JP4236651B2 - Vibration measuring method and vibration measuring apparatus - Google Patents

Description

  The present invention relates to a vibration measurement method and vibration measurement that transmit an ultrasonic wave with a structure in a container as a measurement target, and measure vibration displacement of the structure in a two-dimensional space including the propagation direction of the ultrasonic wave and a direction perpendicular thereto. Relates to the device.

  Conventionally, when a structure is provided in a container in which an ultrasonic transmission medium is accommodated and vibration of the structure is measured non-invasively from the outside of the container, ultrasonic waves transmitted from the outside of the container to the container wall and the medium in the container, etc. The structure is obtained by repeating the procedure of taking the reflected echo from the target structure, measuring its propagation time, and converting it to distance using the wave propagation speed at high speed. A technique for measuring the vibration displacement of the is known. Ultrasonic flaw detectors used in nondestructive inspections are compatible with such technologies and are used as general-purpose products.

However, when highly accurate position measurement is desired, there is a certain limit depending on the application of general-purpose products. For example, in the case of measuring the position in water using ultrasonic waves, in order to identify the distance difference of 7.5 μm, considering the round trip time of ultrasonic waves and the speed of 1500 m / sec in water, 2 × 7.5 × It is necessary to identify the arrival time of the reflected wave with high accuracy of 10 ⁻⁶ (m) / 1500 (m / s) = 10 ⁻⁸ (sec) = 10 ns. If the frequency of the ultrasonic wave is 1 MHz, the wavelength in water is 1.5 mm, but it is necessary to measure a deviation of the order of 1/100 of this wavelength. With a conventional method that measures the arrival time of the reflected wave with a certain threshold, such high-precision measurement is difficult.

  On the other hand, as a technique for solving this difficulty, one of the inventors has proposed a method for measuring the arrival time of an ultrasonic reflected wave with high accuracy using the center of gravity or correlation of the wave. (See Patent Documents 1 and 2 and Non-Patent Document 1).

  However, this conventional method can measure the displacement of the measurement object in the direction along the propagation direction of the ultrasonic wave, but cannot measure the displacement in the direction perpendicular to the propagation direction of the ultrasonic wave.

Since the structure in the container is considered to vibrate in any direction, measure the position of the vibration displacement in the two-dimensional space including the direction along the direction of propagation of this ultrasonic wave and the direction perpendicular thereto. Although important, there is currently no technology that makes this possible.
JP 2004-20540 A JP 2004-361131 A S.KANEMOTO et.al, Development of ultrasonic vibrometer for vertical pump bearing wear diagnostic system, International Symposium on Machine Condition Monitoring and Diagnosis, JSME Annual Meeting 2002, Tokyo, Japan, September 2002

  As described above, the conventional method for measuring the arrival time of reflected waves using ultrasonic waves can measure the displacement of the measurement object in the direction along the propagation direction of the ultrasonic waves, but is perpendicular to the propagation direction of the ultrasonic waves. It was difficult to measure the displacement in the direction.

  The present invention has been made in response to such a conventional situation, and the vibration displacement of a structure can be measured in a two-dimensional space including a direction along the ultrasonic wave propagation direction and a direction perpendicular thereto. , Thereby obtaining important information when evaluating the vibration of the structure in the container, and providing a vibration measurement method and a vibration measurement device that are useful in many applications such as monitoring the soundness of the structure and investigating the cause of trouble For the purpose.

