JP4254923B2 - Flow rate detection device and flow rate control device - Google Patents

Description

  The present invention relates to a flow rate detection device and a flow rate control device suitable for use by being attached to a predetermined panel.

  For example, various gases are used in a semiconductor manufacturing process. In order to control the supply amount of this type of gas, generally, a flow rate detection device or a flow rate control device is inserted in a gas supply flow path (gas pipe) to adjust the flow rate. Incidentally, the flow rate detection device is basically a block body in which a flow path inserted in a gas pipe is formed, and a flow rate sensor that detects the flow rate of a gas (fluid) that is assembled to the block body and flows through the flow path. (For example, refer to Patent Document 1). The flow control device further has a structure in which a flow rate adjusting valve for adjusting the flow rate of the gas (fluid) is provided in the block body, and operates so as to make the flow rate of the fluid coincide with a desired constant value (for example, patent document). 2).

Note that the fluid introduction port side (upstream side of the flow path) of the flow path formed by the block body is usually located upstream of the flow sensor, and the flow of the gas (fluid) introduced into the flow path A rectifier is provided to prevent turbulence. Also, in such a flow rate detection device or flow rate control device, for example, on the front plate of the housing, a display that displays the flow rate value measured using the flow rate sensor, a control parameter for the flow rate adjustment valve mechanism, etc. An operation switch for setting is provided.
Japanese Patent Laid-Open No. 11-132913 JP 2000-81914 A

By the way, there is a demand to attach such a flow rate detection device or flow rate control device to a predetermined panel.
However, as disclosed in Patent Documents 1 and 2, the conventional general flow rate detection device and flow rate control device have their fluid inlet and fluid outlet on the same axis so as to be used in the middle of a predetermined pipe. Since the structure is provided so as to be opposite to each other, it is not suitable for mounting on the panel described above. That is, even if a plurality of flow rate detection devices and flow rate control devices are used side by side, piping space for the fluid inlet and the fluid outlet must be secured, so these flow rate detection devices, flow rate control devices, and others There was a problem that it was not possible to attach the panel mounting devices close to each other.

  The present invention has been made in consideration of such circumstances, and the object thereof is to arrange them close to each other even when a plurality of units are used side by side, and to connect the pipes to the fluid inlet and the fluid outlet. An object of the present invention is to provide a flow rate detection device and a flow rate control device excellent in handleability capable of easily performing work and connection work such as electrical signal lines.

In order to achieve the above-described object, the flow rate detection device according to the present invention includes a fluid flow inlet and a flow outlet to form a predetermined flow path and a flow rate sensor to detect the flow rate of the fluid flowing through the flow path. An assembled main body, and a circuit board on which an electric circuit for measuring the flow rate of the fluid flowing through the flow path via the flow sensor is provided, and the main body and the circuit board are formed in a substantially rectangular parallelepiped shape (including a cubic shape). ) Built in the housing,
One side of the housing is a front surface portion on which an indicator and an operation switch are provided, and the flow channel inlet and outlet ports are positioned side by side on the back surface facing the front surface portion to accommodate the main body. And
Further, the circuit board is disposed on a side surface of the main body in which the flow sensor is assembled, and a terminal portion connected to the circuit board is connected to an inlet of the flow path in the rear surface of the casing. And arranged side by side at the outlet .

Incidentally the body-shaped flow path co stocked the direction of inlet and outlet of the flow path, specifically U to the axis of the outlet and the axis of the inlet port are formed substantially concurrently Formed a letter-shaped channel,
It is preferable that the terminal portion is realized as a multipolar connector for external connection arranged in a vertical direction alongside the inlet and outlet of the flow path on the back surface of the housing .

  Furthermore, the flow rate control device according to the present invention is realized as a flow rate adjustment device that adjusts the flow rate of the fluid flowing through the flow channel in the flow rate detection device configured as described above.

  In the flow rate detection device and the flow rate control device according to the present invention, the flow path inside the main body is formed in a U-shape, and the fluid inlet and the fluid outlet are aligned on the back surface of the box-shaped housing. In addition to providing a connection terminal portion such as an electrical signal line on the back surface of the casing in line with the fluid introduction port and the fluid discharge port, even when a plurality of flow rate control devices are provided side by side, The flow control devices can be arranged close to each other. In addition, there is a great practical effect, such as making it possible to easily connect pipes and the like to each flow control device.

