JP5313439B2 - Dispersing apparatus for slurry containing metal particles or ceramic particles - Google Patents

Description

The present invention relates to a dispersion apparatus for a slurry containing metal particles or ceramic particles , and more specifically, used for high-pressure dispersion of a slurry containing metal particles or ceramic particles used as a solid particle for manufacturing ceramic electronic components. The present invention relates to a dispersion apparatus for slurry containing metal particles or ceramic particles .

As a dispersing device used for high-pressure dispersion of a slurry containing metal particles or ceramic particles as solid particles, for example, as shown in FIG. 4, a cylinder (main body housing) 52 in which a slurry outflow / inflow port 51 is formed. The rod 55 is press-fitted into the space 54 filled with the slurry 53, thereby giving a constant pressure (for example, 100 MPa) to the slurry 53 and jetting the slurry 53 from the slurry outflow / inflow port 51. A configured dispersion apparatus is known (see Patent Document 1).
And in patent document 1, the structure provided with the cylinder 52 and the rod washing | cleaning chamber 56 partitioned off liquid-tightly is shown.

  Further, Patent Document 1 shows in FIG. 5 as a high pressure seal 57 for sealing the cylinder 52 (liquid pressure tightly dividing the cylinder 52 (high pressure load chamber) and the rod cleaning chamber 56 without interfering with the operation of the rod). Thus, it is disclosed that a U-seal 58 made of ultra high density polyethylene is used.

  For example, as shown in FIG. 6, a vacuum seal mechanism using a U-shaped seal jacket 63 (FIG. 7) is used as a seal mechanism between the cylindrical shaft 61 (and a fixing member connected thereto) and the core shaft 62. It is disclosed (see Patent Document 2).

  Further, as shown in FIG. 7, Patent Document 2 has a configuration in which a cantilever spring 65 is provided in the opening 64 of the seal jacket 63 in order to elastically bias the seal jacket 63 toward the mandrel 62. It is disclosed.

  As a general sealing mechanism, like the U-shaped seal jacket (seal ring), an auxiliary member is disposed and reinforced in a hollow opening, and the seal jacket is strongly pressed against a mandrel or the like. In addition to the above type, there is a type in which a solid sealing member such as an O-ring is positively elastically deformed for sealing.

  Among the sealing mechanisms as described above, the sealing structure in which the auxiliary member is disposed in the hollow opening like the U-shaped sealing jacket is dependent on the elastic deformation of the sealing member itself. For example, it can be said that it is suitable for a high-pressure seal in a high-pressure dispersion device or the like.

  However, as shown in Patent Document 2, even in the case of a seal structure in which an auxiliary member is disposed in the opening of a U-shaped seal jacket, the pressure applied to the slurry is higher. Then, there is a problem in that the force that pushes the opening of the seal jacket outwardly loses the pressure of the slurry and causes liquid leakage.

In addition, since the seal member and the auxiliary member such as a spring member disposed in the opening of the seal member continue to receive high pressure (deformation stress), and in some cases, even a slight deformation may actually occur. In addition, there is a problem that the auxiliary member is severely deteriorated and the seal member and the holding means need to be frequently replaced.
JP 2001-241385 A JP 2002-228010 A

The present invention solves the above-described problems, and can provide a highly reliable seal without using an auxiliary member having elasticity, and has a seal structure that is less likely to deteriorate due to long-term use. and to provide a distribution device of a slurry containing the particles or ceramic particles.