  In order to achieve the above object, the vibration measuring method according to the present invention transmits ultrasonic waves to an object, and changes vibration displacement in the ultrasonic propagation direction relative to the object according to the arrival time of a reflected wave reflected from the object. The vibration in the direction perpendicular to the ultrasonic wave propagation direction is obtained by obtaining the distortion of the waveform due to the temporal change of the relationship between the inclination of the ultrasonic probe and the ultrasonic reflection surface on the object in advance due to the vibration of the object. A step of holding as displacement data, and a step of measuring the distortion of the waveform due to a change in the inclination of the measurement target surface of the object relative to the traveling direction of the ultrasonic wave by detecting the shape change of the received reflected wave during measurement, Based on the characteristic difference between the warped shape and the warped shape in the vibration displacement data, the vibration displacement in the direction perpendicular to the ultrasonic wave propagation direction is obtained, and the ultrasonic wave propagation direction with respect to the object is perpendicular to the ultrasonic wave propagation direction. Characterized by comprising the step of determining the vibration displacement in the two-dimensional space direction Prefecture.

  In addition, the vibration measuring apparatus according to the present invention performs an ultrasonic wave transmitting apparatus that transmits ultrasonic waves to an object, a receiving apparatus that receives a reflected wave from the object, and a calculation process of a received waveform by the receiving apparatus. An arithmetic device, wherein the arithmetic device is configured to set a prediction function that associates a feature amount of the received waveform obtained in advance with the vibration center position of the object, and based on the received waveform of the object. Received wave shape feature amount detecting means for detecting a difference in characteristics of received wave shape distortion due to a temporal change in inclination of the ultrasonic reflection surface of the object, and the feature of the distortion detected by the received wave shape feature amount detecting means. Based on the higher-order statistic calculating means for calculating the higher-order statistic of the object from the difference by the prediction function set by the function setting means, and the higher-order statistic calculated by the higher-order statistic calculating means. Against the object Characterized in that a two-dimensional vibration displacement calculating means for calculating the vibration displacement in the two-dimensional space of the ultrasonic propagation direction and the direction perpendicular thereto.

  According to the present invention, it is possible to obtain important information when evaluating the vibration of the structure in the container, and it is possible to obtain effects that are useful for many applications such as monitoring the soundness of the structure and investigating the cause of trouble. .

  Hereinafter, embodiments of a vibration measuring device and a vibration measuring method according to the present invention will be described with reference to the drawings.

[First Embodiment (FIGS. 1 to 8)]
FIG. 1 shows a basic configuration of a vibration measuring apparatus according to the present invention and a two-dimensional cross section of a measuring system.

  As shown in FIG. 1, in this embodiment, ultrasonic waves are transmitted from the outer surface side of the container 1 toward the structure 2 provided in the container 1, and reflected waves from the structure 2 are transmitted to the structure 1. It has the ultrasonic transmission / reception apparatus 3 which receives on an outer surface side. In addition, an A / D conversion device 4 that converts a received waveform of the transmission / reception device 3 into a digital value, and an arithmetic device 5 that performs arithmetic processing by converting the converted digital value data into a numerical value are provided.

  The arithmetic unit 5 includes a function setting unit that sets a prediction function that associates a feature amount of a received waveform that has been obtained in advance with the vibration center position of the structure, and an ultrasonic reflection surface of the structure based on the digitized data. Receiving wave shape feature quantity detecting means for detecting a feature difference of distortion of the received wave shape due to a temporal change in the inclination of the received wave.

  In addition, the arithmetic unit 5 calculates higher-order statistics such as the center of gravity, distortion degree, and flatness of the structure from the feature difference of the distortion detected by the received wave shape feature quantity detection means by the prediction function set by the function setting means. High-order statistic calculation means to be calculated, and vibration displacement in a two-dimensional space between the direction of ultrasonic propagation to the structure and a direction perpendicular thereto are calculated based on the high-order statistic calculated by the high-order statistic calculation means. Two-dimensional vibration displacement calculation means.

  Next, a specific apparatus configuration will be described with reference to FIG. FIG. 1 shows a cylindrical structure 2 in cooling water 6 as a medium filled in a container 1, and corresponds to a pump shaft and a heat exchanger tube. In this embodiment, the center position of vibration of such a structure 2 is measured in a two-dimensional plane. FIG. 2 shows a case where the flat structure 2 is disposed in the container 1 in an inclined state. In this embodiment, it is applicable also to such an inclined flat plate.

