JP4193278B2 - Method for manufacturing magnetic detection device - Google Patents

Method for manufacturing magnetic detection device Download PDF

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Publication number
JP4193278B2
JP4193278B2 JP09541399A JP9541399A JP4193278B2 JP 4193278 B2 JP4193278 B2 JP 4193278B2 JP 09541399 A JP09541399 A JP 09541399A JP 9541399 A JP9541399 A JP 9541399A JP 4193278 B2 JP4193278 B2 JP 4193278B2
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Japan
Prior art keywords
magnet
integrated circuit
resin
mold
thin
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JP09541399A
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JP2000292203A (en
Inventor
秀文 伊藤
博文 上野山
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Denso Corp
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Denso Corp
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Description

【0001】
【発明の属する技術分野】
本発明は、磁気抵抗素子の抵抗値変化を利用して被検出体の回転等の運動を検出する磁気検出装置の製造方法に関する。
【0002】
【従来の技術】
この種の磁気検出装置は、例えば特開平6−174490号公報に記載されているように、ギヤ等の被検出体の回転を検出するものがある。このものは、例えばフェライト系プラスチックマグネット等のように熱可塑性樹脂を用いて中空円筒状に成形されたバイアス磁石(磁石部)の中空部に、磁気抵抗素子を有し樹脂によりモールドされたモールド材(集積回路部)を貫通させ、両者を一体保持するようにしたものである。
【0003】
そして、バイアス磁石と被検出体との間に磁界を発生させ、被検出体の運動に応じた磁界の変化によって磁気抵抗素子に生じる抵抗値変化を、被検出体〜磁気抵抗素子〜バイアス磁石の磁気回路により検出することによって、被検出体の運動状態を検出できるようになっている。
ここで、磁石部と集積回路部との組付においては、従来、次のような方法が採用されていた。
【0004】
まず、モールドされた集積回路部と樹脂成形された磁石部とを位置決めピンで仮止めして位置決めを行い、該ピンを抜くと同時に樹脂成形(2次成形)を行い、磁石部と集積回路部との固定を完了させる方法がある。また、磁石部に対して集積回路部を接着したり、圧入したりすることにより、両者の固定を行うという方法もある。
【0005】
【発明が解決しようとする課題】
しかしながら、上記位置決めピンを用いた方法では、集積回路部と磁石部の固定を上記2次成形において行っている。そのため、例えば、トリミングによる磁気特性の調整等、両者の固定が必要な工程を、2次成形前に行う場合には、上記位置決めピンを用いた方法を用いることはできない。
【0006】
また、上記接着による固定方法では、接着剤の硬化がバッチ処理となり、加工工数がかかるため、コストが高くなる。また、上記圧入による固定方法では、集積回路部と磁石部との寸法精度を出すことが困難であるため、圧入荷重の管理が難しいという問題がある。
本発明は上記問題に鑑み、熱可塑性樹脂を用いて成形された磁石部と、磁気抵抗素子を有し樹脂によりモールドされた集積回路部との固定を、精度良く安価に実現する磁気検出装置の製造方法を提供することを目的とする。
【0007】
【課題を解決するための手段】
請求項1記載の発明は、磁石部が熱可塑性樹脂の成形体であることに着目してなされたものであり、磁石部(20)として貫通穴を有するものを用い、該貫通穴に集積回路部(10)を挿入した後、磁石部(20)の一部を加熱しながら押圧して変形させることにより、該磁石部を集積回路部(10)に固定するものであり、集積回路部(10)における樹脂(12)の一部に凹部(13)を形成し、磁石部(20)の加熱押圧により、磁石部(20)の一部を該凹部内に食い込ませるように変形させるものであり、磁石部(20)における前記変形させられる部分に、予め、該磁石部の外周面から窪んだ窪み部(22)を形成することにより該窪み部にて該磁石部における他の部分よりも薄い薄肉部(21)を形成するものであり、磁石部(20)の加熱押圧は、外径が窪み部(22)の内径よりも小さい発熱体よりなるヒータピン(30)を用い、加熱した状態の該ヒータピンを該窪み部へ挿入し薄肉部(21)に押し当てることにより、該薄肉部を熱変形させて樹脂(12)の凹部(13)に食い込ませるようにすることを特徴としている。
【0008】
本製造方法によれば、磁石部の一部を加熱しながら押圧して変形させることで、磁石部と集積回路部とが一種のかしめ固定により固定された状態となるため、従来のように2次成形あるいは接着や圧入によらずに、両者を精度良く安価に固定することができる。また、製造方法のように、集積回路部(10)における樹脂(12)の一部に凹部(13)を形成し、磁石部(20)の一部を該凹部内に食い込ませるように変形させることにより、該磁石部の変形部分が該凹部にかみ合うため、該集積回路部と該磁石部との固定をより強固なものとできる。
