JP4145750B2 - Planar processing equipment - Google Patents

Description

  The present invention relates to a flat processing apparatus for processing the surface of a workpiece, and more particularly to a flat processing apparatus that has high rigidity and improves processing accuracy.

(Background of the Invention) A surface processing apparatus such as a grinding apparatus processes the surface of a workpiece with a grindstone, and is applied to, for example, metals and non-metallic materials in the scientific and industrial fields. In recent years, these metals and non-metallic materials are required to have higher planar accuracy. In particular, when the workpiece is a crystal resonator (quartz wafer) serving as a reference source for time and frequency, these requirements are strong because the plane accuracy determines the vibration characteristics.

(Example of Prior Art) FIGS. 4 and 5 are diagrams of a grinding apparatus for explaining one conventional example, FIG. 4 (a) is a side view, FIG. 5 (a) is a front view, and FIG. b) and FIG. 5 (b) are plan views.

  The grinding apparatus comprises a processing rotary spindle (referred to as a processing spindle) 1 and a work processing rotary spindle 2 whose axial centers a and b are decentered and whose tips are opposed to each other. Each of the spindles 1 and 2 includes a rotatable central shaft 4 having a disk 3 at the tip, and a housing 5 having a fluid bearing structure (not shown) that protrudes from the disk 3 and covers the central shaft 4. And these are installed in the housing | casing 6 made into L shape, for example.

  The machining spindle 1 has a sliding body 7 on one side surface “FIG. 4A” or both side surfaces “FIG. 5A” of the outer periphery (housing 5). The sliding body 7 is mounted on a vertical cut guide body 8 provided in a vertical portion of the housing 6, and moves up and down by a ball screw 10 connected to a motor 9. In any case, the disk 3 of the processing spindle 1 is provided with a processing plate 11 having, for example, a ring-shaped annular grindstone 14 on the outer periphery of the main surface. The central shaft 4 of the machining spindle 1 rotates in combination with a motor and a pulley (not shown).

  The rotary spindle 2 for the workpiece is provided so as to protrude on the horizontal portion of the housing 6, and a chuck table 13 for holding and fixing, for example, a crystal wafer 12 as the workpiece is provided. For convenience, the rotary spindle for the workpiece is referred to as a chuck spindle 2.

  In such a case, it is set so that the outer periphery (annular grindstone 14) of the machining spindle 1 passes through the center of the chuck table 13 (crystal wafer 12). Here, it is coaxial in the geometrical X-axis direction and different from the Y-axis direction. First, the quartz wafer 12 and the annular grindstone 14 are brought into contact with each other to rotate the chuck table 13 and the processing spindle 1. Next, the processing spindle 1 is lowered to the ball screw 10 at a constant speed, and the surface of the crystal wafer 12 is processed at a constant speed. Alternatively, constant pressure machining is performed by controlling the machining force of the machining spindle 1 by gravity or the like.

(Problems of the prior art) However, in the grinding apparatus having the above configuration, for example, the rigidity of the apparatus itself including the machining spindle 1 during machining is small from the viewpoint of the structure, and the axis a of the machining spindle 1 is inclined to form an annular shape. The contact state between the grindstone 14 and the crystal wafer 12 is not stable. For these reasons, there has been a problem of deteriorating the surface accuracy of the crystal wafer 12.

  That is, the machining spindle 1 moves the incision guide body 8 in the vertical direction by the sliding bodies 7 provided on one or both sides of the outer periphery. However, in any case, since the sliding body 7 is loosely inserted into the notch guide body 8 and moves, the rigidity in the horizontal direction is particularly small and a gap may even exist. Therefore, the machining spindle 1 is inclined on the workpiece surface, and there is a problem that the surface accuracy is deteriorated.

(Object of the invention) An object of the present invention is to provide a high-rigidity flat surface processing apparatus for remarkably increasing the surface accuracy of a workpiece.

(Points of interest) The present invention is different from the conventional one, and if the housing having the processing plate at the tip is a rotating body that moves up and down using the center axis of the processing spindle as a bearing, the processing spindle itself will serve as a guide mechanism. In view of this, the conventional sliding body 7 is not required and the rigidity can be increased.