  In the present embodiment, basically, in order to measure the distance from the measurement reference position to the measurement target, first, a pulse wave is transmitted from the ultrasonic transmission / reception device 3 installed at the measurement position to the structure 2 that is the measurement target. Make a call. The transmitted transmission wave w1 is reflected by the structure 2 to be measured and returns to the transmission / reception device 3 as a reflected wave w2. In the present embodiment, the reflected echo wave that is the reflection is received by the sensor of the transmission / reception device 3. The received wave is taken as digital data by the A / D converter 4 into the arithmetic unit 5 and is used as an evaluation target of the arrival time T of the received wave with reference to the transmission time. If the velocity of the ultrasonic wave in the medium is measured in advance, the distance from the arrival time of the received wave to the measurement object can be measured. By repeating this procedure at a high speed, for example, at a cycle of 1 msec, the time change of the vibration displacement of the object is measured.

  On the other hand, when the structure 2 to be measured shown in FIG. 1 or FIG. 2 vibrates in a direction along the propagation direction of the ultrasonic wave, it is displaced from the arrival time of the reflected echo wave of the ultrasonic wave as described above. Although the width can be estimated, since the average propagation time of the ultrasonic wave does not change when vibrating in a direction perpendicular to the propagation direction of the ultrasonic wave, it cannot be measured by the conventional method using the arrival time.

  On the other hand, in this embodiment, even if the measurement object is a columnar shape as shown in FIG. 1 or a flat shape as shown in FIG. 2, it has an inclination with respect to the ultrasonic transmission probe. In this case, the relationship between the ultrasonic transmission probe and the inclination of the ultrasonic reflection surface on the structure 2 changes with time due to the vibration of the structure 2, so that the shape of the received ultrasonic echo wave is Compared to the wave shape, it will have distortion.

  FIGS. 3A and 3B show changes in the ultrasonic echo wave according to the vibration direction, and an example of distortion is shown. When the structure 2 vibrates in the ultrasonic wave propagation direction, as shown in FIG. 3B, the reflected echo wave w2 only moves in the time direction without changing its shape, but in the ultrasonic wave propagation direction. When it vibrates at a right angle, there is no parallel movement in the time direction, and as shown in FIG. 3 (a), it can be seen that a slight waveform distortion w3 is seen.

  In the present embodiment, the vibration displacement in the direction parallel to the ultrasonic wave propagation direction and the direction perpendicular thereto is measured using the characteristic difference of the waveform distortion w3. Normally, the shape of the measurement target and the positional relationship between the ultrasonic transmission device and the measurement target in a static state are known from the design drawing, so the ultrasonic transmission device when the position of the measurement target changes due to vibration The positional relationship with the measurement target, that is, the inclination of the surface of the measurement target with respect to the ultrasonic traveling direction can be predicted in advance. This change in inclination is observed as a change in the shape of the received reflected echo wave.

When this observation is expressed by a mathematical expression, when the center position of the measurement target is the coordinate value (X, Y) in the two-dimensional space, the reflected echo wave R (τ) has the following relationship. Become.

Here, R (τ) is an N-dimensional column vector when N points of observation time-series data, and the function f is also an N-dimensional column vector corresponding thereto. By solving this equation (1) in reverse, the position (X, Y) of the measurement target can be obtained as follows.

There are various ways to obtain the prediction function f ⁻¹ (R). When the equation (1) is linearized,

At this time, if the matrix (A ^T A) is regular, the position (X, Y) of the measurement target can be obtained by the following calculation.

That is, if A is known, the position (X, Y) of the measurement object is obtained from the reflected echo waveform R of the observed value by the equation (4). When (A ^T A) is not regular, the solution of equation (4) can be obtained by using a pseudo inverse matrix using singular value decomposition.

In addition, considering that Equation (1) is originally a nonlinear relationship, the linearization of Equation (3) can be extended to nonlinear variables as follows.

In this case, the position (X, Y) of the measurement target is obtained by the following equation instead of the equation (4).

