JP4124637B2 - Vacuum equipment valve - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a valve of a vacuum apparatus provided between two left and right vacuum chambers for opening and closing the openings.
[0002]
[Prior art]
In general, as a valve of a vacuum apparatus for opening and closing a vacuum chamber of a vacuum apparatus such as a semiconductor manufacturing apparatus, there is a valve as shown in FIG. That is, a vacuum device valve V ₀ is provided between the two left and right vacuum chambers 80, 81 in the vertical direction. The valve V ₀ has a casing C, and a valve body 86 is accommodated in the casing C so as to be movable in the vertical direction. The valve body 86 has a plate shape and is fixed to the upper end of the valve shaft 84. Valve stem 84 slides within the seal S0, so this seal S ₀ and the valve shaft 84 bellows 85 between the upper end is provided, the vacuum in the casing C be the valve shaft 84 slides is maintained ing. A drive unit (not shown) is provided below the valve shaft 84, whereby the valve body 86 moves up and down to open and close the communication hole 82 of the casing C.
[0003]
[Problems to be solved by the invention]
However, in the valve V ₀ of such a vacuum apparatus, the bellows 85 positioned in the vacuum communication space S ₁ of both the vacuum chambers 80 and 81 expands and contracts in the vacuum. It was. Further, since the valve V ₀ uses a plate-like valve body, only the vacuum chamber 80 on one side can be sealed.
[0004]
Further, since the valve V ₀ is provided in the vertical direction between the left and right vacuum chambers 80 and 81, there is a problem that when performing maintenance of the drive unit, the operation is performed in a narrow place and the operation is difficult. It was.
[0005]
In view of the above, an object of the present invention is to provide a valve of a vacuum apparatus that has few particles, has a long life, and has seal portions on both sides without using a bellows.
[0006]
[Means for achieving the object]
Therefore, the present invention is provided in the middle of the left and right vacuum chambers, and is a vacuum device valve for opening and closing the chamber openings of the left and right vacuum chambers. The vacuum device valve is interposed between the left and right vacuum chambers. , A valve seat body as a valve portion having left and right communication openings connected to the chamber opening of the vacuum chamber, and rotatable in the valve seat body and movable in the axial direction of the valve seat body, and by adjusting the rotational position A valve body that opens and closes the communication opening; and a drive unit that moves and rotates the valve body in an axial direction within the valve seat body, and the valve seat body has a diameter of the valve unit from the drive unit side. The valve body storage chamber having a circular cross section continuously expanding to the tip has the communication opening on both sides in the diameter direction of the valve body storage chamber, the valve body is stored in the valve body storage chamber, This valve body is connected to the valve A substantially cylindrical body having a diameter that continuously expands from the drive section side toward the tip of the valve section so as to correspond to the storage chamber, and is provided with a valve opening that opens to the left and right in the diameter direction in the substantially cylindrical body, The front end of the valve seat is closed by a closing board, and a guide shaft protruding from the front end of the valve body is housed in the central part of the inner surface of the closing board so as to be rotatable and movable in the axial direction . A double cylinder consisting of a cylinder and an outer cylinder, with a ring-shaped magnet between the inner cylinder and the outer cylinder, a cylindrical piston body with a magnet housed in the double cylinder, and an inner cylinder of this cylinder And a piston having a magnet corresponding to the magnet in the cylinder and a rotating gear mechanism for rotating the cylindrical piston body. Magnet around the piston, and to form a magnetic coupling.
[0007]
With such a structure, the opening of the left and right vacuum chambers can be opened and closed at the same time, and it becomes a valve of a vacuum apparatus with a small number of particles and a long life.
[0008]
Further, if the valve of the present invention is mounted laterally between the left and right vacuum chambers, the maintenance work becomes extremely easy.
[0009]
BEST MODE FOR CARRYING OUT THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
[0010]
1 and 2, a valve 3 of the vacuum device of the present invention is disposed in the lateral (horizontal) direction between the left and right vacuum chambers 1 and 2 installed on the gantry TT. The drive unit 5 is provided so as to protrude in the lateral direction of the vacuum chambers 1 and 2. In this manner, if the drive unit 5 is provided so as to extend laterally, access to the drive unit that requires more maintenance than other parts becomes easier.
[0011]
As shown in FIGS. 3 and 4, the valve 3 includes a valve portion 4 in which the valve body V is accommodated, and a drive portion 5 that is connected to the valve portion 4 and drives the valve body V.
As shown in FIGS. 5 and 6, the valve section 4 includes a valve seat body 20 (valve box 20) having a rectangular outer shape for housing the valve body V. The valve seat body 20 includes left and right vacuum chambers. And a valve body storage chamber 6 having a circular cross section and a diameter continuously expanding from the drive unit 5 side to the tip of the valve unit 4.
[0012]
The communication openings 21 and 22 are elongated in the axial direction of the valve seat body 20 on the opposite side in the diameter direction of the valve body storage chamber 6 of the valve seat body 20.
[0013]
Seals S4 and S4 are provided on the end surface of the valve seat body 20 around the communication openings 21 and 22, and these seals S4 are in close contact with the end surfaces of the left and right vacuum chambers.
