JP4103083B2 - Apparatus for measuring the minute flow rate of coolant in the thin wire cooling process after heat treatment - Google Patents

Description

  The present invention accurately manages the coolant supply amount of the coolant tank in the cooling process of the thin wire performed after the heat treatment in order to prevent the fusion phenomenon of the wire when processing an ultrafine wire such as a gold wire used for wire bonding. The present invention relates to a flow rate measuring device.

When processing ultra-fine wires such as gold wires used for wire bonding, a heat treatment (annealing) called intermediate annealing is performed in the middle of the processing process in order to remove processing strain generated by plastic wire drawing using a die. The spool is wound up and plastic drawing is performed again. However, if the thin wires are wound immediately after the heat treatment, a phenomenon in which the thin wires are fused to each other occurs, and the thin wires are stuck during the plastic drawing process and are not fed from the spool.
For this reason, in order to prevent the fusion phenomenon between the thin wires, the wire is cooled with a lubricating liquid or the like used in a plastic drawing apparatus before being wound on the spool after the heat treatment. Although there is no literature, as a cooling method for this wire, a cooling tank is installed between a heat treatment furnace (electric furnace, etc.) and a wire winder, and a fixed amount of cooling liquid (lubricating liquid, etc.) stored in this cooling tank In general, a method of immersing a wire through a roller is used.
The conventional cooling liquid supply control means is widely known, but has not been particularly found as a patent document at present.

  However, in this cooling method, the coolant was supplied by a metering pump, and the setting of the supply flow rate was accurately controlled by the stroke / range volume. However, due to the structure of the pump (valve / diaphragm), the wetted part Since a foreign matter such as bacteria was generated on the wire and a problem of adhering to the wire material occurred, the supply with the metering pump was stopped, and the tube in contact with the liquid was changed to the supply with a disposable tube pump. However, in the case of a tube pump, the flow rate setting mechanism is only the rotation speed, and it is difficult to set a very small flow rate due to variations in the tube installation tension on the roller section. In addition, there is a problem that even when the specified flow rate is not supplied due to an abnormal phenomenon such as loosening of the tube tension while the pump is operating, the abnormal phenomenon cannot be detected, and the wires are fused due to insufficient cooling.

  The present invention has been made to solve the above-described problems of the prior art, and a fixed amount of coolant (lubricant) accumulated in a cooling tank installed between a heat treatment furnace (such as an electric furnace) and a wire winding machine. In the method of cooling wire rods in which the wire rods are immersed in the liquid via a roller, a small amount of flow can be set quickly and accurately when the coolant is supplied to the cooling bath. It is an object of the present invention to provide a cooling liquid fine flow rate measuring device capable of always maintaining a liquid level at a constant level and maintaining the cleanliness of a supplied liquid.

In order to achieve the above object, the minute flow rate measuring apparatus for a coolant according to the present invention provides a coolant supply amount to the coolant tank in the ultrafine wire cooling process after the heat treatment and before the spool winding process. A fine flow rate measuring device for setting by measuring the weight of the overflow liquid of the overflow pipe, the overflow pipe installed in the cooling liquid tank, connected to the other end of the pipe, the discharge port is narrowed to a small diameter A tube receiving nozzle, and a weigher for measuring the weight of the overflow liquid dropped from the tube receiving nozzle. The weigher has a liquid reservoir for receiving the overflow liquid dropped from the tube receiving nozzle and has one end as a fulcrum. A weighing machine main body pivotally supported on the weighing machine main body, a balance weight attached to the weighing machine main body, a sensor for detecting a rotation operation of the weighing machine main body, and a sensor Is composed of a ON / OFF shielding plate, fine flow measuring device of the cooling liquid without a mechanism for measuring the weight of the overflow on the basis of an output signal of the sensor is to the subject matter.
The liquid reservoir of the weighing instrument body has a U-shaped cross section.

In the present invention, the reason why the discharge port of the tube receiving nozzle is narrowed is to prevent the air that causes foaming from being taken in as much as possible when the overflow liquid falls. That is, if air is taken in when the overflow liquid falls, it will foam and cause a decrease in weighing accuracy.
In addition, the installation structure of the weigher body for measuring the weight of the overflow liquid dropped from the tube receiving nozzle is not particularly limited, but in consideration of maintenance properties such as cleaning and workability during assembly. Further, it is possible to adopt a method in which the support shafts protruding on both side surfaces of the weighing instrument body are detachably fitted to the bearing recesses.
The weigher that measures the weight of the overflow liquid has a function that the overflow body dropped from the tube receiving nozzle accumulates in the liquid reservoir of the weigher body and becomes heavier than the balance weight attached to the weigher body. Rotating to the center, the rotational movement is detected by the sensor by the sensor ON / OFF shielding plate, the output signal of the sensor is taken into the control device such as a sequencer, and the weight of the overflow liquid is measured. ing.
In addition, the cross-sectional shape of the liquid reservoir part of the weighing instrument body is U-shaped so that the volume of the liquid reservoir part can be ensured even when bubbles are generated by the air taken in when the overflow liquid falls. It is.

