JP4243996B2 - Turbo vacuum pump and semiconductor manufacturing apparatus equipped with the turbo vacuum pump - Google Patents

Description

  The present invention relates to a momentum transfer type turbo vacuum pump for exhausting gas, and more particularly to a turbo vacuum pump suitable for an application for exhausting a corrosive process gas and an application for exhausting a gas containing a reaction product. The present invention also relates to a semiconductor manufacturing apparatus provided with such a turbo vacuum pump.

  As an example of a conventional turbo vacuum pump, for example, a turbo vacuum pump described in Patent Document 1 is shown in FIG. The turbo vacuum pump shown in FIG. 7 includes a housing 11 having an intake port 11A and an exhaust port 11B, a rotating shaft 12 rotatably supported in the housing 11 via a bearing 16, and an exhaust port from the intake port 11A side. A centrifugal compression pump stage 13 and a circumferential flow compression pump stage 14 are sequentially provided in the housing 11 while reaching the 11B side. The centrifugal compression pump stage 13 is configured by alternately arranging open impellers 13A attached to the rotary shaft 12 and fixed disks 13B in parallel. The circumferential flow compression pump stage 14 is configured by alternately arranging impellers 14A attached to the rotary shaft 12 and fixed disks 14B in parallel. The rotating shaft 12 is driven to rotate by a motor 15 connected to the rotating shaft 12.

  When the corrosive gas is exhausted by the conventional turbo vacuum pump described above, the casing 11, the rotary shaft 12, and the pump stages 13 and 14 are required to have corrosion resistance. Further, when exhausting the gas containing the reaction product, it is necessary to increase the temperature of the exhaust passage in order to prevent the reaction product from being precipitated by the pump stages 13 and 14. Therefore, it is desirable that the casing 11, the rotating shaft 12, and the pump stages 13 and 14 are made of a material having corrosion resistance and a low thermal expansion coefficient with little dimensional change with respect to temperature change. Further, when the rotary shaft 12 is made of a material having high strength and high Young's modulus, it is easy to rotate at a high speed for improving the exhaust performance. Further, the rotating shaft 12 is preferably made of a ferromagnetic material in order to improve the output characteristics of the motor 15.

  However, since there are very few materials that have the characteristics of corrosion resistance, low thermal expansion coefficient, high strength / high Young's modulus, and ferromagnetism, the rotating shaft 12 is made of a material depending on the application or at the expense of any of the characteristics. I had to choose. For example, a frequently used material is an Fe—Ni alloy such as Ni-resist cast iron. This Fe—Ni-based alloy has corrosion resistance, a low coefficient of thermal expansion, and ferromagnetic properties, but its Young's modulus is about 130 GPa, which is lower than 206 GPa of general steel materials. Therefore, since the critical speed of the rotor is lowered, it is difficult to achieve high speed rotation. Therefore, the rotational speed is lowered and the exhaust performance of the pump is sacrificed. Or because the shaft diameter was increased to achieve high speed rotation, the reduction in size and weight of the pump was sacrificed.

  Next, an example of a conventional semiconductor manufacturing apparatus using a vacuum pump is shown in FIG. As shown in FIG. 8, in a conventional semiconductor manufacturing apparatus 81, a vacuum exhaust system is configured by connecting a vacuum chamber 82 to a vacuum pump 83 installed outside the apparatus by a pipe 84. In such a configuration, the conductance of the pipe 84 often becomes a problem when a large amount of gas is allowed to flow during the manufacturing process or when it is desired to reduce the chamber pressure. As measures against this problem, the pipe 84 has a large diameter and the vacuum pump 83 has been enlarged. However, the increase in initial cost and the installation space have been problems.

  Furthermore, a conductance variable valve 85 is provided in the middle of the pipe 84, and the opening of the conductance variable valve 85 is adjusted to set the pressure of the vacuum chamber 82 to a desired value during the manufacturing process. However, the installation of the conductance variable valve 85 has a problem of reducing the conductance and complicating the exhaust system.

