JP4087881B2 - Ionizer using soft X-ray and method for removing charge from charged object - Google Patents

Description

  The present invention relates to an ionizer, in particular, an ionizer structure using soft X-rays and a method for removing charges from a charged object. In particular, the present invention is an improvement in the structural disadvantages of existing ionizers using soft X-rays. The heat release to the outside necessary for miniaturization of ionizers using soft X-rays is easier than before. The present invention relates to a technique that is simple in structure, easy to assemble, and has a solid support.

  As prior art in this field, Japanese Patent Application No. 1996-256780 (Applicant: Hamamatsu Photonics Co., Ltd.) (filed on September 27, 1996) "X-ray generator and electrostatic controller using the same" .

  However, an ionizer using soft X-rays by this technique requires a so-called “holding” process, but the process is complicated and not easy to assemble, and the electrical connection between the flange portion and the external protective container is difficult. In addition, since the thermal contact is not good, there are many problems in actual use. For this reason, it is known that ionizers adopting this technique have not been put into practical use, but the configuration diagram of this technique is as shown in FIG.

  However, a more technically advanced technique that has overcome the disadvantages of the prior art shown in FIG. 1 has already been put into practical use. The block diagram of this technique is as shown in FIG.

  However, there has been a demand for the emergence of a new technology that has a better thermal conductivity than the conventional technology, is easy to assemble, and has a simple structure.

  An object of the present invention is to provide an ionizer using soft X-rays for solving the problems of the above-described prior art.

  Other objects and advantages of the present invention will become more apparent upon reading the following detailed description of the invention and referring to the accompanying drawings.

A configuration example of a preferred embodiment of an ionizer using soft X-rays according to the present invention (hereinafter simply referred to as “ionizer”) is as follows:
A gas in the air is ionized by soft X-rays emitted toward a charged object, and the charge of the charged object is generated by any one or more of positive ions, negative ions, and electrons generated from the ionized gas. In an ionizer using soft X-rays, comprising: one or more head units that generate soft X-rays to remove light and a control unit that controls one or more of the head units;
The head portion is
A protective container having a U-shaped protective container side part, and a U-shaped protective container lid part connected to the protective container side part to form a storage space;
An X-ray tube that is housed in the protective container through an opening formed in the front part of the side surface of the protective container and has an output window that emits soft X-rays generated by collision of electrons with the target;
It is connected to the output window thermally and electrically to form the front end of the X-ray tube, and supports the output window and at the same time comes into contact with the front portion of the side surface of the protective container and is generated inside the target. A flange for releasing heat to the outside of the X-ray tube;
A high-voltage generator that is housed in the protective container and supplies a high voltage to the X-ray tube;
A flange coupler for fixing the X-ray tube to the front portion of the side surface of the protective container;
A screw for fixing the side surface portion of the protective container and the lid portion of the protective container;
Have
The flange coupler has thermal conductivity and electrical conductivity, and includes a circular through hole corresponding to the outer peripheral edge of the flange portion of the X-ray tube, and the outer peripheral edge of the flange portion is the interior of the through hole. It is fixed by the short jaw formed in the above, and is integrated with the flange portion, and forms one contact outer surface with the flange surface.

  In the present invention, it is preferable that each of the head units further includes a timer for indicating a cumulative usage time of the ionizer.

  In the present invention, it is desirable that the side surface portion, the lid portion, and the target of the protective container are made of a conductive material, have a ground potential, and have thermal conductivity.

In the present invention, the controller is
Means capable of selecting each of said multiple heads; and
It is preferable that a display window for indicating the accumulated usage time of the head unit selected in conjunction with the internal timer of each head unit is provided.

  In the present invention, the control unit preferably has a function of inputting / outputting alarm, interlock, remote control, and control signal of the controller power supply.

  In the present invention, when the head unit is installed outside the protective container, the flexible cable is connected to the control unit, and a high-voltage cable for connecting the head unit and the power supply control unit is accommodated inside the flexible cable tube. It is used to protect the high-voltage cable from external shock and vibration, and to allow the user to bend the head part of the head part toward the charged object at an arbitrary angle if necessary. It is desirable not to use the vessel.

  In the present invention, it is desirable to further include an RMS function for remotely monitoring a large number of ionizers with one PC.

  In the present invention, it is desirable that the connector form of the control unit adopts a single connector system.

