JP4104715B2 - Solvent composition for removing adhering water - Google Patents

Solvent composition for removing adhering water Download PDF

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Publication number
JP4104715B2
JP4104715B2 JP1296798A JP1296798A JP4104715B2 JP 4104715 B2 JP4104715 B2 JP 4104715B2 JP 1296798 A JP1296798 A JP 1296798A JP 1296798 A JP1296798 A JP 1296798A JP 4104715 B2 JP4104715 B2 JP 4104715B2
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Japan
Prior art keywords
water
surfactant
solvent composition
hfe
dichloroethylene
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JPH11209798A (en
Inventor
秀明 菊地
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Chemours Mitsui Fluoroproducts Co Ltd
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Du Pont Mitsui Fluorochemicals Co Ltd
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Description

【0001】
【発明の属する技術分野】
本発明は、ハイドロフルオロエーテルを用いた付着水除去用溶剤組成物に関する。更に詳しくは、精密機械、光学機械や電子機器等の金属製、プラスチック製、ガラス製の部品等に付着した水を除去するのに適した組成物に関するものである。
【0002】
【従来の技術】
精密金属部品、光学部品、電子部品の多くが加工途中で水を使用しており、この工程の後処理として必要な付着残留水の除去及び乾燥には、被洗浄物を腐食せずに水を洗い落とすことができ、しかもその洗浄液自体の除去が容易にできるような適当な沸点を持つ洗浄剤が用いられる。そのような、洗浄剤として、これまでクロロフルオロカーボン系洗浄剤(例えば、CFC−113、沸点48℃)に界面活性剤を混合した組成物が使用されてきた。しかし、クロロフルオロカーボンについてはオゾン層保護の観点からウィーン条約やモントリオール議定書に基づき国際的な規制が実施され、わが国でも既に生産は廃止されている。
【0003】
そのため、CFC−113等のクロロフルオロカーボン系付着水除去用溶剤組成物が有する低毒性、不燃性、低腐食性の特性を失うことなく、水置換性能が優れ、且つオゾン層を破壊する恐れがない付着水除去用溶剤組成物の開発が望まれている。
【0004】
そこで発明者らは、先にこのような溶剤を探索した結果、ハイドロフルオロエーテルに界面活性剤を混合してなる溶剤組成物を提案した(特願平8−122073号)。
前記発明によるハイドロフルオロエーテル(以下HFEという)を主成分として用いた溶剤組成物は、オゾン層を破壊する恐れがなく、CFC−113等のクロロフルオロカーボン系に代替し得る付着水除去用溶剤組成物として使用可能になったが、より少量の付着水除去用溶剤組成物で精密機械、光学機械や電子機器等の金属製、プラスチック製、ガラス製の部品等に付着した水を除去する溶剤が望まれている。
【0005】
【発明が解決しようとする課題】
そこで本発明者は、より少量で付着水除去が可能な付着水除去用溶剤組成物の処方を探索した結果、HFEに1,2−ジクロロエチレンを混合することにより、HFE単体の界面活性剤に対する溶解性を補い、界面活性剤の性能を充分に発揮させ付着水除去効果が一段と向上することを見出した。
またHFEと1,2−ジクロロエチレンとの混合物を付着水除去用溶剤組成物として用いる場合、これに添加する界面活性剤としては特定の第4級アンモニウム塩が最適であることを見出した。
【0006】
【課題を解決するための手段】
すなわち本発明は、ハイドロフルオロエーテル(A)に1,2−ジクロロエチレン(B)及び界面活性剤(C)を混合してなる付着水除去用溶剤組成物であり、界面活性剤(C)として下記一般式
