JP4080588B2

JP4080588B2 - Insulating operation rod and method of manufacturing the same

Info

Publication number: JP4080588B2
Application number: JP07973098A
Authority: JP
Inventors: 武文伊藤; 巌河又; 健一小山; 俊則木村; 伸治佐藤; 卓関谷; 洋一久森; 聖一宮本; 孝行糸谷; 光政寄田; 稔正丸山
Original assignee: Mitsubishi Electric Corp
Current assignee: Mitsubishi Electric Corp
Priority date: 1998-03-26
Filing date: 1998-03-26
Publication date: 2008-04-23
Anticipated expiration: 2018-03-26
Also published as: JPH11282561A; TW419623B

Description

【０００１】
【発明の属する技術分野】
この発明は、真空中の容器内で絶縁と操作力伝達を必要とする開閉装置の絶縁操作ロッドおよびその製造方法に関するものである。
【０００２】
【従来の技術】
図６は例えば（株）産業技術サービスセンター発行のセラミックス接合とハイテクろう付けに示された、従来の絶縁継ぎ手の断面図を示す。において、２はメタライズ層、１１は筒状セラミックス、１２は継手、１３はＡｇろう材である。
【０００３】
次に作用について説明する。アルミナ製の筒状セラミックス１１の両端の沿面部分にメタライズ層２を形成し、水素中で８２０℃に加熱して筒状セラミックス１１とコバール製の継手１０をＡｇろう材１３で接合し絶縁継手を得ていた。
【０００４】
【発明が解決しようとする課題】
真空中の容器内で絶縁および操作力伝達を行う絶縁操作ロッドは、絶縁を担うセラミックスに高導電性の金属部材や操作機構に連結される金属部材が接合されたものである。このロッドが真空容器に組み込まれる際、真空中で加熱処理が行われるので、熱が加わった後でも健全な接合性が必要とされる。また、操作力に耐える接合性も必要とされる。に示した従来の接合方法は、大気中やガス中での絶縁および操作力伝達を行うためになされたもので、コバール製の継手１２をＡｇろう材１３でアルミナ製の筒状セラミックス１１と接合している。しかし、真空容器組立時の加熱温度でろう材が再溶融して初期の接合状態を維持できず接合性が低下したり、接合面が軸方向と平行なので、引張の力に対しては接合面に剪断応力が負荷されて破壊が起こりやすい。また、高価なコバールを継手としているため、高価である等の問題点があった。
【０００５】
この発明は上記のような問題点を解消するためになされたもので、真空中の容器内で絶縁および操作力伝達を行う、セラミックスと金属部材とが接合された絶縁操作ロッドにおいて、セラミックスおよび金属部材間が良好に接合されている絶縁操作ロッドおよびその製造方法を提供することを目的とする。
【０００６】
【課題を解決するための手段】
この発明は、真空中の容器内で絶縁および操作力伝達を行う、セラミックスと金属部材とが接合された絶縁操作ロッドにおいて、前記セラミックスと前記金属部材との間に、中間材として、Ｍｏをサンドイッチした三層構造のクラッド材を設け、前記クラッド材が、二層のＣｕ間に２０〜８０質量％となるようにＭｏをサンドイッチした三層構造のクラッド材であることを特徴とする絶縁操作ロッドである。
この発明は、真空中の容器内で絶縁および操作力伝達を行う、セラミックスと金属部材とが接合された絶縁操作ロッドにおいて、前記セラミックスと前記金属部材との間に、中間材として、銅の合金を設け、前記銅の合金は、降伏応力が８〜９ｋｇｆ／ｍｍ²であってＡｇを０．０３〜０．１５質量％含有するＣｕ合金；Ｃｒを０．８質量％含有するＣｕ合金；あるいはＺｒを０．１５質量％含有するＣｕ合金であることを特徴とする絶縁操作ロッドである。
この発明は、前記中間材に貫通孔を設け、かつ前記貫通孔にセラミックスを嵌合させたものを、前記セラミックスと前記金属部材との間に設けたことを特徴とする、請求項１または２に記載の絶縁操作ロッドである。
この発明は、上記請求項１ないし請求項３の何れか１項に記載の絶縁操作ロッドの製造方法であって、前記セラミックスと前記金属部材との間に、中間材として、Ｍｏをサンドイッチした三層構造のクラッド材；あるいは銅の合金；のいずれか１つを設け、前記セラミックスと前記金属部材とを接合することを特徴とする絶縁操作ロッドの製造方法である。
【０００７】
この発明における絶縁操作ロッドは、セラミックスと金属部材との間に、銅系複合材料、あるいは銅の合金の中間材を配置し接合したものであって、セラミックスと金属部材の熱膨張差で発生する接合部の応力を緩和あるいは緩衝し、安価に接合性を向上できる。
【０００８】