According to claim 1 of (SOLUTION) present invention, machining spindle and the center axis of the planarization apparatus, it becomes the housing which moves in the vertical direction as rotatable relative to said central axis, the machining plate at the tip of the housing The center axis of the machining spindle is located at the apex of a geometric triangle together with two columns, and one end of the center axis and the two columns are fixed to the housing and the other end is fixed to the top plate. The configuration.

  According to the second aspect of the present invention, the rear end of the housing is rotatably connected to a movable body whose vertical movement is controlled by a ball screw.

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In the third aspect , the movable body according to the second aspect includes a plurality of legs movably penetrating the top plate and a connecting portion provided with the ball screw according to the second aspect coupled to the plurality of legs. The ball screw is rotated by a motor.

In the invention of claim 1, the machining spindle itself is provided with a guide mechanism to eliminate the need for a sliding body and increase the rigidity. In short, in the past, a processing body consisting of a central axis and a housing was provided with a sliding body and moved up and down, but in the present invention, the central body is fixed and a rotating body that moves the housing up and down eliminates the need for a sliding body. To. Furthermore, since the box structure is formed in a triangular shape in plan view, the rigidity of the entire apparatus is increased. Moreover, since the top plate is fixed to the apex of the triangle, the flatness is maintained.

  In the invention of claim 2, the housing can be controlled to be fed in the vertical direction.

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According to a third aspect of the present invention, the movable body moves reliably by the rotation of the ball screw.

  1 to 3 are diagrams for explaining an embodiment of the present invention. FIG. 1 is an external view of a planar processing apparatus showing an overall image, FIG. 2 (a) is a side view thereof, and FIG. ) Is a plan view thereof, and FIG. 3 is a sectional view of a machining spindle. In addition, the same number is attached | subjected to the same part as a prior art example, and the description is simplified or abbreviate | omitted.

  As described above, the planar processing apparatus includes the processing spindle 1 and the chuck spindle 2 provided in the housing 6. The housing 6 here has a two-stage surface and is provided with two struts 17 that are fixed upright at one end on both ends of the lower stage.

  The machining spindle 1 is provided at the center of one end of the upper stage, and includes a center shaft 15 and a housing 16. The central axis 15 is positioned at the apex of the geometric triangle (in plan view) together with the support column 17 and fixed at one end upright. And the other end side is fixed by the top plate 18 with the support | pillar 17, and it is set as a box-type structure.

  The housing 16 is provided on the outer periphery of the central shaft 15 and has a disc 3 coupled with a through hole on the outer periphery of the tip. The circular plate 3 is provided with a processed plate 11 provided with an annular grindstone 14. Then, it is rotatable by a bearing mechanism provided on the central shaft 15, and is moved up and down by a movable body 19. The bearing mechanism is, for example, a fluid bearing, and a total of eight sets of fluids, for example, air jets 20, each including a plurality of sets, for example, three sets provided vertically in two places on the center shaft 15 and four sets in two places on the top and bottom. (Fig. 3)

  That is, normally, the air jet outlets are provided at two locations on both ends of the housing 16, but here the housing 16 moves up and down as it rotates, so that there are three air jets in the vertical direction at two locations up and down corresponding to the moving distance. It is provided one by one. In this example, the distance between the three air outlets 20 is the moving distance of the housing. Further, a pulley 21 is provided on the outer periphery of the housing 16, and the pulley 21 of the drive motor 9 provided on the housing 6 and the belt 22 are coupled and rotated.

  The guide mechanism has a movable body 19 whose movement is controlled by the ball screw 10. The movable body 19 includes, for example, two legs connected by a connecting portion, and a handle 23a having a U-shaped cross section having a circular arc shape in plan view at the tip of the two legs. Then, it is rotatably fitted to a handle 23b having an inverted U-shaped cross section provided on the outer periphery of the rear end of the housing 16. The ball screw 10 includes a female screw 10a and a male screw 10b. The female screw 10a is attached to the connecting portion, and the male screw 10b is screwed.