NR Cl
(式中、m=2または3、n=1または2、m+n=4であり、R 1 はC 6 18 のアルキル基、R はC 1−2 のアルキル基を表す)で表されるカチオン界面活性剤またはN−プロピル−N−ポリエトキシパーフルオロオクタンスルホンアミド(ノニオン界面活性剤)を用い、好ましくは、ハイドロフルオロエーテル(A)としてメチルノナフルオロブチルエーテルまたはエチルノナフルオロブチルエーテルを用いるものである。
【0007】
【発明の実施の形態】
本発明の溶剤組成物の主成分であるHFE(A)は、特に限定されないが、エーテル、好ましくは炭素数が4−8である脂肪族エーテルの水素原子の一部または全部がフッ素に置換したものである。
炭素数が2より小さいときは、沸点が低くなり過ぎ、HFEの蒸散ロスが多くなり、炭素数8より大きいときは、沸点が高くなり過ぎ、被洗浄物から本付着水除去用溶剤組成物を除去するためのエネルギー消費が多くなる傾向が有る。また、引火性の点から水素原子の過半数以上がフッ素原子に置換したものが好ましい。
【0008】
このようなHFEとして、テトラフルオロエチルヘプタフロロプロピルエーテル、トリフルオロエチルテトラフルオロエチルエーテル、メチルヘキサフルオロプロピルエーテル、メチルノナフルオロブチルエーテル、エチルノナフルオロブチルエーテル等を挙げることができる。
上記HFEのうち、アルキルペルフルオロアルキルエーテル(Cm2m+1OCn2n+1)が好適であり、特にメチルノナフルオロブチルエーテル(MNFBE)や、エチルノナフルオロブチルエーテル(ENFBE)のような沸点が30−80℃以下のアルキルペルフルオロアルキルエーテルは蒸発・除去するためのエネルギー消費を節減できるので本発明に好適なHFEである。上記のHFEは単独で使用することも、混合して使用することも可能である。
【0009】
HFEに界面活性剤を配合して付着水除去用溶剤組成物として用いる際に、HFE単体の界面活性剤に対する溶解性を補い、付着水除去効果を一段と向上させるために有機溶剤を添加するのが有効であるが、このようなHFEと混合され界面活性剤を溶解する有機溶剤は、HFEと相溶性があること及び水と相溶性がある場合には混入してきた水によって抽出され組成変化を起こす危険性があるため水と相溶性を有しないことが必要である。これらの点から、本発明の付着水除去用溶剤組成物には特に1,2−ジクロロエチレンが有効であることがわかった。
【0010】
1,2−ジクロロエチレン(B)としては、トランス−1,2−ジクロロエチレンまたはシス−1,2−ジクロロエチレンのいずれも使用することができ、また両者の混合物を用いてもよい。
【0011】
1,2−ジクロロエチレン(B)の含有量は、HFE(A)と1,2−ジクロロエチレン(B)の合計量に対して1重量%〜50重量%、特に10重量%〜40重量%が好ましい。1,2−ジクロロエチレンの配合量が少ないとHFEの界面活性剤に対する溶解性向上効果が少ないため、付着水除去効果を改善することができず、また多すぎると被洗浄物である高分子材料の物性を損なうおそれがあるため好ましくない。
【0012】
本発明のHFE及び1,2−ジクロロエチレンに配合する界面活性剤としては、下記一般式
1 mNR2 nCl
(式中、m=2または3、n=1または2、m+n=4であり、R1はC618のアルキル基、RはC1−2のアルキル基を表す)で表される界面活性剤、すなわちカチオン部分が[R NR であり、アニオン部分が[Cl]である第4級アンモニウム塩カチオン界面活性剤またはN−プロピル−N−ポリエトキシパーフルオロオクタンスルホンアミド(ノニオン界面活性剤)が用いられる。
【0013】
界面活性剤(C)の含有量は、HFE(A)と1,2−ジクロロエチレン(B)の混合物に対して、0.01重量%〜10重量%、特に0.1重量%〜5重量%が好ましい。界面活性剤の配合量が少ないと付着水除去効果が低下し、また多すぎると界面活性剤のすすぎが不十分となる。
【0014】
また付着除去用溶剤組成物中に安定材としてニトロアルカン類、エポキシド類、フラン類、ベンゾトリアゾール類、フェノール類、アミン類等を添加することもできる。
【0015】
更に、付着水除去用能力の向上、界面活性剤の溶解力向上の為、炭化水素類、アルコール類、ケトン類、エーテル類、エステル類等の有機液体を混合することもできる。
【0016】
本発明の溶剤組成物を用いて、物品に付着した水を除去するには、沸騰状態にある付着水除去用組成物に浸漬する方法が最も一般的であるが、その他、超音波、スプレー、揺動等の他の方法を用いることもできる。なお、水を除去した後の被洗浄物に付着している界面活性剤はHFEもしくはHFEとジクロロエチレンの混合液によってすすぎ落とすことができる。
