JP4710628B2 - Orbit inspection truck - Google Patents

Description

 The present invention relates to a track inspection carriage used in an automated transfer system in semiconductor manufacturing, liquid crystal display panel manufacturing factories, and the like.

 In ceiling transport devices such as OHT (Overhead Hoist Transport) and OHS (Over Head Shuttle) which are transport devices in a clean room, a transport carriage is run on a track laid on the ceiling. When the transport cart system is started up or when the transport cart is run on the rail for the first time after inspection and adjustment, the members laid in one piece with the track, especially the power supply line laid inside the rail and the transport cart contact each other. May occur.

 When the power supply line comes into contact with the transport carriage, at the initial stage of contact, the insulation coating of the power supply line only wears, and no fatal damage is caused to the travel of the transport carriage. However, if contact is continued repeatedly, wear of the insulation coating of the power supply line gradually proceeds, eventually leading to peeling of the insulation coating and a short circuit accident associated therewith. In addition, even if there is no contact at present, there is a risk that it will come into contact for some reason as the system operation time elapses if it is just before contact.

 On the other hand, the total length of the track in the clean room is usually several kilometers, and the feeder line is laid inside the rail without being exposed on the rail surface due to physical protection or aesthetic requirements. It is difficult to see from the outside. Therefore, even if the fact of contact between the transport carriage and the power supply line is discovered at the time of inspection of the transport carriage after the system is operated, it is not easy to identify the contact portion of the power supply line by visual confirmation.

In the prior art described in Patent Document 1, an invention is proposed in which an acceleration sensor is mounted on a transport carriage and vibrations during travel are measured to indirectly detect contact between the transport carriage and a feeder line. .
JP 2000-316206 A

 However, in this method, there is a problem that it is difficult to grasp a slight contact state between the power supply line and the transport carriage and a laying state of the power supply line just before the contact.

 The present invention has been made in order to solve such a problem, and is equipped with a sensor unit capable of specifying the laying state of the feeder line on the transport carriage that travels on the track, and by running the entire laying track, it is in a dangerous state. It is an object of the present invention to provide a track inspection carriage that automatically collects information on the laying state and contact state of electric wires and information on the track position where contact has occurred.

The present invention has been made to solve the above-described problems. The invention according to claim 1 is a rail, a power supply line laid along the rail, and the internal space of the power receiving transformer. In a track inspection cart used in a non-contact power feeding type transport system configured to be fed from the power supply line to the power receiving transformer in a non-contact state and travel on the rail, the rail is moved over the entire range of the rail. and inspection carriage travels, the attached to the power receiving transformer, wherein the optical sensor for projecting light toward the interior space, the feed line localization to identify the spatial relative positions of the feed line to the internal space of the power receiving transformer bar indicating means, the encoder obtains the position information on the rail from the travel distance information, or the position information installed in each point on the rail It is a track inspection carriage, characterized in comprising a reading device for acquiring position information on the rail load the code, the.

Further, in the invention according to claim 2, the feeder line position specifying means includes a photosensor that projects light in an X-axis direction that is a horizontal direction with respect to the internal space of the power receiving transformer, and a vertical direction with respect to the internal space of the power receiving transformer. A light sensor that projects light in the Y-axis direction, and a plane of biaxial coordinates in the X-axis direction and the Y-axis direction with the end point of the internal space of the power receiving transformer as the origin based on the output of the light sensor The track inspection carriage according to claim 1 , further comprising: a detecting unit that detects a spatial relative position of the feeder line.
According to a fourth aspect of the present invention, there is a possibility that the power feeding position specifying means makes contact between the power receiving transformer of the transport carriage and the power feeding line when the power feeding line is located with respect to a spatial relative position of the power feeding line. A trajectory inspection cart characterized by transmitting a spatial relative position of the power supply line together with position information on the rail when the power supply line is located in the area. is there.

According to a third aspect of the present invention, the power receiving transformer is fed in a non-contact state from the rail, the power feeding line laid along the rail, and the power feeding line disposed in the internal space of the power receiving transformer. In a track inspection carriage used in a non-contact power feeding type conveyance system configured with a conveyance carriage that travels on a rail, an inspection carriage that travels on the rail over the entire range of the rail, and is equivalent to a cross section of the power receiving transformer Alternatively, the contact detection means formed in a slightly larger size , located near the feeder line installation portion of the inspection carriage, and supported by the inspection carriage so as to be elastically returnable , and the contact detection means is the acquisition when in contact with feed line, non-contact switching means for issuing an actuation signal, a contact detection module consisting of the position information on the rail from the travel distance information That the encoder or, is the orbit inspection carriage, characterized in that to anda reading device for acquiring position information on the rail reads bar code indicating the installation position information to each point on the rail .