Japanese Patent No. 2680156

The present invention has been made in view of the above points, and in a turbo vacuum pump that exhausts a gas having corrosion resistance and a reaction product, the rotary shaft has corrosion resistance, a low thermal expansion coefficient, high strength, An object of the present invention is to provide a turbo vacuum pump that can be continuously operated for a long period of time by imparting high Young's modulus and ferromagnetic properties, and can be reduced in size and weight by rotating at high speed.
Another object of the present invention is to provide a semiconductor manufacturing apparatus in which the turbo vacuum pump is disposed in the vicinity of a vacuum chamber.

In order to solve the above problems, the turbo vacuum pump of the present invention is provided with a pump part composed of a moving blade and a stationary blade in a casing provided with an intake port, and rotates the moving blade on one axial side of the pump unit. In a turbo vacuum pump in which a bearing and a motor to be supported are arranged, the rotating shaft has at least one shaft fastening portion, and the shaft fastening portion has a shaft fastening flange and a shaft fastening bolt for fastening the shaft fastening flange. And connecting the first rotating shaft to which the moving blade is attached and at least the second rotating shaft to which the rotor of the motor is attached at the shaft fastening portion to form a rotating shaft, and the moving blade and the axial fitting Ring-shaped members having joint portions are alternately laminated in the axial direction, the moving blade and the ring-shaped member are fixed by the fitting portion, and the inner diameter fitting portion of the ring-shaped member and the first Fit the outer periphery of the rotating shaft The ring-shaped member and the first rotating shaft are fixed, and a clearance is provided between an outer peripheral portion of the first rotating shaft and an inner peripheral portion of the moving blade .

  According to the present invention, the rotary shaft is divided into a first part (first rotary shaft) for attaching the moving blade and at least a second part (second rotary shaft) for attaching the rotor of the motor, A material having the most necessary characteristics for each portion can be selected. For this reason, it is possible to construct a rotating shaft that has the characteristics of corrosion resistance, low thermal expansion coefficient, high strength / high Young's modulus, and ferromagnetism.

For example, since the first rotating shaft is installed in a pump part that forms the exhaust passage, the first rotating shaft is made of a material having corrosion resistance and a low thermal expansion coefficient. Thereby, even if a pump exhausts corrosive gas, a rotating shaft is not damaged. In addition, when exhausting the gas containing the reaction product, the pump portion is kept at a high temperature to suppress product precipitation inside the pump, but the first rotating shaft is made of a material having a low thermal expansion coefficient. Dimensional change with respect to For this reason, since the dimensional change of the clearance between the moving blade and the stationary blade that greatly affects the performance of the pump can be suppressed as much as possible, the exhaust performance can be stabilized regardless of the temperature change. On the other hand, the second rotating shaft is made of a high-strength / high Young's modulus material to dominate the shaft vibration characteristics of the rotating body, and is made of a ferromagnetic material to improve the output characteristics of the motor. If the first rotating shaft and the second rotating shaft are fastened to form the rotating shaft of the pump, the pump portion has corrosion resistance and can be operated in a high temperature state, and the shaft vibration characteristics are A rotating shaft that is favorable and can improve the motor output can be configured. Thermal expansion coefficient of the first rotary shaft is desirably 5 × ^{10 -6} ℃ ^-1 or less, also the Young's modulus of the second rotating shaft have to desirable than 200 GPa.

In the vacuum pump of the present invention, a non-contact sealing mechanism is disposed in the vicinity of the fastening portion of the rotary shaft so that the exhaust gas existing on the first rotary shaft side does not enter the second rotary shaft side. It is characterized by that.
According to the above configuration, since the non-contact seal mechanism is provided in the vicinity of the fastening portion of the rotating shaft, the surrounding gas environment can be separated at each rotating shaft portion. This prevents the second rotating shaft from coming into contact with the corrosive gas exhausted by the pump or the gas containing the reaction product, so that it is not necessary to be made of a material having corrosion resistance or low thermal expansion. Materials with strength, high Young's modulus, and high magnetic properties can be selected. Thereby, the axial vibration characteristic of the rotating body is improved and high-speed rotation is facilitated. Moreover, since the output characteristics of the motor can be improved, the motor can be reduced in size and energy can be saved. Therefore, a turbo vacuum pump that is reduced in size and weight can be provided.

  Further, if a gas purge port capable of introducing an inert gas is provided on the second rotating shaft side in order to further enhance the function of the non-contact sealing mechanism, the first rotating shaft is driven from the second rotating shaft side during the pump operation. Since the flow of the inert gas to the side can be easily generated, the environment can be actively separated, which is preferable.

