JP4198626B2 - Substrate transfer device - Google Patents

Substrate transfer device Download PDF

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JP4198626B2
JP4198626B2 JP2004105140A JP2004105140A JP4198626B2 JP 4198626 B2 JP4198626 B2 JP 4198626B2 JP 2004105140 A JP2004105140 A JP 2004105140A JP 2004105140 A JP2004105140 A JP 2004105140A JP 4198626 B2 JP4198626 B2 JP 4198626B2
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conveyors
conveyor
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connecting member
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JP2005289557A (en
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紀彦 益田
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Anritsu Corp
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Description

本発明は、搬送する基板の幅サイズに対応してコンベア幅を可変可能とした基板搬送装置に関する。   The present invention relates to a substrate transfer apparatus that can change a conveyor width corresponding to the width size of a substrate to be transferred.

例えば、プリント基板製造ラインや電子部品実装ラインでは、従来より、異なる幅の基板に対してコンベア幅を可変可能として、これら異なる幅の基板を搬送可能とすることにより、生産性の効率化を高めた基板搬送装置が採用されている。従来この種の基板搬送装置は、基板搬送基準面が奥側(基板搬送路を挟む一方の側)にあり、搬送する基板の幅サイズに対応して、奥側のコンベアに対し手前側のコンベアを接離移動させていた。   For example, in printed circuit board production lines and electronic component mounting lines, the conveyor width can be made variable for substrates with different widths, and these substrates with different widths can be transported to increase the efficiency of productivity. A substrate transfer device is employed. Conventionally, this type of substrate transfer apparatus has a substrate transfer reference surface on the back side (one side across the substrate transfer path), and corresponds to the width size of the substrate to be transferred. Was moved away from and touching.

しかし、搬送基準面を逆に設定したい(装置の奥側を可動側のコンベアとし、手前側を固定側のコンベアとしたい)場合には、このままでは対応できず、単純に基板搬送装置の搬送方向上流側と下流側とを逆転設置した場合には、操作パネル等が他の装置と反対側となり、操作性を低下させる場合があった。   However, if you want to set the transport reference plane in reverse (the back side of the device is a movable conveyor and the front side is a fixed conveyor), this cannot be done as it is, and simply the transport direction of the substrate transport device When the upstream side and the downstream side are reversely installed, the operation panel or the like is on the opposite side to the other devices, which may reduce operability.

このような不具合を解消したものに、下記特許文献1に開示される基板搬送装置がある。図13は従来の基板搬送装置における幅可変機構の側面図である。図において、121は一対の側板122,123を有する基台で、側板122,123がコンベア112,113を挟む形で位置されている。124は側板122,コンベア112,113及び側板123を貫通するボールネジで、嵌合部にはベアリング126が挿入される。ボールネジ124の一端には従動プーリ127,128が取り付けられ、駆動モータ130の駆動により回動される駆動プーリ131の回動がベルト132を介して従動プーリ127に伝えられボールネジ124が回動される。また、ボールネジ124に取り付けられている従動プーリ128とベルト133が掛け渡された図示しない従動プーリを介してもう一方の図示しないボールネジが回動される。   In order to solve such a problem, there is a substrate transfer device disclosed in Patent Document 1 below. FIG. 13 is a side view of a variable width mechanism in a conventional substrate transfer apparatus. In the figure, reference numeral 121 denotes a base having a pair of side plates 122 and 123, and the side plates 122 and 123 are positioned so as to sandwich the conveyors 112 and 113 therebetween. A ball screw 124 penetrates the side plate 122, the conveyors 112 and 113, and the side plate 123, and a bearing 126 is inserted into the fitting portion. The driven pulleys 127 and 128 are attached to one end of the ball screw 124, and the rotation of the driving pulley 131 that is rotated by driving of the driving motor 130 is transmitted to the driven pulley 127 via the belt 132, so that the ball screw 124 is rotated. . Further, the other ball screw (not shown) is rotated through a driven pulley (not shown) around which a driven pulley 128 and a belt 133 attached to the ball screw 124 are stretched.

コンベア112,113はボールネジ124に嵌合したナット体134,135にベアリング126を介して取り付けられており、ナット体134,135には係止部138,139がボルト142によって固定されている。   The conveyors 112 and 113 are attached to nut bodies 134 and 135 fitted to the ball screw 124 via bearings 126, and locking portions 138 and 139 are fixed to the nut bodies 134 and 135 by bolts 142.

ここで、コンベア112,113の幅を変更するため、一方のコンベア112に対し他方のコンベア113を接離移動させる場合について説明する。   Here, the case where the other conveyor 113 is moved toward and away from one conveyor 112 in order to change the width of the conveyors 112 and 113 will be described.

コンベア112側は、コンベア113の移動時の基準とするため、側板122との間でスペーサ145を介してボルト146止めされて、基準位置に固定される。これにより、コンベア112は駆動モータ130の駆動によりボールネジ124が回動されてもその位置に固定され、ナット体134のみが空回りする。これに対してコンベア113側は、ナット体135の係止部139とコンベア113とをボルト148で固定することにより、ボールネジ124の回動によりナット体135と共に移動される。これにより、コンベア112を搬送基準面としてコンベア112,113の幅が変更可能となる。   Since the conveyor 112 side is used as a reference when the conveyor 113 is moved, the bolts 146 are fixed to the side plate 122 via the spacers 145 and fixed to the reference position. Thereby, even if the ball screw 124 rotates by the drive of the drive motor 130, the conveyor 112 is fixed at that position, and only the nut body 134 is idled. On the other hand, the conveyor 113 side is moved together with the nut body 135 by the rotation of the ball screw 124 by fixing the locking portion 139 of the nut body 135 and the conveyor 113 with bolts 148. As a result, the widths of the conveyors 112 and 113 can be changed using the conveyor 112 as the transport reference plane.

また、コンベア113を搬送基準面として、コンベア113に対しコンベア112を接離移動させることも可能で、以下説明する。   Further, the conveyor 112 can be moved toward and away from the conveyor 113 using the conveyor 113 as a transport reference plane, which will be described below.

