JP4058357B2 - Heat spreader transport device and resin sealing device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a heat spreader conveyance device that takes out a heat spreader that is stacked and stored in a magazine with a supply hand and loads the heat spreader into a mold, and a resin sealing device that includes the heat spreader conveyance device.
[0002]
[Prior art]
A heat spreader is used to efficiently release the heat generated from the semiconductor chip to the outside of the package part (resin sealing part). The heat spreader is carried together with a semiconductor chip mounted on a strip (a lead frame, a resin substrate, a film substrate, etc.) into a mold die and is collectively sealed with resin. When resin-sealing the heat spreader together with the semiconductor chip, it is necessary to align and set the heat spreader in the mold, but conventionally the following supply means have been adopted.
[0003]
The first means is a method in which the operator manually sets the heat spreader individually in the cavity recess of the mold.
The second means is a method in which the heat spreader is set in advance in a setting jig corresponding to the cavity concave portion of the mold, and then the setting jig is carried into the mold and set.
The third means is a method of fixing the heat spreader by caulking the strip.
Further, the fourth means is to pick up the heat spreader from the magazine in which the heat spreaders are stacked and stored by picking them up and take them out on the pallet, transfer them from the pallet to the hand, and move the inner moving body that supports the hand. This is a method in which the heat spreader is moved to the cavity recess by moving the frame along the frame to the vicinity of the mold die, further moving the moving frame into the press portion and moving the hand onto the mold die (see, for example, Patent Document 1). ).
[0004]
[Patent Document 1]
JP-A-11-179747 (page 3-4, FIG. 1)
[0005]
[Problems to be solved by the invention]
The above-described means for supplying the heat spreader to the mold has the following problems.
That is, according to the first means, since the operator manually sets the heat spreader individually on the mold die, it takes a long time to reduce the productivity and the mold die is usually heated at a high temperature (180 ° C. ), It is necessary to pay attention to safety.
Further, according to the second means, the carrying-in to the mold is improved, but since the operator needs to manually set the heat spreader on the setting jig, the productivity is lowered.
Further, according to the third means, a process for caulking the heat spreader to the strip in advance is necessary, and the production cost increases.
Further, according to the fourth means, the pickup for taking out the heat spreader from the magazine onto the pallet and the hand for carrying the heat spreader from the pallet into the mold die are driven separately, and the inner moving body supporting the hand and the moving frame are provided. Since it is driven by a separate drive source and carried into the mold, work efficiency is likely to be lowered. Also, since the heat spreader is handed over by pick-up and hand on the pallet, there is a shortage during delivery. Fall Misalignment is likely to occur, and set errors in the mold are likely to occur. Furthermore, after the heat spreader is carried in, it is necessary to carry in the strip or resin into the mold by another conveying means, so that a cycle time is required.
[0006]
The object of the present invention is to solve the above-mentioned problems of the prior art, quickly carry-in the individualized heat spreader into the mold, and shift the position, overlap, and lack during the heat-spreader carrying-in. Fall Another object of the present invention is to provide a heat spreader transport device that prevents set errors in the metal mold and a resin sealing device including the heat spreader transport device.
[0007]
[Means for Solving the Problems]
In order to solve the above problems, the present invention has the following configuration.
In the heat spreader transport device, the heat spreader is held by the supply hand by the number required for one resin sealing from the heat spreader magazine in which the heat spreaders are stacked and stored in the storage grooves provided at a plurality of locations. The heat spreader supply unit to be removed and the heat spreader missing from the heat spreader supply unit by the supply hand Fall An inspection section for detecting overlap and inversion, a heat spreader alignment section in which the heat spreader after inspection is transferred by a supply hand and aligned with the cavity recess of the mold, and the heat spreader alignment section Heat spreader - It is characterized by having a heat spreader carry-in part which is delivered and carried into the cavity concave part of the mold.
Further, the resin sealing device is characterized by including the above-described heat spreader conveying device.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. In the resin sealing device in the present embodiment, a loader for carrying a molded product into a press part and an unloader for taking out the molded product from the press part to a molded product take-out part share the moving rail part and perform resin sealing. It is configured as follows.
The present embodiment shows a mode in which a press section is mounted on the extension rail unit and is added.
FIG. 1 is a plan view illustrating a layout configuration according to an example of a resin sealing device, FIG. 2 is a front view of a heat spreader magazine and an elevator mechanism, and FIG. 3 is an explanatory diagram illustrating an overall configuration of a pick and place equipped with a supply hand. 4 is an enlarged front view of the inspection unit, FIGS. 5A to 5D are explanatory views showing the sensor optical axis in the inspection unit, FIG. 6 is a plan view of the heat spreader take-out unit and the delivery unit, and FIG. FIG. 8 is a side view in which a loading suction head portion is added to the loader, FIG. 9 is an explanatory view of the loader of FIG. 1 viewed from the moving rail portion side, and FIGS. 10A and 10B are molds. It is explanatory drawing which shows the detection operation | movement of the setting mistake of the heat spreader set to (1).