 According to the present invention, it is possible to automatically automatically collect the laying status of the power supply line laid integrally with the track, the contact status, and the track position information at the same time.

 Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 2 is a front view and a side view showing the overall configuration of the track inspection carriage 1 in the present embodiment. The track inspection trolley 1 includes a position detection unit 2 for detecting the position of the feeder line, a secondary winding 3 installed on the track inspection trolley 1 side, and a linear motor primary side core coil for driving the linear motor. 4, a traveling wheel 5 installed at the bottom of the track inspection cart 1, a branch roller 6 used at the branch portion, a loading platform 7 for loading a carrier in which a substrate is stored, and a side surface portion of the track inspection cart 1. A guide roller 8 installed on the rail, a branch guide rail 9 for selecting the branch direction at the branch portion, a power supply line 10 for supplying power to the track inspection carriage 1, and a rail 11 laid on the ceiling in the factory. And a linear motor secondary permanent magnet 12 installed on the rail 11.

FIG. 1 is a perspective view for explaining the configuration of the position detection unit 2 in the present embodiment. Position detection unit 2 in FIG. 1, the sensor module 20 comprising a plurality of optical elements, the sensor module controller 21 for controlling the sensor module 20, the secondary winding 3 is wound the E-type iron core 22 ( Power receiving transformer) , a substrate 23 on which each optical element is mounted, a light emitting element array wiring 24, a reflective sensor element array wiring 25, and a light receiving element array wiring 26. The sensor module 20 includes a light emitting element array 27, a light receiving element array 28, a light emitting element 29, a light receiving element 30, a reflective sensor array 31, and a reflective sensor element 32.

 The light emitting element array 27, the light receiving element array 28, and the reflective sensor array 31 are connected to the sensor module controller 21 via the light emitting element array wiring 24, the light receiving element array wiring 26, and the reflective sensor element array wiring 25, respectively. ing. In the position detection unit 2, a pair of sensor modules 20 having the same configuration is attached to the upper and lower surfaces of the substrate 23. As shown in FIG. 1, the E-type core core 22 has two internal spaces, which are an upper space 33 and a lower space 34, respectively. The track inspection cart 1 of this embodiment has a configuration in which two position detection units 2 as described above are installed.

 Next, the operation of the track inspection carriage 1 of this embodiment will be described below. The track inspection cart 1 of the present embodiment has a configuration in which the position detection unit 2 of the feeder 10 is installed on a normal OHS transport cart. Therefore, since the traveling function is the same as that of a normal OHS transport carriage, the following description will be made first regarding the operation during traveling.

 High frequency power is supplied from the outside as primary power to the feeder line 10 laid in the rail 11, and this power induces secondary power to the secondary winding 3 installed in the E-type core core 22. The The induced electric power is supplied to the linear motor primary side iron core coil 4, and the track inspection carriage 1 is driven by a linear motor composed of the linear motor primary side iron core coil 4 and the linear motor secondary side permanent magnet 12. In addition, the induced secondary power is consumed as a power source for the control device of the track inspection cart 1.

 The track inspection carriage 1 travels on a rail 11 laid on the ceiling. The track inspection carriage 1 travels on the traveling wheels 5 while being guided on the rails 11 by the guide rollers 8. At the branch point, the branch roller 6 selects the branch guide rail 9 in the target branch direction and travels to the destination.

 1 is received by the light receiving element 30 of the light receiving element array 28, and an output signal proportional to the light receiving intensity is received by the sensor module. Output to the controller 21. Therefore, when the feeder line 10 that is a light shielding object exists between the light emitting element 29 and the light receiving element 30, the incidence on the light receiving element array 28 that hits the light shielding position is cut off, and thereby the feeder line in the horizontal direction (X-axis direction). Ten positions are identified.

 Further, when the reflective sensor element 32 having both functions of light emission and light reception is aligned and mounted on the end face of the reflective sensor array 31, the radiated light radiated by itself hits the feeder line 10 and returns. The received light beam at the reflective sensor element 32 is detected. Thereby, the position of the feeder 10 in the vertical direction (Y-axis direction) is specified.

 The light beams received by the light receiving element 30 and the reflection type sensor element 32 are collected and analyzed by the sensor module controller 21 via the light receiving element array wiring 26 and the reflection type sensor element array wiring 25, respectively. The position of the feeder line 10 in the biaxial coordinates in the Y-axis direction is specified, and the positions of the feeder line 10 in the upper space 33 and the lower space 34 are respectively grasped.

