JP2002283089A - Adsorptive table and laser beam machining device - Google Patents
Adsorptive table and laser beam machining deviceInfo
- Publication number
- JP2002283089A JP2002283089A JP2001084442A JP2001084442A JP2002283089A JP 2002283089 A JP2002283089 A JP 2002283089A JP 2001084442 A JP2001084442 A JP 2001084442A JP 2001084442 A JP2001084442 A JP 2001084442A JP 2002283089 A JP2002283089 A JP 2002283089A
- Authority
- JP
- Japan
- Prior art keywords
- main surface
- opening
- holes
- suction
- support plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000003754 machining Methods 0.000 title abstract 2
- 230000000274 adsorptive effect Effects 0.000 title 1
- 239000000428 dust Substances 0.000 claims abstract description 15
- 239000000463 material Substances 0.000 claims description 13
- 230000003287 optical effect Effects 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
- 238000005452 bending Methods 0.000 description 5
- 239000011888 foil Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
Landscapes
- Auxiliary Devices For Machine Tools (AREA)
- Jigs For Machine Tools (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、吸着テーブル及び
レーザ加工装置に関し、特に薄い板状の加工対象物にレ
ーザビームを入射させて加工を行う際に、加工対象物を
保持するのに適した吸着テーブル及びそれを用いたレー
ザ加工装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a suction table and a laser processing apparatus, and more particularly to a suction table and a laser processing apparatus, which are suitable for holding a processing object when a thin plate-shaped processing object is irradiated with a laser beam for processing. The present invention relates to a suction table and a laser processing apparatus using the same.
【０００２】[0002]
【従来の技術】特開平９−１１７８３６号公報に、ハニ
カムコアを使用したレーザ加工用の吸着テーブルが開示
されている。特開平９−１１７８３６号公報に開示され
た吸着テーブルは、ハニカムコアの少なくとも一方の面
を、多数の穴の開いた剛性のシートで覆って構成され
る。ハニカムコアの一方の面に被吸着物を載置し、他方
の面からハニカムコアのセル内を真空吸引することによ
り、被吸着物が固定される。このような構成とすること
により、軽量でかつ高剛性の吸着テーブルが提供され
る。2. Description of the Related Art Japanese Patent Application Laid-Open No. 9-117336 discloses a suction table using a honeycomb core for laser processing. The suction table disclosed in Japanese Patent Application Laid-Open No. 9-117836 is configured by covering at least one surface of a honeycomb core with a rigid sheet having a large number of holes. The object to be adsorbed is placed on one surface of the honeycomb core, and the inside of the cell of the honeycomb core is evacuated from the other surface to fix the object to be adsorbed. With such a configuration, a lightweight and highly rigid suction table is provided.
【０００３】[0003]
【発明が解決しようとする課題】レーザ加工によってグ
リーンシート（焼結前のセラミックのシート）に穴あけ
を行う際に、ハニカムコアの一方の面上にグリーンシー
トを吸着して固定する。穴開けにより発生したダスト
は、ハニカムコアのセルを通って集塵機に回収される。When drilling a green sheet (ceramic sheet before sintering) by laser processing, the green sheet is adsorbed and fixed on one surface of the honeycomb core. Dust generated by the perforation is collected by a dust collector through cells of the honeycomb core.
【０００４】グリーンシートを真空吸着すると、グリー
ンシートの両面に約１０ｋＰａ程度の圧力差が生じる。
グリーンシートは、焼結前であるため剛性が低い。この
ため、ハニカムコアのセル（空孔）部においてたわみが
生ずる。グリーンシートがたわむと、レーザビームの焦
点ぼけが生じ、高精度の加工を行うことができなくな
る。When a green sheet is vacuum-adsorbed, a pressure difference of about 10 kPa is generated between both sides of the green sheet.
The green sheet has low rigidity before sintering. For this reason, deflection occurs in the cells (voids) of the honeycomb core. When the green sheet bends, the laser beam becomes out of focus, and high-precision processing cannot be performed.
【０００５】ハニカムコアのセルの各々を小さくするこ
とにより、グリーンシートのたわみを少なくすることが
できる。レーザビームの焦点ぼけが生じない程度までた
わみ量を少なくするためには、各セルの大きさを１ｍｍ
程度まで小さくしなければならない。ところが、ハニカ
ムコアの一方の面を覆う高剛性の穴あきシートに、１ｍ
ｍ程度の小さな各セルに対応する穴を形成すると、シー
ト自体の剛性が低下してしまう。By reducing the size of each cell of the honeycomb core, the deflection of the green sheet can be reduced. In order to reduce the amount of deflection to the extent that laser beam defocus does not occur, the size of each cell must be 1 mm.