  In the above example, the observed reflected echo waves (R (τ), τ = 1,..., N) are used as they are, but this is based on the Hilbert transform or absolute value transform as shown in FIG. , Can be converted to a vector value that takes only positive values.

  4 shows the Hilbert transform (FIG. 4 (a)) and the absolute value transform (FIG. 4 (b)) of the observed reflected echo wave. You can refer to the book "Introduction to data processing for scientific measurement", CQ Publishing, 2001.

In the present embodiment, further, thus, to positively transformed waveform response value Q (tau) that takes only values, seeking feature amounts as described below, the _{M i, (5) (6} ) It is used instead of R in the formula.

  This is the original response waveform (R (τ), τ = 1,..., N), but when N is large, it is on the order of several hundred points, and it is difficult to calculate the inverse matrix ( Since the equation (7) is reduced to five variables, it is known that the calculation is easy and the universality that captures the characteristics of the measurement waveform is useful for improving the measurement accuracy.

  FIGS. 5A and 5B show the simulation calculation results of the reflected echo of the ultrasonic wave when the measurement target (structure 2) vibrates in a direction parallel to the ultrasonic wave propagation direction a. (A) shows the shape of the transmitted and received wave between the stethoscope probe and the measurement object, and (b) shows the shape of the reflected wave. FIGS. 6A and 6B show the result of simulation calculation of the reflected echo of the ultrasonic wave when the measurement object vibrates in the direction perpendicular to the ultrasonic wave propagation direction.

  Among these measurement methods, it is necessary to obtain the coefficient A or B. This is extremely large as shown in FIGS. 5 (a) and 5 (b) and FIGS. 6 (a) and 6 (b). Coefficients A and B can be obtained by simulating transmission / reception of sound waves in advance and numerically obtaining the relationship between the position (X, Y) of the measurement target and the response waveform R (τ). This can also be obtained as data of the position (X, Y) of the measurement target and the response R (τ) in the same manner as in a mock-up test apparatus that simulates the measurement target. By doing so, the position (X, Y) of the unknown measurement target can be obtained from the actual measurement reflected echo waveform R (τ) using the equations (1) to (7).

In the case of the equation (3), if the response waveform R and the position (X, Y) are obtained, the coefficient A is calculated as follows.

Similarly, in the case of equation (5), the coefficient B is obtained as follows.

  FIGS. 7A and 7B show the change in the response waveform of the ultrasonic reception signal in one vibration cycle when the measurement target is vibrating, in a superimposed manner. FIG. 7A shows the original received waveform, and FIG. 7B shows the waveform after the Hilbert transform.

  7 (a) and 7 (b), the reflection echo wave in the case where the cylindrical measurement target is vibrating in an elliptical orbit with a vibration of 0.1 mm is overwritten for one round of the elliptical orbit. Shows things. That is, a raw response waveform and a waveform after Hilbert transform are shown.

  FIG. 8 shows the result (estimated value (x mark)) of estimating the displacement of the vibration center position of the measurement object according to this embodiment compared with the true value (black circle mark). As can be seen from FIG. 8, as a result of estimating the center coordinates of the vibration by the equation (6), the position is correctly measured in a two-dimensional plane as compared with the true value.

  As described above, according to the present embodiment, a prediction function that associates a high-order feature quantity of the shape of a received waveform with a symmetrical vibration center position is prepared in advance, and the two-dimensional It is possible to provide a vibration measuring device that measures the vibration displacement position in space with high accuracy.

  Further, in the vibration measuring apparatus of the present embodiment, as a configuration for performing the above-described method, the arithmetic unit 5 includes a Hilbert transforming unit that transforms the received waveform into a Hilbert transform when the shape of the received waveform is digitized, and a conversion A waveform converting means for converting the received waveform into a positive fluctuation waveform based on the absolute value of the received waveform, and calculating a high-order statistic of the center of gravity, the degree of distortion and the flatness of the converted structure 2 as the feature quantity of the converted waveform. High-order statistic calculation means and vibration displacement calculation means for obtaining vibration displacement in a two-dimensional space from the high-order statistic are provided.

