JP4240734B2 - High pressure dispersion device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a high-pressure load pump devices, and particularly relates to a slurry containing a ceramic powder or metal powder used in the manufacture of a ceramic electronic component as solid particles to a high-pressure dispersing apparatus used for such case to high pressure dispersion.
[0002]
[Prior art]
For example, a ceramic green sheet used when manufacturing multilayer ceramic electronic components such as multilayer ceramic capacitors and multilayer substrates uses a slurry in which solid particles having a function corresponding to each application are dispersed in a solvent. These slurries are usually produced by dispersing ceramic powder in a solvent (dispersion medium) using a dispersing device such as a bead mill, a ball mill, an attritor, a paint shaker, a sand mill, or a homogenizer.
And the ceramic green sheet is manufactured by shape | molding the slurry manufactured as mentioned above into a sheet | seat of predetermined thickness by methods, such as a doctor blade method, and making it dry.
[0003]
Conventionally, using the ceramic green sheet manufactured as described above, a multilayer ceramic electronic component (here, a multilayer ceramic capacitor will be described as an example) is manufactured by the following method.
(1) First, a predetermined number of electrode-arranged sheets in which a capacitance forming internal electrode (a conductive paste containing a metal powder as a conductive component) is formed by a method such as a screen printing method are laminated on a ceramic green sheet. An outer layer ceramic green sheet having no electrode disposed on the side is laminated and pressure-bonded to form a laminate.
(2) Next, this laminated body is cut at a predetermined position and divided to form elements (unfired elements) in which one end side of each internal electrode is alternately drawn to the end face on a different side.
(3) This element is fired under predetermined conditions to sinter the ceramic to obtain a ceramic element.
(4) By applying and baking a conductive paste on both ends of this ceramic element to form external electrodes, internal electrodes alternately drawn on the end faces on different sides are formed on both ends of the ceramic element. A ceramic capacitor having a structure connected to the external electrode is obtained.
[0004]
In the above description, a case where a multilayer ceramic capacitor is manufactured has been described as an example. However, other multilayer ceramic electronic components such as a multilayer ceramic multilayer substrate are also manufactured through a process of stacking ceramic green sheets.
[0005]
By the way, in recent years, various multilayer ceramic electronic components such as a multilayer ceramic capacitor are required to be downsized and have high performance in the same manner as other electronic components.
For this purpose, it is necessary to reduce the thickness of the ceramic green sheet used in the production of the multilayer ceramic electronic component. In recent years, it has become necessary to use an extremely thin ceramic green sheet having a thickness of 10 μm or less.
[0006]
Thus, when trying to produce a ceramic green sheet having a small thickness, it is necessary to use a ceramic slurry that is sufficiently dispersed as a ceramic slurry used in the production of the ceramic green sheet. As the ceramic raw material powder, it is necessary to use a fine ceramic raw material having an average particle diameter of 0.01 to 1.0 μm.
[0007]
In addition, when trying to reduce the size and thickness of a multilayer ceramic electronic component, not only a ceramic green sheet using the above-mentioned fine powder ceramic raw material is required, but also to form internal electrodes on the ceramic green sheet. The conductive paste used is also a fine powder having an average particle size of 0.01 to 1.0 μm or less as a metal powder (for example, a powder of silver, copper, nickel, palladium, etc.) as a conductive component. A conductive paste using is required.
[0008]
Therefore, in recent years, as a dispersion device for obtaining a slurry in which solid particles are sufficiently dispersed in a solvent (dispersion medium), solid particles such as ceramic powder are caused to flow into the solvent (dispersion medium) by flowing the slurry at a high pressure. Dispersing devices that disperse uniformly (hereinafter referred to as “high-pressure homogenizer”) are used, and this high-pressure homogenizer is a solid in the case of producing a slurry (solid particle dispersion) compared to other dispersing devices. It has excellent particle dispersibility and is characterized by very little contamination from the apparatus as compared with a dispersing apparatus such as a ball mill.
