JP4155209B2 - Microelectromechanical system resonator, manufacturing method thereof, and frequency filter - Google Patents

Description

  The present invention relates to a resonator of a microelectromechanical system that easily achieves a balanced output by a balanced input, a manufacturing method thereof, and a frequency filter.

  With the development of information communication technology, the number of devices that use a network has increased dramatically in recent years, and the demand for wireless network technology is increasing from the viewpoint of usability.

  RF (radio frequency) front-end modules used in wireless communications include relatively small sizes such as surface acoustic wave (SAW) filters and dielectric filters for RF filters and IF (intermediate frequency) filters in addition to semiconductor chips. There are large parts, and these existences have prevented the RF front end from being reduced in size and cost. It is currently required to incorporate these filter functions into a semiconductor chip.

  A micro vibrator formed by using a semiconductor process technology has features such as a small area occupied by the device, a high Q value, and the ability to integrate with other semiconductor devices. Among them, the use as an IF filter and an RF filter has been proposed by research institutions such as the University of Michigan (see, for example, Non-Patent Document 1).

  However, the resonance frequency of the micro-vibrator that has been proposed and verified so far does not exceed 200 MHz at the maximum. Thus, it is difficult to provide a high Q value, which is a characteristic of the micro vibrator, in the GHz band frequency region.

  At present, the resonance peak as an output signal generally tends to be small in a high frequency region, and it is necessary to improve the SN ratio of the resonance peak in order to obtain good filter characteristics. According to the University of Michigan literature (Example of Disk type) (see, for example, Non-Patent Document 1), the noise component of the output signal depends on a signal that directly passes through the parasitic capacitance formed between the input and output electrodes. In order to reduce the noise, a vibration component to which direct current (DC) is applied is arranged between the input and output electrodes, thereby reducing noise components.

  On the other hand, in order to obtain a sufficient output signal with a disk-type vibrator, a DC voltage exceeding 30 V is required. Therefore, a beam-type structure using a doubly supported beam is desirable as a practical structure. When the above noise component reduction method is applied to a beam-type structure, an electrode arrangement as shown in FIG. 9 is taken as an example.

  As shown in FIG. 9, an input electrode 311 and an output electrode 312 are arranged in parallel and spaced apart from each other on a substrate 310 in which a laminated film of a silicon oxide film and a silicon nitride film is formed on a silicon substrate. A beam type vibrator 313 is arranged so as to cross the input electrode 311 and the output electrode 312 through a very small space 321. The curve shown in the drawing shows the vibration curve of the beam type vibrator 313.

  In such a resonator, the vibrator 313 has a secondary mode vibration, and an unbalanced input provides an unbalanced output. When such a resonator is used for a balanced input frequency filter, as shown in FIG. 10, an output signal (balanced input) from the preceding device (for example, an integrated circuit) 421 is used as an unbalanced input for the frequency filter 411. Therefore, it is necessary to connect the balun element 431 for making the unbalanced output from the frequency filter 411 a balanced output to the output stage of the frequency filter 411. As a result, a balanced input signal can be input to a subsequent device (for example, an integrated circuit) 422 connected to the frequency filter 411.

Frank D. Bonnon III et al. “High-Q HF Microelectromechanical Filters” IEEE (The Institute of Electrical and Electronics Engineers) JOURNAL OF SOLID-STATE CIRCUITS, VOL.35, NO.4, APRIL 2000 p. 512-526

  The problem to be solved is that the resonator of the conventional microelectromechanical system is a device that inputs an unbalance and outputs an unbalance. In current communication equipment, a balanced signal is mainly used in an integrated circuit. In order to use a conventional MEMS resonator, for example, an application to an IF filter, an unbalanced balanced converter (Barun) is used. Is a necessary point. This means an increase in cost and an increase in size, making it difficult to employ a MEMS resonator.