Must be as small as possible. However, a high-rigidity perforated sheet that covers one surface of the honeycomb core has a length of 1 m.
When holes corresponding to each cell as small as about m are formed, the rigidity of the sheet itself is reduced.
【０００６】また、シートに形成する穴を大きくする
と、穴の形成されていない領域に位置するセルを通して
真空吸引することができなくなる。真空吸引されないセ
ルが存在すると、その部分で発生したダストが真空吸引
されず加工部近傍に滞留する。Further, if the hole formed in the sheet is enlarged, it becomes impossible to perform vacuum suction through a cell located in a region where no hole is formed. If there is a cell that is not vacuum-sucked, the dust generated in that part is not vacuum-sucked and stays near the processed part.
【０００７】本発明の目的は、高い剛性を有し、かつ加
工時に発生するダストを効率的に回収することが可能な
吸着テーブル及びレーザ加工装置を提供することであ
る。An object of the present invention is to provide a suction table and a laser processing apparatus having high rigidity and capable of efficiently collecting dust generated during processing.
【０００８】[0008]
【課題を解決するための手段】本発明の一観点による
と、ガスを吸引する吸引孔が表面に開口している支持板
と、前記支持板の、前記吸引孔が開口する表面上に配置
された多孔性板材であって、該多孔性板材が、相互に平
行な第１の主面と第２の主面とを画定し、両主面間を連
通させる複数の空孔を有し、該空孔の各々が、該第１の
主面内に第１の開口部を有し、該第２の主面内に第２の
開口部を有し、相互に隣接する空孔同士が、前記第１の
主面と第２の主面との間隔よりも薄い隔壁で仕切られて
おり、前記第１の主面側を前記支持板に対向させ、複数
の空孔の各々の第１の開口部及び第２の開口部が第１の
方向に長い形状を有し、空孔の各々の第１の開口部が、
前記支持板の吸引孔の開口部と部分的に重なっている前
記多孔性板材とを有する吸着テーブルが提供される。According to one aspect of the present invention, there is provided a support plate having a suction hole for sucking gas open on a surface thereof, and a support plate provided on the surface of the support plate where the suction hole is open. A porous plate material, wherein the porous plate material defines a first main surface and a second main surface that are parallel to each other, and has a plurality of holes that communicate between the two main surfaces, Each of the holes has a first opening in the first main surface, has a second opening in the second main surface, and the mutually adjacent holes are The first main surface and the second main surface are separated by a partition wall thinner than the space between the first main surface and the second main surface, the first main surface side is opposed to the support plate, and the first opening of each of the plurality of holes is provided. And the second opening has a shape elongated in a first direction, and the first opening of each of the holes is:
There is provided a suction table having an opening of a suction hole of the support plate and the porous plate material partially overlapping.
【０００９】本発明の他の観点によると、ガスを吸引す
る吸引孔が第１の面に開口している支持板と、前記支持
板の、前記吸引孔が開口する表面上に配置された多孔性
板材であって、該多孔性板材が、相互に平行な第１の主
面と第２の主面とを画定し、両主面間を連通させる複数
の空孔を有し、該空孔の各々が、該第１の主面内に第１
の開口部を有し、該第２の主面内に第２の開口部を有
し、相互に隣接する空孔同士が、前記第１の主面と第２
の主面との間隔よりも薄い隔壁で仕切られており、前記
第１の主面側を前記支持板に対向させ、複数の空孔の各
々の第１の開口部が第１の方向に長い形状を有し、空孔
の各々の第１の開口部が、前記支持板の吸引孔の開口部
と部分的に重なっている前記多孔性板材と、前記吸引孔
を通してガスを吸引するとともに、吸引されたガス中に
含まれる塵を除く集塵機と、前記多孔性板材の第２の主
面上に吸着された加工対象物にレーザビームを入射させ
て該加工対象物の加工を行うレーザ光学系とを有するレ
ーザ加工装置が提供される。According to another aspect of the present invention, a support plate having a suction hole for sucking gas open on a first surface, and a porous plate disposed on a surface of the support plate where the suction hole opens. A porous plate material, the porous plate material defining a first main surface and a second main surface that are parallel to each other, and having a plurality of holes that communicate between the two main surfaces, Each have a first surface within the first major surface.
