JP4092694B2 - Plasma exhaust gas treatment tower structure - Google Patents
Plasma exhaust gas treatment tower structure Download PDFInfo
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- JP4092694B2 JP4092694B2 JP2003359305A JP2003359305A JP4092694B2 JP 4092694 B2 JP4092694 B2 JP 4092694B2 JP 2003359305 A JP2003359305 A JP 2003359305A JP 2003359305 A JP2003359305 A JP 2003359305A JP 4092694 B2 JP4092694 B2 JP 4092694B2
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- Prior art keywords
- exhaust gas
- gas treatment
- treatment tower
- plasma
- plasma exhaust
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- 239000004020 conductor Substances 0.000 claims description 15
- 239000012212 insulator Substances 0.000 claims description 11
- 238000000354 decomposition reaction Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
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Description
本発明は、円筒体の内部に螺旋状の放電板を備えたプラズマ排ガス処理塔の構造に関する。 The present invention relates to a structure of a plasma exhaust gas treatment tower provided with a spiral discharge plate inside a cylindrical body.
従来、上記のように円筒体の内部に螺旋状の放電板を備えたプラズマ排ガス処理塔は公知である(例えば特許文献参照)。
しかしながら、上記のようなプラズマ排ガス処理塔においては、通常プラズマには反応分布があり、そのため排ガスが反応の低い部分を通過すると分解効率が低下する。よって排ガスの分解効率を向上させるためには排ガスがプラズマ密度の高い部分を通過する時間を稼ぐため、装置自体を大きくするか、あるいはより強力なプラズマを発生させるために高価な電源装置が必要となり、コストの上昇の問題があった。 However, in the plasma exhaust gas treatment tower as described above, there is usually a reaction distribution in the plasma, and therefore the decomposition efficiency decreases when the exhaust gas passes through a low reaction part. Therefore, in order to improve the decomposition efficiency of exhaust gas, it takes time for the exhaust gas to pass through the part where the plasma density is high, so an expensive power supply device is required to enlarge the device itself or to generate more powerful plasma. There was a problem of rising costs.
本発明は上記の問題に鑑みてなされたもので、プラズマ排ガス処理塔内を均一なプラズマ発生状態にして通過ガスの分解にばらつきが起こらないようにするプラズマ排ガス処理塔の構造を提供することを目的とする。 The present invention has been made in view of the above problems, and provides a structure of a plasma exhaust gas treatment tower in which the inside of the plasma exhaust gas treatment tower is in a uniform plasma generation state so that variations in the decomposition of the passing gas do not occur. Objective.
上記の目的を達成するために、本発明におけるプラズマ排ガス処理塔の構造は、内部に上端から下端に至る螺旋状の放電板を備えたプラズマ排ガス処理塔の構造であって、該螺旋状の放電板は絶縁物と、その上下表面を挟む導体と、を有し、前記上下表面を挟む導体に高電圧を印可することで平行平板型のリアクターとなる。
また、前記絶縁物の上下表面を挟む導体の上下表面をさらに絶縁物で挟み誘電体とした。
さらに、内部に上端から下端に至る螺旋状の放電板を備えたプラズマ排ガス処理塔の構造であって、該螺旋状の放電板は導体と、その上下表面を挟む絶縁物と、該絶縁物の上下表面に取り付けた導体と、を有する。
In order to achieve the above object, the structure of the plasma exhaust gas treatment tower according to the present invention is a structure of a plasma exhaust gas treatment tower having a spiral discharge plate extending from the upper end to the lower end inside the plasma exhaust gas treatment tower. plate is an insulating material, and its conductor which sandwich the upper and lower surfaces, have a, a parallel-plate by applying a high voltage to the conductor sandwiching the upper and lower surfaces reactor.
Moreover, the upper and lower surfaces of the conductor sandwiching the upper and lower surfaces of the insulator are further sandwiched by an insulator to form a dielectric.
Further, the plasma exhaust gas treatment tower structure is provided with a spiral discharge plate extending from the upper end to the lower end inside, the spiral discharge plate comprising a conductor, an insulator sandwiching the upper and lower surfaces thereof, And conductors attached to the upper and lower surfaces.
