JP4251426B2 - Adhesive and method for producing the same - Google Patents

Adhesive and method for producing the same Download PDF

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Publication number
JP4251426B2
JP4251426B2 JP2001110633A JP2001110633A JP4251426B2 JP 4251426 B2 JP4251426 B2 JP 4251426B2 JP 2001110633 A JP2001110633 A JP 2001110633A JP 2001110633 A JP2001110633 A JP 2001110633A JP 4251426 B2 JP4251426 B2 JP 4251426B2
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Prior art keywords
adhesive
glass
temperature
leak
vacuum
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JP2003226858A (en
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清 山野
康仁 田中
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SFC Co Ltd
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SFC Co Ltd
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Description

【0001】
【発明の属する技術分野】
本発明は、主にガラス部材をガラス、金属およびセラミックス等と接合することができる接着剤に係り、特に300℃以上の耐熱性を有し、かつガス透過性の少ない接着剤およびその製造方法に関するものである。
【0002】
【従来の技術】
従来、ガラスとガラスを貼り合わせた部材は、防音性、断熱性等に優れているため建築用窓ガラス、乗物用窓ガラス、冷凍庫用窓ガラス等に用いられている。また、ガラスと金属板或いはガラスとセラミックスを接着した部材は、チップパッケージ用基板等に多く使用されている。
上記部材の接着は、通常耐熱性が要求されることからエポキシ系高分子有機接着剤、鉛ガラスを含有したフリットやアルミナ、シリカを主成分とした耐熱性無機接着剤が用いられている。
上記した有機接着剤は、250℃以上の高温になると炭化現象が生じ、接着強度の低下、気密性の低下をきたし、絶縁部で用いている場合には絶縁破壊が生じたりして接着初期の接合の機能が低下してしまう場合があった。
一方、無機系接着剤の場合、フリットは400℃以上の高温処理が必要であり、また、アルミナやシリカを主成分としたものは分子と分子の結合に隙間が生じ真空状態を上げていくと接着面から漏れが発生し、200℃以上では望んだ気密状態を維持することが困難であった。
ガラスと金属、ガラスとセラミックス、熱膨張係数の異なるガラスとガラスを接着する場合、熱膨張係数が異なるとガラスが割れたり、接着面が剥離する現象が生じた。
【0003】
【発明が解決しようとする課題】
したがって、本発明の目的はガラスとガラス、熱膨張係数の異なるガラスとガラス、ガラスと金属或いはセラミックスを接着し、300℃以上の高温状態で耐熱性強度が維持でき、かつ300℃以上の高温において気密性を保持することのできる接着剤およびその製造方法を提供するものである。
【0004】
【課題を解決するための手段】
本発明者らは上記した問題点を解決するために鋭意研究を重ねた結果、ガラスとガラス、熱膨張係数の異なるガラスとガラス、ガラスと金属或いはセラミックスの接着剤として少なくともフェニル基を有するシロキサン化合物を用いることにより、熱処理温度200℃〜400℃の接着工程で300℃以上の耐熱性接着皮膜が得られ、かつ気密性に優れた接合面が得られることを知見して本発明に到達した。
【0005】
すなわち、本発明は、
(1)少なくともフェニルヘプタメチルシクロテトラシロキサン及び2,6−シス−ジフェニルヘキサメチルシクロテトラシロキサンを含むシリコンレジンから成ることを特徴とする接着剤。
(2)200℃〜400℃の温度で熱硬化されることを特徴とする請求項1記載の接着剤、
(3) 前記接着剤を製造する工程において、少なくとも一回は、前記接着剤が硬化する温度以下で真空加熱処理を行うことを特徴とする接着剤の製造方法。
(4)真空加熱処理は、230℃以下の温度で行うことを特徴とする請求項3記載の接着剤の製造方法である。
【0006】
【発明の実施の形態】
以下、本発明を詳細に説明する。