  The arithmetic unit 5 also includes an absolute value capturing unit that captures an absolute value when the shape of the received waveform is digitized, and a waveform conversion unit that converts the absolute value of the received waveform into a positive fluctuation waveform. And higher-order statistic calculation means for calculating higher-order statistics such as the center of gravity, distortion, and flatness as feature quantities of the converted waveform, and obtaining vibration displacement in a two-dimensional space from the higher-order statistics. Vibration displacement calculating means.

  Furthermore, the arithmetic unit 5 replaces the higher-order statistic calculation means with the vibration for obtaining the vibration displacement in the two-dimensional space using a small number of variables consisting of only a large singular value when the value of the received waveform is decomposed into singular values. Displacement calculation means is provided.

[Second Embodiment (FIGS. 9 to 12)]
FIG. 9 shows the configuration of the vibration measuring apparatus according to the second embodiment of the present invention, and shows an example of the configuration in which the transmitting / receiving apparatus is used separately. As shown in FIG. 9, in the vibration measuring apparatus of the present embodiment, the ultrasonic transmission device 3a and the reception device 3b are independent and are provided on the outer surface side of the container 1 in an arrangement separated from each other. That is, in this embodiment, as shown in FIG. 9, the transmission / reception apparatus is divided into two parts, ultrasonic transmission is performed from one side, and reception is performed on the other side.

  FIG. 10 shows the result of the simulation of the ultrasonic propagation path when the transceiver is separated according to the present embodiment. As shown in FIG. 9 and FIG. 10, in the vibration measurement device of this embodiment, the ultrasonic transmission device 3 a and the reception device 3 b are independent and are provided on the outer surface side of the container 1 in an arrangement separated from each other. Yes. And the change of the response waveform of the ultrasonic reception signal in one vibration period when the measurement object vibrates is shown by overwriting.

  The measurement waveform at this time is shown in FIG. That is, FIG. 11A shows the original received waveform (raw waveform), and FIG. 11B shows the waveform after the Hilbert transform. FIG. 12 shows a result (estimated value (x mark)) of estimating the displacement of the vibration center position to be measured in the present embodiment, and shows a comparison with a true value (black circle mark).

  As described above, in the vibration measuring apparatus according to the present embodiment, the ultrasonic transmitting apparatus and the receiving apparatus are independent from each other and are arranged on the outer surface side of the container 1 as shown in FIG. In addition, the ultrasonic propagation path between the two transmission / reception units can be implemented by using two sensors instead of a single sensor, depending on the position of the measurement target and the location where the ultrasonic probe can be attached. Measurement similar to the form becomes possible. In this case, the measurement target is periodically oscillating, and ultrasonic reception waves are measured at a plurality of positions at the time of the oscillation of one period, and these are superimposed and displayed. As the measurement object vibrates, the center position moves and the propagation time of the ultrasonic wave differs, so that it is clear from FIG. 11 that the measurement time of the received waveform is shifted.

  FIG. 12 shows the result of obtaining the two-dimensional coordinates of the vibration displacement by the same algorithm as in the first embodiment based on the above observation data. In FIG. 12, a black circle mark is a true value of vibration displacement measured separately, and a x mark is a measured value according to the present embodiment. These measured values are in good agreement with each other, indicating that the present invention is effective.