  The vacuum pump of the present invention is characterized in that a heat insulating material for providing a heat drop is arranged in the vicinity of the fastening portion of the rotating shaft on the first rotating shaft side and the second rotating shaft side. Thereby, the heat influence to the motor side from the pump part heated up can be prevented.

  Further, it is preferable that the turbo vacuum pump of the present invention is arranged in the vicinity of the vacuum chamber of a semiconductor manufacturing apparatus having a vacuum chamber, and an exhaust system in which an exhaust port of the turbo vacuum pump and a back pump are connected by piping is preferable. .

  Further, in the exhaust system, the exhaust system can be simply configured by changing the rotational speed of the turbo vacuum pump so that the pressure of the vacuum chamber can be changed to each set value.

According to the present invention, even when a gas having corrosion resistance or a gas containing a reaction product is exhausted, the rotary shaft has corrosion resistance, low thermal expansion coefficient, high strength / high Young's modulus, and ferromagnetic properties. The turbo vacuum pump that can be continuously operated for a long period of time and can be reduced in size and weight by rotating at a high speed can be obtained.
In addition, a semiconductor manufacturing apparatus in which a turbo vacuum pump is disposed in the vicinity of the vacuum chamber can be configured.

  An embodiment of a turbo vacuum pump according to the present invention will be described with reference to the drawings. FIG. 1 is a diagram showing an overall configuration of a turbo vacuum pump according to an embodiment of the present invention. As shown in FIG. 1, the turbo vacuum pump of the present invention includes a housing 21 having an intake port 21A and an exhaust port 21B, and a plurality of centrifugal drag blades 22-1, 22-2, 22- provided inside the housing 21. 3, 22-4, 22-5 (hereinafter referred to as “centrifugal drag wing 22 as appropriate”) and a plurality of fixed wings 23-1, 23-2, 23-3, 23-4, 23 provided inside the housing 21. -5 (hereinafter referred to as the fixed wing 23 as appropriate).

  FIG. 2 is a view showing the centrifugal drag wing 22, FIG. 2A is a front view of the centrifugal drag wing 22, and FIG. 2B is a cross-sectional view of the centrifugal drag wing 22. As shown in FIGS. 2 (a) and 2 (b), the centrifugal drag wing 22 includes a plurality of spiral blades 24 that extend spirally backward in the rotational direction, and a circle to which the spiral blades 24 are fixed. And a plate-like base 25. As shown in FIG. 2A, when the rotation direction of the centrifugal drag blade 22 is clockwise, the spiral blade 24 is counterclockwise from the inner diameter side to the outer diameter side of the centrifugal drag blade 22. It extends in a spiral shape.

  FIG. 3 is a view showing the fixed wing 23, FIG. 3A is a front view of the fixed wing 23, and FIG. 3B is a cross-sectional view of the fixed wing 23. As shown in FIGS. 3 (a) and 3 (b), the fixed blade 23 is provided with a spiral guide 26 extending spirally backward in the moving blade rotation direction on one side, and is opposite to the axial direction. On the side, it has a flat surface 27. As shown in FIG. 3A, when the rotating blade rotating direction is a clockwise direction, the spiral guide 26 spirals in a counterclockwise direction from the inner diameter side to the outer diameter side of the fixed blade 23. It extends.

  The surface of the centrifugal drag blade 22-1 on which the spiral blade 24 is formed is opposed to the surface of the fixed blade 23-1 with an interval of several tens to several hundreds of micrometers. When the centrifugal drag wing 22-1 rotates, an interaction with the fixed wing 23-1, that is, a centrifugal action on the gas and a drag action due to the viscosity of the gas, from the inner diameter side of the centrifugal drag wing 22-1. The gas is compressed and exhausted to the outer diameter side. The gas compressed to the outer diameter side of the centrifugal drag blade 22-1 then flows into the space in which the spiral guide 26 of the fixed blade 23-2 is provided, and the fixed blade 23-2 in which the spiral guide 26 is formed. The gas is compressed and exhausted from the outer diameter side to the inner diameter side by a drag action due to the gas viscosity between the surface of the centrifugal drag vane 22-1 and the surface of the base 25 of the centrifugal drag blade 22-1.