[0009]
In FIG. 1, first, a schematic configuration of the resin sealing device will be described. The resin sealing device includes an extension rail unit C that is separable between the molded product supply unit A and the molded product storage unit B. Each of the molded product supply unit A, the molded product storage unit B, and the extension rail unit C has a moving rail part and a pedestal part, and the pedestal part can be provided with various functional parts. In the present embodiment, as the extension rail unit C, a press section and a heat spreader transport device are respectively detachably provided. Hereinafter, the configuration of each unit will be described.
[0010]
[Molded product supply unit A]
In FIG. 1, reference numeral 1 denotes a strip supply unit. A strip (a semiconductor chip mounted on a lead frame, a resin substrate, etc.) housed in a supply magazine 2 is placed on a frame index 3 and then directed to a preheat rail 4. Are sent out. In the preheat rail 4, the lead frame is preheated and delivered to a loader described later.
Reference numeral 5 denotes a resin tablet supply unit, which loads resin tablets arranged and sent from a linear feeder that sends out resin tablets into the tablet holder 6 while temporarily storing them in an index table, and moves the tablet holder 6 to a supply position. To the loader 7.
[0011]
[Molded product storage unit B]
In FIG. 1, reference numeral 9 denotes a molded product take-out unit, which delivers a molded product taken out from any of the press units by the unloader 8 to a moving table 10 waiting on the lower side. When the unloader 8 delivers the molded product to the moving table 10 waiting in the molded product taking-out unit 9, the unloader 8 shifts to an operation for taking out the next molded product. The moving table 10 places the molded product and conveys it to the delegation unit 11. The degate unit 11 presses and cools the molded product placed on the moving table 10 and cools it, and twists the strip to break the gate and separate unnecessary resin. Unnecessary resin is collected in a scrap box (not shown). The moving table 10 places only the molded product and conveys it to the molded product storage unit 12. In the molded product storage unit 12, the molded product transported to the movable table 10 is held at one end by the molded product pickup 13. And if the movement table 10 moves toward the molded product extraction part 9, it will rotate in the storage magazine 14 provided in the downward direction as needed, and it will accommodate in direction.
[0012]
[Expansion rail unit C]
The extension rail unit C is detachably provided between the molded product supply unit A and the molded product storage unit B. The extension rail unit C is added between the molded product supply unit A and the molded product storage unit B, and the extension side moving rail portion 46 is provided between the supply side moving rail portion 15 and the storage side moving rail portion 16. The loader 7 and the unloader 8 are connected to each other and can move on the extension side moving rail portion 46 (see FIG. 1).
[0013]
Functional units having various functions such as a press unit 18 and a heat spreader transport device 19 can be mounted on the expansion side pedestal unit 17 of the expansion rail unit C. The extension rail unit C is inserted between the molded product supply unit A and the molded product storage unit B so that the moving rail portions are continuous, and then between the extension side pedestal portion 17 and the supply side pedestal portion 20. The extension side pedestal portion 17 and the storage side pedestal portion 21 and the extension side pedestal portion 17 are connected to each other by bolting. Although it is possible to change the extension rail unit C to another extension rail unit C, it is possible to replace only the function unit in consideration of the size of various function units.
[0014]
Further, the molded product storage unit B and the extension rail unit C are provided with a suction duct 22 along the moving rail portions 16 and 46. The suction duct 22 is provided so as to be connectable from a duct connecting portion 24 that can be connected to the unloader side suction duct 23 of the unloader 8. When the unloader 8 enters the press portion 18, the unloader side suction duct 23 is connected to the suction duct 22 via the duct connecting portion 24 and collects dust to a dust collector (not shown).
[0015]
In the present embodiment, the press portions 18 are arranged in parallel at three locations. Each pressing unit 18 includes a mold 25, a known mold opening / closing mechanism that opens the mold 25, and a known transfer mechanism that feeds a sealing resin while applying resin pressure to the cavity of the mold 25. Is equipped. Each press part 18 is provided in the expansion side pedestal part 17 and the storage side pedestal part 21, and a film unit that stretches a release film that covers the mold surface of the mold 25 is provided as necessary. Also good.
[0016]
Further, the heat spreader transport device 19 is provided between the molded product supply unit A and the extension rail unit C on which the press unit 18 is mounted. The heat spreader transport device 19 is provided on the extension side pedestal portion 17. As will be described later, the heat spreader transporting device 19 takes out the heat spreader HS stacked and stored in the magazine with a supply hand (pickup hand), transfers it to the loader 7 and carries it into the mold 25.
