JP4099937B2 - Laser processing apparatus and method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an apparatus and a method for laser processing a surface of a thin sheet used for a multilayer substrate of an electronic device.
[0002]
[Prior art]
4 and 5 are apparatuses for accurately laser processing the surface of a thin and large sheet body during laser processing. The laser processing apparatus includes a gripping unit 2 that grips the sheet body 1, a tension device 3 that applies a tensile force to the sheet body 1, and a flatness holding unit 4 that maintains the flatness of the processing region 10 of the sheet body 1. A laser irradiation device 5 for processing the processing region 10, a moving device 6 for moving the sheet body 1 relative to the laser irradiation device 5 and the flatness holding means 4 so that the processing region 10 can be sequentially laser processed, A cylindrical body 7 disposed between the laser irradiation device 5 and the sheet body 1 and surrounding the processing region 10, and a dust collector 8 for sucking in smoke and dust generated when the sheet body 1 is processed are provided. .
[0003]
Here, in order to avoid interference between the flatness holding means 4 and the gripping means 2, the flatness holding means 4 is provided with a positioning means 9 for moving and positioning the flatness holding means 4 in the thickness direction of the sheet body 1. The positioning means 9 is provided in the cylinder body 7. When processing the vicinity of the gripping means 2 of the sheet body 1, the flatness holding means 4 is moved away from the sheet body 1 to avoid interference with the gripping means 2. As shown in FIG. 5, the dust collector 8 is provided in the cylindrical body 7 in a direction rotated 90 degrees with the flatness holding means 4.
[0004]
[Problems to be solved by the invention]
However, in the conventional processing apparatus, the flatness holding means of the dust collector is in the vicinity of the processing area, and the flow of air generated from the dust collector becomes obstructed by the flatness holding means and disturbs the flow. There was a problem that the dust generated in this way remained.
[0005]
In addition, when the flatness holding member means is moved to avoid interference with the gripping means, there is a problem that the dust flow path is obstructed and the dust remains.
[0006]
The present invention was devised in view of the above-mentioned problems of the prior art, and the object of the present invention is to smoothly flow the air without disturbing the air flow inside the cylinder surrounding the processing area. It is to prevent dust from remaining on the body.
[0007]
[Means for Solving the Problems]
The laser processing apparatus of the present invention comprises a processing means for laser processing a rectangular workpiece, a gripping means for gripping the workpiece, and the entire periphery of a rectangular processing area set for the workpiece. A rectangular cylinder provided in a surrounding manner, dust collecting means provided with a suction port on one surface of the cylinder toward the machining area of the workpiece, and a surrounding area of the machining area of the workpiece A flatness holding means for holding the portion and maintaining the flatness of the processing region, and the cylindrical body is provided with a gap in the thickness direction of the workpiece and the workpiece. The degree holding means is provided between the dust collecting means on the surface of the cylindrical body where the suction port of the dust collecting means is provided and the workpiece, and a gap is provided between the exhaust port and the sheet body. There is no obstacle, and there is no obstacle to the flow of the exhaust air, and it is efficiently processed without disturbing the air. It can be dust-collecting the P caused dust.
[0008]
The laser processing apparatus according to the present invention further includes a moving unit that relatively moves the flatness holding unit and the workpiece, and interference between the flatness holding unit and the holding unit that is generated by the movement of the moving unit. Interference avoiding means for moving the flatness holding means in a direction away from the workpiece , the flatness holding means is provided at an upper end of the flatness holding means moved by the interference avoiding means. but the current is the lower position the lower end arrangement of dust means, when processing an end portion of the sheet body, because although the flatness holding means retracted from the sheet material does not substantially change the shape of the exhaust port, the air The flow of air does not change, and stable dust collection is possible for the entire area of the sheet.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
A laser processing apparatus according to a first embodiment of the present invention will be described below with reference to the drawings.
[0010]
FIG. 1 shows a laser processing apparatus according to the present invention, and FIG. 2 shows a plan view in the vicinity of the processing region. The basic configuration of the laser processing apparatus of the present invention is the same as that of the conventional one described above, but the relationship between the flatness holding means and the dust collecting apparatus, which will be described later, is different from the dust collecting means of the conventional laser processing machine. This is a characteristic part of the dust collecting means of the laser beam machine. Hereinafter, each component will be described in detail.
[0011]
A moving device 12 provided with a pulling device 11 is installed on a base 28 constituting a dust collecting device of the sheet laser processing machine. The moving device 12 includes a Y table 12-1 that slides in the Y direction by a driving device among X and Y directions orthogonal to each other on a plane, and an X that is installed on the Y table and slides in the X direction by the driving device. A table 12-2 is provided.
[0012]
The pulling device 11 installed on the X table 12-2 includes a fixed gripping means 13-1 and an operating gripping means 13-2 that extend in the Y direction and are arranged to face each other. Have. In a region sandwiched between the gripping means 13-1 and the gripping means 13-2, a sheet body 14 that is a rectangular workpiece to be laser processed is disposed. In the sheet body 14 arranged in this way, for example, the respective side edge portions parallel to the Y direction are gripped by the gripping means 13-1 and the gripping means 13-2, and the sheet body 14 is pulled in the X direction. . That is, the movable gripping means 13-2 is mounted on the X table 12-2 so as to be movable in the X direction, and the X direction side edge of the X table 12-2 and the gripping means are connected to each other. It is always urged toward the end edge by the tension device 11 provided therebetween. Therefore, when the sheet body 14 is gripped by the gripping means and the gripping means, the sheet body 14 is pulled in the X direction by the tensile force acting on the movable gripping means 13-2, and the tensile force is given. Note that the gripping means 13 can release the gripping of the sheet body 14 as necessary, for example, after the laser processing on the sheet body 14 is completed.