  The male screw 10 b is directly connected to the drive motor 9 provided on the installation base 24 on the top plate 18, and the male screw 10 b is advanced and retracted by the rotation of the drive motor 9. Thereby, the movable body 19 moves up and down, and the housing 16 coupled thereto also moves up and down.

  The chuck spindle 2 is provided in the lower stage of the housing 6 and includes a chuck table 13 as described above to hold and fix the crystal wafer 12 as a workpiece. Then, the center of the processing spindle 1 is eccentric, and an annular grindstone 14 provided on the outer periphery of the processing plate 11 passes through the center of the crystal wafer 12.

  With such a configuration, the processing spindle 1 moves the housing 16 up and down with the central axis 15 as a guide. Therefore, the sliding body 7 provided on the conventional machining spindle 1 and the cutting guide 8 provided on the housing 6 are eliminated. In short, since the machining spindle itself is provided with a guide mechanism, a high rigidity is obtained by preventing an inclination caused by the sliding body 7 or the like.

  Further, the rear end of the housing 16 is rotatably connected to a movable body 19 whose vertical movement is controlled by the ball screw 10. And the movable body 19 couple | bonds the two legs which penetrate the top plate 18 movably with a connection part, and the ball screw 10 rotated by the motor 9 is provided in a connection part. Therefore, the movable body 19 can be reliably moved by the rotation of the ball screw 10, and the housing 16 can be fed up and down.

  Further, the center axis 15 of the machining spindle 1 is fixed to the housing 6 with one end thereof being positioned at the apex of the geometric triangle together with the support column 17, and the other end is fixed to the top plate 18. Therefore, since the overall shape is a box-like structure as a triangular shape in plan view, the rigidity of the entire apparatus is increased. Moreover, since the top plate 18 is fixed to the apex of the triangle, the flatness is maintained.

  (Other matters) In the above embodiment, the shaft center 15 of the machining spindle 1 is a fluid bearing made of air, but it may be a fluid bearing made of oil or the like, or a rolling bearing. In short, the housing 16 is made rotatable. Any bearing mechanism that moves up and down may be used.

It is an external view which shows the whole image of the plane processing apparatus explaining one Example of this invention. BRIEF DESCRIPTION OF THE DRAWINGS It is a figure explaining one Example of this invention, The figure (a) is the front view made into the partial cross section, The figure (b) is a top view. It is an expanded sectional view of the processing spindle explaining one example of the present invention. It is a figure of the plane processing apparatus explaining a prior art example. It is a figure of the plane processing apparatus explaining a prior art example.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Processing spindle, 2 Chuck spindle, 3 Disc, 4, 15 Center axis, 5, 16 Housing, 6 Housing, 7 Slider, 8 Cutting guide, 9 Drive motor, 10 Ball screw, 11 Processing board, 12 Crystal wafer, 13 chuck table, 14 annular grindstone, 17 struts, 18 top plate, 19 movable body, 20 air outlet, 21 pulley, 22 belt, 23 handle, 24 installation stand.

Claims (3)

A machining spindle provided with a machining plate at the tip and moving in the vertical direction; and a chuck spindle provided with a chuck table at the tip for fixing a workpiece to be machined by contacting the machining plate. in planarization apparatus to the spindle and said chuck spindle are opposed eccentrically to the shaft center, machining plate provided the working spindle to the tip of the housing Tona Rutotomoni said housing to move in the vertical direction rotatable with respect to the central axis The central axis is located at the apex of a geometric triangle together with two pillars, and the central axis and the two pillars are fixed at one end to the housing and the other end to the top plate. planarization apparatus for. The planar processing apparatus according to claim 1, wherein the rear end of the housing is rotatably connected to a movable body whose movement in the vertical direction is controlled by a ball screw.   The movable body according to claim 2 includes a plurality of legs movably penetrating the top plate, and a connecting portion provided with the ball screw according to claim 2 coupled to the plurality of legs, the ball screw being driven by a motor. A planar processing device that is rotated.

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