ここで、Ｆｅ−Ｎｉ系合金の好適な組成範囲について説明する。本発明で好適に使用されるＦｅ−Ｎｉ系合金は、Ｎｉを２０〜５０質量％含有するＦｅ−Ｎｉ合金；Ｎｉを２０〜５０質量％およびＣｏを３〜２５質量％含有するＦｅ−Ｎｉ系合金；Ｎｉを２０〜５０質量％およびＣｒを１〜１２質量％含有するＦｅ−Ｎｉ系合金；あるいはＮｉを２０〜５０質量％およびＣｏを３〜２５質量％含有する前記のＦｅ−Ｎｉ系合金に、０．５〜５質量％のＣと０．１〜３質量％のＳｉおよびＭｎのいずれか１種または２種を含有するＦｅ−Ｎｉ系合金である。これらＦｅ−Ｎｉ系合金は、インバー、エリンバー、フェルニコ、４２アロイ、コバール等と呼ばれる低膨張金属も含むことができる。酸化物、窒化物、炭化物の各セラミックスの熱膨張係数の範囲は４〜１２×１０^-6／Ｋで、絶縁セラミックと金属部材の熱膨張差に起因する応力を軽減するためにはセラミックスと中間材の熱膨張係数と整合させることが必要である。ＦｅにＮｉ、Ｃｏ、Ｃｒ、Ｃ、Ｓｉ、Ｍｎを上記範囲で添加したものは、４〜１２×１０^-6／Ｋの熱膨張係数を得られ、セラミックスと金属部材の中間の熱膨張特性を示すＦｅ−Ｎｉ系合金を選択することで、発生する応力を緩和でき、接合性が向上する。
【０００９】
次に、銅系複合材料の好適な組成範囲について説明する。本発明に好適に使用される銅系複合材料は、ＣｕにＭｏまたはＷの粒子を４０〜９０質量％の範囲で複合化したもの；あるいは二層のＣｕ間に２０〜８０質量％となるようにＭｏをサンドイッチした三層構造のクラッド材である。これもセラミックスの熱膨張係数に近い４〜１２×１０^-6／Ｋを得るために定めたもので、セラミックスと金属部材の中間の熱膨張特性を示す銅系複合材を選択することで、発生する応力を緩和でき、接合性が向上する。さらにＣｕでＭｏをサンドイッチしたクラッド材は、Ｃｕがセラミックスと金属部材の間に発生する熱応力を緩衝する役割も果たす。
【００１０】
銅の合金は、セラミックスと金属部材の熱膨張差により発生する応力を緩衝する役割をして、健全な接合を得る。銅の合金の降伏応力は、４〜１０ｋｇｆ／ｍｍ²が好適である。その理由は、４ｋｇｆ／ｍｍ²は純銅の降伏応力から定まる値であり、上限の１０ｋｇｆ／ｍｍ²を超えた場合は接合部に発生する応力を緩衝する効果が得られにくいためである。また、上記範囲の降伏応力を示す銅の合金は、Ｃｕ−０．０３〜０．１５重量％Ａｇ合金（焼鈍材、８ｋｇｆ／ｍｍ²）、Ｃｕ−０．８重量％Ｃｒ合金（焼鈍材、９ｋｇｆ／ｍｍ²）、Ｃｕ−０．１５重量％Ｚｒ合金（焼鈍材、９ｋｇｆ／ｍｍ²）等が上げられる。上記銅の合金を選択した理由を以下に述べる。真空容器内に絶縁操作ロッドが組み込まれる際、真空中で通常８００〜１０００℃に加熱して真空容器の組立が行われる。Ａｌ、Ｐｂ、Ｉｎ、Ｂｉ、Ｚｎ、Ｓｎ、Ｍｇ等の金属、およびそれらを含有する銅系合金も、１０ｋｇｆ／ｍｍ²以下の降伏応力を示すが、真空中で８００〜１０００℃に加熱されると、これらの低融点金属は金属蒸気となり、真空容器内やセラミックスの表面を汚染し、絶縁特性等を低下させる問題があるからである。なお、ここで言う降伏応力とは、もとの長さの０．２％の永久伸びを生ずる応力値である。
【００１１】
【発明の実施の形態】
実施の形態１．
以下、この実施の形態について説明する。図１は実施の形態に係る絶縁操作ロッドの断面図を示す。図１において１は絶縁セラミックス、２はメタライズ層、３はめっき層、４は中間材、５はろう材ａ、６金属部材、７はろう材ｂである。
【００１２】
この実施の形態では、中間材にＦｅ−Ｎｉ系合金を用いてＭｏ−Ｍｎ法で接合した場合について説明する。直径１５ｍｍ、長さ２５ｍｍのアルミナ製の絶縁セラミックス１の接合面に、厚さ３０μmのＭｏ−Ｍｎのメタライズ層２を作り、その上に電解法で厚さ５μmのＮｉのめっき層３を形成させた。そして、厚さ１ｍｍのＦｅ−４２質量％Ｎｉ、Ｆｅ−２９質量％Ｎｉ−１７質量％Ｃｏおよび、Ｆｅ−３２質量％Ｎｉ−５質量％Ｃｏ−２質量％Ｓｉ−０．２質量％Ｍｎの３種を中間材４として用いた。中間材４とめっきを施した絶縁セラミックス１との間に厚さ５０μmのＢＮｉ−７（Ｎｉ−１３％Ｃｒ−１０％Ｐ）のろう材ａ５の箔を配置し、１ｋｇの荷重を加えながら真空中９５０℃×２０分で加熱し接合した。続いて、絶縁セラミックス１に接合した中間材４の上に直径１５ｍｍ、長さ２５ｍｍのステンレス鋼（ＳＵＳ３０４）の金属部材６を接合するため、ＢＡｇ−１８（Ａｇ−３０％Ｃｕ−１０％Ｓｎ−０．０２５％Ｐ）のろう材ｂ７を中間材４と金属部材６との間に置き、１ｋｇの荷重を加えながら真空中８２０℃×２０分で加熱し接合体を得た。比較材は中間材４を設けずに、アルミナ製絶縁セラミック１とＳＵＳ３０４製金属部材６をＭｏ−Ｍｎ法でＢＮｉ−７を用いて真空中９５０℃×２０分で加熱し接合した。この絶縁操作ロッドの接合性を調べるために、外観検査と引張試験による接合強度を測定した。その結果を表１の実施の形態１（Ｎｏ１〜３）に示す。参考例であるＮｏ１、Ｎｏ２、Ｎｏ３はセラミックスの亀裂や接合部の剥離、変形は見られなかった。比較例のＮｏ１２はセラミックスに亀裂が発生した。引張試験を行った結果、参考例での引張強度はＮｏ１が１５ｋｇｆ／ｍｍ²、Ｎｏ２、Ｎｏ３が２３ｋｇｆ／ｍｍ²以上で、比較材の３ｋｇｆ／ｍｍ²に対して著しく接合強度が向上した。また、引張試験後の破断部は接合部近辺のセラミックス内部で破断したことからセラミックスの強度より強固な接合が得られていた。なお、本実施の形態ではＮｉろう材を用いて絶縁セラミックスと中間材を接合していたが、Ｃｕ、Ａｕ、Ａｇ等のろう材を用いてもよい。
【００１３】
実施の形態２．