[0017]
The loader 7 and unloader 8 are configured to move using a moving rail portion. That is, the loader 7 receives and holds the lead frame with the preheat rail 4, receives and holds the resin tablet from the tablet holder 6, and further receives the heat spreader HS from the heat spreader transport device 19 and applies it to each press unit 18. It is designed to move forward and backward from the direction. Further, the molded product after the resin sealing is released from the mold die 25 and is carried out to the molded product take-out portion 7 by the unloader 8. At the position where the unloader 8 enters each press portion 18, the unloader side suction duct 23 is connected to the duct connection portion 24 of the suction duct 22, and the upper and lower dies are moved forward and backward to the mold die 25 opened. A suction operation is performed while cleaning the surface, and dust such as resin dust is collected in the dust collector.
[0018]
[Heat spreader conveyor]
Here, the configuration of the heat spreader transport device 19 mounted on the extension rail unit C will be specifically described with reference to FIGS.
In FIG. 1, reference numeral 26 denotes a heat spreader supply unit, and picks as many heat spreaders HS as necessary for one resin sealing from a heat spreader magazine 27 in which heat spreaders HS are stacked and stored in storage grooves provided at a plurality of locations. The heat spreader HS is adsorbed and taken out by the and place 28.
Reference numeral 29 denotes an inspection unit, which lacks the heat spreader HS taken out by the pick and place 28 from the heat spreader supply unit 26. Fall The inspection stage 30 detects overlap, inversion, and the like.
Reference numeral 31 denotes a heat spreader aligning portion. The heat spreader HS after inspection is transferred to the alignment tray 32 by the pick-and-place 28, and aligned and arranged in accordance with the cavity concave portion of the mold 25.
The loader 7 serves as both a work carry-in part such as a strip and a resin tablet and a heat spreader carry-in part. The heat spreader HS is delivered from the alignment tray 32 to the cavity recess of the mold 25 together with the lead frame and the resin tablet. It comes to carry in.
[0019]
In FIG. 1, a heat spreader magazine 27 is arranged in parallel in the heat spreader supply unit 26. The heat spreader magazine 27 accommodates a magazine main body 33, and the magazine main body 33 is formed with a number of stock grooves 34 necessary for one-time resin sealing. In each stock groove 34, the individualized heat spreader HS is stored in an overlapping manner. Since the operator performs filling of the heat spreader HS in the stock groove 34, it is assumed that the front and back are reversed in a type having a variation in the number of stored sheets and directionality. Therefore, in order to perform a stable take-out operation by the pick and place 28, the uppermost position of the heat spreader HS housed in the heat spreader magazine 27 is detected by a plurality of transmission type sensors.
[0020]
In FIG. 2, a first relief portion 33 a for a level sensor is formed on the uppermost side of the magazine main body 33 and communicates between the stock grooves 34 and is formed in the longitudinal direction. The insert block 34a loaded at the lowermost side of the stock groove 34 is formed with a second relief portion (not shown) such as a through hole for detecting the presence or absence of the heat spreader HS for each stock groove 34. Has been.
[0021]
In FIG. 2, the height position of the heat spreader magazine 27 is detected by passing the sensor optical axis through the first relief portion 33 a of each stock groove 34. Further, the pitch between the heat spreader magazines 27 arranged side by side does not coincide with the pitch between the strips of the mold 25 and is arranged at a narrower pitch. The pick-and-place 28 sequentially takes out the heat spreader HS from the heat spreader magazine 27 on one side and repeatedly takes out the heat spreader HS from the heat spreader magazine 27 on the other side when it becomes empty. Since the empty heat spreader magazine 27 can be replaced with a new magazine, the heat spreader HS can be supplied without interruption.
[0022]
In FIG. 2, reference numeral 35 denotes an elevator mechanism that moves the heat spreader HS stacked and stored in the stock groove 34 of the magazine main body 33 up and down. A magazine moving mechanism 36 moves the heat spreader magazine 27 up and down between the set position and the exchange position.
[0023]
The elevator mechanism 35 is provided with a rod sensor (lower sensor) 37, a rod support portion 38, a push-up rod 39, and the like. A cylindrical push-up rod 39 is supported upright in the vertical direction on the rod support portion 38. Each push-up rod 39 is always urged upward by a leveling portion (not shown). The push-up rod 39 enters from the bottom side of the heat spreader magazine 27 at the tip, and abuts against the insert block 34a to push up. By pushing up the heat spreader HS stacked on the insert block 34 a in each stock groove 34, only the uppermost heat spreader HS is supplied to the pick and place 28. The leveling portion provided on the push-up rod 39 absorbs the variation by a spring or the like even if there is variation in the height position of the heat spreader HS stacked in each stock groove 34, and the pick and place 28 In contrast, the uppermost heat spreader HS can be reliably taken out at the same height position. Further, the rod sensor 37 provided on the rod support portion 38 is connected to each supply hand 5 of the pick and place 28 described later. 1 The heat spreader HS stored in the heat spreader magazine 27 is missing due to the cooperation with the upper sensor provided in the heat spreader. Fall Is supposed to be detected.
