JP4112527B2 - システムオンパネル型の発光装置の作製方法 - Google Patents
システムオンパネル型の発光装置の作製方法 Download PDFInfo
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- JP4112527B2 JP4112527B2 JP2004185758A JP2004185758A JP4112527B2 JP 4112527 B2 JP4112527 B2 JP 4112527B2 JP 2004185758 A JP2004185758 A JP 2004185758A JP 2004185758 A JP2004185758 A JP 2004185758A JP 4112527 B2 JP4112527 B2 JP 4112527B2
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- Prior art keywords
- tft
- semiconductor film
- film
- light
- emitting device
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004065 semiconductor Substances 0.000 claims description 195
- 239000000758 substrate Substances 0.000 claims description 58
- 239000012535 impurity Substances 0.000 claims description 41
- 239000007789 gas Substances 0.000 claims description 26
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- 229910021332 silicide Inorganic materials 0.000 claims description 12
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- 229910052743 krypton Inorganic materials 0.000 claims description 3
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 claims description 3
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- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
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- -1 Tungsten nitride Chemical class 0.000 description 2
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- 229910052802 copper Inorganic materials 0.000 description 2
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 2
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- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
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- AHLBNYSZXLDEJQ-FWEHEUNISA-N orlistat Chemical compound CCCCCCCCCCC[C@H](OC(=O)[C@H](CC(C)C)NC=O)C[C@@H]1OC(=O)[C@H]1CCCCCC AHLBNYSZXLDEJQ-FWEHEUNISA-N 0.000 description 2
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- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
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- 239000010935 stainless steel Substances 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
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- 229910052779 Neodymium Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
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- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
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- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
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- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Thin Film Transistor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004185758A JP4112527B2 (ja) | 2003-07-14 | 2004-06-24 | システムオンパネル型の発光装置の作製方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003273872 | 2003-07-14 | ||
| JP2004185758A JP4112527B2 (ja) | 2003-07-14 | 2004-06-24 | システムオンパネル型の発光装置の作製方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007241214A Division JP4906106B2 (ja) | 2003-07-14 | 2007-09-18 | 発光装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005051211A JP2005051211A (ja) | 2005-02-24 |
| JP2005051211A5 JP2005051211A5 (enExample) | 2007-08-09 |
| JP4112527B2 true JP4112527B2 (ja) | 2008-07-02 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004185758A Expired - Fee Related JP4112527B2 (ja) | 2003-07-14 | 2004-06-24 | システムオンパネル型の発光装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4112527B2 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4748954B2 (ja) * | 2003-07-14 | 2011-08-17 | 株式会社半導体エネルギー研究所 | 液晶表示装置 |
| EP1998373A3 (en) | 2005-09-29 | 2012-10-31 | Semiconductor Energy Laboratory Co, Ltd. | Semiconductor device having oxide semiconductor layer and manufacturing method thereof |
| KR101277606B1 (ko) * | 2006-03-22 | 2013-06-21 | 삼성디스플레이 주식회사 | 표시 장치 및 그 제조 방법 |
| US7897971B2 (en) * | 2007-07-26 | 2011-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
| KR101446251B1 (ko) * | 2007-08-07 | 2014-10-01 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치, 이 표시 장치를 구비한 전자기기 및 그 제조 방법 |
| JP5395384B2 (ja) * | 2007-09-07 | 2014-01-22 | 株式会社半導体エネルギー研究所 | 薄膜トランジスタの作製方法 |
| TWI371223B (en) * | 2008-02-20 | 2012-08-21 | Chimei Innolux Corp | Organic light emitting display device and fabrications thereof and electronic device |
| JP5525778B2 (ja) * | 2008-08-08 | 2014-06-18 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| US8283667B2 (en) * | 2008-09-05 | 2012-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor |
| WO2010032425A1 (ja) | 2008-09-16 | 2010-03-25 | シャープ株式会社 | 半導体素子 |
| JP5711463B2 (ja) * | 2009-01-16 | 2015-04-30 | 株式会社半導体エネルギー研究所 | 薄膜トランジスタ |
| WO2012035984A1 (en) * | 2010-09-15 | 2012-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device |
| JP5982147B2 (ja) * | 2011-04-01 | 2016-08-31 | 株式会社半導体エネルギー研究所 | 発光装置 |
| KR20210068637A (ko) | 2014-10-28 | 2021-06-09 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 발광 장치 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61104671A (ja) * | 1984-10-29 | 1986-05-22 | Sharp Corp | 電界効果トランジスタ |
| JPH03222370A (ja) * | 1990-01-26 | 1991-10-01 | Mitsubishi Electric Corp | 薄膜トランジスタ |
| JPH03233431A (ja) * | 1990-02-09 | 1991-10-17 | Hitachi Ltd | 液晶ディスプレイパネル |
| JP3054187B2 (ja) * | 1990-11-09 | 2000-06-19 | 株式会社半導体エネルギー研究所 | 絶縁ゲイト型半導体装置の作製方法 |
| JP2997737B2 (ja) * | 1990-12-25 | 2000-01-11 | 株式会社半導体エネルギー研究所 | 液晶表示装置 |
| JPH07131030A (ja) * | 1993-11-05 | 1995-05-19 | Sony Corp | 表示用薄膜半導体装置及びその製造方法 |
| JPH10256554A (ja) * | 1997-03-13 | 1998-09-25 | Toshiba Corp | 薄膜トランジスタ及びその製造方法 |
| JPH1197706A (ja) * | 1997-09-23 | 1999-04-09 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
| JPH1197705A (ja) * | 1997-09-23 | 1999-04-09 | Semiconductor Energy Lab Co Ltd | 半導体集積回路 |
| JP4393662B2 (ja) * | 2000-03-17 | 2010-01-06 | 株式会社半導体エネルギー研究所 | 液晶表示装置の作製方法 |
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2004
- 2004-06-24 JP JP2004185758A patent/JP4112527B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2005051211A (ja) | 2005-02-24 |
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