JP4055028B2 - Metal-based wiring board and manufacturing method thereof - Google Patents

Metal-based wiring board and manufacturing method thereof Download PDF

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Publication number
JP4055028B2
JP4055028B2 JP07110898A JP7110898A JP4055028B2 JP 4055028 B2 JP4055028 B2 JP 4055028B2 JP 07110898 A JP07110898 A JP 07110898A JP 7110898 A JP7110898 A JP 7110898A JP 4055028 B2 JP4055028 B2 JP 4055028B2
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Japan
Prior art keywords
circuit
metal
metal base
wiring board
film substrate
Prior art date
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Expired - Fee Related
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JP07110898A
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Japanese (ja)
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JPH11274674A (en
Inventor
充 平尾
雅彦 太田
久良 水柿
岳央 道坂
喜一 金丸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Showa Denko Materials Co Ltd
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Priority to JP07110898A priority Critical patent/JP4055028B2/en
Publication of JPH11274674A publication Critical patent/JPH11274674A/en
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  • Waveguide Connection Structure (AREA)
  • Waveguides (AREA)
  • Insulated Metal Substrates For Printed Circuits (AREA)
  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
  • Structure Of Printed Boards (AREA)

Description

【0001】
【発明の属する技術分野】
本発明は、ミリ波帯の信号処理回路に使用する金属ベース配線板とその製造法に関する。
【0002】
【従来の技術】
ミリ波帯の信号処理回路は、例えば、図3に示すように、金属ベース1に溝2を形成し、その中に、トランジスタ、ダイオード、集積半導体装置、あるいはそれらを搭載したセラミック配線板等のデバイス3と、各々のデバイス3の信号の混合、分離等を行うリンク混合器、分配器あるいはフィルタ等を形成した配線板4と、これらの入出力を接続する線路を形成した線路基板51を、できる限りこれらの隙間が空かないように配置し、金リボン6で接続し、さらに、回路全体に供給する電源電力を接続する機器の信号と分離するバイアスユニットを金属ベース1の裏面に設けた構造となっている。
デバイス3と配線板4並びに線路基板51は、通常、金属製の蓋7で覆われ、シールドされている。
【0003】
【発明が解決しようとする課題】
ところで、従来の技術では、デバイス3からの入出力を行う線路5には、デバイス3の入出力インピーダンスとの整合をとるためと、伝送損失を少なくするために、セラミック配線板を使用したマイクロストリップ線路が使用されている。
【0004】
このセラミック配線板は、比誘電率が高く、厚い基板を用いると伝送時に高次モードを発生しやすいので、厚さが0.2mm程度の薄いセラミック配線板しか使用できないのが実状である。
したがって、伝送線路に使用されるセラミック配線板は厚さが薄く割れやすいという課題がある。
また、そのため、すべての伝送線路を一枚のセラミック配線板上に形成することが難しく、部分的に小さなピースを作製し、金属ベース1に形成した溝2に平坦にはめ込み、デバイス3に設けた信号の入出力端子との位置合わせを接続箇所毎に行って、これらを、金リボン6で接続しているので、複数のセラミック配線板の小さなピースを設置するのに多くの工数が掛かり、信号処理回路がコスト高になるという課題がある。
【0005】
また、使用する信号の周波数が高くなると、セラミック配線板の比誘電率が高いため、セラミック配線板上での導体幅を精度よく形成しなければならないような部分が加工精度を下まわり、例えば、デバイス3のインピーダンスと伝送線路のインピーダンスを整合させるためのトランス線路の幅と伝送線路の幅とを精度よく形成することが困難となり、ほぼ等しくなる場合が生じ、インピーダンス変換が正確にできなくなって、不整合が生じるという課題もある。
【0006】
本発明は、インピーダンス整合が容易で、伝送損失の抑制に優れ、かつ経済的に優れた金属ベース配線板とその製造方法を提供することを目的とする。
【0007】
【課題を解決するための手段】
本発明の金属ベース配線板は、電子部品を搭載する金属ベース1と、絶縁フィルム上に線路5、リンク、混合器、あるいはフィルタ等の受動回路52を形成したフィルム基板53であって、トランジスタ、ダイオード、集積半導体装置、あるいはそれらを搭載したセラミック配線板等のデバイス3を搭載する箇所に穴31を形成したフィルム基板53と、デバイス3と、回路を電磁的にシールドする金属製の蓋7からなり、金属ベース1には、搭載する回路に応じてさまざまな深さ・形状の溝2が連結して形成されており、さらに、金属ベースの裏面に平面アンテナを設け、平面アンテナの入出力端子とフィルム基板の入出力端子とを、金属ベースに設けた穴を介して電磁的に結合し、金属製の蓋7にも搭載する回路に応じた深さ・形状の第2の溝21が連結して形成されていることを特徴とする。
【0008】
このようにすれば、フィルム基板53上に形成された線路5と、線路5の上下に溝2を形成した金属ベース1と、第2の溝21を形成した金属製の蓋7とで、ストリップ線路を形成することができる。
【0009】
このような金属ベース配線板は、搭載する回路に応じてさまざまな深さ・形状の溝2が連結して形成された金属ベース1の、デバイス3の入出力に接続される受動回路52に相当する箇所の凹部22に接着シート8を金属ベース1の表面の高さになるように設け、その上に、フィルム基板53を重ね、積層接着して固定し、フィルム基板53の穴31の箇所にデバイス3を固定し、デバイス3と受動回路52とを接続し、金属製の蓋7を位置合わせして固定することによって製造することができる。
【0010】
【発明の実施の形態】
このように構成することで、金属ベース1は、地導体とミリ波帯信号処理回路の筐体とを兼ねることができる。
線路5や受動回路52等の配線パターンは、1枚のフィルム基板53で構成できるため、従来のように小さなピースに別れたセラミック配線板を各々設置する手間が省け、信号処理回路の製作工数を低減することができる。
フィルム基板53に設けた穴31により、デバイス3を位置合わせすることが容易になる。
【0011】
【実施例】
実施例1