【0009】
また、製造方法のように、磁石部(20)における変形させられる部分に、予め該磁石部における他の部分よりも薄い薄肉部(21)を形成すれば、より変形しやすくできる。なお、上記各手段の括弧内の符号は、後述する実施形態に記載の具体的手段との対応関係を示す一例である。
【0010】
【発明の実施の形態】
以下、本発明を図に示す実施形態について説明する。本実施形態の磁気検出装置は、例えば、エンジン回転センサ、カム角センサ、クランク角センサ、車速センサ、ATセンサ、車輪速センサ等、回転を行う被検出体(ギヤ等)の回転を検出する回転検出装置として適用することができる。図1は本実施形態に係る製造工程を示す概略断面図であり、最終的に図中の(c)に示す磁気検出装置100が製造される。
【0011】
図1(c)に示す磁気検出装置100において、10はモールドIC(本発明の集積回路部)である。モールドIC10は、図示しないICチップや磁気抵抗素子等が搭載されたリードフレーム11が、エポキシ等の熱硬化性樹脂よりなるモールド樹脂(本発明の樹脂)12により上記ICチップや磁気抵抗素子等を包み込むようにモールドされてなる。
【0012】
20は、熱可塑性樹脂を用いて中空円筒状に成形されたマグネット(本発明の磁石部)である。マグネット20は、例えばPPS(ポリフェニレンサルファイド)等の熱可塑性樹脂をバインダとしてフェライト等の磁性粉を混合したもの(プラスチックマグネット材料)を、射出成形することにより成形され、勿論、熱可塑性を有する。マグネット20は、その中空穴(貫通穴)に挿入固定されたモールドIC10により支持されている。なお、モールドIC10におけるマグネット20の円筒軸回りの回転を防止するため、上記中空穴は、上記円筒軸と直交する断面形状を角穴形状、扁平穴形状等の真円でない形状とする。
【0013】
マグネット20には、その外周面から窪んだ窪み部22を形成することにより、窪み部22にてマグネット20における他の部分よりも薄肉の薄肉部21が形成されている。そして、薄肉部21を熱変形させ、モールド樹脂12に形成された凹部13に食い込ませてモールドIC10とマグネット20とを係止することにより、これらモールドIC10とマグネット20との固定がなされている。
【0014】
ここで、図1(c)に示す様に、モールドIC10においては、モールド樹脂12から露出するリードフレーム11部分(図中、左側端部)が外部回路等と電気的に接続される部分を構成しており、リードフレーム11における該露出部と反対側の端部(図中、右側端部)に、上記ICチップや磁気抵抗素子を搭載し、モールド樹脂12で内包する。そのため、上記した薄肉部21の熱変形による熱等の影響を受けないように、凹部13は上記ICチップ等の搭載部分に形成しないことが好ましい。
【0015】
かかる磁気検出装置100の検出作用は基本的に上記従来のものと同様である。即ち、マグネット20と歯車等の被検出体との間に磁界を発生させ、被検出体の運動に応じた磁界の変化によってモールドIC10の磁気抵抗素子に生じる抵抗値変化を、被検出体〜モールドIC10〜マグネット20の磁気回路を介して検出することにより、被検出体の運動状態を検出できる。
【0016】
次に、磁気検出装置100の製造方法について、図1(a)及び(b)も参照して述べる。
まず、図1(a)に示す様、モールドIC10と、射出成形されたマグネット20とを用意し、所望の特性が得られる磁気回路となる様に定められた位置まで、マグネット20の中空穴にモールドIC10を挿入する。挿入完了時において、モールドIC10の凹部13とマグネット20の薄肉部21とは一致するようになっており、これら両部13、21は、それぞれモールド用及びマグネットの成形型に両部13、21に対応する形状を形成する等により、予め作られる。
【0017】
次に、発熱体よりなるヒータピン30を加熱した状態で、図1(a)中の矢印に示す様に、マグネット20の窪み部22内へ挿入し、図1(b)に示す様に、薄肉部21に押し当てる。このヒータピン30の熱及び押圧力により熱可塑性であるマグネット20の薄肉部21は熱変形し、モールド樹脂12の凹部13に食い込む。こうして、モールドIC10とマグネット20とが固定される。その後、ヒータピン30を図1(c)に示す様に、引き離す。
【0018】
ここで、例えば、マグネット20における熱可塑性樹脂をPPSとし、モールドIC10におけるモールド樹脂12をエポキシ樹脂とした場合、薄肉部21の肉厚を約1.5±0.5mm、ヒータピン30の温度を約320〜350℃とすることで、上記の熱変形による固定がなされる。モールド樹脂12は熱硬化性樹脂であるため溶融することはないため、ヒータピン30の温度は、PPSの溶融温度以上として、コントロール可能な温度幅で上限を決めればよい。
【0019】
また、ヒータピン30の外径を窪み部22の内径よりも小さくすることにより、ヒータピン30と窪み部22の側壁との接触を回避する。例えば、ヒータピン30の外径をφ2mm、窪み部22の内径をφ3mmとできる。
上記製造方法にて組付固定されたモールドIC10とマグネット20とは、薄肉部21の凹部13への食い込みにより、モールドIC10の挿入方向へのズレを回避し、また、上述のように、マグネット20の中空穴(貫通穴)を角穴形状等としているため、モールドIC10におけるマグネット20の円筒軸回りの回転防止がなされる。
【0020】
このように、本実施形態によれば、所望の配置とされたモールドIC10及びマグネット20に対して、マグネット20の薄肉部21を加熱しながら押圧して変形させることで、モールドIC10とマグネット20とが一種のかしめ固定された状態となるため、従来のように2次成形あるいは接着や圧入によらずに、両者を精度良く安価に固定することができる。
【0021】