Hereinafter, a flow control device according to the present invention will be described with reference to the drawings.
Note that the flow rate detection device may be substantially realized by removing the flow rate adjustment valve mechanism from the flow rate control device described below. Here, the flow rate detection device according to the present invention is taken as an example. A characteristic structure of the apparatus and the flow rate control apparatus will be described.
FIG. 1 is an exploded perspective view showing an overall schematic configuration of a flow control device according to this embodiment, and 1 is a substantially rectangular parallelepiped shape with an open front surface. The casing 1 is made of a reinforced plastic having a substantially rectangular parallelepiped shape having a height of 48 mm, a width of 48 mm, and a depth of 61 mm, for example. The operation surface of the casing 1 exposed to the outside when attached to the panel surface is formed to slightly protrude from the side surface on the casing side, and is locked to the panel surface of the casing 1 by the protruding portion (flange portion). Is done. As will be described later, a channel block body (main body) 10 in which a U-shaped channel is formed therein and the fluid inlet port 2 and the fluid outlet port 3 are aligned in the vertical direction, The main circuit board 4 is mounted on the side portion, and the fluid introduction port 2 and the fluid outlet port 3 are arranged on the rear side, and the main circuit board 4 and the main circuit board 4 are assembled from the front side. In addition, the rear surface of the housing 1 is provided with holes for exposing the fluid inlet port 2, the fluid outlet port 3, and the terminal portion 5 to project outside.

  Incidentally, the flow path block body 10 is formed by assembling a rectifier 12, a flow rate sensor 13, and a flow rate control valve mechanism 14 to the flow path as will be described later. The main circuit board 4 mounted on the side of the flow path block body 10 has a flow rate detection circuit for detecting the flow rate of the fluid flowing through the flow path via the flow rate sensor 13, and also according to the detected flow rate. And an electric circuit such as a valve control circuit for controlling the operation of the flow control valve mechanism 14. As the flow rate sensor, for example, a thermal gas flow rate sensor (mass flow rate sensor) disclosed in JP-A-4-230808 is used. If the flow path cross-sectional area is unchanged, the flow velocity and the flow rate are in a proportional relationship, and thus the flow velocity sensor can be used as it is as a flow rate sensor.

  Further, at the rear end portion of the main circuit board 4, a terminal portion 5 formed of a multipolar connector for electrically connecting the main circuit board 4 to an external device (not shown) is provided. When the main circuit board 4 is assembled to the side portion of the flow path block 10, the terminal portion (multipolar connector) 5 has the flow path block body 10 as shown in FIG. Are arranged side by side with the fluid inlet 2 and the fluid outlet 3 provided on the rear side. The flow rate control device receives power supply from the outside through the terminal unit 5 and inputs / outputs electric signals such as flow rate signals and event signals.

  In addition, when it attaches to a panel so that the front part of the housing | casing 1 may become substantially vertical, the back surface part of the housing | casing 1 will also be a substantially perpendicular attitude | position. In the state of attachment to the panel, the fluid inlet 2 and the fluid outlet 3 are arranged such that the fluid inlet 2 is positioned on the lower side and the fluid outlet 3 is positioned on the upper side as shown in FIG. It has become. That is, by adopting the same arrangement as the fluid introduction port and the fluid outlet port of the float type flow meter (so-called purge meter), replacement of the existing purge meter and the fluid control device is facilitated.

  A sub circuit board 6 is fixed to the front end of the main circuit board 4 at a right angle to the main circuit board 4. The sub circuit board 6 is mounted with a plurality of light emitting elements for segment display, contact members for operation switches, and driving circuits thereof. A pressing switch member 7 made of a conductive elastic body is assembled at a position facing the contact member on the sub circuit board 6, and a plurality of digits are arranged at a position facing the light emitting element on the sub circuit board 3. A front plate 8 having a segment window for displaying numbers is assembled.

  In the figure, reference numeral 9 denotes a decorative panel made of a plastic thin plate provided so as to cover the front plate 8. The illumination of the segment window by the selective light emission of the light emitting element described above is displayed with good visibility through the decorative panel 9. The display unit configured in this manner displays a flow rate measurement value, a flow rate set value, and an operation mode thereof. The pressing switch member 7 made of a conductive elastic body is pressed through the decorative panel 9 to conduct (switch operation) between the contact members positioned on the back side thereof. Switching the display contents of the display and changing the set values described above are performed by operating these push switch members 7.