[0024]
In FIG. 2, the magazine moving mechanism 36 moves the heat spreader magazine 27 between the set position and the exchange position. Specifically, the magazine table 40 on which the heat spreader magazine 27 is mounted is moved up and down by the magazine up / down moving cylinder 41. The magazine vertical movement cylinder 41 is provided on a magazine base 42, and a guide bush 43 is provided on the magazine base 42. The tip of a cylinder rod 44 is connected to the magazine table 40. A guide rod 45 suspended from the magazine table 40 is fitted through a guide bush 43 provided on the magazine base 42.
[0025]
When the magazine vertical movement cylinder 41 is operated, the magazine table 40 is moved upward while the guide rod 45 is guided by the guide bush 43, and the heat spreader magazine 27 in which the heat spreader HS is accommodated is set to the set position. When the heat spreader magazine 27 is set, a clearance sensor 33a provided in the longitudinal direction of the magazine is detected by a level sensor (not shown) through which the optical axis passes. When the operation of the magazine vertical movement cylinder 41 is stopped, the magazine base 40 moves downward while the guide rod 45 is guided by the guide bush 43, and the heat spreader magazine 27 that has become empty can be replaced.
[0026]
Next, the configuration of the pick and place 28 will be described with reference to FIG.
In FIG. 3, the pick and place 28 is provided with a supply hand (pickup hand) 51. The supply hand 51 has a metal cylindrical suction nozzle 50 that can individually hold the heat spreader HS on the uppermost side of the stock groove 34 in the heat spreader magazine 27. The supply hand 51 is urged in a direction in which each suction nozzle 50 is always pushed down by a spring or the like. Therefore, the pressing force at the time of sucking and holding the heat spreader HS is buffered to prevent deformation, and even if there is a variation in the height position of each suction nozzle 50, the variation is absorbed by a spring or the like. The spreader HS can be reliably taken out.
[0027]
In FIG. 3, in the supply hand 51, the suction nozzle 50 is suspended and supported by a hanging portion 53. A piping path (not shown) for performing air suction from each suction nozzle 50 is formed in the hanging portion 53. Further, an upper sensor 54 is provided at each suction nozzle position of the hanging portion 53. The upper sensor 54 and the lower sensor 37 provided on the rod holding portion 38 have the suction nozzle 50 and the push-up rod 39 arranged on the same optical axis, so that the presence / absence of the heat spreader HS in the stock groove 34 can be determined. Can be confirmed. When the heat spreader HS is eliminated, the sensor optical axis is not blocked. A metal cylindrical nozzle is used as the suction nozzle 50, but a rubber suction pad may be used depending on the product. Further, an absorption portion 55 for preventing an excessive pressing force from acting on the heat spreader HS when the heat spreader HS is sucked or set by releasing the suction is disposed in the middle portion of each suction nozzle 53 in the longitudinal direction. Are provided at a plurality of locations.
[0028]
In FIG. 3, the head support portion 52 is provided with a knocking cylinder 56 that applies vibration in the vertical direction. The knocking cylinder 56 is operated after the suction nozzle 50 of the supply hand 51 sucks and holds the heat spreader HS, so that the supply hand 51 is vibrated in the vertical direction and two or more heat spreaders HS are stacked and sucked. This prevents it from being taken out. In particular, the heat spreader HS having an irregular shape is effective because there is a possibility that the heat spreader HS may be adsorbed to the nozzle while being overlapped. The head support portion 52 is provided with a vertical movement cylinder 57. By operating the up-and-down moving cylinder 57, the supply hand 51 can be moved up and down, and the heat spreader HS can be sucked and held on the suction nozzle 50, or the suction spread can be released and transferred.
[0029]
In FIG. 3, the pick and place 28 is provided so as to be able to reciprocate between an extraction position P on the heat spreader magazine 27 and an inspection position Q on the inspection unit 29. A guide rail 59 is provided on the top plate frame 58, and a moving body 61 is linked to the guide rail 59 via a linear guide 60. The moving body 61 is connected to the head support portion 52, and the supply hand 51 is suspended and supported via the head support portion 52. A nut portion 62 provided in a part of the moving body 61 is fitted into a ball screw 64 that is rotationally driven by a servo motor 63. Therefore, the servomotor 63 is rotationally driven in a predetermined direction so that the supply hand 51 suspended and supported by the movable body 61 is reciprocated between the take-out position P and the inspection position Q. The moving body 60 moves to the inspection position Q by moving until the nut portion 62 comes into contact with the stopper portion 65.
[0030]
Next, the configuration of the inspection unit 29 will be described with reference to FIGS. 4 and 5.