本発明は、螺旋状の放電板の表面に特殊な処理を施した構造にしたから、排ガスをプラズマ密度の高い部分を通過させる時間を長くすることができ排ガスの分解効率を向上させることができる。 Since the present invention has a structure in which the surface of the spiral discharge plate is subjected to a special treatment, the time for passing the exhaust gas through a portion having a high plasma density can be lengthened and the decomposition efficiency of the exhaust gas can be improved. .
以下、本発明の実施の形態を図面に基づいてき詳しく説明する。
図1において、円筒体1の中心に絶縁物でできた芯2があり、その周りに螺旋状の放電板3を取り付けたプラズマ排ガス処理塔で、図2〜4はそのA−A断面図である。前記螺旋状の放電板3、8、9は、図2〜4に示すように3種類の形態がある。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
In FIG. 1, there is a
図2に示すように放電板3は、導体4、4で絶縁物5を挟んであり、この上下の導体4、4に高電圧を印可することで平行平板型のリアクタ−となり前記放電板3の間にプラズマが発生する。 As shown in FIG. 2, the discharge plate 3 has an insulator 5 sandwiched between conductors 4, 4, and a high voltage is applied to the upper and lower conductors 4, 4 to form a parallel plate reactor. Plasma is generated during this period.
また、図3に示すように前記導体4、4をさらに絶縁物6、6で覆い、誘電体7とした放電板8としてバリア放電型リアクタ−とすることができる。なお誘電体7は上下面の内のどちらか一方であっても良い。 Further, as shown in FIG. 3, the conductors 4 and 4 are further covered with insulators 6 and 6, and a discharge plate 8 which is a dielectric 7 can be a barrier discharge reactor. The dielectric 7 may be either one of the upper and lower surfaces.
さらに、図4に示すように沿面放電を利用した螺旋状の放電板9とすることもできる。
すなわち導体4を絶縁物6で覆い、誘電体7としその上にさらに導体10を取付ける。これにより該導体10の間の該誘電体7の表面上にプラズマ密度の高い部分が発生し、この部分を通過する時間を稼ぐことによって分解効率を向上させる。
なお、上記図2〜4は芯2に螺旋状の放電板3、8、9が取付けられているが図5に示すように円筒体1の内面に取り付けても良い。
Furthermore, it is also possible to
That is, the conductor 4 is covered with an insulator 6 to form a dielectric 7, and a
2 to 4, the
本発明は、プラズマ反応装置による排ガス処理において、排ガスをプラズマ密度の高い部分に長時間滞留、通過させることができ、排ガスの分解効率を向上させることができる。 According to the present invention, in the exhaust gas treatment by the plasma reactor, the exhaust gas can stay in and pass through a portion having a high plasma density for a long time, and the decomposition efficiency of the exhaust gas can be improved.
3 8 9 螺旋状の放電板
4 10 導体
5 6 絶縁物
7 誘電体
3 8 9 Spiral discharge plate 4 10 Conductor 5 6 Insulator 7 Dielectric
Claims (2)
該螺旋状の放電板は絶縁物と、
その上下表面を挟む導体と、
を有し、前記上下表面を挟む導体に高電圧を印可することで平行平板型のリアクターとなることを特徴とするプラズマ排ガス処理塔の構造。 It is a structure of a plasma exhaust gas treatment tower having a spiral discharge plate from the upper end to the lower end inside,
The spiral discharge plate is made of an insulator,
A conductor sandwiching the upper and lower surfaces;
Yes, and the structure of the plasma exhaust gas treatment tower, characterized in that the said upper and lower surface conductors sandwiching the high voltage of parallel-plate by applying a reactor a.
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JP2003359305A JP4092694B2 (en) | 2003-10-20 | 2003-10-20 | Plasma exhaust gas treatment tower structure |
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JP2003359305A JP4092694B2 (en) | 2003-10-20 | 2003-10-20 | Plasma exhaust gas treatment tower structure |
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JP2005118753A JP2005118753A (en) | 2005-05-12 |
JP4092694B2 true JP4092694B2 (en) | 2008-05-28 |
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EP2023696A1 (en) * | 2006-05-26 | 2009-02-11 | Daihatsu Motor Co., Ltd. | Electrode for plasma reactor vessel, and plasma reactor vessel |
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