In order to solve the above problems, a slurry dispersing apparatus containing metal particles or ceramic particles of the present invention (Claim 1) is provided.
(a) a supply tank containing a slurry containing metal particles or ceramic particles containing the material to be dispersed;
(b) A cylindrical cylinder having an internal space in which the slurry is supplied and filled, and a pressurized liquid supply port for injecting the slurry pressurized in the internal space; A pressure supply unit having a rod that slides in an internal space in the axial direction of the cylinder, pressurizes the slurry filled in the cylinder, and ejects the slurry from the pressurized liquid supply port;
(c) a dispersion treatment unit that performs a predetermined dispersion treatment on the slurry sprayed from the pressurized liquid supply port of the pressure supply unit, and
The cylinder is a slurry dispersing apparatus including metal particles or ceramic particles provided with a cleaning liquid supply unit that supplies a cleaning liquid for cleaning the outer peripheral surface of the rod from the outer peripheral surface side of the rod,
As a seal structure for sealing a space formed between the cylindrical cylinder and a rod inserted from one end of the cylinder to the inside of the cylinder,
1) A U-shaped seal that is made of an elastic body, has a ring shape, has a substantially U-shaped radial cross-sectional shape, and is disposed so as to contact the inner peripheral surface of the cylinder and the outer peripheral surface of the rod. A ring-shaped groove disposed concentrically with the U-shaped seal ring, and the opening of the ring-shaped groove faces a direction substantially parallel to the axial direction of the cylinder and the rod It has a formed structure as a whole outer peripheral surface from the end of the opening side over an end portion opposite to the opening side of the ring-shaped groove, in contact with the inner peripheral surface of the cylinder, and, A U-shaped seal ring in which an entire inner peripheral surface extending from an end on the opening side to an end opposite to the opening is in contact with the outer peripheral surface of the rod; and the ring shape of the U-shaped seal ring The U-shaped seal ring is press-fitted into the groove, and the ring-shaped groove is By pushing in the direction, a U-shaped seal ring, and pressed the ring to be pressed against the outer peripheral surface of the inner peripheral surface and the rod of said cylinder, opening of the ring-shaped groove of the U-shaped sealing ring is formed A seal member having a backup ring disposed on the opposite side to the U-shaped seal ring on a side opposite to the other side, the pair being located at a predetermined interval in the axial direction of the cylinder A sealing member of
2) A spacer that is disposed so as to be positioned between the pair of seal portions positioned at a predetermined interval in the axial direction of the cylinder, and that holds the interval between the pair of seal portions, and passes the cleaning liquid. A spacer having a cleaning liquid passage hole for causing the outer peripheral surface to contact the inner peripheral surface of the cylinder, and the inner peripheral surface to contact the outer peripheral surface of the rod;
3 ) holding means for sandwiching the seal member and the spacer directly or indirectly from the axial direction of the cylinder and the rod and holding them in a predetermined position;
The seal member is held in a state where the seal member is pressed from the axial direction of the cylinder and the rod by the holding means, and the press-fitting ring is press-fitted into the ring-shaped groove of the U-shaped seal ring. together and we are have a seal structure that is,
The cleaning liquid supply part is formed by communication between a cleaning liquid passage provided in the cylinder and a cleaning liquid passage hole provided in the spacer, and the cleaning liquid is supplied from the outside of the cylinder through the cleaning liquid supply part. Further, it is characterized in that it is configured to be discharged to the outside of the cylinder through the cleaning liquid supply unit .

Further, in the slurry dispersing apparatus containing metal particles or ceramic particles according to claim 2, the ring-shaped groove of the U-shaped seal ring is formed so that the width gradually decreases from the opening toward the bottom. It is characterized by being.

The slurry dispersing apparatus containing metal particles or ceramic particles according to claim 3 is formed such that the width of the press-fitting ring gradually decreases in the press-fitting direction into the ring-shaped groove. It is a feature.

Moreover, the dispersion apparatus of the slurry containing the metal particle or ceramic particle of Claim 4 is provided.
The vicinity of the bottom of the ring-shaped groove of the U-shaped seal ring, and the tip side of the press-fit ring toward the press-fit direction into the ring-shaped groove have a rounded shape, and
A curvature radius on the bottom surface side of the ring-shaped groove is smaller than a curvature radius on the tip side of the press-fitting ring.

Further, a slurry dispersing apparatus containing metal particles or ceramic particles according to claim 5,
A seal member accommodating portion having a larger inner diameter than other portions is disposed so as to be continuous with the insertion side opening into which the rod of the cylinder is inserted, and
When the holding means for holding the seal member is viewed in the axial direction of the cylinder, the cylinder is configured in such a manner as not to interfere with the operation of the stepped portion disposed on the back side of the seal member housing portion and the rod. And a locking member disposed so as to close at least a part of the insertion side opening.
The seal member is held in the seal member housing portion by the step portion and the locking member constituting the holding means.

The slurry dispersing apparatus containing metal particles or ceramic particles according to claim 6 is characterized in that when the opening of the ring-shaped groove of the U-shaped seal ring is viewed in the axial direction of the cylinder, the pressurized liquid It is characterized by being arranged to face the supply port side.

In the seal structure provided in the dispersion device for slurry containing metal particles or ceramic particles according to the present invention (Claim 1), the U-shaped seal ring is formed by the press-fit ring press-fitted into the ring-shaped groove of the U-shaped seal ring. Is expanded in the width direction of the ring-shaped groove and pressed against the cylinder side and the rod side, so that a highly reliable seal can be performed without using an elastic auxiliary member as in the case of a conventional seal structure. It is possible to reduce deterioration due to long-term use.
That is, the holding means applies a pressing force in the axial direction of the cylinder and the rod to press-fit the press-fitting ring into the ring-shaped groove, whereby the U-shaped seal ring is moved in the width direction of the ring-shaped groove, that is, in the radial direction. It becomes possible to push and spread, and even when a high pressure is applied, the sealed state can be reliably maintained.

As described above, in the slurry dispersing apparatus containing metal particles or ceramic particles according to the present invention, the cylinder and the rod constituting the pressurizing supply unit that pressurizes and injects the slurry are sealed by the above-described seal structure. Therefore, substances to be dispersed such as metal particles and ceramic particles contained in the slurry can be efficiently dispersed.