この場合、コンベア112と側板122とを固定しているボルト146とスペーサ145を取り外し、図示は省略するがコンベア113と側板123とをスペーサ145とボルト146とで固定する。そして、コンベア113とナット体135の係止部139を固定しているボルト148を取り外し、コンベア112とナット体134の係止部138とを図示は省略するがこのボルト148によって固定する。   In this case, the bolt 146 and the spacer 145 that fix the conveyor 112 and the side plate 122 are removed, and the conveyor 113 and the side plate 123 are fixed by the spacer 145 and the bolt 146 although illustration is omitted. Then, the bolt 148 that fixes the locking portion 139 of the conveyor 113 and the nut body 135 is removed, and the locking portion 138 of the conveyor 112 and the nut body 134 is fixed by the bolt 148 although illustration is omitted.

これにより、コンベア113は駆動モータ130の駆動によりボールネジ124が回動されてもその位置に固定され、ナット体135のみが空回りし、コンベア112はボールネジ124の回動によりナット体134と共に所定方向に移動可能になる。すなわち、搬送基準面が逆に設定されたことになる。
実開平6−66100号公報
As a result, the conveyor 113 is fixed to the position even if the ball screw 124 is rotated by driving the drive motor 130, and only the nut body 135 is idled. The conveyor 112 is rotated together with the nut body 134 in a predetermined direction by the rotation of the ball screw 124. It becomes movable. That is, the conveyance reference plane is set in reverse.
Japanese Utility Model Publication No. 6-66100

しかしながら、上記した従来の基板搬送装置は、搬送基準面を逆に設定する構造を、一対のコンベアのそれぞれに取り付けられるコンベア支持体(ナット体,係止部),ベアリングの4部品,1つの固定部材(スペーサ)との合計5部品を必要としていたため、部品点数が多く、装置の小型化、軽量化に対して不利であるとともに、構造が複雑となり、コストが高くなるという問題があった。
また、一対のコンベアの内側に、コンベア支持体(係止部)が突出して取り付けられるため、一対のコンベア間の幅を狭めると、連結部材に接触する可能性があり、搬送可能な基板の幅に制約があった。
However, the conventional substrate transfer apparatus described above has a structure in which the transfer reference plane is set in reverse, a conveyor support (nut body, locking portion) attached to each of a pair of conveyors, four parts of a bearing, and one fixed Since a total of five parts including the members (spacers) are required, there are problems that the number of parts is large, which is disadvantageous for downsizing and weight reduction of the apparatus, the structure is complicated, and the cost is increased.
In addition, since the conveyor support (locking portion) protrudes and attaches inside the pair of conveyors, if the width between the pair of conveyors is reduced, there is a possibility of contacting the connecting member, and the width of the substrate that can be transported There were restrictions.

本発明は上記状況に鑑みてなされたもので、その第1の目的は、部品点数を減らして、装置を小型化且つ軽量化できるとともに、構造を簡素にして、装置コストを低減することのできる基板搬送装置を得ることにある。また、第2の目的は、従来装置に比べてより小さい幅の基板が搬送できる基板搬送装置を得ることにある。   The present invention has been made in view of the above situation, and a first object of the present invention is to reduce the number of parts, reduce the size and weight of the apparatus, simplify the structure, and reduce the apparatus cost. It is to obtain a substrate transfer device. A second object is to obtain a substrate transfer apparatus that can transfer a substrate having a smaller width than that of a conventional apparatus.

次に、上記の課題を解決するための手段を、実施の形態に対応する図面を参照して説明する。
本発明の請求項1記載の基板搬送装置は、搬送する基板17の幅サイズに応じて一対のコンベア5,6間の幅が可変可能な基板搬送装置1であって、
前記一対のコンベア5,6の外側に離間配置される一対の側板3,4と、
前記一対の側板3,4に両端が回転自在に支持されて回転駆動されるとともに、前記一対のコンベア5,6のそれぞれに形成された貫通部18を貫通するネジ軸10と、
前記ネジ軸10に螺合され且つ該ネジ軸10を中心に回転した姿勢で前記貫通部18を通過可能に形成されるとともに、前記ネジ軸10が回転駆動することで移動し、前記一対のコンベア5,6のいずれか一方5(6)に選択的に固定可能となった連結部材19と、
前記一対のコンベア5,6のいずれか他方6(5)と該他方のコンベア6(5)の外側に位置する前記側板4とを選択的に固定可能にした固定部材28と、
を具備することを特徴とする。
Next, means for solving the above problems will be described with reference to the drawings corresponding to the embodiments.
The substrate transfer apparatus according to claim 1 of the present invention is a substrate transfer apparatus 1 in which the width between the pair of conveyors 5 and 6 can be changed according to the width size of the substrate 17 to be transferred,
A pair of side plates 3, 4 spaced apart from the outside of the pair of conveyors 5, 6;
Both ends of the pair of side plates 3 and 4 are rotatably supported and driven to rotate, and screw shafts 10 that pass through the through portions 18 formed in the pair of conveyors 5 and 6, respectively,
Screwed to the screw shaft 10, and while being able to form passes through the through part 18 in a posture which is rotated around the screw shaft 10, the screw shaft 10 is moved by driving rotation of the pair A connecting member 19 that can be selectively fixed to one of the conveyors 5 and 6 (6);
A fixing member 28 capable of selectively fixing either the other 6 (5) of the pair of conveyors 5 and 6 and the side plate 4 located outside the other conveyor 6 (5);
It is characterized by comprising.

このような構成によれば、一方のコンベア5(6)と連結部材19との固定を解除し、ネジ軸10を回転させることにより連結部材19を他方のコンベア6(5)の位置へ移動させて固定し、他方のコンベア6(5)を側板4(3)に固定している固定部材28を外して一方のコンベア5(6)を固定することで、他方のコンベア6(5)が可動自在となるとともに、一方のコンベア5(6)が固定される。つまり、搬送基準面を逆に設定することが可能となる。これにより、従来、一対のコンベア5,6のそれぞれに取り付けられるコンベア支持体(ナット体,係止部),ベアリングの4部品,1つの固定部材(スペーサ)の合計5部品が必要であったのに対し、1つの連結部材,1つの固定部材の合計2部品で、搬送基準面を逆に設定することができるようになる。   According to such a structure, fixation of one conveyor 5 (6) and the connection member 19 is cancelled | released, and the connection member 19 is moved to the position of the other conveyor 6 (5) by rotating the screw shaft 10. The other conveyor 6 (5) is movable by removing the fixing member 28 that fixes the other conveyor 6 (5) to the side plate 4 (3) and fixing one conveyor 5 (6). While becoming free, one conveyor 5 (6) is fixed. That is, the conveyance reference plane can be set in reverse. Thus, conventionally, a total of five parts were required, that is, a conveyor support (nut body, locking portion) attached to each of the pair of conveyors 5 and 6, four parts of bearings, and one fixing member (spacer). On the other hand, the conveyance reference plane can be set reversely with a total of two parts, one connecting member and one fixing member.

