JP4117380B2 - 触媒作用を有する塩化物と収束電子線を用いる微細構造物の製造方法とその装置 - Google Patents
触媒作用を有する塩化物と収束電子線を用いる微細構造物の製造方法とその装置 Download PDFInfo
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- JP4117380B2 JP4117380B2 JP2004075348A JP2004075348A JP4117380B2 JP 4117380 B2 JP4117380 B2 JP 4117380B2 JP 2004075348 A JP2004075348 A JP 2004075348A JP 2004075348 A JP2004075348 A JP 2004075348A JP 4117380 B2 JP4117380 B2 JP 4117380B2
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- electron beam
- fine structure
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- gas
- catalytic
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- 238000010894 electron beam technology Methods 0.000 title claims description 30
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 230000003197 catalytic effect Effects 0.000 title claims description 15
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 title description 3
- 239000000463 material Substances 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 claims description 10
- 230000001678 irradiating effect Effects 0.000 claims description 8
- 239000000758 substrate Substances 0.000 description 19
- 239000007789 gas Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 17
- 238000006243 chemical reaction Methods 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 230000001133 acceleration Effects 0.000 description 8
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 8
- 239000003054 catalyst Substances 0.000 description 7
- 238000006555 catalytic reaction Methods 0.000 description 5
- 239000000460 chlorine Substances 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- 229910003771 Gold(I) chloride Inorganic materials 0.000 description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 description 2
- 238000003917 TEM image Methods 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 239000007809 chemical reaction catalyst Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- FDWREHZXQUYJFJ-UHFFFAOYSA-M gold monochloride Chemical compound [Cl-].[Au+] FDWREHZXQUYJFJ-UHFFFAOYSA-M 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910001510 metal chloride Inorganic materials 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000011941 photocatalyst Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 239000011949 solid catalyst Substances 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
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- Drying Of Semiconductors (AREA)
Description
、さらに、数ナノメートルから数百ナノメートルの微細な領域に位置や大きさを制御しながら微細構造物を製造できる。
シリコン(Si)基材が収められた密閉の反応容器内を室温にして1×10-5パスカル(Pa)に減圧する。そして、加速電圧200keVにおける収束電子線を照射しながらAlCl3の気体を約1×10-4Pa L/sの流量でノズルから供給する。照射位置を約2nm/sの速度で移動することによりシリコン(Si)基材の淵から100ナノメートルオーダーの棒状微細構造物を作製した。図2は生成された棒状微細構造物の走査顕微鏡写真である。また、図3はこの棒状微細構造物のエネルギー分散型X線分光法(EDS)で分析した結果を示したものであるが、図3からも明らかなように生成された棒状微細構造物は主にシリコン(Si)だけからなり、気体として供給したAlCl3のアルミニウ
ム(Al)も塩素(Cl)も検出されていない。AlCl3の気体を供給しない場合には
、このような棒状微細構造物が得られない。このことから判断して塩化物であるAlCl3はシリコン(Si)基材に対して触媒として作用したものと考えられる。
セルロース系の膜にカーボンが蒸着された有機物フィルム基材が収められた密閉の反応容器内を室温にして1×10-5パスカル(Pa)に減圧する。そして、加速電圧200keVにおける収束電子線を照射しながらAlCl3の気体を約10-4Pa L/sの流量でノズルから供給する。照射位置を約2nm/sの速度で移動することにより、有機物フィルム基材の淵から太さ約10ナノメートルの棒状微細構造物を作製した。
Cl3のアルミニウム(Al)や塩素(Cl)は検出されていない。
2 収束電子線
3 微細構造物
4 基材
5 反応容器
6 吸引
Claims (3)
- 基材の表面に、該基材に対して触媒作用を有する金属又はシリコンの塩化物の気体を供給するとともに200keV以上の収束電子線を照射して微細加工することを特徴とする微細構造物の製造方法。
- 微細構造物がナノメートルサイズであることを特徴とする請求項1に記載の微細構造物の製造方法。
- 収束電子線の照射幅がサブナノメートルであることを特徴とする請求項1または2に記載の微細構造物の製造方法。
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JP2004075348A JP4117380B2 (ja) | 2004-03-16 | 2004-03-16 | 触媒作用を有する塩化物と収束電子線を用いる微細構造物の製造方法とその装置 |
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JP2004075348A JP4117380B2 (ja) | 2004-03-16 | 2004-03-16 | 触媒作用を有する塩化物と収束電子線を用いる微細構造物の製造方法とその装置 |
Publications (2)
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JP2005262345A JP2005262345A (ja) | 2005-09-29 |
JP4117380B2 true JP4117380B2 (ja) | 2008-07-16 |
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JP2004075348A Expired - Lifetime JP4117380B2 (ja) | 2004-03-16 | 2004-03-16 | 触媒作用を有する塩化物と収束電子線を用いる微細構造物の製造方法とその装置 |
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Families Citing this family (1)
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CN114956073B (zh) * | 2022-06-15 | 2023-12-12 | 燕山大学 | 一种原位刻蚀金刚石的方法 |
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