JP4252556B2 - 硬質被膜の除去方法 - Google Patents
硬質被膜の除去方法 Download PDFInfo
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- JP4252556B2 JP4252556B2 JP2005133134A JP2005133134A JP4252556B2 JP 4252556 B2 JP4252556 B2 JP 4252556B2 JP 2005133134 A JP2005133134 A JP 2005133134A JP 2005133134 A JP2005133134 A JP 2005133134A JP 4252556 B2 JP4252556 B2 JP 4252556B2
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- abrasive
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- 238000000576 coating method Methods 0.000 title claims description 74
- 239000011248 coating agent Substances 0.000 title claims description 71
- 238000000034 method Methods 0.000 claims description 36
- 239000000463 material Substances 0.000 claims description 32
- 238000002347 injection Methods 0.000 claims description 21
- 239000007924 injection Substances 0.000 claims description 21
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 20
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 11
- 239000002245 particle Substances 0.000 claims description 10
- -1 TiCrN Inorganic materials 0.000 claims description 7
- 239000000843 powder Substances 0.000 claims description 7
- 238000005507 spraying Methods 0.000 claims description 7
- 229910010037 TiAlN Inorganic materials 0.000 claims description 6
- 238000005520 cutting process Methods 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 238000005422 blasting Methods 0.000 description 20
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 15
- 229910010271 silicon carbide Inorganic materials 0.000 description 14
- 238000012545 processing Methods 0.000 description 13
- 239000003082 abrasive agent Substances 0.000 description 12
- 238000005240 physical vapour deposition Methods 0.000 description 12
- 238000005229 chemical vapour deposition Methods 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 10
- 238000011084 recovery Methods 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 239000000428 dust Substances 0.000 description 6
- 230000005484 gravity Effects 0.000 description 5
- 239000007921 spray Substances 0.000 description 5
- 230000003746 surface roughness Effects 0.000 description 5
- 238000004891 communication Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 229910052580 B4C Inorganic materials 0.000 description 3
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910001315 Tool steel Inorganic materials 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 1
- 229910019912 CrN Inorganic materials 0.000 description 1
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 1
- 229910010169 TiCr Inorganic materials 0.000 description 1
- 229910008322 ZrN Inorganic materials 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910021385 hard carbon Inorganic materials 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
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- Other Surface Treatments For Metallic Materials (AREA)
Description
TiN,TiCN,ZrN,CrN,TiAlN,TiCrN,TiC,W 2 C,Al 2 O 3 の硬質被膜が形成された切削工具,金型及び機械要素である製品の表面に,密度が3g/cm3以下であり,ミクロ硬さが3000kgf/mm2以上であって,前記硬質被膜よりも高硬度である粒度#150〜#3000の研磨材を,噴射速度50〜250m/sec,又は噴射圧力0.2〜0.5MPaで噴射して前記硬質被膜を切削して除去することを特徴とする(請求項1)。
本発明の処理対象となる製品は,表面に硬質の被膜が形成されたものであれば如何なるものであっても対象とすることができ、その材質や構造,用途等は特に限定されないが,母材の材質としては一例として、金属又はセラミック又はこれらの混合体から成る製品を挙げることができ,より具体的には,金型や切削工具等の工具,機械部品等の各種製品を処理対象とすることができる。
本発明の方法は、一例として前述のように製膜不良が生じたり、又は被膜の劣化した被膜を処理対象とし、この処理によって被膜の除去された製品を回収して、これに再度硬質被膜を形成するための前処理として行うものであることから、本発明の方法で使用する研磨材は,硬質被膜を除去可能な高い硬度を有すだけでなく、研磨材の衝突によって被膜を除去する際に,母材を研削して製品の寸法が変更されることを好適に防止できるものとする必要がある。
本発明にあっては,前述する研磨材を噴射速度50m/sec以上又は噴射圧力0.1MPa以上で被処理製品に対して噴射することにより,該被処理製品の表面に形成された硬質被膜を除去するものとしている。
処理対象製品として,PVDにより表面にTiN被膜を形成した高速度工具鋼(SKH57)から成る金型パンチ(直径12mm,長さ100mmの円柱状)を用いて,前記被膜の除去を行った。各実施例及び比較例の加工条件及び結果を下記の表2に示す。
処理対象製品として,PVDにより表面にTiCN被膜を形成した高速度工具鋼(SKH55)から成る金型ファインブランキング(断面40mm×40mm,長さ60mmの四角柱状)を用いて,前記被膜の除去を行った。各実施例及び比較例の加工条件及び結果を下記の表3に示す。
40 ブラストガン
60 ブラスト加工装置
61 キャビネット
63 投入口
65 導管
66 ダストコレクタ
67 排出管
68 ホッパ
69 排風機
70 回収タンク
73 流入口
74 連結管
75 連通管
78 調整器
Claims (3)
- TiN,TiCN,ZrN,CrN,TiAlN,TiCrN,TiC,W 2 C,Al 2 O 3 の硬質被膜が形成された切削工具,金型及び機械要素である製品の表面に,密度が3g/cm3以下であり,ミクロ硬さが3000kgf/mm2以上であって,前記硬質被膜よりも高硬度である粒度#150〜#3000の研磨材を,噴射速度50〜250m/sec,又は噴射圧力0.2〜0.5MPaで噴射して前記硬質被膜を切削して除去することを特徴とする硬質被膜の除去方法。
- 前記硬質被膜と前記研磨材とが,ミクロ硬さで1000kgf/mm2以上の硬度差を有することを特徴とする請求項1記載の硬質被膜の除去方法。
- 前記研磨材が,材質をB4Cの粉体とすることを特徴とする請求項1又は2記載の硬質被膜の除去方法。
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JP2005133134A JP4252556B2 (ja) | 2005-04-28 | 2005-04-28 | 硬質被膜の除去方法 |
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JP2006305694A JP2006305694A (ja) | 2006-11-09 |
JP4252556B2 true JP4252556B2 (ja) | 2009-04-08 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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FR2925378B1 (fr) * | 2007-12-20 | 2012-06-15 | Saint Gobain Ct Recherches | Particules de grenaillage. |
JP6384758B2 (ja) | 2014-09-30 | 2018-09-05 | 新東工業株式会社 | 付着物除去方法 |
WO2018030236A1 (ja) | 2016-08-09 | 2018-02-15 | 新東工業株式会社 | 付着物除去方法 |
CN109564874A (zh) | 2016-08-09 | 2019-04-02 | 新东工业株式会社 | 附着物除去方法 |
CN116367964A (zh) * | 2021-10-28 | 2023-06-30 | 纳米路柏株式会社 | 中间排出硅晶圆表面的积层物的去除方法 |
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