[0009]
In a high-pressure homogenizer, a plunger pump or an intensifier is generally used as a high-pressure load device for loading a slurry with a high pressure. The high-pressure load device loads a high pressure of 10 to 400 MPa to the slurry. Has been.
[0010]
[Problems to be solved by the invention]
However, when a high pressure load operation in which a high pressure is applied to the slurry by the above high pressure load device is performed continuously for a long period of time in order to disperse ceramic powder (solid particles) having a particle size of 1.0 μm or less in a solvent, Such a problem occurs.
(1) For example, in order to perform the operation at a high pressure of 10 to 400 MPa, the high-pressure load device reciprocates the rod that functions to load the slurry with a high pressure at a rate of several to several tens of times per minute. At this time, the solid particles in the slurry get caught in the gap (sliding part) between the high-pressure seal and the rod for sealing the high-pressure slurry, and the seal member that constitutes the high-pressure seal is worn or damaged. Easily leaking liquid,
(2) Especially in the case of ceramic slurry used for the production of ceramic green sheets for multilayer ceramic electronic parts such as multilayer capacitors and multilayer substrates, sealing is performed in an extremely short time due to the characteristics of the ceramic powder (solid particles) used. The member wears and breaks, causing liquid leakage.
In other words, the ceramic powder (solid particles) used in these applications is fine, so that it easily enters and accumulates between the high-pressure seal and the rod, and it is extremely hard, so it easily wears seal members made of resin, for example. The seal performance is impaired.
[0011]
In addition, when manufacturing a slurry (for example, conductive paste) containing metal powder as solid particles, if the metal powder is dispersed by a high-pressure dispersion method, the high-pressure seal and the rod are not formed due to the ductility of the metal powder. There are problems such as increasing the frictional resistance between them, reducing the rigidity of the resin seal member due to frictional heat, and greatly deforming the seal member due to frictional stress, which can easily lead to breakage. The current situation has not yet been reached.
[0012]
The present invention has been made to solve the above problems, high sealing performance can be maintained for a long period of time, and an object of the invention to provide a high-pressure dispersing apparatus had use a highly reliable high-pressure load pump device.
[0013]
[Means for Solving the Problems]
In order to achieve the above object, the high-pressure dispersion device of the present invention (Claim 1) is:
A high-pressure dispersion apparatus for dispersing the ceramic powder and / or metal powder in a slurry containing the ceramic powder and / or metal powder used as solid particles used in the manufacture of a ceramic electronic component ,
An axially reciprocating rod;
A high-pressure load chamber in which a high pressure is applied to the internal slurry by pushing the rod;
A rod cleaning chamber provided adjacent to the high-pressure load chamber on the opposite side to the direction in which the rod is pushed during high-pressure load;
A high-pressure seal that partitions the high-pressure load chamber and the rod cleaning chamber in a liquid-tight manner without interfering with the operation of the rod, and a high-pressure seal selected from the group consisting of a lip seal, a U-type seal, and a Bridgman-type seal ,
A cleaning liquid supply mechanism for circulating and supplying a cleaning liquid for cleaning the rod to the rod cleaning chamber;
Using a high-pressure load pump device configured to remove solid particles adhering to the rod by circulating and supplying the cleaning liquid to the rod cleaning chamber ,
The ceramic powder and / or metal powder is dispersed by applying high pressure to a slurry containing ceramic powder and / or metal powder as solid particles having an average particle diameter of 0.01 to 1.0 μm. It is characterized by.
[0014]
The high-pressure load pump device used in the high-pressure dispersion device of the present invention includes a rod that reciprocates in the axial direction, a high-pressure load chamber that loads high pressure by pushing the rod, and a direction opposite to the direction in which the rod is pushed during high-pressure loading. A rod cleaning chamber provided adjacent to the high-pressure load chamber, and a high-pressure seal that liquid-tightly partitions the high-pressure load chamber and the rod cleaning chamber, the lip seal, U-shaped seal, or Bridgman-type seal The high pressure seal selected from the group consisting of the above and a cleaning liquid supply mechanism that circulates and supplies cleaning liquid to the rod cleaning chamber. By circulating and supplying cleaning liquid to the rod cleaning chamber, the rod is removed from the high pressure load chamber side. When moving to the rod cleaning chamber side, the solid particles adhering to the rod are removed by the cleaning liquid. As a result, it is possible to suppress the intrusion of solid particles between the high-pressure seal and the rod, and to maintain necessary sealing performance for a long period of time, so that stable operation can be performed.