[Third Embodiment (FIGS. 13 to 15)]
FIG. 13 shows the configuration of the third embodiment of the present invention. As shown in FIG. 13, in the present embodiment, two receiving apparatuses 3b are arranged on both sides of the transmitting apparatus 3a. That is, in the present embodiment, the ultrasonic transmission device 3a is disposed opposite to the structure 2 in the container 1, and the two reception devices 3b are disposed on both sides of the transmission device 3a. An adder 7 and a differentiator 8 are connected to these receiving devices 3b. Then, the arithmetic device 5 obtains the vibration displacement in the ultrasonic propagation direction to be measured based on the added value of the two received waveforms received by each receiving device. That is, the calculation device 5 is configured as a vibration displacement calculation means for obtaining a vibration displacement in a direction perpendicular to the ultrasonic wave propagation direction of the structure 2 based on a difference value between two received waveforms. A two-dimensional position display device 9 is connected to the arithmetic device 5.

  As described above, when the transmission device 3a is disposed at the center position with respect to the measurement target and the two reception devices 3b are disposed on both sides thereof, the reception waveforms from both the reception devices 3b are larger than the measurement target. When shifted in the direction perpendicular to the sound wave transmission direction, the response waveform changes depending on the shift to the left or right. When a single receiving device is used as in the first embodiment, the same response waveform may be identified regardless of whether it is shifted to the left or right. Thus, the left and right movement can be identified.

  Thus, in this embodiment, the added value and difference value of two received waveforms are used. The added value is used when measuring vibration displacement parallel to the ultrasonic transmission direction, and the difference value is used when measuring vibration displacement perpendicular to the ultrasonic transmission direction. Of course, an equivalent result can be obtained if the comparison method is not the difference value but the ratio of two received waves.

  FIG. 14 shows a received waveform in the third embodiment, and shows a result of overwriting a plurality of measured received waveforms at the time of vibration of one cycle to be measured. FIGS. 14A and 14B show addition values, and FIGS. 14C and 14D show difference values. 14A and 14C show values after the Hilbert transform, and FIGS. 14B and 14D show original received waveforms. FIG. 14A shows the original received waveform, and FIG. 14B shows the waveform after the Hilbert transform. FIG. 15 shows the result of estimating the displacement of the vibration center position of the measurement target (estimated value (x mark)) compared with the true value (black circle mark) in the present embodiment.

  The data shown in these figures is the result of obtaining the two-dimensional coordinates of the vibration displacement by the same algorithm as in the first embodiment. As described above, the black circle mark shown in FIG. 15 is a true value of vibration displacement measured separately, and the x mark is a measurement value according to the present embodiment, and both of these values are in good agreement. Thereby, it turns out that this invention is effective. Further, in the present embodiment, it can be seen that the vibration displacement is correctly measured even when the vibration displacement is in front of the ultrasonic sensor and thus fluctuates symmetrically.

[Fourth Embodiment (FIG. 16)]
FIG. 16 shows a fourth embodiment of the present invention and shows a configuration example in the case where the vibration measurement and the temperature fluctuation measurement are performed simultaneously.

  In the present embodiment, a relationship value between the propagation time and temperature corresponding to the vibration natural period is obtained in advance for the ultrasonic propagation medium 6 in the container 1, and ultrasonic waves are measured when measuring vibration displacement in a two-dimensional space. This is a vibration measurement method that measures the temperature in the container 1 separately from the vibration displacement based on the fluctuation characteristics of the measured value of the average propagation time.

  In other words, the transmitted ultrasonic wave passes through the intervening ultrasonic propagation medium and reaches the cylinder to be measured and then is reflected and reaches the receiver, but this propagation time is only the change in the position of the measurement object. Instead, it varies depending on the temperature of the propagation medium. The temperature of the propagation medium is usually a fluid such as water and fluctuates under the influence of the flow. Then, the ultrasonic wave propagation speed also changes, but this fluctuation can be regarded as a random fluctuation when it is affected by a flow vortex or the like. On the other hand, the mechanical vibration to be measured is periodic according to its natural period.