図1に示すように、金属ベース1として、厚さ2mmのアルミニウム板を用い、線路5の箇所には深さ0.3mmで幅5mmの第1の凹部22を設け、フィルタ回路等の受動回路52の箇所には深さ0.2mmで幅12.3mm×長さ12.3mmの第2の凹部23を設け、デバイス3を搭載する箇所には深さ0.1mmで幅2.1mm×長さ2.5mm第3の凹部24を連結して溝2とし、数値制御式のワイヤーカット装置による切削加工により設けた。
第1の凹部22には、接着シート8であるGF−3500(日立化成工業株式会社製、商品名)の厚さ80μmのものを2枚と厚さ50μmのものを1枚重ね、予め第1の凹部22と同じ寸法に切断したものを挿入した。
次に、フィルム基板53として、厚さ25μmのポリイミドフィルムに、18μmの圧延銅箔を貼り合わせたフレキシブル配線板用基材の圧延銅箔の不要な箇所をエッチング除去して、線路5やリンク、あるいはフィルタ等の受動回路52を形成し、デバイス3を搭載する箇所にデバイス3とほぼ同じ大きさの穴31をあけた。
接着シート8を挿入した金属ベース1に、受動回路52を形成したフィルム基板53を重ね、4MPa、220℃、30分、10Torr以下の条件で真空プレスを使用して積層接着した。
この後、デバイス3を穴31の位置に接着剤で固定した後、デバイス3の入出力端子とフィルム基板53の受動回路52とを、金リボン6でボンディングして接続した。
この後、溝2と同じ寸法で、相対する勝手違いの位置に、搭載するデバイス3からの電波の不要放射を防止するのに必要な深さ及び幅と長さの第2の溝21を設けた金属製の蓋7を作製し、位置合わせをして、ねじ9で金属ベース1に固定した。
さらに、金属ベース1の裏面に、ミリ波帯の平面アンテナ10を設け、その入出力端子の箇所に角穴11を導波管として形成し、フィルム基板53の線路5と電磁的に結合することにより、ミリ波アンテナとミリ波信号処理回路を一体化した金属ベース配線板とした。
【0012】
実施例2
図2に示すように、デバイス3にセラミックでパッケージングされたICを用い、予め接着シート8及びフィルム基板53を、パッケージに設けた信号の入出力端子と伝送線路の高さが一致するようにくり貫いた後、実施例1と同様に行い、セラミックでパッケージされたデバイス3を実装した、金属ベース配線板を作製した。
【0013】
【発明の効果】
以上に説明したとおり、本発明により、インピーダンス整合が容易で、伝送損失の抑制に優れ、かつ経済的に優れた金属ベース配線板を提供することができる。
【図面の簡単な説明】
【図1】(a)は本発明の一実施例を示す分解斜視図であり、(b)はその断面図である。
【図2】(a)及び(b)は、ぞれぞれ本発明の他の実施例を説明するための要部斜視図である。
【図3】従来例を示す斜視図である。
【符号の説明】
1.金属ベース
2.溝
21.第2の溝 22.第1の凹部
23.第2の凹部 24.第3の凹部
3.デバイス 31.穴
4.配線板
5.線路 51.線路基板
52.受動回路 53.フィルム基板
6.金リボン
7.金属製の蓋
8.接着シート
9.ねじ
10.平面アンテナ
11.角穴
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a metal base wiring board used for a millimeter waveband signal processing circuit and a method of manufacturing the same.
[0002]
[Prior art]
For example, as shown in FIG. 3, the millimeter-wave band signal processing circuit has a groove 2 formed in a metal base 1, and a transistor, a diode, an integrated semiconductor device, or a ceramic wiring board on which these are mounted. A device 3, a wiring board 4 that forms a link mixer, a distributor or a filter that mixes and separates the signals of each device 3, and a line substrate 51 that forms a line connecting these inputs and outputs; Arranged so that these gaps are not left as much as possible, connected by the gold ribbon 6, and further provided with a bias unit on the back surface of the metal base 1 that separates the signal of the equipment that connects the power supplied to the entire circuit It has become.
The device 3, the wiring board 4 and the line substrate 51 are usually covered and shielded by a metal lid 7.
[0003]
[Problems to be solved by the invention]
By the way, in the prior art, a microstrip using a ceramic wiring board is used for the line 5 that inputs and outputs from the device 3 in order to match the input and output impedance of the device 3 and to reduce transmission loss. Tracks are used.
[0004]
This ceramic wiring board has a high relative dielectric constant, and if a thick substrate is used, a higher-order mode is likely to be generated during transmission. Thus, only a thin ceramic wiring board having a thickness of about 0.2 mm can be used.
Therefore, there is a problem that the ceramic wiring board used for the transmission line is thin and easily broken.
For this reason, it is difficult to form all the transmission lines on a single ceramic wiring board. A small piece is partially produced, and is fitted into the groove 2 formed in the metal base 1 and provided in the device 3. Positioning with the input / output terminals of the signal is performed for each connection point, and these are connected by the gold ribbon 6, so it takes a lot of man-hours to install a small piece of a plurality of ceramic wiring boards. There is a problem that the processing circuit is expensive.
[0005]
