JP2005221304A - Flow detection apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a flow detection apparatus of a simple structure capable of reliably fixing a panel-mount-type flow detection unit to a dedicated case. <P>SOLUTION: The apparatus is provided with both the panel-mount-type flow detection unit in which a channel block body with an attached flow sensor is built in an approximately rectangular parallelepiped case and the box-like dedicated case for housing the flow detection unit and using the flow detection unit in a state not mounted to a panel. By helically engaging a screw with a screw hole provided for the channel block body of the flow detection unit for fixing the channel block body to the case from the outside of the case via the case from the outside of the dedicated case, the flow detection unit is fixed to the dedicated case. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a flow rate detection device in which a flow rate detection unit in which a flow path block body is built in a housing for mounting a panel is housed in a dedicated case for use without being mounted on the panel.

For example, various gases are used in a semiconductor manufacturing process. In order to control the supply amount of this type of gas, generally, a flow rate detection device or a flow rate control device is inserted in a gas supply flow path (gas pipe) to adjust the flow rate. Incidentally, the flow rate detection device basically has a flow path block body that forms a flow path inserted in a gas pipe, and a flow rate of gas (fluid) that is assembled to the flow path block body and flows through the flow path. And a flow sensor for detection (see, for example, Patent Document 1). The flow control device further has a structure in which a flow rate adjusting valve for adjusting the flow rate of the gas (fluid) is provided in the block body, and operates so as to make the flow rate of the fluid coincide with a desired constant value (for example, Patent Documents). 2).
Japanese Patent Laid-Open No. 11-132913 JP 2000-81914 A

  By the way, this type of flow rate detection device (flow rate control device) has a substantially rectangular parallelepiped shape together with an electric circuit board 2 and the like, for example, a metal flow path block body 1 in which a predetermined flow path is formed as shown in FIG. The display 4a and the operation switch 4b are provided on the front portion (front panel) 4 of the casing 3 that is exposed to the front surface of the panel P when the casing 3 is attached to a predetermined panel P. In addition, it is realized as a panel-mounted flow rate detection unit in which the inlet 5 and the outlet 6 of the flow path are provided on the back surface of the housing 3. The indicator 4a is for displaying a flow rate value measured using the flow rate sensor 7 incorporated in the flow path block body 1, and the operation switch 4b is a flow rate incorporated in the flow path block body 1. This is for setting control parameters and the like for the regulating valve mechanism 8.

  For mounting such a flow rate detection unit 10 on the panel P, for example, as shown in FIG. 4, the flow rate detection unit 10 is inserted into the unit mounting hole opened in the panel P from the rear part (rear part) to detect the flow rate. Between the front part of the unit 10, specifically, the flange part 3 a projecting outward from the front end part of the housing 3 and the panel mounting jig 11 mounted from the rear part of the flow rate detection unit 10. This is done by inserting P.

  By the way, when the panel-mounted flow rate detection unit 10 is used without being mounted on the panel P, the flow rate detection unit 10 is not fixedly positioned by being attached to the panel P. Moreover, since the flow rate detection unit 10 is used in a so-called bare state, there is a problem that it is impossible to cope with an impact applied from the outside. Therefore, it is considered that the flow rate detection unit 10 is housed in a box-shaped dedicated case to protect the flow rate detection unit 10 and that the above-described problem can be solved by installing the dedicated case semi-fixed on a desk or the like. It is done.

  However, even if the flow rate detection unit 10 is housed in a box-shaped dedicated case and the front surface portion 3a of the housing 3 is attached to the dedicated case using the panel mounting jig 11, the dedicated case is semi-fixed on a desk or the like. Therefore, the flow rate detection unit 10 is easily detached from the dedicated case due to the stress applied to the connecting portion between the flow rate detection unit 10 and the pipe. Therefore, it is required to securely fix the flow rate detection unit 10 to the dedicated case. However, it is wasteful to incorporate the mechanism for fixing the dedicated case into the flow rate detection unit 10, and in the case of the downsized flow rate detection unit 10, it is difficult to secure the installation space.

  The present invention has been made in consideration of such circumstances, and its purpose is to provide the flow detection unit in its dedicated case even when the panel-mounted flow detection unit is used without being mounted on the panel. It is an object of the present invention to provide a flow rate detection device having a simple structure that can be securely fixed to.

