JP4077025B1 - Drill inspection apparatus, drill inspection method, and program thereof - Google Patents

Abstract

It is difficult to judge the timing of drill polishing and disposal without variation.
An imaging unit 20 images a cutting edge of a drill in a direction along a rotation axis. The measurement unit 34 measures the shape information of the blade edge region in the image captured by the imaging unit 20. The storage unit 36 holds reference data for the shape information of the edge region of the drill for each stage reflecting the number of polishings in the life cycle of the drill. The determination unit 38 determines the state of the cutting edge of the drill from the shape information measured by the measurement unit 34. For example, the stage corresponding to the drill to be inspected is specified by collating the shape information measured by the measurement unit 34 with the reference data for each stage held in the storage unit 36.
[Selection] Figure 2

Description

  The present invention relates to a drill inspection apparatus, a drill inspection method, and a program for inspecting a drill for making a hole in a printed circuit board or the like.

  As semiconductor processes become finer, holes that are drilled in printed circuit boards are required to have higher accuracy. The size and shape of the hole will change when the drill tip wears out or is missing, so it is necessary to inspect the tip of the drill and polish it if necessary to reuse or discard it . Generally, the timing of drill polishing and discarding is determined by the number of drilled holes.

Patent Document 1 discloses a method of determining pass / fail by comparing a reference value with a value obtained from drill blade data.
Japanese Patent Laid-Open No. 1-216752

  When the timing of drill polishing or discarding is determined by the number of holes, it may deviate from the original timing for polishing or discarding due to the difference in hardness or material of the substrate in which the holes are drilled. Moreover, when judging the timing of grinding | polishing and discarding artificially, a skilled inspector is required and work itself is complicated.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a drill inspection apparatus, a drill inspection method, and a program thereof that can accurately determine the state of a drill with simple processing. .

  A drill inspection apparatus according to an aspect of the present invention determines a state of a cutting edge of a drill from a measuring unit that measures shape information of a cutting edge region in a picked-up image of a cutting edge, and shape information measured by the measuring unit. A determination unit.

  It should be noted that any combination of the above-described constituent elements and a conversion of the expression of the present invention between a method, an apparatus, a system, a recording medium, a computer program, etc. are also effective as an aspect of the present invention.

  According to the present invention, the state of the drill can be accurately determined by a simple process.

  First, before describing the embodiment of the present invention in detail, the life cycle of a drill will be described. As the number of times of use of the drill increases, the respective cutting blades wear and the width of the cutting blade as viewed in the direction along the rotation axis becomes narrower. When the cutting blade is worn to such an extent that the accuracy of the drilled hole is impaired, the cutting edge portion is sharpened by polishing and used repeatedly, thereby extending the life of the drill. Such polishing is often performed multiple times before the drill is discarded to reduce costs. From this viewpoint, the life cycle of the drill can be classified into a plurality of stages according to the number of times of polishing. Moreover, it can classify | categorize into the state which should use the drill which the grinding | polishing of the same number of times was performed, and the state which should not be used because wear progresses.

  FIG. 1 is a diagram showing a cutting edge of a drill having two cutting edges according to stages in the life cycle. FIG. 1A is a diagram in which a cutting edge of a new drill is imaged in a direction along the rotation axis, FIG. 1B is a diagram in which a cutting edge of a drill that has been worn out due to the use of a new one is imaged, and FIG. FIG. 1D is an image of a drill edge that has been worn out after use once after polishing, and FIG. 1E is an image of an edge of the drill after twice polishing. FIG. 1F is an image of the cutting edge of the drill that has been worn by use after the second polishing, and FIG. 1G is an image of the cutting edge of the drill in a defective state. Here, since it is assumed that the drill after the second polishing is discarded after use, the drill is classified into six stages according to the state of the cutting edge, excluding the defective state. The number of times of polishing varies depending on the judgment of the blade edge and the user. Hereinafter, in this embodiment, an example in which the life cycle of a drill is classified into six stages will be described.

  Here, in order to classify whether the wear has progressed due to use or whether it is in a usable state with each number of polishing drills, the use of the drill, for example, the number of drilled holes is used. For example, when the number of holes exceeds a reference value determined experimentally and empirically that the quality of the holes cannot be guaranteed, it can be determined that wear has progressed due to use.