Having a second opening in the second main surface, and mutually adjacent vacancies are formed between the first main surface and the second main surface.
The first main surface side is opposed to the support plate, and a first opening of each of the plurality of holes is long in the first direction. A porous plate having a shape, wherein each first opening of the hole partially overlaps an opening of the suction hole of the support plate, and suctioning gas through the suction hole; A dust collector for removing dust contained in the gas, and a laser optical system for processing the processing object by irradiating a laser beam on the processing object adsorbed on the second main surface of the porous plate material. Is provided.
【００１０】第２の主面内に配置された第２の開口部
が、第１の方向に長い形状を有するため、その上に吸着
される加工対象物のたわみが、第２の開口部の幅方向の
大きさに影響される。第２の開口部を細くすることによ
り、加工対象物のたわみを抑制することができる。[0010] Since the second opening disposed in the second main surface has a shape elongated in the first direction, the bending of the workpiece to be sucked thereon is caused by the bending of the second opening. It is affected by the size in the width direction. By making the second opening narrow, it is possible to suppress the bending of the object to be processed.
【００１１】吸引孔に連続する第１の開口部も、第１の
方向に長い。従って、吸引孔を第１の方向に関して比較
的広い間隔で配置することができる。[0011] The first opening which continues to the suction hole is also long in the first direction. Therefore, the suction holes can be arranged at relatively wide intervals in the first direction.
【００１２】[0012]
【発明の実施の形態】図１（Ａ）に、本発明の実施例に
よるレーザ加工装置の概略図を示す。実施例によるレー
ザ加工装置は、レーザ光学系１０、吸着テーブル２０、
及び集塵機５０を含んで構成される。FIG. 1A is a schematic view of a laser processing apparatus according to an embodiment of the present invention. The laser processing apparatus according to the embodiment includes a laser optical system 10, a suction table 20,
And a dust collector 50.
【００１３】まず、レーザ光学系１０の構成について説
明する。レーザ光源１がパルスレーザビームを出射す
る。レーザ光源１は、例えば炭酸ガスレーザ発振器であ
り、その発振波長は約１０μｍである。レーザ光源１か
ら出射したパルスレーザビームが、リレーレンズ２、折
返しミラー３、マスク４、ガルバノミラー５、ｆθレン
ズ６を介して、吸着ステージ２０に保持された加工対象
物４０に入射する。First, the configuration of the laser optical system 10 will be described. The laser light source 1 emits a pulse laser beam. The laser light source 1 is, for example, a carbon dioxide laser oscillator, and its oscillation wavelength is about 10 μm. The pulse laser beam emitted from the laser light source 1 is incident on the processing target 40 held on the suction stage 20 via the relay lens 2, the folding mirror 3, the mask 4, the galvanometer mirror 5, and the fθ lens 6.
【００１４】マスク４は、レーザビームのビーム断面を
整形する。ガルバノミラー５は、レーザビームの進行方
向を２次元方向に振る。ｆθレンズ６は、レーザビーム
を加工対象物４０の表面上に集光させる。これにより、
レーザビームの集光点に穴が開く。The mask 4 shapes the beam cross section of the laser beam. The galvanometer mirror 5 changes the traveling direction of the laser beam in a two-dimensional direction. lens 6 focuses the laser beam on the surface of workpiece 40. This allows
A hole opens at the focal point of the laser beam.
【００１５】次に、吸着ステージ２０の構成について説
明する。ＸＹステージ２１の可動部にベースプレート２
１が取り付けられている。ＸＹステージ２１の可動部
は、ＸＹ面に平行な方向に移動することができる。ベー
スプレート２１の上に、中板２２、ハニカムコア２３が
この順番に載置されている。サイドガイド２４がハニカ
ムコア２３の側面に接し、そのＸＹ面内方向に関する位
置を拘束する。Next, the structure of the suction stage 20 will be described. The base plate 2 is mounted on the movable part of the XY stage 21
1 is attached. The movable part of the XY stage 21 can move in a direction parallel to the XY plane. An intermediate plate 22 and a honeycomb core 23 are placed on the base plate 21 in this order. The side guide 24 is in contact with the side surface of the honeycomb core 23, and restricts its position in the XY plane direction.