この実施の形態では、中間材に銅系複合材料を用いてＭｏ−Ｍｎ法で接合した場合について説明する。直径１５ｍｍ、長さ２５ｍｍのアルミナ製の絶縁セラミックス１の接合面に、厚さ３０μmのＭｏ−Ｍｎのメタライズ層２を作り、その上に電解法で厚さ５μmのＮｉのめっき層３を形成させた。そして、厚さ１ｍｍのＣｕ−２０質量％Ｗ、Ｃｕ−５０質量％Ｍｏおよび、Ｃｕ／Ｍｏ／Ｃｕ（１：２：１、４７質量％Ｃｕ）の３種の中間材４とめっきを施した絶縁セラミックス１の間に厚さ５０μmのＢＮｉ−７（Ｎｉ−１３％Ｃｒ−１０％Ｐ）のろう材ａ５の箔を配置し、１ｋｇの荷重を加えながら真空中９５０℃×２０分で加熱し接合した。続いて、絶縁セラミックス１に接合した中間材４の上に直径１５ｍｍ、長さ２５ｍｍのステンレス鋼（ＳＵＳ３０４）の金属部材６を接合するため、ＢＡｇ−１８（Ａｇ−３０％Ｃｕ−１０％Ｓｎ−０．０２５％Ｐ）のろう材ｂ７を中間材４と金属部材６の間に置き、１ｋｇの荷重を加えながら真空中８２０℃×２０分で加熱し接合体を得た。比較材は中間材４を設けずに、アルミナ製絶縁セラミックス１とＳＵＳ３０４製金属部材６をＭｏ−Ｍｎ法でＢＮｉ−７を用いて真空中９５０℃×２０分で加熱し接合した。この絶縁操作ロッドの接合性を調べるために、外観検査と引張試験による接合強度を測定した。その結果を表１の実施の形態２（Ｎｏ４〜６）に示す。参考例であるＮｏ４および５、本発明であるＮｏ６では、セラミックスの亀裂や接合部の剥離、変形は見られなかった。引張試験を行った結果、参考例および本発明では引張強度が２３ｋｇｆ／ｍｍ²以上で、比較材Ｎｏ１２と比べて接合強度が高く、破断部は接合部近辺のセラミックス内部で破断したことから良好な接合が得られた。また、本実施の形態では絶縁セラミックス１と中間材４との接合をＭｏ−Ｍｎ法で実施したが、Ｔｉ−Ａｇ−Ｃｕろう材、Ｚｒ−Ａｇ−Ｃｕろう材、Ｔｉ−Ｃｕろう材等を用いた活性金属法で接合してもよい。また、銅系複合材料はＣｒ、ＷＣ、Ｃ、Ａｌ₂Ｏ₃、ＳｉＣ等の粒子をＣｕと複合化したものであってもよい。
【００１４】
実施の形態３．
上記実施の形態２では銅系複合材料が、ＣｕにＭｏまたはＷの粒子を複合化したもの、およびＣｕ／Ｍｏ／Ｃｕのクラッド材を用いた場合ついて説明したが、図２の横断面図に示すような銅またはその合金８に貫通孔を設けその貫通孔にセラミックス９を加熱嵌合した銅系複合材を中間材４として接合してもよい。以下この例について述べる。
加熱嵌合した銅系複合材は直径３０ｍｍ、長さ１０ｍｍの無酸素銅８に、直径５．０００ｍｍの貫通孔を７ヶ所設け、その貫通孔に直径５．００２ｍｍ、長さ１０ｍｍのアルミナのセラミックス９を１０００℃で加熱嵌合を行い、セラミックスの体積率が２０％にしたものを得た。そして、直径３０ｍｍ、長さ２５ｍｍのアルミナ製の絶縁セラミックス１と直径３０ｍｍ、長さ２５ｍｍのステンレス鋼（ＳＵＳ３０４）の金属部材６との間に銅系複合材の中間材４を配置し、アルミナ製絶縁セラミックス１と中間材４の間および金属部材６と中間材４の間にはＣｕ−２８ｗｔ％Ｔｉの活性金属ろう材１０の箔を置き、１ｋｇの荷重を加えながら真空中９５０℃×２０分間加熱し接合体を得た。図３に絶縁操作ロッドの縦断面図を示す。絶縁操作ロッドの接合性を調べるために、外観検査と引張試験による接合強度を測定した。その結果を表１の実施の形態３の本発明であるＮｏ７に示す。この例も接合性が良好で、引張強度が２３ｋｇｆ／ｍｍ²以上であった。
【００１５】
実施の形態４．
この実施の形態では、炭素鋼の冷却速度を制御した時の低熱膨張特性を利用して、セラミックスと炭素鋼を直接接合した例について説明する。直径１５ｍｍ、長さ２５ｍｍのジルコニア製絶縁セラミックス１と直径１５ｍｍ、厚さ１ｍｍの炭素鋼（Ｓ４５Ｃ）の中間材４との間に、Ｃｕ−２８ｗｔ％Ｔｉの活性金属ろう材８の箔を配置し、１ｋｇの荷重を加えながら真空中９５０℃×２０分間加熱し、５０ｓｅｃ以上の冷却速度を得るために、冷却槽の中に移動させて接合した。続いて、ジルコニア製絶縁セラミックス１に接合した炭素鋼の中間材４の上に直径１５ｍｍ、長さ２５ｍｍのステンレス鋼（ＳＵＳ３０４）の金属部材６を接合するため、ＢＡｇ−１８（Ａｇ−３０％Ｃｕ−１０％Ｓｎ−０．０２５％Ｐ）のろう材ｂ７を中間材４と金属部材６の間に置き、１ｋｇの荷重を加えながら真空中８２０℃×２０分で加熱し接合体を得た。図４に活性金属法を適用したこの実施の形態に係る絶縁操作ロッドの断面図を示す。比較材は５０ｓｅｃ以下で冷却してジルコニア製絶縁セラミックス１と中間材４を接合したものである。
上記絶縁操作ロッドの接合性を調べるために、外観検査と接合強度を測定した結果を表１の実施の形態４（Ｎｏ８）に示す。参考例であるＮｏ８では、セラミックスの亀裂や接合部の剥離、変形は見られず良好な接合が得られた。引張試験を行った結果、この参考例では引張強度が２３ｋｇｆ／ｍｍ²以上で、破断部は接合部近辺のセラミックス内部で破断したことから良好な接合が得られた。比較例Ｎｏ１３は冷却速度を５０℃／ｓｅｃ以下にしたものであるが、接合部が剥離した。これにより、中間材として炭素鋼の接合が可能となり、金属部材との接合が容易となった。なお、本実施の形態では中間材として炭素鋼を用いたが、金属部材を炭素鋼として絶縁セラミックスと直接接合しても同様の効果がある。また、接合法は活性金属法の他にＭｏ−Ｍｎ法でもよい。
【００１６】
実施の形態５．