  That is, the flow rate control device configured to be incorporated in the box-shaped housing 1 is provided with an operation unit including a display and an operation switch on the front surface of the housing 1, and a fluid introduction port on the rear plate side of the housing 1. 2 and a fluid outlet 3 and a terminal portion (multipolar connector) 5 for electrical connection. The flow rate control device has a rectangular opening of 48 mm × 48 mm, for example, drilled in a panel as a mounting portion of a panel (not shown) having a flange 1 a having a predetermined width formed outwardly at the front opening end of the housing 1. The operation portion described above is exposed to the front side and used. And the connection of piping and the electrical connection of a signal wire | line with respect to this flow control apparatus are each performed in the back surface side of a panel.

Here, the structure of the above-described flow path block body 10 which is the main body of the flow rate control device, and the flow sensor 13 and the like assembled to the flow path block body 10 will be described.
FIG. 3 is an exploded perspective view showing a schematic configuration of the main body of the flow control device, and FIGS. 4 (a) to 4 (c) are cross-sectional views showing the principal part thereof. 3 and 4 (a) to 4 (c), the fluid inlet 2 and the fluid outlet 3 are shown facing downward. Actually, as described above, the fluid inlet 2 described above is shown. And it is integrated in the housing 1 with the fluid outlet 3 facing rearward.

  The main body portion is formed in a cylindrical shape that is assembled on the upstream side (fluid inflow side) of the flow path 11 formed in the flow path block body 10 and the flow path block body 10 that forms a substantially U-shaped flow path. Rectifier 12, a flow rate sensor 13 assembled at a substantially middle position of the flow path 11, and a flow rate adjusting valve mechanism 14 assembled on the downstream side (fluid outflow side) of the flow path. As shown in FIG. 4, the flow rate adjusting valve mechanism 14 includes a solenoid 14a and a flow rate adjusting valve 14b that is advanced and retracted by the solenoid 14a.

  That is, the flow path block body 10 has a substantially rectangular parallelepiped shape, and forms a linear first flow path 11a from one end portion in the longitudinal direction toward the center portion. And after attaching the rectifier 12 coaxially to the opening end side of this 1st flow path 11a, it has the structure where the opening end is obstruct | occluded with the cover body 15. FIG. In addition, the part (rectifier storage part) where this cylindrical rectifier 12 is incorporated consists of a hole part which has an inner diameter larger than the outer diameter of this rectifier 12, as shown to FIG. 4 (a), (c), respectively. A predetermined space A is formed between the outer periphery of the rectifier 12.

  Further, the fluid inlet 2 of the fluid control device connected to the first flow path 11a forms a communication portion (flow path) with the space as shown in FIG. (Surface that is the rear side when assembled to the housing 1) Opening toward the 10a side. The fluid introduced from the fluid introduction port 2 is once introduced into the space A formed on the outer peripheral surface of the cylindrical rectifier 12, and then the rectifier 12 and the lid 15 are connected from the space A. It is led to the inside of the rectifier 12 through a predetermined gap that will be formed later. The fluid is rectified through the rectifier 12 and then introduced into the first flow path 11a.

  On the other hand, a through-hole 10c connected to the first flow path 11a is formed in the front surface (surface which becomes the side when assembled to the housing 1) 10b of the flow path block body 10. This through hole 10c is for attaching the flow sensor 13 to be positioned in the first flow path 11a, and the sensor bracket 13a to which the flow sensor 13 has been previously attached is shown in FIG. The above-mentioned through-hole 10c is closed airtightly from the outside of 10 and assembled. The flow rate sensor 13 assembled in the first flow path 11a in this manner is disposed slightly inclined with respect to the axis of the flow path 11a. Thereby, the mass flow rate is accurately measured without disturbing the flow of the fluid rectified by the rectifier 12 described above.

  On the other hand, the above-described flow rate adjusting valve mechanism 14 is attached to the upper surface 10d of the flow path block body 10 (the front surface when assembled to the housing 1) located downstream of the flow rate sensor 13. It has become. That is, in the block body 10, as described above, the second flow path is bent at a substantially right angle from the end of the first flow path 11a formed in the longitudinal direction toward the upper surface 10d of the block body 10. 11 b is formed, and an end of the second flow path 11 b is opened on the upper surface 10 d of the flow path block body 10.

  Further, on the side portion of the second flow path 11b, the second flow path 11b and the axial center position thereof are shifted to the back side of the block body 10, and the third flow path is parallel to the second flow path 11b. The flow path 11c is formed. In particular, the third flow path 11c is provided through the block body 10 from the upper surface 10d of the block body 10 toward the lower surface 10a. And the edge part of the 3rd flow path 11c opened to the lower surface 10a of the block body 10 is set as the fluid outlet 3 of a flow control apparatus.