  By sequentially repeating the exhaust action with the multistage centrifugal drag blade 22 and the fixed blade 23, the gas compression / exhaust performance can be set high. The configuration example of the moving blade and the stationary blade is not limited to the present embodiment, and an optimum blade type (for example, turbine, centrifugal drag, vortex flow, etc.) is considered in consideration of required exhaust performance, blade size, and the like. Of course, they may be used in appropriate combinations, and may be multistaged to an appropriate number of stages.

  The centrifugal drag blades 22 are sequentially stacked on the first rotating shaft 28 via ring-shaped members 29 between the blades. Then, the blade drag 30 is attached to the tip of the first rotating shaft 28 on the inlet 21A side, and the fixing bolt 31 is screwed to the first rotating shaft 28, whereby the centrifugal drag blade 22 is moved to the first rotating shaft 28. It is fixed to. On the other hand, a shaft fastening flange 32 is provided at the opposite shaft end of the first rotating shaft 28, and this shaft fastening flange 32 is fastened by a second rotating shaft 34 and a shaft fastening bolt 33. Thereby, the 1st rotating shaft 28 and the 2nd rotating shaft 34 are connected integrally.

  A motor rotor (rotor) 35a is fixed to the second rotary shaft 34 in the vicinity of the shaft center, and a motor stator 35b is provided so as to surround the motor rotor 35a. The motor stator 35 b is fixed to the housing 54. A motor rotor 35a fixed to the second rotating shaft 34 and a motor stator 35b fixed to the housing 54 constitute a motor 35. The motor 35 generates rotational torque to generate the first and The centrifugal drag wing 22 is rotated via the second rotating shafts 28 and 34. On both sides of the motor 35, upper and lower radial magnetic bearings 36 and 37 are disposed, and are supported rotatably in the radial direction of the rotor. An axial magnetic bearing 38 is disposed between the motor 35 and the lower radial magnetic bearing 37, and is supported so as to be rotatable with respect to the axial direction of the rotor. Note that emergency bearings 52 and 53 are installed to support the rotor when the magnetic bearings 36 to 38 do not operate.

  Here, since the first rotating shaft 28 is disposed in the same space as the exhaust flow path formed by the centrifugal drag blade 22 and the fixed blade 23, the material is not affected by the gas exhausted by the pump. It is desirable to comprise. For example, when exhausting corrosive gas, it is necessary to be comprised with the material which has corrosion resistance with respect to the corrosive gas. In addition, when exhausting the gas containing the reaction product, heating is generally performed to prevent the reaction product from being deposited inside the pump, so it is necessary to have heat resistance to the heating temperature. .

  Further, in order to ensure the pumping performance of the pump, the clearance between the centrifugal drag blade 22 and the fixed blade 23 needs to be operated with a narrow clearance of several tens to several hundreds μm as described above. When the exhaust passage is heated to prevent the precipitation of substances, it is desirable that the dimensional change with respect to the temperature change is as small as possible. That is, by suppressing the dimensional change, the clearance can be made as narrow as possible, the pump performance can be improved, and the stable exhaust performance can be exhibited regardless of the temperature change.

  On the other hand, the second rotating shaft 34 is provided with a motor 35 and magnetic bearings 36 to 38. Since the second rotating shaft 34 dominates the shaft vibration characteristics of the rotor, it is made of a high strength, high Young's modulus material. It is desirable to configure. In order to improve the output characteristics of the motor and the magnetic bearing, it is more preferable that the second rotating shaft 34 is made of a ferromagnetic material.

As described above, the required characteristics are different between the first rotating shaft 28 installed in the exhaust passage and the second rotating shaft 34 that includes a motor and a bearing and supports and rotationally drives the entire rotor. Therefore, the rotary shaft is separated, the centrifugal drag vane 22 is fixed to the first rotary shaft 28 to form an exhaust flow path, and the first rotary shaft 28 is overhanged (cantilevered). A shaft fastening flange 32 provided at the shaft end of the shaft 28 was used to fasten the shaft with the second rotating shaft 34, and a motor 35 and magnetic bearings 36 to 38 were disposed on the second rotating shaft 34 to constitute a rotor. Thereby, for the first rotary shaft 28, a material required as a rotary shaft installed in the exhaust passage, that is, a material having characteristics of corrosion resistance, heat resistance, low linear expansion, and low density can be selected. A material having high strength and high Young's modulus and ferromagnetism can be selected for the second rotating shaft. That is, considering the different characteristics required for the first rotating shaft 28 and the second rotating shaft 34, the materials of the first rotating shaft 28 and the second rotating shaft 34 can be individually selected. For example, the first rotating shaft 28 is preferably made of Fe-Ni alloy such as invar, Ni-resist cast iron, ceramics, etc., and the linear expansion coefficient of these materials is 5 × 10 ⁻⁶ ° C. ⁻¹ or less. The second rotating shaft 34 is preferably martensitic stainless steel and has a Young's modulus of about 206 GPa.