請求項2記載の基板搬送装置は、前記連結部材19が、前記一対のコンベア5,6のいずれか一方に対して、該コンベアの外側で固定されることを特徴とする。   The substrate transfer device according to claim 2 is characterized in that the connecting member 19 is fixed to either one of the pair of conveyors 5 and 6 outside the conveyor.

このような構成によれば、従来装置のように一対のコンベア5,6の内側にコンベア支持体(係止部)が突出しなくなり、一対のコンベア5,6の間で連結部材19が挟まれることがなく、一対のコンベア5,6間の幅を従来装置より狭められるようになる。   According to such a configuration, the conveyor support (locking portion) does not protrude inside the pair of conveyors 5 and 6 as in the conventional device, and the connecting member 19 is sandwiched between the pair of conveyors 5 and 6. The width between the pair of conveyors 5 and 6 can be narrower than that of the conventional apparatus.

請求項3記載の基板搬送装置は、前記連結部材30が、前記ネジ軸10に螺合するナット体21と、該ナット体21に固定され前記コンベア5,6に固定可能な連結板31とからなり、
前記連結板31が、その重心を前記ネジ軸10の中心より上方に位置させることで重力による回転モーメントを生じさせる連結部32を有し、
前記貫通部33が、前記連結部32を下方に位置させて前記連結板31の通過を可能とした形状に形成されていることを特徴とする請求項1又は請求項2記載の基板搬送装置。
The substrate transfer apparatus according to claim 3, wherein the connecting member 30 includes a nut body 21 that is screwed onto the screw shaft 10, and a connecting plate 31 that is fixed to the nut body 21 and can be fixed to the conveyors 5 and 6. Become
The connecting plate 31 has a connecting portion 32 that generates a rotational moment due to gravity by positioning its center of gravity above the center of the screw shaft 10;
3. The substrate transfer apparatus according to claim 1, wherein the penetrating portion is formed in a shape that allows the connecting plate to pass through the connecting portion.

このような構成によれば、コンベア5,6との固定が解除されると、連結部材30が上方の連結部32に重心が置かれていることによって、連結部32を下方とした姿勢へ回転配置され、その姿勢で保持されることになる。したがって、ネジ軸10が回転されると、連結部材30がネジ軸10に沿って移動され、貫通部33を通過して、コンベア5,6の外側へ配置することが可能となる。
また、例えば、連結部32が左右非対称に形成されることで、連結部材30は、固定解除されると連結部32の重心バランスの不均衡により自ら回転する。つまり、固定解除された連結部材30を自動的に回転配置させることが可能となる。
According to such a configuration, when the fixation with the conveyors 5 and 6 is released, the connecting member 30 is rotated to a posture in which the connecting portion 32 is positioned downward because the center of gravity is placed on the upper connecting portion 32. Will be placed and held in that position. Therefore, when the screw shaft 10 is rotated, the connecting member 30 is moved along the screw shaft 10, passes through the penetration portion 33, and can be disposed outside the conveyors 5 and 6.
Further, for example, when the connecting portion 32 is formed asymmetrically, the connecting member 30 rotates by itself due to an imbalance in the center of gravity of the connecting portion 32 when the fixing is released. That is, it becomes possible to automatically rotate and arrange the connection member 30 that has been released from the fixed state.

請求項4記載の基板搬送装置は、前記貫通部40が、前記連結部32の通過部分の一部又は全部を除去して開放させた切欠部であることを特徴とする。   The substrate transfer apparatus according to a fourth aspect is characterized in that the penetrating portion 40 is a cutout portion that is opened by removing a part or all of the passage portion of the connecting portion 32.

このような構成によれば、連結部材30を通過可能に形成された穴の少なくとも一部が除去され、周縁の開放された切欠部となり、その分、貫通部40を小さく形成することが可能となる。   According to such a configuration, at least a part of the hole formed so as to be able to pass through the connecting member 30 is removed to form a notch with an open peripheral edge, and the through portion 40 can be made smaller accordingly. Become.

本発明による請求項1記載の基板搬送装置によれば、ネジ軸を一対の側板に支持し、このネジ軸が貫通する貫通部を一対のコンベアに形成し、ネジ軸に螺合されいずれか一方のコンベアに固定可能となった連結部材を貫通部に対して通過可能に形成し、いずれか他方のコンベアを固定部材によって側板と固定可能としたので、従来、一対のコンベアのそれぞれに取り付けられるコンベア支持体(ナット体,係止部),ベアリングの4部品,1つの固定部材(スペーサ)の合計5部品が必要であったのに対し、1つの連結部材,1つの固定部材の合計2部品で、搬送基準面を逆に設定することができるようになる。これにより、部品点数を減らして、装置を小型化かつ軽量化できるとともに、構造を簡素にして、装置コストを低減することができる。   According to the substrate transfer apparatus of the first aspect of the present invention, the screw shaft is supported by the pair of side plates, and the through portion through which the screw shaft passes is formed in the pair of conveyors, and is screwed to the screw shaft. The connecting member that can be fixed to the conveyor is formed so as to be able to pass through the penetrating portion, and either one of the conveyors can be fixed to the side plate by the fixing member. A total of 5 parts were required: 4 parts for the support (nut body, locking part), bearing, and 1 fixing member (spacer), whereas 2 parts for 1 connecting member and 1 fixing member. The conveyance reference plane can be set in reverse. Thereby, the number of parts can be reduced, the apparatus can be reduced in size and weight, the structure can be simplified, and the apparatus cost can be reduced.