この実施の形態では、絶縁セラミックス１と金属部材６との間に降伏応力が４〜１０ｋｇｆ／ｍｍ²の銅またはその合金を中間材として設け、Ｍｏ−Ｍｎ法で接合した場合について説明する。直径１５ｍｍ、長さ２５ｍｍのアルミナ製の絶縁セラミックス１の接合面に、厚さ３０μmのＭｏ−Ｍｎのメタライズ層２を作り、その上に電解法で厚さ５μmのＮｉめっき層３を形成させた。そして、厚さが０．５ｍｍの無酸素銅板（Ｃ１０２０）とＣｕ−０．８重量％Ｃｒの２種類を中間材４とし、めっきを施したセラミックスの間に厚さ５０μmのＢＮｉ−７のろう材ａ５の箔を配置し、１ｋｇの荷重を加えながら真空中９５０℃×２０分加熱して接合した。続いて、絶縁セラミックス１に接合した中間材４の上に直径１５ｍｍ、長さ２５ｍｍのステンレス鋼（ＳＵＳ３０４）の金属部材６を接合するため、ＢＡｇ−１８（Ａｇ−３０％Ｃｕ−１０％Ｓｎ−０．０２５％Ｐ）のろう材ｂ７を中間材４と金属部材６の間に置き、１ｋｇの荷重を加えながら真空中８２０℃×２０分で加熱し接合体を得た。比較材は中間材４を設けずにＳＵＳ３０４製金属部材６を接合し、真空中９５０℃×２０分でＭｏ−Ｍｎ法でＢＮｉ−７で接合したものと、中間材４として降伏応力が１７．５ｋｇｆ／ｍｍ²のＣｕ−３０重量％Ｎｉを使用したものを作製した。以上の絶縁操作ロッドの接合性を調べるために、外観検査と引張試験による接合強度を測定した結果を表１の実施の形態５（Ｎｏ９、Ｎｏ１０）に示す。参考例であるＮｏ９および本発明であるＮｏ１０は、セラミックスの亀裂や接合部の剥離、変形は見られなかった。引張試験を行った結果、参考例および本発明では引張強度が２３ｋｇｆ／ｍｍ²以上で、比較例Ｎｏ１２やＮｏ１４と比べて接合強度が高く、破断部は接合部近辺のセラミック内部で破断し良好な接合が得られた。本実施の形態では絶縁セラミックス１と中間材４との接合をＭｏ−Ｍｎ法で実施したが、Ｔｉ−Ａｇ−Ｃｕろう材やＺｒ−Ａｇ−Ｃｕろう材、Ｔｉ−Ｃｕろう材等を用いる活性金属法で接合してもよい。
【００１７】
実施の形態６．
この実施の形態では、セラミックスと金属の熱膨張差を利用して接合する焼きばめ法と、ろう材を用いて接合する面接合法を併用した実施の形態について説明する。図５にこの実施の形態に係る絶縁操作ロッドの縦断面図を示す。１は接合部が凸形状の絶縁セラミックス、６は接合部が凹形状の金属部材、８は活性金属ろう材である。
外径２０ｍｍ、長さ６０ｍｍで、接合部の凸部寸法が径１４．００１ｍｍ、高さ５ｍｍのアルミナ製絶縁セラミックス１と、外径２０ｍｍ、長さ３０ｍｍで、接合部の凹部寸法が径１４．０００ｍｍ、深さ５ｍｍのＳＵＳ３０４製の金属部材６を準備した。この絶縁セラミックス１と金属部材６の接合部を突き合わせ、軸方向に対して直角な面の間にＣｕ−２８ｗｔ％Ｔｉの活性金属ろう材１０を配置して、１ｋｇの荷重をかけながら真空中９５０℃×２０分間加熱し、嵌合とろう付けを同時に行い接合体を得た。また、比較材として、この実施の形態と同様の外寸の円柱状の絶縁セラミックス１と金属部材６を準備し、同様の接合法で面接合した。
この実施の形態に係る絶縁操作ロッドについて引張試験を実施した結果を表１の実施の形態６のＮｏ１１に示す。参考例であるＮｏ１１は２３ｋｇｆ／ｍｍ²以上の引張強度が得られたが、比較例のＮｏ１５の引張強度は７．５ｋｇｆ／ｍｍ²であった。破壊した接合体を観察すると、本発明材はセラミックス内部で破断し、接合が強固なものであった。比較材のＮｏ１５はセラミックスとろう材の界面で破壊が発生した。この結果より、比較材はこの参考例より引張強度が劣っており、焼きばめ法による嵌合とろう付けの面接合を併用したこの参考例は良好な接合が得られた。本実施の形態では、セラミックスに凸部と金属部材に凹部を１つ設けたものについて説明したが、二つ以上設けることで、接合面積の大きなものも接合できる。
【００１８】
【表１】

【００１９】
この発明によれば、中間材として、Ｍｏをサンドイッチした三層構造のクラッド材を設け、このクラッド材が二層のＣｕ間に２０〜８０質量％となるようにＭｏをサンドイッチした三層構造のクラッド材であるので、接合性に一層優れた絶縁操作ロッドが得られる。
【００２０】
この発明によれば、中間材の銅の合金は、降伏応力が８〜９ｋｇｆ／ｍｍ²であってＡｇを０．０３〜０．１５質量％含有するＣｕ合金；Ｃｒを０．８質量％含有するＣｕ合金；あるいはＺｒを０．１５質量％含有するＣｕ合金であるので、接合性に一層優れた絶縁操作ロッドが得られる。
【００２１】
この発明によれば、中間材に貫通孔を設け、かつ前記貫通孔にセラミックスを嵌合させたものを、前記セラミックスと前記金属部材との間に設けたので、接合性に一層優れた絶縁操作ロッドが得られる。
【００２２】
この発明によれば、請求項１ないし請求項３の何れか１項に記載の絶縁操作ロッドの製造方法であって、前記セラミックスと前記金属部材との間に、中間材として、Ｍｏをサンドイッチした三層構造のクラッド材；あるいは銅の合金；を設け、前記セラミックスと前記金属部材とを接合するので、熱膨張差による応力を軽減、緩衝し、接合性に優れた絶縁操作ロッドが得られる。
【００２３】
【図面の簡単な説明】
【図１】実施の形態１に係る絶縁操作ロッドの一実施態様の断面図である。
【図２】銅系複合材料の一実施態様の横断面図である。
【図３】実施の形態３に係る絶縁操作ロッドの一実施態様の縦断面図である。
【図４】活性金属法を適用した実施の形態４に係る絶縁操作ロッドの一実施態様の断面図である。
【図５】焼きばめと面接合を併用した実施の形態６に係る絶縁操作ロッドの一実施態様の断面図である。
【図６】従来の絶縁継手の断面図である。
【符号の説明】
１絶縁セラミックス、２メタライズ層、３めっき層、４中間材、５ろう材ａ、６金属部材、７ろう材ｂ、８銅またはその合金、９セラミックス、１０活性金属ろう材、１１筒状セラミックス、１２継手、１３Ａｇろう材。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an insulating operating rod for a switchgear that requires insulation and transmission of operating force in a vacuum vessel and a method for manufacturing the same.