本発明で使用する接着剤は、原料としてフェニルヘプタメチルシクロテトラシロキサン、2,6−シス−ジフェニルヘキサメチルシクロテトラシロキサンおよびシリコンレジンを用い、これをトルエン、キシレン等の有機溶媒に溶解し、60〜150℃で2〜5時間加熱し、溶媒を蒸発させながら縮合反応させ、さらに真空チャンバー中で真空排気しながら100Pa〜1Pa範囲の減圧下で脱泡処理し、反応生成物の粘度を100cps〜10000cpsに調整し、ペースト状にする。
【0007】
また、上記のペースト状接着剤をテフロンシート上に平滑に塗布して、厚さ500μmのシート状にした接着剤が最も好ましい例として用いられる。本発明ではフェニルヘプタメチルシクロテトラシロキサンと2,6−シス−ジフェニルヘキサメチルシクロテトラシロキサンを含むシリコンレジンを主成分とするシート状接着剤は他の接着剤に比べて脱泡処理時の脱ガスが少なく、耐熱性に優れている。
【0008】
さらに、上記ペースト状接着剤は、デスパンサー塗布、ディッピング、スプレー及びスクリーン印刷等の公知のコーティング方法によりガラス部材にコーティングし、荷重を加えながら大気中で300℃に加熱して接着剤を硬化させる。上記脱泡処理の際の真空度は、数Pa程度が好ましいが、減圧であれば数千Paでも10〜3Pa以下の高真空下でもよい。また、温度は安全性の面から120℃前後が好ましいが、接着剤が硬化しない温度であればよい。
【0009】
【実施例】
以下、好ましい実施例を挙げて、本発明を更に詳述するが、本発明はこれら実施例に限定されるものではなく、本発明の目的が達成される範囲内での各要素の置換や設計変更、工程順の変更がなされたものをも包含する。
【0010】
【実施例1】
フェニルヘプタメチルシクロテトラシロキサン1gとシリコンレジン59gをトルエン40gに溶解し、100℃に加熱しながらトルエンを蒸発させ、約2時間縮合反応させる。次いで、この反応生成物を図4に示す真空チャンバー6中のホットプレート7上に移し、ホットプレート7を加熱しながら真空排気を行う。真空チャンバー6の真空度が100Pa程度、ホットプレート7の温度140℃で10分間、脱泡処理を行う。次いで、ホットプレート7を冷却しながら雰囲気を大気に戻し、粘度数百cpsのペースト状接着剤を得た。この反応生成物を粘度約200cpsに調整し、本発明の接着剤を得た。
【0011】
【実施例2】
フェニルヘプタメチルシクロテトラシロキサン0.1gと2,6−シス−ジフェニルヘキサメチルシクロテトラシロキサン0.1g及びシリコンレジン59.8gをトルエン40gに溶解し、120℃に加熱しながらトルエンを蒸発させ、約3時間縮合反応させる。次いで、この反応生成物を図4に示す真空チャンバー6中のホットプレート7上に移し、ホットプレート7を加熱しながら真空排気を行う。真空チャンバー6の真空度が1Pa程度、ホットプレート7の温度140℃で60分間、脱泡処理を行う。次いで、ホットプレート7を冷却しながら雰囲気を大気に戻し、粘度数百cpsのペースト状接着剤を得た。このペースト状接着剤をテフロンシート上に平滑に塗布し、接着剤を冷却し、室温に戻して厚さ500μmのシート状接着剤を得た。
【0012】
【実施例3】
図2に示すように、被着材として厚さ2.8mm、30mm角のφ3mmの穴の開いた青板ガラス1と厚さ2.8mm、30mm角の青板ガラス2を厚さ2.8mmで外寸25mm、幅3mmの青板ガラス枠3を用いて接着試験用の試料を作成した。作成は次の手順で行った。接着剤として実施例1で得たペースト状の接着剤を用いた。
まず、実施例1で得た接着剤4を青板ガラス枠3の上面に周辺を120℃に加熱したディスペンサー5を用いて該接着剤4を軟化させて塗布し、穴の開いた青板ガラス1と青板ガラス枠3とを重ね合わせ仮接着させる。次に、接着剤4を仮接着した青板ガラス枠3青板ガラスをベーク炉に入れ、1kgの重りを載せ、300℃まで加熱し、接着剤を硬化させ、接着させる。冷却後、同様の工程で青板ガラス枠3の上面に周辺を120℃に加熱したディスペンサー5を用いて接着剤4を軟化させて塗布し、青板ガラス2を接着し、漏洩試験用試料として真空排気可能なチャンバー8を作成した。
漏洩試験用試料であるチャンバー8を室温にてヘリウムリークディテクター(日電アネルバ社製品)に接続し、ヘリウムガスをチャンバー8周辺に吹きかけてリークチェックした結果、検出限界以下の真空気密性が確認できた。
さらにこの漏洩試験試料を300℃まで加熱した後、再び室温にてリークチェックした結果、300℃加熱前と同様に検出限界以下の真空気密性が確認でき、300℃においても優れていることが確認された。
【0013】
【実施例4】
被着材として、厚さ2.8mm、30mm角でφ3mmの穴の開いた青板ガラスと厚さ2mm、30mm角のアルミニウム製金属シート、厚さ1mm、外寸20mm、幅3mmのアルミナ製セラミックの枠を用い、接着剤として実施例2で得たシート状接着剤を約1mmに裁断したものを接着剤として使用し、重りの代わりにクリップを用いた以外は実施例3と同様にして漏洩試験用試料を作成した。