【0017】
【実施例】
[実施例1]
メチルノナフルオロブチルエーテルとシス−1,2−ジクロロエチレンとを、それぞれ60重量%及び40重量%で配合し、ノニオン系界面活性剤として、N−プロピル−N−ポリエトキシパーフルオロオクタンスルホンアミド(商品名;エフトップEF−122B、三菱マテリアル製)を前記混合物に対して0.5重量%で混合し、付着水除去用溶剤組成物を調製した。
25mlのメスシリンダーに純水を3ml入れ、8mmの標線まで直径0.4mmのガラスビースを入れた。次に上記付着水除去用溶剤組成物をガラスビーズを入れたメスシリンダーの25mlの標線まで注入し、注入直後から5分後迄に溶液上部に浮遊した水の量を測定し、下記の式より付着水除去率を求めた。
結果を表1に示す。
付着水除去率=(5分後迄に浮遊した水の量/純水の量(3ml))×100
【0018】
[実施例2]
実施例1において、界面活性剤としてノニオン系界面活性剤の代わりに、カチオン系界面活性剤、#621(構造式;(C12252 N(CH32 Cl)を0.5重量%で混合したものを付着水除去用溶剤として用いた以外は、実施例1と同様にして付着水除去率を求めた。結果を表1に示す。
【0019】
[比較例1]
実施例1、2において界面活性剤を添加せず、メチルノナフルオロブチルエーテルとシス−1,2−ジクロロエチレンのみからなる混合液を付着水除去用溶剤として用いた以外は、実施例と同様にして付着水除去率を求めた。結果を表1に示す。
【0020】
[比較例2]
シス−1,2−ジクロロエチレンを配合せず、HFEとしてテトラフルオロエチルヘプタフルオロプロピルエーテルを用い、これに実施例1で用いたと同じノニオン系界面活性剤を混合したものを付着水除去用溶剤として用いた。ただし1,2−ジクロロエチレン無配合の溶剤中では、界面活性剤の溶解度が小さく、多量に添加することができないため、界面活性剤の添加量は0.1重量%(対HFE)とした。この付着水除去用溶剤を用い、実施例と同様にして付着水除去率を求めた。結果を表1に示す。
【0021】
【表1】

Figure 0004104715
MNFBE: メチルノナフルオロブチルエーテル
TFEHFPE:テトラフルオロエチルヘプタフルオロプロピルエーテル
ノニオン活性剤:N−プロピル−N−ポリエトキシパーフルオロオクタンスルホンアミド
カチオン活性剤:(C12252 N(CH32 Cl
【0022】
表1から明らかなように、HFE(A)、1,2−ジクロロエチレン(B)及び界面活性剤(C)を必須成分とする本発明の溶剤組成物は、付着水除去率が高く、特に界面活性剤(C)としてR1 mNR2 nClで表されるカチオン界面活性剤を用いた溶剤組成物は、付着水をほとんど完全に除去できる優れた付着水除去用溶剤である。
これに対しHFEと1,2−ジクロロエチレンのみからなる溶剤は付着水除去率が0%であり、被洗浄物の付着水除去は不可能である。またHFEに界面活性剤のみを添加したものは、界面活性剤を充分量添加することができず、そのため付着水除去率は低く十分な性能を持っているとは云えない。
【0023】
【発明の効果】
HFE、1,2−ジクロロエチレン及び界面活性剤からなる本発明の溶剤組成物は、付着水除去率が高く、洗浄液自体の除去が容易にできるので、精密機械工業、電子工業分野において、金属部品や光学部品を水洗した後の乾燥工程の際、被洗物を高温に加熱することなく付着残留した水を溶剤で置換することにより、短時間で乾燥ができ、しみのない製品が得られる。
またクロロフルオロカーボンを使用していないので、オゾン層破壊の恐れもなく、従来用いられていたクロロフルオロカーボン系洗浄剤と同様の使用方法で洗浄を行うことができる。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a solvent composition for removing attached water using a hydrofluoroether. More specifically, the present invention relates to a composition suitable for removing water adhering to metal, plastic, glass parts and the like such as precision machines, optical machines and electronic devices.