As a method for supplying the cleaning liquid, it is desirable to supply the cleaning liquid to the rod cleaning chamber in the step of pushing the rod into the rod cleaning chamber, but it is also possible to supply the cleaning liquid continuously.
[0015]
In this high-pressure load pump device, the high-pressure seal for sealing the high-pressure slurry is a lip seal having a small contact area with the rod from the viewpoint of reducing the amount of solid particles deposited between the rod and U A mold seal, a Bridgeman seal, and the like are preferable. Note that a gland packing or a block type having a large contact area with the rod is not so preferable.
[0016]
Moreover, there is no special restriction | limiting also about the material which comprises a high pressure seal, Although various things can be used, Resin materials, such as ultrahigh density polyethylene and ultrahigh molecular weight polyethylene, are illustrated as a suitable material. .
[0017]
Then, using this high-pressure load pump device, a slurry containing ceramic powder and / or metal powder as solid particles having an average particle size of 0.01 to 1.0 μm is loaded with high pressure, and ceramic powder and / or Alternatively, according to the high-pressure dispersion device of the present invention in which the metal powder is dispersed, it is possible to efficiently disperse the slurry containing the ceramic powder and / or the metal powder as solid particles stably over a long period of time.
[0018]
Further, in the high-pressure dispersion device according to claim 2, a U-shaped seal is used as the high-pressure seal, and the U-shaped seal is disposed so that an opening thereof faces the high-pressure load chamber side, and It is characterized by being supported by a backup ring disposed on the rod cleaning chamber side with respect to the U-shaped seal.
[0019]
By configuring as described above, as described in the embodiment, it is possible to perform a stable seal, which is significant.
[0020]
According to a third aspect of the present invention , the cleaning liquid circulated and supplied to the rod cleaning chamber is introduced in the vicinity of the high pressure seal in the rod cleaning chamber.
[0021]
By introducing the cleaning liquid in the vicinity of the high pressure seal in the rod cleaning chamber, after moving into the rod cleaning chamber, the solid particles adhering to the rod that will be pushed back into the high pressure load chamber by operating in the opposite direction are cleaned efficiently. It becomes possible. In order to increase the cleaning efficiency, it is desirable to increase the supply amount of the cleaning liquid as much as possible.
[0022]
The high-pressure dispersion apparatus according to claim 4 is characterized in that the cleaning liquid is substantially the same solvent as the slurry solvent (dispersion medium).
[0023]
When a solvent substantially the same as the slurry solvent (dispersion medium) is used as the cleaning liquid, even when the cleaning liquid is mixed with the slurry, no foreign components are mixed into the slurry or the composition does not fluctuate. The invention can be made more effective.
[0024]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the features of the present invention will be described in more detail with reference to embodiments of the present invention.
[0025]
[Embodiment 1]
FIG. 1 is a cross-sectional view showing a configuration of a high-pressure load pump device used in the high-pressure dispersion device of the present invention , and FIG. 2 is an enlarged cross-sectional view showing a main part.
The high-pressure load pump device includes a rod 1 that reciprocates in the axial direction, and a high-pressure load chamber 3 having a slurry outflow / inflow port 9 that is loaded with high pressure to the internal slurry 2 when the rod 1 is pushed out. A rod cleaning chamber 4 provided so as to be adjacent to the high pressure load chamber 3 in a direction opposite to the direction in which the rod 1 is pushed out (direction of arrow A) when applying high pressure (direction of arrow B); A high pressure seal 5 that partitions the high pressure load chamber 3 and the rod cleaning chamber 4 in a liquid-tight manner without interfering with the operation of the rod 1, a bup-up ring 8 that holds the high pressure seal 5, and a cleaning liquid 6 for cleaning the rod 1. A cleaning liquid supply mechanism 7 that circulates and supplies the rod cleaning chamber 4 to the rod cleaning chamber 4. The high pressure load chamber 3 and the rod cleaning chamber 4 are divided into two regions by dividing the interior of the main body housing 10 into two regions by the high pressure seal 5. It has been made.
