JP4081508B2 - 三次元構造物の製造方法および製造装置 - Google Patents
三次元構造物の製造方法および製造装置 Download PDFInfo
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Description
一方、従来のインクジェットプリント技術は、設計変更に柔軟に対応でき、短時間で2次元形状を形成できる技術であるが、ノズルから吐出できる材料は低い粘度の材料に限られる。低い粘度の材料は、基板上で横方向に拡散してしまうため、三次元的に堆積させることができず、インクジェットプリント技術で三次元構造物を製造することは困難であった。
すなわち本発明は、インクジェットプリント技術において、ノズルから吐出された溶液の液滴に、それが基板に接触する前に光を照射して、当該液滴の溶媒を蒸発させ、かつ当該液滴に含まれるポリマー粒子を溶融させて粘度を上げることを特徴とする。本発明は、前記粘度が向上した液滴を基板に接触させて固化させ、次々と液滴を堆積して固化物を積み上げることによって、所望の三次元構造物が製造できるという知見に基づいてなされた。
[1]溶媒および前記溶媒中に分散されたポリマー粒子を含み、粘度100cps以下である溶液の液滴を、ノズルから基板に向けて吐出するステップ;
前記液滴に光を照射して、前記液滴に含まれる溶媒を蒸発させ、かつ前記液滴に含まれるポリマー粒子を溶融させるステップ;ならびに
前記溶融されたポリマー粒子を基板上に堆積するステップ、を含む三次元構造物の製造方法。
[2]前記吐出はピエゾ方式のインクジェットによって行われる、[1]に記載の製造方法。
[3]前記液滴への光の照射は、前記液滴が前記基板に接触する前に行われる、[1]または[2]に記載の製造方法。
[4]前記光は、赤外線または紫外線である、[1]〜[3]のいずれかに記載の製造方法。
[5]前記光はレーザである、[1]〜[4]のいずれかに記載の製造方法。
[6]前記光は、前記ノズル側または前記ノズルの側方から、前記液滴に照射される、[1]〜[5]のいずれかに記載の製造方法。
[7]前記液滴の粘度を、前記光の照射により100cps以上に変化させる、[1]〜[6]のいずれかに記載の製造方法。
[8]前記基板またはノズルを、XYZ方向に任意に移動させる、[1]〜[7]のいずれかに記載の製造方法。
[9]前記ポリマー粒子の平均粒径は1μm以下である、[1]〜[8]のいずれかに記載の製造方法。
[10]前記ポリマー粒子は中空粒子である、[1]〜[9]のいずれかに記載の製造方法。
[11]前記ポリマー粒子は、粒径の異なる2種以上の粒子を含む、[1]〜[10]のいずれかに記載の製造方法。
[12]前記三次元構造物はピラーである、[1]〜[11]のいずれかに記載の製造方法。
[13]溶媒および前記溶媒中に分散されたポリマー粒子を含む溶液の液滴を、基板に向けて吐出するノズル;前記溶液を振動させる振動部;前記ノズルから吐出された溶液の液滴に光を照射する光源;前記ノズルまたは基板をXYZ方向に移動させる駆動機構部を有し、
前記光源は、前記ノズルの吐出口の上方または側方に設置される、三次元構造物製造装置。
[14]前記光源は、赤外線レーザまたは赤外線照射装置である、[13]に記載の製造装置。
[15]前記光源は、紫外線レーザまたは紫外線照射装置である、[13]に記載の製造装置。
[16]前記基板または光源を振動させる手段を有する、[13]〜[15]のいずれかに記載の製造装置。
本発明の三次元構造物の製造方法は、1)溶媒および溶媒中に分散されたポリマー粒子を含む溶液の液滴を、ノズルから基板に向けて吐出するステップ、2)液滴に光を照射してポリマー粒子を溶融させるステップ、3)溶融されたポリマー粒子を基板上に堆積するステップ、を含む。
液滴を吐出する方法については後述するが、インクジェットヘッドなどに収容された溶液を振動させてノズルから吐出させることが好ましい。
前述の三次元構造物の製造方法は、以下に示される製造装置を用いて実施されうる。本発明の三次元構造物の製造装置は、ポリマー粒子を含む溶液の液滴を基板に向けて吐出するノズル;前記溶液を振動させる振動部;前記ノズルから露出された液滴に光を照射する光源;前記ノズルまたは基板をXYZ方向に移動させる駆動機構部を有する。