[0013]
The laser processing means 15, which is a processing means, irradiates the sheet body 14 installed as described above with laser light from its thickness direction. The laser light generating device 16, the mirror 17, and the lens 18. Is provided. The laser beam generator 16 is installed on a frame 19 standing on the base 28, and the laser beam emitted from the laser beam generator 16 is deflected to the sheet body 14 by the mirror 17, and then the sheet body 14. The lens 18 is focused so as to focus on the processed surface, and the processed surface is irradiated.
[0014]
The flatness holding means 20 includes a holding member 21 that holds a part of the periphery of the processing area processed by the laser beam in the sheet body 14 by an adsorption operation, and a suction that is connected to the holding member 21 and performs the adsorption operation. Device 22. The holding member 21 of the flatness holding means 20 is supported on the sheet body 14 by the interference avoiding means 23 in order to avoid interference with the gripping means 13 when the edge of the sheet body 14 is processed. It is possible to move in the thickness direction.
[0015]
The dust collector 24, which is a characteristic component in the present embodiment, is provided in a cylindrical body 25 that surrounds the periphery of the processing area disposed between the lens 18 and the sheet body 14 together with the interference avoiding means 23. ing. A suction port 27 that communicates with the suction device 26 is provided on a side surface of the cylindrical body 25. The suction port 27 is located on the sheet body 14 with respect to the sheet body 14 so as not to change the processing shape of the sheet body 14. A gap is provided in the thickness direction. The flatness holding means 20 is provided in this gap.
[0016]
As shown in FIG. 1, the shape of the holding member 21 is 30 degrees with respect to the sheet body 14. In order to prevent the holding member 21 from interfering with the gripping means 13, the moving means 12 prevents the holding member 21 from blocking the inner diameter of the connecting portion between the suction port 27 and the suction device 26 even when the holding means 21 is moved by the moving means 12. And the shape of the suction port 27 are set. In the present embodiment, when the holding member 21 moves to the uppermost position, the upper surface of the holding member 21 is made the same as the lower surface of the suction port 27.
[0017]
Although not shown, it is also possible to make it difficult for the suction device 26 to raise the dust by assisting the flow so that a predetermined air flow field is obtained.
[0018]
As described above, only the holding member 21 of the flatness holding means 20 is brought into contact with the sheet body 14, the sheet body 14 is held by the suction operation, and the flatness is held with respect to the sheet body 14 while maintaining this holding state. The moving device 12 is driven so that the means 20 moves relatively. Thus, while maintaining the suction operation can be pressurized Engineering and because it has a holding member 21 of the flatness holding means 20 in the gap of the suction port 27 and the sheet member 14, air from outside Therefore, the outer shape of the flatness holding member 20 serves as a direction plate for air flowing into the suction port 27, and efficient dust collection is possible without leaving dust on the sheet body 14. Further, even when the flatness holding means 20 is moved by the moving means 12 during the processing of the edge of the sheet body 14, the air flow hardly changes and stable dust collection can be performed.
[0019]
In the present embodiment, as the sheet body, a resin thin sheet body used for a multilayer substrate or the like of an electric device is taken as an example. However, the material is not limited as long as it is a thin sheet body.
[0020]
【The invention's effect】
As described above, according to the present invention, the dust collecting means provided with the suction port toward the processing area of the workpiece, and a plane that maintains a part of the periphery of the processing area of the workpiece and maintains flatness. Degree holding means, and providing the flatness holding means between the dust collecting means and the workpiece, there is no gap between the exhaust port and the sheet body and the flow of the exhaust air Eliminates obstacles and efficiently collects dust generated during processing without disturbing the air.
[Brief description of the drawings]
FIG. 1 is a side view showing a configuration of a dust collector of a laser beam machine according to an embodiment of the present invention. FIG. 2 is a plan view showing a configuration of a dust collector of the laser beam machine according to an embodiment of the present invention. 3 is a perspective view showing the configuration of a dust collector of a laser beam machine according to an embodiment of the present invention. FIG. 4 is a side view showing the configuration of a dust collector of a laser beam machine according to the prior art. Partial plan view showing the dust collector of the laser beam machine related to the technology 【Explanation of symbols】
12 Moving device 14 Sheet body 15 Laser processing means 20 Flatness holding means 23 Interference avoiding means 24 Dust collector 27 Suction port

Claims (2)

A processing means for laser processing a rectangular workpiece, a gripping means for gripping the workpiece, and a rectangular shape provided to surround the entire periphery of a rectangular processing area set on the workpiece. A cylindrical body, dust collection means provided with a suction port on one surface of the cylindrical body toward the processing area of the workpiece, and a part of the periphery of the processing area of the workpiece are held, and the processing Flatness holding means for maintaining the flatness of the region, the cylinder is provided with a gap in the thickness direction of the workpiece and the workpiece, and the flatness holding means is the cylinder A laser processing apparatus, which is provided between the dust collecting means on the surface of the body on which the suction port of the dust collecting means is provided and the workpiece. The flatness holding means for avoiding the interference between the flatness holding means and the gripping means generated by the movement by the moving means, the moving means for relatively moving the flatness holding means and the workpiece. Interference avoiding means for moving the means away from the workpiece, and the flatness holding means has an upper end of the flatness holding means moved by the interference avoiding means from a lower end of the dust collecting means. The laser processing apparatus according to claim 1 , wherein the laser processing apparatus has a low position.

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