JP4216653B2 - Vibrator cleaning device and cleaning method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a vibrator cleaning apparatus and a cleaning method.
[0002]
[Prior art]
FIG. 1 is a perspective view of a cylindrical crystal resonator. The container of the cylindrical crystal unit 1 is composed of a sealing tube 2, a metal ring 3, an insulating member 4, two leads 5, and the like, and a rectangular crystal vibrating piece in which a crystal is processed into a rectangular shape is accommodated. Has been.
[0003]
FIG. 2 is a perspective view of the hermetic terminal. The hermetic terminal 6 has two leads 5 fixed to the metal ring 3 via an insulating member 4.
[0004]
FIG. 3 is a perspective view of the internal structure of the cylindrical crystal resonator. In the rectangular crystal resonator element 7, the X-axis direction shown in the figure is referred to as a rectangular crystal resonator element transverse direction, the Y-axis direction is referred to as a rectangular crystal resonator element longitudinal direction, and a rectangular crystal resonator element including the X-axis and the Y-axis. The plane is called the main surface. Electrodes 8 are formed on both surfaces of the main surface, and the two inner leads 5A are electrically connected to one end in the longitudinal direction of the main surface of the rectangular crystal vibrating piece 7 by the solder paste 9 in a single support. Yes.
[0005]
FIG. 4 is a cross-sectional view of the solder paste and the hermetic terminal before heating. A solder paste 9 is applied to the inner lead 5 </ b> A portion of the airtight terminal 6. The solder paste 9 contains solder fine particles 9A and an organic solvent 9B.
[0006]
FIG. 5 is a cross-sectional view of the solder paste, the hermetic terminal, and the rectangular crystal vibrating piece after heating. After applying the solder paste 9 to the inner lead 5A, the rectangular crystal vibrating piece 7 is inserted between the inner leads 5A and heated. The solder fine particles 9A in the heated solder paste 9 become a solution (melted state) at a liquidus temperature or higher. Thereafter, it becomes solid again below the solidus temperature, and the inner lead 5A and the electrode 8 on the rectangular crystal vibrating piece 7 are conductively fixed. Since the organic solvent 9B such as flux remains as a foreign substance on the surface of the solidified solder paste 9 and the rectangular crystal vibrating piece 7, it is cleaned and removed using a chlorine-based solvent or the like. Further, cleaning means such as a brushing method is also used.
[0007]
There are many other applications for cleaning methods. (See Patent Document 1.)
[0008]
[Patent Document 1]
Japanese Patent Laid-Open No. 2002-50807
[Problems to be solved by the invention]
By the way, when the solder paste containing the solder fine particles and the organic solvent is heated, the organic solvent in the solder paste is boiled due to the temperature rise, and bumping occurs. The solder fine particles are scattered by bumping and adhere to the rectangular crystal vibrating piece and the airtight terminal. In order to remove foreign matter such as solder fine particles and organic solvents such as flux, cleaning with a chlorinated solvent or brushing cleaning is performed, but the solder fine particles adhering to the rectangular crystal vibrating piece and the airtight terminal are completely removed. Otherwise, it may remain and may adversely affect various characteristics of the vibrator. The present invention aims to solve this problem.
[0010]
[Means for Solving the Problems]
A vibrator cleaning device in which two inner leads of a hermetic terminal, in which two lead wires are fixed to a metal ring via an insulating member, and a vibrating piece are fixed by a conductive member, the inner part of the vibrating piece Vibration that has a dry ice spray nozzle arranged with the tip of the spray nozzle facing the airtight terminal side from the end that is not fixed to the lead, and removes foreign matter by spraying dry ice from the spray nozzle toward the vibrating piece A child cleaning device is used.
[0011]
The vibrator cleaning apparatus is a vibrator cleaning apparatus in which two dry ice spray nozzles are arranged so that the main surface of the vibrating piece hits dry ice on each side.
[0012]
A method of cleaning a vibrator in which two inner leads of a hermetic terminal in which two lead wires are fixed to a metal ring through an insulating member and a vibrating piece are fixed by a conductive member, the inner part of the vibrating piece A vibrator that removes foreign matters by spraying dry ice from the spray nozzle toward the vibrating piece by arranging the spray nozzle tip from the end side not fixed to the lead to the airtight terminal side. Use a cleaning method.
[0013]
In the vibrator cleaning method, the vibrator is configured such that two dry ice spray nozzles are disposed so that the main surface of the vibrator element is struck by dry ice on each side, and the dry ice is sprayed from two directions to remove foreign matters. The cleaning method is as follows.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
[0015]
FIG. 6 is a diagram showing a configuration of a main part of a vibrator cleaning apparatus according to an embodiment of the present invention. FIG. 7 is a diagram showing a relative positional relationship between the vibrator and the dry ice spray nozzle. The vibrator cleaning device 16 includes a dry ice spray nozzle 10, a single-axis robot 11 for moving the nozzle 10, an exhaust nozzle 12 for sucking the removed solder fine particles, and a holder for fixing the crystal vibrator 1 '. 13 and a fixing unit 14 for fixing the holder 13.
[0016]
Although not shown, the holder 13 has a hole into which a lead (not shown) of the hermetic terminal 6 is inserted, so that five crystal resonators 1 ′ can be set with one holder.
[0017]
The holder 13 is set to the fixed unit 14 so that the inner lead (not shown) of the rectangular crystal vibrating piece 7 and the end portion not fixed are on the lower side.
[0018]
The dry ice spray nozzle 10 is disposed on the end of the rectangular crystal vibrating piece 7 that is not fixed to the inner lead (not shown) of the rectangular crystal vibrating piece 7. In FIG. In this configuration, two are arranged at an angle of 15 degrees. As a result, the dry ice 15 can be sprayed to the main surface of the rectangular crystal vibrating piece 7 on each side, and the dry ice 15 can also be sprayed to the airtight terminal 6. When the dry ice 15 is sprayed from the dry ice spray nozzle 10, the dry ice 15 collides with the solder fine particles adhering to the rectangular crystal vibrating piece 7 and the airtight terminal 6, and the solder fine particles can be blown off. Foreign matters such as solder fine particles can be removed from the crystal vibrating piece 7 and the airtight terminal 6. The removed solder fine particles are sucked by the exhaust nozzle 12 to prevent reattachment.
[0019]
The dry ice spray nozzle 10 is moved by the single-axis robot 11 to sequentially wash the five quartz crystal resonators 1 ′ set in the holder.
[0020]
In this embodiment, the dry ice spray nozzle 10 is inclined 15 degrees with respect to the main surface of the rectangular crystal vibrating piece 7 and arranged on each of the both surfaces. However, if the object of the present invention can be achieved, the dry ice spray nozzle 10 is tilted. And the number of arrangements may be determined as appropriate.
[0021]
Although the present invention has been described with the rectangular crystal resonator, the present invention can also be applied to cleaning of a resonator using a brittle material such as ceramic or other (single crystal piezoelectric element or the like).
[0022]
【The invention's effect】
Two inner leads of a hermetic terminal, in which two lead wires are fixed to a metal ring through an insulating member, and a vibrating piece are connected to the inner lead of the vibrating piece fixed by a conductive member and from the unfixed end side. By disposing the injection nozzle facing the airtight terminal side and injecting dry ice from the nozzle onto the vibration piece, foreign matter adhering to the vibration piece and the airtight terminal can be removed.
[0023]
Two dry ice spray nozzles are arranged so that the main surface of the vibrating piece is contacted with dry ice on each side, and the foreign matter is removed by spraying the dry ice from two directions to remove the foreign matter.
[Brief description of the drawings]
FIG. 1 is a perspective view of a cylindrical crystal unit. FIG. 2 is a perspective view of an internal structure of a cylindrical crystal unit. FIG. 3 is a perspective view of an internal structure of the cylindrical crystal unit. FIG. 5 is a cross-sectional view of a solder paste, an airtight terminal, and a rectangular crystal resonator piece after heating. FIG. 6 is a diagram showing a main part configuration of a vibrator cleaning apparatus according to an embodiment of the present invention. Diagram showing relative positional relationship between vibrator and dry ice spray nozzle 【Explanation of symbols】
DESCRIPTION OF SYMBOLS 1 Cylindrical crystal oscillator 1 'Crystal oscillator 2 Sealing tube 3 Metal ring 4 Insulating member 5 Lead wire 5A Inner lead wire 6 Airtight terminal 7 Rectangular crystal vibrating piece 8 Electrode 9 Solder paste 9A Solder fine particle 9B Organic solvent 10 Injection Nozzle 11 Single axis robot 12 Exhaust nozzle 13 Holder 14 Fixed unit 15 Dry ice 16 Vibrator cleaning device