  In this invention, it is used when attaching the ionizer to a ceiling and a wall, and an L-shaped bracket portion which can arbitrarily fix the head portion of the ionizer horizontally or vertically with a screw; A bracket reinforcing plate is connected to one of the outer surfaces of the bracket portion with a screw, and the head portion is fixed with a screw. The L-shaped bracket portion is fixed to a ceiling or a wall using an anchor bolt. It is desirable to do.

  In this invention, it is desirable that the area where the flange coupler comes into contact with the side surface of the protective container can be set as wide or narrow as necessary.

  In the present invention, it is preferable that an empty space for positioning the main body of the X-ray tube is provided on the side of the side surface of the protective container on the side where the high voltage generator is located.

  In this invention, it is preferable that the X-ray tube is fixed and supported by means for fixing the flange coupler and the side surface of the protective container.

  In the present invention, it is preferable that the control unit has an alarm function for notifying when the usage period of the head unit is exhausted or when the usage period is approaching.

  In this invention, a shielding device having a separate irradiation hole is additionally attached to the side of the protective container where the output window is provided, and various static elimination ranges, circles, squares are formed depending on the pattern of the hole and the distance from the output window. It is desirable to be able to create X-ray irradiation forms with various patterns including an elliptical pattern.

  A preferred embodiment of the method for removing charges from a charged object according to the present invention incorporates a target that irradiates a soft X-ray toward a position where a predetermined charged object is located and is given a predetermined target voltage and target current. A soft X-ray tube in which silver is deposited on a beryllium window, and the beryllium window is irradiated with soft X-rays having a dominant wavelength in the range of 1 to 5 to include the charged object. The charge of the charged object is removed by ionizing an element or a substance.

  In the present invention, it is desirable to remove static electricity by generating soft X-rays having an acceleration voltage of 10 KV or less and a main wavelength band of 4 to 5 mm.

  Various advantages can be envisaged by the practice of this invention.

  First, when silver is vapor-deposited on a beryllium window as a target material, shielding is easy and safety is increased, so that the apparatus configuration can be made more economical.

  Secondly, since a flange coupler is used, the area where the flange comes into contact with the protective container can be easily increased, and heat dissipation is faster than before.

  Thirdly, unlike conventional ones, a pinching technique is unnecessary, and assembly and manufacture are easy.

  Hereinafter, the configuration, operation principle, and features of the present invention will be described with reference to the accompanying drawings. The characteristics of the ionizer using soft X-rays according to the present invention are as follows.

(1. X-ray tube support and heat dissipation structure)
In the present invention, the X-ray tube support and the heat dissipation structure have been improved in order to solve the problems of the prior art. FIG. 3 shows the details of the present invention. 3 includes a U-shaped protective container side surface portion 360 and a U-shaped protective container lid portion 370 constituting a protective container, an X-ray tube 310 having a flange portion 320 at one end, and an X-ray. It has a flange coupler 330 that fixes the tube 310 to the protective container side surface 360 and a high voltage generator 350 that supplies a high voltage to the X-ray tube 310. The protective container side surface part 360 and the protective container cover part 370 are connected by screws to form an accommodation space. The X-ray tube 310 and the high voltage generator 350 are accommodated in the accommodating space. The flange coupler 330 is formed with a circular through hole corresponding to the outer peripheral edge of the flange portion 320 of the X-ray tube 310, and the outer peripheral edge of the flange portion 320 is fixed by a short jaw formed inside the through hole. And integrated with the flange coupler 330. By fixing the flange coupler 330 to the front surface part 340 of the side surface portion of the protective container, the X-ray tube 310 is accommodated in the accommodating space in the protective container. When attaching the ionizer to the ceiling or wall, one of the L-shaped bracket part that allows the head part of the ionizer to be fixed horizontally or vertically with screws and the outer surface of the L-shaped bracket part in a planar form And a bracket comprising a bracket reinforcing plate for fixing the head portion with a screw.
In other words, the present invention has the effect of directly expanding the flange portion of an existing X-ray tube, or using a flange coupler as shown in the drawing to fix the flange portion by welding or the like. For fixing, it is desirable to use a screw as shown in the drawing. FIG. 12 is a view showing a state in which the flange portion and the flange coupler are fixed according to the present invention. This will be described in detail later. By doing so, the effects obtained by the present invention in comparison with the previous system are as follows.