  FIG. 2 is a diagram showing a configuration of the drill inspection apparatus 100 according to the embodiment of the present invention. The drill inspection apparatus 100 includes an imaging unit 20, a calculation unit 30, and a display unit 40. The calculation unit 30 includes an image processing unit 32, a measurement unit 34, a storage unit 36, and a determination unit 38. The configuration of the arithmetic unit 30 can be realized by a CPU, memory, or other LSI of an arbitrary computer in hardware, and can be realized by an image processing program or a numerical analysis program loaded in the memory in software. Here, however, the functional blocks realized by the cooperation are depicted. Accordingly, those skilled in the art will understand that these functional blocks can be realized in various forms by hardware only, software only, or a combination thereof. In addition, the calculation unit 30 may be realized by cooperation of an observation apparatus equipped with the imaging unit 20 and a general-purpose computer. The calculation unit 30 includes the image processing unit 32 and the measurement unit 34 in the observation device, and the storage unit 36 and the determination unit 38 are general-purpose. It may be included in the computer.

  The imaging unit 20 images the cutting edge of the drill 10 in a direction along the rotation axis. The imaging unit 20 includes a CCD (Charge Coupled Devices) sensor or a CMOS (Complementary Metal-Oxide Semiconductor) image sensor, and acquires an image of the cutting edge of the drill 10 projected by a light source (not shown). In this embodiment, since simple parameters are used as will be described later, a low-resolution image may be used. For example, a φ0.5 drill is imaged with an optical magnification of about 30 times. The imaging unit 20 converts the acquired image including the cutting edge of the drill 10 into an electrical signal and outputs the electrical signal to the image processing unit 32.

  The calculation unit 30 refers to an area (hereinafter referred to as a blade edge area) in which an edge is captured in an image captured by the imaging unit 20, identifies a predetermined parameter, and determines the degree of drill wear, Seeking a stage in the life cycle. The predetermined parameter is defined in n (n is a natural number) dimension, and includes at least one of the length, width, and area, average, and variance obtained from the shape curve connecting the cutting edge widths. Moreover, you may include any one of the area obtained from the shape curve which tied the length of the cutting edge, an average, and dispersion | distribution. It may also include the tangent or angle of the contour of the cutting edge region. Further, the information is not limited to information obtained from the shape of the blade edge, and may include the number of holes formed. Details of these parameters will be described later.

  The image processing unit 32 adjusts the density value of the image input from the imaging unit 20. Specifically, each pixel value is binarized using a predetermined threshold value, and the cutting edge region is adjusted to “0” or “1”, and the background region is adjusted to “1” or “0”.

  The image processing unit 32 aligns binarized images. For example, the position of the tip on the center side of the cutting edge (hereinafter simply referred to as the tip in the present specification) and the position of the tip on the outer peripheral side of the cutting blade (hereinafter referred to as an edge in the specification) in the image are predetermined standards. Move or rotate the cutting edge area to match the position.

  The measuring unit 34 measures the shape information of the cutting edge region in the image processed by the image processing unit 32. The shape information is information obtained from the shape of the blade edge among the above parameters. Details will be described later.

  The storage unit 36 holds reference data for the shape information of the edge area of the drill for each stage in the life cycle of the drill. This reference data is data generated by learning from a large number of, for example, about 100 sampling images for each stage. As reference data, for example, the shape information of the cutting edge region obtained from a large number of sampling images, for example, the average value of the length and width for each stage, and a two-dimensional parameter space defined by the length and width of the cutting edge region The center coordinates of each stage may be used. In addition, the shape information of the cutting edge region obtained from the sampling image of each stage is plotted in the two-dimensional parameter space, and a predetermined linear classifier or non-linear classifier such as a neural network or a support vector is plotted based on the result. A machine or the like may be constructed, and the two-dimensional parameter space may be divided into regions for each stage. In this case, data for specifying each region, such as a boundary line of each region, is the reference data.

  In addition, the storage unit 36 may further hold, for each stage on the life cycle of the drill, a change characteristic defined by the shape information of the cutting edge region due to the use of the drill. The usage of the drill in each stage is specified by the number of holes drilled. For example, if a drill that has been ground once is experimentally and empirically determined to transition to a stage in which wear has advanced due to use, a state where a 1500 hole has been drilled is used. 50% state is obtained.

  The determination unit 38 determines the state of the cutting edge of the drill from the shape information measured by the measurement unit 34. Specifically, by comparing the shape information measured by the measurement unit 34 with the reference data for each stage held in the storage unit 36, the stage corresponding to the drill to be inspected is specified.