  In addition, since the outer peripheral surface of the rod is cleaned by the cleaning liquid supplied from the outer peripheral surface side of the rod in the cleaning liquid supply unit, the U-shaped seal ring is prevented from being worn or damaged by particles adhering to the outer peripheral surface of the rod. Thus, durability can be improved.

In addition, the seal structure is provided on both sides of the cleaning liquid supply unit when viewed in the axial direction of the cylinder, so that leakage of the cleaning liquid to the outside is surely prevented and mixing of the cleaning liquid into the slurry is prevented. Therefore, reliability can be further improved.

Further, since the backup ring comes into contact with the U-shaped seal ring, the U-shaped seal ring can be held more stably, and a more reliable dispersion device can be provided. become.

  In addition, ceramic particles are very hard, and metal particles have a problem that they tend to adhere to the outer periphery of the rod due to ductility. Although this burden becomes large, according to the structure of this invention, the lifetime of a sealing member can be improved significantly.

Further, in the case of the slurry dispersing apparatus containing metal particles or ceramic particles according to claim 2, when the press-fitting ring is press-fitted into a ring-shaped groove formed so that the width gradually decreases from the opening toward the bottom, As the press-fit ring is pushed into the back side, the U-shaped seal ring can be strongly pressed against the cylinder side and the rod side, and the sealing performance can be further improved. That is, by adjusting the press-fitting amount of the press-fitting ring into the ring-shaped groove, it becomes possible to control the amount of the U-shaped seal ring that is spread in the radial direction, and the seal pressure can be easily adjusted. It becomes possible.

Further, in the case of the slurry dispersing apparatus containing metal particles or ceramic particles according to claim 3 , the ring-shaped groove of the press-fitted ring formed so that the width gradually decreases in the direction of press-fitting into the ring-shaped groove. By adjusting the amount of press-fitting into the U-shaped seal ring, it is possible to easily adjust the seal pressure by controlling the amount of expansion of the U-shaped seal ring in the radial direction. It is also significant in that the insertion operation of the press-fit ring into the ring-shaped groove can be facilitated.

In the slurry dispersing apparatus containing metal particles or ceramic particles according to claim 4, a press-fit ring having a radius of curvature on the tip side larger than the radius of curvature on the bottom side of the ring-shaped groove is press-fitted into the ring-shaped groove. As a result, the U-shaped seal ring and the press-fit ring come into contact with each other over a wider area, so that the deterioration of the U-shaped seal ring can be slowed and the ring-shaped groove is further expanded. As a result, the U-shaped seal ring can be further pressed against the cylinder side and the rod side, and the seal reliability can be further improved.

Further, in the case of the slurry dispersing apparatus including the metal particles or the ceramic particles according to claim 5, the step portion disposed on the back side of the seal member housing portion and the latch disposed on the insertion side opening portion side of the cylinder. Since the seal member is held by the member, the seal member can be easily replaced only by attaching and detaching the locking member, and the present invention can be more effectively realized.

In the slurry dispersing apparatus containing metal particles or ceramic particles according to claim 6, the opening of the ring-shaped groove of the U-shaped seal ring is disposed so as to face the pressurized liquid supply port side. The pressure generated by pushing the rod into the slurry containing space is applied to the ring-shaped groove, and the ring-shaped groove is strongly expanded by the pressure, so that the U-shaped seal ring is strongly pressed against the cylinder side and the rod side. High sealing performance is realized.

  The features of the present invention will be described in more detail below with reference to examples of the present invention.

FIG. 1 is a cross-sectional view showing a seal structure employed in a dispersion apparatus according to one embodiment (first embodiment) of the present invention.
This seal structure A is a seal structure for sealing a space (slurry storage space) S formed between a cylindrical cylinder 1 and a rod 2 inserted from one end of the cylinder 1 to the inside of the cylinder 1. It is.
In this seal structure A, the seal member 10 includes a U-shaped seal ring 11 and a press-fit ring 13 that is press-fitted into the ring-shaped groove 12 of the U-shaped seal ring 11.

  The U-shaped seal ring 11 constituting the seal member 10 is formed of an elastic body. In the U-shaped seal ring 11, the ring-shaped groove 12 is concentric and the opening 12a is substantially parallel to the axial direction of the cylinder 1 and the rod 2 in a region where the opening 12a is not in contact with the cylinder 1 and the rod 2. It is formed so as to face the pressurized liquid supply port 3 formed at one end of the cylinder 1.

Further, the U-shaped seal ring 11 constituting the seal member 10 has a ring shape in plan view, is made of high-density polyethylene, and is configured to be elastically deformable.
The opening 12a of the ring-shaped groove 12 is formed so that the width gradually decreases toward the bottom, and the width changes in a curve when viewed in the cross-sectional shape in the width direction.