請求項2記載の基板搬送装置によれば、連結部材が、一対のコンベアのいずれか一方に対して、コンベアの外側で固定され、従来装置のように一対のコンベアの内側にコンベア支持体(係止部)が突出しないので、コンベアの間で連結部材が挟まれることがなく、一対のコンベア間の幅を従来装置より狭めることができる。これにより、より小さい幅の基板が搬送できるようになる。   According to the substrate transfer device of the second aspect, the connecting member is fixed to either one of the pair of conveyors on the outside of the conveyor, and the conveyor support (engagement member) on the inside of the pair of conveyors as in the conventional device. Since the stop portion does not protrude, the connecting member is not sandwiched between the conveyors, and the width between the pair of conveyors can be narrower than the conventional apparatus. As a result, a substrate having a smaller width can be transported.

請求項3記載の基板搬送装置によれば、連結部材がナット体と連結板とからなり、連結板が連結部を有し、貫通部が連結部を下方に位置させた連結板を通過可能な形状に形成されているので、コンベアとの固定が解除されると、連結部材が重力によって連結部を下方とした姿勢となり、ネジ軸を回転させることによって、連結部材をネジ軸に沿って移動させ、貫通部を通過させてコンベアの外側へ配置させることができる。これにより、一方のコンベアから他方のコンベアへの連結部材の付け替えを簡単に行うことができる。   According to the substrate transfer apparatus of the third aspect, the connecting member includes the nut body and the connecting plate, the connecting plate has the connecting portion, and the through portion can pass through the connecting plate with the connecting portion positioned below. Since it is formed in a shape, when the fixation with the conveyor is released, the connecting member is in a posture with the connecting portion downward due to gravity, and the connecting member is moved along the screw shaft by rotating the screw shaft. , And can be disposed outside the conveyor through the penetration. Thereby, replacement of the connecting member from one conveyor to the other conveyor can be easily performed.

請求項4記載の基板搬送装置によれば、貫通部が連結部の通過部分の少なくとも一部を除去して開放させた切欠部であるので、連結部材が固定可能で、且つ連結部材が通過可能な貫通部をより小さく形成することができ、装置をより小型化、且つ軽量化することができる。   According to the substrate transfer apparatus of the fourth aspect, since the penetrating portion is a cutout portion that is opened by removing at least a part of the passing portion of the connecting portion, the connecting member can be fixed and the connecting member can pass therethrough. Thus, the through portion can be formed smaller, and the device can be further reduced in size and weight.

以下、本発明に係る基板搬送装置の好適な実施の形態を図面を参照して詳細に説明する。
図1は本発明に係る基板搬送装置における幅可変機構を示す平面図、図2は図1におけるガイド機構を示す斜視図、図3は図1における幅可変機構を基板搬送方向下流側から見た正面図、図4(a)は連結部材の固定状態を示す説明図、図4(b)は貫通部通過時の状態を示す説明図である。
本実施の形態による基板搬送装置1は、搬送する基板17の幅サイズに応じて一対のコンベア5,6間の幅Wが可変可能に構成され、例えば、半田印刷装置,印刷半田検査装置などが並設されるプリント基板製造ラインや、複数の電子部品実装装置が並設される電子部品実装ラインなどに好適に用いられるものである。
DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of a substrate transfer apparatus according to the present invention will be described in detail with reference to the drawings.
1 is a plan view showing a variable width mechanism in a substrate transfer apparatus according to the present invention, FIG. 2 is a perspective view showing a guide mechanism in FIG. 1, and FIG. 3 is a view of the variable width mechanism in FIG. FIG. 4 (a) is a front view, FIG. 4 (a) is an explanatory view showing a fixed state of the connecting member, and FIG. 4 (b) is an explanatory view showing a state when passing through the through portion.
The substrate transport apparatus 1 according to the present embodiment is configured such that the width W between the pair of conveyors 5 and 6 can be changed according to the width size of the substrate 17 to be transported. The present invention is suitably used for a printed circuit board production line arranged in parallel, an electronic component mounting line in which a plurality of electronic component mounting apparatuses are arranged in parallel, and the like.

図1に示すように、2は一対の側板3,4を有する基台で、側板3,4がコンベア5,6を挟む形で位置している。すなわち、側板3,4は、一対のコンベア5,6の外側に離間配置されている。10は側板3,コンベア5,6及び側板4を貫通するネジ軸(ボールネジ)で、側板3,4にベアリング11を介して回転自在に支持されている。ボールネジ10の一端には駆動モータ12が取り付けられ、駆動モータ12の駆動によりボールネジ10が回動される。   As shown in FIG. 1, reference numeral 2 denotes a base having a pair of side plates 3 and 4, and the side plates 3 and 4 are positioned so as to sandwich the conveyors 5 and 6. That is, the side plates 3 and 4 are spaced apart from each other outside the pair of conveyors 5 and 6. Reference numeral 10 denotes a screw shaft (ball screw) that penetrates the side plates 3, the conveyors 5, 6 and the side plate 4, and is rotatably supported by the side plates 3, 4 via bearings 11. A drive motor 12 is attached to one end of the ball screw 10, and the ball screw 10 is rotated by driving the drive motor 12.

一対のコンベア5,6は、ガイド機構13によって側板3,4に支持されている。すなわち、側板3,4にはガイドレール14の両端が固定され、ガイドレール14は、例えば、図2に示すように、コンベア5,6を下方で横断している。それぞれのコンベア5,6の下面には摺動部材15が固定され、摺動部材15は下方の開口したコ字形状の開口部16を有している。一対のコンベア5,6は、摺動部材15の開口部16をガイドレール14の上方から係合させることで、ガイドレール14に沿って、接離移動可能となっている。   The pair of conveyors 5 and 6 are supported on the side plates 3 and 4 by the guide mechanism 13. That is, both ends of the guide rail 14 are fixed to the side plates 3 and 4, and the guide rail 14 traverses the conveyors 5 and 6 downward as shown in FIG. 2, for example. A sliding member 15 is fixed to the lower surface of each conveyor 5, 6, and the sliding member 15 has a U-shaped opening 16 that opens downward. The pair of conveyors 5 and 6 can move toward and away along the guide rail 14 by engaging the opening 16 of the sliding member 15 from above the guide rail 14.

