A7 419623 B7 五、發明說明（） [發明的技術領域] 本發明係有關須在真空令之容器内提供絕緣及傳達操 作力的開關裝置之絕緣桿及其製造方法者。 [習用技術] 第0圖為日本國產業技術服務中心（股份）發行的「陶 兗接頭及硬焊光端技術」一書中所記載的習用絕緣接頭之 剖面圖。圖令’ 2為金屬化層（metallized layer)、11為筒 狀陶瓷、12為接頭、13為銀桿料。 兹就其工序說明於後，以往係採用以氧化鋁製成的筒 狀陶瓷11兩端的圓周面部分形成金屬化層2後，在氫氣 中加熱至82〇C ’將筒狀陶竟11與由河華合金（k〇var)製 成的接頭12’以銀烊料13接合而製得絕緣接頭之方法。 [發明所欲解決的問題] 在真空中的容器内提供絕緣及傳遞操作力的絕緣操作 桿’係於提供絕緣的陶瓷上接合供作連結於高導電性金屬 構件’或操作機構之用的金屬構件而成者。將該操作桿組 裝於真空容器時*尚須於真空中進行加熱處理，故經加熱 後仍需具備健全的接合性。同時亦需要有耐操作力的接合 性。第6圖所示的習用接合法，為於大氣中或於氣體_提 供絕緣及傳遞操作力而構成’係將河華合金製的接頭12， 以銀焊料13接合於氧化鋁製成的筒狀陶瓷11。惟會因組 裝真空容器時的加熱溫度’使該焊料再度熔化而不能維持 初期接合狀態’以致接合性降低，且因接合面與轴方向平 行，在該接合面產生對拉力的剪斷應力，容易造成破壞現 (請先間讀背面之注意事項再填窝本頁) r 經濟部智慧財產局員工消費合作社印製 -------- ^ ---------^ 本紙張尺度適用中國國家槔準（CNS)A4規格（210 X 297公釐〉 1 310723 419623 Λ7 B7 五、發明說明（2 ) 象。又因，以高價位的珂華合金製作接頭，有其為較高成 本的問題存在》 本發月係為解除上述問題點而作者，係提供一種於得 以在真二中之谷器内，提供絕緣及操作力傳遞之由陶瓷與 金屬構件相互接合的絕緣操作桿令’能於陶瓷及金屬構件 間，具有良好接合的絕緣操作桿及其製造方法為目的。 [解決問題的手段] 申清專利範圍第1項的發明，係於真空中之容器内， 提供絕緣及操作力傳遞之由陶瓷與金屬構件相互接合的絕 緣操作桿申，以在上述陶瓷與上述金屬構件間，以以沁 系合金、銅系複合料、碳鋼、或銅或其合金’做為中間材 而予以設置為其特徵者》 申請專利範圍第2項的發明，係於申請專利範圍第i 項記載的絕緣操作桿中，該中間材的Fe-Ni系合金係含有 20至50質量％Ni的Fe_Ni合金、含有2〇至5〇質量％沁 及3至25質量％Co的Fe-Ni合金、含有20至50質量 及1至12質量％(^1*的Fe-Ni合金、或於含有2〇至50質 量％Ni及3至25質量％Co的上述Fe-Ni合金令含有0 5 至5質量/SC與0.1至3質量％的Si及Μη之任何一種或 二種的Fe-Ni合金者。 申請專利範圍第3項的發明，係於申請專利範圍第1 項記載的絕緣操作桿中，該中間材的銅系複合料，係於Cu 中將Mo或W的粒子以40至90質量％的範圍予以複合化 者、或於雙層的Cu間，使Mo以20至80質量。/。的比率 (請先閱讀背面之泫意事項再填寫本頁) 裝---------訂---------级 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS>yM規格（210x 297公釐） 2 310723 經濟部智慧財產局員工消費合作社印製 Α7 B7 五、發明說明（3 ) 予以夹住成三明治式三層構造的復合（clad)材者β 申請專利範圍第4項的發明，係於申請專利範圍第1 項記載的絕緣操作桿中，該中間材的銅或其合金之屈服應 力（yield stress)為 4 至 10 kgf/mm2 者 β 申請專利範圍第5項的發明，係於申請專利範圍第J 至4項中任何一項記載的絕緣操作桿中，在其中間材設貫 穿孔’且於上述貫穿孔嵌合陶瓷後，將該中間材設於上述 陶瓷與上述金屬構件間者。 申請專利範圍第6項的發明，係於真空中之容器内， 提供絕緣及操作力傳遞之由陶瓷與金屬構件相互接合的絕 緣操作桿的製造方法，其特徵為併用在上述陶瓷與上述金 屬構件間，以Fe-Ni系合金、銅系複合料、碳銅、或銅或 其合金做為中間材而予以設置，以接合上述陶究與上述金 屬構件者。 申請專利範圍第7項的發明，係於申請專利範圍第6 項記載的絕緣操作桿的製造方法中，該中間材的碳鋼以5〇 至200°C /sec範圍的冷卻速度與陶瓷接合者。 申請專利範圍第8項的發明，係於呈真空之容器内， 提供絕緣及操作力傳遞之由陶瓷與金屬構件相互接合的絕 緣操作桿製造中之該陶瓷與金屬所成的絕緣操作桿的製造 方法’其特徵為併用在陶竞與金屬構件上設1個以上的凸 部及凹部’而加熱丧合的收縮配合（shrink fit)法及將該喪 合平面予以硬焊的接合法者。 本發明中的絕緣操作桿，係於陶瓷與金屬構件間，配 <請先閱讀背面之注意事項再填寫本頁) --------訂·--------竣 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 3 310723 經濟部智慧財產局員工消費合作社印製 ' :y b 2 3 A7 _ ίϊ：_______ 五、發明說明（4 ) 置Fe-Ni系合金、銅系複合料、碳鋼、或銅或其合金，做 為中間材而予以接合者。可予以緩和或緩衝因陶瓷與金屬 構件的熱膨脹差所發生於接合部的應力，可以廉償的方式 提升接合性。又採用併用於陶瓷設置凸部及於金屬構件設 置凹部’而予以加熱嵌合的收縮配合法及硬焊該嵌合平面 的接合法之二方法以提升其接合性。 其次’說明Fe-Ni系合金的較理想的組成範圍於後。 適合於本發明中使用的Fe-Ni系合金為含有20至50質量 %Ni的Fe-Ni合金、含有20至50質量％Ni及3至25質 量0/〇Co的Fe-Ni合金、含有20至50質量％Ni及1至12 質量％Cr的Fe-Ni合金、或於含有20至50質量％Ni及3 至25質量％Co的上述Fe-Ni合金中含有0.5至5質量0/〇C 與0.1至3質量％的Si及Μη之任何一種或二種的Fe-Ni 合金者。這些Fe-Ni係合金得以包含被稱為「恒範鋼 (invar)」、「恒彈性鋼（elinvar)」、「費里姑（fernico)」'「42-合金（42-alloy)」、「珂華合金」等低膨脹金屬《因氧化物、 氮化物、碳化物之各陶瓷的熱膨脹係數範圍為4至12 X 1 (Τ6/Κ，為減輕起因於絕緣陶瓷與金屬構件之熱膨脹差的 應力，須將陶瓷及中間材的熱膨脹係數予以匹配。而於Fe 中，以上述範圍添加Ni、Co、Cr、C、Si、Μη即可獲得 4至12 Xl〇-6/K之熱膨脹係數，因此，選擇具有陶瓷與金 屬構件之中間熱膨脹特性的Fe-Ni系合金，便可緩和所發 生的應力而提升其接合性。 其次，就銅系複合料說明其較理想的组成範圍"適合 —-— — [I II—fif-----訂---------線 (請先閱讀背面之注意事項再填寫本買> 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 4 310723 :9 62 3 Λ7 07 五、發明說明（5 ) 於本發明中使用的銅系複合料有於Cu中將Mo或W的粒 子以40至90質量％的範圍予以複合化者、或於雙層的Cu 間’使Mo為20至80質量％的比率予以夾住成三明治式 三層構造的複合材者。此係也為獲得較近的陶瓷的熱膨脹 係數之4至12 X 1 0-6/K而採取者，藉由選擇具有陶瓷與 金屬構件之中間熱膨脹特性的銅系複合料，得以緩和發生 的應力而提升其接合性。又以Cu夹住]Vf〇所形成的三明 治式復合材’ Cu也能提供發生於陶瓷與金屬構件間的熱 應力之缓衝功能。 碳鋼若利用其冷卻時之變態的熱膨服特性，即可與陶 瓷直接接合’因而可使之與金屬構件的接合容易》特就接 合碳銅時的最適冷卻速度說明於後： 將共析碳鋼（eutectoid carbon steel,碳0.9%)加熱至 875°C，以使碳钥组織沃斯田化（austenitizing)後，若以水 淬化，冷卻至約300°C時的體積膨脹，則較加熱時的熱膨 膜為小，若以同條件冷卻至300 °C以下時，即碳鋼組織會 麻田散化（martensite)，體積反而膨脹之現象已為眾知β 碳鋼與陶瓷的接合係利用該熱膨脹變小之現象而予以接合 者。冷卻速度以50至200°C /sec為較適合之理由乃在於 未滿50°C /sec時與加熱時的熱膨脹相同，因而不能利用 低膨脹進行直接焊接。若超過200°C /sec時，陶瓮有可能 因熱衝擊而破壞之故。 上述銅或其合金，可提供緩和起因於陶瓷與金屬構件 的熱膨脹差所產生的應力之功能，以獲得健全接合。上述 <請先閱讀背面之注意事項再填寫本頁) 裝.-------訂.-----—•竣 經濟部智慧財產局S工消費合作杜印製 本紙張尺度適用中圉國家標準（CNTS)A.l規格（210x297公t ) 5 310723 419623 A7 __ B7 五、發明說明（6 ) 銅或其合金的屈服應力即以4至10 hgf/mm2為宜。其理 由乃在於4 hgf/mm2係依純銅屈服應力所定之值，而於超 過上限10 hgf/mm2時，即不易獲得產生於接合部的應力 之緩衝效果。又，具有上述屈服應力範圍的銅或其合金有 諸如：無氧銅（oxygen free copper，4 hgf/mm2)、精銅（tough pitch copper，7 hgf/mm2)、含有銅 0.03 至 0.15 質量％ 的 Ag 合金（退火材料’ 9 hgf/mm2)、含有銅0.8質量％的Cr合 金（退火材料，9hgf/mm2)、含有銅0.15質量％的Zr合金（退 火材料’ 9 hgf/min2)等《選擇上述銅或其合金的理由如下： 於真空容器内組裝絕緣操作桿時，通常係於真空中加熱至 800至1000t後’進行真空容器的组裝作業。雖然有A卜 Pb、In、Bi、Zn、Sn、Mg等金屬，及含有這些的銅系合 金，也會顯示10 hgf/mm2以下的屈服應力，惟於真空中 加熱至800至1000°C時，這些低熔點金屬將成為金屬蒸 氣，污染真空容器内或陶瓷表面，會造成降低絕緣特性的 問題之緣故。又於此處所謂的屈服應力係指會造成原長度 的0.2 %永久延伸率的應力值。 [發明的實施形態] 實施形態1 茲將本發明的實施形態1說明於後： 第1圖為表示本發明絕緣操作桿的剖面圊，第1圊中， 1為絕緣陶瓷、2為金屬化層、3為電鍍層、4為中間材、 5為焊接材a、6為金屬構件、7為焊接材b" 實施形態1 ’係就使用Fe-Ni系合金為中間材，以 本紙張&度適用令國國家標準（CNS)A4規格（210x 297公爱） (請先閱讀背面之注意事項再填寫本頁) 裝--------訂---------線 經濟部智慧財產局員工消費合作社印製 310723 419623 ^ Λ/ _____Β：_____ 五、發明說明（7 ) <請先閱讀背面之注意事項再填寫本頁> 經濟部智慧財產局員工消費合作社印製 Μη-Mo法接合時的情況加以說明。在直徑15mm、長25mm 的氧化鋁製成之絕緣陶瓷1的接合面上，形成厚度30μπι 的Μη-Μο金屬化層2，再於其上由電解法形成厚度5μιη 的：Nii電鍍層3»然後，使用厚度1mm的Fe-42質量％Ni、 Fe-29質量％Ni-17質量％Co以及Fe-32質量％Ni-5質量 %Co-2質量％Si-0.2質量％]^11等3種為中間材。又於中間 材與施行電鍍的絕緣陶瓷1之間，配置厚度5 0μιη的 BNi-7(Ni-13%、Cr_10%P)焊接材a5箔膜，以lkg載重下 在真空中加熱95 0°CX 20分鐘予以接合。接著，為於接合 在絕緣陶瓷1的中間材4上，接合直徑15mm、長25mm 的不銹鋼（SUS 304)金屬構件6，將BAg-18(Ag-30%Cu-10%Sn-0.025°/〇P)焊接材b7置於中間材4及金屬構件6間， 加lkg載重下在真空中加熱820eC X 20分而製得接合體。 而比較材則不設中間材4，將氧化鋁的絕緣陶瓷1與SUS 304的金屬構件6 ’以Mn-Mo法使用BNi-7在真空中加熱 950°C X 20分鐘予以接合。為調查該絕緣操作桿的接合 性，以外觀檢查及拉伸試驗檢測其接合強度。結果如第1 表的實施形態1 (No 1至3)所示。於本發明實施形態的 Nol、No2、No3中’沒有發現陶瓷龜裂或接合部的剝離 及變形等。惟在比較例的Ν〇12，則發生陶瓷亀裂。進行 拉伸試驗結果’本發明部分的拉伸強度為：Ν〇ι為15 kgf/mm2、No2及N〇3為23 kgf/mm2以上，較之比較材的 3 kgf/mm2 ’該接合強度有顯著性的提升。又由拉伸試驗 的破斷部分係位於接合部近傍的陶瓷内部之情形，便可知 本紙張&度適用中國國家標準（CNS)A4規格（210 X 297公釐） 7 310723 419623 經濟部智慧財產局員工消费合作社印製 Λ7 B7 五、發明說明（8 ) 已獲得較陶瓷強度更強固的接合◊又於本實施形態♦，係 使用Ni焊接材接合絕緣陶瓷與中間材，但亦可使用cu、 Au、Ag等焊接材。 實施形態2 實施形態2’係就使用銅系複合料為中間材，以_ Μη法接合時的情況加以說明。在直徑15inm、長25mm 的氧化鋁製成之絕緣陶瓷1的接合面上，形成厚度30μιη 的Μη-Μο金屬化層2,再於其上由電解法形成厚度5μϊη 的Ni電鍍層3»然後，在厚度imm的Cu-20質量％W、Cu-50 質量％Mo以及Cu/Mo/Cu(l : 2 : 1.47質量％Cu)之3種中 間材4與施以電鍍的絕緣陶瓷i之間，配置厚度為5〇μιη 的BNi-7(Ni-13%Cr-10%P)焊接材a5箱膜，以ikg載重下 在真空中加熱950°C X20分鐘予以接合。接著，為於接合 在絕緣陶瓷Ϊ的申間材4上，接合直徑1 5mm、長25mm 的不銹銅（5113 3 04)金屬構件6，將3八8-18(八呂-3 0%(：11- 10%311-0.02 5%?)焊接材乜7置於中間材4及金屬構件6之 間’加Ikg載重下在真空中加熱820eC X20分鐘而製得接 合體。而比較材則不設中間材4，將氧化鋁的絕緣陶瓷1 與SUS 304的金屬構件6 ’以Mn-Mo法使用BNi-7在真 空中加熱950°C X20分鐘予以接合β為調査該絕緣操作桿 的接合性’以外觀檢查及拉伸試驗檢測其接合強度β結果 如第1表的實施形態2(Νο4至6)所示》於本發明實施形 態的Νο4至ό令，沒有發現陶瓷龜裂或接合部的剝離及 變形°進行拉伸試驗結果’本發明部分的拉伸強度為23 I.