[0002]
[Prior art]
FIG. 6 shows a cross-sectional view of a conventional insulating joint shown in, for example, ceramic bonding and high-tech brazing issued by Industrial Technology Service Center Co., Ltd. 2 is a metallized layer, 11 is a cylindrical ceramic, 12 is a joint, and 13 is an Ag brazing material.
[0003]
Next, the operation will be described. The metallized layer 2 is formed on the creeping portions at both ends of the alumina cylindrical ceramic 11, heated to 820 ° C. in hydrogen, and the cylindrical ceramic 11 and the Kovar joint 10 are joined with the Ag brazing material 13 to form an insulating joint. I was getting.
[0004]
[Problems to be solved by the invention]
Insulating operation rods that perform insulation and transmission of operating force in a vacuum vessel are made by joining a ceramic member responsible for insulation with a highly conductive metal member or a metal member connected to an operation mechanism. When this rod is incorporated into a vacuum vessel, heat treatment is performed in a vacuum, so that sound bondability is required even after heat is applied. Moreover, the joining property which can endure operation force is also required. The conventional joining method shown in FIG. 1 is used to perform insulation and transmission of operating force in the atmosphere or gas. The joint 12 made of Kovar is joined to the cylindrical ceramic ceramic 11 made of alumina with the Ag brazing material 13. is doing. However, the brazing material is remelted at the heating temperature at the time of assembling the vacuum vessel and the initial joining state cannot be maintained, so that the joining property is deteriorated or the joining surface is parallel to the axial direction. Shear stress is applied to the material, and breakage easily occurs. In addition, since expensive Kovar is used as a joint, there is a problem that it is expensive.
[0005]
The present invention has been made to solve the above-described problems. In an insulating operation rod in which a ceramic and a metal member are joined to perform insulation and operation force transmission in a container in a vacuum. An object of the present invention is to provide an insulating operation rod in which members are well bonded and a method for manufacturing the same.
[0006]
[Means for Solving the Problems]
The present invention relates to an insulating operation rod in which ceramics and a metal member are joined, which insulates and transmits operating force in a vacuum container, and sandwiches Mo as an intermediate material between the ceramics and the metal member. An insulating operation rod characterized in that the clad material having a three-layer structure is provided, and the clad material is a clad material having a three-layer structure in which Mo is sandwiched between two layers of Cu so as to be 20 to 80% by mass. It is.
The present invention relates to an insulating operation rod in which a ceramic and a metal member are joined to perform insulation and operation force transmission in a vacuum vessel, and an alloy of copper as an intermediate material between the ceramic and the metal member. The copper alloy has a yield stress of 8-9 kgf / mm ² and contains 0.03-0.15 mass% of Ag; Cu alloy containing 0.8 mass% of Cr; Alternatively, the insulating operation rod is a Cu alloy containing 0.15% by mass of Zr.
The present invention is characterized in that a through hole is provided in the intermediate material and a ceramic is fitted in the through hole is provided between the ceramic and the metal member. It is an insulated operation rod as described in (4).
The present invention is the method for manufacturing an insulating operating rod according to any one of claims 1 to 3, wherein Mo is sandwiched between the ceramics and the metal member as an intermediate material. Any one of a clad material having a layer structure; or an alloy of copper is provided, and the ceramic and the metal member are joined together.
[0007]
The insulating operation rod according to the present invention is formed by arranging and joining a copper-based composite material or an intermediate material of a copper alloy between a ceramic and a metal member, and is generated due to a difference in thermal expansion between the ceramic and the metal member. The stress at the joint can be relaxed or buffered, and the bondability can be improved at a low cost.
[0008]
Here, a suitable composition range of the Fe—Ni-based alloy will be described. The Fe—Ni alloy suitably used in the present invention is an Fe—Ni alloy containing 20 to 50% by mass of Ni; an Fe—Ni system containing 20 to 50% by mass of Ni and 3 to 25% by mass of Co. Alloy: Fe-Ni alloy containing 20 to 50% by mass of Ni and 1 to 12% by mass of Cr; or the above Fe-Ni alloy containing 20 to 50% by mass of Ni and 3 to 25% by mass of Co And Fe—Ni-based alloys containing one or two of 0.5 to 5 mass% of C and 0.1 to 3 mass% of Si and Mn. These Fe—Ni-based alloys can also contain a low expansion metal called Invar, Elinvar, Fernico, 42 alloy, Kovar or the like. The range of the thermal expansion coefficient of each oxide, nitride, and carbide ceramic is 4 to 12 × 10 ⁻⁶ / K. In order to reduce the stress caused by the difference in thermal expansion between the insulating ceramic and the metal member, the ceramic and intermediate It is necessary to match the thermal expansion coefficient of the material. When Fe, Ni, Co, Cr, C, Si, and Mn are added in the above range, a thermal expansion coefficient of 4 to 12 × 10 ⁻⁶ / K is obtained, and an intermediate thermal expansion characteristic between the ceramic and the metal member is obtained. By selecting the Fe—Ni-based alloy to be shown, the generated stress can be relaxed and the bondability is improved.
[0009]
Next, the suitable composition range of a copper-type composite material is demonstrated. The copper-based composite material suitably used in the present invention is a composite of Mo or W particles in Cu in the range of 40 to 90% by mass; or 20 to 80% by mass between two layers of Cu. It is a clad material having a three-layer structure in which Mo is sandwiched between the two. This is also determined to obtain 4 to 12 × 10 ^-6 / K, which is close to the thermal expansion coefficient of ceramics, and is generated by selecting a copper-based composite material that exhibits intermediate thermal expansion characteristics between ceramics and metal members. Stress can be relieved and bondability is improved. Furthermore, the clad material in which Mo is sandwiched with Cu also plays a role of buffering thermal stress generated between the ceramic and the metal member.