  For example, when the center coordinates of each stage are held as reference data, the determination unit 38 compares the coordinates specified by the shape information including the measured length and width with the center coordinates of each stage and is closest. The center coordinates are specified, and the stage of the center coordinates is specified as the stage where the inspection target drill is located. Further, when the two-dimensional parameter space defined by the shape information including the length and width of the cutting edge region is divided into regions for each stage in advance, the determination unit 38 uses the shape information including the measured length and width. By determining which region the defined coordinates belong to, the stage to which the drill to be inspected corresponds is specified.

  Further, the determination unit 38 may obtain the degree of wear at the stage to which the drill to be inspected corresponds by comparing the shape information measured by the measurement unit 34 with the change characteristics held in the storage unit 36. . In other words, on the transition curve defined by the shape information consisting of the length and width of the cutting edge region representing the change characteristic, the closest coordinate is specified from the coordinates defined by the shape information consisting of the measured length and width Then, the degree of use, in other words, the degree of wear is specified from the position of the coordinates on the transition curve.

  The display unit 40 displays the stage on the life cycle to which the drill to be inspected specified by the calculation unit 30 and the degree of wear in the stage are displayed. Further, a message for informing the inspector of the state of the blade edge and prompting polishing or discarding may be displayed. Further, an image of the cutting edge region imaged by the imaging unit 20 may be displayed. Alternatively, when inspecting a plurality of cutting edges collectively in a cartridge, the state of each drill may be displayed in a tabular format or the like.

  FIG. 3 is a diagram for explaining parameters specified from an image including a cutting edge region. In FIG. 3, the length L of the cutting edge region composed of two cutting edges is defined by the length between the coordinate values in the longitudinal direction of the sharpest position on each edge side of the two cutting edges. The It almost matches the diameter of the drill blade. The width W of the blade edge region is defined by the length between the coordinate values in the short direction of the position swelled to the outermost side in the two cutting blades. The two coordinate axes in FIG. 3 are defined by the number of pixels. This number of pixels can be converted to an actual length by referring to the photographing magnification and the enlargement ratio or reduction ratio in image processing.

  The measuring unit 34 may measure the widths X1 to Xm (m is a natural number) of each cutting edge for each row in the longitudinal direction in addition to the length L and the width W of the cutting edge region. Moreover, you may measure length Y1-Yp (p is a natural number) of each cutting blade for every row | line | column in a transversal direction. When the widths X1 to Xm for each row of the cutting blades are connected, a shape curve relating to the widths X1 to Xm described later can be obtained.

  FIG. 4 is a diagram in which sample data is plotted in a two-dimensional parameter space defined by the shape information of the cutting edge region. This two-dimensional parameter space has a width on the vertical axis and a length on the horizontal axis. Referring to FIG. 4, it can be seen that significant region division is possible from the sample data of each stage.

  FIG. 5 is a diagram showing the relationship between the aspect ratio (width / length) of sample data and the degree of use. The vertical axis represents the aspect ratio of the sample data, and the horizontal axis represents the transition of the stage and the transition of the number of holes in each stage. In FIG. 5, from the scale on the left, there are 0 holes drilled with a new drill, 1000 holes with a new one, 2000 holes with a new one, 4000 holes with a new one. The reusable drill that has already been used will continue in the direction of 1000 holes and the degree of use will increase. As shown in FIG. 5, it is possible to obtain transition curves that are inclined to the lower right for each stage of a new product, a reuse that has been polished once, and a reuse that has been polished twice. The determination unit 38 can accurately estimate the stage on the life cycle of the cutting edge and the degree of wear by identifying the point on the transition curve that has the closest aspect ratio of the drill to be inspected.

  FIG. 6 shows an example of a drill inspection result screen 50 displayed on the display unit 40. This screen 50 displays at least the corresponding stage of the drill to be inspected and the degree of wear at that stage. The stage column 52 indicates the current stage corresponding to the drill to be inspected. In the example of FIG. 6, the stage column 52 indicates that it corresponds to the reuse stage that has been polished once. The usage status column 54 indicates the usage status of the drill, and displays whether it is unused, in use, or not available. The first wear level column 56 displays the wear level at the stage as a numerical value. The second wear level column 58 displays the wear level at the stage with a gauge.