  Further, the fixing bolt 31 is given a tightening torque so that a frictional force corresponding to the rotational torque can be obtained at the axial contact surfaces of the centrifugal drag blades 22 and the first rotary shaft 28 and the ring-shaped member 29. Is done. In order to prevent the fastening force of the fixing bolt 31 from changing due to a temperature change during the operation of the pump, the linear expansion coefficient of the first rotating shaft 28, each centrifugal drag blade 22, each ring-shaped member 29, and the blade presser It is preferable that the linear expansion coefficient of the laminated unit consisting of 30 is substantially the same.

For example, the first rotating shaft 28 is made of Ni-resist cast iron (linear expansion coefficient 5 × 10 ⁻⁶ / K), and the centrifugal drag blade 22 is made of silicon nitride (Si ₃ N ₄ ) ceramics (linear expansion coefficient 3 × 10). ^-6 / K), if only the centrifugal drag blades 22 are stacked on the first rotating shaft 28, the amount of elongation of the centrifugal drag blades 22 is smaller than the first rotating shaft 28 due to the temperature rise during operation. The amount of extension of the initial fastening (positioning) state changes, and torque transmission to the centrifugal drag blade 22 may not be possible. In order to prevent such a problem, all the ring-shaped members 29 are adjusted so that the elongation amounts of the first rotating shaft 28 and the laminated unit (centrifugal drag blade 22 + ring-shaped member 29 + blade retainer 30) are adjusted to be approximately equal. Or a part is comprised with another material, for example, austenitic stainless steel (linear expansion coefficient 14 * 10 < ^-6 > / K). As a result, there is no change in the tightening force by the fixing bolt 31, so that torque can be reliably transmitted to the centrifugal drag blade 22 regardless of the temperature change of the pump. However, an appropriate clearance may be provided in the inner diameter portion of the centrifugal drag blade 22 because the first rotating shaft 28 is thermally expanded due to a temperature rise and a tensile stress acts.

Although this configuration showed a countermeasure against thermal expansion in the axial direction, this countermeasure was taken from the viewpoint of avoiding problems at the time of temperature change due to the difference in linear expansion coefficient between the first rotating shaft 28 and the centrifugal drag blade 22. Needless to say, it may be applied in the radial direction. FIG. 4 is a diagram showing a countermeasure against thermal expansion in the radial direction.
As shown in FIG. 4, the ring-shaped members 43-1 and 43-2 having centrifugal drag blades 41-1, 41-2, 41-3, 41-4, and 41-5 and an axial fitting portion 42, 43-3, 43-4, 43-5 and the blade retainer 44 are laminated in the axial direction. And the inner diameter fitting part 47 of the ring-shaped members 43-1 to 5 and the outer peripheral part of the first rotating shaft 45 are fitted together, and the radial position of the laminated product is fixed. At this time, in order to prevent double fitting, a clearance 46 is provided in the outer peripheral portion of the first rotating shaft 45 and the inner peripheral portion of the centrifugal drag vane 41-5. The structure of the fixed wings 23-1 to 23-5 is the same as that of the embodiment of FIG.

