JP4127695B2 - Method for manufacturing ceramic green sheet and method for manufacturing electronic component using the ceramic green sheet - Google Patents

Description

  The present invention relates to a method for manufacturing an electronic component, particularly a so-called ceramic laminate type formed by stacking ceramics, a so-called ceramic green sheet used therefor, and a method for manufacturing the ceramic green sheet. is there. Specific examples of the ceramic multilayer electronic component described here include a multilayer ceramic capacitor, a multilayer ceramic inductor, an LC composite component incorporating these, an EMC-related component, and the like.

  In recent years, with the miniaturization and rapid spread of electronic devices such as mobile phones, there is a need for higher-density mounting and higher performance for electronic components used therefor. In particular, ceramic multilayer electronic components used as passive elements are required to be thinned, multilayered, and evenly uniform in order to meet such demands, and a manufacturing method that can meet the demands. Is required.

  A conventional manufacturing method used for manufacturing the above-mentioned ceramic multilayer electronic component, for example, a multilayer ceramic capacitor having an electrode formed therein, and a technique capable of meeting these requirements is a so-called metal-ceramic integrated firing technique. . Here, this metal-ceramic integrated firing technique will be briefly described.

  In this technique, first, a plurality of electrodes are formed simultaneously on the surface of a so-called ceramic green sheet using a conductive paste made of metal powder and an organic binder. Subsequently, a plurality of simple ceramic green sheets, ceramic green sheets after electrode formation, and the like are laminated to obtain a ceramic laminate. These electrodes serve as internal electrodes of the finished ceramic multilayer electronic component. Furthermore, the said ceramic laminated body is pressurized in the thickness direction, and the adhesiveness between green sheets is improved. The laminated body that has been brought into close contact is cut and separated into a predetermined size, and further fired. A ceramic multilayer electronic component can be obtained by appropriately forming external electrodes on the outer surface of the obtained sintered body.

JP-A-9-181450 JP 2004-179181 A

  Here, in particular, in the case of a ceramic capacitor, conventionally, internal electrodes are connected to each other using external electrodes on the outer surface of the ceramic laminate. In the case of this configuration, if high quality is required due to the quality of bonding between each internal electrode and external electrode, fluctuation of characteristics due to misalignment, etc., there will be problems in the future in obtaining stable quality. It is. For this reason, through electrodes called so-called post electrodes that are included in different layers through the respective insulating layers and electrically connect the internal electrodes to each other were further connected to the external electrodes. Configuration is being considered. However, as the thickness of each layer decreases, the diameter of the post electrode also decreases, making it difficult to properly stack the posts between each layer. It is desirable to optimize.

  As a method of forming such a post electrode, for example, there is a method disclosed in Patent Document 1. In this method, the ceramic layer described above is molded from a slip material containing an insulating material, a photocurable monomer, and an organic binder, and an exposure development process is performed on the slip material to create a space for a through electrode, The space is filled with a conductive paste to obtain the post electrode. According to this method, it is possible to improve the accuracy of the post electrode formation position.

  Further, in Patent Document 2, a conductive pattern layer having a predetermined thickness is formed on a surface of a light transmissive carrier film using a conductive paste, and a photocurable ceramic slurry is formed on the conductive pattern layer by a thickness equal to or greater than the thickness of the conductive pattern layer. A method of forming a composite sheet by exposing the ceramic slurry to the carrier film from the back side and developing the ceramic slurry is disclosed. In this method, by optimizing the exposure amount of the ceramic slurry, it becomes possible to match the thickness of the conductor pattern with the thickness of the ceramic layer in which they are embedded.

  However, these techniques are intended to suitably control the accuracy of the post electrode molding position and the thickness of the single insulating layer in which the post electrode is embedded. It cannot be a means. That is, there is a demand for the construction of a method for providing a sheet that can improve the bonding strength, conductive characteristics, and stacking deviation of the post electrodes, which are essential for obtaining a smaller ceramic multilayer electronic component. Although the ceramic capacitor is exemplified here to describe the subject of the present invention, each item required for the post electrode at the time of sheet lamination is considered to be the same as for other multilayer electronic components such as a ceramic capacitor.