The inspection unit 29 is provided with an inspection stage 70. In this embodiment, the heat spreader HS adsorbed by the pick and place 28 is missing. Fall Inspect for overlap and inversion. Specifically, in FIG. 4, the heat spreader HS sucked by the pick and place 28 is missing while being transported to the inspection stage 70. Fall Sensor 69 causes missing heat spreader HS Fall Is detected. Lack of Fall The sensor 69 is a missing part of the heat spreader HS adsorbed by the adsorption nozzle 50 in cooperation with the upper sensor 54 provided in the pick and place 28. Fall Is detected. If the heat spreader HS is adsorbed, the optical axis is blocked.
[0031]
5A and 5D, the heat spreader HS is overlapped by the overlap sensor (indicated by a spot) 71 in a state where the heat spreader HS is placed on the inspection stage 70 while being sucked by the suction nozzle 53. The reversing sensor (displayed with a spot) 72 detects the reversal of the heat spreader HS. FIG. 5B shows the optical axis when the overlap sensor 71 detects an error. FIG. 5C shows the optical axis when the reverse sensor 72 detects an error. The overlap sensor 71 and the reverse sensor 72 are provided on both sides of the inspection stage 70, and detect an abnormality by blocking the sensor optical axis. It is also possible to provide a sensor for detecting deformation such as bending of the support leg 73 of the heat spreader HS.
[0032]
In FIG. 4, the inspection stage 70 is supported so as to rotate by 90 degrees or more about the rotation shaft 74. A collection box 75 is provided below the inspection stage 70. The lack mentioned above Fall When an abnormality is detected by any one of the sensor 69, the overlap sensor 71, and the reverse sensor 72, the suction stage 50 is released and the inspection stage 70 on which the heat spreader HS is mounted is rotated to turn the heat spreader HS. Is collected in a collection box 75. When the heat spreader HS is collected in the collection box 75, the next heat spreader HS is transported to the inspection stage 70 by the pick and place 28, and the same inspection process is performed.
[0033]
6 and 7, the normal heat spreader HS that has been inspected is transported to the take-out position P again while being adsorbed by the pick-and-place 28. Then, it is delivered to the alignment tray 32 waiting at the take-out position P. In this embodiment, the heat spreader HS aligned on the alignment tray 32 is for two strips, and the adsorption by the pick and place 28 is for one strip. It is necessary to align with the tray 32. The alignment tray 32 is configured to reciprocate between an extraction position P on the heat spreader magazine 27 and a delivery position R for delivering the heat spreader HS to the loader 7.
[0034]
In FIG. 7, an endless belt (timing belt) is provided between a drive pulley 77 provided on the motor shaft of the drive motor 76 and a driven pulley 78 provided at two locations via guide rollers 79 provided at two locations. 80 is passed. The guide roller 79 is provided to apply a predetermined tension to the endless belt 80 installed between the driven pulleys 78 provided at two places. In FIG. 6, an alignment tray 32 is connected to a part of the endless belt 80. The alignment tray 32 is connected to a guide rail 81 provided between the take-out position P and the delivery position R via a linear guide 82 so as to reciprocate.
[0035]
The alignment tray 32 is provided with a tray recess 83 formed in accordance with the cavity recess of the mold 25. This is because the alignment tray 32 delivered to the loader 7 requires the same positioning accuracy of the heat spreader HS as that of the mold 25. A tray urging portion (leveling portion) 84 for urging the heat spreader HS upward is provided at the bottom of each tray recess 83. The leveling unit 84 has the role of absorbing the pressing force when the loader 7 sucks and holds the heat spreader HS to prevent the deformation, and the leveling unit 84 has the same height so that the heat spreader HS can be reliably delivered to the loader 7. Is provided.
[0036]
Also, the alignment tray 32 is not provided on the moving end side. Fall A sensor 85 is provided. Lack of Fall The sensor 85 detects whether the heat spreader HS has been reliably delivered from the alignment tray 32 to the loader 7. After the loader 7 receives the heat spreader HS from the alignment tray 32, when the alignment tray 32 returns from the delivery position R to the take-out position P, the missing Fall Due to the cooperation of the sensor 85 and the sensor on the loader 7 side to be described later, Fall Can be detected. Missing heat spreader HS Fall Is detected, the heat spreader HS adsorbed by the loader 7 moves to the take-out position P side after the alignment tray 32 is moved, and then the adsorbing is released and collected in the lower collection box 86.
[0037]
Next, the configuration of the loader 7 will be described with reference to FIGS.
7 and 8, the loader 7 includes a basic unit portion 87 that holds the lead frame L / F and the resin tablet T, and a carry-in that holds the heat spreader HS by suction from the alignment tray 32 at the tip side of the basic unit portion 87. And a suction head portion (additional portion) 88. In FIG. 7, in the loader 7, the pinion gear 90 that meshes with the rack portion 89 rotates, so that the basic unit portion 87 and the carry-in suction head portion 88 move forward and backward from the moving rail portion side to the press portion 18 side. Yes.