[0002]
[Prior art]
Many precision metal parts, optical parts, and electronic parts use water in the middle of processing. For removal and drying of adhering residual water required as a post-treatment in this process, water should be used without corroding the object to be cleaned. A cleaning agent having an appropriate boiling point is used so that it can be washed off and the cleaning liquid itself can be easily removed. As such a cleaning agent, a composition obtained by mixing a surfactant with a chlorofluorocarbon-based cleaning agent (for example, CFC-113, boiling point 48 ° C.) has been used. However, with regard to chlorofluorocarbons, international regulations have been implemented based on the Vienna Convention and the Montreal Protocol from the viewpoint of protecting the ozone layer, and production has already been abolished in Japan.
[0003]
Therefore, without losing the low toxicity, nonflammability, and low corrosive properties of the solvent composition for removing chlorofluorocarbon-based adhering water such as CFC-113, water replacement performance is excellent and there is no risk of destroying the ozone layer. Development of a solvent composition for removing adhered water is desired.
[0004]
Accordingly, the inventors have previously searched for such a solvent, and as a result, proposed a solvent composition obtained by mixing a hydrofluoroether with a surfactant (Japanese Patent Application No. 8-122073).
The solvent composition using the hydrofluoroether (hereinafter referred to as HFE) according to the present invention as a main component has no fear of destroying the ozone layer, and can be substituted for chlorofluorocarbons such as CFC-113. However, a solvent composition that removes water adhering to metal, plastic, and glass parts such as precision machinery, optical machinery, and electronic equipment is desired with a smaller amount of solvent composition for removing adhering water. It is rare.
[0005]
[Problems to be solved by the invention]
Therefore, as a result of searching for a prescription for a solvent composition for removing adhering water that can remove adhering water in a smaller amount, the present inventor dissolved HFE alone in a surfactant by mixing 1,2-dichloroethylene with HFE. It has been found that the effect of removing the adhering water is further improved by supplementing the properties and sufficiently exerting the performance of the surfactant.
Moreover, when using the mixture of HFE and 1, 2- dichloroethylene as a solvent composition for adhesion water removal, it discovered that a specific quaternary ammonium salt was optimal as surfactant added to this.
[0006]
[Means for Solving the Problems]
That is, the present invention is a solvent composition for removing adhering water obtained by mixing hydrofluoroether (A) with 1,2-dichloroethylene (B) and surfactant (C). General formula
R 1 m NR 2 n Cl
(Wherein, m = 2 or 3, n = 1 or 2, m + n = 4, R 1 is C 6 - alkyl group of 18, R 2 represents an alkyl group of C 1-2) represented by A cationic surfactant or N-propyl-N-polyethoxyperfluorooctanesulfonamide (nonionic surfactant) is preferably used, and methyl nonafluorobutyl ether or ethyl nonafluorobutyl ether is preferably used as the hydrofluoroether (A). is there.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
HFE (A) which is the main component of the solvent composition of the present invention is not particularly limited, but some or all of hydrogen atoms of ether, preferably aliphatic ether having 4 to 8 carbon atoms, are substituted with fluorine. Is.
When the carbon number is less than 2, the boiling point becomes too low and the HFE transpiration loss increases. When the carbon number is more than 8, the boiling point becomes too high, and the solvent composition for removing this adhering water from the article to be cleaned is removed. There is a tendency for energy consumption to be removed to increase. Further, from the viewpoint of flammability, a compound in which a majority of hydrogen atoms are substituted with fluorine atoms is preferred.
[0008]
Examples of such HFE include tetrafluoroethyl heptafluoropropyl ether, trifluoroethyl tetrafluoroethyl ether, methyl hexafluoropropyl ether, methyl nonafluorobutyl ether, and ethyl nonafluorobutyl ether.
Among the HFE, alkyl perfluoroalkyl ethers (C m H 2m + 1 OC n F 2n + 1) are preferred, especially methyl nonafluorobutyl ether (MNFBE) and, boiling point, such as ethyl nonafluorobutyl ether (ENFBE) An alkyl perfluoroalkyl ether having a temperature of 30 to 80 ° C. or lower is an HFE suitable for the present invention because it can reduce energy consumption for evaporation and removal. The above-mentioned HFE can be used alone or in combination.