In addition, when the frequency of the signal to be used is high, the relative permittivity of the ceramic wiring board is high, so the portion where the conductor width on the ceramic wiring board must be accurately formed is below the processing accuracy, for example, It becomes difficult to accurately form the width of the transformer line and the width of the transmission line for matching the impedance of the device 3 and the impedance of the transmission line. There is also the problem of inconsistencies.
[0006]
SUMMARY OF THE INVENTION An object of the present invention is to provide a metal base wiring board that is easy in impedance matching, excellent in suppressing transmission loss, and economically excellent, and a manufacturing method thereof.
[0007]
[Means for Solving the Problems]
The metal base wiring board of the present invention is a film substrate 53 in which a passive circuit 52 such as a line 5, a link, a mixer, or a filter is formed on an insulating film, a metal base 1 on which electronic components are mounted, a transistor, From a film substrate 53 in which a hole 31 is formed at a place where a device 3 such as a diode, an integrated semiconductor device, or a ceramic wiring board on which the diode is mounted , a device 3, and a metal lid 7 that electromagnetically shields the circuit The metal base 1 is formed by connecting grooves 2 of various depths and shapes according to the circuit to be mounted. Further, a flat antenna is provided on the back surface of the metal base, and the input / output terminals of the flat antenna are provided. the the input and output terminals of the film substrate, electromagnetically coupled via the hole formed in the metal base, the depth and shape corresponding to the circuit mounted in metal lid 7 Wherein the groove 21 is formed by connecting.
[0008]
In this way, the strip 5 is formed by the line 5 formed on the film substrate 53, the metal base 1 in which the groove 2 is formed above and below the line 5, and the metal lid 7 in which the second groove 21 is formed. A track can be formed.
[0009]
Such a metal base wiring board corresponds to the passive circuit 52 connected to the input / output of the device 3 of the metal base 1 formed by connecting the grooves 2 having various depths and shapes according to the circuit to be mounted. The adhesive sheet 8 is provided in the concave portion 22 at the location to be formed so as to be at the height of the surface of the metal base 1, and the film substrate 53 is stacked thereon, laminated and fixed, and fixed at the location of the hole 31 of the film substrate 53. It can be manufactured by fixing the device 3, connecting the device 3 and the passive circuit 52, and aligning and fixing the metal lid 7.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
With this configuration, the metal base 1 can serve as both a ground conductor and a housing for the millimeter waveband signal processing circuit.
Since the wiring pattern such as the line 5 and the passive circuit 52 can be constituted by a single film substrate 53, it is possible to save the labor of installing each of the ceramic wiring boards divided into small pieces as in the prior art, and to reduce the man-hours for producing the signal processing circuit. Can be reduced.
The holes 31 provided in the film substrate 53 make it easy to align the device 3.
[0011]
【Example】
Example 1
As shown in FIG. 1, an aluminum plate having a thickness of 2 mm is used as the metal base 1, and a first recess 22 having a depth of 0.3 mm and a width of 5 mm is provided at the line 5, and a passive circuit such as a filter circuit is provided. A second recess 23 having a depth of 0.2 mm and a width of 12.3 mm × a length of 12.3 mm is provided at 52, and the device 3 is mounted at a depth of 0.1 mm and a width of 2.1 mm × length. A third recess 24 having a thickness of 2.5 mm was connected to form a groove 2, which was provided by cutting with a numerically controlled wire cutting device.