[0038]
In FIG. 9, the carry-in suction head portion 88 is provided so as to be able to advance and retreat with respect to the main body frame 93. The motor gear 94a of the advance / retreat motor 94 and the transmission gear 95a provided on the shaft 95 are engaged with each other. Pinion gears 90 are provided at both ends of the shaft 95 and mesh with rack portions 89 formed in the longitudinal direction on both sides of the main body frame 92. Further, guide rollers 96 are rotatably provided at a plurality of locations on both sides of the carry-in suction head portion 88 so as to roll along guide grooves 97 formed in the main body frame 93. When the advancing / retracting motor 94 is activated, the shaft 95 is driven to rotate, and the pinion gears 90 on both sides roll while meshing with the rack 89, whereby the basic unit portion 87 and the carry-in suction head portion 88 move forward and backward with respect to the main body frame 93. It is like that.
[0039]
In FIG. 8, the carry-in suction head unit 88 is suspended and supported by a stripper plate 91 that can come into contact with the lower mold surface and a miss detection unit 92 that detects a carry-in mistake of the heat spreader HS. The carry-in suction head portion 88 is provided with a head vertical movement cylinder 98. The cylinder rod of the head vertical movement cylinder 98 is connected to the head suspension portion 99. The head suspending portion 99 supports the metal cylindrical suction nozzles 100 as many as necessary for one mold. An air suction path (not shown) that communicates with each suction nozzle 100 is formed in the head suspension portion 99. Further, the head suspension 99 has a defect for detecting the presence or absence of the heat spreader HS set on the alignment tray 32. Fall A sensor 101 is provided corresponding to the upper end position of each suction nozzle 100. This lack Fall The sensor 101 determines whether each suction nozzle 100 sucks the heat spreader HS from the tray recess 83 or not. Fall Detection is performed in cooperation with the sensor 85. If the heat spreader HS is adsorbed, the sensor optical axis is blocked.
[0040]
Each suction nozzle 100 is provided with an elastic portion that absorbs excessive pressing force when the heat spreader HS is sucked or released, and the tip end side (lower end side) of each suction nozzle 100 is inserted through the stripper plate 91. And supported by suspension. The stripper plate 91 is urged downward by a spring and is suspended and supported so as to be movable up and down, and is held at an upper position by a suspension cylinder 102. The stripper plate 91 is provided for forcibly peeling the heat spreader HS from each suction nozzle 100 when releasing the suction and setting the heat spreader HS sucked by each suction nozzle 100 to the mold 25. It has been. When the suspension cylinder 102 is operated, the stripper plate 91 moves to the tip side of the suction nozzle 100 by the elasticity of the spring.
[0041]
The miss detection unit 92 is provided between the suction nozzles 100. A movable block 103 is held on the stripper plate 91. A miss detection pin 104 is urged by a spring and protrudes from the movable block 103. The miss detection pin 104 protrudes from the stripper plate 91 to the lower mold side due to the weight of the movable block 103. On the upper end side of the movable block 103, a detection unit (contact sensor, mechanical switch, etc.) 105 that detects the movement of the movable block 103 due to the push back of the error detection pin 104 is provided. When the heat spreader HS sucked by the suction nozzle 100 is set in the cavity recess, the error detection pin 104 is brought into contact with the lower mold surface and the movable block 103 is pushed back, so that there is no inconvenience. In addition, although the mistake detection part 92 is provided only for the half corresponding to a cavity recessed part, you may provide for all the cavity recessed parts.
[0042]
In the loader 7, a positioning pin 107 is suspended and supported by the head suspension 99 in order to align the suction nozzle 100 when a work is carried into the cavity recess of the mold 25. The loader 7 moves along the supply side moving rail portion 15, holds the heat spreader HS from the alignment tray 32, then holds the resin tablet T from the tablet holder 6, and finally the lead frame preheated from the preheat rail 4. The L / F is held and conveyed to the press unit 18.
[0043]
After the heat spreader HS held by the carry-in suction head unit 88 is set in the cavity recess of the mold 25, the setting error detection operation by the error detection unit 92 is performed. In this detection operation, by moving the loader 7 so that the error detection pin 104 is directly above the cavity recess, the head suspension 99 is moved in the longitudinal direction by a predetermined length (half the pitch between the cavity recesses). It is supposed to be done. In this embodiment, in order to detect all set mistakes in the cavity recess, the loader 7 is moved by a half pitch of the mold 25 and detection is performed.
