JP3206604U - Rotary open / close valve - Google Patents

Abstract

Provided is a valve having a simple and low-cost structure for opening and closing between vacuum chambers and capable of sealing vacuum chamber openings on both sides as required. A valve case which is provided between two independent vacuum chambers 1 and 2 and which is connected to vacuum chamber openings 3 and 4 and has openings 3 and 4 on a wall surface, and rotational movement around the central axis of the valve case. A rotator having a hollow through passage formed in the center, a rotator driving unit for rotating the rotator, and a single unit that moves in the rotational radius direction of the rotator to seal the valve case opening A valve body moving mechanism for projecting the valve body in the rotational radius direction when the valve body and the opening are sealed and for pulling the valve body in the rotational radius direction when the rotary body rotates is provided. By controlling the rotation angle of the rotating body, sealing of the valve case opening connected to the vacuum chambers 1 and 2 on one side or sealing of the valve case opening connected to the vacuum chambers 1 and 2 on the opposite side The through opening between the valve case openings can be arbitrarily selected. [Selection] Figure 1

Description

The present invention relates to a valve provided between two independent vacuum chambers for opening and closing a vacuum chamber opening.

Up to now, as a gate valve for opening and closing between vacuum chambers of a vacuum processing apparatus, a plate-like valve body has moved up and down in the valve case, and this valve body is fixed to the upper end of the valve shaft. The shaft slides in the seal, and a bellows is provided between the seal and the upper end of the valve shaft so that the vacuum in the valve case is maintained even if the valve shaft slides. As a result, the valve body moves up and down to open and close the through hole of the valve case.

In the valve of the vacuum processing apparatus described above, the bellows positioned in the through space between the two vacuum chambers expands and contracts in the vacuum and the stroke becomes long, which not only shortens the life but also causes generation of particles. Moreover, since the said valve uses the plate-shaped valve body, only the vacuum chamber of one side could be sealed.

In order to solve these problems, rotary valves with valve bodies on both sides have been proposed, but a valve body moving mechanism is required for each valve body, making the structure complicated and not suitable for reducing the size and cost of the valve. It has not yet been put to practical use.

Patent No. 4002906 Japanese Patent No. 4124737

The present invention has been made in view of the above problems, and an object of the present invention is to provide a valve that has a simple structure and low cost and can seal the vacuum chamber openings on both sides as necessary.

In the present invention, a valve case provided between two independent vacuum chambers, connected to the vacuum chamber opening and having an opening on the wall surface, and capable of rotating around the central axis of the valve case and hollow through the center A rotating body in which a path is formed, a rotating body driving unit for rotating the rotating body, a single valve body that moves in a rotational radius direction of the rotating body and seals the valve case opening, and an opening A valve body moving mechanism is provided for projecting the valve body in the rotational radius direction when sealing, and pulling the valve body in the rotational radius direction when the rotary body rotates.

By controlling the rotation angle of the rotating body, sealing of the valve case opening connected to the vacuum chamber on one side, sealing of the valve case opening connected to the vacuum chamber on the opposite side, or valve case opening It was made possible to arbitrarily select between and open through.

The rotary open / close valve of the present invention controls the rotation angle of a rotary body on which a single valve body is placed, thereby allowing any vacuum chamber side opening to be sealed and through and open between valve case openings. Not only has it become possible, but it has become possible to produce compact and low-cost valves due to its simple structure.

Schematic diagram with rotary open / close valve connected between vacuum chambers Internal structure diagram of rotary open / close valve Operation example of rotary on / off valve

Embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic view in which a rotary on / off valve is connected between vacuum chambers. A rotary opening / closing valve 5 is provided between two independent vacuum chambers 1, 2, and the rotary opening / closing valve is connected to the vacuum chamber openings 3, 4 to form a through-passage between the vacuum chambers or shut off sealing. Is going.

FIG. 2 is an internal structure diagram of the rotary on-off valve. The rotary open / close valve 5 is connected to the vacuum chamber openings 3 and 4 and has a valve case 6 having an opening on the wall surface, and is rotatable about the central axis of the valve case, and a hollow through passage 12 is formed in the center. A rotating body 7, a rotating body drive unit 8 for rotating the rotating body, a single valve body 9 that moves in the rotational radius direction of the rotating body and seals the valve case opening, and an opening seal It consists of a valve body moving mechanism 10 for projecting the valve body in the radial direction of rotation when stopping, and for pulling the valve body in the radial direction of rotation of the rotary body, forming a hollow through passage in the valve case with a simple structure, Any one of the valve case openings can be sealed.

FIG. 3 is an operation example of the rotary on-off valve. (A) seals the valve body 9 in accordance with the valve case opening 13 connected to the vacuum chamber on one side by setting the rotation angle of the rotating body to 0 °. In (B), by setting the rotation angle of the rotating body to 90 °, a hollow through passage is formed between the valve case openings by aligning the valve body 9 with the valve case intermediate part. Further, (C) seals the valve body 9 in accordance with the valve case opening 14 connected to the opposite vacuum chamber by setting the rotation angle of the rotating body to 180 °.

DESCRIPTION OF SYMBOLS 1, 2, Vacuum chamber 3, 4 Vacuum chamber opening part 5 Rotary opening / closing valve 6 Valve case 7 Rotating body 8 Rotating body drive part 9 Valve body 10 Valve body moving mechanism 11 Rotating shaft 12 Hollow through passage 13 Valve case opening part (1 )
14 Valve case opening (2)

Claims (1)

A valve case provided between two independent vacuum chambers, connected to each vacuum chamber opening and having an opening on the wall surface, and capable of rotating around the central axis of the valve case and having a hollow through passage in the center. The formed rotating body, the rotating body driving unit for rotating the rotating body, the single valve body that moves in the rotational radius direction of the rotating body and seals the valve case opening, and the opening sealing Sometimes the valve body is projected in the radial direction of rotation, and when the rotary body rotates, it is equipped with a valve body moving mechanism for pulling the valve body in the radial direction of rotation, and connected to the vacuum chamber on one side by controlling the rotation angle of the rotary body It is possible to arbitrarily select the sealed valve case opening, the valve case opening connected to the opposite vacuum chamber, or the through opening between the valve case openings. Rotary-off valve, characterized.

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