In the first recess 22, two GF-3500 (trade name, manufactured by Hitachi Chemical Co., Ltd.), which is the adhesive sheet 8, each having a thickness of 80 μm and one having a thickness of 50 μm are stacked one on top of the other. A cut piece having the same dimensions as the concave portion 22 was inserted.
Next, unnecessary portions of the rolled copper foil of the flexible wiring board base material in which the rolled copper foil of 18 μm is bonded to the polyimide film of thickness 25 μm as the film substrate 53 are removed by etching, and the line 5 and the link, Alternatively, a passive circuit 52 such as a filter is formed, and a hole 31 having substantially the same size as that of the device 3 is formed in a place where the device 3 is mounted.
A film substrate 53 on which a passive circuit 52 was formed was overlaid on the metal base 1 with the adhesive sheet 8 inserted therein, and was laminated and bonded using a vacuum press under conditions of 4 MPa, 220 ° C., 30 minutes and 10 Torr or less.
After that, after fixing the device 3 to the position of the hole 31 with an adhesive, the input / output terminals of the device 3 and the passive circuit 52 of the film substrate 53 were bonded and connected by the gold ribbon 6.
Thereafter, a second groove 21 having the same dimensions as the groove 2 and having a depth, width, and length necessary to prevent unnecessary radiation of the radio wave from the device 3 to be mounted is provided at an opposite position. A metal lid 7 was prepared, aligned, and fixed to the metal base 1 with screws 9.
Furthermore, a millimeter-wave band planar antenna 10 is provided on the back surface of the metal base 1, a square hole 11 is formed as a waveguide at the input / output terminal, and electromagnetically coupled to the line 5 of the film substrate 53. Thus, a metal-based wiring board in which the millimeter wave antenna and the millimeter wave signal processing circuit are integrated is obtained.
[0012]
Example 2
As shown in FIG. 2, an IC packaged with ceramic is used for the device 3, and the adhesive sheet 8 and the film substrate 53 are preliminarily arranged so that the input / output terminals of the signal provided on the package and the height of the transmission line coincide with each other. After drilling, a metal base wiring board on which the device 3 packaged with ceramic was mounted was produced in the same manner as in Example 1.
[0013]
【The invention's effect】
As described above, according to the present invention, it is possible to provide a metal base wiring board that is easy in impedance matching, excellent in suppressing transmission loss, and economically excellent.
[Brief description of the drawings]
1A is an exploded perspective view showing an embodiment of the present invention, and FIG. 1B is a sectional view thereof.
FIGS. 2A and 2B are perspective views of a main part for explaining another embodiment of the present invention. FIG.
FIG. 3 is a perspective view showing a conventional example.
[Explanation of symbols]
1. 1. Metal base Groove 21. Second groove 22. First recess 23. Second recess 24. Third recess 3. Device 31. Hole 4. Wiring board5. Track 51. Line substrate 52. Passive circuit 53. Film substrate 6. 6. Gold ribbon Metal lid 8. 8. Adhesive sheet Screw 10. Planar antenna 11. Square hole