【００１６】サイドガイド２４の上に押さえ板２５が取
り付けられている。押さえ板２５は、ハニカムコア２３
の上面の縁近傍の領域に接し、そのＸＹ面に垂直な方向
に関する位置を拘束する。中板２２、サイドガイド２４
及び押さえ板２５は、ベースプレート２１に固定されて
いる。A holding plate 25 is mounted on the side guide 24. The holding plate 25 is made of the honeycomb core 23.
In contact with a region near the edge of the upper surface of the XY plane, and constrains its position in the direction perpendicular to the XY plane. Middle plate 22, side guide 24
The holding plate 25 is fixed to the base plate 21.
【００１７】図１（Ｂ）に、ベースプレート２１、中板
２２及びハニカムコア２３の分解斜視図を示す。ベース
プレート２１の上面の縁近傍を除く領域に、長方形状の
凹部２１ａが形成され、その底面に、ベースプレート２
１を貫通する複数の貫通孔２１ｂが形成されている。FIG. 1B is an exploded perspective view of the base plate 21, the middle plate 22, and the honeycomb core 23. A rectangular concave portion 21a is formed in a region other than the vicinity of the edge of the upper surface of the base plate 21.
A plurality of through holes 21b penetrating through 1 are formed.
【００１８】中板２２に、Ｘ軸に平行に配置された細長
い開口部を有し、中板２２を貫通する複数の吸引孔２２
ａが形成されている。中板２２をベースプレート２１の
上に配置した状態で、吸引孔２２ａの各々の内部空洞
が、凹部２１ａ内を経由して、貫通孔２１ｂ内の空洞に
連通する。中板２２の上にハニカムコア２３が配置され
る。The middle plate 22 has a plurality of suction holes 22 having an elongated opening arranged in parallel with the X-axis, and penetrating the middle plate 22.
a is formed. With the middle plate 22 placed on the base plate 21, each internal cavity of the suction hole 22a communicates with the cavity in the through hole 21b via the inside of the concave portion 21a. A honeycomb core 23 is arranged on the middle plate 22.
【００１９】図１（Ｃ）に、中板２２に形成された吸引
孔２２ａ及びハニカムコア２３の平面図を示す。ハニカ
ムコア２３は、その厚さ方向に平行に配置された金属箔
２３ａで構成されており、金属箔２３ａにより複数のセ
ル（空孔）２３ｂが画定されている。金属箔２３ａの厚
さは０．１ｍｍ以下である。セル２３ｂは、Ｘ軸方向及
びＹ軸方向に周期的に配列しており、セル２３ｂの各々
の形状は、Ｙ軸方向に長いほぼ六角形の形状を有する。
セル２３ｂの各々のＹ軸方向の長さＬは約１０ｍｍであ
り、Ｘ軸方向の幅Ｗは約１ｍｍである。ハニカムコア２
３の上面に、有効吸着領域２３ｄが画定されている。FIG. 1C is a plan view of the suction core 22a and the honeycomb core 23 formed in the middle plate 22. The honeycomb core 23 is composed of a metal foil 23a arranged in parallel in the thickness direction, and a plurality of cells (holes) 23b are defined by the metal foil 23a. The thickness of the metal foil 23a is 0.1 mm or less. The cells 23b are periodically arranged in the X-axis direction and the Y-axis direction, and each cell 23b has a substantially hexagonal shape long in the Y-axis direction.
Each of the cells 23b has a length L in the Y-axis direction of about 10 mm and a width W in the X-axis direction of about 1 mm. Honeycomb core 2
On the upper surface of No. 3, an effective suction area 23d is defined.
【００２０】Ｙ軸方向に隣接する複数のセル２３ｂによ
り、Ｘ軸方向に延在するジグザグの境界線２３ｃが画定
される。中板２２に形成された吸引孔２２ａは、１つお
きの境界線２３ｃに沿って配置されている。A plurality of cells 23b adjacent in the Y-axis direction define a zigzag boundary line 23c extending in the X-axis direction. The suction holes 22a formed in the middle plate 22 are arranged along every other boundary line 23c.
【００２１】有効吸着領域２３ｄ内のすべてのセル２３
ｂの各々は、各セル２３ｂの一部の領域において中板２
２の吸引孔２２ａの開口部の一部と重なっている。この
ため、有効吸着領域２３ｄ内のすべてのセル２３ｂ内の
空洞が、吸引孔２２ａ内の空洞に連通する。All cells 23 in the effective suction area 23d
b is the middle plate 2 in a part of each cell 23b.