Claims (4)

A vibrator cleaning device in which two inner leads of a hermetic terminal, in which two lead wires are fixed to a metal ring via an insulating member, and a vibrating piece are fixed by a conductive member, the inner part of the vibrating piece It has a dry ice spray nozzle that is arranged with the tip of the spray nozzle directed from the end side not fixed to the lead to the airtight terminal side, and sprays dry ice from the spray nozzle toward the vibrating piece to remove foreign matter. A vibrator cleaning device characterized by the above. 2. The cleaning apparatus according to claim 1, wherein two dry ice spray nozzles are arranged so that the main surface of the vibrating piece is contacted with dry ice on each side. A method of cleaning a vibrator in which two inner leads of a hermetic terminal in which two lead wires are fixed to a metal ring via an insulating member and a vibrating piece are fixed by a conductive member, the inner part of the vibrating piece A dry ice spray nozzle is arranged with the tip of the spray nozzle facing from the end side not fixed to the lead to the airtight terminal side, and the foreign particles are removed by spraying dry ice from the spray nozzle toward the vibrating piece. A method of cleaning the vibrator. 4. The cleaning method according to claim 3, wherein two dry ice spray nozzles are arranged so that the main surface of the vibrating piece hits the dry ice on each side, and the dry ice is sprayed from two directions to remove foreign matters. A vibrator cleaning method characterized by the above.

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