[0026]
The cleaning liquid supply mechanism 7 also circulates and supplies the cleaning liquid, an inlet port 11 for supplying the cleaning liquid 6 to the rod cleaning chamber 4, an outlet port 12 for discharging the cleaning liquid used for cleaning from the rod cleaning chamber 4. A circulation line 13 for circulation and a circulation pump (a tubing pump in the first embodiment) 14 for circulating and supplying the cleaning liquid are formed.
[0027]
Further, the rod 1 is configured to reciprocate in the A direction and the B direction. When the rod 1 is moved in the direction of arrow A, the distal end side 1a of the rod 1 is pushed out to the high pressure load chamber 3, and the high pressure load When a high pressure is applied to the slurry 2 in the chamber 3 and the slurry 2 loaded with the high pressure is discharged from the slurry outflow / inflow port 9 and the rod 1 is moved in the direction of arrow B, the tip side 1a of the rod 1 Retreats from the high pressure load chamber 3, and the slurry 2 flows into the high pressure load chamber 3 from the slurry outflow / inflow port 9.
[0028]
In the first embodiment , a U-seal made of ultra-high density polyethylene is used as the high-pressure seal 5, and a PEEK product is used as the backup ring 8.
[0029]
In addition, an inlet port 11 for supplying the cleaning liquid 6 to the rod cleaning chamber 4 and an outlet port 12 for discharging the cleaning liquid supplied to the cleaning from the rod cleaning chamber 4 are arranged in the vicinity of the high-pressure seal 5 in order to increase cleaning efficiency. Therefore, it is provided in the immediate vicinity of the backup ring 8.
[0030]
In the high-pressure load pump device configured as described above, the rod 1 moves in the direction of the arrow A so that the slurry 2 in the high-pressure load chamber 3 is loaded with high pressure and discharged from the slurry outflow / inflow port 9. After that, the cleaning liquid enters the rod cleaning chamber 4 from the inlet port 11 in a state where the rod 1 moves in the direction of the arrow B (that is, the slurry 2 flows into the high-pressure load chamber 3 from the slurry outflow / inflow port 9). 6 is removed, the slurry (solid particles) adhering to the rod is removed, and the cleaning liquid supplied to the cleaning is discharged to the outside from the outlet port 12 and again through the circulation line 13 to the rod cleaning chamber 4. Will be supplied.
[0031]
<High pressure load test 1>
Next, using the above-described high-pressure load pump device, the operation of loading and dispersing the high-pressure into the slurry under the following conditions was continuously performed, and the time until the high-pressure seal 5 was broken (service life) was measured.
[0032]
In this high-pressure load test 1, as slurry, 100 parts by weight of a commercially available ceramic powder (average particle size 0.2 μm), 2 parts by weight of an anionic dispersant, 10 parts by weight of an acrylic binder, and 100 parts by weight of toluene are blended. A ceramic slurry was used.
[0033]
The configuration and other conditions of the high-pressure load pump device were as follows.
(1) Volume of rod cleaning chamber 4: 3cc
(2) Supply amount of cleaning liquid to the rod cleaning chamber 4: 300cc / min
(3) Cleaning solution 6: Toluene
(4) Rod 1: Diameter 10mm, 1 stroke volume 5cc
(5) Load pressure to slurry: 100 MPa
[0034]
Under the above conditions, when continuous operation was performed in which high pressure was applied to the ceramic slurry, continuous operation for 450 hours could be performed before the high-pressure seal was broken.