[0044]
FIGS. 10A and 10B show the state of the miss detection pin 104 when the heat spreader HS is set in the mold. The head suspension 99 is moved by a predetermined length in the longitudinal direction so that the movement error detection pin 104 is directly above the cavity recess. When the nozzle vertical movement cylinder 98 is operated to move the head suspension portion 99 downward, the miss detection pin 104 enters the cavity recess 106 and detects the presence or absence of the heat spreader HS.
[0045]
FIG. 10A shows that the heat spreader HS is missing in the cavity recess 106. Fall Indicates the state of The miss detection pin 104 is in contact with the bottom of the cavity recess 106 while protruding from the stripper plate 91, and the movable block 103 is not in contact with the detection unit 105 and is in the OFF state. FIG. 10B shows a state where the heat spreader HS is normally set in the cavity recess 106. The miss detection pin 104 is in contact with the heat spreader HS, the movable block 103 is pushed back, and the detection unit 105 is in an ON state. In addition to the miss detection pin 104, a distance sensor or the like for detecting a setting abnormality such as the heat spreader HS being set to be inclined in the cavity concave portion 106 or being turned upside down may be provided.
[0046]
In FIG. 1, a loader 7 is picked up by a pick and place 28 from a heat spreader magazine 27 by a heat spreader conveying device 19 provided in the extension rail unit C, inspected at an inspection stage, and only non-defective products are placed in an alignment tray 32. The transfer operation is repeated, and the sheet is aligned on the alignment tray 32 according to the cavity recess of the mold 25 and transferred from the take-out position P to the delivery position R. The loader 7 receives and holds the heat spreader HS from the alignment tray 32 with the additional carry-in suction head unit 88, receives and holds the resin tablet from the tablet holder 6, receives and holds the preheated lead frame, and presses After moving to the part 18 and setting the heat spreader HS in the mold 25, the resin tablet and the lead frame are set. After the loader 7 is retracted from the mold 25, the mold is clamped and sealed with resin. The molded product after resin sealing is released when the mold is opened, taken out by the unloader 8 to the molded product take-out section 9, and gate-breaked by the degate section 11, and only the molded product is sent to the molded product storage section 12. Stored.
[0047]
If the above-described heat spreader transport device 19 is used, the individual pieces of heat spreader HS stored in a stack in the heat spreader magazine 27 are taken out as much as necessary for one molding, Fall Or mold after inspecting for abnormalities What The operation until carrying in can be performed quickly. In particular, the transfer operation to the pick and place 28, the alignment tray 32, the loader 7 and the misalignment, overlap, and missing during the loading of the heat spreader HS. Fall In addition, setting errors in the mold 25 can be prevented.
Further, in the resin sealing device, the heat spreader HS is surely set in the mold 25, so that it is not possible. Fall , It is possible to improve the yield by reducing defective products due to overlap and set mistakes. Further, since the heat spreader HS can be loaded into the mold 25 by the loader 7 for loading a strip or resin tablet, the loading operation of the loading suction head 87, the strip hand and the tablet holding unit (not shown) is advanced and retracted in the coaxial direction. Since it can be done by operation, cycle time can be shortened and productivity can be improved.
[0048]
As described above, various preferred embodiments of the present invention have been described. However, the present invention is not limited to the above-described embodiment, and the heat spreader transporting device is not limited to the module type resin sealing device, but is a single unit. It is possible to apply to a resin sealing device. Further, the heat spreader carry-in section is not limited to the case where the loader 7 is also used, but may be a mechanism independent of the loader 7. Further, the strip is not limited to the lead frame, and may be a resin substrate, a tape substrate, or the like, and a release film may be stretched on the press portion 18. Of course, modifications can be made.
[0049]
【The invention's effect】
When the heat spreader transport device according to the present invention is used, the individual pieces of heat spreader stored in a stack in the heat spreader magazine are taken out as much as necessary for one mold, and missing. Fall Or mold after inspecting for abnormalities What The operation until carrying in can be performed quickly. Especially with heat spreader supply hand, alignment tray and loader. Ru Misalignment, overlap and missing during delivery operation and heat spreader loading Fall And set mistakes in the mold can be prevented.
Also, in the resin sealing device, the heat spreader is securely set in the mold, so Fall In addition, it is possible to improve the yield by reducing defective products due to set mistakes. In addition, since the heat spreader can be loaded into the mold using a loader that loads a strip or resin tablet, the loading operation of the loading suction head, the strip hand, and the tablet holding unit can be performed by advancing and retracting in the coaxial direction, thereby shortening the cycle time. To improve productivity.
[Brief description of the drawings]
FIG. 1 is a plan view showing a layout configuration according to an example of a resin sealing device.
FIG. 2 is a front view of a heat spreader magazine and an elevator mechanism.
FIG. 3 is an explanatory diagram showing an overall configuration of a pick and place equipped with a supply hand.
FIG. 4 is an enlarged front view of an inspection unit.