A resonator of a micro electro mechanical system of the present invention includes an input electrode for inputting a signal, an output electrode for outputting a signal, and a vibrator facing the input electrode and the output electrode through a space. In the resonator of the micro electro mechanical system, a signal is input to the input electrode in a balanced manner, the output electrode is output in a balanced manner , the input electrode includes a first input electrode and a second input electrode, and the output The electrode includes a first output electrode and a second output electrode, and the first input electrode and the first output electrode are arranged such that the phase of the amplitude of the vibrator at each position is the same, The two input electrodes and the second output electrode have a position where the amplitude of the vibrator at the respective positions is in the same phase and are 180 degrees different from the amplitude of the vibrator at the position of the first input electrode. The most important features that they are being arranged such that.

  A method of manufacturing a resonator of a micro electro mechanical system of the present invention includes an input electrode for inputting a signal, an output electrode for outputting a signal, and a vibrator facing the input electrode and the output electrode through a space. The input electrode and the output electrode are formed at the same time, and the input electrode is formed with a first input electrode and a second input electrode, and the output electrode Forming a first output electrode and a second output electrode, wherein the first input electrode and the first output electrode are arranged so that the phase of the amplitude of the vibrator at each position is the same phase, The second input electrode and the second output electrode are 180 degrees different from each other so that the phase of the amplitude of the vibrator at the respective positions is the same and the phase of the amplitude of the vibrator at the position of the first input electrode. The most important being arranged such that the phases.

The frequency filter of the present invention is a micro electro mechanical system including an input electrode for inputting a signal, an output electrode for outputting a signal, and a vibrator facing the input electrode and the output electrode through a space. In a frequency filter including a resonator, a signal is input to the input electrode in a balanced manner, the output electrode is output in a balanced manner , the input electrode includes a first input electrode and a second input electrode, and the output The electrode includes a first output electrode and a second output electrode, and the first input electrode and the first output electrode are arranged such that the phase of the amplitude of the vibrator at each position is the same, The two input electrodes and the second output electrode are in the same phase of the amplitude of the vibrator at the respective positions, and are 180 degrees different from the amplitude of the vibrator at the position of the first input electrode. The most important features that you have been arranged so that phase.

  Since the resonator of the micro electro mechanical system of the present invention (hereinafter referred to as a MEMS resonator) includes an input electrode that is input in a balanced manner and an output electrode that is output in a balanced manner, balanced input and balanced output are possible. . For this reason, in the frequency filter using the MEMS resonator of the present invention, in particular, the RF filter and the IF filter, the balun element required in the RF filter and IF filter using the conventional beam type resonator is not necessary, There is an advantage that the circuit can be simplified, reduced in size, and reduced in cost.

  In the MEMS resonator manufacturing method of the present invention, the input electrode and the output electrode are formed at the same time, the first input electrode and the second input electrode are formed on the input electrode, and the first output is formed on the output electrode. An electrode and a second output electrode are formed, and the first input electrode and the first output electrode are arranged so that the phase of the amplitude of the vibrator at each position is the same, and the second input electrode and the second output electrode Since the electrodes are arranged such that the phase of the amplitude of the vibrator at each position is the same phase and the phase of the amplitude of the vibrator at the position of the first input electrode is 180 degrees different from the phase, A MEMS resonator that is balancedly input to each input electrode can be balanced by each output electrode.

  The purpose of outputting a balanced input as a balanced output was realized without using a balun element by arranging an input electrode for inputting a balanced input signal and an output electrode for outputting a balanced output signal at the same phase position.

  A first embodiment of the MEMS resonator 1 according to the present invention will be described with reference to a schematic sectional view of FIG. 1 (1) and a plan layout view of FIG. 1 (2).

  As shown in FIG. 1, a first input electrode 11 and a second input electrode 12 that input signals in a balanced manner and a first output electrode that outputs signals in a balanced manner on a substrate 10 having an insulating film 52 formed on the surface. 21 and the second output electrode 22 are arranged in parallel in the order of the first input electrode 11, the second output electrode 22, the first output electrode 21 and the second input electrode 12, and the first input electrode 11 and the first output electrode 21. The amplitude phase of the vibrator 31 at each position of the second input electrode 12 and the second output electrode 22 is the same phase so that the amplitude phase of the vibrator 31 described later at the respective positions is the same phase. And the phase of the vibrator 31 at the position of the first input electrode 11 is arranged at a position that is 180 degrees different from the phase.