また、本実施形態では、マグネット20における変形させられる部分に、予めマグネット20における他の部分よりも薄い薄肉部21を形成しているため、より変形しやすくできる。
なお、上記実施形態では、モールド樹脂12に凹部13を形成しておき、マグネット20の薄肉部21を凹部13内に食い込ませるように変形させて凹部13とかみ合わせることによって、モールドIC10とマグネット20との固定をより強固としているが、モールド樹脂12に凹部13を形成しなくとも、モールドIC10が上記中空穴から抜けないように、マグネット20をモールド樹脂12表面の何処かの部位に引っかかるように変形させ係止させれば良い。
【図面の簡単な説明】
【図1】本発明の実施形態に係る磁気検出装置の製造方法を示す工程図である。
【符号の説明】
10…モールドIC、12…モールド樹脂、13…凹部、20…マグネット、21…薄肉部。
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method of manufacturing a magnetic detection device that detects a movement such as rotation of a detection object using a change in resistance value of a magnetoresistive element.
[0002]
[Prior art]
As this type of magnetic detection device, there is one that detects the rotation of a detected object such as a gear, as described in, for example, Japanese Patent Application Laid-Open No. 6-174490. This is a molding material which has a magnetoresistive element and is molded with a resin in the hollow part of a bias magnet (magnet part) formed into a hollow cylindrical shape using a thermoplastic resin such as a ferrite plastic magnet. (Integrated circuit part) is penetrated and both are held together.
[0003]
Then, a magnetic field is generated between the bias magnet and the detected object, and a resistance value change generated in the magnetoresistive element due to a change in the magnetic field according to the motion of the detected object is detected from the detected object to the magnetoresistive element to the bias magnet. By detecting with a magnetic circuit, the motion state of the detected object can be detected.
Here, in the assembly of the magnet portion and the integrated circuit portion, the following method has been conventionally employed.
[0004]
First, the molded integrated circuit part and the resin-molded magnet part are temporarily fixed with positioning pins to perform positioning, and at the same time the resin molding (secondary molding) is performed, the magnet part and the integrated circuit part There is a way to complete the fixing with. Also, there is a method of fixing both of the integrated circuit parts by bonding or press-fitting them to the magnet part.
[0005]
[Problems to be solved by the invention]
However, in the method using the positioning pin, the integrated circuit portion and the magnet portion are fixed in the secondary molding. For this reason, for example, when a process that requires fixing both of them, such as adjustment of magnetic characteristics by trimming, is performed before the secondary molding, the method using the positioning pins cannot be used.