ボールネジ10は、図1に示すように、例えば、ガイド機構13より基板17の搬送方向下流側で一対のコンベア5,6を貫通している。なお、このガイド機構13とボールネジ10との位置は、相互が図示の例とは逆に配置されてもよい。コンベア5,6にはボールネジ10を貫通させる貫通部18が形成されている。貫通部18は、本実施の形態では、例えば、上下に長い矩形状穴として穿設されている。ここで、貫通部18を介してボールネジ10に貫通された一対のコンベア5,6は、図3に示すように、一方のコンベア5のみが連結部材19を介してボールネジ10に支持されている。他方のコンベア6は、貫通部18にボールネジ10が遊びを有して貫通されている。なお、図3中、20,20は、それぞれのコンベア5,6に設けられる搬送ベルトを表す。   As shown in FIG. 1, for example, the ball screw 10 passes through a pair of conveyors 5 and 6 on the downstream side of the guide mechanism 13 in the transport direction of the substrate 17. Note that the positions of the guide mechanism 13 and the ball screw 10 may be arranged opposite to the illustrated example. The conveyors 5 and 6 are formed with through portions 18 through which the ball screw 10 passes. In the present embodiment, the penetrating portion 18 is formed as a rectangular hole that is long in the vertical direction, for example. Here, as for a pair of conveyors 5 and 6 penetrated by the ball screw 10 via the penetration part 18, only one conveyor 5 is supported by the ball screw 10 via the connection member 19, as shown in FIG. In the other conveyor 6, the ball screw 10 is passed through the penetrating part 18 with play. In FIG. 3, 20 and 20 represent conveying belts provided on the respective conveyors 5 and 6.

図4に示すように、連結部材19は、ボールネジ10に螺合するナット体21と、このナット体21に固定されコンベア5,6のいずれか一方に選択的に固定可能な連結板22とからなる。ナット体21と連結板22とは固定穴23に挿通されたボルト24(図5参照)によって一体に固定される。連結板22には連結穴25が穿設されている。連結板22は、図4(b)に示すように、上下方向の寸法が貫通部18を通過可能に設定されている。なお、本実施の形態では、連結部材19は、ナット体21と連結板22とがボルトで固定されている構成となっているが、ナット体21と連結板22とが一体に形成されて構成されていてもよい。   As shown in FIG. 4, the connecting member 19 includes a nut body 21 that is screwed into the ball screw 10, and a connecting plate 22 that is fixed to the nut body 21 and can be selectively fixed to one of the conveyors 5 and 6. Become. The nut body 21 and the connecting plate 22 are integrally fixed by a bolt 24 (see FIG. 5) inserted through the fixing hole 23. A connecting hole 25 is formed in the connecting plate 22. As shown in FIG. 4B, the connecting plate 22 is set so that the vertical dimension can pass through the through-hole 18. In the present embodiment, the connecting member 19 is configured such that the nut body 21 and the connecting plate 22 are fixed with bolts, but the nut body 21 and the connecting plate 22 are integrally formed. May be.

ここで、ボールネジ10は、貫通部18の中心部より上方に偏芯して貫通部を貫通している。一方、連結板22は、ボールネジ10の貫通する穴26が、連結穴25の穿設される一端側22aと反対側に片寄せられている。これにより、連結部材19は、ナット体21がボールネジ10に螺合した状態で、連結穴25の穿設された一端側22aが上方に配置されると、一端側22aが貫通部18の周縁に重なるようになっている。貫通部18の周縁に重なった一端側22aは、連結ボルト27(図5参照)によって、コンベア5に固定される。   Here, the ball screw 10 is eccentric above the center of the penetrating part 18 and penetrates the penetrating part. On the other hand, in the connecting plate 22, the hole 26 through which the ball screw 10 passes is biased to the opposite side to the one end side 22 a where the connecting hole 25 is drilled. Thereby, when the one end side 22a in which the connecting hole 25 is drilled is arranged upward in the state where the nut body 21 is screwed into the ball screw 10, the connecting member 19 has the one end side 22a on the periphery of the penetrating portion 18. It is supposed to overlap. One end side 22a that overlaps the periphery of the penetrating portion 18 is fixed to the conveyor 5 by a connecting bolt 27 (see FIG. 5).

連結部材19は、連結板22が偏芯してボールネジ10に取り付けられるため、連結ボルト27による固定が解除されると、重力によって回転モーメントが発生し、ボールネジ10が回転されても、図4(b)に示すように、一端側22aが下方に配置された状態の姿勢を保持するようになっている。   The connecting member 19 is attached to the ball screw 10 with the connecting plate 22 eccentric, so that when the fixing by the connecting bolt 27 is released, a rotational moment is generated by gravity, and even if the ball screw 10 is rotated, FIG. As shown in b), the one end 22a is held in a state of being disposed below.

連結部材19は、一対のコンベア5,6のいずれか一方に対して、コンベア5,6の外側で固定される。すなわち、従来装置のように一対のコンベアの内側にコンベア支持体(係止部)が突出しなくなり、一対のコンベア5,6の間で連結部材19が挟まれることがなく、一対のコンベア5,6間の幅が従来装置より狭められるようになる。この結果、より小さい幅の基板17が搬送できるようになっている。   The connecting member 19 is fixed to either one of the pair of conveyors 5 and 6 outside the conveyors 5 and 6. That is, unlike the conventional apparatus, the conveyor support (locking portion) does not protrude inside the pair of conveyors, and the connecting member 19 is not sandwiched between the pair of conveyors 5 and 6. The width between them becomes narrower than that of the conventional device. As a result, a substrate 17 having a smaller width can be transported.

コンベア5,6は、連結部材19が固定されない側のものが(本実施の形態ではコンベア6)固定部材28によって側板4に固定される。すなわち、固定部材28は、一対のコンベア5,6のいずれか一方を外側に位置する近接の側板3,4に対して、選択的に固定可能にしている。この固定部材28は、従来と同様なボルトとスペーサを用いることができる。   The conveyors 5 and 6 are fixed to the side plate 4 by fixing members 28 on the side where the connecting member 19 is not fixed (conveyor 6 in the present embodiment). That is, the fixing member 28 can selectively fix either one of the pair of conveyors 5 and 6 to the adjacent side plates 3 and 4 located outside. For the fixing member 28, bolts and spacers similar to the conventional ones can be used.