  Further, vibrator electrodes 33 and 34 are formed so as to sandwich the first input electrode 11, the second output electrode 22, the first output electrode 21 and the second input electrode 12. On the first input electrode 11, the second output electrode 22, the first output electrode 21, and the second input electrode 12, a vibrator is disposed so as to face each other with a space 41 and to be connected to the electrodes 33 and 34. 31 is formed. A space 41 between the first input electrode 11, the second output electrode 22, the first output electrode 21, the second input electrode 12, and the vibrator 13 is formed to be about 0.1 μm, for example.

  The MEMS resonator 1 configured as described above draws a vibration curve as shown in FIG. 2, and the vibrator 31 vibrates in the third-order mode. As a result, the MEMS resonator 1 inputs a signal from the input in1 to the first input electrode 11 in a balanced manner, and the input signal outputs the signal from the first output electrode 21 to the output out1 in a balanced manner. Similarly, a signal is input from the input in2 to the second input electrode 12 in a balanced manner, and the input signal is output from the second output electrode 22 to the output out2 in a balanced manner. In this way, a signal input in a balanced manner is output in a balanced manner.

  Next, a second embodiment of the MEMS resonator 2 according to the present invention will be described with reference to a schematic sectional view of FIG. 3A and a plan layout view of FIG.

  As shown in FIG. 3, on a substrate 10 having an insulating film (not shown) formed on the surface, a first input electrode 11 and a second input electrode 12 for inputting signals in a balanced manner and signals in a balanced manner are outputted. The first output electrode 21 and the second output electrode 22 are arranged in parallel in the order of the first input electrode 11, the second input electrode 12, the first output electrode 21, and the second output electrode 22, and the first input electrode 11 and the second output electrode 22. The amplitude of the vibrator 31 described later at each position of the first output electrode 21 is the same, and the amplitude of the vibrator 31 at each position of the second input electrode 12 and the second output electrode 22 is set. The phase is the same as that of the vibrator 31 at the position of the first input electrode 11 and the phase is 180 degrees different from that of the vibrator 31.

  Further, vibrator electrodes 33 and 34 are formed so as to sandwich the first input electrode 11, the second input electrode 12, the first output electrode 21 and the second output electrode 22. On the first input electrode 11, the second input electrode 12, the first output electrode 21, and the second output electrode 22, a vibrator is provided so as to face each other with a space 41 and to be connected to the electrodes 33 and 34. 31 is formed. A space 41 between the first input electrode 11, the second output electrode 22, the first output electrode 21, the second input electrode 12, and the vibrator 13 is formed to be about 0.1 μm, for example.

  The MEMS resonator 2 configured as described above draws a vibration curve as shown in FIG. 4 and the vibrator 31 vibrates in the third-order mode. As a result, the MEMS resonator 1 inputs a signal from the input in1 to the first input electrode 11 in a balanced manner, and the input signal outputs the signal from the first output electrode 21 to the output out1 in a balanced manner. Similarly, a signal is input from the input in2 to the second input electrode 12 in a balanced manner, and the input signal is output from the second output electrode 22 to the output out2 in a balanced manner. In this way, a signal input in a balanced manner is output in a balanced manner.

  In the first embodiment and the second embodiment, the fourth-order mode MEMS resonator has been described. However, the MEMS resonator of the present invention can obtain a vibration of a 2n-order mode (n is a natural number of 2 or more). . For example, an example of a MEMS resonator that obtains sixth-order mode vibration will be described with reference to the schematic cross-sectional view of FIG.