In the above configuration, the first rotating shaft 45 and the ring-shaped member 43 are made of Ni-resist cast iron (linear expansion coefficient 5 × 10 ⁻⁶ / K), and the centrifugal drag blade 41 is made of silicon nitride (Si ₃ N ₄ ). If it is made of ceramics (linear expansion coefficient 3 × 10 ⁻⁶ / K), loosening of the inner diameter fitting portion 47 due to temperature rise can be prevented. Further, since the clearance 46 is provided in the inner diameter portion of the centrifugal drag blade 41, it is possible to prevent a tensile stress from acting on the inner diameter portion of the centrifugal drag blade 41 due to a temperature rise. Since the ring-shaped member 43 has a larger elongation than the ceramic centrifugal drag vane 41, the fitting portion 42 may be loosened due to a temperature rise. Therefore, it is preferable that the fitting portion 42 of this portion has an appropriate interference fit. Since ceramics generally have a high strength against compressive stress, it is preferable to use the fitting portion 42 as an interference fit for reasons of stress acting on the centrifugal drag blade 41.

Next, the seal member 39 provided in the vicinity of the shaft fastening portion of the first rotating shaft 28 and the second rotating shaft 34 in the vacuum pump shown in FIG. 1 will be described. FIG. 5 is a front view showing the seal member 39.
As shown in FIG. 5, the seal member 39 includes a spiral guide 40 on the surface facing the centrifugal drag wing 22-5. The spiral guide 40 is disposed at a distance of several tens to several hundreds of micrometers from the disc-shaped base plane of the centrifugal drag wing 22-5. As shown in FIG. 5, when the rotating blade rotation direction is the clockwise direction, the spiral guide 40 extends spirally in the clockwise direction from the inner diameter side to the outer diameter side of the seal member 39. Then, by the rotation of the centrifugal drag blade 22-5, a sealing action is generated by the interaction between the centrifugal drag blade 22-5 and the seal member 39. Thereby, the inflow of the gas exhausted by the pump from the outer diameter side of the centrifugal drag blade 22-5 to the shaft fastening portion side is prevented. Thus, the centrifugal drag vane 22-5 and the seal member 39 constitute a non-contact seal mechanism. Furthermore, in order to increase the effect of the sealing action, a gas purge port 51 is provided on the shaft end side of the second rotary shaft 34, and an inert gas is introduced from this port 51 to provide a centrifugal drag blade from the shaft fastening portion side. An inert gas flow is formed on the outer diameter side of 22-5 to prevent the inflow of exhaust gas more reliably.

  By this structure, it can suppress as much as possible that the gas exhausted with a pump, and the motor 35, the magnetic bearings 36-38, and the emergency bearings 52 and 53 contact | connect. Therefore, silicon steel plates, copper wire coils, and the like that are inferior in corrosion resistance with the constituent materials of the motor 35 and the magnetic bearings 36 to 38 can be prevented from corrosion. Moreover, since the gas containing the reaction product is not mixed, it is not necessary to heat to a high temperature. Accordingly, it is possible to protect the copper wire coils of the motor 35 and the magnetic bearings 36 to 38 that are inferior in heat resistance and that self-heat due to a current flowing during operation.

  A heater 56 is provided on the outer periphery of the housing 21, and a cooling jacket 55 is provided in the housing 54. The heater 56 and the cooling jacket 55 are each controlled by a temperature control device 61. That is, the heating temperature of the heater 56 is controlled by the temperature control device 61, and the heating temperature of the exhaust passage on the first rotating shaft 28 side is controlled. Further, the temperature control device 61 adjusts the circulation flow rate of the refrigerant supplied to the cooling jacket 55 or the refrigerant temperature, thereby controlling the temperature in the housing 54.

  The seal member 39 is made of a low heat conductive material (heat conductivity 20 W / m · K or less) in order to cut off heat on the first rotating shaft 28 side and the second rotating shaft 34 side. Thereby, even when the exhaust passage on the first rotating shaft 28 side is heated and held at a high temperature to prevent reaction product precipitation, the temperature rise on the housing 54 side having the motor 35 and the magnetic bearings 36 to 38 inside. Can be suppressed. For example, the exhaust passage is heated and held at a desired temperature (for example, 200 ° C. or more) by the heater 56 provided on the outer peripheral portion of the casing 21, and the motor 35 and the upper radial magnetism are provided by the cooling jacket 55 provided on the other housing 54. When cooling the copper wire coil temperature of the bearing 36 to a desired temperature (for example, 100 ° C. or less), the temperature distribution to be achieved is obtained by appropriately insulating the casing 21 side and the housing 54 side with the seal member 39. be able to. Further, by suppressing the heat flux from the casing 21 side to the housing 54 side by the seal member 39, both the amount of heat input to the heater 56 and the amount of heat absorbed by the cooling jacket 55 can be reduced, thereby saving energy. Can be achieved.