[0006]
Moreover, in the fixing method by the said adhesion | attachment, since hardening of an adhesive agent becomes a batch process and requires a process man-hour, cost becomes high. Moreover, the fixing method by press-fitting has a problem that it is difficult to manage the press-fitting load because it is difficult to obtain the dimensional accuracy between the integrated circuit part and the magnet part.
In view of the above problems, the present invention provides a magnetic detection device that can accurately and inexpensively fix a magnet portion molded using a thermoplastic resin and an integrated circuit portion having a magnetoresistive element and molded with resin. An object is to provide a manufacturing method.
[0007]
[Means for Solving the Problems]
The invention according to claim 1 is made by paying attention to the fact that the magnet part is a molded body of a thermoplastic resin, and uses a magnet part (20) having a through hole and is integrated in the through hole. After inserting the circuit portion (10), the magnet portion is fixed to the integrated circuit portion (10) by pressing and deforming a part of the magnet portion (20) while heating , and the integrated circuit portion A recess (13) is formed in a part of the resin (12) in (10), and the magnet part (20) is deformed so that a part of the magnet part (20) is bitten into the recess by heating and pressing the magnet part (20). In the magnet portion (20), the recess portion (22) that is recessed from the outer peripheral surface of the magnet portion is formed in advance in the portion to be deformed, so that the recess portion is more than the other portion in the magnet portion. Forming a thin thin part (21) and a magnet In the heating and pressing of (20), the heater pin (30) made of a heating element whose outer diameter is smaller than the inner diameter of the recess (22) is used, and the heated heater pin is inserted into the recess and the thin wall portion (21). The thin-walled portion is thermally deformed by being pressed against the concave portion (13) of the resin (12) .
[0008]
According to this manufacturing method, since a part of the magnet part is pressed and deformed while being heated, the magnet part and the integrated circuit part are fixed by a kind of caulking, so that the conventional 2 Both of them can be fixed with high accuracy and at low cost without being subjected to subsequent molding, adhesion or press-fitting. Further, as in this manufacturing method, a recess (13) is formed in a part of the resin (12) in the integrated circuit part (10), and a part of the magnet part (20) is bitten into the recess. By doing so, the deformed portion of the magnet portion meshes with the concave portion, so that the integrated circuit portion and the magnet portion can be more firmly fixed.
[0009]
Moreover, if the thin part (21) thinner than the other part in this magnet part is previously formed in the part made to deform | transform in the magnet part (20) like this manufacturing method, it can make it easier to deform | transform. In addition, the code | symbol in the bracket | parenthesis of each said means is an example which shows a corresponding relationship with the specific means as described in embodiment mentioned later.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments shown in the drawings will be described below. The magnetic detection device according to the present embodiment is, for example, an engine rotation sensor, a cam angle sensor, a crank angle sensor, a vehicle speed sensor, an AT sensor, a wheel speed sensor, or the like that detects the rotation of a detection target (gear or the like) that rotates. It can be applied as a detection device. FIG. 1 is a schematic cross-sectional view showing a manufacturing process according to the present embodiment, and finally a magnetic detection device 100 shown in FIG. 1C is manufactured.
[0011]
In the magnetic detection device 100 shown in FIG. 1C, reference numeral 10 denotes a mold IC (an integrated circuit portion of the present invention). The mold IC 10 includes a lead frame 11 on which an IC chip, a magnetoresistive element, etc. (not shown) are mounted. Molded to wrap.
[0012]
Reference numeral 20 denotes a magnet (magnet portion of the present invention) formed into a hollow cylindrical shape using a thermoplastic resin. The magnet 20 is formed, for example, by injection molding a material (plastic magnet material) in which a magnetic powder such as ferrite is mixed with a thermoplastic resin such as PPS (polyphenylene sulfide) as a binder, and of course has thermoplasticity. The magnet 20 is supported by a mold IC 10 inserted and fixed in the hollow hole (through hole). In order to prevent rotation of the magnet 20 in the mold IC 10 around the cylindrical axis, the hollow hole has a cross-sectional shape orthogonal to the cylindrical axis such as a square hole shape or a flat hole shape.