次に、上記のように構成された基板搬送装置の作用を説明する。
図5は連結部材の固定解除時の状態を示す貫通部の拡大断面図、図6は貫通部に対して通過可能に回転配置された連結部材を示す貫通部の拡大断面図、図7は連結部材がボールネジに沿って移動する過程の幅可変機構を示す正面図、図8は逆のコンベアに付け替えられる連結部材を示す貫通部の拡大断面図、図9は搬送基準面が逆に設定された幅可変機構を示す正面図である。
Next, the operation of the substrate transport apparatus configured as described above will be described.
FIG. 5 is an enlarged cross-sectional view of the penetrating portion showing a state at the time of releasing the connection member, FIG. 6 is an enlarged cross-sectional view of the penetrating portion showing the connecting member that is rotatably arranged with respect to the penetrating portion, and FIG. FIG. 8 is an enlarged cross-sectional view of a penetrating portion showing a connecting member that can be replaced by a reverse conveyor, and FIG. 9 shows a reverse conveyance reference plane. It is a front view which shows a width variable mechanism.

本実施の形態では、当初設定において、コンベア6が固定部材28によって側板4に固定されることで、搬送基準面となっている。これにより、駆動モータ12の駆動によりボールネジ10が回動されると、連結部材19を介してコンベア5が、コンベア6に対して接離移動されるが、コンベア6では貫通部18でボールネジ10が空転するのみとなる。これにより、コンベア6を搬送基準面としてコンベア5,6の幅が変更可能となる。   In the present embodiment, the conveyor 6 is fixed to the side plate 4 by the fixing member 28 in the initial setting, thereby serving as a conveyance reference surface. Thus, when the ball screw 10 is rotated by driving the drive motor 12, the conveyor 5 is moved toward and away from the conveyor 6 through the connecting member 19. It will only idle. Thereby, the width | variety of the conveyors 5 and 6 can be changed by making the conveyor 6 into a conveyance reference plane.

一方、搬送基準面を6からコンベア5へ設定変更するには、先ず、図5に示すように、連結板22をコンベア5に固定している連結ボルト27を外す。次いで、図6に示すように、連結板22の一端側22aが下方となるように、連結部材19を回転させる。この状態で、ボールネジ10を駆動モータ12によって駆動すると、連結部材19の回転位置が重力によって保持されることから、連結部材19のナット体21がボールネジ10と相対回転され、図7に示すように、コンベア6の方向へボールネジ10に沿って移動される。   On the other hand, in order to change the setting of the conveyance reference plane from 6 to the conveyor 5, first, as shown in FIG. 5, the connecting bolt 27 that fixes the connecting plate 22 to the conveyor 5 is removed. Next, as shown in FIG. 6, the connecting member 19 is rotated so that the one end side 22 a of the connecting plate 22 faces downward. When the ball screw 10 is driven by the drive motor 12 in this state, the rotational position of the connecting member 19 is held by gravity, so that the nut body 21 of the connecting member 19 is rotated relative to the ball screw 10, as shown in FIG. , Moved along the ball screw 10 in the direction of the conveyor 6.

次に、連結部材19がコンベア6の貫通部18を通過したら、連結板22の一端側22aが上方となるように連結部材19を手動で回転し、連結ボルト27を用いて連結板22をコンベア6へ固定する。次いで、コンベア6と側板4とを固定していた固定部材28を外し、図9に示すように、当該固定部材28にてコンベア5と側板3とを固定する。   Next, when the connecting member 19 passes through the through portion 18 of the conveyor 6, the connecting member 19 is manually rotated so that the one end side 22 a of the connecting plate 22 is on the upper side, and the connecting plate 22 is connected to the conveyor using the connecting bolt 27. Fix to 6. Next, the fixing member 28 that fixes the conveyor 6 and the side plate 4 is removed, and the conveyor 5 and the side plate 3 are fixed by the fixing member 28 as shown in FIG.

この結果、コンベア5は駆動モータ12の駆動によりボールネジ10が回動されてもその位置に固定され、コンベア6はボールネジ10の回動により連結部材19のナット体21と共に所定方向に移動可能になる。すなわち、搬送基準面が逆に設定されたことになる。   As a result, the conveyor 5 is fixed to the position even if the ball screw 10 is rotated by the drive motor 12, and the conveyor 6 can move in a predetermined direction together with the nut body 21 of the connecting member 19 by the rotation of the ball screw 10. . That is, the conveyance reference plane is set in reverse.

このような基板搬送装置1によれば、ボールネジ10を一対の側板3,4に支持し、このボールネジ10が貫通する貫通部18を一対のコンベア5,6に形成し、ボールネジ10に螺合されいずれか一方のコンベア5,6に固定可能となった連結部材19を貫通部18に通過可能に形成し、いずれか他方のコンベア5,6を固定部材28によって側板3,4と固定可能としたので、従来、一対のコンベアのそれぞれに取り付けられるコンベア支持体(ナット体,係止部),ベアリングの4部品,1つの固定部材(スペーサ)の合計5部品が必要であったのに対し、1つの連結部材19,1つの固定部材28の合計2部品で、搬送基準面を逆に設定することができるようになる。これにより、部品点数を減らして、装置を小型化かつ軽量化できるとともに、構造を簡素にして、装置コストを低減することができる。   According to such a substrate transfer apparatus 1, the ball screw 10 is supported by the pair of side plates 3, 4, and the through portions 18 through which the ball screw 10 passes are formed in the pair of conveyors 5, 6 and screwed to the ball screw 10. The connecting member 19 that can be fixed to any one of the conveyors 5 and 6 is formed so as to be able to pass through the penetrating portion 18, and the other conveyor 5 and 6 can be fixed to the side plates 3 and 4 by the fixing member 28. Therefore, in the past, a total of 5 parts including a conveyor support (nut body, locking portion) attached to each of a pair of conveyors, 4 parts of bearings, and 1 fixing member (spacer) are required. The conveyance reference plane can be set in reverse by using a total of two parts including one connecting member 19 and one fixing member 28. As a result, the number of parts can be reduced, the apparatus can be reduced in size and weight, the structure can be simplified, and the apparatus cost can be reduced.