For comparison, when a continuous operation was performed under the same conditions using a high-pressure load pump device not provided with a rod cleaning chamber, the continuous operation time until the high-pressure seal was broken was 11 hours. From this, it can be seen that the above-described high-pressure load pump device has significantly improved durability compared to the comparative device.
[0035]
Moreover, since the same solvent (toluene) as the solvent (toluene) used for the ceramic slurry is used as the cleaning liquid, there was no problem due to the cleaning liquid being mixed into the slurry.
[0036]
<High pressure load test 2>
In this high-pressure load test 2, a metal powder slurry comprising 100 parts by weight of commercially available Ni metal powder (average particle size 0.5 μm), 45 parts by weight of alphaterpineol and 100 parts by weight of toluene is used as the slurry. A continuous operation was performed under the same conditions as in the high-pressure load test 1 except for the above.
As a result, 380 hours of continuous operation could be performed before the high-pressure seal 5 was broken.
For comparison, when a continuous operation was performed under the same conditions using a high-pressure load pump device without a rod cleaning chamber, the continuous operation time until the high-pressure seal was broken was 4 hours. From this, it can be seen that the above-described high-pressure load pump device has significantly improved durability compared to the comparative device.
[0037]
[Embodiments of related technology]
Further, FIG. 3, FIG. 1, shown in FIG. 2, is a view to a cross-sectional view of the main part of high-pressure load pump device having a structure different from the high pressure load pump apparatus for use in a high-pressure dispersion apparatus of the present invention.
As shown in FIG. 3, the high-pressure load pump device includes a rod 1 that reciprocates in the axial direction, a high-pressure load chamber 3 in which a high pressure is loaded on the slurry 2 by pushing the rod 1, and a high-pressure load Around the rod 1 between the high-pressure seal 5 that seals the chamber 3 and the outside 20 liquid-tightly by sealing the high-pressure slurry without interfering with the operation of the rod 1, and between the high-pressure load chamber 3 and the high-pressure seal 5. Thus, a minute volume slurry dilution chamber 21 formed in a ring shape and a diluent supply mechanism 22 for supplying the diluent 25 to the slurry dilution chamber 21 are provided.
[0038]
The diluent supply mechanism 22 supplies the diluent 25 to the slurry dilution chamber 21 through the diluent injection ports 23a and 23b formed so as to communicate with the slurry dilution chamber 21 and the diluent injection ports 23a and 23b. As shown by arrow C, the diluting liquid 25 supplied from the diluting liquid injection ports 23a and 23b to the slurry diluting chamber 21 is formed by a high-pressure load. It is configured to flow into the chamber 3. In addition, when the rod 1 moves in the direction of arrow A (during high-pressure load), the slurry 2 does not flow backward through the slurry dilution chamber 21 and the diluent injection ports 23a and 23b and flows out to the outside. A check valve 27 is disposed in the supply line 26.
[0039]
Also in this high-pressure load pump device, a U-seal made of ultra-high density polyethylene is used as the high-pressure seal 5, and a PEEK product is used as the backup ring 8.
[0040]
In the high-pressure load pump apparatus configured as described above, after the rod 1 moves in the direction of arrow A and high pressure is loaded on the slurry 2 in the high-pressure load chamber 3, the rod 1 moves in the direction of arrow B. When the diluent 25 is supplied into the slurry dilution chamber 21 from the diluent injection ports 23a and 23b in the state where the slurry 2 is moved to the slurry, the slurry 2 in the slurry dilution chamber 21 is diluted with the diluent 25 and a high-pressure load. By being pushed back into the chamber 3, the slurry concentration in the slurry dilution chamber 21 is locally reduced, and solid particles are prevented from entering between the high-pressure seal 5 and the rod 1 and attached to the rod 1. The slurry (solid particles) will be removed.
[0041]
<High pressure load test 1>
Next, using this high-pressure load pump device, an operation of applying high pressure to the slurry and dispersing it under the following conditions was continuously performed, and the time until the high-pressure seal 5 was broken (service life) was measured.