  In addition, the above-described ceramic multilayer electronic component is required to be further reduced in size and thickness in recent years, and it is also necessary to further reduce the thickness of a dielectric layer such as a ceramic sandwiched between internal electrodes. When trying to form a laminated body by handling sheets made of thin ceramics or the like, it becomes a big problem whether the strength of these sheets can withstand the lamination process. In particular, when these sheets have fine posts, problems such as tearing may occur only in the posts even if no problems occur in the sheets themselves. In order to obtain a compact and high-performance electronic component, it is necessary to consider such improvements in handling as well as dealing with the above-mentioned items related to the post electrode.

  The present invention has been made in view of the above background, and between the layers including the respective components, a post electrode is provided that has effects such as improved bonding strength, improved conductive characteristics, and reduced frequency of occurrence of misalignment. The object is to provide a method for forming a sheet to be included (hereinafter, in order to facilitate the description, the sheet is generically referred to as a ceramic green sheet in the present specification). Another object of the present invention is to provide a method for forming a sheet that can be easily laminated as compared with the prior art when manufacturing small-sized and high-performance electronic components. It is an object of the present invention to provide a ceramic multilayer electronic component having a smaller size and higher performance by providing the method.

  In order to solve the above-described problems, a method for producing a ceramic green sheet including exposure and development processing according to the present invention has a sheet-formed surface on the surface and a surface of a member capable of transmitting light used for the exposure processing. A layer made of a photosensitive material having a light shielding portion made of a material that does not transmit light having a first predetermined height, a powder having predetermined electrical characteristics on the surface of the member, and that can be exposed by an exposure process. The photosensitive material is exposed to light from the back surface of the member, and the photosensitive material is exposed to light to solidify the photosensitive material to a second predetermined height lower than the first predetermined height. The method includes a step of removing a non-exposed portion of the photosensitive material by a development process to form a layer made of at least one of an electrode material and an insulating material on the surface of the solidified portion of the photosensitive material.

  In the above-described method for producing a ceramic green sheet, the surface of the layer formed of at least one of the electrode material and the insulating material formed on the surface of the solidified portion of the photosensitive material may substantially coincide with the surface of the light shielding portion. preferable. Moreover, it is preferable that this member is comprised from the base which can permeate | transmit light, or has a layer which consists of a base which can permeate | transmit light, and a material which can permeate | transmit light. Alternatively, the member preferably includes a base that can transmit light, and a layer that includes a plurality of regions made of different materials and formed on one surface of the base. The insulating material used for the layer made of at least one of the electrode material and the insulating material described above is preferably made of a photosensitive material that can be exposed by an exposure process.

  In addition, in order to solve the above-described problem, a method for manufacturing a multilayer ceramic electronic component according to the present invention includes stacking a plurality of ceramic green sheets including a ceramic green sheet formed by the above-described method for manufacturing a ceramic green sheet, The method includes a step of pressing the laminated ceramic green sheets in the thickness direction to form a laminated body. In order to solve the above problem, a ceramic green sheet forming a part of an electronic component according to the present invention includes a plurality of layers including at least one of an insulating material and a conductive material, and at least two of the plurality of layers. It has the electrode part which penetrates, It is characterized by the above-mentioned.

  According to the present invention, in the layer including only the post electrode and the layer including the internal electrode and the post electrode, the post electrode is formed as an integral electrode from the beginning. That is, a post electrode that penetrates two sheets is obtained as an integral electrode. On the other hand, in the case of the conventional method in which the post electrodes penetrating the two sheets are made from two different sheets, the post electrodes are joined at the joined portion of the sheets. When the laminated electronic component is configured using the sheet according to the present invention, the joining portion of the sheet is halved by simple calculation, and the number of joining portions of the post electrode is also halved. Therefore, it is possible to significantly reduce factors that adversely affect the post strength of the post electrode, such as the bonding strength, the conductive characteristics, and the stacking deviation.

  In addition, according to the present invention, it is possible to handle a sheet including only the post electrode, which has been conventionally handled as a separate sheet, and a sheet including the post electrode and the internal electrode as an integral sheet. . Therefore, the thickness of the sheet to be handled is increased as compared with the conventional process in which these sheets are handled separately, the handling strength is increased, and it is possible to provide a sheet that is resistant to damage to the sheet or post during lamination. Become. Further, in the conventional sheet, the above-described two sheets may be handled as a unit, but in this case, the joint portion of the post electrode may be damaged during handling. According to the present invention, there is no post electrode joint portion that should be considered in the past, and the sheet itself can be handled easily.