この漏洩試験用試料を実施例3と同様の方法で室温にてヘリウムリークディテクターでリークチェックしたところ検出限界以下の真空気密性が確認できた。
さらにこの漏洩試験用試料を350℃まで加熱したが、試料は割れることはなかった。再びリークチェックしたところ、350℃加熱前と全く変わらない検出限界以下の真空気密性が確認できた。この結果、青板ガラスと熱膨張係数の異なる、アルミナ製セラミックス及びAl製金属シートとの接着性にもすぐれているものであった。
【0014】
【比較例1】
実施例4と同様の漏洩試験用試料を作成した。但し、本比較例1においては、接着剤としてガラスフリットを用い、温度410℃で接着形成する工程を行った。
得られた漏洩試験用試料を実施例1と同様の方法で室温にてヘリウムリークディテクターでリークチェックしたところ検出限界以下の真空気密性が確認できた。次いで、この試料をヘリウムリークディテクターに接続した状態で350℃まで加熱を試みたが、340℃付近で大きなリークが発生した。さらに室温まで冷却してもリークはなくならず、350℃における真空気密性は満足されるものではなかった。
【0015】
【比較例2】
実施例1と同様の漏洩試験用試料を作成した。但し、本比較例2においては、接着剤としてポリスルホン系接着剤(商品名;ステイスティック301 テクノアルファ(株)社製品)を用いた。ディスペンサー塗布法で任意の形状にガラス部材にコーティングを行い脱泡し、150℃で溶剤を蒸発させた後、加熱処理温度300℃で作成した。
実施例1と同様の方法で室温にてヘリウムリークディテクターでリークチェックしたところ検出限界以下の真空気密性が確認できた。
さらに、この試料をヘリウムリークディテクターに接続した状態で350℃まで加熱を試みたが、300℃付近で大きなリークが発生した。室温まで冷却してもこのリークはなくならず、350℃における真空気密性は満足されるものでなかった。
【0016】
【発明の効果】
本発明の接着剤は、熱膨張係数の異なるガラスとガラス、ガラスと金属及びガラスとセラミックス等の300℃以上の高温における接着性に極めて優れている。また、350℃の高温においても気密漏洩性に優れているため、高温に曝される気密性部材としても有用である。
【0017】
【図面の簡単な説明】
【図1】試験用チャンバーの一例を示す斜視図である。
【図2】図1におけるA−A断面図である。
【図3】ディスペンサーによる接着剤の塗布状態を示す平面図である。
【図4】真空チャンバーにおける脱泡、接着状態を示す断面図である。
【図5】実施例1で得た漏洩試験用チャンバーのリークディテクター試験状態を示す断面図である。
【符号の説明】
1 穴の開いた青板ガラス
2 青板ガラス
3 青板ガラス枠
4 接着剤
5 ディスペンサー
6 真空チャンバー
7 ホットプレート
8 漏洩試験用チャンバー
[0001]
BACKGROUND OF THE INVENTION
The present invention mainly relates to an adhesive capable of bonding a glass member to glass, metal, ceramics, and the like, and more particularly to an adhesive having a heat resistance of 300 ° C. or higher and low gas permeability and a method for manufacturing the same. Is.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, glass and glass-bonded members are excellent in soundproofing, heat insulation, and the like, and thus are used for architectural window glass, vehicle window glass, freezer window glass, and the like. Further, a member obtained by bonding glass and a metal plate or glass and ceramics is often used for a chip package substrate or the like.
Since adhesion of the above members usually requires heat resistance, an epoxy polymer organic adhesive, a frit containing lead glass, alumina, and a heat resistant inorganic adhesive mainly composed of silica are used.