  As shown in FIG. 5, a first input electrode 11, a second input electrode 12, and a third input electrode 13 for inputting signals in a balanced manner are formed on a substrate 10 having an insulating film (not shown) formed on the surface. The fourth input electrode 14, and the first output electrode 21 and the second output electrode 22 that output signals in equilibrium are the first input electrode 11, the second input electrode 12, the first output electrode 21, the second output electrode 22, The phase of the amplitude of an oscillator 31 (described later) at the respective positions of the first input electrode 11, the first output electrode 21, and the third input electrode 13 is parallel to the third input electrode 13 and the fourth input electrode 14 in this order. The phase of the amplitude of the vibrator 31 at the position where the phase is the same, and at the positions of the second input electrode 12, the second output electrode 22, and the fourth input electrode 14, is the same phase and the first input. The phase of the vibrator 31 at the position of the electrode 11 Is arranged at a position such that the 180 degrees out of phase.

  Further, the vibrator electrodes 33 and 34 are arranged so as to sandwich the first input electrode 11, the second input electrode 12, the third input electrode 13, the fourth input electrode 14, the first output electrode 21 and the second output electrode 22. Is formed. On the first input electrode 11, the second input electrode 12, the third input electrode 13, the fourth input electrode 14, the first output electrode 21 and the second output electrode 22, so as to face each other through a space 41, A vibrator 31 is formed so as to be connected to the electrodes 33 and 34. A space 41 between the first input electrode 11, the first input electrode 11, the first output electrode 21, the second output electrode 22, the third input electrode 13 and the fourth input electrode 14, and the vibrator 13 is, for example, It is formed to about 0.1 μm.

  The MEMS resonator 3 configured as described above draws a vibration curve as shown in FIG. 5, and the vibrator 31 vibrates in the sixth mode. As a result, the MEMS resonator 1 inputs a signal from the input in1 to the first input electrode 11 and the third input electrode 13 in a balanced manner, and the input signal outputs the signal from the first output electrode 21 to the output out1 in a balanced manner. . Similarly, a signal is input from the input in2 to the second input electrode 12 and the fourth input electrode 14 in a balanced manner, and the input signal is output from the second output electrode 22 to the output out2 in a balanced manner. In this way, a signal input in a balanced manner is output in a balanced manner.

  2n (n is a natural number equal to or greater than 2) Each input electrode (first input electrode, second input electrode, third input electrode,...) And each output electrode in the MEMS resonator of the present invention in the next vibration mode. The arrangement positions of (first output electrode, second output electrode, third output electrode,...) Are as follows.

  The first input electrodes are arranged in odd numbers in 2n, and the first output electrodes that output signals input to the first input electrodes are arranged in odd numbers other than the 2n first input electrodes are arranged. Be placed. In addition, the second input electrodes are arranged evenly in 2n, and the second output electrode that outputs a signal input to the second input electrode is an even number other than that in which the 2n second input electrodes are arranged. Placed in th. In the case of the 6th mode or higher, the input electrodes after the third input electrode (third input electrode, fourth input electrode,...) Are vacant in 2n when the same phase as the first input electrode. If the phase is the same as that of the second input electrode, it is arranged at an even number of 2n vacant and the third output electrode (third output electrode, fourth output electrode,... ) Are arranged in odd numbers within 2n when the phase is the same as that of the first output electrode, and even numbers within 2n when the phase is the same as that of the second output electrode. Just place it in the second.

  As described above, the MEMS resonator of the present invention is configured such that each input electrode and each output electrode are arranged so that a signal is input to the input electrode in a balanced manner and the signal is output from the output electrode in a balanced manner. If so, a MEMS resonator of the 2nth order (n is a natural number of 2 or more) can be obtained. Thus, in the high-order mode MEMS resonator, the length of the vibrator becomes long, so that the processing accuracy of the vibrator can be increased. In order to obtain a high-order mode MEMS resonator, it is necessary to determine the number of input electrodes and output electrodes in consideration of the durability of the vibrator and its support.