---.1 I t ---I I^·-------訂------I--線 (請先閱讀背面之注意事項再填寫本頁) 本紙張又度適用中S困家標準（CNS)A4規格（210 X 297公堃> g 310723 41 9 623 A/ _ B7 五、發明說明（9 ) C請先閱讀背面之泫意事項再填寫本頁) kgf/mm2以上，較比較材No 12，之接合強度為高、且其 破斷部分係位於接合部近傍的陶瓷内部，由此便可知已獲 得較陶瓷強度更強固的接合》又於本實施形態中，對於絕 緣陶瓷1及中間材4之接合，係以Mo-Mn法實施，惟亦 可以使用Ti-Ag-Cu焊接材、Zr-Ag-Cu焊接材、Ti-Cu焊 接材等的活性金屬法接合。又，銅系複合材料也可使用 Cr、WC ' C、Al2〇3、SiC等之粒子與Cu複合化者。 實施形態3 上述實施形態2,係就鋼系複合料為cu與Mo或W 粒子的複合化’以及’使用Cu/Mo/Cu復合材料時之情況 加以說明。惟如第2圖的剖面圖所示，亦可採用於銅或其 合金8設貫穿孔’並於貫穿孔中以加熱嵌合陶瓷9所形成 的銅系複合料作為中間材4而接合之方式。茲就該例說明 於後： 經濟部智慧財產局員工消費合作社印製 加熱嵌合的銅系複合料，係於直徑3 0mm、長l〇mm 的無氧銅8設直徑5.000mm的貫穿孔7處，於該貫穿孔 將直徑5.002mm、長10mm的氧化鋁所製成之陶瓷9，以 1000 °C進行加熱嵌合’而製得陶瓷體積率為20%者。然 後，在直徑30mm、長25mm的氧化鋁製絕緣陶瓷1與直 徑30mm、長25mm的不銹鋼（SUS 304)金屬構件6之間配 置銅系複合料的中間材4，又於氡化鋁製絕緣陶曼1與中 間材4之間’及金屬構件6與中間材4之間放置Cu-28重 量％Ti之活性金屬焊接材10薄箔，加lkg載重下於真空 争加熱950°C X20分鐘獲得接合體。於第3圖表示該絕緣 本紙張又度適用中國國家標準（CNS)A4規格（210^ 297公爱） 9 310723 9 62 3 ' ^ Λ7 ------E_ 五、發明說明（1〇 ) 操作桿的縱剖面囷。為調查該絕緣操作桿的接合性，以外 衡*檢查及拉伸試驗檢測其接合強度《•結果如第1表的實施 形態3之No7所示。該例的接合性亦良好，拉伸強度為23 kgf/mm2 以上。 實施形態4，係就利用控制碳鋼冷卻速度時之低膨脹 特性’將陶瓷及碳鋼予以直接接合的例子加以說明： 直徑15mm、長25mm的氧化錯（zirconia)製絕緣陶瓷 1與直徑15mm、厚度lmm的碳鋼（S45C)中間材4之間配 置Cu-28重量％Ti之活性金屬焊接材10薄箔，加lkg載 重下於真空中加熱950°C X20分餚後，為獲得50sec以上 的冷卻速度，則移至冷卻槽中接合。又為於氧化锆製絕緣 陶瓷1上所接合的碳鋼中間材4上接合直徑15mm、長 25mm 的不銹鋼（SUS 304)金屬構件 6，BBAg-18(Ag-30%(：11-10%$11-0.025%?)焊接材137置放於中間材4與金屬 構件6之間，加lkg載重下於真空中加熱820°C X 20分鐘 以獲得接合體。於第4圖令表示適用活性金屬法的本發明 絕緣操作桿之剖面圖。比較材係以50°C/sec以下之冷卻 速度冷卻後，將氧化锆製絕緣陶瓷1與中間材4予以接合 者》 為調查上述絕緣操作桿的接合性，以外觀檢查及檢測 其接合強度的結果，特示於第1表的實施形態4(No8)。 依本發明並未發現有陶瓷龜裂及接合部剝離、變形等缺 陷，可獲得良好接合°實施拉伸試驗結果、本發明的拉伸 <請先閱讀背面之注意事項再填寫本頁) 裝--------訂---------竣 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） 10 310723 419623 B7 五、發明說明（η ) 強度為23 kgf/mm2以上，因破斷部分係位於接合部近傍 的陶瓷内部，由此可知已獲得良好接合。其比較例No 13 為冷卻速度50sec以下者，惟該接合部卻有剝離。由此， 即可知，碳鋼可作為中間材而實施接合，使得與金屬構件 間的接合更加容易。又於本實施例中，係使用碳鋼為中間 材，惟以碳鋼作為金屬構件，與絕緣陶瓷直接接合之方式 亦可獲得同樣效果。亦，該接合法除活性金屬法外，亦可 採用Mo-Mn法。 實施形银5 在實施形態5說明以Mo-Mn法在絕緣陶瓷1與金屬 構件6之間設屈服應力為4至10 kgf/mm2的鑛或其合金 為中間材之接合情況。在直徑15mm、長25mm的氧化铭 絕緣陶瓷1之接合面形成厚度30μϊη的Mo-Mn金屬化層 2’又以電解法在上面形成厚度5μιη的Ni電鍍層，然後， 以厚度0,5mm的無氧銅板（C1020)與Cu-0.8重量％Cr之2 種作為中間材4，而與施加電鍍之陶瓷之間，配置厚度 50μιη之BNi-7焊接材a5薄箱，加lkg載重下於真空中加 熱950°C X 20分鐘而予以接合》接著，於接合之中間材4 上’為接合直徑15mm、長25mm的不銹鋼（SUS 304)金屬 構件 6，將 BAg-18(Ag-30%Cu-10%Sn-0.025%P)焊接材 b7 置玫於中間材4與金屬構件6之間，加lkg載重下於真空 中加熱820°C X20分鐘以獲得接合體。其比較材，則製作 一種是不予設置中間材4而接合SUS 3 04的金屬構件6 並由BNi-7以Mo-Mn法在真空中加熱950°C X 20分鐘予 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先間讀背面之注意事項再填冩本頁> 裝--------訂---：------竣 經濟部智慧財產局具工消費合作社印製 310723 A7 41 9623 ______B7___ 五、發明說明（12 ) 以接合者，及另一種是使用屈服應力為17.5 kgf/mm2的 Cu-30重量％Ni之中間材4者。為調查上述絕緣操作桿的 接合性’以外觀檢查及檢測其接合強度的結果，特示於第 1表的實施形態5(N〇9、N〇10>於本發明的實施形態No9、 No 10中並沒有發現陶瓷龜裂及接合部之剝離及變形《實 施拉伸試驗結果、本發明的拉伸強度為23 kgf/mm2以上， 較比較例No 12及No 14的接合強度高，而其破斷部分係 位於鄰近接合部的陶瓷内部，可知已獲得良好接合“在本 實施形態中，係以Mo-Mn法實施絕緣陶瓷1與中間材4 的接合，但得使用Ti-Ag-Cu焊接材或Zr-Ag-Cu焊接材、 亦可由採用Ti-Cu焊接材等的活性金屬法接合。 實施形態6 於此實施例，則就併用利用陶瓷與金屬之熱膨脹差接 合的收縮配合（shrink fit)法及使用焊接材接合之面接合法 的實施形態說明於後。第5圖係表示本發明絕緣操作桿的 縱剖面圖。1係接合部為凸形狀的絕緣陶瓷、6為接合部 為凹形狀的金屬構件、8為活性金屬焊接材》 首先’準備一外徑20mm、長60mm，且其接合部的 凸部尺寸為直徑14.001mm、高度5mm的氧化銘絕緣陶曼 1 ’與外徑20mm、長30mm，且其接合部的凹部尺寸為直 徑14.000mm、深度5mm的SUS 304金屬構件6。將該絕 緣陶瓷1與該金屬構件6的接合部對接、於對轴方向垂直 的面之間配置Cu-28wt%Ti的活性金屬焊接材10，加ikg 載重下於真空中加熱950°CX20分鐘，同時進行套合與谭 -II·!·-------- 裝--------訂-------— 緩 f請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產扃員工消費合作社印製 本紙張尺·度適用中囡國家標準（CNS)A4規格（210x297公釐） 12 310723 419623 Λ7 --- - B7 五、發明說明（13 ) 接’獲得接合體》至於，比較材係準備與實施例同外徑尺 寸的圓柱狀絕緣陶瓷1及金屬構件6，並以同樣接合法實 施面接合β 就本發明的該絕緣操作桿實施拉伸試驗的結果，顯示 於實施形態6之Nol 1。本發明可獲得23 kgf/mm2以上的 拉伸強度’但比較例之No 15的拉伸強度卻為7.5 kgf/mm2。如觀察接合體的破壞狀況，本發明則於陶瓷内 部象裂’故其接合相當強固。而比較例的N〇 15係於陶瓷 與焊接材的界面發生龜裂。由該結果，比較例係較本發明 在其拉伸強度上為劣，惟併用收縮配合法嵌合及以焊接的 面接合法之本發明則可獲得良好的接合狀態。又，在本實 施形態係針對於陶瓷面設一凸部及於金屬面設一凹部 者’加以說明’但如予以設二對以上的凹凸部，即可接合 大接合面積。 (請先閲讀背面之注意事項再填寫本頁》 裝--------訂·-----I!竣 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公餐） 13 310723 419623 ' A7 _ 五、發明說明（U ) 經濟部智慧財產局員工消費合作社印製 η 〇\ N> 實施形態 本發明 1 本發明 本發明 本發明 本發明 本發明 1_ Cj 00 <1 On u> Cu-30ni S45C 1 Cu*0.8Cr 無氣網 S45C _1 複合材 Cu/Mc/Cu _ Cu-50M〇 丨 Cu-20W Fe-32Ni-5Co- 3C-2SW).2Mn Fe-29Ni-17Co Fe^2Ni 中間材 檠 关 $ 氧化is 氣化鋁 氧化錯 氣化銘 氧化4S 氧化鋁 氣化鋁 1 氧化锆 _1 氧化鋁 氡化鋁 氡化鋁 氡化鋁 氣化鋁 氣化鋁 氡化鋁 SUS304 SUS304 SUS304 SUS304 1 SUS304 SUS304 _1 SUS304 SUS304 SUS304 SUS304 SUS304 SUS304 SUS 304 SUS 304 SUS 304 金屬構件 Ni-13Cr-10P Ni-13Cr-10P Cu-28Ti Ni-13Cr-10P Ni-13Cr-10P Ni-DCr-lOP Ni-13Cr-10P Cu-28Ti Cu-28Ti Ni-13O10P Ni-13Cr-10P Ni-13Cr-10P Ni-13Cr-10P Ni-13Cr-10P Ni-13Cr-10P 中間材與陶瓷 的接合材 Cu-28Ti Ag-30Cu-10Sb-0.025P Ag-30Cu-10Sb-0.025P Ni-13Cr-10P 1 Cu-28Ti Ag-30Cu-10Sn-0.025P 1 Ag-30Cu-10Sn-OO25P Ag-30Cu-10Sn-0.025P Cu-28Ti 1 Ag-30Cu-10Sn-0.025P Ag-30Cu-10Sn-0.025P Ag-30Cu-10Sn-0.025P Ag-30Cu-10Sn-0.025P Ag-30Cu-10Sn-0,025P Ag-30Cu-10Sn-0.025P 中問材與金屬構件 的接合材 發生巍裂 發生剝離 發生亀裂 J3& 焊接後 的狀態 C： V» 1 1 23以上 23以上 23以上 _] 23以上 23以上 23以上 23以上 23以上 23以上 23以上 II 冷卻速度50 °C/秒以下 併用收縮配合法舆 面焊法 冷卻速度50°C/秒以上 本紙張尺度適用中國a家標準（CNSM4規格（210 X 297公釐） 14 310723 铖1> IP------I I---- --------訂--------- <請先閱讀背面之注意事項再填寫本頁) Λ7 419623 ____07___ 五、發明說明（15 ) [發明的效果] 如依申請專利範圍第1項記載的發明，由於在呈真空 之容器内’提供絕緣及傳達操作力的由陶瓷與金屬構件接 合的絕緣操作桿中，上述陶瓷與上述金屬構件間，以Fe-Ni系合金、銅系複合材、碳鋼或銅或其合金，做為中間 材而予以設置，故得以減輕'或緩衝因熱膨脹差所產生的 應力，獲得接合性優異的絕緣操作桿。 如依申請專利範圍第2項記載的發明，由於該中間材 的Fe-Ni系合金為：含有20至50質量％Ni的Fe-Ni合金、 含有20至50質量％Νι及3至25質量％c〇的Fe-Ni合金、 含有20至50質量％Ni及1至12質量％Cr的Fe-Ni合金、 或於含有20至50質量％Ni及3至25質量〇/〇Co的上述Fe-Ni 合金中含有0.5至5質量％C與0.1至3質量％的Si及Μη 之任何一種或二種的合金者，故可獲得接合性更為 優異的絕緣操作桿》 如依申請專利範圍第3項記載的發明，由於該中間材 的銅系複合材，係於Cu中將Mo或W的粒子以40至9〇 質量％的範圍予以複合化者、或於雙層的Cu間，使M〇 為20至80質量％的比率予以夾住成三明治式三層構造的 復合材者，故可獲得接合性更為優異的絕緣操作桿β 如依申請專利範圍第4項記載的發明，由於該中間材 的銅或該合金之屈服應力為4至1〇hgf/mm2’故可獲得 接合性更為優異的絕緣操作桿。 如依申請專利範圍第5項記栽的發明，係於該中間材 ' 1 !^--------訂-------I {請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消费合作社印製 本紙張尺度適用中aa家標準（CNS〉A4規格（21〇 烈7公釐） 15 310723 419623 五、發明說明（16 ) 設貫穿孔’且於上述貫穿孔嵌合陶瓷後，將中間材設於上 述陶竞與上述金屬構件間者，故可獲得接合性更為優異的 絕緣操作桿。 如依申請專利範圍第6項記載的發明，係於呈真空之 容器内，提供絕緣及操作力傳遞之由陶瓷與金屬構件相互 接合的絕緣操作桿的製造方法甲，在上述陶瓷與上述金屬 構件間’以Fe-Ni系合金、銅系複合料、碳鋼或銅其合金 設置中間材’以接合上述陶瓷舆上述金屬構件，故得以減 輕、或緩衝因熱膨脹差所造成的應力，獲得接合性優異的 絕緣操作桿。 如依申請專利範圍第7項記載的發明，係將該中間材 的破鋼以50至200 °C/sec範圍的冷卻速度與陶瓷接合者， 故可獲得接合性更為優異的絕緣操作桿。 如依申請專利範園第8項記載的發明，係於呈真空之 容器内，提供絕緣及操作力傳遞之由陶瓷與金属構件相互 接合的絕緣操作桿製造方法中，由於在陶瓷及金屬構件上 設1個以上的a部及凹部’且併用加熱嵌合的收縮配合法 及將該嵌合平面予以焊接的接合法，故接合力增加，可獲 得接合性更為優異的絕緣操作桿 [圖面的簡單說明] 第1圖為本發明絕緣操作桿一實施態樣的剖面圖。 第2圖為銅系複合材之一實施態樣的橫剖面圖。 第3圈為本發明絕緣操作桿一實施態樣的縱剖面圈β 第4圖為適用活性金屬法之本發明絕緣操作 實施 (請先閱讀背面之注意事項再填寫本頁) 裝 ----訂-------！