sectional view taken along line III-III in FIG. It is a perspective view of a detection member.
[0012]
First, the overall configuration of the tracked cart system of the present invention will be described. As shown in FIG. 1, a Rail Guided Vehicle (hereinafter referred to as RGV) 1 is a tracked carriage that travels along a track 2 laid on the floor. In a clean system, a semiconductor manufacturing apparatus, a semiconductor wafer, and the like A wafer cassette (not shown) is loaded and travels between the automatic warehouse for storing the wafers. The upper surface of the RGV 1 is equipped with a cradle 11 that can be moved up and down to load the wafer cassette. If necessary, the cassette and wafer can be transferred between a semiconductor manufacturing apparatus and a transfer station of an automatic warehouse. In some cases, a transfer device for mounting is mounted. The track 2 includes a rail portion 20 that is a traveling surface of the traveling wheel 12 and a concave portion 22 that is also a guide portion of the guide wheel and an engaging portion of the feeder holder 3, and is integrally extruded with an aluminum material. is there. The concave portion 22 includes a pair of vertical portions 21 and a horizontal portion that connects the vertical portions 21. The recess 22 is configured such that the feed line holder 3 is positioned in the left-right direction at the vertical portion 21, and the feed line holder 3 is bolted to the track 2 at the horizontal portion. The outer side or both outer sides are rolling surfaces of guide wheels that guide the carriage. The RGV 1 is supported by a plurality of traveling wheels 12 in order to smoothly travel on the rail portion 20, and a part or all of the traveling wheels 12 are drive wheels. In order to drive the drive wheels, a drive source (not shown) is mounted on the RGV 1, and power is supplied to the drive source by a non-contact power feeding method described below.
[0013]
Next, the non-contact power feeding method of the tracked cart system of the present invention will be described with reference to FIG. 1 and FIG.
Two tracks 2 are laid in parallel on the floor surface, and the running wheels 12 of the RGV 1 roll on the track 2. As shown in FIG. 2, a guide wheel (not shown) provided on the RGV 1 rolls on the vertical portion 21 of the track 2 to prevent the traveling wheel 12 from being removed. In addition, a power supply line holder 3 for supporting the two power supply lines 4, 4 parallel to the track 2 is attached to one track 2 over the entire track. The upper surface of the track 2 is formed with a recess 22 for receiving a base engaging portion 32 of the feed line holder 3 to be described later along the longitudinal direction (that is, the traveling direction of the RGV 1), and the feed line holder 3 is engaged with the recess 22.・ Fixed.
By adopting such a configuration, it is possible to simplify the conventionally complicated work of attaching the feeder holder 3 in parallel to the track 2 with a predetermined interval.
The feeder line holder 3 is formed in a substantially U shape in sectional view when viewed from the traveling direction of the RGV 1 and has a pair of parallel legs having ring-opening cylindrical holding portions 31a and 31a for press-fitting and receiving the feeder lines 4 and 4 at the upper end. And a base engaging portion 32 having both a function as a base for connecting the lower ends of the leg walls 31 and 31 and a function as an engaging portion for engaging and fixing the concave portion 22 of the track 2. Further, the leg wall portions 31 and 31 are made up of shelf portions 33 and 33 that project from the middle of the side surfaces (substantially middle portion in the vertical direction) to face each other inwardly. The feeder holder 3 is made by integral extrusion of synthetic resin.
[0014]
The two power supply lines 4 and 4 supported by the power supply line holder 3 have base ends connected to an AC power supply, and the front ends are singly connected to each other. Each of the two power supply lines 4 and 4 is a current forward path and a return path. When the power supply line 4 is energized, a magnetic field is generated around the power supply line 4. When the entire tracked truck system is large-scale, the track is divided into a plurality of areas, and a power supply unit in which a power source and a power supply line are combined is arranged for each area.
[0015]
Two power receiving coils 5 and 5 are provided at the front and back of the RGV 1. The power receiving coil 5 includes a core 51 and a pickup coil unit 52. The core 51 is made of a magnetic material, and includes a core base 51a, a central protrusion 51b and side protrusions 51c and 51c protruding downward from the core base 51a. Has the shape of a mold. The pick-up coil unit 52 is formed by winding a conductive wire around a central projecting piece 51b, and the conductive wire is connected to a driving source (such as a motor) for driving the RGV1. Further, the two feeders 4 and 4 are located in the voids 53 and 53 sandwiched between the central projection 51b and the side projections 51c and 51c, and the feeders 4 and 4 and the pickup coil unit 52 are not in contact with each other. In this way, the positional relationship between the power receiving coil 5 and the feeder line 4 is determined.
With this configuration, when a high frequency constant current is applied to the feeder lines 4 and 4, a magnetic field is generated around the feeder lines 4 and 4, and an induced electromotive force is generated in the pickup coil section 52 in the magnetic field. Occurs. The induced electromotive force is converted into a constant voltage and supplied to the driving source, and is used for driving the traveling wheels 12 (driving wheels) and on-board communication power. Therefore, while the high-frequency constant current is being supplied to the feeder lines 4 and 4, power is supplied to the RGV 1 in a non-contact manner regardless of whether it is running or stopped.