  The press-fitting ring 13 is press-fitted into the ring-shaped groove 12 of the U-shaped seal ring 11 as described above, and by pushing the U-shaped seal ring 11 in the width direction of the ring-shaped groove 12, U The letter-shaped seal ring 11 is configured to be able to be brought into pressure contact with the inner peripheral surface of the large-diameter portion D1 having a larger inner diameter than other portions of the cylinder 1 and the outer peripheral surface of the rod 2.

In this seal structure A, a pair of seal members 10 (10a, 10b) are disposed on both sides of a cleaning liquid supply unit 22 that supplies a cleaning liquid 21 for cleaning the outer peripheral surface of the rod 2. That is, the seal member 10 (10a, 10b) is defined by the inner peripheral surface of the large-diameter portion D1 and the outer peripheral surface of the rod 2 formed so as to be connected to the insertion side opening 4 into which the rod 2 of the cylinder 1 is inserted. The cleaning liquid supply portion 22 is disposed between both sides of the cylinder 1 in the axial direction of the seal member accommodating portion 29 which is a space to be formed.
The cleaning liquid supply unit 22 includes a spacer 24 having a cleaning liquid passage hole 23, a cleaning liquid passage 25 formed in the cylinder, and the like.

One seal member 10 (10a) is held at a predetermined position in the seal member accommodating portion 29 in a state where the press-fitting ring 13 is in contact with a step portion 26 formed inside the cylinder 1.
Further, a backup ring 14 (14 a) is disposed on the surface of the seal member 10 (10 a) opposite to the side provided with the press-fitting ring 13 so as to contact the U-shaped seal ring 11.

  The other seal member 10 (10b) is connected to at least the insertion side opening 4 of the cylinder 1 via a backup ring 14 (14b) disposed on the surface opposite to the side where the press-fitting ring 13 is provided. It is held in the seal member accommodating portion 29 by a locking member 28 arranged so as to close a part.

The cylinder 1 is a substantially cylindrical structure having a double structure of iron and stainless steel (the wetted part is stainless steel), and includes a pressurized liquid supply port 3 for ejecting pressurized slurry 20 on one end side. An insertion side opening 4 into which the rod 2 is inserted is disposed on the other end side.
In the first embodiment, the pressurized liquid supply port 3 is configured to function as a supply port for supplying the slurry 20 to the slurry accommodating space S of the cylinder 1.

The inner diameter of the cylinder 1 is set so as to ensure a slight clearance that does not hinder the reciprocation of the rod 2 in addition to the outer diameter of the rod 2. The insertion side opening 4 of the rod 2 has a larger inner diameter than the other part, and a large diameter part D1 from the insertion side opening 4 to the step part 26 that is a boundary part with the other part, A space defined by the outer peripheral surface of the rod 2 serves as a seal member accommodating portion 29 that accommodates the seal member 10.
Further, the seal member accommodating portion 29 communicates with the insertion side opening 4 and is configured so that the seal member 10 can be inserted from the insertion side opening 4.

  Further, a cleaning liquid passage 25 is disposed so as to communicate the outer peripheral surface and the inner peripheral surface of the cylinder 1, and one cleaning liquid passage 25 (25a) serves as a cleaning liquid supply path, and the other cleaning liquid passage 25 (25b) serves as a cleaning liquid. It is a discharge route.

The rod 2 is a cylindrical member made of tungsten carbide, and is inserted into the cylinder 1 from the insertion side opening 4 of the cylinder 1.
The rod 20 is pushed into the cylinder 1 while the slurry 20 is filled in the cylinder 1 so that the slurry 20 can be injected from the pressurized liquid supply port 3 while being pressurized to a predetermined pressure. Yes.

  The sealing member 10 is disposed at two locations on both sides of the cleaning liquid passage 25 when viewed in the axial direction of the cylinder 1. The sealing member 10 (10 a) on the pressurized liquid supply port 3 side causes the cleaning liquid of the slurry 20 to be disposed. Inflow to the supply unit 22 and outflow of the cleaning liquid to the slurry storage space S are prevented, and the outflow of the cleaning liquid to the outside of the apparatus is prevented by the seal member 10 (10b) on the insertion side opening 4 side.

  The press-fitting ring 13 is made of PEEK (polyether ether ketone) and has a circular shape in plan view. The portion of the press-fitting ring 13 that is press-fitted into the ring-shaped groove 12 of the U-shaped seal ring 11 has a rounded shape, and the radius of curvature thereof is the ring-shaped groove of the U-shaped seal ring 11. It is comprised so that it may become larger than the curvature radius of 12 inner peripheral surfaces.

As described above, when the press-fitting ring 13 is press-fitted into the ring-shaped groove 12 of the U-shaped seal ring 11 by making the radius of curvature of the press-fitted ring 13 larger than the curvature radius of the ring-shaped groove 12, the U-shaped seal ring. 11 can be reliably pushed and expanded in the radial direction (the width direction of the ring-shaped groove 12).
Further, by making the relationship between the radius of curvature of the press-fitting ring 13 and the ring-shaped groove 12 as in the case of the first embodiment, the inner peripheral surface of the press-fitted ring 13 and the ring-shaped groove 12 is brought into contact with a surface instead of a line. This makes it possible to reduce damage to the U-shaped seal ring 11.