-^ 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 * 297公釐） 16 310723 4 五、發明說明（n 態樣的剖面圏。 第5圖為併用收縮配合法及面接合之絕緣操作桿 施態樣的剖面圖β [符號的簡單說明1 實 — — . - J ί I I I I I i — — — — ---ί - {請先閱讀背面之注意事項再填寫本頁) 第6圖為習用接頭的剖面圖。 1 絕緣陶究 2 金屬化層 3 電鍍層 4 中間材 5 焊接材a 6 金屬構件 7 谭接材b 8 銅或其合金 9 陶瓷 10 活性金屬焊接材 11 筒狀陶瓷 12 接頭 13 Ag焊接材 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（21〇χ 297公釐） 17 310723A7 419623 B7 V. Description of the Invention (Technical Field of the Invention) The present invention relates to an insulating rod and a method for manufacturing a switchgear which must provide insulation and transmit operating force in a vacuum container. [Conventional Technology] Figure 0 is a cross-sectional view of a conventional insulated joint described in the book "Ceramic joints and brazed bare-end technology" issued by the Japan National Industrial Technology Service Center (Shares). In the drawing, 2 is a metallized layer, 11 is a cylindrical ceramic, 12 is a joint, and 13 is a silver rod. The process will be described later. In the past, the metallization layers 2 were formed on the circumferential surface portions of the cylindrical ceramic 11 made of alumina at both ends, and then heated to 82 ° C in hydrogen. A method for making an insulating joint by joining a joint 12 'made of Hehua alloy (kvar) with a silver paste 13. [Problems to be Solved by the Invention] Insulation operating levers that provide insulation and transmit operating force in a vacuum container are connected to ceramics that provide insulation and are used as metal for connection to highly conductive metal members or operating mechanisms. Component builders. When the operation lever is assembled in a vacuum container, it must be heat-treated in a vacuum, so it must have sound jointability after heating. At the same time, a joint with resistance to operation is required. The conventional joining method shown in FIG. 6 is used to provide insulation and transmission of operating force in the atmosphere or gas. It is formed into a cylindrical shape made of Hehua alloy joint 12 and silver solder 13 joined to alumina. Ceramic 11. However, the heating temperature when assembling the vacuum container 'melts the solder again and cannot maintain the initial bonding state', resulting in a decrease in bonding properties, and because the bonding surface is parallel to the axial direction, shear stress on the bonding surface is easily generated, which is easy Damage caused (please read the precautions on the back before filling in this page) r Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs -------- ^ --------- ^ This paper The standard is applicable to China National Standard (CNS) A4 (210 X 297 mm> 1 310723 419623 Λ7 B7 V. Description of the invention (2). Also, because the joints are made of high-priced Kehua alloy, it is higher. The problem of cost exists "The author of this issue is to solve the above problems. The author provides an insulating operation lever made of ceramic and metal components that can provide insulation and operating force transmission in the valley of Shinji Middle School. 'The purpose is to provide an insulated operating lever with good joints between ceramic and metal components, and its manufacturing method. [Means for Solving the Problem] The invention claimed in item 1 of the patent scope is provided in a vacuum container to provide insulation and operating The insulated operating lever transmitted by the ceramic and the metal member is passed to use the Qin-based alloy, copper-based composite, carbon steel, or copper or its alloy as the intermediate material between the ceramic and the metal member. It shall be set as its characteristic. The invention in the second scope of the patent application belongs to the insulated operating lever described in the first scope of the patent application. The Fe-Ni alloy of the intermediate material contains 20 to 50% by mass of Fe_Ni. Alloy, Fe-Ni alloy containing 20 to 50 mass% Qin and 3 to 25 mass% Co, Fe-Ni alloy containing 20 to 50 mass and 1 to 12 mass% (^ 1 * Fe-Ni alloy, or The above-mentioned Fe-Ni alloy to 50% by mass of Ni and 3 to 25% by mass of Co is a Fe-Ni alloy containing 0 to 5% by mass / SC and 0.1 to 3% by mass of Si and Mn. The invention in the third scope of the patent application belongs to the insulated operating lever described in the first scope of the patent application. The copper-based composite material of the intermediate material is made of Cu with Mo or W particles in an amount of 40 to 90% by mass. The range is compounded, or between two layers of Cu, so that Mo has a mass ratio of 20 to 80. (Please read the back first Please fill in this page again if you want to know what you want.) Packing --------- Order --------- Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economy yM specifications (210x 297 mm) 2 310723 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (3) Those who sandwiched clad materials into sandwich-type three-layer structures β Patent scope The fourth invention belongs to the insulated operating rod described in the first scope of the patent application. The intermediate material has a yield stress of 4 to 10 kgf / mm2 of copper or its alloy. Β The invention according to claim 1 is the insulated operating lever according to any one of the items J to 4 of the scope of application for a patent, in which a through hole is provided in the intermediate material and ceramic is fitted in the through hole, and the intermediate material is provided in the above. Between ceramics and the aforementioned metal members. The invention of claim 6 in the scope of patent application is a manufacturing method of an insulated operating lever provided by a ceramic and a metal member that provides insulation and operating force transmission in a vacuum container, and is characterized in that the ceramic and the metal member are used in combination. In the meantime, a Fe-Ni-based alloy, a copper-based composite, carbon copper, or copper or an alloy thereof is provided as an intermediate material to join the ceramic and the metal member. The invention claimed in claim 7 