  As described above, according to the apparatus of the present invention, since the weight of the overflow liquid in the cooling liquid tank is directly measured, the minute flow rate of the cooling liquid can be accurately measured, so that the cooling liquid is supplied to the cooling tank. It is possible to set a very small flow rate when supplying it quickly and accurately, improve the workability of setting the fine flow rate of the coolant, and accurately manage the supply amount during the operation of the equipment. The amount of cooling liquid can always be maintained at a constant level, and a tube pump can be used as means for supplying the cooling liquid to the cooling tank, so that the cleanliness of the supplied liquid can be maintained, such as a gold wire. There are excellent effects such as being able to greatly contribute to prevention of defects such as fusion of extra fine wires.

  FIG. 1 is a schematic diagram showing the overall configuration of an ultrafine wire processing apparatus to which the apparatus of the present invention is applied, FIG. 2 is a schematic diagram showing the overall configuration of an apparatus of an embodiment of the present invention in the above ultrafine wire processing apparatus, and FIG. FIG. 4 is a cross-sectional view showing the cross-sectional shape of the main body of the weighing machine. 1 is a minute flow rate measuring device for the coolant, 1-1 is the casing, Tube receiving nozzle, 1-3 is a weighing machine body, 1-4 is a bearing, 1-5 is a balance weight, 1-6 is a shielding plate for sensor ON / OFF, 1-7 is a photomicrosensor, 1-8 is an overflow Pipe, 1-9 is an overflow liquid tube, 10 is a wire rewinding machine, 11 is a heat treatment furnace (electric furnace), 12 is a cooling liquid tank, 13 is a wire winding machine, 14 is a tube pump, and 15 and 16 are tanks. is there.

In the ultrafine wire processing apparatus shown in FIG. 1, an ultrafine wire such as a gold wire is unwound from a wire unwinding machine 10 and introduced into a heat treatment furnace (electric furnace) 11, where a heat treatment (annealing) called intermediate annealing is performed. Then, it is guided to the cooling liquid tank 12, immersed in the cooling liquid by the immersion roll 12-1, and wound around the wire winding machine 13.
The apparatus of the present invention is for the purpose of managing the amount of cooling liquid in the cooling liquid tank 12 in the ultrafine wire processing apparatus, and the amount of cooling liquid supplied to the cooling liquid tank 12 is set to the overflow liquid in the cooling liquid tank. Is a fine flow rate measuring device for setting by measuring the weight of an overflow pipe 1-8, an overflow pipe 1-8 installed in the cooling liquid tank 12, connected to the other end of the pipe, and a discharge port The tube receiving nozzle 1-2 is narrowed down to a small diameter, and a weigher that measures the weight of the overflow liquid dropped from the tube receiving nozzle.

That is, the micro flow rate measuring device of the present invention is installed in the tube receiving nozzle 1-2 attached to the upper part of the casing 1-1 and inside the casing 1-1 as shown in FIG. It consists of a weighing unit main body 1-3, a balance weight 1-5, a sensor ON / OFF shielding plate 1-6, and a photomicrosensor 1-7.
As shown in a sectional view of FIG. 3, the tube receiving nozzle 1-2 is composed of a pipe whose discharge port is narrowed down. As described above, this is to prevent air that causes foaming from being taken in as much as possible when the overflow liquid falls. That is, in the case of a nozzle whose discharge port is narrowed, the volume of the overflow liquid rapidly expands before and after passing through the front end of the discharge port, thus preventing air from being entrained and foaming. Because you can. Therefore, the tube receiving nozzle 1-2 is not limited to one in which the tip of one pipe is squeezed to form the discharge port 1-2a as shown in the drawing, and is configured by combining a plurality of pipes having different diameters. In addition, not only circular pipes but also rectangular pipes such as rectangles and polygons may be used. The tube receiving nozzle 1-2 and the overflow pipe 1-8 are connected by an overflow liquid tube 1-9.