  Further, for example, when a so-called ceramic capacitor is obtained by laminating ceramic green sheets obtained by the present invention, according to the present invention, the thickness of the insulating layer portion disposed between the internal electrodes is accurately set. It becomes possible to control. Therefore, it is possible to reduce the capacitance variation between the obtained ceramic capacitors, and it is possible to construct a process with high manufacturing efficiency.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a method for forming a ceramic green sheet single layer including an electrode portion in relation to a method for manufacturing an electronic component according to an embodiment of the present invention. In the figure, the cross section of the sheet in each process is shown, and the process proceeds according to the arrows. In addition, each layer in the figure is conceptually shown, and each dimension such as thickness and width is arbitrarily changed for ease of explanation.

  In the figure, for the base 1, for example, a PET film whose surface is subjected to an appropriate release treatment using a transparent silicon resin or the like is used. In the present embodiment, the conductive paste is applied and formed as a post electrode 3 on the surface of the base 1 subjected to the release treatment by various known methods (step 1). The post electrode 3 is formed at a post electrode formation position as a light shielding portion made of a material that does not transmit ultraviolet rays used in an exposure process described later, that is, a predetermined pattern having a predetermined thickness. Further, the post electrode 3 is formed so as to have a first predetermined thickness necessary as a post electrode in the present embodiment.

  In general, for example, an electrode formed by screen printing has irregularities on the upper surface 3a of each electrode due to surface roughness or the like. Therefore, after the post electrode 3 is applied and formed, pressure may be applied from the upper surface 3a of the electrode to flatten the upper surface 3a and make the thickness of the electrode portion 3 uniform. Note that this step may be omitted if the flatness of the upper surface 3a and the thickness of each electrode portion 3 satisfy the desired conditions.

  In the subsequent step 2, the first photosensitive slurry 4 for forming the ceramic layer is applied to the upper surfaces of the base 1 and the post electrode 3. The first photosensitive slurry 4 is mainly formed from a mixture of a negative organic binder that becomes insoluble in a developer by, for example, ultraviolet irradiation, and a ceramic powder having electrical characteristics such as a predetermined dielectric constant. Has been. That is, the photosensitive slurry contains a powder having predetermined electrical characteristics and is used as a photosensitive material that can be exposed to ultraviolet rays. The first photosensitive slurry 4 is applied and formed not only on the upper surface of the base 1 on which the post electrodes 3 are not formed, but also on the upper surfaces of the individual post electrodes 3. Here, the formation thickness of the first photosensitive slurry 4 is preferably equal to or greater than the thickness of the sheet containing the post electrode to be obtained. Moreover, the 1st photosensitive slurry 4 acts as a 1st photosensitive material in this invention.

  The first photosensitive slurry 4 is exposed to ultraviolet rays from a surface (back surface) opposite to the surface on which the post electrode 3 is formed in the base 1 to expose the first photosensitive slurry 4. The first photosensitive slurry 4 becomes the first slurry solidified portion 5 through the exposure process and the development process described later (step 3). In the exposure step, the electrode unit 3 acts as an exposure mask for the first photosensitive slurry 4 in order to shield ultraviolet rays, and exposes the first photosensitive slurry 4 existing on the upper surface of the electrode unit 3. To prevent. That is, in the next development step, the first photosensitive slurry present on the upper surface of the electrode portion 3 is dissolved and removed.

  Further, the first slurry solidified portion having a second predetermined thickness which is thinner than the first predetermined thickness of the post electrode 3 is controlled by controlling the exposure amount and development conditions of the first photosensitive slurry 4 during the exposure processing. 5 is obtained. The exposure amount described here is a concept corresponding to the thickness of the first photosensitive slurry 4 that is solidified by controlling the light intensity of ultraviolet rays, the exposure time, and the like during the exposure process. In the present embodiment, the electronic component is obtained by laminating sheets obtained after the process is performed, but the second predetermined thickness is an internal electrode in another sheet disposed below the sheet. And a thickness that defines a distance from the internal electrode included in the sheet.