Further, the non-contact power feeding method prevents dust from being generated due to wear of the power feeding unit and the power receiving unit, and is particularly useful when used in a clean system.
[0016]
Next, the configuration of the position detection sensor, which is the main part of the present invention, will be described with reference to FIGS.
A sensor support portion 60 is suspended between the two power receiving coils 5 and 5 disposed on the lower surface of the RGV 1 in the front-rear direction. A light emitting portion support portion 60a and a light receiving portion support portion 60b project downward from the lower end of the sensor support portion 60, and the lower portion of the sensor support portion 60 has a cross-sectional portal shape when viewed from the traveling direction of the RGV1. Have. The light transmission type photoelectric sensor 6 includes a light emitting part 61 and a light receiving part 62. The light emitting part 61 is attached to the light emitting part support part 60a, while the light receiving part 62 is attached to the light receiving part support part 60b. The light transmission type photoelectric sensor 6 is configured to constantly irradiate light from the light emitting unit 61 and to receive light by the light receiving unit 62 disposed at the opposite position, and the irradiated light from the light emitting unit 61 is blocked by some obstacle. When it is operated, it can be turned on or off, and is converted into an electric signal. The sensor support portion 60 and the light transmission type photoelectric sensor 6 are configured so as to be positioned between the pair of leg wall portions 31 and 31 and not to come into contact with the surroundings (including the detected member 7 described later).
On the other hand, the member 7 to be detected is attached so as to straddle the shelves 33 and 33 at a transfer station position such as a semiconductor manufacturing apparatus or an automatic warehouse, or a stand-by position of a carriage. As shown in FIG. 4, the detected member 7 includes a detected base portion 41, a blocking plate 42, a fixing plate 43, and fixing screws 44 and 44. The to-be-detected base 41 has a convex shape in sectional view when viewed from the running direction of the RGV 1, and the left and right engaging portions 41 a and 41 a are configured to abut on the side surfaces and the lower surface of the shelf portions 33 and 33 of the feeder holder 3. Yes. The blocking plate 42 is erected on the detected base 41 and blocks the irradiation light of the light transmission type photoelectric sensor 6. The fixing plate 43 is formed with a hole 43a through which the blocking plate 42 penetrates, and the left and right parts of the lower surface of the fixing plate 43 are in contact with the upper surfaces of the shelf portions 33 and 33 of the feeder holder 3. The fixing screws 44 and 44 pass through the fixing plate 43 and are screwed to the detected base 41. By tightening the fixing screws 44 and 44, the shelf portions 33 and 33 are engaged with the lower surface of the fixing plate 43 and the engaging portions 41a and 41a. The member to be detected 7 is detachably fixed to a predetermined position of the feeder holder 3.
Thus, since the member 7 to be detected of the present embodiment is detachably fixed between the shelves 33 and 33 formed continuously along the longitudinal direction, the transfer station can be changed by changing the layout or the like. Even if it moves, it can be easily handled by loosening the screws as fixing means and moving the member 7 to be detected along the shelves 33 and 33. The shape of the detected member 7 is such that when the sensor support 60 and the light transmission type photoelectric sensor 6 reach the upper part of the detection member 7, the sensor support 60 and the light transmission type photoelectric sensor 6 are not in contact with each other. It is comprised so that the irradiation light from the light emission part 61 can be interrupted | blocked.
[0017]
With this configuration, when the RGV 1 travels along the track 2 and the irradiation light of the light transmission type photoelectric sensor 6 is blocked by the detected member 7, the light transmission type photoelectric sensor 6 operates to generate an electric signal. The RGV 1 is transmitted and stopped based on the electrical signal, or is used for RGV travel management control of the entire system as position information about each RGV 1 operating in the tracked cart system.
Further, even if some vibration is generated during the running of the RGV 1 or the floor surface or track is slightly curved due to the vehicle weight, the blocking plate 42 of the detected member 7 has a plate shape, and light is reliably transmitted in the surface area. Since the irradiation light of the transmissive photoelectric sensor 6 can be blocked, the RGV 1 can accurately stop at a predetermined position or transmit traveling position information.
[0018]
In the present embodiment, the positional relationship is such that the power receiving coil 5 is disposed on the feeder holder 3. However, the positional relationship is the same even if the power receiving coil 5 is disposed upside down or laterally. Is not limited. Further, the shape of the track 2 and the shape of the feeder holder 3 are not limited to the present embodiment, and various shapes can be employed. Also, the method of fixing the member 7 to be detected to the feeder line holder 3 is not limited and various methods are conceivable as long as the travel of the RGV 1 is not hindered.