[0042]
In this high-pressure load test 1, as slurry, 100 parts by weight of a commercially available ceramic powder (average particle size 0.2 μm), 2 parts by weight of an anionic dispersant, 10 parts by weight of an acrylic binder, and 100 parts by weight of toluene are blended. A ceramic slurry was used.
[0043]
The configuration and other conditions of the high-pressure load pump device were as follows.
(1) Volume of slurry dilution chamber 21: 1 cc
(2) Cleaning liquid supply speed to slurry dilution chamber 21: 30 cc / min
(3) Diluent 25: Toluene
(4) Rod 1: Diameter 10mm, 1 stroke volume 5cc
(5) Load pressure to slurry: 100 MPa
[0044]
Under the above conditions, when continuous operation was performed by applying high pressure to the ceramic slurry, continuous operation for 630 hours could be performed before the high-pressure seal was broken.
For comparison, when a continuous operation is performed under the same conditions using a high-pressure load pump device that does not include a rod cleaning chamber, as described in the first embodiment, the continuous operation until the high-pressure seal is broken. Since the operation time is 11 hours, it can be seen that this high-pressure load pump device has significantly improved durability compared to the comparative device.
[0045]
Moreover, since the same solvent (toluene) as the solvent (toluene) used for the ceramic slurry is used as the cleaning liquid, there was no problem due to the cleaning liquid being mixed into the slurry.
[0046]
<High pressure load test 2>
In this high-pressure load test 2, a metal powder slurry comprising 100 parts by weight of commercially available Ni metal powder (average particle size 0.5 μm), 45 parts by weight of alphaterpineol and 100 parts by weight of toluene is used as the slurry. A continuous operation was performed under the same conditions as in the high-pressure load test 1 except for the above.
As a result, 520 hours of continuous operation could be performed before the high-pressure seal 5 was broken.
For comparison, when a continuous operation is performed under the same conditions using a high-pressure load pump device not provided with a slurry dilution chamber, the continuous operation time until the high-pressure seal is broken is 4 hours. It can be seen that this high-pressure load pump device has significantly improved durability compared to the comparative device.
[0047]
In addition, by using the high-pressure load pump device of the present invention for a high-pressure dispersion device for dispersing a slurry containing ceramic powder and / or metal powder as solid particles, ceramic powder and / or It is possible to provide a high-pressure dispersion apparatus capable of applying high pressure to a slurry containing metal powder as solid particles and capable of efficiently dispersing ceramic powder and / or metal powder.
[0048]
Incidentally, the present invention is not limited to the above-described type condition, the type of ceramic powder, metal powder, or relates to the kind of the solvent (dispersion medium), within the scope of the invention, various applications, modifications Can be added.
[0049]
【The invention's effect】
As described above, the high- pressure load pump device used in the high-pressure dispersion device of the present invention (Claim 1) includes a rod that reciprocates in the axial direction, a high-pressure load chamber that loads high pressure by pushing the rod, A high-pressure seal that divides the high-pressure load chamber and the rod cleaning chamber in a liquid-tight manner, and a lip seal that separates the high-pressure load chamber and the rod cleaning chamber on the opposite side of the direction in which the rod is pushed during high-pressure load. A high pressure seal selected from the group consisting of a U-shaped seal or a Bridgman-type seal, and a cleaning liquid supply mechanism that circulates and supplies cleaning liquid to the rod cleaning chamber, and circulates and supplies cleaning liquid to the rod cleaning chamber. Therefore, when the rod moves from the high-pressure load chamber side to the rod cleaning chamber side, it is possible to efficiently remove the solid particles attached to the rod with the cleaning liquid That. As a result, it is possible to suppress the intrusion of solid particles between the high-pressure seal and the rod, and to maintain necessary sealing performance for a long period of time, so that stable operation can be performed.
[0050]
Then, using this high-pressure load pump device, a slurry containing ceramic powder and / or metal powder as solid particles having an average particle size of 0.01 to 1.0 μm is loaded with high pressure, and ceramic powder and / or Alternatively, when the metal powder is dispersed, the slurry containing the ceramic powder and / or the metal powder as solid particles can be dispersed efficiently over a long period of time.