  Subsequently, the internal electrode layer 7 is formed on the upper surface of the first slurry solidifying part 5 using the conductive paste for forming the internal electrode (step 4). The thickness of the internal electrode layer 7 is preferably such that the upper surface 7 a of the internal electrode layer 7 substantially matches the upper surface 3 a of the post electrode 3. Accordingly, it is desirable that the thickness of the internal electrode layer 7 is a third predetermined thickness obtained by subtracting the second predetermined thickness from the first predetermined thickness. In addition, the pressing operation performed on the upper surface 3a of the post electrode 3 described in step 1 may be performed on the post electrode upper surface 3a and the internal electrode layer upper surface 7a in this step.

  Subsequently, the second photosensitive slurry 9 is applied to the upper surfaces of the post electrode 3, the first slurry solidifying portion 5 and the internal electrode layer 7 (step 5). Here, the second photosensitive slurry 9 has the same properties as the first photosensitive slurry 4 in terms of physical properties. Further, in the second photosensitive slurry 9 in this step, the thickness of the second photosensitive slurry 9 existing above the first slurry solidifying portion 5 is equal to the thickness of the internal electrode layer 7, that is, a third predetermined thickness. It shall be applied so as to be thicker than the thickness. After the application of the second photosensitive slurry 9, the second photosensitive slurry 9 is irradiated with ultraviolet rays through the first slurry solidifying portion 5 from the back surface of the base 1, and a predetermined amount of the slurry is applied. Apply exposure. At this time, the internal electrode layer 7 serves as a mask, and the exposure of a part of the second photosensitive slurry 9 existing on the upper surface of the internal electrode layer 7 is hindered.

  By performing development processing on the exposed sheet, the second slurry solidified portion 11 having a third predetermined thickness is obtained from the second photosensitive slurry 9, and the sheet shown in step 6 is obtained. Thereafter, the layer including the slurry solidifying part 5 and the post electrode 3 is separated from the base 1 to obtain a ceramic green sheet for electronic component production shown in Step 7. The main body of the multilayer electronic component can be obtained by laminating the ceramic green sheet and other sheets required for the electronic component construction, pressurizing and integrating them, and further firing.

  In the present embodiment, the case where the internal electrode is formed on the upper surface of the first slurry solidifying portion 5 has been described, but the embodiment of the present invention is not limited to this configuration. For example, the steps shown in steps 5 to 10 may be performed without forming the internal electrode layer 7 on the upper surface of the member shown in step 3. Such a process will be described below with reference to FIG. Here, steps 31 and 32 are the same as steps 1 and 2 shown in FIG. In this process, the second photosensitive slurry 9 is applied to the upper surface of the post electrode 3 and the first slurry solidifying portion 5 in the member in the state shown in step 33. Here, the second photosensitive slurry 9 has the same properties as the first photosensitive slurry 4 in terms of physical properties. Further, in the second photosensitive slurry 9 in this step, the sum of the thickness of the first slurry solidifying portion 5 and the thickness of the second photosensitive slurry 9 existing thereabove becomes thicker than the thickness of the post electrode 3. It shall be applied as follows. After the application of the second photosensitive slurry 9, the second photosensitive slurry 9 is irradiated with ultraviolet rays through the first slurry solidifying portion 5 from the back surface of the base 1, and a predetermined amount of the slurry is applied. Exposure is performed (step 34).

  By developing the exposed sheet, the second slurry solidified portion 11 having a third predetermined thickness is obtained from the second photosensitive slurry 9 (step 35). Thereafter, the layer including the slurry solidifying portion 5 and the post electrode 3 is separated from the base 1 to obtain a ceramic green sheet for manufacturing an electronic component. (Step 36) The ceramic green sheet and other sheets required for the electronic component configuration are laminated, pressure-integrated, and further fired to obtain the main body of the multilayer electronic component.

  In addition, the dispersion | variation in the film thickness of the slurry solidification part 5 which passed through the process of exposure in the above process and image development is influenced by the properties, such as a ceramic powder contained. However, by optimizing the conditions of each process, a value of about ± 2 to 3% is obtained as the variation in film thickness. Usually, the ceramic green sheet is formed by using a doctor blade, and the film thickness variation at that time is about ± 3 to 5%. That is, by using the present invention, a ceramic green sheet having a more uniform film thickness can be formed.