[0009]
When adding a surfactant to HFE and using it as a solvent composition for removing adhering water, it is necessary to add an organic solvent to supplement the solubility of HFE alone in the surfactant and to further improve the adhering water removing effect. Although effective, such an organic solvent that is mixed with HFE and dissolves the surfactant is compatible with HFE, and if it is compatible with water, it is extracted by the mixed water and causes a composition change. It is necessary to have no compatibility with water because of the danger. From these points, it was found that 1,2-dichloroethylene is particularly effective for the solvent composition for removing adhering water of the present invention.
[0010]
As 1,2-dichloroethylene (B), either trans-1,2-dichloroethylene or cis-1,2-dichloroethylene can be used, or a mixture of both may be used.
[0011]
The content of 1,2-dichloroethylene (B) is preferably 1% by weight to 50% by weight, particularly preferably 10% by weight to 40% by weight, based on the total amount of HFE (A) and 1,2-dichloroethylene (B). . If the blending amount of 1,2-dichloroethylene is small, the effect of improving the solubility of HFE in the surfactant is small, so that the effect of removing adhering water cannot be improved. This is not preferable because physical properties may be impaired.
[0012]
The surfactant to be blended with the HFE and 1,2-dichloroethylene of the present invention includes the following general formula R 1 m NR 2 n Cl
(Wherein, m = 2 or 3, n = 1 or 2, m + n = 4, R 1 is C 6 - alkyl group of 18, R 2 represents an alkyl group of C 1-2) represented by Surfactants, ie quaternary ammonium salt cationic surfactants where the cationic moiety is [R 1 m NR 2 n ] + and the anionic moiety is [Cl] or N-propyl-N-polyethoxyperfluorooctane Sulfonamide (nonionic surfactant) is used.
[0013]
The content of the surfactant (C) is 0.01% to 10% by weight, particularly 0.1% to 5% by weight, based on the mixture of HFE (A) and 1,2-dichloroethylene (B). Is preferred. If the amount of the surfactant is small, the effect of removing adhering water is reduced. If the amount is too large, the surfactant is not sufficiently rinsed.
[0014]
In addition, nitroalkanes, epoxides, furans, benzotriazoles, phenols, amines and the like can be added as stabilizers to the solvent composition for adhesion removal.
[0015]
Furthermore, organic liquids such as hydrocarbons, alcohols, ketones, ethers and esters can be mixed in order to improve the ability to remove adhering water and improve the solubility of the surfactant.
[0016]
In order to remove water adhering to an article using the solvent composition of the present invention, the most common method is to immerse in a composition for removing adhering water in a boiling state. Other methods such as rocking can also be used. The surfactant adhering to the object to be cleaned after removing water can be rinsed off with HFE or a mixed solution of HFE and dichloroethylene.
[0017]
【Example】
[Example 1]
Methyl nonafluorobutyl ether and cis-1,2-dichloroethylene are blended at 60 wt% and 40 wt%, respectively, and N-propyl-N-polyethoxyperfluorooctanesulfonamide (trade name) is used as a nonionic surfactant. Ftop EF-122B, manufactured by Mitsubishi Materials) was mixed at 0.5% by weight with respect to the mixture to prepare a solvent composition for removing adhering water.
3 ml of pure water was placed in a 25 ml graduated cylinder, and glass beads having a diameter of 0.4 mm were placed up to a marked line of 8 mm. Next, the above adhering water removing solvent composition was poured up to the 25 ml mark of a graduated cylinder containing glass beads, and the amount of water floating on the top of the solution was measured immediately after injection and 5 minutes later. Further, the water removal rate was determined.
The results are shown in Table 1.
Adherent water removal rate = (amount of water floating up to 5 minutes later / amount of pure water (3 ml)) × 100
[0018]
[Example 2]
In Example 1, instead of a nonionic surfactant, 0.5 wt. Of a cationic surfactant, # 621 (structural formula; (C 12 H 25 ) 2 N (CH 3 ) 2 Cl) is used as the surfactant. The adhering water removal rate was determined in the same manner as in Example 1 except that the adhering water removing solvent was used as a solvent for removing adhering water. The results are shown in Table 1.
[0019]
[Comparative Example 1]
Adhering in the same manner as in Example 1, except that the surfactant was not added in Examples 1 and 2, and a mixed liquid consisting only of methyl nonafluorobutyl ether and cis-1,2-dichloroethylene was used as a solvent for removing adhering water. The water removal rate was determined. The results are shown in Table 1.