[0013]
The magnet 20 is formed with a recessed portion 22 that is recessed from the outer peripheral surface thereof, so that the recessed portion 22 forms a thin portion 21 that is thinner than other portions of the magnet 20. The thin-walled portion 21 is thermally deformed and digged into the concave portion 13 formed in the mold resin 12 to lock the mold IC 10 and the magnet 20, thereby fixing the mold IC 10 and the magnet 20.
[0014]
Here, as shown in FIG. 1C, in the mold IC 10, a portion of the lead frame 11 exposed from the mold resin 12 (the left end portion in the drawing) is electrically connected to an external circuit or the like. The IC chip and the magnetoresistive element are mounted on the end portion of the lead frame 11 opposite to the exposed portion (right end portion in the figure), and are encapsulated in the mold resin 12. Therefore, it is preferable not to form the recess 13 in the mounting portion of the IC chip or the like so as not to be affected by heat or the like due to thermal deformation of the thin portion 21 described above.
[0015]
The detection action of the magnetic detection device 100 is basically the same as that of the conventional one. That is, a magnetic field is generated between the magnet 20 and a detected object such as a gear, and a change in resistance value generated in the magnetoresistive element of the mold IC 10 due to a change in the magnetic field according to the movement of the detected object is detected from the detected object to the mold. By detecting through the magnetic circuit of the IC 10 to the magnet 20, the motion state of the detected object can be detected.
[0016]
Next, a method for manufacturing the magnetic detection device 100 will be described with reference to FIGS.
First, as shown in FIG. 1A, a mold IC 10 and an injection-molded magnet 20 are prepared, and the magnet 20 is inserted into a hollow hole up to a predetermined position so as to obtain a magnetic circuit capable of obtaining desired characteristics. Insert the mold IC 10. When the insertion is completed, the concave portion 13 of the mold IC 10 and the thin portion 21 of the magnet 20 coincide with each other, and these both portions 13 and 21 are respectively connected to the molding portions of the mold and magnet. It is made in advance by forming a corresponding shape.
[0017]
Next, in a state where the heater pin 30 made of a heating element is heated, the heater pin 30 is inserted into the recessed portion 22 of the magnet 20 as shown by an arrow in FIG. 1A, and as shown in FIG. Press against part 21. The thin portion 21 of the magnet 20 which is thermoplastic due to the heat and pressing force of the heater pin 30 is thermally deformed and bites into the recess 13 of the mold resin 12. Thus, the mold IC 10 and the magnet 20 are fixed. Thereafter, the heater pins 30 are pulled apart as shown in FIG.
[0018]
Here, for example, when the thermoplastic resin in the magnet 20 is PPS and the mold resin 12 in the mold IC 10 is an epoxy resin, the thickness of the thin portion 21 is about 1.5 ± 0.5 mm, and the temperature of the heater pin 30 is about By setting the temperature to 320 to 350 ° C., the fixing by the thermal deformation is performed. Since the mold resin 12 is a thermosetting resin and does not melt, the upper limit of the temperature of the heater pin 30 may be determined by a controllable temperature range that is equal to or higher than the melting temperature of the PPS.
[0019]
Further, by making the outer diameter of the heater pin 30 smaller than the inner diameter of the recess 22, contact between the heater pin 30 and the side wall of the recess 22 is avoided. For example, the outer diameter of the heater pin 30 can be 2 mm, and the inner diameter of the recess 22 can be 3 mm.
The mold IC 10 and the magnet 20 which are assembled and fixed by the above manufacturing method avoid the deviation in the insertion direction of the mold IC 10 by biting into the concave portion 13 of the thin portion 21, and as described above, the magnet 20 Since the hollow hole (through hole) has a square hole shape or the like, rotation around the cylindrical axis of the magnet 20 in the mold IC 10 is prevented.
[0020]
As described above, according to the present embodiment, the mold IC 10 and the magnet 20 can be obtained by pressing and deforming the thin portion 21 of the magnet 20 while heating the mold IC 10 and the magnet 20 in a desired arrangement. Therefore, both of them can be fixed with high accuracy and at low cost without using secondary molding, adhesion, or press fitting as in the prior art.
[0021]
Moreover, in this embodiment, since the thin part 21 thinner than the other part in the magnet 20 is previously formed in the part to be deformed in the magnet 20, it can be more easily deformed.