Further, the fixed positions of the sensor support 60 and the light transmission type photoelectric sensor 6 are not limited between the two power receiving coils 5, 5. For example, a guide wheel (not shown) that is in rolling contact with the vertical portion 21 of the track 2. It is only necessary that the member 7 to be detected can be reliably detected, for example, by attaching it to a bracket (not shown) for attaching to the carriage. In the present embodiment, the light transmission type photoelectric sensor 6 detects the irradiation light by being blocked by the detected member 7 provided between the shelves 33, 33. A pair of light transmission type photoelectric sensors are arranged so as to be outside of 3, and holes are respectively formed in the leg wall portions 31 and 31 of the feeder line holder 3 at positions corresponding to the transfer station so that the irradiation light penetrates. However, the configuration may be such that the irradiation light that has been blocked by the leg wall portions 31 and 31 is detected by passing through the hole.
[0019]
【The invention's effect】
Since the present invention is configured as described above, the following effects can be obtained.
[0020]
That is, as shown in claim 1, a track, a tracked carriage that conveys an article along the track, and a feeder holder that is arranged along the track and supplies power to the tracked vehicle without contact. The tracked carriage system is equipped with a light transmission type photoelectric sensor for position detection on the tracked carriage, and the detected portion that blocks or transmits the light path of the irradiation light of the light transmission type photoelectric sensor to the feeder holder The power supply line holder includes a pair of parallel leg wall portions that respectively hold the power supply lines, and a shelf that projects from the side surfaces of the pair of leg wall portions so as to face each other inwardly. The detected portion is configured by a detected member that is detachably attached to a predetermined position of the feeder holder, with the shelf portion sandwiched between the detected base portion and the fixed plate protruding sideways. Some vibrations occur while the carriage is running, or Even if the floor surface or track is slightly curved by the above, the irradiated light of the light transmission type sensor is surely blocked by the detected part, or the irradiated light is transmitted and the sensor is activated to transmit an electric signal, Based on the electrical signal, the tracked truck is stopped at a predetermined position with high precision, or it is provided as position information for each tracked truck operating in the tracked truck system, and the track management of the tracked truck in the entire system is performed. Control can be performed with high accuracy.
Further, the shelf provided on the side surface of the leg wall part functions as a reinforcing rib to reinforce the leg wall part, and this shelf part can be effectively used as the attachment part of the detected member. In addition, since the attachment portion of the detected member exists in the space between the pair of leg wall portions, it does not obstruct the traveling function of the tracked carriage, and it is not necessary to newly provide the attachment portion of the detected member around the track. .
Further, since the member to be detected is detachably fixed between the shelves formed continuously along the longitudinal direction, the member to be detected is placed on the shelf even if the transfer station moves due to a layout change or the like. If it moves along the part, it can respond easily.
[0021]
According to a second aspect of the present invention, the feeder line holder includes the leg wall portion, a base portion connecting the leg wall portions, and an engaging portion for engaging and fixing the feeder line holder to the track. Since the feeder line holder including the detected part is supplied at a low cost, the feeder line holder can be easily arranged on the track by engaging the engaging part of the feeder line holder with the track. Can be set. For this reason, construction of a conveyance system becomes easy and a construction period can be shortened. In addition, when the rail is formed by integrally molding the rail portion and the concave portion, the carriage is guided through the guide wheel along the vertical portion of the concave portion. The coil and photoelectric sensor travel reliably on the feeder holder.
[Brief description of the drawings]
FIG. 1 is a side view of a tracked carriage in the tracked carriage system of the present invention.
2 is an enlarged sectional view taken along line II-II in FIG.
3 is an enlarged sectional view taken along line III-III in FIG.
FIG. 4 is a perspective view of a member to be detected.
[Explanation of symbols]
1 RGV (Railway truck)
2 Track 3 Feed line holder 6 Light transmission type photoelectric sensor 7 Detected member 31 Leg wall portion 32 Base engagement portion 33 Shelf portion

Claims (2)

A tracked carriage system comprising a track, a tracked carriage that conveys an article along the track, and a feeder holder that is arranged along the track and supplies power to the tracked truck in a non-contact manner,
The tracked carriage is equipped with a light-transmitting photoelectric sensor for position detection, and the feed line holder is provided with a detected part that blocks or transmits the optical path of the irradiation light of the light-transmitting photoelectric sensor ,
The feeder line holder includes a pair of parallel leg wall portions that respectively hold the feeder lines, and a shelf that protrudes inward from each other on the side surfaces of the pair of leg wall portions,
The detected portion is formed of a detected member that is detachably attached to a predetermined position of the feeder holder, with a shelf portion sandwiched between a detected base portion and a fixing plate that protrude laterally. Track cart system. The feeder line holder includes a leg portion connected to the leg wall portion and an engaging portion for engaging and fixing the feeder line holder to the track, and is made by integral extrusion molding of synthetic resin. The tracked cart system according to claim 1, wherein:

Images