  For this reason, in this embodiment, it has the structure provided with the vibration displacement calculation apparatus 10, the narrow band pass filter 11, and the narrow band removal filter 12 as the arithmetic unit 5. FIG. That is, a narrow band pass filter 11 corresponding to the vibration natural period of the measurement target is prepared, and a specific frequency component is extracted from the measured variation in propagation time, and this is set as the vibration measurement value d1 of the measurement target. . Furthermore, a narrow band elimination filter 12 that removes the same frequency component is prepared, and a signal passing therethrough is set as a measured value d2 of the temperature fluctuation signal. By such a method, it becomes possible to measure the temperature fluctuation value d2 of the intervening medium simultaneously with the measurement of the vibration in the container 1.

  Therefore, it is possible to provide means for simultaneously measuring the temperature fluctuation of the intervening medium by utilizing the fact that the propagation speed of the ultrasonic wave changes depending on the temperature of the medium through which the ultrasonic wave is propagated together with the vibration. it can.

1 shows a first embodiment of the present invention, and shows a basic configuration of a device and a measurement system in a two-dimensional cross-sectional view. 1 shows a first embodiment of the present invention and shows a case where a measurement target is a plate. 1 shows a first embodiment of the present invention, and shows a change of an ultrasonic echo wave according to a vibration direction. 1A and 1B show a first embodiment of the present invention, in which FIG. 4A shows Hilbert transform of an observed reflected echo wave, and FIG. 1A and 1B show a first embodiment of the present invention, and FIGS. 4A and 4B show results of simulation calculation of reflected echoes of ultrasonic waves when a measurement object vibrates in a direction parallel to the ultrasonic wave propagation direction. . The 1st Embodiment of this invention is shown, (a), (b) shows the result of having carried out the simulation calculation of the reflected echo of an ultrasonic wave when a measurement object vibrates in the direction orthogonal to an ultrasonic wave propagation direction. Yes. 1A and 1B show a first embodiment of the present invention, and FIGS. 4A and 4B show changes in the response waveform of an ultrasonic reception signal in one vibration cycle when a measurement target vibrates. FIG. The 1st Embodiment of this invention is shown and the result of having estimated the displacement of the vibration center position of a measuring object is shown compared with a true value. The structure of 2nd Embodiment of this invention is shown, and the structural example in the case of using a transmission / reception apparatus isolate | separated is shown. The 2nd Embodiment of this invention is shown and the result of having calculated | required the ultrasonic propagation path by the simulation at the time of isolate | separating a transmission / reception apparatus is shown. The 2nd Embodiment of this invention is shown, (a), (b) has shown the change of the response waveform of the ultrasonic reception signal in 1 vibration period when the measurement object is vibrating. The 2nd Embodiment of this invention is shown and the result of having estimated the displacement of the vibration center position of a measuring object is shown in comparison with a true value. The structure of 3rd Embodiment of this invention is shown and the example of a structure at the time of having two receiving apparatuses on the both sides of the transmitter is shown. (A)-(d) shows the 3rd Embodiment of this invention, and has shown the change of the response waveform of the ultrasonic reception signal in 1 vibration period when the measurement object is vibrating. The structure of 3rd Embodiment of this invention is shown, and the result of having estimated the displacement of the vibration center position of a measuring object is shown in comparison with a true value. The 4th Embodiment of this invention is shown and the structural example in the case of performing a vibration measurement and a temperature fluctuation measurement simultaneously is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Container 2 Structure 3 Transmission / reception apparatus 3a Transmission apparatus 3b Reception apparatus 4 A / D conversion apparatus 5 Arithmetic apparatus 6 Cooling water 7 Adder 8 Difference machine 9 Two-dimensional position display apparatus 10 Vibration displacement calculation apparatus 11 Narrow band pass filter 12 Narrow Band elimination filter

Claims (9)