1stly, since the magnitude | size of a flange part is directly expanded and it fastened directly with the outer case, the thermal radiation efficiency increases very much. Furthermore, since it can have a wide area according to the size of the flange coupler , it can have a greater efficiency in heat dissipation.

  Secondly, it does not use a complicated structure such as a holding structure adopted by the prior art, and can be fastened with an external case and a screw, so that it is excellent in terms of assembly.

(2. Silver deposition)
Previously, the goal of ionizers using soft X-rays was to remove static electricity by depositing tungsten on the beryllium window and generating soft X-rays with a main wavelength of 1-2 mm at an acceleration voltage of 9-11 KV or less there were. However, as a result of testing by depositing silver on the beryllium window in the experiment by the applicant of the present invention, it is necessary for ionization while the soft X-ray has a dominant wavelength of 3.5 to 4.5 mm at an acceleration voltage of 9.5 kV. Discovered the fact that the amount of ionic current is almost the same as before. Furthermore, the radiation dose was only half that of the existing one. Now, the experimental results by the applicant of this invention will be described in detail.

  FIG. 4 shows the decrease in ion current according to the distance when tungsten and silver are vapor-deposited on a beryllium window as a target material and acceleration voltages are 9.5 KV, 10 KV, and 10.5 KV. When silver was deposited, the main wavelength (3.5 to 4.5 mm) was longer than the wavelength (1 to 2 mm) using tungsten as a target, and it was possible that it would be disadvantageous for long-distance static elimination. However, in actual measurement values, it can be seen that there is almost no difference in the amount of decrease in ion current with distance from tungsten. This is expected to be due to the effect of long-range static elimination due to braking width rays (1.5 to 2.5 mm) generated in addition to the dominant wavelength when silver is deposited. Since the dose of X-rays generated is smaller than when tungsten is used while maintaining high resistance, it is more stable in terms of stability and easier to shield, which makes it more economical. There are many advantages compared to.

  FIG. 5 shows a case where the tube current is 100 μA and the acceleration voltage is varied from 6 to 13 KV, and the soft X-ray dominant wavelength and the corresponding wavelength when silver is deposited on the beryllium window as the target material. It is a curve which shows the ratio relationship of the dose which the soft X ray generate | occur | produced. It can be seen that the higher the accelerating voltage is, the more soft X-rays in the same wavelength band are generated. In this example, the soft X-rays are generated most frequently at about 0.425 nm, that is, 4.25 nm wavelength band. It can be seen that the soft X-ray of the part has a wavelength of 1 to 5 nm. In the drawing, the unit of the vertical axis is the value (SV) of the generated dose by wavelength. Here, the tube current means the current of electrons that move to the internal target of the soft X-ray tube when an acceleration voltage is applied.

  FIG. 6 shows the relationship between the neutralization distance and the generated soft X-ray dose when the acceleration voltage is 9.48 KV and the tube current is 0.240 mA when tungsten and silver are deposited on the beryllium window as the target material. It is a curve. It can be seen that when the silver is deposited, the soft X-ray dose generated for the same static elimination distance is smaller. Thus, it can be seen that silver is safer and X-ray shielding is easier.

  FIG. 7 is a curve showing the relationship between the ionization distance and the ion current when tungsten and silver are vapor-deposited on the beryllium window as the target material and the acceleration voltage is 10.5 KV and the tube current is 0.240 mA. is there. In the case of silver for the same distance, the ion current is somewhat small, but when considering the time when static elimination occurs due to the ion current (the ion current that maintains the static elimination time falling from ± 1000 V to ± 100 V within 0.5 seconds) Value: 150 to 240 nA), it can be seen that there is no difference in the performance of static elimination even when silver is used.

  FIG. 8 shows the relationship between the static elimination distance and the generated soft X-ray dose when tungsten and silver are deposited on the beryllium window as the target material and the acceleration voltage is 10.5 KV and the tube current is 0.240 mA. It is a curve. It can be seen that the amount of soft X-ray dose is smaller in the case of silver for the same static elimination distance, and this makes it easier to shield and higher safety when using silver.