The second suction hole 22a overlaps part of the opening. Therefore, the cavities in all the cells 23b in the effective suction area 23d communicate with the cavities in the suction holes 22a.
【００２２】図１（Ａ）に戻って説明を続ける。ベース
プレート２１に形成された貫通孔２１ａに、集塵機５０
の吸引ダクト５１が連結されている。吸引ダクト５１を
介して、ハニカムコア２３の各セル２３ｂ内のガスを吸
引することができる。これにより、ハニカムコア２３の
上面にグリーンシート等の加工対象物４１が吸着固定さ
れる。Returning to FIG. 1A, the description will be continued. A dust collector 50 is inserted into the through hole 21a formed in the base plate 21.
Are connected. The gas in each cell 23b of the honeycomb core 23 can be sucked through the suction duct 51. As a result, the processing target 41 such as a green sheet is fixed to the upper surface of the honeycomb core 23 by suction.
【００２３】レーザビームの照射によって加工対象物４
０に貫通孔が形成されると、加工時に発生したダスト
が、セル２３ｂ、吸引孔２２ａ、凹部２１ａ、貫通孔２
１ｂ、及び吸引ダクト５１を通って集塵機５０に回収さ
れる。有効吸着領域２３ｄ内のすべてのセル２３ｂ内を
吸引することができるため、発生したダストを効率的に
回収することができる。The workpiece 4 is irradiated with the laser beam.
When a through hole is formed in the hole 0, dust generated during processing is removed from the cell 23b, the suction hole 22a, the concave portion 21a, and the through hole 2.
1b, and is collected by the dust collector 50 through the suction duct 51. Since all the cells 23b in the effective suction area 23d can be sucked, the generated dust can be efficiently collected.
【００２４】各セル２３ｂのＹ軸方向の長さＬは長い
が、Ｘ軸方向の幅Ｗが狭いため、加工対象物４０の剛性
が低い場合であっても、加工対象物４０のたわみを抑制
することができる。The length L of each cell 23b in the Y-axis direction is long, but the width W in the X-axis direction is small. Therefore, even when the rigidity of the workpiece 40 is low, the bending of the workpiece 40 is suppressed. can do.
【００２５】中板２２に形成された複数の吸引孔２２ａ
の各々は、セル２３ｂと１：１に対応しているのではな
く、Ｘ軸方向に配列した複数のセル２３ｂ内の空洞と連
通している。このため、セル２３ｂのＸ軸方向の幅Ｗが
狭くても、吸引孔２２ａのＸ軸方向の長さを幅Ｗに比べ
て十分長くすることができる。多数の小さな孔を形成す
る場合に比べて、容易に吸引孔２２ａを形成することが
できる。A plurality of suction holes 22a formed in the middle plate 22
Are not in a one-to-one correspondence with the cells 23b, but communicate with cavities in a plurality of cells 23b arranged in the X-axis direction. For this reason, even if the width W of the cell 23b in the X-axis direction is small, the length of the suction hole 22a in the X-axis direction can be made sufficiently longer than the width W. The suction holes 22a can be formed more easily than when a large number of small holes are formed.
【００２６】また、各セル２３ｂのＹ軸方向の長さＬ
は、幅Ｗに比べて長い。このため、複数の吸引孔２２ａ
のＹ軸方向のピッチを、セルの長さＬに対応して長くす
ることができる。このため、中板２２の十分な機械的強
度を確保することができる。The length L of each cell 23b in the Y-axis direction is
Is longer than the width W. For this reason, the plurality of suction holes 22a
In the Y-axis direction can be increased corresponding to the cell length L. For this reason, sufficient mechanical strength of the middle plate 22 can be secured.
【００２７】グリーンシートの厚さは約２００μｍであ
る。このグリーンシートのたわみを抑制するためには、
図１（Ｃ）に示したセルの幅Ｗを１ｍｍ以下とすること
が好ましい。また、中板２２の十分な機械的強度を確保
するために、セルの長さＬを８ｍｍ以上とすることが好
ましい。なお、グリーンシートがより薄くなると、セル
の長さＬ及び幅Ｗの好適値も小さくなるが、一般的に、
長さＬを幅Ｗの５倍以上とすることが好ましい。The thickness of the green sheet is about 200 μm. To suppress the deflection of this green sheet,
It is preferable that the width W of the cell shown in FIG. 1C be 1 mm or less. Further, in order to secure sufficient mechanical strength of the middle plate 22, it is preferable that the length L of the cell is 8 mm or more. When the green sheet becomes thinner, the preferable values of the cell length L and the cell width W also become smaller.