An ultrasonic transmission device for transmitting ultrasonic waves to an object;
A receiving device for receiving a reflected wave from the object;
An arithmetic device that performs arithmetic processing of a received waveform by this receiving device,
The calculation device includes a function setting unit that sets a prediction function that relates a feature amount of a received waveform obtained in advance and a vibration center position of the object;
A received wave shape feature quantity detecting means for detecting a characteristic difference of distortion of a received wave shape due to a temporal change in inclination of an ultrasonic reflection surface of the object based on a received waveform of the object;
High-order statistic calculation means for calculating a high-order statistic of the object by a prediction function set by the function setting means from the distortion feature difference detected by the received wave shape feature quantity detection means;
Two-dimensional vibration displacement calculation means for obtaining vibration displacement in a two-dimensional space between the ultrasonic wave propagation direction with respect to the object and a direction perpendicular thereto based on the high-order statistic calculated by the high-order statistic calculation means. A vibration measuring device characterized by that. The vibration measuring device according to claim 1, wherein two receiving devices are arranged, and the arithmetic device calculates a vibration displacement in the ultrasonic propagation direction of the measurement target based on an addition value of the two received waveforms received by each receiving device. On the other hand, a vibration measuring apparatus comprising vibration displacement calculating means for obtaining a vibration displacement in a direction perpendicular to the ultrasonic wave propagation direction of the structure based on a difference value between the two received waveforms. 3. The vibration measuring apparatus according to claim 1, wherein the arithmetic unit is a Hilbert transform means for converting the received waveform into a Hilbert transform when digitizing the shape of the received waveform, and is positive depending on the absolute value of the converted received waveform. A vibration measuring apparatus comprising: a waveform converting means for converting a value fluctuation waveform; and a vibration displacement calculating means for obtaining a vibration displacement in a two-dimensional space from the higher-order statistics. 3. The vibration measuring apparatus according to claim 1, wherein the arithmetic unit corrects the absolute value by means of an absolute value taking means for taking an absolute value when the shape of the received waveform is digitized, and an absolute value of the taken received waveform. A vibration measuring device comprising: a waveform converting means for converting a fluctuation waveform of the value of the above and a vibration displacement calculating means for obtaining a vibration displacement in a two-dimensional space from the higher order statistics. 5. The vibration measuring apparatus according to claim 3 or 4, wherein, instead of the higher-order statistic calculating means, a small number of variables consisting only of a large singular value when the vibration displacement calculating means decomposes the value of the received waveform with a singular value decomposition. A vibration measuring apparatus for obtaining vibration displacement in a two-dimensional space using A vibration measurement method for measuring vibration of an object using the vibration measurement device according to any one of claims 1 to 5, wherein a higher-order feature amount converted from a value of a received waveform or A vibration measurement method characterized by using a linear or non-linear prediction function when estimating vibration displacement in a two-dimensional space from a small number of variables. 7. The vibration measuring method according to claim 6, wherein a linear or non-linear prediction function is obtained in advance as test data using a test apparatus. The vibration measurement method according to claim 6 or 7, wherein a relationship value between a propagation time and a temperature corresponding to a vibration natural period is obtained in advance for an ultrasonic propagation medium, and vibration displacement in a two-dimensional space is measured. And measuring the temperature in the container separately from the vibration displacement based on the fluctuation characteristics of the measured value of the average propagation time of the ultrasonic wave. Transmitting ultrasonic waves to the object, obtaining vibration displacement in the ultrasonic propagation direction relative to the object according to the arrival time of the reflected wave reflected from the object;
Predetermining the waveform distortion due to the temporal change in the relationship between the inclination of the ultrasonic probe and the ultrasonic reflection surface on the object due to the vibration of the object, and holding it as vibration displacement data in the direction perpendicular to the ultrasonic wave propagation direction And the process of
At the time of measurement, detecting the shape change of the received reflected wave and measuring the distortion of the waveform due to the change in the inclination of the measurement target surface of the object relative to the traveling direction of the ultrasonic wave,
Based on the characteristic difference between the warped shape and the warped shape in the vibration displacement data, the vibration displacement in the direction perpendicular to the ultrasonic wave propagation direction is obtained, and the two-dimensional space between the ultrasonic wave propagation direction with respect to the object and the direction perpendicular thereto is obtained. A vibration measuring method comprising: obtaining a vibration displacement in

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