  The backup ring 14 is made of stainless steel and has an annular shape. The backup ring 14 is disposed on the opposite side of the U-shaped seal ring 11 where the opening 12a of the ring-shaped groove 12 is formed. Has been. Although this backup ring 14 is not an essential component for the present invention, it is possible to stably hold the U-shaped seal ring 11 in the seal member accommodating portion 29 by being disposed.

The locking member 28 that presses and holds the seal member 10 accommodated in the seal member accommodating portion 29 in the axial direction is made of stainless steel, and is on the insertion side opening 4 (inlet of the seal member accommodating portion 29) side of the cylinder 1. Are fixed to the cylinder 1 by screws 28a.
The locking member 28 holds the seal member 10 together with the step portion 26 of the cylinder 1 and functions to press the seal member 10 from both sides in the axial direction. The part 26 constitutes a holding means in the present invention.

  The cleaning liquid supply unit 22 is formed by disposing a spacer 24 having a cleaning liquid passage hole 23 and a cleaning liquid passage 25 in the cylinder 1 in a large diameter portion D1 of the cylinder 1. ing. The one cleaning liquid passage 25 (25a) formed in the cylinder 1 serves as a cleaning liquid supply path, and the other cleaning liquid path 25 (25b) functions as a cleaning liquid discharge path.

Moreover, this seal structure A is assembled and configured by the following procedure, for example.
First, the press-fit ring 13, the U-shaped seal ring 11, the backup ring 14 (14a), the spacer 24, the press-fit ring 13, the U-shaped seal ring 11, and the backup ring 14 (14b) are placed in the seal member accommodating portion 29 of the cylinder 1. ) In this order to accommodate each member.

Thus, in a state where each member is accommodated in the large-diameter portion D1 of the cylinder 1, the stacked height dimension of each member is larger than the length dimension of the seal member accommodating portion 29 in the axial direction of the cylinder 1 ( That is, the backup ring 14 (14b) to be accommodated last is slightly protruded from the seal member accommodating portion 29).
In this state, by fixing the locking member 28 to the end surface of the cylinder 1 in which the insertion side opening 4 is disposed with the screw 28a, the stacked height dimension of each part accommodated in the seal member accommodating part 29 is It is pressed in the axial direction of the cylinder 1 until it becomes the same as the length of the seal member accommodating portion 29. At this time, the press-fitting ring 13 is press-fitted into the ring-shaped groove 12 of the U-shaped seal ring 11 by the difference in stacking height before and after pressing, and the U-shaped seal ring 11 is pushed in the radial direction of the cylinder 1 by the pressure. It is spread and pressed against the outer peripheral surface of the rod 2 and the inner peripheral surface of the cylinder 1.

From the seal structure A configured as described above, the following effects can be obtained.
(1) Applying a pressing force in the axial direction of the cylinder 1 to press-fit the press-fitting ring 13 into the ring-shaped groove 12 of the U-shaped seal ring 11 to push the U-shaped seal ring 11 in the radial direction. Therefore, the U-shaped seal ring 11 can be firmly adhered to the outer peripheral surface of the rod 2 so that the sealed state can be reliably maintained even when a high pressure is applied.

  (2) Since the U-shaped seal ring 11 can be stably held by the backup ring 14, it is possible to improve the reliability and reduce a part of the stress that the U-shaped seal ring 11 receives. It can be absorbed by the backup ring 14 to improve durability.

  (3) Since the press-fitting ring 13 and the ring-shaped groove 12 are curved as described above, by adjusting the press-fitting amount of the press-fitting ring 13 into the ring-shaped groove 12, the radial direction of the U-shaped seal ring 11 is adjusted. It becomes possible to gradually change the amount of expansion, and the seal pressure can be easily adjusted. Further, since the radius of curvature of the press-fitting ring 13 is larger than the radius of curvature of the inner peripheral surface of the ring-shaped groove 12, the inner peripheral surface of the ring-shaped groove 12 and the tip of the press-fitted ring 13 are in contact with each other. The deterioration of the seal ring 11 can be delayed.

  (4) Further, the holding means for holding the seal member 10 includes a locking member 28 detachably disposed at the step portion 26 of the cylinder 1 and the end portion of the cylinder on the insertion side opening. Therefore, the structure can be simplified, and the seal member 10 can be easily replaced only by removing the locking member 28.

(5) Further, by disposing the seal member 10 (10a) between the pressurized liquid supply port 3 and the cleaning liquid supply part 22, the slurry (liquid to be treated) 20 is prevented from entering the cleaning liquid supply part 22. Thus, the rod 2 can be efficiently cleaned. Further, it is possible to prevent the cleaning liquid from being mixed into the slurry 20 and to obtain a sufficiently dispersed slurry free from impurities.
Furthermore, since the sealing members 10 (10a, 10b) are arranged on both sides of the cleaning liquid supply unit 22, it is possible to reliably prevent the cleaning liquid from leaking outside.