[0051]
A U-type seal is used as a high-pressure seal as in the high- pressure dispersion device according to claim 2, the U-type seal is disposed so that its opening faces the high-pressure load chamber side, and the rod is positioned more than the U-type seal. When the U-shaped seal is supported by the backup ring disposed on the cleaning chamber side, a stable seal can be performed.
[0052]
Further, when the cleaning liquid is introduced in the vicinity of the high-pressure seal in the rod cleaning chamber as in the high- pressure dispersion apparatus of claim 3, it becomes possible to more efficiently clean the solid particles adhering to the rod. Can be made more effective.
[0053]
Further, as in the high-pressure dispersion apparatus according to claim 4, when a solvent substantially the same as the slurry solvent (dispersion medium) is used as the cleaning liquid, even when the cleaning liquid is mixed with the slurry, different components are mixed into the slurry. Therefore, the present invention can be further effectively realized without causing compositional fluctuations.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing a configuration of a high-pressure load pump device used in a high-pressure dispersion device according to the present invention.
2 is an enlarged cross-sectional view showing a main part of the high-pressure load pump device of FIG . 1. FIG.
FIG. 3 is a cross-sectional view showing a main configuration of another high-pressure load pump device.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Rod 1a Rod tip 2 Slurry 3 High pressure load chamber 4 Rod cleaning chamber 5 High pressure seal 6 Cleaning liquid 7 Cleaning liquid supply mechanism 8 Bup-up ring 9 Slurry outflow / inflow port 10 Main body housing 11 Inlet port 12 Outlet port 13 Circulation line 14 Circulation Pump (tubing pump)
20 External of high-pressure load chamber 21 Slurry dilution chamber 22 Diluent supply mechanism 23a, 23b Diluent injection port 24 Supply pump (tubing pump)
25 Diluting liquid 26 Supply line 27 Check valve A Arrow indicating the direction in which the rod is pushed out under high pressure load B Arrow showing the direction opposite to the direction in which the rod is pushed out under high pressure load C Arrow indicating the direction in which the diluting liquid flows

Claims (4)

A high-pressure dispersion apparatus for dispersing the ceramic powder and / or metal powder in a slurry containing the ceramic powder and / or metal powder used as solid particles used in the manufacture of a ceramic electronic component ,
An axially reciprocating rod;
A high-pressure load chamber in which a high pressure is applied to the internal slurry by pushing the rod;
A rod cleaning chamber provided adjacent to the high-pressure load chamber on the opposite side to the direction in which the rod is pushed during high-pressure load;
A high-pressure seal that partitions the high-pressure load chamber and the rod cleaning chamber in a liquid-tight manner without interfering with the operation of the rod, and a high-pressure seal selected from the group consisting of a lip seal, a U-type seal, and a Bridgman-type seal ,
A cleaning liquid supply mechanism for circulating and supplying a cleaning liquid for cleaning the rod to the rod cleaning chamber;
Using a high-pressure load pump device configured to remove solid particles adhering to the rod by circulating and supplying the cleaning liquid to the rod cleaning chamber ,
The ceramic powder and / or metal powder is dispersed by applying high pressure to a slurry containing ceramic powder and / or metal powder as solid particles having an average particle diameter of 0.01 to 1.0 μm.
High pressure dispersion device characterized by A U-shaped seal is used as the high-pressure seal, and the U-shaped seal is disposed so that an opening thereof faces the high-pressure load chamber side, and closer to the rod cleaning chamber side than the U-shaped seal. The high-pressure dispersion apparatus according to claim 1, wherein the high-pressure dispersion apparatus is supported by a backup ring provided. The high-pressure dispersion apparatus according to claim 1 or 2, wherein the cleaning liquid circulated and supplied to the rod cleaning chamber is introduced in the vicinity of the high-pressure seal in the rod cleaning chamber. The high-pressure dispersion apparatus according to claim 1, wherein the cleaning liquid is substantially the same solvent as the slurry solvent (dispersion medium).

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