  The present applicant controls the solidified thickness (exposure amount) from the surface of the light transmitting member (in this case, the base 1) in the photosensitive slurry 4 by controlling the intensity of ultraviolet rays, the irradiation time, and the like during the exposure process. It has been found in the present invention that the control can be controlled. When confirming the controllability of the solidified thickness depending on the exposure amount, the mixing ratio of the ceramic powder in the slurry, the dispersibility of the powder, the average grain Various changes are made to the diameter, light transmittance of the powder itself, etc., and the thickness of the slurry that can be exposed under each condition is verified.

  Usually, when it is intended to expose a material in which ceramic powder or the like and a photosensitive binder are kneaded, it is known that light is scattered due to the presence of the ceramic powder or the like, and the exposure end portion is blurred. For example, for each barium titanate powder having an average particle size of approximately 1.0 μm, 0.8 μm, 0.6 μm, 0.4 μm, and 0.2 μm, the applicant assigns this to a negative binder and a volume ratio of 1 / Using a mixture kneaded at a ratio of 1, the relationship between the irradiation time and the remaining film thickness after development was confirmed.

  As a result, if the remaining film thickness is several μm, specifically about 10 μm or less for each powder, the exposure time and the obtained sheet thickness have a first-order correlation, and the average film thickness value varies. Was found to be in the range of ± 0.5-2.0%. Furthermore, when trying to maintain the flatness of the sheet, it can be said that the smaller the particle size, the better. This is because the particle size is an important factor particularly in a thin region, depending on the thickness of the sheet to be obtained. Specifically, when the sheet thickness is 5 μm or less, titanium having an average particle diameter of 0.8 μm or less, more preferably 0.2 μm or less is considered in consideration of the occurrence of irregularities (surface roughness) on the sheet surface due to powder particles. It is preferred to use barium acid powder. That is, a flat sheet can be obtained by using a slurry made of a powder having an average particle diameter of about 1/5 or less of the thickness of the sheet to be obtained, and when a sheet having a mean particle diameter of 1/20 or less is used, surface irregularities ( It is considered that a sheet having a small arithmetic average roughness (Ra value) is obtained.

  Here, the exposure time can be reconsidered as the exposure amount including the light intensity, and the result shows that the exposure amount and the remaining film thickness have a primary correlation. Therefore, when the ceramic powder and the photosensitive binder are used and the remaining thickness is about 5.0 μm, which is the same as the electrode thickness, it is possible to accurately maintain the sheet thickness and the flatness of the sheet surface. . In addition, although the specific examination result is described here about the case where the barium titanate powder inferior in the characteristic which permeate | transmits light is used, the so-called glass ceramic powder which is excellent in a light transmission characteristic simultaneously, or the ferrite powder which has light absorption property, Alternatively, metal powder is being studied.

  As a result, it is recognized that these powders have the same tendency as the barium titanate powder, although the required exposure dose is different. Therefore, when trying to control the residual thickness after development by the exposure amount using a slurry that is a kneaded product of metal or ceramic powder and a photosensitive binder, including examples of these various powders, the average of the powders used If the particle size is less than about 1.0 μm, the surface roughness can be reduced. As a result, it is possible to perform suitable control that further suppresses variation in the average film thickness value. Further, experiments other than the above have found that the remaining thickness after development can be controlled as long as it is less than about 50 μm depending on the conditions. In the present invention, based on the above knowledge, the first slurry solidifying part 5 or the second slurry solidifying part 11 having a predetermined thickness is obtained.

  In the embodiment described above, the upper surface of the post electrode 3 and the upper surfaces of the second slurry solidifying part 11 and the internal electrode layer 7 are substantially coincident. This is based on the result of considering that when the ceramic green sheets are stacked, the individual sheets are not uneven and the stacking deviation does not occur. However, when the post electrodes are preferably joined between the individual sheets, it may be preferable that the upper surface of the post electrode 3 is slightly protruded from the upper surfaces of other regions.

  In the embodiment described above, since the exposure amount of the first photosensitive slurry 4 needs to be strictly controlled, exposure can be performed by a so-called back exposure method in which exposure is performed from the back surface of the base 1. preferable. However, if the thickness of the second photosensitive slurry 9 can be controlled to the third predetermined thickness, it is not necessary to expose it by back exposure, and solidify by exposure from the top surface. It is also good. In that case, the second photosensitive slurry 9 only needs to be light transmissive enough to expose and solidify its own thickness. Further, the conductive paste may be the same for the internal electrode and the post electrode, or may be different.