In the above-described embodiment, the mold IC 10 and the magnet 20 are formed by forming the recess 13 in the mold resin 12, deforming the thin portion 21 of the magnet 20 so as to bite into the recess 13, and engaging with the recess 13. The magnet 20 is caught on some part of the surface of the mold resin 12 so that the mold IC 10 does not come out of the hollow hole without forming the recess 13 in the mold resin 12. It only has to be deformed and locked.
[Brief description of the drawings]
FIG. 1 is a process diagram showing a method of manufacturing a magnetic detection device according to an embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 ... Mold IC, 12 ... Mold resin, 13 ... Recessed part, 20 ... Magnet, 21 ... Thin part.

Claims (1)

熱可塑性樹脂を用いて成形され、被検出体との間に磁界を発生させる磁石部(20)と、前記被検出体の運動に応じた前記磁界の変化により抵抗値変化を生じる磁気抵抗素子を有すると共に、樹脂(12)によりモールドされた集積回路部(10)とを備え、
前記磁石部と前記集積回路部とを組付固定してなる磁気検出装置の製造方法であって、
前記磁石部(20)として貫通穴を有するものを用い、該貫通穴に前記集積回路部(10)を挿入した後、前記磁石部の一部を加熱しながら押圧して変形させることにより、前記磁石部を前記集積回路部に固定するものであり、
前記集積回路部(10)における前記樹脂(12)の一部に凹部(13)を形成し、前記磁石部(20)の加熱押圧により、前記磁石部の一部を前記凹部内に食い込ませるように変形させるものであり、
前記磁石部(20)における前記変形させられる部分に、予め、前記磁石部の外周面から窪んだ窪み部(22)を形成することにより前記窪み部にて前記磁石部における他の部分よりも薄い薄肉部(21)を形成するものであり、
前記磁石部(20)の加熱押圧は、外径が前記窪み部(22)の内径よりも小さい発熱体よりなるヒータピン(30)を用い、加熱した状態の前記ヒータピンを前記窪み部へ挿入し前記薄肉部(21)に押し当てることにより、前記薄肉部(21)を熱変形させて前記樹脂(12)の前記凹部(13)に食い込ませるようにすることを特徴とする磁気検出装置の製造方法。
A magnet part (20) that is molded using a thermoplastic resin and generates a magnetic field between the object and a magnetoresistive element that causes a change in resistance value due to a change in the magnetic field in accordance with the motion of the object to be detected. And an integrated circuit part (10) molded with resin (12),
A method of manufacturing a magnetic detection device in which the magnet portion and the integrated circuit portion are assembled and fixed,
Using the magnet part (20) having a through-hole, and inserting the integrated circuit part (10) into the through-hole, then pressing and deforming part of the magnet part while heating, Fixing the magnet part to the integrated circuit part ;
A concave portion (13) is formed in a part of the resin (12) in the integrated circuit portion (10), and a part of the magnet portion is bitten into the concave portion by heating and pressing the magnet portion (20). To be transformed into
In the magnet portion (20), the portion to be deformed is previously formed with a recess portion (22) that is recessed from the outer peripheral surface of the magnet portion, so that the recess portion is thinner than the other portions of the magnet portion. Forming a thin-walled portion (21),
The heating pressing of the magnet part (20) uses the heater pin (30) made of a heating element whose outer diameter is smaller than the inner diameter of the hollow part (22), and inserts the heated heater pin into the hollow part. A method of manufacturing a magnetic detection device , wherein the thin-walled portion (21) is thermally deformed by being pressed against the thin-walled portion (21) so as to bite into the concave portion (13) of the resin (12). .
JP09541399A 1999-04-01 1999-04-01 Method for manufacturing magnetic detection device Expired - Fee Related JP4193278B2 (en)

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JP4868753B2 (en) * 2005-03-18 2012-02-01 ハイデンハイン株式会社 Multi-rotation encoder and manufacturing method thereof
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US8587297B2 (en) 2007-12-04 2013-11-19 Infineon Technologies Ag Integrated circuit including sensor having injection molded magnetic material
US8058870B2 (en) 2008-05-30 2011-11-15 Infineon Technologies Ag Methods and systems for magnetic sensing
US8610430B2 (en) 2008-05-30 2013-12-17 Infineon Technologies Ag Bias field generation for a magneto sensor
US8174256B2 (en) 2008-05-30 2012-05-08 Infineon Technologies Ag Methods and systems for magnetic field sensing
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