  FIG. 9 is a curve showing the relationship between the ionization distance and the ionic current when tungsten and silver are deposited on the beryllium window as the target material and the acceleration voltage is 10 KV and the tube current is 0.2382 mA. In the case of silver for the same distance, the ion current is somewhat small, but when considering the time when static elimination occurs due to the ion current (the ion that maintains the static elimination time falling from ± 1000 V to ± 100 V within 0.5 seconds) (Current value: 150 to 240 nA), it can be seen that there is no difference in the static elimination performance even when silver is used.

  FIG. 10 is a curve showing the relationship between the static elimination distance and the generated soft X-ray dose when tungsten and silver are vapor-deposited on the beryllium window as the target material and the acceleration voltage is 10 KV and the tube current is 0.2382 mA. is there. It can be seen that the amount of soft X-ray dose is smaller in the case of silver for the same static elimination distance, and this makes it easier to shield and higher safety when using silver.

  FIG. 11 is a curve showing the relationship between the ionization distance and the ion current when tungsten and silver are vapor-deposited on the beryllium window as the target material and the acceleration voltage is 9.48 KV and the tube current is 0.240 mA. is there. In the case of silver for the same distance, the ion current is somewhat small, but when considering the time when static elimination occurs due to the ion current (the ion that maintains the static elimination time falling from ± 1000 V to ± 100 V within 0.5 seconds) (Current value: 150 to 240 nA), it can be seen that there is no difference in the static elimination performance even when silver is used. In this case, the difference between the two is less than in other cases. From this fact, it can be seen that if the acceleration voltage is low, there is no significant difference in the amount of ion current generated between the two.

  The facts understood from the above experimental results are as follows.

  First, there is not much difference in the amount of ions generated even at a low voltage.

  Secondly, the static elimination performance is similar to that of the conventional ionizer, but the danger is further greatly reduced and the shielding is easy.

  Thirdly, in the present invention, the main wavelength band is 3.5 to 4.5 mm and the braking width ray wavelength band is 1.5 to 2.5 mm at the same time. It is useful for static elimination. For reference, it is mentioned that the main wavelength band of 3.5 to 4.5 mm is advantageous for short-range static elimination, and the braking width ray wavelength band of 1.5 to 2.5 mm is advantageous for long-range static elimination. Therefore, since one ionizer can be used for both long-distance and short-distance neutralization, it is very economical. In addition, the overall static elimination performance is expected to improve.

  On the other hand, according to Japanese Patent No. 2951477, the target wavelength range was determined to be 2 to 20 mm without defining the target material, but this is a matter that must be considered in various ways (for example, the target material , Accelerating voltage, tube current, etc.) without any experimental grounds.

(3. Improvement of controller functions)
The controller of the ionizer using the soft X-ray of the present invention has various functions improved as compared with the conventional one. This is detailed in Table 1 below. Table 1 exemplifies a function setting table of an ionizer using soft X-rays according to the present invention. In this example, 10 types of functions are set. The outline of the improved function of the controller in the ionizer of the present invention is as follows.

  First, in the present invention, a function capable of outputting signals to an existing alarm, interlock, remote control, and controller power supply function is added.

  Secondly, in this invention, the flexible conduit disclosed in the applicant's other Korean patent application 10-2005-32535 “flexible soft X-ray ionizer” is applicable. In other words, another embodiment of the ionizer using soft X-rays according to the present invention includes a head unit for generating soft X-rays, a soft X-ray protection unit for controlling leakage of soft X-rays from the head unit, and a control. A power control unit for supplying signals and control voltages to the head unit. At this time, the head unit is located outside the soft X-ray protection unit, and a high voltage cable connecting the head unit and the power control unit is provided. It is possible to use a flexible tube that protects from external shocks and vibrations and can be bent at an arbitrary angle by the user toward the charged object if necessary.

  Thirdly, in the present invention, RMS (Real monitoring system) can be applied. RMS is a system that allows simple monitoring of a large number of ionizers installed on site using a single PC on site. The RMS is described in detail in the applicant's other Korean patent application 10-2005-32534 “Bar Ionizer”.

  A more detailed search for the above 10 types of functions is as follows.

  In the case of the number 1, the connector names (corresponding to functions) are OUTPUT1 to OUTPUT4, the number of pins is five, and this function connects the heads. This function has been used in the past.