belongs to the method for manufacturing an insulated operating lever as described in claim 6 in which the intermediate carbon steel is bonded to the ceramic at a cooling rate in the range of 50 to 200 ° C / sec. . The invention of claim 8 in the scope of patent application is made of a ceramic and metal insulated operating lever in a vacuum container, which provides insulation and operating force transmission. The insulated operating lever is made of ceramic and metal members. Method 'characterized by a shrink fit method in which Tao Jing and a metal member are provided with one or more convex portions and concave portions, and a shrink fit method for heating and shrinking, and a welding method for brazing the shrinkage plane. The insulated operating lever in the present invention is connected between the ceramic and the metal member, < please read the precautions on the back before filling this page) -------- Order · -------- End This paper size applies to China National Standard (CNS) A4 specifications (210 X 297 mm) 3 310723 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs': yb 2 3 A7 _ ϊ ϊ: _______ V. Description of the invention (4) Fe -Ni-based alloys, copper-based composites, carbon steel, or copper or their alloys, which are joined as intermediate materials. It can alleviate or cushion the stress occurring at the joint due to the difference in thermal expansion between the ceramic and the metal member, and can improve the jointability at a low cost. In order to improve the jointability, two methods, a shrink fit method for heating and fitting the convex part for the ceramic and a concave part for the metal member, and a joining method of brazing the fitting plane are used. Next, the preferable composition range of the Fe-Ni-based alloy will be described later. Fe-Ni-based alloys suitable for use in the present invention are Fe-Ni alloys containing 20 to 50 mass% Ni, Fe-Ni alloys containing 20 to 50 mass% Ni and 3 to 25 mass 0 / 〇Co, and 20 Fe-Ni alloy of 50 to 50 mass% Ni and 1 to 12 mass% of Cr, or 0.5 to 5 mass of 0 / 〇C in the above-mentioned Fe-Ni alloy containing 20 to 50 mass% of Ni and 3 to 25 mass% of Co Fe-Ni alloys with any one or both of Si and Mn at 0.1 to 3% by mass. These Fe-Ni-based alloys can be referred to as "invar", "elinvar", "fernico", "42-alloy", " Kehua Alloy "and other low-expansion metals" The thermal expansion coefficient of each ceramic due to oxides, nitrides, and carbides ranges from 4 to 12 X 1 (Τ6 / Κ, in order to reduce the stress caused by the differential thermal expansion of the insulating ceramic and metal components. The thermal expansion coefficients of ceramics and intermediate materials must be matched. In Fe, the addition of Ni, Co, Cr, C, Si, Mη in the above range can obtain a thermal expansion coefficient of 4 to 12 Xl0-6 / K, so By selecting Fe-Ni based alloys with intermediate thermal expansion characteristics between ceramic and metal components, the stress occurring can be alleviated and the jointability can be improved. Secondly, the copper-based composites are described for their ideal composition range " suitable --- — — [I II—fif ----- order --------- line (Please read the precautions on the back before filling in this purchase>) This paper size applies to China National Standard (CNS) A4 specifications ( 210 X 297 mm) 4 310723: 9 62 3 Λ7 07 V. Description of the invention (5) Based on Cu composite materials, Mo or W particles are compounded in the range of 40 to 90% by mass, or sandwiched between two layers of Cu so that the ratio of Mo is 20 to 80% by mass in a sandwich type. Three-layer structure composite material. This system is also adopted to obtain the thermal expansion coefficient of the nearest ceramic 4 to 12 X 1 0-6 / K, by selecting a copper system with intermediate thermal expansion characteristics of ceramic and metal components The composite material can alleviate the stress that has occurred and improve its bondability. The sandwich-type composite material 'Cu formed by Cu sandwiched] Vf〇 can also provide a buffer function for thermal stress occurring between ceramic and metal components. Carbon If the steel uses its abnormal thermal expansion properties during cooling, it can be directly bonded to ceramics, so that it can be easily bonded to metal components. "The optimal cooling rate when joining carbon and copper is described below: Eutectoid carbon The steel (eutectoid carbon steel (carbon 0.9%)) is heated to 875 ° C to make the carbon key structure austenitizing, and then quenched with water, and the volume expansion when cooled to about 300 ° C is more The thermal expansion film is small during heating, if it is cooled under the same conditions When the temperature is lower than 300 ° C, the carbon steel structure will be martensite, and the volume expansion is already known. The joint system of β carbon steel and ceramics uses this phenomenon of thermal expansion to reduce the temperature. Cooling speed The reason why 50 to 200 ° C / sec is more suitable is that the thermal expansion under 50 ° C / sec is the same as that of heating, so direct welding cannot be performed with low expansion. If it exceeds 200 ° C / sec, Tao Yan May be damaged by thermal shock. The above-mentioned copper or its alloy can provide a function of alleviating the stress caused by the difference in thermal expansion between the ceramic and the metal member to obtain a sound joint. The above < Please read the precautions on the back before filling out this page.) China National Standard (CNTS) Al Specification (210x297 g) 5 310723 419623 A7 __ B7 V. Description of the Invention (6) The yield stress of copper or its alloy is preferably 4 to 10 hgf / mm2. The reason is that 4 hgf / mm2 is a value determined by the yield stress of pure copper. When the upper limit is 10 hgf / mm2, it is difficult to obtain the buffering effect of the stress generated at the joint. In addition, the copper or its alloy having the above yield stress range includes, for example, oxygen free copper (4 hgf / mm2), fine pitch copper (7 hgf / mm2), and copper containing 0.03 to 0.15% by mass