The above-mentioned organic adhesive causes a carbonization phenomenon at a high temperature of 250 ° C. or higher, resulting in a decrease in adhesive strength and airtightness. In some cases, the bonding function is degraded.
On the other hand, in the case of an inorganic adhesive, the frit needs to be treated at a high temperature of 400 ° C. or higher, and when the main component is alumina or silica, a gap is generated between the molecules and the vacuum state is increased. Leakage occurred from the bonding surface, and it was difficult to maintain the desired airtight state at 200 ° C. or higher.
When bonding glass and glass, glass and metal, glass and ceramics, or glass having different thermal expansion coefficients, if the thermal expansion coefficients are different, the glass is broken or the adhesion surface peels off.
[0003]
[Problems to be solved by the invention]
Therefore, the object of the present invention is to bond glass and glass, glass and glass having different thermal expansion coefficients, glass and metal or ceramics, maintain heat resistance strength at a high temperature of 300 ° C. or higher, and at a high temperature of 300 ° C. or higher. An adhesive capable of maintaining airtightness and a method for producing the same are provided.
[0004]
[Means for Solving the Problems]
As a result of intensive studies to solve the above problems, the present inventors have found that siloxane compounds having at least a phenyl group as an adhesive between glass and glass, glass and glass having different thermal expansion coefficients, glass and metal, or ceramics. It was found that a heat-resistant adhesive film having a heat treatment temperature of 200 ° C. to 400 ° C. and a heat-resistant adhesive film having a temperature of 300 ° C. or higher can be obtained in a bonding process at a heat treatment temperature of 200 ° C. to 400 ° C.
[0005]
That is, the present invention
(1) An adhesive comprising a silicon resin containing at least phenylheptamethylcyclotetrasiloxane and 2,6-cis-diphenylhexamethylcyclotetrasiloxane.
(2) The adhesive according to claim 1, which is heat-cured at a temperature of 200 ° C to 400 ° C.
(3) In the process of manufacturing the adhesive, at least once, a vacuum heat treatment is performed at a temperature equal to or lower than a temperature at which the adhesive is cured.
(4) The method for producing an adhesive according to claim 3, wherein the vacuum heat treatment is performed at a temperature of 230 ° C. or lower.
[0006]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in detail.
The adhesive used in the present invention uses phenylheptamethylcyclotetrasiloxane, 2,6-cis-diphenylhexamethylcyclotetrasiloxane, and silicon resin as raw materials, dissolved in an organic solvent such as toluene and xylene, The mixture is heated at ˜150 ° C. for 2 to 5 hours to cause condensation reaction while evaporating the solvent, and further subjected to defoaming treatment under reduced pressure in the range of 100 Pa to 1 Pa while evacuating in a vacuum chamber. Adjust to 10000 cps and paste.
[0007]
Moreover, the adhesive agent which apply | coated the said paste-form adhesive smoothly on the Teflon sheet | seat, and made it the sheet form of thickness 500 micrometers is used as a most preferable example. In the present invention, the sheet-like adhesive mainly composed of silicon resin containing phenylheptamethylcyclotetrasiloxane and 2,6-cis-diphenylhexamethylcyclotetrasiloxane is degassed during the defoaming treatment as compared with other adhesives. There is little, and heat resistance is excellent.
[0008]
Furthermore, the paste adhesive is coated on a glass member by a known coating method such as despancer application, dipping, spraying, and screen printing, and is heated to 300 ° C. in the atmosphere while applying a load to cure the adhesive. . The degree of vacuum during the defoaming treatment is preferably about several Pa, but may be several thousand Pa or high vacuum of 10 to 3 Pa or less as long as the pressure is reduced. The temperature is preferably about 120 ° C. from the viewpoint of safety, but may be any temperature at which the adhesive does not cure.
[0009]
【Example】
Hereinafter, the present invention will be described in more detail with reference to preferred examples. However, the present invention is not limited to these examples, and the substitution and design of each element within a range in which the object of the present invention is achieved. This includes changes and changes in process order.
[0010]
[Example 1]
1 g of phenylheptamethylcyclotetrasiloxane and 59 g of silicon resin are dissolved in 40 g of toluene, and the toluene is evaporated while heating to 100 ° C., followed by a condensation reaction for about 2 hours. Next, this reaction product is transferred onto a hot plate 7 in a vacuum chamber 6 shown in FIG. 4 and evacuated while the hot plate 7 is heated. Defoaming is performed for 10 minutes at a vacuum degree of about 100 Pa in the vacuum chamber 6 and a temperature of 140 ° C. of the hot plate 7. Next, while the hot plate 7 was cooled, the atmosphere was returned to the atmosphere to obtain a paste adhesive having a viscosity of several hundred cps. The reaction product was adjusted to a viscosity of about 200 cps to obtain the adhesive of the present invention.