  In this embodiment, the post electrode is formed by screen printing, but the embodiment of the present invention is not limited to this method. Specifically, various known methods can be applied, but the post electrode is obtained by applying a conductive paste containing a photosensitive material to the upper surface of the base 1 and subjecting it to exposure and development. It's also good. According to this method, it is possible to accurately form post electrodes at predetermined positions on the surface of the base 1. Alternatively, the post electrode may be formed on another base (not shown) and transferred onto the surface of the base 1 to obtain a sheet shown in Step 1.

  Moreover, in this Embodiment, it is supposed that the photosensitive slurry is apply | coated twice and the ceramic green sheet of one sheet is obtained by performing exposure and image development processing to these. Specifically, the thickness of the post electrode is the first predetermined thickness, the thickness of the first slurry solidified portion 5 is the second predetermined thickness, and the thickness of the second slurry solidified portion 11 is the third predetermined thickness. The predetermined thickness is set, and the sum of the second and third predetermined thicknesses is approximately equal to the first predetermined thickness. However, the present invention is not limited to this form. For example, from the state shown in Step 3 in FIG. 1, a configuration in which further electrode layers and further slurry solidified layers are laminated in the sheet thickness direction may be formed. In this case, not only a so-called negative type photosensitive paste that solidifies the exposed portion, but also a so-called positive type photosensitive paste that allows the exposed portion to be developed and removed may be used.

  Further, the upper surfaces of the second slurry solidifying part 11 and the internal electrode layer 7 may be substantially the same plane, and the thickness from the surface of the base 1 to the plane surface may be made thinner than the thickness of the post electrode 3. A further form of the invention for forming further layers on the member thus obtained will be described with reference to FIG. The structure of the members actually obtained in the above-described structure is shown in Step 21. That is, it is good also as obtaining the state where the internal electrode was included by the 1st slurry solidification parts 5 and 11 in step 21 of FIG. 6, and also performing the process shown to step 22-24.

  As a further modification, the further internal electrode layer 7 ′ and the further slurry solidified portion 11 ′ to be formed may be further thinned so that the layers are laminated. In this case, steps 22 to 24 can be repeated until the upper surface of the region other than the post electrode 3 substantially coincides with the upper surface of the post electrode 3. According to this step, it is possible to join each layer with a single post electrode for a plurality of layers having different configurations, and a more favorable effect can be obtained in reducing DC resistance or bonding strength. .

  In other words, in the embodiment of the present invention, in a form including a post electrode penetrating a plurality of layers obtained by different processes, the configuration of each layer other than the post electrode and the manufacturing process thereof limit the contents of the present invention. It is not a thing. Therefore, it is possible to combine the area | region which consists of various processes, and the electrode part which consists of this invention. That is, a single ceramic green sheet used for manufacturing a multilayer electronic component according to the present invention has a region composed of a plurality of layers obtained by different manufacturing processes inside, and penetrates each layer in the stacking direction. It is characterized by having an integrally formed electrode.

  As described above, a further layer may be formed on the upper surface of the sheet obtained in step 6 in the embodiment shown in FIG. Further, as will be described later, a specific layer may be formed on the base 1, and the steps after Step 1 in FIG. 1 may be performed on the upper surface of the layer. In these cases, the post electrode according to the present invention functions as an electrode portion that penetrates at least two layers and does not have a connection region therein.

  Further, as described above, the surface of the base 1 is subjected to a mold release process in advance. However, from the viewpoint of cost and the like, for example, a material that is difficult to perform a so-called mold release process may be used as the base 1. In this case, for example, as shown in FIG. 2, a light-transmitting release layer (a layer indicated by reference numeral 2 in the figure) is formed in advance on the surface of the base 1 that has not been subjected to any surface treatment. The post electrode 3 may be formed thereon. Further, as the layer 2, a layer having a so-called blur preventing function for preventing bleeding of the forming portion edge (end portion) at the time of forming the light shielding portion or the like may be formed. In this case, the layer 2 is finally peeled off and removed from the slurry solidifying portion 5 and the post electrode 3 together with the base 1. That is, the substrate 1 and the layer 2 function as a member that transmits light as a unit.