Preferably, the length L is at least five times the width W.
【００２８】上記実施例では、ハニカムコア２３のセル
２３ｂがほぼ六角形である場合を示したが、この形状は
六角形に限らない。図１（Ｃ）のＹ軸方向に長い形状で
あれば、六角形以外の多角形等でもよい。In the above embodiment, the case where the cells 23b of the honeycomb core 23 are substantially hexagonal is shown, but this shape is not limited to hexagonal. A polygon other than a hexagon may be used as long as the shape is long in the Y-axis direction in FIG.
【００２９】また、ハニカムコアの代わりに、以下に示
す多孔性板材を用いてもよい。この多孔性板材は、相互
に平行な第１の主面と第２の主面とを画定している。第
１の主面が図１（Ｂ）等に示した中板２２に対向するよ
うに配置される。複数の空孔が、両主面間を連通させ
る。この空孔は、ハニカムコアのセルに相当する。空孔
の各々は、第１の主面内に第１の開口部を有し、第２の
主面内に第２の開口部を有する。相互に隣接する空孔同
士は、第１の主面と第２の主面との間隔よりも薄い隔壁
で仕切られている。複数の空孔の各々の第１の開口部及
び第２の開口部は、図１（Ｃ）におけるＹ軸方向に長い
形状を有し、吸引孔２２ａの開口部と部分的に重なって
いる。Further, instead of the honeycomb core, the following porous plate may be used. The porous plate defines a first main surface and a second main surface parallel to each other. The first main surface is arranged so as to face the middle plate 22 shown in FIG. A plurality of holes communicate between the two main surfaces. These holes correspond to cells of the honeycomb core. Each of the holes has a first opening in a first main surface and a second opening in a second main surface. The holes that are adjacent to each other are separated by a partition wall that is thinner than the distance between the first main surface and the second main surface. Each of the first and second openings of the plurality of holes has a shape elongated in the Y-axis direction in FIG. 1C, and partially overlaps with the opening of the suction hole 22a.
【００３０】このような多孔性板材を用いる場合にも、
上記実施例の場合と同様の効果が得られるであろう。When such a porous plate is used,
The same effects as in the above embodiment can be obtained.
【００３１】以上実施例に沿って本発明を説明したが、
本発明はこれらに制限されるものではない。例えば、種
々の変更、改良、組み合わせ等が可能なことは当業者に
自明であろう。The present invention has been described in connection with the preferred embodiments.
The present invention is not limited to these. For example, it will be apparent to those skilled in the art that various modifications, improvements, combinations, and the like can be made.
【００３２】[0032]
【発明の効果】以上説明したように、本発明によれば、
対象物を保持する面に配置される開口部を細長くするこ
とにより、すべての開口部を通してガスを吸引すると共
に、保持される材料のたわみを抑制することができる。As described above, according to the present invention,
By making the openings arranged on the surface holding the object elongated, gas can be sucked through all the openings and the bending of the held material can be suppressed.
【図１】本発明の実施例によるレーザ加工装置の概略
図、吸着ステージの分解斜視図及び平面図である。FIG. 1 is a schematic diagram of a laser processing apparatus according to an embodiment of the present invention, an exploded perspective view of a suction stage, and a plan view.