of copper. Ag alloy (annealed material '9 hgf / mm2), Cr alloy containing copper 0.8% by mass (annealed material, 9hgf / mm2), Zr alloy containing copper 0.15 mass% (annealed material' 9 hgf / min2), etc. The reasons for copper or its alloys are as follows: When assembling an insulated operating rod in a vacuum container, it is usually heated in a vacuum to 800 to 1000t to perform the vacuum container assembly operation. Although there are metals such as Ab, Pb, In, Bi, Zn, Sn, and Mg, and copper-based alloys containing these, they also show a yield stress below 10 hgf / mm2, but when heated to 800 to 1000 ° C in a vacuum These low-melting-point metals will become metal vapors, contaminating the inside of the vacuum container or the ceramic surface, which will cause the problem of reducing the insulation characteristics. Herein, the so-called yield stress refers to a stress value that causes a permanent elongation of 0.2% of the original length. [Embodiment of the invention] Embodiment 1 The embodiment 1 of the present invention will be described later: FIG. 1 is a cross-section 圊 showing an insulated operating lever of the present invention. In the first 圊, 1 is an insulating ceramic and 2 is a metallized layer. , 3 is the plating layer, 4 is the intermediate material, 5 is the welding material a, 6 is the metal member, 7 is the welding material b " Embodiment 1 'The Fe-Ni alloy is used as the intermediate material, and the paper & degree Applicable national standard (CNS) A4 specification (210x 297 public love) (Please read the precautions on the back before filling this page) Printed by the Consumers ’Cooperative of the Ministry of Intellectual Property Bureau 310723 419623 ^ Λ / _____ Β: _____ V. Description of the Invention (7) < Please read the precautions on the back before filling out this page > The case of the -Mo method bonding will be described. On the joint surface of the insulating ceramic 1 made of alumina with a diameter of 15mm and a length of 25mm, a Mn-Mο metallization layer 2 having a thickness of 30 μm is formed, and a 5 μm thickness is formed thereon by electrolytic method: Nii plating layer 3 » 3 types of Fe-42% by mass Ni, Fe-29% by mass Ni-17% by mass Co, and Fe-32% by mass Ni-5% by mass Co-2% by mass Si-0.2% by mass] ^ 11 For intermediate materials. Between the intermediate material and the insulating ceramic 1 to be plated, a BNi-7 (Ni-13%, Cr_10% P) welding material a5 foil film with a thickness of 50 μm is arranged, and it is heated in a vacuum at a load of 1 kg at 95 0 ° CX Join for 20 minutes. Next, to join the intermediate material 4 of the insulating ceramic 1 to a stainless steel (SUS 304) metal member 6 having a diameter of 15 mm and a length of 25 mm, BAg-18 (Ag-30% Cu-10% Sn-0.025 ° / 〇 P) The welding material b7 is placed between the intermediate material 4 and the metal member 6, and a joint body is prepared by heating 820eC X 20 minutes in a vacuum under a load of 1 kg. In contrast, the intermediate material 4 was not provided, and the alumina insulating ceramic 1 and the metal member 6 'of SUS 304 were bonded to each other by heating at 950 ° C for 20 minutes in a vacuum using BNi-7 by the Mn-Mo method. In order to investigate the jointability of this insulated operating lever, the joint strength was examined by visual inspection and tensile test. The results are shown in Embodiment 1 (Nos. 1 to 3) of Table 1. In Nol, No2, and No3 of the embodiment of the present invention, no ceramic cracks, peeling or deformation of the joints, etc. were found. However, in No. 12 of the comparative example, ceramic cracking occurred. As a result of the tensile test, the tensile strength of the part of the present invention is: Nom is 15 kgf / mm2, No2 and No3 are 23 kgf / mm2 or more, compared with 3 kgf / mm2 of the comparative material. Significant improvement. From the fact that the broken part of the tensile test is located inside the ceramic near the joint, it can be known that the paper & degree is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 7 310723 419623 Intellectual Property of the Ministry of Economic Affairs Printed by the Consumer Cooperative of the Bureau Λ7 B7 V. Description of the invention (8) A joint with stronger strength than ceramic has been obtained. Also in this embodiment ♦ Ni welding material is used to join the insulating ceramic and the intermediate material, but cu, Au, Ag and other welding materials. Embodiment 2 Embodiment 2 'is a case where a copper-based composite material is used as an intermediate material and joined by the _Mn method. On the joint surface of the insulating ceramic 1 made of alumina with a diameter of 15inm and a length of 25mm, a Mn-Mο metallization layer 2 having a thickness of 30 μm was formed, and a Ni plating layer 3 having a thickness of 5 μϊη was formed thereon by an electrolytic method. Then, Between Cu-20 mass% W, Cu-50 mass% Mo, and Cu / Mo / Cu (1: 2: 1.47 mass% Cu) with a thickness of imm between the three kinds of intermediate materials 4 and the insulating ceramic i to which plating is applied, A film of BNi-7 (Ni-13% Cr-10% P) welding material a5 with a thickness of 50 μm was arranged, and heated under vacuum at 950 ° C for 20 minutes under an ikg load for bonding. Next, in order to join the Shinma material 4 bonded to the insulating ceramic cymbal, to join a stainless copper (5113 3 04) metal member 6 having a diameter of 15 mm and a length of 25 mm, 38.8 to 18-18 (Hachi-3-0% ( : 11-10% 311-0.02 5%?) The welding material 乜 7 is placed between the intermediate material 4 and the metal member 6 ', and the joint is obtained by heating at 820eC for 20 minutes in a vacuum under a load of 1 kg. The comparative material does not. Suppose intermediate material 4 and alumina insulating ceramic 1 and metal member 6 of SUS 304 6 ′ were heated by vacuum heating at 950 ° C for 20 minutes using BNi-7 by Mn-Mo method. 'The results of the joint strength β test by visual inspection and tensile test are shown in the second embodiment (No. 4 to 6) of Table 1. In No. 4 to No. 4 of the embodiment of the present invention, no ceramic cracks or joints Peeling and deformation ° Tensile test results' The tensile strength of the part of the present invention is 23 I .