  In addition, when an electronic component or the like is formed by laminating ceramic green sheets, for example, a sheet corresponding to the lowermost layer of the electronic component may be required to have characteristics different from predetermined electrical characteristics. In this case, it is preferable to form a sheet in which a plurality of layers corresponding to each required characteristic are laminated. In this case, the layer 2 shown in FIG. 2 may be replaced with a layer that satisfies the characteristics. When the post electrode 3 is to be formed on the base 1 by the transfer method described above, the layer 2 may be an adhesive layer for facilitating transfer of the post electrode.

  In the present embodiment, the post electrode 3 is described as having a rectangular shape in the longitudinal section, but the embodiment of the present invention is not limited to this shape. Specifically, as shown in FIG. 3, a shape having a taper that increases as the electrode diameter moves away from the base 1 so that the side surface of the internal electrode has an inclination of an angle θ with respect to the normal line of the base 1. Also good. With this shape, when the ceramic green sheets according to the present invention are laminated, it is possible to give an allowable range of the positional accuracy of the post electrode with respect to a lamination error.

  Alternatively, as shown in FIG. 4, a light-transmissive insulating layer 15 having a pattern space 19 is formed on the base 1 (step 01), and the post electrode 3 is formed on the member made of the base 1 and the insulating layer 15. It may be formed (step 02). In this case, the electrode formation on the member is specifically performed by, for example, filling the pattern space 19 with the conductive paste by the screen printing method to form the filling portion 3b, and at the same time, including the post electrode 3 existing thereon. It means to form at the same time. In addition, the member in which the insulating layer 15 is formed on the base 1 shown in FIG. 4 and the insulating layer 15 has the pattern space 19 can transmit light in the exposure processing having the sheet forming surface in the present invention as a surface. Acts as a member. In this case, the concave portion shown as the pattern space 19 acts as the surface of the member.

  The member is shown as an example of a member having a layer including a plurality of regions made of different materials. That is, the state of Step 02 is considered as a member having a state as shown in Step 1 in FIG. In this case, the photosensitive slurry 4 may be applied to the upper surfaces of the post electrode 3 and the insulating layer 15 and exposed and developed (steps 03 and 04). As a result, a single ceramic green sheet having a plurality of layers inside and having a post electrode penetrating at least two of these layers without connecting portions is obtained. According to this method, a post electrode having a higher height can be obtained. In the step, the insulating layer 15 and the conductive paste may be made of a photosensitive material. In this case, it is possible to use the same mask by combining the opposite characteristics such that the characteristics of the insulating layer are a so-called positive type and the conductive paste is a so-called negative type. As a result, effects such as reduction in mask cost and improvement in formation position accuracy can be obtained.

  Further, as shown in FIG. 5, the post electrode is formed on a member in which the insulating layer 15 and the paste filling portion 3 b are formed in advance on the base 1, that is, a member having a layer including a plurality of regions made of different materials. 3 may be formed. In this case, regarding the connectivity between the filling portion 3b and the post electrode 3, for example, by forming the post electrode 3 with the filling portion 3b in an unsolidified state, compared to the case of the conventional process of laminating each sheet individually. The filling portion 3b and the post electrode 3 can be connected relatively well. Therefore, a post electrode having a higher height, which is more excellent in conductivity and the like with respect to the post electrode, can be obtained. In the embodiment shown in FIG. 4 or FIG. 5, the substrate 1, the pattern space 19, and the insulating layer 15, or a plurality of parts such as the base 1, the insulating layer 15, and the filling portion 3 b are formed. The member acts as a member having a region that transmits light as a whole.

  As shown in this example, the sheet according to the present invention is not limited to a form having a post electrode that penetrates from the sheet bottom surface to the sheet surface without a connecting portion. Specifically, the case where the method for forming a ceramic green sheet according to the present invention is applied to the member having the form shown in Step 01a of FIG. 5 is also included. That is, the state of step 02a is considered as a member having a state as shown in step 1 in FIG. 1, for example, composed of a member that can transmit light and the post electrode 3 (including the electrode 3b). In this case, the photosensitive slurry 4 may be applied to the upper surfaces of the post electrode 3 and the insulating layer 15 and exposed and developed (steps 03a and 04a). Further, as shown in Steps 05a and 06a, the application of the photosensitive slurry 9 and the exposure development processing of the slurry may be further repeated. In this case, a single ceramic green sheet having a plurality of layers inside and having a post electrode penetrating between at least two of these layers without connecting portions is the forming method according to the present invention. More obtained. Therefore, the ceramic green sheet having the characteristics is also included in the present invention.