[0014]
The valve body V is a substantially cylindrical body whose outer peripheral surface (diameter), which is an outer shape corresponding to the valve body storage chamber 6, expands from the drive unit 5 toward the tip of the valve unit 4. A valve port 19 that opens in the direction is provided, and the width of the valve port 19 corresponds to the width of the communication openings 21 and 22. Seals S5 and S5 are provided on the outer peripheral surface of the valve body V around the valve ports 19, respectively.
[0015]
The front end of the valve seat body 20 is closed by a closing board 40, and a guide shaft 41 protruding from the front end of the valve body V is housed in the central part of the inner surface of the closing board 40 so as to be rotatable and movable in the axial direction. .
[0016]
The valve body V is driven by the drive unit 5 so as to be rotatable and slidable in the axial direction. FIG. 4 shows a state in which the communication openings 21 and 22 of the valve seat body 20 are closed. As shown in FIGS. 5 and 6, the valve port 19 is closed by the inner wall of the valve body storage chamber 6 of the valve seat body 20. On the other hand, the communication openings 21 and 22 of the valve seat body 20 are closed by the outer peripheral wall of the valve body V. In order to open the communication openings 21 and 22 from this state, the valve body V in FIG. 4 is slid to the right in the figure, and the seal S5 of the valve body V and the inner wall of the valve body storage chamber 6 of the valve seat body Next, the valve body V is rotated 90 degrees from the position shown in FIGS. 5 and 6 so that the valve port 19 of the valve body and the communication openings 21 and 22 of the valve seat body 20 face each other.
[0017]
On the contrary, in order to close the communication openings 21 and 22, the valve body V is rotated 90 degrees from the open state at a position where the degree of adhesion of the seal S5 of the valve body V to the inner wall of the valve body storage chamber 6 is low, and then the valve body V 4 is moved to the left in FIG. 4 to bring the seal S5 of the valve body V into close contact with the inner wall of the valve body storage chamber 6 of the valve seat body. Thus, the vacuum chamber is sealed.
[0018]
Next, a mechanism of the drive unit 5 for rotating the valve body V and reciprocating in the axial direction will be described.
[0019]
4 and 5, the drive unit 5 has a casing 35, and a partition frame 32 is provided on the valve unit 4 side of the casing 35, and the valve body V is supported through the partition frame 32. The shaft 17 is extended. A ring-shaped magnet 16 a is attached to the rear end portion of the valve shaft 17 to form a piston 16. The piston 16 slides and rotates in the axial direction in the double cylinder 12, and the double cylinder 12 includes an outer cylinder 12a and an inner cylinder 12b. A ring-shaped magnet 13 is accommodated between the outer and inner cylinders 12a and 12b, and the magnet 13 and the magnet 16a form a magnet coupling. The ring-shaped magnet 13 is fixed to a cylindrical body portion 72 of a cylindrical piston body 75, and the cylindrical body portion 72 is integrally connected to the shaft portion 73, and the operation plate 30 is fixed to the rear end of the shaft portion 73. The operation plate 30 cooperates with the limit switch 31 to regulate the retracted position of the cylindrical piston body 75 composed of the cylindrical body portion 72 and the shaft portion 73. As shown in FIG. 4, the cylindrical piston body 75 has its axial position adjusted by adjusting the air supply from the air intake ports 14 and 15 formed at both ends of the double cylinder 12, and at this time The piston 16 of the valve shaft 17 moves so that the magnet 13 of the cylindrical piston body and the magnet 16 of the valve shaft 17 face each other, and the valve body V moves together therewith.
[0020]
A drive gear 10 rotatably supported by the frames F ₁ , F ₁ , and F ₂ is spline-coupled to the shaft portion 12d of the cylindrical piston body, and the intermediate gear 9 meshes with the drive gear 10 and the intermediate The gear 9 is attached to the rear end of a gear shaft 8 rotatably supported by the frames F ₁ and F ₂ , and an air-operated rotary actuator 7 is connected to the front end. This rotary actuator 7 meshes with the first bevel gear 7b and the first bevel gear 7b attached to the operation shaft of the air drive rotation drive portion 7a, the rotation drive portion 7a, and is fixed to the gear shaft 8. And a second bevel gear 7c. By the operation of the rotary actuator 7, the cylindrical piston body is rotated, and accordingly, the piston 16 attached to the valve shaft 17 is rotated.
[0021]
When the communication openings 21 and 22 of the valve seat body 20 are opened, air is supplied into the double cylinder 12 from the air port 14 provided at the rear portion of the cylinder 12 shown in FIG. The body 75 is moved to the right to move the piston 16 of the valve shaft 17 to the right. Along with this, the valve body V is also moved to the right. Next, the air-operated rotary actuator 7 is operated to rotate the cylindrical piston body 75 by 90 degrees. Along with this, the piston 16 of the valve shaft also rotates 90 degrees to open the communication openings 21 and 22 of the valve seat body 20.