  FIG. 7 is a flowchart showing the basic operation of the drill inspection apparatus 100 according to the present embodiment. The image processing unit 32 adjusts the density value of the cutting edge image of the drill imaged by the imaging unit 20 (S60). The image processing unit 32 aligns the binarized image by adjusting the density value (S62). The subsequent processing may be performed using the original image without adjusting the density value. The measurement unit 34 measures the shape information of the cutting edge region in the image processed by the image processing unit 32 (S64). The determination unit 38 collates the measured shape information of the cutting edge region with the reference data for each stage registered in the storage unit 36 (S66). The determination unit 38 determines the state of the cutting edge of the inspection target drill as a result of the collation (S68). For example, identify which stage in the life cycle the drill is in.

  As described above, according to the present embodiment, the state of the drill can be accurately determined by simple processing. That is, since the stage on the life cycle to which the drill to be inspected can be quantitatively determined using shape information such as the length and width of the cutting edge region, it is possible to accurately determine the timing of polishing and discarding Can do. Since the determination can be made quantitatively, the determination can be made more accurately than the polishing or discard timing determination depending on the number of holes.

  In addition, since a value that can be easily measured, such as shape information including the length and width of the cutting edge region, is used as a parameter, it can be determined by simple processing, and high-speed processing is possible.

  In addition, the degree of wear can be estimated by using the change characteristics defined by the shape information of the cutting edge region. The above-mentioned Patent Document 1 only performs processing for detecting defective products, and cannot specify the degree of wear.

  Also, as shown in FIGS. 4 and 5, the area of each stage divided by the shape information of the cutting edge area statistically obtained from the sample data for each stage, and the change characteristics obtained in units of stages are It is good for specifying the degree of wear, and the corresponding stage of the drill to be inspected can be accurately determined.

  Further, since the shape information of the cutting edge region is used as a parameter, there is no need for strictness for obtaining the outer peripheral coordinates, and the determination accuracy can be maintained even for a relatively low resolution image. Therefore, it is not necessary to raise the specifications of the camera, and a highly accurate inspection can be realized with a simple configuration.

  The present invention has been described based on the embodiments. This embodiment is an exemplification, and it will be understood by those skilled in the art that various modifications can be made to combinations of the respective constituent elements and processing processes, and such modifications are also within the scope of the present invention. is there.

  Hereinafter, typical modifications will be described. In this modification, in addition to the shape information such as the length and width of the cutting edge region, the accuracy is further improved by adding other parameters. In this modification, the parameters obtained from the shape curve obtained by measuring the widths X1 to Xm of the cutting blades included in the cutting edge region in the longitudinal direction and shown in FIG. 3 as additional parameters are used. More specifically, an area obtained by integrating the width of the cutting edge included in the blade edge region by a predetermined number of rows in the longitudinal direction is used.

  The storage unit 36 further retains the area obtained by integrating the widths X1 to Xm of the cutting blades included in the cutting edge region by a predetermined number of rows in the longitudinal direction (m rows) as a part of the reference data, in units of stages. To do. Here, the predetermined number of rows may be the number of all pixels from the edge to the tip of each cutting edge, or all the lines from the edge of one cutting edge that is symmetrical to the edge of the other cutting edge. It may be the number of pixels, or about several tens of pixels from the edge of each cutting edge. In addition, you may obtain | require the said area about both among two cutting blades, and you may obtain | require an area only about one side.

  The measuring unit 34 measures the width of the cutting edge included in the cutting edge region of the drill to be inspected by at least a predetermined number of rows in the longitudinal direction.

  The storage unit 36 obtains average values of the length, width, and area of the cutting edge region obtained from a large number of sampling images as the reference data for each stage, and uses the length, width, and area of the cutting edge region. The center coordinates of each stage in the defined three-dimensional parameter space may be used. Further, in the three-dimensional parameter space, the length, width and area of the cutting edge region obtained from the sampling image of each stage are plotted, and based on the result, a predetermined linear discriminator or non-linear discriminator, for example, A neural network or a support vector machine may be constructed to divide the three-dimensional parameter space into regions for each stage. In this case, data for specifying each region such as a boundary plane of each region is the reference data.

  The storage unit 36 may further hold, for each stage on the life cycle of the drill, the change characteristics defined by the length, width, and area of the cutting edge region due to the use of the drill.

  The determination unit 38 obtains the area by integrating the widths X1 to Xm of the cutting blades corresponding to the number of rows measured by the measurement unit 34. When obtaining this area, the amount of calculation can be reduced by smoothing the shape curve connecting the widths X1 to Xm of the cutting edge using a predetermined filter. Details will be described later.

  The determination unit 38 specifies the stage to which the drill to be inspected corresponds by comparing the length, width, and area measured by the measurement unit 34 with the reference data held in the storage unit 36.