  Further, the temperature control device 61 is used to adjust the heating amount of the heater 56 using the input of the temperature sensor 62 that measures the temperature of the seal member 39, or the temperature sensor 63 that measures the copper coil temperature of the motor 35. When the circulation flow rate of the refrigerant supplied to the cooling jacket 55 or the refrigerant temperature is adjusted using the input, the temperature distribution of the pump can be freely changed, and the temperature stability is also improved. Furthermore, the pump heating speed at the time of starting and stopping, and the cooling speed responsiveness can also be improved. In the embodiment shown in FIG. 1, an example is shown in which a flow rate adjustment valve 64 is installed in the middle of the refrigerant piping, and the circulation flow rate of the refrigerant is adjusted.

FIG. 6 is a schematic view in which the vacuum pump 71 of the present invention is attached in the vicinity of the vacuum chamber 73 provided in the semiconductor manufacturing apparatus 72 and the exhaust port of the vacuum pump 71 and the back pump 74 are connected by a pipe 75. .
In the vacuum pump 71 of the present invention, the second rotary shaft that governs the shaft vibration characteristics of the rotor is made of a high-strength, high-Young's modulus material, and a magnetic bearing is used for the bearing, so that high-speed rotation is achieved. Easy. For this reason, since the exhaust flow path including the moving blade can be reduced in size, a vacuum pump that is small, lightweight, low vibration, and free from contamination (contamination free) can be configured. Therefore, the vacuum chamber 73 is not adversely affected by vibration, contamination, and the like, and the installation space can be made compact. Therefore, the vacuum pump 71 of the present invention is easily installed in the vicinity of the vacuum chamber 73 in the semiconductor manufacturing apparatus 72. be able to. Furthermore, even when the vacuum chamber 73 is kept at a high temperature according to the necessary conditions from the manufacturing process, the vacuum pump of the present invention that can heat and hold the exhaust passage portion at a high temperature is easy to install near the vacuum chamber 73. is there.

  Thereby, by compressing the gas to be immediately exhausted in the vicinity of the vacuum chamber 73 using the vacuum pump 71 of the present invention, the pipe 75 is hardly affected by conductance, so that the pipe diameter can be reduced. Further, since the pipe 75 may be lengthened, the degree of freedom increases in the place where the back pump 74 is installed. Further, since the back pump 74 does not require a large exhaust speed, it can be miniaturized. This is particularly effective when the gas flow rate in the manufacturing process is high and the chamber pressure is low.

  The vacuum pump 71 obtains motor drive power from the rotation speed control device 76. The rotation speed control device 76 takes in a pressure value from a pressure gauge 77 installed in the vacuum chamber 73 as an input signal. Then, the rotation speed control device 76 supplies an appropriate motor driving power (power having adjusted frequency and voltage) to the vacuum pump 71 so that the pressure value becomes a predetermined value, and the rotation of the vacuum pump 71. Adjust the speed.

With the above configuration, the pressure in the vacuum chamber 73 can be set to various pressure values, and various manufacturing processes can be performed with the same apparatus. In particular, the vacuum pump 71 according to the present invention can reduce the inertia moment of the rotor by downsizing, so that the responsiveness to changes in the rotational speed of the rotor can be increased. Therefore, since the rotation speed can be changed quickly, the pressure of the vacuum chamber 73 can be easily adjusted.
In FIG. 6, a semiconductor manufacturing apparatus is shown as an example of an apparatus using an evacuation system, but any apparatus may be used as an apparatus to be evacuated.

1 is a diagram illustrating an overall configuration of a turbo vacuum pump according to an embodiment of the present invention. 2 (a) and 2 (b) are views showing a centrifugal drag wing, FIG. 2 (a) is a front view of the centrifugal drag wing, and FIG. 2 (b) is a sectional view of the centrifugal drag wing. 3 (a) and 3 (b) are views showing the fixed wing, FIG. 3 (a) is a front view of the fixed wing, and FIG. 3 (b) is a sectional view of the fixed wing. It is a figure which shows the countermeasure with respect to the thermal expansion to radial direction. It is a front view which shows a sealing member. It is the schematic diagram which attached the vacuum pump of this invention to the vacuum chamber vicinity with which the semiconductor manufacturing apparatus was equipped, and connected between the exhaust port of a vacuum pump, and a back pump. It is a figure which shows the conventional turbo vacuum pump. It is a figure which shows an example of the conventional semiconductor manufacturing apparatus with which a vacuum pump is used.