The weigher main body 1-3 that receives the overflow liquid falling from the tube receiving nozzle 1-2 has a liquid reservoir 1-3a having a U-shaped cross section as shown in FIG. The balance weight 1-5 is attached to the bearing 1-4 and is supported by the bearing 1-4 so as to be rotatable in the vertical direction via fulcrum shafts 1-3b projecting on both side surfaces. Although the volume of the liquid reservoir 1-3a is determined by the flow rate to be weighed, it is usually about 5 ml pumped up at the horizontal position.
The support structure for the weighing unit 1-3 is formed on a pair of support bearings 1-4 installed in the casing 1-1 in consideration of maintainability such as cleaning and workability during assembly. A method is employed in which the fulcrum shaft 1-3b is detachably fitted to the recess 1-4a. A sensor ON / OFF shielding plate 1-6 is attached to the upper portion of the weighing device main body 1-3, and a photomicrosensor 1-7 is installed in the casing 1-1 at a position corresponding to the shielding plate. .
That is, when the overflow liquid dropped from the tube receiving nozzle 1-2 is accumulated in the liquid reservoir 1-3a of the weigher body 1-3 and becomes heavier than the balance weight 1-5 attached to the weigher body, the weigher body Is rotated around the fulcrum shaft 1-3b, and its rotation is detected by the photomicro sensor 1-7 by the sensor ON / OFF shielding plate 1-6, and the output signal of the sensor is controlled by a control device such as a sequencer ( For example, the weight of the overflow liquid is measured according to how many times it is operated per minute.
The balance weight 1-5 is used for fine adjustment of the liquid filling amount in the liquid reservoir 1-3a of the weighing unit main body 1-3 and the ON / OFF shielding plate 1-6 for the photomicrosensor 1-7 at the origin position. Have a role to return to.

Next, the operation of the fine flow rate measuring device will be described.
The overflow liquid when the cooling liquid is supplied to the cooling liquid tank 12 by the tube pump 14 flows into the overflow pipe 1-8 installed in the cooling liquid tank 12, and passes through the overflow liquid tube 1-9. To the tube receiving nozzle 1-2. The overflow liquid dropped from the tube receiving nozzle 1-2 is accumulated in the liquid reservoir 1-3a of the weigher body 1-3, and when the amount accumulated here becomes heavier than the balance weight 1-5, the weigher body 1 -3 rotates around the fulcrum shaft 1-3b, the rotating operation of the photomicrosensor 1-7 by the sensor ON / OFF shielding plate 1-6 that rotates integrally with the weighing instrument body 1-3. A signal is output, the output signal is taken into a control device such as a sequencer (not shown), the number of operations is counted, and the weight of the overflow liquid is measured.
When the weight of the overflow liquid is measured in this way, the flow rate to be supplied to the cooling liquid tank 12 is set based on the measured value, and the set flow rate is supplied to the cooling liquid tank 12 by the tube pump 14. .

  The apparatus of the present invention can be used for fine flow rate measurement corresponding to a process in which liquid cleanliness is required, such as a cooling liquid or a coating liquid after an intermediate heat treatment of an ultrafine wire such as a gold wire used for wire bonding.

It is the schematic which shows the whole structure of the ultra fine wire processing apparatus to which this invention apparatus is applied. It is the schematic which shows the whole structure of the one Example apparatus of this invention in an ultra fine wire processing apparatus same as the above. It is sectional drawing which shows the tube receiving nozzle of this invention apparatus same as the above. It is sectional drawing which similarly shows the cross-sectional shape of a weighing machine main body.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cooling liquid minute flow measuring device 1-1 Casing 1-2 Tube receiving nozzle 1-3 Weigher main body 1-4 Bearing 1-5 Balance weight 1-6 Sensor ON / OFF shielding plate 1-7 Photomicrosensor 1 -8 Overflow pipe 1-9 Overflow liquid tube 10 Wire material unwinding machine 11 Heat treatment furnace (electric furnace)
12 Coolant Tank 13 Wire Winder 14 Tube Pump 15, 16 Tank

Claims (2)

  A fine flow rate measuring device for setting the amount of coolant supplied to the coolant tank in the ultrafine wire cooling process after the heat treatment and before the spool winding process by measuring the weight of the overflow liquid in the coolant tank. , An overflow pipe installed in the cooling liquid tank, a tube receiving nozzle connected to the other end of the pipe and whose discharge port is narrowed, and a weighing instrument for measuring the weight of the overflow liquid dropped from the tube receiving nozzle The weigher has a reservoir for receiving the overflow liquid dropped from the tube receiving nozzle, and is supported by the weigher body pivoted in the vertical direction with one end as a fulcrum. Consists of an attached balance weight, a sensor for detecting the operation of the weighing instrument body, and a sensor ON / OFF shielding plate, based on the output signal of the sensor Characterized in that without a mechanism for measuring the weight of the overflow solution, the fine flow measuring device of the cooling liquid in the fine wire cooling step after the heat treatment.   The apparatus for measuring a minute flow rate of a cooling liquid in an ultrafine wire cooling step after heat treatment according to claim 1, wherein the liquid reservoir portion of the weigher body has a U-shaped cross section.

Images