  For example, when the center coordinates of each stage are held as reference data, the determination unit 38 compares the coordinates specified by the measured length, width, and area of the cutting edge region with the center coordinates of each stage. Then, the closest center coordinate is specified, and the stage of the center coordinate is specified as the stage corresponding to the drill to be inspected. Further, when the three-dimensional parameter space defined by the length, width, and area of the cutting edge region is divided into regions for each stage in advance, the determination unit 38 defines the measured length, width, and obtained area. The stage to which the drill to be inspected corresponds is determined by determining to which area the coordinate to be assigned belongs.

  In addition, the determination unit 38 compares the length, width, and obtained area measured by the measurement unit 34 with the transition curve held in the storage unit 36, and identifies the position on the closest curve. The degree of wear at the stage corresponding to the drill to be inspected may be obtained by comparing the measured length and the change characteristics.

  FIG. 8 is a diagram showing a shape curve connecting the widths X1 to Xm of the cutting blades. The vertical axis represents the width X1 to Xm of the cutting edge as a deviation, and the horizontal axis represents the number of rows in the longitudinal direction of the cutting edge. The deviation here is a value obtained by subtracting the average value of the widths X1 to Xm of the cutting blades from the widths X1 to Xm of the respective cutting blades. Referring to FIG. 8, it can be seen that the edge portion and the tip portion of the cutting edge become thinner. In addition, the determination part 38 can determine with a defect | deletion, when the deviation which exceeds the threshold value calculated | required experimentally and empirically appears. Alternatively, it may be determined that there is a defect when there is a change between adjacent deviations that exceeds an experimentally and empirically determined threshold value.

  FIG. 9 is a diagram illustrating a state in which an area is obtained from a shape curve connecting the cutting blade widths X1 to Xm. FIG. 9 shows an example in which the area is obtained by integrating the widths X1 to Xm of the cutting edge defined by the deviation for 40 lines from the edge. When obtaining this area, the shape curve may be smoothed using a Gaussian filter. Each deviation is normalized to a value from 0 to 1. Alternatively, standard deviation or variance may be used instead of area.

  FIG. 10 is a diagram showing sample data of the area obtained from the shape curve connecting the widths X1 to Xm of the cutting blades. In FIG. 10, seven sample data are obtained for each of the seven stages including the missing state. Each area is obtained by integrating 40 lines from the edge. It can be seen that there is a certain tendency for each stage. Of course, new and polished drills tend to be large in area.

  As described above, according to the present modification, the accuracy of inspection can be further improved as compared with the above-described embodiment. That is, in addition to the length and width of the cutting edge region, the above-mentioned area that is significant for specifying the stage can be included in the parameter, so that it can be specified with higher accuracy which stage it corresponds to. Moreover, the defect state can be easily detected.

  In the above modification, in addition to the length and width of the cutting edge region, the area obtained from the shape curve connecting the widths X1 to Xm of the cutting edge is used, but other parameters may be adopted. For example, an average value, variance, or standard deviation of the cutting blade widths X1 to Xm may be used. Further, the width X1 to Xm of the cutting edge included in the blade edge region obtained from the captured image, the average value of the difference from the width of the corresponding cutting edge of the reference image, the variance, the standard deviation, or the curve connecting these differences An area may be used. Further, instead of the cutting edge widths X1 to Xm, the same parameters may be used for the cutting blade lengths Y1 to Xp. Furthermore, instead of the three-dimensional parameter space, a parameter space of four or more dimensions may be used in combination.

  Another modification will be described. In this modification, in addition to shape information such as the length, width, and area of the cutting edge region, or by using other parameters instead of at least one of them, the accuracy is further improved. is there. In this modification, as an additional parameter, the tangent and angle of the contour of the cutting edge region are measured and used as parameters. Specific examples are shown below.

  As shown in FIG. 1 above, the tip of the drill has a sharp corner before being used, whereas the one with advanced wear becomes smooth. This property is extracted as a directional characteristic using a Gabor filter. That is, a horizontal component is extracted by applying a Gabor filter to the blade edge image, and a straight line is extracted by performing a Hough transform on the component. The slope of the straight line is set as the parameter. This parameter can be included as part of the reference data.

Here, the Gabor filter will be described. The following (Formula 1) shows a Gabor function.
F (x, y) = e−π (x2a2 + y2b2) cos (u + v) (Equation 1)
u = f cos θ, v = fsin θ, f: frequency

  The output image F (x, y) is considered to represent the input image with a wavelet of the Gabor function, and the range characteristics of the wavelet can be changed by the parameters a and b, and the periodic characteristics can be changed by the parameters u and v. . As described above, the Gabor filter can have orientation selectivity by changing the filter direction, and can extract from the overall feature to the local feature by changing the filter frequency.