  The upper surface of the block body 10 in which the opening (fluid outlet) of the second channel 11b and the opening (fluid inlet) of the third channel 11c are arranged side by side (when assembled to the housing 1) A flow rate adjusting valve mechanism 14 provided with a flow rate adjusting valve 14b that forms a flow path for communicating these openings and adjusts the opening area of the flow path is attached to the front surface 10d. The flow rate adjusting valve 14b is provided to close the opening (fluid inlet) of the third flow path 11c, and is controlled by a valve control circuit (not shown) mounted on the main circuit board 4. The valve opening degree is adjusted by the solenoid 14a. The fluid guided from the first flow path 11a to the flow rate adjustment valve mechanism 14 through the second flow path 11b is adjusted in flow rate through the flow rate adjustment valve 14b, and then the third flow path 11c. It is derived from the fluid outlet 17 via the. Internal threads for external connection are formed inside the fluid inlet 16 and the fluid outlet 17. Further, as indicated by reference numeral 3 in FIG. 1 and reference numerals 2 and 3 in FIGS. 5 and 6, the block body 10 is located on the outer peripheral portion of the fluid inlet port 16 and the fluid outlet port 17 for external connection work. A hexagonal column-shaped spanner receptacle is formed. These spanner receptacles are intended to prevent unintentional force from being applied to the housing 1 when connecting the pipes to the fluid inlet 16 and the fluid outlet 17.

  Thus, according to the main body of the flow control device in which the flow sensor 13 and the flow control valve mechanism 14 are respectively provided on different surfaces of the block body 10, specifically, the front surface 10 b and the upper surface 10 d, the flow sensor 13 Even when the diameter of the sensor bracket 13a for attaching the sensor is large and the diameter of the base of the flow control valve mechanism 14 is large, the flow sensor 13 and the flow control valve mechanism 14 are brought close to each other without interfering with them. Can be arranged. As a result, the length of the block body 10 in the first flow path 11a direction can be shortened, and the compactness can be achieved.

  In addition, since the axis of the third channel 11c is shifted from the axis of the first channel 11a to the back side of the block body 10, the first channel 11a and the third channel 11c are set. And will not interfere. Therefore, the third flow path 11c can be provided close to the fluid inlet 16 side, and accordingly, the length of the first flow path 11a of the block body 10 in the fluid flow direction can be further shortened. As a result, a compact main body that is large enough to be housed in the so-called small 48 mm square casing 1 is realized.

  The main circuit board 4 is fixed to the side of the flow path block body 10, and a multipolar connector (terminal part) 5 for electrical connection is attached to the main circuit board 4, and the sub-board 6 is interposed therebetween. Since the front plate 8 provided with a display and an operation switch is attached, the main body of the flow control device can be compactly assembled. As a result, it is possible to easily assemble the main body by simply inserting the main body into the housing 1 from the front side and screwing the main body from the back side of the housing 1. Played.

  Thus, according to the flow control device configured as described above, since the fluid introduction port 2 and the fluid discharge port 3 are provided on the back surface of the housing 1, a plurality of flow control devices are arranged side by side on the panel. Even if it exists, it is not necessary to ensure the area | region for piping between these flow control apparatuses, Therefore, a flow control apparatus can be arrange | positioned mutually close. The fluid introduction port 2 and the fluid outlet port 3 are provided on the back surface of the housing 1, and the multipolar connector (terminal portion) 5 for electrical connection is also provided on the back surface of the housing 1. For the flow rate control device, there is an effect that connection work such as piping and signal lines can be easily performed on the back side of the housing 1.

  By the way, when an external pipe is connected to this type of flow rate detection device or flow rate control device, a leak test solution may be applied to the connection portion in order to confirm that there is no fluid leakage at the connection portion. When such a leak test liquid enters the inside of the housing 1 through the gap, there is a risk that a malfunction may occur, and therefore, the use of the leak test liquid is strictly prohibited. However, the connection work is often performed at the installation site, and it cannot be said that there is no risk of the leak test solution being applied accidentally or unintentionally.

  Therefore, in order to solve such a problem, a water absorbent sheet 20 is pasted around the portion where the fluid inlet 2 and the fluid outlet 3 on the back side of the casing 1 described above are provided, for example, as shown in FIG. It is preferable to keep it. The water-absorbent sheet 20 has, for example, a PP film processed thickness of about 0.3 to 0.5 mm, and is generally used as an insole for fresh fish, meat, vegetables, and the like. For example, as shown in FIG. 5A, the water absorbing sheet 20 is drilled so as to cover the periphery of the fluid inlet 2 and the fluid outlet 3, and the fluid inlet 2 as shown in FIG. 5B. Then, it is fitted around the fluid outlet 3 and attached to the back surface of the housing 1 using an adhesive tape or the like.