前記光源は、ノズルの上方に設置されていても(図1および2を参照)、側方に設置されていてもよい(図3および4を参照)。光源をノズルの上方に設置すると、液滴にレーザを照射しやすくなると考えられ、また装置をコンパクトにすることができる。一方、光源をノズルの側方に設置するとインクジェットなどのヘッドの構造が簡素になるので、装置のコストが下がると思われる。また、ノズルの側方に設置された光源は、振動させやすいと考えられる。
[実施の形態1]
図1には、三次元構造物を製造する装置の一部であるインクジェットヘッドの例が示される。1は圧電素子、2はノズル、3はレーザ光、4はレーザ、5はレンズ、6は溶媒、7はポリマー粒子、8は粘度が向上された液滴を示す。
図2には、三次元構造物を製造する装置の一部であるインクジェットヘッドの別の例が示される。図2において、図1と同じ構成要素については同じ符号を用い、説明を省略する。
図3及び図4は、本発明の三次元構造物を製造する装置であるインクジェットのヘッド部のさらに別の例が示される。図3および図4において、図1と同じ構成要素については同じ符号を用い、説明を省略する。
Claims (16)
- 溶媒および前記溶媒中に分散されたポリマー粒子を含み、粘度100cps以下である溶液の液滴を、ノズルから基板に向けて吐出するステップ、
前記液滴に光を照射して、前記液滴に含まれる溶媒を蒸発させ、かつ前記液滴に含まれるポリマー粒子を溶融させるステップ、ならびに
前記溶融されたポリマー粒子を基板上に堆積するステップ、を含む三次元構造物の製造方法。 - 前記吐出はピエゾ方式のインクジェットによって行われる、請求項1に記載の製造方法。
- 前記液滴への光の照射は、前記液滴が前記基板に接触する前に行われる、請求項1に記載の製造方法。
- 前記光は、赤外線または紫外線である、請求項1に記載の製造方法。
- 前記光はレーザである、請求項1に記載の製造方法。
- 前記光は、前記ノズル側または前記ノズルの側方から、前記液滴に照射される、請求項1に記載の製造方法。
- 前記液滴の粘度を、前記光の照射により100cps以上に変化させる、請求項1に記載の製造方法。
- 前記基板またはノズルを、XYZ方向に任意に移動させる、請求項1に記載の製造方法。
- 前記ポリマー粒子の平均粒径は、1μm以下である、請求項1に記載の製造方法。
- 前記ポリマー粒子は、中空粒子である、請求項1に記載の製造方法。
- 前記ポリマー粒子は、粒径の異なる2種類以上の粒子を含む、請求項1に記載の製造方法。
- 前記三次元構造物はピラーである、請求項1に記載の製造方法。
- 溶媒および前記溶媒中に分散されたポリマー粒子を含む溶液の液滴を、基板に向けて吐出するノズル;前記溶液を振動させる振動部;前記ノズルから吐出された溶液の液滴に光を照射する光源;前記ノズルまたは基板をXYZ方向に移動させる駆動機構部を有し、
前記光源は、前記ノズルの吐出口の上方または側方に設置される、三次元構造物製造装置。 - 前記光源は、赤外線レーザまたは赤外線照射装置である、請求項13に記載の三次元構造物製造装置。
- 前記光源は、紫外線レーザまたは紫外線照射装置である、請求項13に記載の三次元構造物製造装置。
- 前記基板または光源を振動させる手段を有する、請求項13に記載の三次元構造物製造装置。
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JP2007301715A (ja) * | 2006-04-06 | 2007-11-22 | Rohm & Haas Electronic Materials Cmp Holdings Inc | レーザー焼結を用いたケミカルメカニカルポリッシング用の研磨パッドの形成方法 |
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JP2007301715A (ja) * | 2006-04-06 | 2007-11-22 | Rohm & Haas Electronic Materials Cmp Holdings Inc | レーザー焼結を用いたケミカルメカニカルポリッシング用の研磨パッドの形成方法 |
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