  In the case of the number 2, the connector name is INTERLOCK, the number of pins is 2, and this function is to input an external interlock signal. When the operator enters the shielded room where the ionizer is installed, it is necessary to stop the operation of the ionizer for the safety of the worker. Even if the operation of the ionizer is stopped and the doorway is closed, the operator can be protected because it is activated by pressing the start button manually. However, depending on the work environment, when the entrance / exit of the shielding room is closed, the operation may have to be resumed automatically. Therefore, it is possible to satisfy such requirements through circuit modification, which is a technology used in the past. It is.

  In the case of number 3, the connector name is REMOTE, the number of pins is 2, and there is a function of inputting an external remote signal. When inputting an external remote signal, the start / stop button is used. This feature was also used for existing ones.

  In the case of the number 4, the connector name is INDICATOR and the number of pins is two. There is a function for confirming the ON / OFF state of the head, which is also a function that exists in the existing ones.

  In the case of number 5, the connector name is ALARM, the number of pins is two, and there is a function to output an alarm state, which is not present in the existing one.

  In the case of No. 6, the name of the connector is INTERLOCK OUT, the number of pins is two, and there is a function of outputting an external interlock signal. This function is characterized in that it is output when the interlock is in operation. This is a function that does not exist in the existing ones.

  In the case of the number 7, the name of the connector is REMOTE OUT, the number of pins is 2, and there is a function of outputting an external remote signal, which is output during remote operation. This is a function that does not exist in the existing ones.

  In the case of No. 8, the name of the connector is POWER ON / OFF, the number of pins is 2, there is a power ON / OFF function, and a signal according to the power input state is output. This is a function that does not exist in the existing ones.

  In the case of the number 9, the name of the connector is the power supply specification (AC). 100-240V like existing ones.

  In the case of the number 10, the name of the connector is a connector specification, and in the existing one, it is an individual connector, but in the present invention, a single connector is used.

  On the other hand, FIG. 12 shows a state diagram in which the flange portion and the flange coupler according to the present invention are coupled. In the present invention, it is better to increase the area where the flange portion is in direct contact with the side surface portion of the protective container, but this is not technically easy. Therefore, in the present invention, in order to overcome such a point, the flange portion is coupled to the flange coupler to substantially widen the contact area of the flange portion, so that the heat radiation effect becomes more excellent than before. Conventionally, there are cases where the holding of the heat dissipating flange does not improve in the process of holding it in contact with the protective container, which complicates the apparatus and makes it difficult to assemble. However, in the present invention, such problems are all solved by adopting the flange coupler.

  While the invention is susceptible to various modifications and alternative forms, the foregoing detailed description of the invention has only been described with reference to specific embodiments. However, it should be understood that the invention is not limited to the specific forms mentioned in the detailed description of the invention above, but rather falls within the spirit and scope of the invention as defined by the appended claims. It should be understood to include all variations and equivalents and alternatives.

The structural diagram of the ionizer using the soft X-ray by a prior art is shown. FIG. 3 shows a structural diagram of an ionizer using soft X-rays according to another conventional technique. 1 shows a preferred embodiment of a structural diagram of an ionizer utilizing soft X-rays according to the present invention; It is a characteristic curve showing the relationship between the value obtained by multiplying the ion current amount by the square of the distance and the static elimination distance when tungsten and silver are used as target materials and the acceleration voltage is 9.5 KV, 10 KV, and 10.5 KV. . It is a curve which shows the dose value (Sv) according to the wavelength of soft X-rays when the tube current is 100 μA and the acceleration voltage is varied from 6 to 13 KV and silver is used as the target material. This is a curve showing the relationship between the static elimination distance and the generated soft X-ray dose when tungsten and silver are used as the target material and the acceleration voltage is 9.48 KV and the tube current is 0.240 mA. This is a curve showing the relationship between the static elimination distance and the ion current when tungsten and silver are used as the target material and the acceleration voltage is 10.5 KV and the tube current is 0.240 mA. This is a curve showing the relationship between the static elimination distance and the generated soft X-ray dose when tungsten and silver are used as the target material and the acceleration voltage is 10.5 KV and the tube current is 0.240 mA. This is a curve showing the relationship between the static elimination distance and the ion current when tungsten and silver are used as the target material and the acceleration voltage is 10 KV and the tube current is 0.2380 mA. This is a curve showing the relationship between the static elimination distance and the generated soft X-ray dose when tungsten and silver are used as the target material and the acceleration voltage is 10 KV and the tube current is 0.2382 mA. This is a curve showing the relationship between the static elimination distance and the ion current when tungsten and silver are used as the target material and the acceleration voltage is 9.48 KV and the tube current is 0.240 mA. It is the state figure which combined the flange part and flange coupler of the ionizer using soft X-ray by this invention.