Explanation of symbols

21, 54 Housing 21A Intake port 21B Exhaust port 22, 22-1, 22-2, 22-3, 22-4, 22-5, 41, 41-1, 41-2, 41-3, 41-4, 41-5 Centrifugal Drag Wing 23, 23-1, 23-2, 23-3, 23-4, 23-5 Fixed Wing 24 Spiral Blade 25 Base 26 Spiral Guide 27 Surface 28, 45 First Rotating Shaft 29 , 43, 43-1, 43-2, 43-3, 43-4, 43-5 Ring-shaped member 30, 44 Blade retainer 31 Fixing bolt 32 Shaft fastening flange 33 Shaft fastening bolt 34 Second rotating shaft 35 Motor 35a Motor rotor (rotor)
35b Motor stator 36 Upper radial magnetic bearing 37 Lower radial magnetic bearing 38 Axial magnetic bearing 39 Seal member 40 Spiral guide 42 Fitting portion 46 Clearance 47 Inner diameter fitting portion 51 Gas purge port 52, 53 Emergency bearing 55 Cooling jacket 56 Heater 61 Temperature adjusting device 62, 63 Temperature sensor 71 Vacuum pump 72 Semiconductor manufacturing device 73 Vacuum chamber 74 Back pump 75 Piping 76 Rotational speed control device

Claims (8)

In a turbo vacuum pump in which a pump part composed of a moving blade and a stationary blade is provided in a casing provided with an intake port, and a bearing and a motor for rotating and supporting the moving blade are arranged on one axial side of the pump part.
The rotating shaft has at least one shaft fastening portion, the shaft fastening portion has a shaft fastening flange and a shaft fastening bolt for fastening the shaft fastening flange, and a first rotational shaft to which the moving blade is attached. And at least a second rotating shaft to which a rotor of the motor is attached by the shaft fastening portion to constitute a rotating shaft ,
The moving blades and ring-shaped members having axial fitting portions are alternately stacked in the axial direction, and the moving blades and the ring-shaped members are fixed by the fitting portions, An inner diameter fitting portion and an outer peripheral portion of the first rotating shaft are fitted together to fix the ring-shaped member and the first rotating shaft, and an outer peripheral portion of the first rotating shaft and an inner surface of the moving blade A turbo vacuum pump characterized by providing clearance around the circumference . In the vacuum pump according to claim 1 Symbol placement, the first rotating shaft, the turbo vacuum pump, characterized in that is constituted by a high corrosion resistant material and / or the linear expansion coefficient of 5 × 10 ^-6 ℃ ^-1 following materials . In the vacuum pump according to claim 1 Symbol placement, the second rotating shaft, the turbo vacuum pump, characterized in that configured in the above Young's modulus 200GPa material and / or ferromagnetic material. In the vacuum pump according to claim 1 Symbol placement, the axial fastening the vicinity of the rotary shaft, so that the exhaust gas present in the first rotating shaft side to prevent entry into the second rotating shaft side, the non-contact sealing mechanism A turbo vacuum pump characterized by the arrangement of In the vacuum pump according to claim 1 Symbol placement, the the second rotating shaft side, a turbo vacuum pump, characterized in that a gas purge port for supplying an inert gas. In the vacuum pump according to claim 1 Symbol placement, the fastening portion near the rotational axis, with the first rotating shaft side and the second rotating shaft side, characterized in that a heat insulator providing a heat drop Turbo vacuum pump. A turbo vacuum pump according to any one of claims 1 to 6 and a vacuum chamber, wherein the turbo vacuum pump is disposed in the vicinity of the vacuum chamber, and an exhaust port of the turbo vacuum pump and a back pump are piped. A semiconductor manufacturing apparatus having an exhaust system connected by 8. The semiconductor manufacturing apparatus according to claim 7 , wherein the pressure of the vacuum chamber is set to a predetermined value by changing a rotational speed of the turbo vacuum pump.

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