---. 1 I t --- II ^ · ------- order ------ I- -Line (please read the precautions on the back before filling this page) This paper is again applicable to the Chinese Standard for Standards (CNS) A4 (210 X 297 mm) > g 310723 41 9 623 A / _ B7 V. Invention Explanation (9) C First read the intentions on the back and fill in this page) kgf / mm2 or higher, compared with comparative material No 12, the joint strength is higher, and the broken part is located inside the ceramic near the joint, so it can be known that Bonding with Stronger Ceramics "Also in this embodiment, the bonding of the insulating ceramic 1 and the intermediate material 4 is performed by the Mo-Mn method, but Ti-Ag-Cu welding materials, Zr-Ag-Cu can also be used. Welding materials, Ti-Cu welding materials, etc. are used for active metal bonding. Copper-based composite materials can also be composited with Cu, such as Cr, WC'C, Al203, and SiC. Embodiment 3 The above embodiment 2. The description will be given of the case where the steel-based composite is a composite of cu and Mo or W particles, and when a Cu / Mo / Cu composite is used. However, as shown in the cross-sectional view of FIG. 2, it can also be used in Copper or its alloy 8 is provided with through-holes' and the copper-based composite material formed by heating and fitting ceramic 9 is used as the intermediate material 4 in the through-holes. This example will be described later: Staff of the Intellectual Property Bureau of the Ministry of Economic Affairs Consumption cooperative prints heat-fitting copper-based composites with a diameter of 30mm, Oxygen-free copper 8 with a length of 10 mm is provided with 7 through-holes with a diameter of 5.000 mm, and ceramics 9 made of alumina with a diameter of 5.002 mm and a length of 10 mm are heated and fitted at 1000 ° C. A ceramic volume ratio of 20% was obtained. Then, an intermediate material of a copper-based composite was arranged between an alumina insulating ceramic 1 having a diameter of 30 mm and a length of 25 mm and a stainless steel (SUS 304) metal member 6 having a diameter of 30 mm and a length of 25 mm. 4. Place a thin foil of Cu-28wt% Ti active metal welding material 10 between Insulated Aluminium Taoman 1 and the intermediate material 4 and between the metal member 6 and the intermediate material 4 and add 1kg to the load. The joint was obtained by heating at 950 ° C for 20 minutes under vacuum. Figure 3 shows that the insulation paper is also suitable for the Chinese National Standard (CNS) A4 specification (210 ^ 297 public love) 9 310723 9 62 3 '^ Λ7 ------ E_ V. Description of the invention (1〇) Longitudinal section of the joystick 囷. In order to investigate the jointability of this insulated operating lever, the joint strength was checked using a balance check and a tensile test. The results are shown in No. 7 of Embodiment 3 in Table 1. This example also has good bonding properties and a tensile strength of 23 kgf / mm2 or more. The fourth embodiment is an example in which ceramics and carbon steel are directly bonded by using the low expansion characteristic when controlling the cooling rate of carbon steel: zirconia insulating ceramic 1 with a diameter of 15mm and a length of 25mm, and 15mm in diameter, Carbon steel (S45C) intermediate material 4 with a thickness of 1mm is provided with 10 thin foils of active metal welding material of Cu-28 wt% Ti, and heated under vacuum at 950 ° C for 20 minutes under a load of 1 kg. The cooling rate is moved to the cooling tank and joined. In addition, a stainless steel (SUS 304) metal member 6 having a diameter of 15 mm and a length of 25 mm is joined to a carbon steel intermediate material 4 joined to an insulating ceramic 1 made of zirconia, and BBAg-18 (Ag-30% (: 11-10% $ 11) -0.025%?) The welding material 137 is placed between the intermediate material 4 and the metal member 6, and is heated under vacuum at 820 ° CX for 20 minutes under a load of 1 kg to obtain a bonded body. A cross-sectional view of the insulated operating lever of the present invention. The comparative material is a person who joins the insulating ceramic 1 made of zirconia and the intermediate material 4 after cooling at a cooling rate of 50 ° C / sec or lower. The results of the visual inspection and the inspection of the joint strength are shown in Embodiment 4 (No8) of Table 1. According to the present invention, defects such as ceramic cracks, peeling and deformation of joints are not found, and a good joint can be obtained. Results of tensile test, tensile of the present invention < Please read the notes on the back before filling this page) The paper size printed by the consumer cooperative is applicable to China National Standard (CNS) A4 (210 x 297 mm) 1 0 310723 419623 B7 V. Description of the invention (η) The strength is 23 kgf / mm2 or more. Since the broken part is located inside the ceramic near the joint, it can be known that a good joint has been obtained. In Comparative Example No. 13, the cooling rate was 50 sec or less, but the joint was peeled. From this, it can be seen that carbon steel can be joined as an intermediate material, making it easier to join the metal member. In this embodiment, carbon steel is used as the intermediate material, but the same effect can be obtained by using carbon steel as the metal member and directly joining the insulating ceramic. In addition, as the joining method, an Mo-Mn method may be used in addition to the active metal method. Embodiment Silver 5 In the fifth embodiment, the joining of the ore or its alloy with a yield stress of 4 to 10 kgf / mm2 between the insulating ceramic 1 and the metal member 6 by the Mo-Mn method will be described. A Mo-Mn metallization layer 2 'having a thickness of 30 μϊη was formed on the joint surface of the oxidized insulating ceramic 1 having a diameter of 15 mm and a length of 25 mm. A Ni plating layer having a thickness of 5 μm was formed by the electrolytic method. Two kinds of oxygen copper plate (C1020) and