[0010]
The copper alloy plays a role in buffering the stress generated by the difference in thermal expansion between the ceramic and the metal member, thereby obtaining a sound joint. The yield stress of the copper alloy is preferably 4 to 10 kgf / mm ² . The reason is that 4 kgf / mm ² is a value determined from the yield stress of pure copper, and when the upper limit of 10 kgf / mm ² is exceeded, it is difficult to obtain an effect of buffering the stress generated in the joint. Moreover, the copper alloy which shows the yield stress of the said range is Cu-0.03-0.15 weight% Ag alloy (annealing material, 8 kgf / mm < ² >), Cu-0.8 weight% Cr alloy (annealing material, 9 kgf / mm ² ), Cu-0.15 wt% Zr alloy (annealed material, 9 kgf / mm ² ) and the like. The reason for selecting the copper alloy will be described below. When the insulating operation rod is incorporated in the vacuum vessel, the vacuum vessel is assembled by heating to 800 to 1000 ° C. in a vacuum. Metals such as Al, Pb, In, Bi, Zn, Sn, Mg, and copper-based alloys containing them also show a yield stress of 10 kgf / mm ² or less, but are heated to 800 to 1000 ° C. in a vacuum. This is because these low-melting-point metals become metal vapor, which contaminates the inside of the vacuum vessel and the surface of the ceramics, resulting in a problem of lowering the insulation characteristics and the like. The yield stress referred to here is a stress value that causes a permanent elongation of 0.2% of the original length.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
Embodiment 1 FIG.
Hereinafter, this embodiment will be described. Figure 1 shows a cross-sectional view of the insulated operating rod according to the embodiment. In FIG. 1, 1 is an insulating ceramic, 2 is a metallized layer, 3 is a plating layer, 4 is an intermediate material, 5 is a brazing material a, 6 metal members, and 7 is a brazing material b.
[0012]
In this embodiment, a case where an Fe—Ni-based alloy is used as an intermediate material and bonded by the Mo—Mn method will be described. A Mo-Mn metallized layer 2 having a thickness of 30 μm is formed on a bonding surface of an alumina insulating ceramic 1 having a diameter of 15 mm and a length of 25 mm, and a Ni plating layer 3 having a thickness of 5 μm is formed thereon by an electrolytic method. It was. And 1-mm thick Fe-42 mass% Ni, Fe-29 mass% Ni-17 mass% Co, and Fe-32 mass% Ni-5 mass% Co-2 mass% Si-0.2 mass% Mn Three kinds were used as the intermediate material 4. A 50 μm thick BNi-7 (Ni-13% Cr-10% P) brazing foil a5 foil is placed between the intermediate material 4 and the plated insulating ceramic 1, and a vacuum is applied while applying a load of 1 kg. It was heated and joined at 950 ° C. for 20 minutes. Subsequently, in order to join a metal member 6 of stainless steel (SUS304) having a diameter of 15 mm and a length of 25 mm on the intermediate material 4 joined to the insulating ceramic 1, BAg-18 (Ag-30% Cu-10% Sn- 0.025% P) brazing material b7 was placed between the intermediate material 4 and the metal member 6 and heated in vacuum at 820 ° C. for 20 minutes while applying a load of 1 kg to obtain a joined body. As a comparative material, the alumina insulating ceramic 1 and the SUS304 metal member 6 were heated and bonded in a vacuum at 950 ° C. for 20 minutes using BNi-7 by the Mo—Mn method without providing the intermediate material 4. In order to investigate the bondability of this insulating operation rod, the bonding strength was measured by appearance inspection and tensile test. The results are shown in Embodiment 1 (Nos. 1 to 3) in Table 1. In the reference examples No1, No2, and No3, no cracks in the ceramics and no peeling or deformation of the joints were observed. In Comparative Example No. 12, cracks occurred in the ceramics. Result of the tensile test, the tensile strength in Reference example No1 is 15kgf / mm ^2, No2, No3 is at 23kgf / mm ² or more were significantly improved bonding strength with respect to 3 kgf / mm ² in comparison material. Further, since the fractured portion after the tensile test was fractured inside the ceramic near the bonded portion, a stronger bond than the strength of the ceramic was obtained. In this embodiment, Ni brazing material is used to join the insulating ceramic and the intermediate material, but brazing material such as Cu, Au, or Ag may be used.
[0013]
Embodiment 2. FIG.
In this embodiment, a case where a copper-based composite material is used as an intermediate material and bonded by the Mo-Mn method will be described. A Mo-Mn metallized layer 2 having a thickness of 30 μm is formed on a bonding surface of an alumina insulating ceramic 1 having a diameter of 15 mm and a length of 25 mm, and a Ni plating layer 3 having a thickness of 5 μm is formed thereon by an electrolytic method. It was. And it plated with three types of intermediate materials 4 of Cu-20 mass% W of thickness 1mm, Cu-50 mass% Mo, and Cu / Mo / Cu (1: 2: 1, 47 mass% Cu). A 50 μm thick BNi-7 (Ni-13% Cr-10% P) brazing foil a5 foil is placed between the insulating ceramics 1 and heated in a vacuum at 950 ° C. for 20 minutes while applying a 1 kg load. Joined. Subsequently, in order to join a metal member 6 of stainless steel (SUS304) having a diameter of 15 mm and a length of 25 mm on the intermediate material 4 joined to the insulating ceramic 1, BAg-18 (Ag-30% Cu-10% Sn- 0.025% P) brazing material b7 was placed between the intermediate material 4 and the metal member 6 and heated in vacuum at 820 ° C. for 20 minutes while applying a load of 1 kg to obtain a joined body. As a comparative material, the alumina insulating ceramics 1 and the SUS304 metal member 6 were heated and bonded in a vacuum at 950 ° C. for 20 minutes using BNi-7 by the Mo—Mn method without providing the intermediate material 4. In order to investigate the bondability of this insulating operation rod, the bonding strength was measured by appearance inspection and tensile test. The results are shown in Embodiment 2 (Nos. 4 to 6) in Table 1. In No. 4 and No. 5 which are reference examples and No. 6 which is the present invention, no cracks in the ceramics and no peeling or deformation of the joints were observed. As a result of the tensile test, in the reference example and the present invention , the tensile strength is 23 kgf / mm ² or more, the joint strength is higher than that of the comparative material No12, and the fractured portion is good because it broke inside the ceramic near the jointed portion. Bonding was obtained. In this embodiment, the insulating ceramic 1 and the intermediate material 4 are joined by the Mo-Mn method. However, a Ti-Ag-Cu brazing material, a Zr-Ag-Cu brazing material, a Ti-Cu brazing material, or the like is used. You may join by the used active metal method. Further, the copper-based composite material may be a composite of particles such as Cr, WC, C, Al ₂ O ₃ , and SiC with Cu.