 FIG. 3 shows the upper space 33 or the lower space 34, where the horizontal direction is the X axis and the vertical direction is the Y axis in the E type core core 22 in which the feeder 10 can exist, and the inner space of the E type core core 22. This is shown as a plane with the end point P0 as the origin. In FIG. 3, the internal space of the E-type core core 22 is represented as a rectangle surrounded by four points of end points P0, P1, P2, and P3, and further, this plane is a hatched area A, area B, and area in FIG. It is divided into four areas, C and area D without hatching. Each of these areas has the following meaning.

Region A: a region where the feeder line 10 is normally positioned when the transport carriage curves to the right or left.
Region B: a region where the feeder line 10 is normally positioned when the transport cart travels straight.
Region C: a region where the feeder line 10 is normally positioned when the transport carriage curves to the right or left.
Region D: A region that may come into contact with the transport carriage when the feeder line 10 is positioned in any case, such as when the transport carriage curves to the right or left.
The dimensions M1, M2, W, w1, w2, L, H, h1, and h2 that define the above-described regions A to D are appropriately determined and set empirically depending on the system.

 FIG. 4 is a plan view showing an example of a track on which the track inspection cart 1 or the transport cart of the present embodiment travels. In FIG. 4, the layout of a manufacturing plant that manufactures semiconductors, liquid crystal display panels, and the like is shown in plan view. An inter-process track 40, an in-process track 41, a branch track 42 that connects both tracks, and a bay 43. And a system controller 50.

 In the bay 43, a semiconductor manufacturing apparatus 44 and a stocker 45 are arranged adjacent to each track. A port 46 is provided between the semiconductor manufacturing apparatus 44 and the in-process track 41, and the stocker 45 and the in-process track. An exit port 47 and an entrance port 48 are provided between the track 41 and the semiconductor manufacturing apparatus 44 and the stocker 45, respectively.

 In addition, in order for the trajectory inspection cart 1 to acquire position information, the trajectory inspection cart 1 includes an attached encoder and obtains position information on the track from the travel distance information. Instead of providing the track inspection cart 1 with an encoder, a bar code indicating position information is installed at each point on the track so that the track inspection cart 1 reads the barcode with an attached reading device. The upper position information may be acquired.

 The operation at the time of detecting the position of the feeder 10 in the track inspection cart 1 according to the present embodiment in the track shown in FIG. 4 will be described below. The detection by the track inspection cart 1 is related to the entire travel rail that travels when the transport cart performs the transport operation, the laying state of the power supply line 10 laid on the rail 11 is normal, and the physical contact with the transport cart is Since it is for confirming that there is no possibility of contact, there is a configuration in which the position detection unit 2 is provided on a normal OHS transport carriage.

With the position detection unit 2 actuated, the track inspection carriage 1 circulates on all the tracks of the inter-process track 40, the branch track 42, and the in-process track 41, thereby confirming the laying state of the feeder line 10. .
Further, when the feeder line 10 is located in the region D, the absolute position of the position on the track is recognized from the travel distance information by the encoder attached to the carriage, and the sensor module is combined with the position coordinate value of the feeder line 10. Store in the controller 21. Further, by transmitting the position information on the orbit of the contact position or the position just before the contact and the position coordinate value of the feeder line 10 from the sensor module controller 21 to an external controller, these are displayed on a monitor screen installed on the ground, for example. Display information of.
By the above thing, the track inspection cart 1 of this embodiment can be used effectively for the state check of the feeder 10 laid on the track.

 The operation of the normal conveyance carriage during the carrier conveyance in the track shown in FIG. 4 will be described below. The transport cart receives the carrier containing the processed substrate from the semiconductor manufacturing apparatus 44 at the port 46, transports it to the stocker 45, and loads the carrier onto the warehousing port 48. The loaded carrier is stored in a predetermined shelf by a stacker crane in the stocker 45.

 Conversely, when a carrier is supplied from the stocker 45 to the semiconductor manufacturing apparatus 44, the system controller 50 issues a transport designation to the transport cart and the stocker 45, and the stocker 45 unloads the carrier designated transport using the stacker crane. Take it out to the port 47 and deliver it to the transport cart waiting at the exit port 47. The transport cart travels to the designated semiconductor manufacturing apparatus 44 with the received carrier mounted thereon, and loads the carrier onto the port 46 of the semiconductor manufacturing apparatus 44.

 Hereinafter, modifications of the embodiment of the present invention will be described with reference to the drawings. FIG. 5 is a perspective view showing the contact detection module 60 of the track inspection carriage 1 in a modification of the present embodiment. The contact detection module 60 is installed in the track inspection carriage 1 in combination with the position detection unit 2 of the above-described embodiment or exchange.