[0011]
[Example 2]
0.1 g of phenylheptamethylcyclotetrasiloxane, 0.1 g of 2,6-cis-diphenylhexamethylcyclotetrasiloxane and 59.8 g of silicon resin are dissolved in 40 g of toluene, and the toluene is evaporated while heating to 120 ° C. The condensation reaction is performed for 3 hours. Next, this reaction product is transferred onto a hot plate 7 in a vacuum chamber 6 shown in FIG. 4 and evacuated while the hot plate 7 is heated. Defoaming is performed for 60 minutes at a vacuum degree of about 1 Pa in the vacuum chamber 6 and a temperature of 140 ° C. of the hot plate 7. Next, while the hot plate 7 was cooled, the atmosphere was returned to the atmosphere to obtain a paste adhesive having a viscosity of several hundred cps. This paste-like adhesive was applied smoothly on a Teflon sheet, the adhesive was cooled, and returned to room temperature to obtain a sheet-like adhesive having a thickness of 500 μm.
[0012]
[Example 3]
As shown in FIG. 2, a blue plate glass 1 having a 2.8 mm thickness and a φ3 mm hole of 30 mm square and a blue plate glass 2 having a thickness of 2.8 mm and a 30 mm square as an adherend are provided with a thickness of 2.8 mm. A sample for adhesion test was prepared using a soda glass frame 3 having a size of 25 mm and a width of 3 mm. The creation was performed according to the following procedure. As the adhesive, the paste-like adhesive obtained in Example 1 was used.
First, the adhesive 4 obtained in Example 1 was applied to the upper surface of the soda glass frame 3 by softening and applying the adhesive 4 using a dispenser 5 whose periphery was heated to 120 ° C. The blue plate glass frame 3 is overlapped and temporarily bonded. Next, the blue plate glass frame 3 to which the adhesive 4 is temporarily bonded is placed in a baking furnace, a 1 kg weight is placed on it, heated to 300 ° C., and the adhesive is cured and bonded. After cooling, the adhesive 4 is softened and applied to the upper surface of the soda glass frame 3 using a dispenser 5 heated to 120 ° C. in the same process, the soda glass 2 is adhered, and evacuated as a sample for a leak test. A possible chamber 8 was created.
As a result of leak check by connecting the chamber 8 as a leakage test sample to a helium leak detector (Nippon Anelva product) at room temperature and blowing helium gas around the chamber 8, a vacuum tightness below the detection limit was confirmed. .
Furthermore, after this leak test sample was heated to 300 ° C., a leak check was performed again at room temperature. As a result, vacuum tightness below the detection limit could be confirmed as before 300 ° C. heating, and it was confirmed that it was excellent at 300 ° C. It was done.
[0013]
[Example 4]
As the adherend, a 2.8 mm thick, 30 mm square blue plate glass with a hole of φ3 mm and a 2 mm thick, 30 mm square aluminum metal sheet, a 1 mm thick, 20 mm outer dimension, 3 mm wide ceramic ceramic made of alumina. Leak test in the same manner as in Example 3 except that a frame was used and the sheet-like adhesive obtained in Example 2 was cut to about 1 mm as the adhesive, and a clip was used instead of the weight. A sample was prepared.
When this leak test sample was leak checked with a helium leak detector at room temperature in the same manner as in Example 3, a vacuum tightness below the detection limit could be confirmed.
Further, this leakage test sample was heated to 350 ° C., but the sample was not cracked. When the leak check was performed again, it was confirmed that the vacuum tightness was below the detection limit, which was not different from that before heating at 350 ° C. As a result, the adhesion between the ceramic sheet made of alumina and the metal sheet made of Al, which has a different thermal expansion coefficient from that of the blue plate glass, was excellent.
[0014]
[Comparative Example 1]
A leakage test sample similar to that in Example 4 was prepared. However, in this comparative example 1, a glass frit was used as an adhesive, and a process of bonding at a temperature of 410 ° C. was performed.