Cu-0.8% by weight Cr are used as the intermediate material 4, and a thin box of BNi-7 welding material a5 with a thickness of 50 μm is arranged between the plate and the ceramic to which plating is applied, and heated in a vacuum under a load of 1 kg. 950 ° CX for 20 minutes to be joined. "Next, on the joined intermediate material 4, a stainless steel (SUS 304) metal member 6 with a diameter of 15 mm and a length of 25 mm was joined. BAg-18 (Ag-30% Cu-10% Sn -0.025% P) Welding material b7 is placed between the intermediate material 4 and the metal member 6, and heated under vacuum at 820 ° C for 20 minutes under a load of 1 kg to obtain a joint. For its comparative material, a metal member 6 that is joined to SUS 3 04 without the intermediate material 4 and heated by BNi-7 in a Mo-Mn method in a vacuum at 950 ° CX for 20 minutes is applied to this paper. Chinese national standards apply (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back first and then fill in this page> Installation -------- Order ---: -------- Complete economy Printed by the Ministry of Intellectual Property Bureau ’s Industrial Cooperative Cooperative 310723 A7 41 9623 ______B7___ V. Description of the invention (12) For the joint, and the other is the use of Cu-30 wt% Ni intermediate material with a yield stress of 17.5 kgf / mm2 4 In order to investigate the jointability of the above-mentioned insulated operating lever, a result of visual inspection and inspection of its joint strength is shown in Embodiment 5 of the first table (No. 9 and No. 10) in Embodiment No. 9 and No. of the present invention. In 10, no ceramic cracks and peeling and deformation of the joints were found. As a result of the tensile test, the tensile strength of the present invention is 23 kgf / mm2 or more, which is higher than that of Comparative Examples No. 12 and No. 14. The broken part is located inside the ceramic adjacent to the joint. It can be seen that a good joint has been obtained. In this state, the joint between the insulating ceramic 1 and the intermediate material 4 is performed by the Mo-Mn method. However, it is necessary to use a Ti-Ag-Cu welding material or a Zr-Ag-Cu welding material. Embodiment 6 In this embodiment, an embodiment of the shrink fit method that uses the thermal expansion difference between ceramic and metal and the surface joining method that uses a welding material together will be described later. Fig. 5 Shows a longitudinal section view of the insulated operating lever of the present invention. 1 series of insulating ceramics with convex joints, 6 metal members with concave joints, and 8 are active metal welding materials. "First, prepare an outer diameter of 20mm and a length of 60mm. , And the convex part of the joint is 14.001mm in diameter and 5mm in height, and the diameter of the concave part of the joint is SUS 304 metal with a diameter of 14.000mm and a depth of 5mm. Member 6. The insulating ceramic 1 is connected to the joint of the metal member 6 and an active metal welding material 10 of Cu-28wt% Ti is arranged between the surfaces perpendicular to the axis direction, and heated in a vacuum at 950 ° under an ikg load. CX for 20 minutes, simultaneous fitting and Tan-II ·! · -------- Install -------- Order -------— Please read the notes on the back before filling in this page) Intellectual Property of the Ministry of Economic Affairs扃 The paper rule printed by the staff consumer cooperative is applicable to the national standard (CNS) A4 specification (210x297 mm) 12 310723 419623 Λ7 ----B7 V. Description of the invention (13) Connected to 'Obtaining joints' As for, A cylindrical insulation ceramic 1 and a metal member 6 having the same outer diameter dimensions as those of the example were compared, and the surface joining was performed by the same joining method. The results of the tensile test performed on the insulating operating rod of the present invention are shown in the embodiment. 6 of Nol 1. In the present invention, a tensile strength of 23 kgf / mm2 or more was obtained, but the tensile strength of No. 15 of the comparative example was 7.5 kgf / mm2. If the destruction of the joined body is observed, the present invention has a crack in the interior of the ceramic, so its joint is quite strong. On the other hand, No. 15 of the comparative example was cracked at the interface between the ceramic and the welding material. From this result, the comparative example is inferior in tensile strength to the present invention, but the present invention in which the shrink fit method is used for the fitting and the surface bonding method for the welding is used to obtain a good bonding state. Further, in this embodiment, a description will be given of a case where a convex portion is provided on the ceramic surface and a concave portion is provided on the metal surface. However, if two or more pairs of uneven portions are provided, a large joint area can be joined. (Please read the precautions on the back before filling out this page. ”-------- Order · ----- I! The paper printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs applies Chinese national standards ( CNS) A4 specification (210 X 297 public meals) 13 310723 419623 'A7 _ V. Description of the invention (U) Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs η 〇 \ N > Embodiments The present invention 1 The present invention The present invention The present invention 1_ Cj 00 < 1 On u > Cu-30ni S45C 1 Cu * 0.8Cr airless network S45C _1 composite Cu / Mc / Cu _ Cu-50M〇 丨 Cu-20W Fe-32Ni-5Co- 3C -2SW) .2Mn Fe-29Ni-17Co Fe ^ 2Ni Intermediate material barrier $ Oxide is vaporized aluminum Oxidation gasification Ming oxidation 4S alumina vaporized aluminum 1 zirconium oxide_1 alumina aluminum oxide aluminum aluminum oxide Aluminum gasification Ni-13Cr-10P Ni-DCr-lOP Ni-13Cr-10P Cu-28Ti Cu-28Ti Ni-13O10P Ni-13Cr-10P Ni-13Cr-1 0P Ni-13Cr-10P Ni-13Cr-10P Ni-13Cr-10P Joint material between ceramics and ceramic Cu-28Ti Ag-30Cu-10Sb-0.025P Ag-30Cu-10Sb-0.025P Ni-13Cr-10P 1 Cu- 28Ti Ag-30Cu-10Sn-0.025P 1 Ag-30Cu-10Sn-OO25P Ag-30Cu-10Sn-0.025P Cu-28Ti 1 Ag-30Cu-10Sn-0.025P