Explanation of symbols

310 X-ray tube 320 Flange part 330 Flange coupler 340 Front part of protective container side part 350 High voltage generating part 360 Protective container side part 370 Protective container cover part 380 Connector 390 Bracket

Claims (12)

A gas in the air is ionized by soft X-rays emitted toward a charged object, and the charge of the charged object is generated by any one or more of positive ions, negative ions, and electrons generated from the ionized gas. In an ionizer using soft X-rays, comprising: one or more head units that generate soft X-rays to remove light and a control unit that controls one or more of the head units;
The head portion is
A protective container having a U-shaped protective container side part, and a U-shaped protective container lid part connected to the protective container side part to form a storage space;
An X-ray tube that is housed in the protective container through an opening formed in the front part of the side surface of the protective container and has an output window that emits soft X-rays generated by collision of electrons with the target;
It is connected to the output window thermally and electrically to form the front end of the X-ray tube, and supports the output window and at the same time comes into contact with the front portion of the side surface of the protective container and is generated inside the target. A flange for releasing heat to the outside of the X-ray tube;
A high-voltage generator that is housed in the protective container and supplies a high voltage to the X-ray tube;
A flange coupler for fixing the X-ray tube to the front portion of the side surface of the protective container;
A screw for fixing the side surface portion of the protective container and the lid portion of the protective container;
Have
The flange coupler has thermal conductivity and electrical conductivity, and includes a circular through hole corresponding to the outer peripheral edge of the flange portion of the X-ray tube, and the outer peripheral edge of the flange portion is the interior of the through hole. An ionizer using soft X-rays, wherein the ionizer is fixed by a short jaw formed on the base plate and is integrated with the flange portion to form one contact outer surface with the flange surface.   2. The ionizer using soft X-rays according to claim 1, wherein each of the head units further includes a timer for indicating a cumulative usage time of the ionizer.   2. The ionizer using soft X-rays according to claim 1, wherein a side surface portion, a lid portion, and a target of the protective container are made of a conductive material, have a ground potential, and have thermal conductivity. The controller is capable of selecting each of the plurality of heads; and
The ionizer using soft X-rays according to claim 1, further comprising a display window for indicating a cumulative usage time of the head unit selected in conjunction with an internal timer of each head unit.   The ionizer using soft X-rays according to claim 1, wherein the control unit has a function of inputting / outputting an alarm, an interlock, a remote control, and a control signal of a controller power supply to the outside.   When the head unit is installed outside the protective container, the flexible cable is connected to the control unit, and the high voltage cable for connecting the head unit and the power control unit is accommodated in the flexible cable tube. It is used to protect against external shocks and vibrations, and to allow the user to bend the head of the head part at an arbitrary angle toward the charged object if necessary. At this time, the flange coupler is not used. An ionizer using soft X-rays according to claim 1.   The ionizer using soft X-rays according to claim 1, further comprising an RMS (Remote Monitoring System) function for remotely monitoring a large number of ionizers with one PC.   2. The ionizer using soft X-rays according to claim 1, wherein an area where the flange coupler comes into contact with the side surface of the protective container can be set as wide or narrow as necessary.   2. The soft X-ray according to claim 1, wherein an empty space for positioning the main body of the X-ray tube is prepared inside the side surface of the protective container on the side where the high voltage generator is located. Ionizer using   The ionizer using soft X-rays according to claim 1, wherein the X-ray tube is fixed and supported by means for fixing the flange coupler and the side surface of the protective container.   2. The ionizer using soft X-rays according to claim 1, wherein the control unit includes an alarm function for notifying the end of the usage period of the head unit or approaching the usage period.   A shielding device having a separate irradiation hole on the side of the protective container that has an output window is additionally attached, and various static elimination ranges and circular, square, and oval patterns depending on the pattern of the hole and the distance from the output window The ionizer using soft X-rays according to claim 1, wherein X-ray irradiation forms having various patterns can be created.