なお、上述した連結部材19,貫通部18及びガイド機構13の構成は、それに限定されるものではなく、本発明に係る基板搬送装置においては、以下の変形例の構成に代えて備えることもできる。   In addition, the structure of the connection member 19, the penetration part 18, and the guide mechanism 13 mentioned above is not limited to it, In the board | substrate conveyance apparatus which concerns on this invention, it can replace with the structure of the following modifications, and can also be provided. .

図10(a)は変形例に係る連結部材の固定状態を示す説明図、図10(b)は貫通部通過時の状態を示す説明図である。
この変形例では、連結部材30が、ボールネジ10に螺合するナット体21と、ナット体21に固定されコンベア5,6に固定可能な連結板31とからなる。連結部材30は、外形の一部分をボールネジ10の中心より上方へ突出させるとともに左右非対称に形成されている連結部32を有している。連結部32は、例えば、図例のように略コ字形に形成することができる。また、貫通部33は、連結部32を下方に位置させて、図10(b)に示すように、連結部材30の通過を可能とした形状に形成されている。
FIG. 10A is an explanatory view showing a fixed state of the connecting member according to the modification, and FIG. 10B is an explanatory view showing a state when passing through the through portion.
In this modification, the connecting member 30 includes a nut body 21 screwed into the ball screw 10 and a connecting plate 31 fixed to the nut body 21 and fixed to the conveyors 5 and 6. The connecting member 30 has a connecting portion 32 that projects a part of the outer shape upward from the center of the ball screw 10 and is asymmetrical. For example, the connecting portion 32 can be formed in a substantially U shape as shown in the figure. Further, the penetrating portion 33 is formed in a shape that allows the connecting member 30 to pass therethrough as shown in FIG.

この変形例では、連結板31が連結部32を有し、貫通部33が連結部32を下方に位置させたときに当該連結板31を通過可能な形状としているので、連結板31は、コンベア5,6との固定が解除されると連結部32の重心バランスの不均衡により自動的に回転して連結部32を下方とした姿勢となる。そして、ボールネジ10を回転させることによって、連結部材30をボールネジ10に沿って移動させ、貫通部33を通過させてコンベア5,6の外側へ配置させることができる。これにより、一方のコンベア5から他方のコンベアへ6の連結部材30の付け替えを簡単に行うことができる。   In this modification, since the connecting plate 31 has the connecting portion 32 and the through-hole 33 has a shape that can pass through the connecting plate 31 when the connecting portion 32 is positioned below, the connecting plate 31 is a conveyor. When the fixation with 5 and 6 is released, the connecting portion 32 is automatically rotated due to the imbalance of the center of gravity of the connecting portion 32 and the connecting portion 32 is in a downward position. Then, by rotating the ball screw 10, the connecting member 30 can be moved along the ball screw 10, and can be disposed outside the conveyors 5 and 6 through the through portion 33. Thereby, the replacement of the connecting member 30 from one conveyor 5 to the other conveyor can be easily performed.

図11(a)は他の変形例に係る連結部材の固定状態を示す説明図、図11(b)は貫通部通過時の状態を示す説明図である。
この変形例では、貫通部40が、連結部32の通過部分を一部除去して開放させた切欠部で形成されている。したがって、連結部材30が固定可能で、且つ連結部材30が通過可能な貫通部40をより小さく形成することができ、装置をより小型化かつ軽量化することができる。
Fig.11 (a) is explanatory drawing which shows the fixed state of the connection member which concerns on another modification, FIG.11 (b) is explanatory drawing which shows the state at the time of a penetration part passage.
In this modification, the penetrating portion 40 is formed by a notch portion that is partially opened by removing a passing portion of the connecting portion 32. Therefore, the through-hole 40 through which the connecting member 30 can be fixed and through which the connecting member 30 can pass can be formed smaller, and the apparatus can be made smaller and lighter.

図12は変形例に係るガイド機構を備えた幅可変機構を示す平面図である。
この変形例では、ボールネジ10を挟んで、基板17の搬送方向の上流側と下流側とに、上記と同様の一対のガイド機構13が設けられている。その他は、上記の基板搬送装置1と同様の構成となっている。したがって、このような変形例とすることで、コンベア5,6のガイド部が増し、接離移動時におけるコンベア5,6の傾斜を抑制して、よりスムーズな可動を可能にすることができる。
FIG. 12 is a plan view showing a variable width mechanism including a guide mechanism according to a modification.
In this modification, a pair of guide mechanisms 13 similar to the above are provided on the upstream side and the downstream side in the conveyance direction of the substrate 17 with the ball screw 10 interposed therebetween. The rest of the configuration is the same as that of the substrate transfer apparatus 1 described above. Therefore, by setting it as such a modification, the guide part of the conveyors 5 and 6 increases, the inclination of the conveyors 5 and 6 at the time of contact / separation movement can be suppressed, and a smoother movement is possible.