Ag-30Cu-10Sn-0.025P Ag-30Cu-10Sn -0.025P Ag-30Cu-10Sn-0.025P Ag-30Cu-10Sn-0,025P Ag-30Cu-10Sn-0.025P The joint material between the intermediate material and the metal member is cracked, peeled off, and cracked J3 & State C after welding : V »1 1 23 or more 23 or more 23 or more]] 23 or more 23 or more 23 or more 23 or more 23 or 23 or more 23 or 23 or more II Cooling speed 50 ° C / sec or less and cooling rate 50 ° C / The paper size above second is applicable to a Chinese standard (CNSM4 specification (210 X 297 mm) 14 310723 铖 1 > IP ------ I I ---- -------- Order --- ------ < Please read the notes on the back before filling this page) Λ7 419623 ____07___ V. Description of the invention (15) [Effect of the invention] For the invention described in item 1 of the scope of patent application, Inside a vacuum container ' In the insulated operating lever composed of a ceramic and a metal member that provides insulation and transmits operating force, the ceramic and the metal member are interposed between Fe-Ni-based alloy, copper-based composite material, carbon steel, or copper or an alloy thereof. It can be used to reduce the stress caused by the difference in thermal expansion, and to obtain an insulated operating lever with excellent jointability. According to the invention described in item 2 of the scope of patent application, the Fe-Ni-based alloy of the intermediate material is: Fe-Ni alloy containing 20 to 50% by mass of Ni, 20 to 50% by mass of Ni and 3 to 25% by mass Co-Fe-Ni alloy, Fe-Ni alloy containing 20 to 50 mass% Ni and 1 to 12 mass% Cr, or Fe-Ni alloy containing 20 to 50 mass% Ni and 3 to 25 mass 0 / 〇Co Ni alloys containing 0.5 to 5% by mass of C and 0.1 to 3% by mass of Si or Mn, or any one or both of them, can obtain an insulating operating lever with better jointability. For example, according to the third patent application scope According to the invention described in this item, the copper-based composite material of the intermediate material is a composite of Mo or W particles in a range of 40 to 90% by mass in Cu, or M2 between two layers of Cu. A sandwich material having a sandwich-type three-layer structure is sandwiched at a ratio of 20 to 80% by mass. Therefore, an insulating operation rod having superior jointability can be obtained. The copper or the alloy has a yield stress of 4 to 10 hgf / mm2 ', so that it can obtain more excellent insulation operation. Bar. According to the invention recorded in item 5 of the scope of the patent application, it belongs to the intermediate material '1! ^ -------- Order ------- I {Please read the precautions on the back before filling in this Page) Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the paper standard is applicable to the Chinese standard of AA (CNS> A4 specification (21mm to 7mm) 15 310723 419623 V. Description of the invention (16) A through hole is provided and the above After the ceramics are fitted in the through holes, the intermediate material is provided between the ceramics and the metal members, so that an insulated operating lever with better jointability can be obtained. For example, according to the invention described in item 6 of the scope of patent application, In a vacuum container, a manufacturing method of an insulated operating rod that provides insulation and operating force transmission and is joined by a ceramic and a metal member. A Fe-Ni-based alloy, a copper-based composite, and carbon are interposed between the ceramic and the metal member. Steel or copper or its alloy is provided with an intermediate material to join the above ceramics and the above metal members, so it can reduce or buffer the stress caused by the difference in thermal expansion, and obtain an insulated operating lever with excellent jointability. Invention By joining the broken steel of this intermediate material with ceramics at a cooling rate in the range of 50 to 200 ° C / sec, an insulated operating lever with better jointability can be obtained. For example, according to the invention described in the eighth patent application, In the manufacturing method of an insulated operating rod made of a ceramic and a metal member, which is provided in a vacuum container and provides insulation and operating force transmission, the ceramic and the metal member are provided with at least one a portion and a recessed portion, and are heated together The shrink fit method of the fitting and the welding method of welding the fitting plane, so the joining force is increased, and an insulated operating lever with better jointability can be obtained. [Simplified description of the drawing] FIG. 1 is an insulated operating lever of the present invention Sectional view of one embodiment. Figure 2 is a cross-sectional view of one embodiment of a copper-based composite material. The third circle is a longitudinal section circle β of an embodiment of the insulated operating rod of the present invention. The fourth circle is applicable activity. Implementation of the Insulation Operation of the Invention of the Metal Law (Please read the notes on the back before filling out this page) Binding ---- Ordering ------------!-^ Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Applicable Chinese national standard (CNS) A4 specification (210 * 297 mm) 16 310723 4 V. Description of the invention (n-section cross section 圏. Figure 5 is a cross-sectional view of the state of the insulation operation lever combined with shrink fit method and surface joint β [ Simple explanation of the symbols 1 Real — —.-J ί IIIII i — — — — --- ί-{Please read the precautions on the back before filling out this page) Figure 6 is a sectional view of a conventional connector. 1 Insulation ceramics 2 Metallized layer 3 Electroplated layer 4 Intermediate material 5 Welding material a 6 Metal member 7 Tan material b 8 Copper or its alloy 9 Ceramic 10 Active metal welding material 11 Tubular ceramic 12 Joint 13 Ag Welding material Intellectual Property Bureau employee The paper size printed by the consumer cooperative is applicable to the Chinese National Standard (CNS) A4 (21〇χ 297 mm) 17 310723