  Next, an example of the manufacturing method according to the MEMS resonator 1 of the present invention will be described with reference to the manufacturing process sectional views of FIGS.

  As shown in FIG. 6A, an insulating film 52 is formed on the semiconductor substrate 51. For example, a silicon substrate is used as the semiconductor substrate 51, and a silicon nitride (SiN) film is used as the insulating film 52, for example. This silicon nitride film is formed to a thickness of 1 μm, for example. Note that a stacked film of a silicon oxide film and a silicon nitride film may be used instead of the silicon nitride film. As described above, the substrate 10 is formed, for example, by forming the insulating film 52 on the silicon substrate 51. Further, an electrode forming film 53 is formed on the insulating film 52. The electrode forming film 53 is formed of, for example, a polysilicon film and has a thickness of, for example, 0.5 μm.

  Next, as shown in FIG. 6B, a resist mask for processing the electrode forming film 53 into an input electrode shape and an output electrode shape is formed by resist coating and lithography techniques, and then etching using the resist mask is performed. By processing, the first input electrode 11, the second output electrode 22, the first output electrode 21, and the second input electrode 12 are formed by the electrode forming film 53 [see FIG. 6 (1)]. At the same time, the electrodes 33 and 34 of the vibrator are also formed using the electrode forming film 53 (see FIG. 6A). At this time, the first input electrode 11 and the first output electrode 21 are disposed at positions where the amplitude phases of the vibrators formed later at the respective positions are the same, and the second input electrode 12 The second output electrode 22 is a position where the amplitude phase of the vibrator to be formed later at each position is the same phase and the phase of the amplitude of the vibrator to be formed later at the position where the first input electrode 11 is formed. Are arranged at positions where the phases are different by 180 degrees. For example, the first input electrode 11, the second output electrode 22, the first output electrode 21, and the second input electrode 12 are formed in this order. Further, the electrodes 33 and 34 of the vibrator are formed so as to sandwich the electrode group of the first input electrode 11, the second output electrode 22, the first output electrode 21 and the second input electrode 12 at intervals. . The arrangement of the first and second input electrodes 11 and 12 and the first and second output electrodes 21 and 22 is such that the input signal is balanced input to each input electrode and the output signal is balanced output from each output electrode. I just need it.

  Next, as shown in FIG. 6 (3), the first input electrode 11, the second output electrode 22, the first output electrode 21, the second input electrode 12, and the electrode 34 of the vibrator are covered and the first The sacrificial layer 54 is formed thicker than the first and second input electrodes 11 and 12 and the first and second output electrodes 21 and 22. The sacrificial layer 54 is formed of a silicon oxide film, for example, and has a thickness of 0.5 μm, for example. The sacrificial layer 54 may be any material that can be selectively etched with respect to the insulating film 52 and each electrode.

  Next, as shown in FIG. 6 (4), the surface of the sacrificial layer 54 is planarized using chemical mechanical polishing. At this time, the sacrificial layer 54 is made thin on the first and second input electrodes 11 and 12 and on the first and second output electrodes 21 and 22. The remaining thickness determines the distance between the vibrator to be formed thereafter and the first and second input electrodes 11 and 12 and the first and second output electrodes 21 and 22. Just leave. For example, the sacrificial layer 54 is left on the first and second input electrodes 11 and 12 and on the first and second output electrodes 21 and 22 by a thickness of 0.1 μm. Similarly, the sacrificial layer 54 is left on the electrodes 33 and 34.

  Next, as shown in FIG. 7 (5), a part of the sacrificial layer 54 is etched by normal resist coating, formation of an etching mask by lithography, and etching using the etching mask, and the electrodes 33, 34 are processed. Opening portions 55 and 56 for exposing a part of are formed.

  Next, as shown in FIG. 7 (6), a vibrator forming film 57 is formed on the entire surface on the side where the sacrificial film 54 is formed. The vibrator forming film 57 is formed of, for example, a polysilicon film and has a thickness of, for example, 0.5 μm.