  (6) The opening 12a of the ring-shaped groove 12 is in a direction substantially parallel to the axial direction of the cylinder 1 and the rod 2 and is directed toward the pressurized liquid supply port 3 side. The pressure generated by pushing the rod 2 is applied to the ring-shaped groove 12, and the U-shaped seal ring 11 is strongly expanded by the pressure. As a result, the U-shaped seal ring 11 is strongly applied to the cylinder 1 side and the rod 2 side. It is press-contacted and it becomes possible to perform a strong seal.

  In the above embodiment, a seal structure using a combination of two seal members is shown. However, there is no particular restriction on the number of seal members used in one seal structure, and one seal member is used for one seal member. It is possible to form a structure, and it is also possible to form one seal structure using three or more seal members.

  When a plurality of seal members are used in one seal structure, a bup-up ring or a cleaning liquid supply unit may be interposed between the seal members, and other members or mechanisms may be interposed between the seal members. Instead, a plurality of seal members may be arranged adjacent to each other.

  FIG. 2 is a diagram showing a schematic configuration of a dispersion apparatus using a slurry containing ceramic particles as a liquid to be treated, using the above-described seal structure.

  This dispersing apparatus uses ceramic slurry containing ceramic particles as a raw material for ceramic electronic components as a liquid to be treated, jets the ceramic slurry in a pressurized state, and uses the force applied to the ceramic slurry. A dispersion device intended to achieve a high level of dispersion.

  As shown in FIG. 2, the dispersing device includes a slurry tank 31 for storing ceramic slurry 20 containing ceramic particles, a slurry pump 32 for transporting the ceramic slurry 20 to a pressure supply unit 33, and a slurry pump 32. The high-pressure pump (pressurization supply unit) 33 for supplying the pressurized ceramic slurry 20 under pressure and the dispersion for dispersing the ceramic slurry 20 jetted in a state pressurized to 250 MPa using the pressurization supply unit 33 Unit 34, cooling means 35 for cooling ceramic slurry 20 which has been dispersed in dispersion unit 34 and has become high temperature in that process, and pressure is fed back to pressure supply unit 33, and a high pressure pump (pressure supply) And control means 36 for controlling conditions such as the processing pressure in the part 33).

  In the dispersing apparatus of the second embodiment, the high-pressure pump (pressure supply unit) 33 includes a cylindrical space (slurry storage space) S1 in which the ceramic slurry 20 is supplied and filled, and a slurry storage space. The cylinder 1a provided with the pressurized liquid supply port 3a for injecting the ceramic slurry 20 pressurized in S1 and the slurry accommodating space S1 in the cylinder 1a slide in the axial direction of the cylinder 1a to move to the cylinder 1a. A set of two high-pressure pumps 33 each having a rod 2a that pressurizes the filled ceramic slurry 20 and injects it from the pressurized liquid supply port 3a. In this high-pressure pump 33, as a sealing structure for sealing the slurry containing space S1 formed between the cylindrical cylinder 1a and the rod 2a inserted into the cylinder 1a from one end of the cylinder 1a. The above-described seal structure A is used.

  The high pressure pumps 33 (33a, 33b) are used as a set of two high pressure pumps 33 (33a), and the rod 2a is pulled in one high pressure pump 33 (33a) to fill the slurry containing space S1 with the ceramic slurry 20. In the meantime, by pressing and pressing the rod 2a in the other high-pressure pump 33 (33b), the ceramic slurry 20 pressurized to a high pressure can be continuously supplied.

  Further, as the dispersion unit 34, for example, jet sprayed ceramic slurry is passed through an orifice and the flow rate and pressure are controlled, for example, led to a cell made of a highly wear-resistant material such as zirconia. The thing of the structure etc. which disperse | distributed the ceramic particle | grains by the impact added to a ceramic slurry in the process is mentioned.

  Further, as another example of the configuration of the dispersion unit 34, as shown in FIG. 3, for example, a slurry introduction unit 41 for introducing the ceramic slurry 20, branch channels 42a and 42b for branching and passing the ceramic slurry 20, The ceramic slurry 20 that has passed through the paths 42a and 42b is collided, and the ceramic slurry 20 in which the ceramic particles are dispersed in the slurry colliding unit 43 is taken out to the outside by the slurry colliding unit 43 that disperses the ceramic particles by the impact during the collision. The structure provided with the slurry taking-out part 44 is mentioned.

  As long as the dispersion portion 34 can sufficiently disperse the ceramic slurry, the specific configuration thereof is not particularly limited, and various configurations can be employed.