  In the embodiment described above, the determination unit 38 calculates a simple Euclidean distance and obtains the closest center coordinate of the stage when collating the coordinate obtained by measurement with the center coordinate of each stage. . In this respect, the Mahano Bis distance may be calculated in consideration of the variance of the learning data, that is, the spread.

  Moreover, in the said FIG. 6, the example of the test result screen 50 of one drill was shown. FIG. 11 is a diagram illustrating an example of a plurality of drill inspection result screens 60 displayed on the display unit 40. This screen 60 is a display method suitable for a case where a plurality of drills are collected in a cartridge and continuously inspected. FIG. 11 shows the inspection result when a total of 16 drills mounted on a 4 × 4 cartridge are continuously inspected on one screen. Each display window 61 indicates the degree of wear of each drill. The degree of wear is visually indicated by the size of the filled area. In addition, the degree of wear may be displayed by color coding. For example, a display method is possible in which the closer to red, the higher the degree of wear is indicated. The display form of FIG. 11 and the display form of FIG. 6 may be displayed together so that the corresponding stage can be recognized on the same screen.

It is the figure which imaged the blade edge | tip of the new drill in the direction in alignment with a rotating shaft. It is the figure which imaged the blade edge | tip of the drill which abrasion advanced by the new use. It is the figure which imaged the blade edge of the drill after grinding once. It is the figure which imaged the blade edge | tip of the drill which abrasion advanced by use after one grinding | polishing. It is the figure which imaged the blade edge of the drill after grinding twice. It is the figure which imaged the blade edge | tip of the drill which abrasion advanced by the use after grinding | polishing twice. It is the figure which imaged the blade edge of the drill in a deficient state. It is a figure which shows the structure of the drill inspection apparatus in embodiment of this invention. It is a figure for demonstrating the parameter specified from the image containing a blade edge | tip area | region. It is the figure which plotted sample data in the two-dimensional parameter space prescribed | regulated by the shape information of the blade edge | tip area | region. It is a figure which shows the relationship between the aspect ratio (width / length) of sample data, and the grade of use. It is a figure which shows an example of the test result screen of the drill displayed on a display part. It is a flowchart which shows the basic operation | movement of the drill inspection apparatus which concerns on this Embodiment. It is a figure which shows the shape curve which tied the width | variety of the cutting blade. It is a figure which shows a mode that an area is calculated | required from the shape curve which tied the width | variety of a cutting blade. It is a figure which shows the sample data of the area obtained from the shape curve which tied the width | variety of a cutting blade. It is a figure which shows an example of the test result screen of the several drill displayed on a display part.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 drill, 20 imaging part, 30 calculating part, 32 image processing part, 34 measuring part, 36 memory | storage part, 38 determination part, 40 display part, 100 drill inspection apparatus.

Claims (4)

For each stage on the life cycle of the drill, a storage unit that holds the change characteristics defined by the shape information of the cutting edge region by using the drill,
A measurement unit that measures shape information of a blade edge region in a blade edge image of a captured drill;
Said measured shape information by measuring unit by collating the variation characteristics stored in the storage unit, a determination unit for determining the extent of wear at the stage and the stage wherein the drill is applicable,
A drill inspection apparatus comprising: The drill inspection apparatus according to claim 1, wherein the change characteristic is represented by a transition curve defined by a length and a width of the cutting edge region. For each stage in the life cycle of the drill, a registration step for registering in advance the change characteristics defined by the shape information of the cutting edge region by using the drill,
A measuring step for measuring shape information of a cutting edge region in the image of the edge of the imaged drill;
And the measurement configuration information measured by step, by matching the registered variation characteristic by the registration step, a determining step of determining the extent of wear at the stage and the stage wherein the drill is applicable,
A drill inspection method comprising: For each stage in the life cycle of the drill, a registration process for registering in advance the change characteristics defined by the shape information of the cutting edge region by using the drill,
A measurement process for measuring shape information of the edge region in the image of the edge of the imaged drill;
And the measurement configuration information measured by the processing by collating the registered variation characteristic by the registration processing, the determination process for determining the extent of wear at the stage and the stage wherein the drill is applicable,
A drill inspection program characterized by causing a computer to execute.