  Next, as shown in FIG. 7 (7), the vibrator-forming film 57 is etched by normal resist coating, formation of an etching mask by a lithography technique, and etching using the etching mask to form a beam-like vibrator. 31 is formed. The vibrator 31 is connected to the electrodes 33 and 34 through the openings 55 and 56.

  Next, as shown in FIG. 7 (8), the sacrificial layer 54 [see FIG. 7 (7)] is removed by wet etching. Here, since the sacrificial layer 54 is formed of silicon oxide, hydrofluoric acid is used. As a result, the first input electrode 11, the second output electrode 22, the first output electrode 21, the both sides of the second input electrode 12, and the first input electrode 11, the second output electrode 22, the first output electrode 21, the first A space 41 is formed between each of the two input electrodes 12 and the vibrator 31. In this space 41, the distance between the first input electrode 11, the second output electrode 22, the first output electrode 21, the second input electrode 12 and the vibrator 14 is about 0.1 μm. In this way, the MEMS resonator 1 is formed.

  A CVD method, a sputtering method, a vapor deposition method, or the like can be adopted as a method for forming each film formed in the manufacturing method. Moreover, each above-mentioned film thickness is designed suitably. In the case where the outermost surface of the insulating film 52 is formed of silicon oxide and each electrode is formed of polysilicon, the sacrificial film 54 can be formed of silicon nitride. In this case, hot phosphoric acid may be used for wet etching of the sacrificial film 54.

  According to the manufacturing method, it is possible to obtain the fourth-order mode MEMS resonator 1 capable of balanced output of a balanced input.

  Next, the manufacturing method according to the MEMS resonator 2 of the present invention is the same as the manufacturing method according to the MEMS resonator 1 of the present invention described with reference to the manufacturing process sectional views of FIGS. The second input electrode is formed at the position of the second output electrode 22 as the first input electrode, the first output electrode 21 is directly used as the first output electrode, and the second output electrode is formed at the position of the second input electrode 12. That's fine. Other steps are the same as the manufacturing steps described in the third embodiment.

  Next, an embodiment in which the MEMS resonator 1 or the MEMS resonator 2 of the present invention is used as a frequency filter will be described with reference to the block diagram of FIG.

  As described above, since the MEMS resonator 1 of the present invention is output with a balanced input as a balanced output, when this resonator 1 is used as a frequency filter, a balun element having an unbalanced output as a balanced output is provided. There is no need to use it. That is, as shown in FIG. 8, the output signal (balanced input) from the previous stage device (for example, integrated circuit) 81 is output as a balanced output by the frequency filter 71 using the MEMS resonator 1 of the present invention. Therefore, the post-stage device (for example, integrated circuit) 82 can be directly connected to the frequency filter 71.

  Similarly to the MEMS resonator 1, the MEMS resonators 2 and 3 can be used for the frequency filter described with reference to FIG.

  In each of the above embodiments, the first input electrode 11, the second input electrode 12, the first output electrode 21, the second output electrode 22, the electrode 34, etc. can be made of metal other than polysilicon. As the metal, for example, a material used as a metal wiring in a semiconductor device such as aluminum, gold, copper, or tungsten can be used.

  The micro electro mechanical system resonator and the manufacturing method thereof according to the present invention can be applied to applications such as frequency filters (RF filters, IF filters, etc.), oscillators, and the like.

1 is a schematic cross-sectional view showing a first embodiment of a MEMS resonator according to the present invention. It is a vibration curve figure which shows the vibration mode of the vibrator | oscillator of the MEMS resonator shown in FIG. It is a schematic structure sectional view showing the 2nd example concerning a MEMS resonator of the present invention. It is a vibration curve figure which shows the vibration mode of the vibrator | oscillator of the MEMS resonator shown in FIG. It is a schematic structure sectional view showing the 3rd example concerning a MEMS resonator of the present invention. It is manufacturing process sectional drawing which shows an example of the manufacturing method of the MEMS resonator which concerns on this invention. It is manufacturing process sectional drawing which shows an example of the manufacturing method of the MEMS resonator which concerns on this invention. It is a block diagram explaining the input / output of the filter of this invention. It is a schematic structure sectional view of the conventional MEMS resonator. It is a block diagram explaining the input / output of the filter using the conventional MEMS resonator.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... MEMS resonator, 11 ... 1st input electrode, 12 ... 2nd input electrode, 21 ... 1st output electrode, 22 ... 2nd output electrode, 31 ... Vibrator, 41 ... Space