Next, a method for performing dispersion using the dispersion apparatus configured as described above will be described.
(1) First, the ceramic slurry 20 is supplied from the slurry tank 31 to the high-pressure pump (pressure supply unit) 33 by the slurry pump 32.
(2) In the high-pressure pump (pressure supply unit) 33, the rod 2a is pressed against the ceramic slurry 20 supplied into the cylinder 1a and pressurized, and jetted to the dispersion unit 34 at a predetermined pressure (250 MPa). .
(3) The dispersion part 34 performs high-pressure dispersion treatment of the ceramic particles in the ceramic slurry 20.
(4) The ceramic slurry 20 that has been subjected to the high-pressure dispersion treatment is cooled to room temperature by the cooling means 35.
(5) Return the ceramic slurry cooled to room temperature by the cooling means 35 to the slurry tank 31.

  By repeating the steps (1) to (5) a predetermined number of times, a ceramic slurry in which ceramic particles are sufficiently dispersed can be obtained.

  If the ceramic slurry is to be dispersed as in the case of the second embodiment, the ceramic slurry needs to be pressurized and jetted at a high pressure of 250 MPa in the high pressure pump, so that a seal structure is configured. Although a considerable load is applied to the seal member such as the U-shaped seal ring, the use of the seal structure as described above prevents the seal member from deteriorating, and the high pressure pump is continuously operated over a long period of time. Can be used.

  In the case of a ceramic slurry containing ceramic particles or a slurry containing metal particles (for example, a conductive paste containing metal particles as a conductive component), the ceramic particles are very hard, and the metal particles are rods due to ductility. There is a problem that it is easy to adhere to the outer periphery, and when the slurry containing such a substance is dispersed by applying a high pressure, the burden on the seal member increases, but according to the configuration of the present invention, the seal member This burden can be reduced and the lifetime can be significantly improved.

  Specifically, in the case of a conventional seal structure in which a U-shaped seal ring that does not include a press-fitting ring is used, the configuration of the second embodiment in which the U-shaped seal ring needs to be replaced every 200 hours. In this case, the U-shaped seal ring replacement interval could be 3000 hours or more.

In addition, although the case where the ceramic slurry containing the ceramic particles is dispersed has been described as an example in Example 2 above, the present invention is not limited to the ceramic particles, and the slurry containing metal particles is used as a liquid to be treated, and the particles contained therein are used. It can be widely applied when dispersed.

  The invention of the present application is not limited to the above embodiment in other respects as well, and holds the specific shape and material of the U-shaped seal ring, the specific shape of the ring-shaped groove and press-fit ring, and the seal member. Within the scope of the present invention, the specific configuration of the holding means, the configuration and arrangement of the backup ring, the specific configuration of the supply tank, the pressure supply unit, the dispersion processing unit, etc. constituting the dispersion apparatus of the present invention. Various applications and modifications can be added.

According to the present invention, it is possible to provide a dispersion apparatus that has high sealing performance and is less susceptible to deterioration due to long-term use.
Therefore, the present invention can be widely used as a dispersing device used for high-pressure dispersion of a slurry containing metal particles or ceramic particles as solid particles used for manufacturing a ceramic electronic component.

It is sectional drawing which shows the seal structure used for the dispersion apparatus concerning one Example (Example 1) of this invention. It is a figure which shows schematic structure of the dispersion | distribution apparatus concerning other Example (Example 2) of this invention. It is a figure which shows schematic structure of the example of the dispersion | distribution part which comprises the dispersion | distribution apparatus concerning Example 2 of this invention. It is a figure which shows the conventional dispersing device. It is a figure which shows the seal structure of the conventional dispersion | distribution apparatus. It is a figure which shows the other conventional seal structure. It is a figure which expands and shows the principal part of the seal structure of FIG.

DESCRIPTION OF SYMBOLS 1,1a Cylinder 2,2a Rod 3 Pressurized liquid supply port 3a Pressurized liquid supply port 4 Insertion side opening part 10 (10a, 10b) Seal member 11 U-shaped seal ring 12 Ring-shaped groove 12a Opening part 13 Press-fit ring 14 (14a, 14b) Backup ring 20 Slurry (ceramic slurry)
DESCRIPTION OF SYMBOLS 21 Cleaning liquid 22 Cleaning liquid supply part 23 Cleaning liquid passage hole 24 Spacer 25 (25a, 25b) Cleaning liquid passage 26 Step part 28 Locking member 28a Screw 29 Seal member accommodating part 31 Slurry tank 32 Slurry pump 33, 33a, 33b High pressure pump (pressurization) Supply department)
34 Dispersion part 35 Cooling means 36 Control means 41 Slurry introduction part 42a, 42b Split flow path 43 Slurry collision part 44 Slurry extraction part A Seal structure D1 Large diameter part S, S1 space (slurry accommodation space)

Claims (6)