本発明に係る基板搬送装置における幅可変機構の平面図である。It is a top view of the width variable mechanism in the board | substrate conveyance apparatus which concerns on this invention. 図1におけるガイド機構を示す斜視図である。It is a perspective view which shows the guide mechanism in FIG. 図1における幅可変機構を基板搬送方向下流側から見た正面図である。It is the front view which looked at the variable width mechanism in FIG. 1 from the board | substrate conveyance direction downstream. (a)連結部材の固定状態を示す説明図である。 (b)連結部材の貫通部通過時の状態を示す説明図である。(A) It is explanatory drawing which shows the fixed state of a connection member. (B) It is explanatory drawing which shows the state at the time of the penetration part passage of a connection member. 連結部材の固定解除時の状態を示す貫通部の拡大断面図である。It is an expanded sectional view of the penetration part which shows the state at the time of fixed release of a connecting member. 貫通部に対して通過可能に回転配置された連結部材を示す貫通部の拡大断面図である。It is an expanded sectional view of the penetration part which shows the connecting member rotated and arranged so that passage to the penetration part is possible. 連結部材がネジ軸(ボールネジ)に沿って移動する過程の幅可変機構を示す正面図である。It is a front view which shows the width variable mechanism in the process in which a connection member moves along a screw axis (ball screw). 逆のコンベアに付け替えられる連結部材を示す貫通部の拡大断面図である。It is an expanded sectional view of the penetration part which shows the connecting member changed to a reverse conveyor. 搬送基準面が逆に設定された幅可変機構を示す正面図である。It is a front view which shows the width variable mechanism in which the conveyance reference plane was set upside down. (a)変形例に係る連結部材の固定状態を示す説明図である。 (b)変形例に係る連結部材の貫通部通過時の状態を示す説明図である。(A) It is explanatory drawing which shows the fixed state of the connection member which concerns on a modification. (B) It is explanatory drawing which shows the state at the time of the penetration part passage of the connection member which concerns on a modification. (a)変形例に係る連結部材の固定状態を示す説明図である。 (b)変形例に係る連結部材の貫通部通過時の状態を示す説明図である。(A) It is explanatory drawing which shows the fixed state of the connection member which concerns on a modification. (B) It is explanatory drawing which shows the state at the time of the penetration part passage of the connection member which concerns on a modification. 変形例に係るガイド機構を備えた幅可変機構を示す平面図である。It is a top view which shows the width variable mechanism provided with the guide mechanism which concerns on a modification. 従来の基板搬送装置における幅可変機構を示す側面図である。It is a side view which shows the width variable mechanism in the conventional board | substrate conveyance apparatus.

符号の説明Explanation of symbols

1…基板搬送装置
3,4…一対の側板
5,6…一対のコンベア
10…ボールネジ(ネジ軸)
18…貫通部
19,30…連結部材
21…ナット体
28…固定部材
31…連結板
32…連結部
W…幅
DESCRIPTION OF SYMBOLS 1 ... Substrate conveyance apparatus 3, 4 ... A pair of side plate 5, 6 ... A pair of conveyor 10 ... Ball screw (screw axis)
DESCRIPTION OF SYMBOLS 18 ... Through part 19, 30 ... Connection member 21 ... Nut body 28 ... Fixing member 31 ... Connection plate 32 ... Connection part W ... Width

Claims (4)

搬送する基板(17)の幅サイズに応じて一対のコンベア(5,6)間の幅が可変可能な基板搬送装置(1)であって、
前記一対のコンベアの外側に離間配置される一対の側板(3,4)と、
前記一対の側板に両端が回転自在に支持されて回転駆動されるとともに、前記一対のコンベアのそれぞれに形成された貫通部(18)を貫通するネジ軸(10)と、
前記ネジ軸に螺合され且つ該ネジ軸を中心に回転した姿勢で前記貫通部を通過可能に形成されるとともに、前記ネジ軸が回転駆動することで移動し、前記一対のコンベアのいずれか一方に選択的に固定可能となった連結部材(19)と、
前記一対のコンベアのいずれか他方と該他方のコンベアの外側に位置する前記側板とを選択的に固定可能にした固定部材(28)と、
を具備することを特徴とする基板搬送装置。
A substrate transfer device (1) capable of varying a width between a pair of conveyors (5, 6) according to a width size of a substrate (17) to be transferred,
A pair of side plates (3, 4) spaced apart from the outside of the pair of conveyors;
Both ends of the pair of side plates are rotatably supported and driven to rotate, and a screw shaft (10) that penetrates a through portion (18) formed in each of the pair of conveyors;
Either of the pair of conveyors is formed so as to be able to pass through the penetrating portion in a posture that is screwed onto the screw shaft and rotated around the screw shaft , and the screw shaft is moved by being rotationally driven . A connecting member (19) which can be selectively fixed to one side;
A fixing member (28) capable of selectively fixing either the other of the pair of conveyors and the side plate located outside the other conveyor;
A substrate transfer apparatus comprising:
前記連結部材が、前記一対のコンベアのいずれか一方に対して、該コンベアの外側で固定されることを特徴とする請求項1記載の基板搬送装置。   The substrate transfer apparatus according to claim 1, wherein the connecting member is fixed to either one of the pair of conveyors outside the conveyor. 前記連結部材(30)が、前記ネジ軸に螺合するナット体(21)と、該ナット体に固定され前記コンベアに固定可能な連結板(31)とからなり、
前記連結板が、その重心を前記ネジ軸の中心より上方に位置させることで重力による回転モーメントを生じさせる連結部(32)を有し、
前記貫通部が、前記連結部を下方に位置させて前記連結板の通過を可能とした形状に形成されていることを特徴とする請求項1又は請求項2記載の基板搬送装置。
The connecting member (30) comprises a nut body (21) screwed onto the screw shaft, and a connecting plate (31) fixed to the nut body and fixable to the conveyor,
The connecting plate has a connecting portion (32) for generating a rotational moment due to gravity by positioning its center of gravity above the center of the screw shaft,
The substrate transport apparatus according to claim 1, wherein the penetrating portion is formed in a shape that allows the connecting plate to pass by positioning the connecting portion downward.
前記貫通部(40)が、前記連結部の通過部分の一部又は全部を除去して開放させた切欠部であることを特徴とする請求項3記載の基板搬送装置。   4. The substrate transfer apparatus according to claim 3, wherein the penetrating part (40) is a notch part that is opened by removing a part or all of a passing part of the connecting part.
JP2004105140A 2004-03-31 2004-03-31 Substrate transfer device Expired - Fee Related JP4198626B2 (en)

Priority Applications (1)

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Application Number Priority Date Filing Date Title
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JP4198626B2 true JP4198626B2 (en) 2008-12-17

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106697768A (en) * 2016-12-30 2017-05-24 深圳市小智勇机器人有限公司 Conveyor belt with adjustable width

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JP4794497B2 (en) * 2007-04-12 2011-10-19 シーケーディ株式会社 Substrate transfer device
WO2020080025A1 (en) * 2018-10-15 2020-04-23 株式会社 東京ウエルズ Non-destructive automated inspection system
JP2020070136A (en) * 2018-10-30 2020-05-07 株式会社ユーシン精機 Product stocking device
WO2022011889A1 (en) * 2020-07-13 2022-01-20 柏承科技(昆山)股份有限公司 Continuous production line using msap process

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106697768A (en) * 2016-12-30 2017-05-24 深圳市小智勇机器人有限公司 Conveyor belt with adjustable width

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