When the obtained leak test sample was leak checked with a helium leak detector at room temperature in the same manner as in Example 1, a vacuum tightness below the detection limit could be confirmed. Next, the sample was heated to 350 ° C. while connected to a helium leak detector, but a large leak occurred at around 340 ° C. Further, even when cooled to room temperature, the leak did not disappear and the vacuum tightness at 350 ° C. was not satisfactory.
[0015]
[Comparative Example 2]
A leakage test sample similar to that in Example 1 was prepared. However, in the present comparative example 2, a polysulfone adhesive (trade name; product of Staystick 301 Techno Alpha Co., Ltd.) was used as an adhesive. The glass member was coated in an arbitrary shape by a dispenser coating method, defoamed, the solvent was evaporated at 150 ° C., and then a heat treatment temperature of 300 ° C. was used.
When a leak check was performed with a helium leak detector at room temperature in the same manner as in Example 1, vacuum tightness below the detection limit could be confirmed.
Further, heating was attempted up to 350 ° C. with the sample connected to a helium leak detector, but a large leak occurred at around 300 ° C. Even when cooled to room temperature, this leak did not disappear and the vacuum tightness at 350 ° C. was not satisfactory.
[0016]
【The invention's effect】
The adhesive of the present invention is extremely excellent in adhesion at a high temperature of 300 ° C. or higher, such as glass and glass, glass and metal, and glass and ceramics having different thermal expansion coefficients. Moreover, since it is excellent in airtight leakage even at a high temperature of 350 ° C., it is also useful as an airtight member exposed to high temperatures.
[0017]
[Brief description of the drawings]
FIG. 1 is a perspective view showing an example of a test chamber.
FIG. 2 is a cross-sectional view taken along the line AA in FIG.
FIG. 3 is a plan view showing an application state of an adhesive by a dispenser.
FIG. 4 is a cross-sectional view showing a defoamed and bonded state in a vacuum chamber.
5 is a cross-sectional view showing a leak detector test state of the leak test chamber obtained in Example 1. FIG.
[Explanation of symbols]
1 Blue plate glass with holes 2 Blue plate glass 3 Blue plate glass frame 4 Adhesive 5 Dispenser 6 Vacuum chamber 7 Hot plate 8 Leak test chamber

Claims (6)

少なくともフェニルヘプタメチルシクロテトラシロキサン2,6−シス−ジフェニルヘキサメチルシクロテトラシロキサン及びシリコンレジンを含む混合物を加熱して成ることを特徴とする接着剤。An adhesive comprising heating a mixture containing at least phenylheptamethylcyclotetrasiloxane , 2,6-cis-diphenylhexamethylcyclotetrasiloxane, and silicon resin. 加熱する温度が60〜150℃であることを特徴とする請求項1記載の接着剤。The adhesive according to claim 1, wherein the heating temperature is 60 to 150 ° C. ペースト状であることを特徴とする請求項1又は2記載の接着剤。The adhesive according to claim 1 or 2, which is in a paste form. 200℃〜400℃の温度で熱硬化されるとを特徴とする請求項1〜3のいずれかに記載の接着剤。The adhesive according to any one of claims 1-3, characterized that you are thermally cured at a temperature of 200 ° C. to 400 ° C.. 請求項1〜4のいずれかに記載の接着剤を製造する工程において、少なくともフェニルヘプタメチルシクロテトラシロキサン、2,6−シス−ジフェニルヘキサメチルシクロテトラシロキサン及びシリコンレジンを含む混合物を加熱した後、少なくとも一回は、前記接着剤が硬化する温度以下で真空加熱処理を行うことを特徴とする接着剤の製造方法。 In the step of producing the adhesive according to any one of claims 1 to 4, after heating a mixture containing at least phenylheptamethylcyclotetrasiloxane, 2,6-cis-diphenylhexamethylcyclotetrasiloxane and silicon resin, At least once, the manufacturing method of the adhesive characterized by performing a vacuum heat treatment below the temperature which the said adhesive hardens | cures. 真空加熱処理は、230℃以下の温度で行うことを特徴とする請求項記載の接着の製造方法。Vacuum heat treatment method of the adhesive according to claim 5, characterized in that at 230 ° C. or lower.
JP2001110633A 2001-03-05 2001-03-05 Adhesive and method for producing the same Expired - Fee Related JP4251426B2 (en)

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JP2007009144A (en) * 2005-07-04 2007-01-18 Sfc:Kk Adhesive and its manufacturing method
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