[0014]
Embodiment 3 FIG.
In the second embodiment, the case where the copper composite material is a composite of Mo or W particles in Cu and a clad material of Cu / Mo / Cu is described. A copper-based composite material in which through holes are provided in copper or its alloy 8 as shown and ceramics 9 is heat-fitted in the through holes may be joined as the intermediate material 4. This example will be described below.
The heat-fitted copper-based composite material is provided with seven through holes with a diameter of 5.000 mm in oxygen-free copper 8 with a diameter of 30 mm and a length of 10 mm, and alumina ceramics with a diameter of 5.002 mm and a length of 10 mm in the through holes. 9 was heat-fitted at 1000 ° C. to obtain a ceramic having a volume ratio of 20%. Then, an intermediate material 4 of a copper-based composite material is disposed between an insulating ceramic 1 made of alumina having a diameter of 30 mm and a length of 25 mm and a metal member 6 of stainless steel (SUS304) having a diameter of 30 mm and a length of 25 mm, and made of alumina. A foil of Cu-28 wt% Ti active metal brazing material 10 is placed between the insulating ceramic 1 and the intermediate material 4 and between the metal member 6 and the intermediate material 4 while applying a 1 kg load at 950 ° C. for 20 minutes in a vacuum. Heated to obtain a joined body. FIG. 3 shows a longitudinal sectional view of the insulating operation rod. In order to examine the bondability of the insulating operation rod, the bonding strength was measured by appearance inspection and tensile test. The result is shown in No. 7 which is the present invention of Embodiment 3 in Table 1. This example also had good bondability and a tensile strength of 23 kgf / mm ² or more.
[0015]
Embodiment 4 FIG.
In this embodiment, an example in which ceramics and carbon steel are directly joined using low thermal expansion characteristics when the cooling rate of carbon steel is controlled will be described. A foil of an active metal brazing material 8 of Cu-28 wt% Ti is arranged between an insulating ceramic 1 made of zirconia having a diameter of 15 mm and a length of 25 mm and an intermediate material 4 of carbon steel (S45C) having a diameter of 15 mm and a thickness of 1 mm. Heating was performed in a vacuum at 950 ° C. for 20 minutes while applying a load of 1 kg, and in order to obtain a cooling rate of 50 seconds or more, they were moved into a cooling bath and joined. Subsequently, BAg-18 (Ag-30% Cu) is used to join a stainless steel (SUS304) metal member 6 having a diameter of 15 mm and a length of 25 mm on the carbon steel intermediate material 4 joined to the insulating ceramic 1 made of zirconia. A brazing material b7 of −10% Sn−0.025% P) was placed between the intermediate material 4 and the metal member 6 and heated in vacuum at 820 ° C. for 20 minutes while applying a load of 1 kg to obtain a joined body. FIG. 4 shows a cross-sectional view of the insulating operation rod according to this embodiment to which the active metal method is applied. The comparative material is cooled at 50 sec or less and joined with the insulating ceramic 1 made of zirconia and the intermediate material 4.
In order to investigate the bondability of the insulating operation rod, the results of visual inspection and bonding strength measurement are shown in Embodiment 4 (No. 8) of Table 1. In No. 8 , which is a reference example, good bonding was obtained without any cracks in the ceramics, peeling or deformation of the bonded parts. As a result of performing a tensile test, in this reference example , the tensile strength was 23 kgf / mm ² or more, and the fractured portion was fractured inside the ceramic near the junction, and thus good bonding was obtained. In Comparative Example No. 13, the cooling rate was set to 50 ° C./sec or less, but the joint part was peeled off. Thereby, joining of carbon steel as an intermediate material became possible, and joining with a metal member became easy. In this embodiment, carbon steel is used as an intermediate material, but the same effect can be obtained by directly joining a metal member to insulating ceramics as carbon steel. In addition to the active metal method, the Mo—Mn method may be used as the bonding method.
[0016]
Embodiment 5. FIG.
In this embodiment, a case where copper having an yield stress of 4 to 10 kgf / mm ² or an alloy thereof is provided as an intermediate material between the insulating ceramic 1 and the metal member 6 and bonded by the Mo—Mn method will be described. A 30 μm thick Mo—Mn metallized layer 2 was formed on the bonding surface of alumina insulating ceramics 1 having a diameter of 15 mm and a length of 25 mm, and a 5 μm thick Ni plating layer 3 was formed thereon by electrolytic method. . Then, an oxygen-free copper plate (C1020) having a thickness of 0.5 mm and Cu-0.8 wt% Cr are used as an intermediate material 4 and a 50 μm-thick BNi-7 braze between the plated ceramics. The foil of the material a5 was placed and joined by heating at 950 ° C. for 20 minutes in a vacuum while applying a 1 kg load. Subsequently, in order to join a metal member 6 of stainless steel (SUS304) having a diameter of 15 mm and a length of 25 mm on the intermediate material 4 joined to the insulating ceramic 1, BAg-18 (Ag-30% Cu-10% Sn- 0.025% P) brazing material b7 was placed between the intermediate material 4 and the metal member 6 and heated in vacuum at 820 ° C. for 20 minutes while applying a load of 1 kg to obtain a joined body. The comparative material was obtained by joining the metal member 6 made of SUS304 without providing the intermediate material 4 and joining with BNi-7 by the Mo-Mn method at 950 ° C. for 20 minutes in vacuum, and the intermediate material 4 having a yield stress of 17. the 5 kgf / mm ² of Cu-30 wt% Ni was prepared that used. In order to examine the bondability of the above-described insulating operation rod, the results of measuring the bonding strength by the appearance inspection and the tensile test are shown in Embodiment 5 (No. 9, No. 10) of Table 1. No No. 9 as a reference example and No. 10 according to the present invention did not show cracks in the ceramics, peeling of the joints, or deformation. As a result of the tensile test, in the reference example and the present invention, the tensile strength is 23 kgf / mm ² or more, the joint strength is higher than that of Comparative Examples No12 and No14, and the fractured portion is fractured inside the ceramic in the vicinity of the jointed portion. Bonding was obtained. In this embodiment, the insulating ceramic 1 and the intermediate material 4 are joined by the Mo-Mn method. However, the activity using a Ti-Ag-Cu brazing material, a Zr-Ag-Cu brazing material, a Ti-Cu brazing material, or the like. You may join by a metal method.