FIG. 5 is an explanatory diagram showing a sensor optical axis in an inspection unit.
FIG. 6 is a plan view of a take-out part and a delivery part of the heat spreader.
FIG. 7 is a left side view of FIG.
FIG. 8 is a side view of a loader with an additional loading suction head portion.
FIG. 9 is an explanatory view of the loader of FIG. 1 as viewed from the moving rail side.
FIG. 10 is an explanatory diagram showing a setting error detection operation of a heat spreader set on a mold.
[Explanation of symbols]
A Molded product supply unit
B Molded product storage unit
C Extension rail unit
HS heat spreader
1 Strip supply section
2 Supply magazine
3 Frame index
4 Preheat rail
5 Resin tablet supply department
6 Tablet holder
7 Loader
8 Unloader
9 Molded product unloading section
10 Moving table
11 Degate part
12 Molded product storage
13 Molded product pickup
14 Storage magazine
15 Supply side moving rail
16 Storage side moving rail
17 Extension side pedestal
18 Press department
19 Heat spreader conveyor
20 Supply side pedestal
21 Storage side pedestal
22 Suction duct
23 Unloader suction duct
24 Duct connection
25 Mold
26 Heat spreader supply section
27 Heat Spreader Magazine
28 Pick and Place
29 Inspection Department
30 Inspection stage
31 Heat spreader alignment part
32 Alignment tray
33 Magazine body
34 Stock Groove
34a Insert block
35 Elevator mechanism
36 Magazine movement mechanism
37 Rod sensor
38 Rod support
39 Push-up rod
40 magazine table
41 Magazine vertical cylinder
42 Magazine base
43 Guide bush
44 Cylinder rod
45 Guide rod
46 Extension side moving rail
50, 100 suction nozzle
51 Supply hand
52 Head support
53 Hanging part
54 Upper sensor
55 Absorber
56 Cylinder for knocking
57 Vertical cylinder
58 Top plate frame
59 Guide rail
60, 82 Linear guide
61 Mobile
62 Nut
63 Servo motor
64 ball screw
65 Stopper
69, 85, 101 missing Fall Sensor
70 Inspection stage
71 Overlap sensor
72 Reverse sensor
73 support legs
74 Rotating shaft
75, 86 Collection box
76 Drive motor
77 Drive pulley
78 Driven pulley
79 Guide roller
80 Endless belt
83 Tray recess
87 Basic unit
88 Loading suction head
89 rack
90 pinion gear
91 Stripper plate
92 Miss detection unit
93 Body frame
94 Forward / backward motor
95 shaft
96 guide rollers
97 Guide groove
98 Vertical Cylinder for Head
99 Head suspension
102 Hanging cylinder
103 Movable block
104 Miss detection pin
105 detector
106 Cavity recess
107 Positioning pin

Claims (7)

A heat spreader supply unit that holds and takes out the heat spreader by a supply hand from the heat spreader magazine that is stacked and stored in storage grooves provided in a plurality of locations, and is necessary for one resin sealing, and
The omissions of heat spreader taken out by the supply hand from the heat spreader supply unit, overlapping, an inspection unit for detecting a reversal,
A heat spreader aligning portion that is transferred by a supply hand and in which the heat spreader after inspection is aligned with the cavity concave portion of the mold,
Said passed the heat spreader from the spreader alignment unit, heat spreader conveying apparatus characterized by having a heat spreader loading unit for loading the cavities of the mold die. An upper sensor provided in the supply hand and a lower sensor provided in an elevator mechanism for moving the heat spreader stacked and stored in the heat spreader magazine up and down, of the heat spreader stored in the heat spreader magazine. heat spreader conveying apparatus according to claim 1, wherein the detecting the omissions.   3. The heat spreader transport device according to claim 1, wherein the supply hand is provided so as to be reciprocally movable between an extraction position on the heat spreader magazine and an inspection position on the inspection unit. . The said inspection unit is provided with the inspection stage, and omissions sensor for detecting the omissions of the heat spreader between the heat spreader which is held by the supply hand is transported to the inspection stage, the heat spreader is The heat spreader according to claim 1, further comprising: an overlap sensor that detects an overlap of the heat spreader and an inversion sensor that detects inversion of the heat spreader while being placed on the inspection stage. Conveying device. The omissions sensor, when an abnormality is detected by any of the sensors overlap sensor and reverse sensor, recovering the heat spreader that is transferred from the supply hand by rotating the inspection stage to the collection box 5. The heat spreader transport device according to claim 4, wherein   The said heat spreader alignment part has an alignment tray reciprocatingly moved between the taking-out position on the said heat spreader magazine, and the delivery position which delivers a heat spreader to the said heat spreader carrying-in part. Heat spreader transport device.   A resin sealing device comprising the heat spreader conveyance device according to any one of claims 1 to 6.

Images