Claims (6)

An input electrode for inputting a signal;
An output electrode for outputting a signal;
A vibrator facing the input electrode and the output electrode through a space;
In a resonator of a microelectromechanical system with
A signal is input to the input electrode in equilibrium,
The output electrode outputs a signal at equilibrium,
The input electrode comprises a first input electrode and a second input electrode,
The output electrode comprises a first output electrode and a second output electrode,
The first input electrode and the first output electrode are arranged such that the phase of the amplitude of the vibrator at each position is the same phase,
The second input electrode and the second output electrode have a phase of the amplitude of the vibrator at the same position and a phase that is 180 degrees different from the phase of the amplitude of the vibrator at the position of the first input electrode. It is arrange | positioned so that it may become. The resonator of the micro electro mechanical system characterized by the above-mentioned. The first input electrode, the second output electrode, the first output electrode, the resonator of the microelectromechanical system according to claim 1, characterized in that it is arranged in order of the second input electrode. The first input electrode, the second input electrode, the first output electrode, the resonator of the microelectromechanical system according to claim 1, characterized in that it is arranged in order of the second output electrode. The input electrode comprises a plurality of input electrodes,
The output electrode comprises a plurality of output electrodes,
The first input electrode of each of the input electrodes and the first output electrode of each of the output electrodes are arranged such that the phase of the amplitude of the vibrator at each position is the same phase,
The second input electrode of the input electrodes and the second output electrode of the output electrodes have the same phase of the amplitude of the vibrator at the respective positions, and Arranged so as to be 180 degrees different from the phase of the amplitude of the vibrator at the position,
Of the input electrodes, the remaining input electrodes are arranged to be in phase with the phase of the amplitude of the vibrator at the position of the first input electrode or the second input electrode,
Claim 1, wherein the remaining output electrode of the output electrode is characterized by being arranged such that the amplitude of the oscillator phase and same phase at the position of the first output electrode or said second output electrode Resonator of micro electro mechanical system. An input electrode for inputting a signal;
An output electrode for outputting a signal;
In a method of manufacturing a resonator of a microelectromechanical system comprising a vibrator facing the input electrode and the output electrode via a space,
The input electrode and the output electrode are formed simultaneously,
Forming a first input electrode and a second input electrode on the input electrode;
Forming a first output electrode and a second output electrode on the output electrode;
The first input electrode and the first output electrode are arranged such that the phase of the amplitude of the vibrator at each position is the same phase,
The second input electrode and the second output electrode are 180 degrees different from each other so that the phase of the amplitude of the vibrator at the respective positions is the same and the phase of the amplitude of the vibrator at the position of the first input electrode. A method for manufacturing a resonator of a microelectromechanical system, wherein the resonator is arranged so as to be in phase. An input electrode for inputting a signal;
An output electrode for outputting a signal;
A vibrator facing the input electrode and the output electrode through a space;
In a frequency filter with a resonator of a microelectromechanical system with
A signal is input to the input electrode at equilibrium, and a signal is output at the output electrode to balance,
The input electrode comprises a first input electrode and a second input electrode,
The output electrode comprises a first output electrode and a second output electrode,
The first input electrode and the first output electrode are arranged such that the phase of the amplitude of the vibrator at each position is the same phase,
The second input electrode and the second output electrode have a phase of the amplitude of the vibrator at the same position and a phase that is 180 degrees different from the phase of the amplitude of the vibrator at the position of the first input electrode. A frequency filter characterized by being arranged so that

Images