Claims (2)

電子部品を搭載する金属ベースと、絶縁フィルム上に受動回路を形成し、デバイスを搭載する箇所に穴を形成したフィルム基板と、デバイスと、回路を電磁的にシールドする金属製の蓋からなり、金属ベースには、搭載する回路に応じてさまざまな深さ・形状の溝が形成され、その溝が、回路の入・出力の系統に合わせて形成されており、さらに、金属ベースの裏面に平面アンテナを設け、平面アンテナの入出力端子とフィルム基板の入出力端子とを、金属ベースに設けた穴を介して電磁的に結合し、金属製の蓋にも搭載する回路に応じた深さ・形状の溝が形成されていることを特徴とする金属ベース配線板。The metal base for mounting the electronic component, a passive circuit formed on an insulating film, and the film substrate formed with holes at locations for mounting the device, the device and, a metal lid to shield the circuit electromagnetically becomes, the metal base is a groove of varying depth and shape depending on the circuit to be mounted is formed, the grooves are formed in accordance with the system of the input and output of the circuit, further, the metal base of the back A flat antenna is provided, and the input / output terminals of the planar antenna and the input / output terminals of the film substrate are electromagnetically coupled through a hole provided in the metal base, and the depth corresponding to the circuit mounted on the metal lid is also determined. A metal-based wiring board characterized by having a groove of a shape and shape. 搭載する回路に応じてさまざまな深さ・形状の溝が形成された金属ベースの、デバイスの入出力に接続される回路に相当する箇所の溝に接着シートを金属ベースの表面の高さになるように設け、その上に、フィルム基板を重ね、積層接着して固定し、フィルム基板の穴の箇所にデバイスを固定し、デバイスと回路とを接続し、金属製の蓋を位置合わせして固定することを特徴とする金属ベース配線板の製造方法。  Adhesive sheet is placed at the height of the surface of the metal base in the groove corresponding to the circuit connected to the input / output of the device of the metal base with grooves of various depths and shapes formed according to the circuit to be mounted The film substrate is stacked on top of it, stacked and bonded, fixed, the device is fixed to the hole in the film substrate, the device and the circuit are connected, and the metal lid is aligned and fixed A method for manufacturing a metal-based wiring board, comprising:
JP07110898A 1998-03-20 1998-03-20 Metal-based wiring board and manufacturing method thereof Expired - Fee Related JP4055028B2 (en)

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JP4055028B2 true JP4055028B2 (en) 2008-03-05

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US7743635B2 (en) 2005-07-01 2010-06-29 Ball Corporation Method and apparatus for forming a reinforcing bead in a container end closure

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KR102310024B1 (en) * 2019-12-26 2021-10-07 주식회사 유라코퍼레이션 Printed Circuit Boards And Printed Circuit Board Manufacturing Methods
CN115157713B (en) * 2022-07-14 2023-04-25 西安微电子技术研究所 Microwave blind groove shape milling method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7743635B2 (en) 2005-07-01 2010-06-29 Ball Corporation Method and apparatus for forming a reinforcing bead in a container end closure
US8205477B2 (en) 2005-07-01 2012-06-26 Ball Corporation Container end closure

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