(a) a supply tank containing a slurry containing metal particles or ceramic particles containing the material to be dispersed;
(b) A cylindrical cylinder having an internal space in which the slurry is supplied and filled, and a pressurized liquid supply port for injecting the slurry pressurized in the internal space; A pressure supply unit having a rod that slides in an internal space in the axial direction of the cylinder, pressurizes the slurry filled in the cylinder, and ejects the slurry from the pressurized liquid supply port;
(c) a dispersion treatment unit that performs a predetermined dispersion treatment on the slurry sprayed from the pressurized liquid supply port of the pressure supply unit, and
The cylinder is a slurry dispersing apparatus including metal particles or ceramic particles provided with a cleaning liquid supply unit that supplies a cleaning liquid for cleaning the outer peripheral surface of the rod from the outer peripheral surface side of the rod,
As a seal structure for sealing a space formed between the cylindrical cylinder and a rod inserted from one end of the cylinder to the inside of the cylinder,
1) A U-shaped seal that is made of an elastic body, has a ring shape, has a substantially U-shaped radial cross-sectional shape, and is disposed so as to contact the inner peripheral surface of the cylinder and the outer peripheral surface of the rod. A ring-shaped groove disposed concentrically with the U-shaped seal ring, and the opening of the ring-shaped groove faces a direction substantially parallel to the axial direction of the cylinder and the rod It has a formed structure as a whole outer peripheral surface from the end of the opening side over an end portion opposite to the opening side of the ring-shaped groove, in contact with the inner peripheral surface of the cylinder, and, A U-shaped seal ring in which an entire inner peripheral surface extending from an end on the opening side to an end opposite to the opening is in contact with the outer peripheral surface of the rod; and the ring shape of the U-shaped seal ring The U-shaped seal ring is press-fitted into the groove, and the ring-shaped groove is By pushing in the direction, a U-shaped seal ring, and pressed the ring to be pressed against the outer peripheral surface of the inner peripheral surface and the rod of said cylinder, opening of the ring-shaped groove of the U-shaped sealing ring is formed A seal member having a backup ring disposed on the opposite side to the U-shaped seal ring on a side opposite to the other side, the pair being located at a predetermined interval in the axial direction of the cylinder A sealing member of
2) A spacer that is disposed so as to be positioned between the pair of seal portions positioned at a predetermined interval in the axial direction of the cylinder, and that holds the interval between the pair of seal portions, and passes the cleaning liquid. A spacer having a cleaning liquid passage hole for causing the outer peripheral surface to contact the inner peripheral surface of the cylinder, and the inner peripheral surface to contact the outer peripheral surface of the rod;
3 ) holding means for sandwiching the seal member and the spacer directly or indirectly from the axial direction of the cylinder and the rod and holding them in a predetermined position;
The seal member is held in a state where the seal member is pressed from the axial direction of the cylinder and the rod by the holding means, and the press-fitting ring is press-fitted into the ring-shaped groove of the U-shaped seal ring. together and we are have a seal structure that is,
The cleaning liquid supply part is formed by communication between a cleaning liquid passage provided in the cylinder and a cleaning liquid passage hole provided in the spacer, and the cleaning liquid is supplied from the outside of the cylinder through the cleaning liquid supply part. And a slurry dispersing apparatus containing metal particles or ceramic particles, wherein the slurry is discharged to the outside of the cylinder through the cleaning liquid supply unit . 2. The slurry containing metal particles or ceramic particles according to claim 1 , wherein the ring-shaped groove of the U-shaped seal ring is formed so that the width gradually decreases from the opening toward the bottom. Distributed device. 3. The slurry containing metal particles or ceramic particles according to claim 1 , wherein a width of the press-fitting ring is formed so as to gradually decrease in a press-fitting direction into the ring-shaped groove. Distributed device. The vicinity of the bottom of the ring-shaped groove of the U-shaped seal ring, and the tip side of the press-fit ring toward the press-fit direction into the ring-shaped groove have a rounded shape, and
The radius of curvature of the bottom surface side of the ring-shaped groove is smaller than the radius of curvature of the tip side of the press-fitting ring. The slurry containing metal particles or ceramic particles according to any one of claims 1 to 3 Distributed device. A seal member accommodating portion having a larger inner diameter than other portions is disposed so as to be continuous with the insertion side opening into which the rod of the cylinder is inserted, and
When the holding means for holding the seal member is viewed in the axial direction of the cylinder, the cylinder is configured in such a manner as not to interfere with the operation of the stepped portion disposed on the back side of the seal member housing portion and the rod. And a locking member disposed so as to close at least a part of the insertion side opening.
The metal particles according to any one of claims 1 to 4 , wherein the seal member is held in the seal member housing portion by the step portion and the locking member constituting the holding means. Dispersing device for slurry containing ceramic particles . Claims wherein the U-shaped seal ring, the opening of the ring-shaped groove, when tried with the axial direction of the cylinder, characterized in that it is arranged so as to face the pressurized liquid supply port side A slurry dispersing apparatus comprising the metal particles or ceramic particles according to any one of 1 to 5 .

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