 A contact detection module 60 shown in FIG. 5 includes a contact detection plate 61 that is equal to or slightly larger in size than the cross section of the power receiving transformer, a butterfly plate 62 in which the contact detection plate 61 is attached to an appropriate portion of the frame on the transport carriage side, A spring 63 attached to support the contact detection plate 61 so as to be perpendicular to the traveling direction, a dog 64 fixed to the contact detection plate 61, and the contact detection plate 61 travels by blocking the optical axis. And a photoelectric switch 65 that detects whether or not it has fallen backward in the direction.

 An operation at the time of detecting the position of the power supply line 10 of the contact detection module 60 of the modification of the present embodiment will be described below. When the power supply line 10 does not contact the contact detection plate 61, the butterfly plate 62 and the spring 63 keep the contact detection plate 61 perpendicular to the traveling direction. When the power supply line 10 comes into contact with the contact detection plate 61, the contact detection plate 61 falls to the rear side in the traveling direction due to the contact, and the dog 64 blocks the optical axis of the photoelectric switch 65. Detect and output to the transport cart controller

 Further, by transmitting the contact position or position information on the orbit and the output information of the photoelectric switch 65 to an external controller, the information is displayed on a monitor screen installed on the ground, for example.

It is a perspective view for composition explanation of position detection unit 2 in track inspection truck 1 concerning an embodiment of the present invention. It is the front view and side view which show the whole structure of the track inspection trolley | bogie 1 concerning embodiment of this invention. It is the figure which showed the area | region division in the internal space of the E-type core core 22 concerning embodiment of this invention. It is a top view showing an example of the track on which track inspection trolley 1 or conveyance trolley of an embodiment of the present invention runs. It is a perspective view which shows the structure of the contact detection module 60 concerning the modification of embodiment of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 2 ... Position detection unit, 10 ... Feed line, 11 ... Rail, 20 ... Sensor module, 21 ... Sensor module controller, 22 ... E-type core core, 60 ... Contact detection module, 61 ... Contact detection plate, 64 ... Dog, 65 …Photoelectric switch

Claims (4)

A rail, a power supply line laid along the rail, and a transport carriage that is fed from the power supply line arranged in an internal space of the power receiving transformer to the power receiving transformer in a non-contact state and travels on the rail. In the track inspection carriage used in the non-contact power transfer system
An inspection carriage that runs on the rail over the entire range of the rail;
Attached to the power receiving transformer, the optical sensor for projecting light toward the inner space, a feed line position specifying means for specifying a spatial relative position of the feed line to the internal space of the power receiving transformer,
An encoder that acquires position information on the rail from mileage information, or a reading device that acquires position information on the rail by reading a barcode indicating position information installed at each point on the rail;
A trajectory inspection cart characterized by comprising: The feeder line position specifying means includes:
An optical sensor that projects light in the X-axis direction that is horizontal with respect to the internal space of the power receiving transformer, and an optical sensor that projects light in the Y-axis direction that is vertical with respect to the internal space of the power receiving transformer ;
Detection means for detecting a spatial relative position of the feeder line in a plane of two-axis coordinates in the X-axis direction and the Y-axis direction with the end point of the internal space of the power receiving transformer as the origin based on the output of the optical sensor and,
The track inspection trolley according to claim 1, wherein: A rail, a power supply line laid along the rail, and a transport carriage that is fed from the power supply line arranged in an internal space of the power receiving transformer to the power receiving transformer in a non-contact state and travels on the rail. In the track inspection carriage used in the non-contact power transfer system
An inspection carriage that runs on the rail over the entire range of the rail;
A contact detection means that is formed in a shape that is equal to or slightly larger in size than the cross section of the power receiving transformer, is located in the vicinity of the feeder line installation portion of the inspection carriage, and is supported by the inspection carriage so as to be elastically returnable ; and , when the contact detecting means in contact with the feed line, non-contact switching means for issuing an actuation signal, a contact detection module consisting,
An encoder that acquires position information on the rail from mileage information, or a reading device that acquires position information on the rail by reading a barcode indicating position information installed at each point on the rail;
A trajectory inspection cart characterized by comprising: The power feeding position specifying means includes
With respect to the spatial relative position of the power supply line, an area where the power receiving transformer of the transport carriage and the power supply line may come into contact with each other when the power supply line is positioned is set in advance, and the power supply line is located in the area. The track inspection carriage according to claim 1 or 2, wherein a spatial relative position of the feeder line is transmitted together with position information on the rail.

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