[0017]
Embodiment 6 FIG.
In this embodiment, a description will be given of an embodiment in which a shrink-fitting method in which bonding is performed using a difference in thermal expansion between ceramics and metal and a surface bonding method in which bonding is performed using a brazing material are used in combination. FIG. 5 shows a longitudinal sectional view of the insulating operation rod according to this embodiment . Reference numeral 1 denotes insulating ceramics having a convex joint, 6 is a metal member having a concave joint, and 8 is an active metal brazing material.
Alumina insulating ceramic 1 having an outer diameter of 20 mm, a length of 60 mm, and a convex portion dimension of the joint portion of 14.001 mm and a height of 5 mm, and an outer diameter of 20 mm and a length of 30 mm, and a concave portion dimension of the joint portion of 14. A metal member 6 made of SUS304 having a thickness of 000 mm and a depth of 5 mm was prepared. The joint between the insulating ceramic 1 and the metal member 6 is abutted, and an active metal brazing filler metal 10 of Cu-28 wt% Ti is disposed between the surfaces perpendicular to the axial direction, and 950 in a vacuum while applying a load of 1 kg. Heating was performed at 20 ° C. for 20 minutes, and fitting and brazing were simultaneously performed to obtain a joined body. Further, as a comparative material, a cylindrical insulating ceramic 1 and a metal member 6 having the same outer dimensions as those of this embodiment were prepared, and surface bonding was performed by the same bonding method.
The result of conducting a tensile test on the insulating operating rod according to this embodiment is shown in No. 11 of Embodiment 6 in Table 1 . Although No11 which is a reference example had a tensile strength of 23 kgf / mm ² or more, the tensile strength of No15 of the comparative example was 7.5 kgf / mm ² . When the fractured bonded body was observed, the material of the present invention was broken inside the ceramic and the bonding was strong. In the comparative material No15, fracture occurred at the interface between the ceramic and the brazing material. From this result, the comparative material has poor tensile strength than this reference example, the reference example in combination interviewed case of fitting and brazing by fit method shrink is favorable bond was obtained. In the present embodiment, a description has been given of a ceramic provided with a convex portion and a metal member provided with a single concave portion. However, by providing two or more ceramics, a ceramic having a large bonding area can be bonded.
[0018]
[Table 1]

[0019]
According to this invention, an intermediate material, Mo and provided clad material having a three-layer structure is sandwiched, three-layer structure is sandwiched a Mo as the cladding material is 20 to 80 mass% among Cu bilayer Therefore, an insulating operation rod having a further excellent bondability can be obtained.
[0020]
According to the present invention, the intermediate copper alloy is a Cu alloy having a yield stress of 8-9 kgf / mm ² and containing 0.03-0.15 mass% of Ag; 0.8 mass% of Cr Since it is a Cu alloy containing; or a Cu alloy containing 0.15% by mass of Zr, it is possible to obtain an insulating operation rod with further excellent bondability.
[0021]
According to this invention, since the through-hole provided in the intermediate material and the ceramics fitted into the through-hole are provided between the ceramic and the metal member, the insulation operation with further improved bonding properties A rod is obtained.
[0022]
According to this invention, in the method for manufacturing an insulating operation rod according to any one of claims 1 to 3 , Mo is sandwiched as an intermediate material between the ceramic and the metal member. A clad material having a three-layer structure; or a copper alloy is provided, and the ceramic and the metal member are joined together. Therefore, an insulating operation rod excellent in joining property can be obtained by reducing and buffering stress due to a difference in thermal expansion.
[0023]
[Brief description of the drawings]
1 is a cross-sectional view of one embodiment of the insulated operating rod according to the first embodiment.
FIG. 2 is a cross-sectional view of one embodiment of a copper-based composite material.
FIG. 3 is a longitudinal sectional view of one embodiment of an insulating operation rod according to a third embodiment.
FIG. 4 is a cross-sectional view of one embodiment of an insulating operating rod according to a fourth embodiment to which the active metal method is applied.
FIG. 5 is a cross-sectional view of one embodiment of an insulating operating rod according to a sixth embodiment in which shrink fitting and surface bonding are used together.
FIG. 6 is a cross-sectional view of a conventional insulating joint.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Insulating ceramics, 2 Metallized layer, 3 Plating layer, 4 Intermediate material, 5 Brazing material a, 6 Metal member, 7 Brazing material b, 8 Copper or its alloy, 9 Ceramics, 10 Active metal brazing material, 11 Cylindrical ceramics, 12 joint, 13 Ag brazing material.

Claims

A three-layer structure in which Mo is sandwiched between the ceramics and the metal member as an intermediate material in an insulating operation rod in which the ceramic and the metal member are joined to perform insulation and operation force transmission in a vacuum vessel. Of clad material,
An insulating operating rod, wherein the clad material is a clad material having a three-layer structure in which Mo is sandwiched between two layers of Cu so as to be 20 to 80% by mass.

Insulating and operating force transmission in a container in a vacuum, in an insulating operation rod in which a ceramic and a metal member are joined, a copper alloy is provided as an intermediate material between the ceramic and the metal member,
The copper alloy has a yield stress of 8-9 kgf / mm ² and a Cu alloy containing 0.03 to 0.15% by mass of Ag; a Cu alloy containing 0.8% by mass of Cr; or Zr An insulating operation rod comprising a Cu alloy containing 0.15% by mass.

3. The intermediate material according to claim 1, wherein a through hole is provided in the intermediate material and a ceramic is fitted into the through hole is provided between the ceramic and the metal member. Insulation operation rod.

The method for manufacturing an insulating operation rod according to any one of claims 1 to 3, wherein the clad material has a three-layer structure in which Mo is sandwiched between the ceramics and the metal member as an intermediate material. Or an alloy of copper; and the ceramics and the metal member are joined to each other.