１ レーザ光源 ２ リレーレンズ ３ 折返しミラー ４ マスク ５ ガルバノミラー ６ ｆθレンズ １０ レーザ光学系 ２０ 吸着ステージ ２１ ベースプレート ２２ 中板 ２３ ハニカムコア ２４ サイドガード ２５ 押さえ板 ３０ ＸＹステージ ４０ 加工対象物 ５０ 集塵機 ５１ 吸引ダクト REFERENCE SIGNS LIST 1 laser light source 2 relay lens 3 folding mirror 4 mask 5 galvanometer mirror 6 fθ lens 10 laser optical system 20 suction stage 21 base plate 22 middle plate 23 honeycomb core 24 side guard 25 holding plate 30 XY stage 40 workpiece 50 dust collector 51 suction duct
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｂ２３Ｋ 101:40 Ｂ２３Ｋ 101:40 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) B23K 101: 40 B23K 101: 40
Claims (4)
いる支持板と、 前記支持板の、前記吸引孔が開口する表面上に配置され
た多孔性板材であって、該多孔性板材が、相互に平行な
第１の主面と第２の主面とを画定し、両主面間を連通さ
せる複数の空孔を有し、該空孔の各々が、該第１の主面
内に第１の開口部を有し、該第２の主面内に第２の開口
部を有し、相互に隣接する空孔同士が、前記第１の主面
と第２の主面との間隔よりも薄い隔壁で仕切られてお
り、前記第１の主面側を前記支持板に対向させ、複数の
空孔の各々の第１の開口部及び第２の開口部が第１の方
向に長い形状を有し、空孔の各々の第１の開口部が、前
記支持板の吸引孔の開口部と部分的に重なっている前記
多孔性板材とを有する吸着テーブル。1. A support plate having a suction hole for sucking gas open on a surface thereof, and a porous plate material disposed on a surface of the support plate where the suction hole is open, wherein the porous plate material is Defines a first main surface and a second main surface that are parallel to each other, and has a plurality of holes that allow communication between the two main surfaces, each of the holes being the first main surface. Having a first opening therein, having a second opening in the second main surface, and mutually adjacent vacancies are formed between the first main surface and the second main surface. The first main surface side is opposed to the support plate, and the first opening and the second opening of each of the plurality of holes are in the first direction. A suction plate having a long shape, and wherein the first opening of each of the holes has the porous plate material partially overlapping with the opening of the suction hole of the support plate.
と直交する第２の方向に長い形状を有し、第２の方向に
並んだ複数の空孔の第１の開口部と部分的に重なってい
る請求項１に記載の吸着テーブル。2. An opening of the suction hole has a shape elongated in a second direction perpendicular to the first direction, and a first opening of a plurality of holes arranged in the second direction. 2. The suction table according to claim 1, wherein the suction table partially overlaps.
請求項１または２に記載の吸着テーブル。3. The suction table according to claim 1, wherein the porous plate is a honeycomb core.
している支持板と、 前記支持板の、前記吸引孔が開口する表面上に配置され
た多孔性板材であって、該多孔性板材が、相互に平行な
第１の主面と第２の主面とを画定し、両主面間を連通さ
せる複数の空孔を有し、該空孔の各々が、該第１の主面
内に第１の開口部を有し、該第２の主面内に第２の開口
部を有し、相互に隣接する空孔同士が、前記第１の主面
と第２の主面との間隔よりも薄い隔壁で仕切られてお
り、前記第１の主面側を前記支持板に対向させ、複数の
空孔の各々の第１の開口部が第１の方向に長い形状を有
し、空孔の各々の第１の開口部が、前記支持板の吸引孔
の開口部と部分的に重なっている前記多孔性板材と、 前記吸引孔を通してガスを吸引するとともに、吸引され
たガス中に含まれる塵を除く集塵機と、 前記多孔性板材の第２の主面上に吸着された加工対象物
にレーザビームを入射させて該加工対象物の加工を行う
レーザ光学系とを有するレーザ加工装置。4. A support plate having a suction hole for sucking gas open on a first surface, and a porous plate material disposed on a surface of the support plate where the suction hole opens. The porous plate material defines a first main surface and a second main surface that are parallel to each other, and has a plurality of holes that communicate between the two main surfaces, each of the holes being the first main surface. Has a first opening in the main surface of the second main surface, has a second opening in the second main surface, and the mutually adjacent vacancies are formed between the first main surface and the second main surface. The first main surface side is opposed to the support plate, and the first openings of the plurality of holes are elongated in the first direction. Wherein the first opening of each of the holes is partially overlapped with the opening of the suction hole of the support plate; and the gas is sucked and sucked through the suction hole. Was A dust collector that removes dust contained in the workpiece, and a laser optical system that processes the workpiece by irradiating a laser beam onto the workpiece adsorbed on the second main surface of the porous plate material. Laser processing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001084442A JP2002283089A (en) | 2001-03-23 | 2001-03-23 | Adsorptive table and laser beam machining device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001084442A JP2002283089A (en) | 2001-03-23 | 2001-03-23 | Adsorptive table and laser beam machining device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002283089A true JP2002283089A (en) | 2002-10-02 |
Family
ID=18940113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001084442A Withdrawn JP2002283089A (en) | 2001-03-23 | 2001-03-23 | Adsorptive table and laser beam machining device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002283089A (en) |
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