In order to achieve the above-described object, the flow rate detection device according to the present invention includes a flow path block body in which a predetermined flow path is formed and a flow rate sensor is assembled in the flow path, incorporated in a substantially rectangular parallelepiped panel mounting housing. When the casing is attached to the panel, an indicator and an operation switch are provided on the front portion of the casing that is exposed to the front of the panel, and the inlet and outlet of the flow path are provided on the rear portion of the casing. A panel-mounted flow rate detection unit provided with an outlet, and a box-shaped dedicated case for housing the flow rate detection unit and using the flow rate detection unit without being mounted on the panel. ,
In particular, a screw hole provided in the flow path block body of the flow rate detection unit for fixing the flow path block body to the housing from the outside of the housing, and through the housing from the outside of the dedicated case. The flow rate detection unit is fixed to the dedicated case by screws that are screwed together.

  Preferably, the screw is formed by inserting a through hole formed in the dedicated case into a screw hole that is opened by removing a screw that fixes the flow path block body to the housing from the outside of the housing. It is screwed from the outside of the dedicated case, and the flow rate detection unit and the dedicated case are sandwiched by sandwiching the housing and the dedicated case between the head and the flow path block body. Realize secure fixing.

  In this way, according to the flow rate detection device in which the flow rate detection unit is housed and fixed in the dedicated case, the screw for fixing the flow rate detection unit to the dedicated case is attached to the flow path block body incorporated in the flow rate detection unit. It will be fixed directly. Therefore, since the housing and the dedicated case can be fixed to the flow path block body that occupies the interior of the flow rate detection unit and occupies most of the weight of the flow rate detection unit, the housing and the dedicated case can be securely connected. Can be integrated. As a result, it is possible to reliably prevent the flow rate detection unit from being detached from the dedicated case even when stress from the piping is applied, so that the flow rate detection device can be used stably.

  Moreover, since the housing and the dedicated case are simply fixed to the flow path block body by using screw holes provided in advance in the flow path block body, a special change is made to the panel-mounted flow rate detection unit. There is also an advantage that it is not necessary.

Hereinafter, a flow rate detection device according to an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is an exploded view of a flow rate detection device according to this embodiment. Reference numeral 10 denotes a panel-mounted flow rate detection unit in which a flow rate block 1 is housed in a box-shaped housing 3. As described above with reference to FIG. 3, the flow rate detection unit 10 includes the flow path block body 1 assembled with the flow rate sensor 7 in a substantially rectangular parallelepiped panel mounting housing 3, and the front panel portion 4. Are provided with an indicator 4a and an operation switch 4b, and an inflow port 5 and an outflow port 6 of the flow path are provided on the back surface of the casing 4.

  In particular, in the flow rate detection unit 10, the flow block body 1 is made of a heavy metal object, and the electric circuit board 2 and the housing 3 are lighter than the flow block body 1. The substrate 2, the front panel portion 4, and the like are assembled together, and housed in a box-shaped housing 3, and the housing 3 is fixed to the flow block body 1. In other words, a box-shaped housing 3 is provided so as to cover the flow block body 1 in which the electric circuit board 2 and the front panel portion 4 are integrally assembled, and the housing 3 is fixed to the flow block body 1 so as to be substantially omitted. A rectangular parallelepiped flow rate detection unit 10 is constructed.

  On the other hand, a dedicated case 20 for housing the panel-mounted flow rate detection unit 10 and using the flow rate detection unit 10 without being mounted on the panel P includes a front plate 21 and a bottom plate 22 as shown in FIG. And a top case 24 provided with a top plate 24, a pair of side plates 25, 25, and a back plate 26 provided to cover the lower case body 23. The lower case body 23 and the upper case body 27 are combined and integrated at the side portions thereof using a tapping screw 27 to constitute a box-shaped case 20.

  Further, the front plate 21 of the lower case body 23 is provided with a rectangular mounting hole 21a into which the flow rate detection unit 10 is fitted from the back side, and the back plate 26 of the upper case body 27 is provided with the flow rate detection unit. There are provided two round holes 26a through which the 10 inlets 5 and 6 (a pair of connectors) are inserted, and holes 26b through which the electrical connection terminals 9 of the flow rate detection unit 10 are inserted.

  The flow rate detection unit 10 is attached to the dedicated case 20 in such a manner that the upper case body 27 is removed and the flow rate detection unit 10 is first inserted into the mounting hole 21a opened in the front plate 21 of the lower case body 23. Insert from the back side. Then, using a plastic panel mounting jig 11 into which the flow rate detection unit 10 is fitted from the back side, the flange portion 3 a provided at the front end of the housing 3 in the flow rate detection unit 10 and the jig 11. The front plate 21 is sandwiched therebetween, thereby fixing the flow rate detection unit 10 to the lower case body 23.