  Moreover, in this embodiment, only the formation process of the ceramic green sheet which includes a post electrode is described. However, the present embodiment is not limited to the description, and further processes are performed on the upper surface of the sheet obtained in step 6 to form an electrode pattern by printing, an insulating layer, and the like. A sheet further including a so-called internal electrode pattern may be formed. In that case, the exposure method from the base back surface mentioned above may be used, and the exposure method from the sheet | seat upper surface may be used.

  In the above embodiments of the present invention, the present invention has been described as being aimed at forming a ceramic green sheet containing a so-called post electrode. However, the application object of the present invention is not limited to the post electrode, and can also be applied to obtain various pattern formations that have a certain occupation area at the time of formation and require a certain thickness. . Accordingly, in the present embodiment, the configuration described as the post electrode is not particularly limited as long as it has a characteristic as a light shielding portion that shields light during the exposure processing of the photosensitive member. That is, the conductivity or insulation described for each component is a characteristic limited to the above-described embodiment, and it is not necessary to consider these characteristics when implementing the present invention. Further, it can be applied not only to ceramic green sheets but also to various substrate formations used as electronic components.

It is a figure which shows typically the formation method of the ceramic green sheet which concerns on one Embodiment of this invention. It is a figure which shows the modification of embodiment which concerns on this invention. It is a figure which shows the modification of embodiment which concerns on this invention. It is a figure which shows the modification of embodiment which concerns on this invention. It is a figure which shows the modification of embodiment which concerns on this invention. It is a figure which shows the modification of embodiment which concerns on this invention. It is a figure which shows the modification of embodiment which concerns on this invention.

Explanation of symbols

1: base, 2: layer, 3: post electrode, 4: first photosensitive slurry, 5: first slurry solidification part, 7: internal electrode, 9: second photosensitive slurry, 11: second 15: solidified part of the slurry, 15: insulating layer, 19: pattern space

Claims (8)

A method for producing a ceramic green sheet including exposure and development processing,
Forming a light-shielding portion made of a material that does not transmit light having a first predetermined height on the surface of the member that has a sheet-formed surface on the surface and is capable of transmitting light used in the exposure process;
On the surface of the member, a layer made of a photosensitive material having a powder having predetermined electrical characteristics and capable of being exposed by the exposure process is formed.
The photosensitive material is irradiated with the light from the back surface of the member to perform the exposure process on the photosensitive material, and the photosensitive material is set to a second predetermined height lower than the first predetermined height. Solidify and remove the non-exposed portion of the photosensitive material by the development process,
A method of forming a ceramic green sheet comprising the step of forming a layer made of at least one of an electrode material and an insulating material on the surface of the solidified portion of the photosensitive material.   2. The ceramic green according to claim 1, wherein the surface of the layer made of at least one of an electrode material and an insulating material formed on the surface of the solidified portion of the photosensitive material substantially coincides with the surface of the light shielding portion. Sheet forming method.   The method for forming a ceramic green sheet according to claim 1, wherein the member is a base that can transmit the light.   The method for forming a ceramic green sheet according to claim 1, wherein the member includes a base that can transmit the light and a layer made of a material that can transmit the light.   3. The member according to claim 1, wherein the member includes a base that can transmit the light, and a layer that includes a plurality of regions made of different materials and formed on one surface of the base. A method for forming a ceramic green sheet according to claim 1.   6. The ceramic green according to claim 1, wherein the insulating material used for the layer made of at least one of the electrode material and the insulating material is made of a photosensitive material that can be exposed by an exposure process. Sheet forming method. A method for manufacturing a ceramic multilayer electronic component, comprising:
A plurality of ceramic green sheets including a ceramic green sheet formed by the method for producing a ceramic green sheet according to any one of claims 1 to 6 are laminated,
A method for producing a ceramic multilayer electronic component, comprising the step of pressing the laminated ceramic green sheets in the thickness direction to form a laminate. A ceramic green sheet that forms part of an electronic component,
A plurality of layers comprising at least one of an insulating material and a conductive material;
A ceramic green sheet comprising: an integrated electrode portion formed by a single process that penetrates at least two of the plurality of layers.

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