JP4062529B2 - Probe card reinforcement plate - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a probe card reinforcing plate for reinforcing a main board.
[0002]
[Prior art]
A probe card for measuring electrical characteristics of a semiconductor device such as an LSI chip is generally composed of a main board that contacts a measuring instrument and a contact that contacts an object to be inspected. The main board includes the entire probe card. The mechanical strength required to support the temperature and the high thermal conductivity corresponding to the change in the temperature distribution caused by absorbing the heat generated by the electrical contact during measurement are required.
[0003]
Conventionally, in order to cope with the above requirements, it has been generally performed to provide reinforcing plates on the front and back surfaces of the main board. As the reinforcing plate for the probe card, an aluminum metal material that emphasizes weight reduction and a stainless material that emphasizes strength are used.
[0004]
[Problems to be solved by the invention]
However, when an aluminum-based material is used for the probe card reinforcing plate, there is a drawback that it is weak in strength, and there is a problem that it cannot withstand a contact pressure with a semiconductor device unless a sufficient thickness is secured. Also, when the material becomes thicker and the heat capacity increases, the heat conduction to the whole becomes slow, and the heat conductivity of aluminum is insufficient to cope with the change in temperature distribution due to the heat generated by electrical contact during measurement. There was a problem.
[0005]
In addition, when a stainless steel material is used for the probe card reinforcing plate, the thermal conductivity is poor, which causes further problems in the ability to follow changes in temperature distribution due to heat generated by electrical contact during measurement. .
[0006]
Also, a difference in thermal expansion occurs due to the difference in material between the main board and the reinforcing plate, and the bimetallic distortion causes the probe card reinforcing plate to be deformed into a curved shape in synchronism with the main board. The electrical contact failure occurs between the main surface of the substrate and between the object to be inspected and one of the main surfaces of the main substrate, resulting in unstable electrical contact and loss of reliability. there were.
[0007]
The present invention solves the problem of such a conventional probe card reinforcing plate, and is used to measure the electrical characteristics when measuring various electrical characteristics using a material having good thermal conductivity. An object of the present invention is to provide a reinforcing plate for a probe card that can smoothly cope with a change in temperature distribution due to heat generated by contact and can perform stable characteristic measurement over a long period of time.
[0008]
[Means for Solving the Problems]
In order to achieve the above object, a reinforcing plate for a probe card of the present invention is a material that is attached to the other surface of a main board having a contact that contacts an object to be inspected on one surface and includes a copper layer. It is supposed to consist of
[0009]
The reinforcing plate for probe card of the present invention uses a stainless steel or aluminum material as a main material and is coated with a plating layer made of a material containing a copper layer on the surface thereof, so that the mechanical strength surface of the main material The thermal conductivity surface could be improved by covering the copper layer. Therefore, it can be said that the probe card reinforcing plate of the present invention has both material strength and thermal conductivity.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
1 is a plan view showing an embodiment of the present invention, and FIG. 2 is an enlarged sectional view taken along the line II in FIG.
[0011]
As shown in FIGS. 1 and 2, the probe card A includes a main board 1 having a contact 2 on a second main surface 1 b that contacts an object to be inspected (not shown), and a first main board 1 of the main board 1. And a probe card reinforcing plate 3 provided on the surface 1a.
[0012]
As shown in FIG. 2, the main substrate 1 includes a first main surface 1a having a plurality of first connection electrodes (not shown) that are in contact with electrodes (not shown) of a measuring instrument (not shown), and a first connection. And a second connection electrode (not shown) that is electrically connected by a wiring electrode (not shown) and wiring (not shown), and this second connection electrode (not shown) is an object to be inspected (not shown). ) And a second main surface 1b formed in electrical continuity with the contact 2 in contact with the contact 2).
[0013]
As shown in FIG. 1, the main substrate 1 is formed in a circular shape. However, the main substrate 1 is not particularly limited to this shape, and may be an ellipse, or a substantially circular shape partially missing. Alternatively, it may be almost elliptical.
[0014]
The probe card reinforcing plate 3 uses a metal material such as iron, stainless steel, aluminum or the like as a base material 3a, and a plating layer 3b made of a so-called copper layer plated on the surface of the base material 3a with a material containing copper. Since this plating layer 3b is easily rusted, the surface is further covered with a surface layer 3c having anti-rust properties.
[0015]
As shown in FIG. 1, the probe card reinforcing plate 3 is formed in a square shape substantially at the center of the circular main substrate 1, but is not particularly limited to this shape. You may form in a shape, cloth shape, radial shape, etc.
[0016]
When the base material 3a is a stainless steel metal material, the probe card reinforcing plate 3 is not particularly limited to one of the stainless steel materials. For example, SUS304, SUS316 or the like can be used. Similarly, in the case of an aluminum metal material, a general aluminum material such as A5056 or A6063 can be used.
[0017]
As the material of the plating layer 3b containing copper of the probe card reinforcing plate 3, copper, a copper alloy, or the like is used. As a coating method in this case, there are methods such as electroplating and electroless plating, and any method may be used.
[0018]
As a material for the surface layer 3c having the antirust property of the probe card reinforcing plate 3, nickel, chromium, or the like is used, and plating treatment with these materials is usually performed.
[0019]
As mentioned above, although the Example considered to be a typical example of this invention was demonstrated, this invention is not necessarily limited only to these Example structures, It is equipped with the said component requirements described by this invention, and this invention. Can be implemented with appropriate modifications within the range having the effects described below.
[0020]
【The invention's effect】
As is apparent from the above description, the probe card reinforcing plate described in the present invention is attached to a main substrate having a contact on one surface that contacts an object to be inspected. Changes in temperature distribution caused by electrical contact when measuring various electrical characteristics of materials with good thermal conductivity by being attached to the other surface of the main board and comprising a copper layer As a result, it has become possible to expect a remarkable effect of smoothing the response to the problem and enabling stable characteristic measurement over a long period of time.
[Brief description of the drawings]
FIG. 1 is a plan view showing an embodiment of the present invention.
FIG. 2 is an enlarged cross-sectional view taken along line II in FIG.
[Explanation of symbols]
A Probe card 1 Main substrate 1a First main surface 1b of main substrate Second main surface 2 of main substrate Contact 3 Reinforcing plate for probe card 3a Base material 3b Plating layer 3c Surface layer

Claims (1)

A reinforcing plate for a probe card that is attached to a main board having a contact that contacts an object to be inspected on one surface, the reinforcing board being attached to the other surface of the main board, and a metal material A reinforcing plate for a probe card, characterized in that the base material is coated with a plated layer of a material made of copper, and the surface of the plated layer is coated with a surface layer having antirust properties .

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