[0020]
[Comparative Example 2]
A mixture of cis-1,2-dichloroethylene, tetrafluoroethyl heptafluoropropyl ether as HFE, and the same nonionic surfactant as used in Example 1 was used as a solvent for removing adhering water. It was. However, in a solvent not containing 1,2-dichloroethylene, the solubility of the surfactant is small and it cannot be added in a large amount, so the addition amount of the surfactant was set to 0.1% by weight (vs. HFE). Using this adhesion water removal solvent, the adhesion water removal rate was determined in the same manner as in the example. The results are shown in Table 1.
[0021]
[Table 1]
Figure 0004104715
MNFBE: methyl nonafluorobutyl ether TFEHFPE: tetrafluoroethyl heptafluoropropyl ether nonionic activator: N-propyl-N-polyethoxyperfluorooctanesulfonamide cationic activator: (C 12 H 25 ) 2 N (CH 3 ) 2 Cl
[0022]
As is apparent from Table 1, the solvent composition of the present invention containing HFE (A), 1,2-dichloroethylene (B) and surfactant (C) as essential components has a high adhesion water removal rate, particularly at the interface. A solvent composition using a cationic surfactant represented by R 1 m NR 2 n Cl as the activator (C) is an excellent solvent for removing adhering water that can almost completely remove adhering water.
On the other hand, the solvent consisting only of HFE and 1,2-dichloroethylene has a removal rate of adhering water of 0%, and it is impossible to remove adhering water from the object to be cleaned. In addition, when only the surfactant is added to the HFE, a sufficient amount of the surfactant cannot be added, and therefore, it cannot be said that the adhesion water removal rate is low and the performance is sufficient.
[0023]
【The invention's effect】
The solvent composition of the present invention consisting of HFE, 1,2-dichloroethylene and a surfactant has a high adhesion water removal rate and can easily remove the cleaning liquid itself. In the drying process after washing the optical parts with water, the water that remains attached is replaced with a solvent without heating the object to be washed at a high temperature, so that the product can be dried in a short time and free from stains.
Moreover, since no chlorofluorocarbon is used, there is no fear of ozone layer destruction, and cleaning can be performed by the same method of use as conventionally used chlorofluorocarbon-based cleaning agents.

Claims (3)

ハイドロフルオロエーテル(A)に1,2−ジクロロエチレン(B)及び下記一般式
R 1 m NR 2 n Cl
(式中、m=2または3、n=1または2、m+n=4であり、R 1 はC 6 18 のアルキル基、R はC 1−2 のアルキル基を表す)で表されるカチオン界面活性剤および、N−プロピル−N−ポリエトキシパーフルオロオクタンスルホンアミドから選ばれた界面活性剤(C)を混合してなる付着水除去用溶剤組成物。
Hydrofluoroether (A) with 1,2-dichloroethylene (B) and the following general formula
R 1 m NR 2 n Cl
(Wherein, m = 2 or 3, n = 1 or 2, m + n = 4, R 1 is C 6 - alkyl group of 18, R 2 represents an alkyl group of C 1-2) represented by A solvent composition for removing adhering water obtained by mixing a cationic surfactant and a surfactant (C) selected from N-propyl-N-polyethoxyperfluorooctanesulfonamide .
ハイドロフルオロエーテル(A)がアルキルパーフルオロアルキルエーテルである請求項1記載の付着水除去用溶剤組成物。  The solvent composition for removing attached water according to claim 1, wherein the hydrofluoroether (A) is an alkylperfluoroalkylether. アルキルパーフルオロアルキルエーテルが、メチルノナフルオロブチルエーテルまたはエチルノナフルオロブチルエーテルもしくは両者の混合物である請求項2記載の付着水除去用溶剤組成物。  The solvent composition for removing attached water according to claim 2, wherein the alkyl perfluoroalkyl ether is methyl nonafluorobutyl ether or ethyl nonafluorobutyl ether or a mixture of both.
JP1296798A 1998-01-26 1998-01-26 Solvent composition for removing adhering water Expired - Fee Related JP4104715B2 (en)

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US7524806B2 (en) 2005-07-07 2009-04-28 Arkema Inc. Trans-1, 2-dichloroethylene and hydrofluorocarbon or alkoxy perfluoroalkane compositions having elevated flash points
KR102446744B1 (en) * 2020-12-17 2022-09-26 위캠 주식회사 Cleaning composition and preparation method thereof
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