  According to the flow control device in which such a water absorbent sheet 20 is pasted on the back surface of the housing 1, for example, pipes are connected to the fluid inlet 2 and the fluid outlet 3, respectively, and the airtightness of the connecting portion is confirmed (inspection). Even when leak test liquid such as soapy water is applied or sprayed as much as possible, excess test liquid is absorbed by the water absorbing sheet 20, so that the test liquid may inadvertently enter the inside of the housing 1. Disappear. Accordingly, it is possible to effectively protect the main circuit board 2 and the like incorporated in the housing 1 from the test solution. Since the water absorbing sheet 20 is formed of a thin material that can be easily broken by hand, it can be easily exhausted after the leak inspection is completed.

  Also, as the multi-pole connector (terminal part) 5 for electrical connection, one having a structure in which a signal line is inserted from the side as shown in FIG. 6 and the signal line is fixed by a screw provided on the front side is used. For example, the signal wire 21 is fitted into the multipolar connector (terminal portion) 5 from the opposite side of the fluid inlet 2 and the fluid outlet 3 described above, and screwed using a driver 22 from the back side of the housing 1. Since the tightening work can be performed, the connection work can be easily performed in a natural work posture.

  The present invention is not limited to the embodiment described above. For example, the size of the housing 1 is sufficient if it conforms to various specifications. Further, the control target (fluid) by the flow rate control device may be not only gas such as air, nitrogen, argon, carbonic acid, but also liquid such as water or alcohol as long as the flow rate sensor 13 is for liquid. Further, as described above, the present invention can be similarly applied to a flow rate detection device that does not include a flow rate control valve mechanism. In the embodiment, a hole is formed in the block body 10 to form a flow path, but it is of course possible to form a flow path by combining tubes.

  Further, the shape of the flow path may be not only the above-mentioned U-shape but also a U-shape. In short, when the device is mounted from the front of the panel, it may be a shape that does not protrude laterally. In addition, although the screw type connector is exemplified as the multipolar connector here, a plug-in connector may be used. In addition, the present invention can be variously modified and implemented without departing from the scope of the invention.

The disassembled perspective view which shows the whole structure of the flow control apparatus which concerns on one Embodiment of this invention. The figure which shows the structure of the back surface side of the flow control apparatus shown in FIG. The disassembled perspective view which shows the principal part schematic structure of the main-body part in a flow control apparatus. Sectional drawing for demonstrating the structure of the main-body part shown in FIG. The figure which shows the example of a device in the back surface side of the flow control apparatus shown in FIG. The figure which shows the structure of the multipolar connector (terminal part) provided exposed on the back surface of a housing | casing.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Case 2 Fluid inlet 3 Fluid outlet 4 Main circuit board 5 Multipolar connector (terminal part)
6 Sub-circuit board 7 Front plate 10 Block body 11 First flow path 12 Rectifier 13 Flow rate sensor 14 Flow rate control valve mechanism 15 Lid body 20 Water absorption sheet

Claims (3)

A main body in which a predetermined flow path is formed with a fluid inlet and outlet and a flow sensor is assembled to detect the flow rate of the fluid flowing in the flow path, and the flow path is passed through the flow sensor. A circuit board on which an electric circuit for measuring the flow rate of flowing fluid is mounted, and the main body and the circuit board are built in a substantially rectangular parallelepiped housing,
One side of the housing is a front surface portion on which an indicator and an operation switch are provided, and the flow channel inlet and outlet ports are positioned side by side on the back surface facing the front surface portion to accommodate the main body. And
Further, the circuit board is disposed on a side surface of the main body in which the flow sensor is assembled, and a terminal portion connected to the circuit board is connected to an inlet of the flow path in the rear surface of the casing. And a flow rate detection device arranged next to the outlet . The main body is formed by aligning the direction of the inlet and outlet of the flow path to form a U-shaped flow path,
2. The flow rate detection device according to claim 1, wherein the terminal portion includes a multipolar connector for external connection arranged in a vertical direction alongside an inlet and an outlet of the flow path on a back surface portion of the housing . The flow rate control device according to claim 1, wherein a flow rate adjusting valve for adjusting a flow rate of a fluid flowing through the flow channel is provided in the flow channel in the flow rate detection device according to claim 1.

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