[0022]
When the communication openings 21 and 22 are opened, first, the rotary actuator 7 is operated to rotate the valve body V by 90 degrees, and then air is supplied from the air port 15 on the valve portion 4 side of the double cylinder 12. Then, the double cylinder 12 is operated to move the valve body V in the axial direction.
[0023]
Next, another embodiment of the present invention will be described.
[0024]
As shown in FIGS. 3 and 4, although the seal ring S5, S5 a pair of the outer peripheral wall of the valve body V is provided, the seal ring S ₅ must be replaced after a certain period of time. In order to facilitate this replacement, a lid 90 is provided on at least the side wall of the valve seat body 20 as shown in FIG. The lid 90 is pressed by a presser bar 91. When replacing the seal ring S ₅ , the presser bar 91 is first removed from the side wall of the valve seat body 20, then the lid 90 is removed, and the seal ring is opened in the opening formed by removing the lid 90 while rotating the valve body V. Remove it with S51 facing. Further, the valve body V is rotated in the reverse direction so that the seal ring S52 is opposed to the opening of the lid 90 and removed. After removing these seal rings S ₅₁ and S ₅₂ , new seal rings are fitted into the respective grooves. The lid 90 may be further provided in the opposite wall.
Further, these seal rings S ₅₁ and S ₅₂ are generally at a low temperature, and when a temperature difference is generated between the valve body V and the wall surface of the valve seat body 20, a reaction product is formed on the surfaces of the seal rings S ₅₁ and S _52. Precipitates and becomes powdery harmful particles, which shortens the life of the seal rings S ₅₁ and S ₅₂ . Therefore, a heat source 92 such as a halogen lamp may be provided on the side wall of the valve seat body 20 to adjust the temperature of the entire bulb to a range of 80 ° C to 150 ° C.
[0025]
【The invention's effect】
Since the present invention uses a magnetic coupling without using a bellows as described above, the life is extended and the generation of particles is small, and seal surfaces can be provided on both sides. If it is disposed between the vacuum chambers in the lateral direction, the maintenance of the drive section is improved.
[Brief description of the drawings]
FIG. 1 is a side view of a vacuum chamber showing the arrangement of valves of a vacuum apparatus according to the present invention.
FIG. 2 is a front view of a vacuum chamber showing the arrangement of valves of the vacuum apparatus of the present invention.
FIG. 3 is a side partial sectional view showing the internal structure of the valve of the vacuum apparatus of the present invention.
FIG. 4 is a plan sectional view seen from above showing the internal structure of the valve of the vacuum apparatus of the present invention.
5 is a cross-sectional view taken along line AA in FIG.
6 is a cross-sectional view taken along the line BB in FIG.
FIG. 7 is a schematic configuration diagram of a valve of a conventional vacuum apparatus.
FIG. 8 is a sectional view of a valve seat body according to another embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1, 2 ... Vacuum chamber 3 ... Valve 4 ... Valve part 5 ... Drive part 6 ... Valve body storage chamber 12 ... Double cylinder 16 ... Piston 21, 22 ... Communication opening

Claims (4)

A vacuum device valve provided in the middle of the left and right vacuum chambers for opening and closing the chamber openings of the left and right vacuum chambers, the valve of the vacuum device being interposed between the left and right vacuum chambers, A valve seat body as a valve part having left and right communication openings, and a valve seat body that is rotatable in the valve seat body and movable in the axial direction of the valve seat body, and opens and closes the communication opening by adjusting a rotational position. A valve body, and a drive unit for moving and rotating the valve body in the axial direction in the valve seat body,
The valve seat body has a valve body storage chamber having a circular section whose diameter continuously increases from the drive unit side to the tip of the valve portion, and the communication openings are formed on both sides in the diameter direction of the valve body storage chamber. Prepared,
The valve body is housed in the valve body housing chamber, and a substantially cylindrical body whose diameter continuously expands from the drive unit side toward the tip of the valve portion so as to correspond to the valve body housing chamber. None, this substantially cylindrical body has a valve opening that opens to the left and right in the diameter direction,
The front end of the valve seat body is closed by a closing board, and a guide shaft protruding from the front end of the valve body is housed in the central part of the inner surface of the closing board so as to be rotatable and movable in the axial direction .
The drive unit is composed of an inner cylinder and an outer cylinder, a double cylinder having a ring-shaped magnet between the inner cylinder and the outer cylinder, and a cylindrical piston body having a magnet housed in the double cylinder, The piston is housed in an inner cylinder of the cylinder and connected to the valve body, and includes a piston having a magnet corresponding to the magnet in the cylinder, and a rotating gear mechanism for rotating the cylindrical piston body. 2. A vacuum apparatus valve according to claim 1, wherein magnets in the double cylinder and around the piston form a magnet coupling .   2. The valve of the vacuum device according to claim 1, wherein the valve of the vacuum device is disposed in a lateral direction between the left and right vacuum chambers, and a drive unit of the valve projects laterally from the vacuum chamber. 3. A valve of a vacuum apparatus according to claim 1, wherein a part of the valve seat body is openable and closable . The vacuum valve according to any one of claims 1 to 3, wherein a heating source is provided in the valve seat body .

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