  In this state, one of the screws 30 fixing the casing 3 to the flow path block body 1 on the back surface of the flow rate detection unit 10 is removed, and a screw hole (not shown) provided in the flow path block body 1 is removed. Z). Then, an upper case body 27 is attached on the lower case body 23 so as to cover the flow rate detection unit 10, and the screw 30 removed from the flow rate detection unit 10 as described above is attached to the outside of the upper case body 27 as shown in FIG. To the screw hole provided in the flow path block body 1. 2, the casing 3 of the flow rate detection unit 10 and the back plate 26 of the upper case body 27 are overlapped between the head of the screw 30 and the flow path block body 1. In addition, they are sandwiched together and fixed to the flow path block body 1.

  Thus, according to the flow rate detection device having the structure in which the flow rate detection unit 10 is fixed to the dedicated case 20 in this way, the flow path block that occupies the main weight of the flow rate detection unit 10 and occupies a large occupied space in the housing 3. Since the special case 20 can be directly fixed to the body 1, the attachment strength can be sufficiently increased. Therefore, even if unintentional stress is applied to the inlet 5 and outlet 6 of the flow rate detection unit 10 from the pipe, the flow rate detection unit 10 has the dedicated case 20 due to insufficient mounting strength of the panel mounting jig 11 described above. There will be no problems that will cause you

  Moreover, the screw that functions essentially only to fix the housing 3 by using the screw hole provided in the flow rate block body 1 as it is to fix the flow rate detection unit 10 and the special case 20. 30 is realized by collectively fixing the dedicated case 20 and the housing 3 to the flow block body 1 by using 30, so that there is an advantage that it is not necessary to make a special change to the flow detection unit 10. In particular, the flow block body 1 is often formed to the minimum necessary size while fully exhibiting its main function, and it is difficult to newly provide another screw hole or the like in the flow block body 1. There are many cases. Therefore, there is a great practical advantage in that the screw holes provided in the flow block body 1 are utilized as they are.

  The present invention is not limited to the embodiment described above. For example, since about 3 to 4 screws 30 for connecting the housing 3 to the flow path block body 1 are usually provided, if one of them is used for fixing to the dedicated case 20, it remains. Since the assembled state of the flow rate detection unit 10 is maintained by the screw 30, no problem occurs. Further, since the screw 30 removed from the flow rate detection unit 10 is screwed into the flow rate detection unit 10 (flow channel block body 1) again, there is no problem in strength. In this case, it is of course possible to use another screw whose screw length is increased by the thickness of the back plate 26 of the dedicated case 20. Needless to say, the shape and size of the dedicated case 20 and its structure can be variously modified. In addition, the present invention can be variously modified and implemented without departing from the scope of the invention.

The disassembled perspective view which shows schematic structure of the flow volume detection apparatus which concerns on one Embodiment of this invention. The principal part cross-section block diagram of the flow volume detection apparatus shown in FIG. The disassembled perspective view which shows schematic structure of the flow volume detection unit for panel mounting | wearing. The figure which shows the attachment structure to the panel of the flow volume detection unit shown in FIG.

Explanation of symbols

1 Channel block body 5 Inlet (connector)
6 Outlet (connector)
7 Flow sensor 10 Flow rate detection unit 20 Dedicated case 23 Lower case body 26 Back plate 27 Upper case body 30 Screw

Claims (2)

A flow path block body in which a predetermined flow path is formed and a flow rate sensor is assembled to the flow path is built into a substantially rectangular parallelepiped panel mounting housing, and the front surface of the panel is mounted when the housing is attached to the panel. A panel-mounted flow rate detection unit provided with an indicator and an operation switch on the front surface portion of the housing exposed to the surface, and provided with an inlet and an outlet of the flow path on the rear surface portion of the housing;
A box-shaped dedicated case for storing the flow rate detection unit and using the flow rate detection unit without being attached to the panel,
A screw hole provided in the flow path block body of the flow rate detection unit for fixing the flow path block body to the housing from the outside of the housing, from the outside of the dedicated case through the housing. The flow rate detection device, wherein the flow rate detection unit is fixed to the dedicated case with a screw to be screwed.   The screw is formed by inserting a through hole formed in the special case into a screw hole that is opened by removing a screw that fixes the flow path block body to the case from the outside of the case. 2. The flow rate detection unit is fixed to the exclusive case by being screwed from the outside of the case and sandwiching the housing and the exclusive case between the head and the flow path block body. The described flow rate detection device.

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