JP4053818B2 - Gas discharge panel and manufacturing method thereof - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a gas discharge panel used for a display device or the like and a manufacturing method thereof.
[0002]
[Prior art]
In recent years, gas discharge panels mainly composed of plasma display panels (hereinafter referred to as “PDP”) have been widely used as display devices.
PDPs are broadly classified into direct current (DC) and alternating current (AC) types, but at present, AC cells suitable for high definition have become mainstream because they can adopt a fine cell structure. It is coming.
[0003]
The AC type PDP has a structure in which a front panel and a back panel are arranged to face each other in parallel with a gap therebetween, and an outer peripheral portion is sealed.
The front panel has a structure in which striped display electrodes are arranged on one main surface of a front glass substrate, which is covered with a dielectric glass layer, and further covered with a dielectric protective film (MgO). have.
[0004]
On the other hand, in the rear panel, stripe-shaped data electrodes are arranged on one main surface of the rear glass substrate, and this is covered with a dielectric glass layer, and further, a partition wall protrudes in a direction parallel to the data electrodes. It has an established structure. A red (R), green (G), and blue (B) phosphor layer is formed for each groove on the side and bottom surfaces of the groove formed by the dielectric glass layer and the partition.
[0005]
A gap between the front panel and the back panel is a discharge space and is filled with a gas substrate (rare gas) as a discharge gas. The rare gas to be filled is required to have such conditions that strong ultraviolet rays can be emitted, the degree of self-absorption phenomenon is small, visible light emission is small, and chemical stability is present. As a rare gas satisfying such conditions, in a normal panel, a mixed gas (Ne—Xe gas or He—Xe gas) centered on xenon (Xe) is used. The mixed gas is filled with a required pressure (for example, 40 kPa or more and 80 kPa or less) into the discharge space evacuated to about 0.1 mPa after sealing the outer peripheral portions of both panels.
[0006]
In the AC type PDP having such a structure, each discharge cell can express only two gradations of lighting / extinguishing. Therefore, in order to display an image in the PDP, one frame (one field) is divided into a plurality of subframes (subfields), and intermediate gradation is expressed by combining lighting / extinction in each subframe. An intra-frame time-division gradation display method is used. In the AC type PDP, lighting / extinguishing is performed in each subframe using wall charges. This is disclosed in Japanese Patent No. 2756053.
[0007]
In the above-mentioned registered patent No. 2756053, the subfield applies a write pulse with a selective write voltage lower than the discharge start voltage between the scan electrode (the data electrode) crossing the pixel to be lit and the scan electrode. A discharge start voltage is applied between the sustain period (common electrode X) and all the scan electrodes (Y1 to Yn) during the address period in which the pixel discharge is applied to cause the address discharge to generate a wall charge by the address discharge. And a sustain discharge period in which a sustain pulse having the same polarity as the wall charge generated in the immediately preceding discharge is applied to cause the pixels selectively written in the writing period to discharge light.
[0008]
That is, a discharge cell in which wall charges are generated by writing discharge in the writing period emits light when a sustaining pulse is applied in the sustaining discharge period.
By the way, in the AC type PDP, various studies have been made on the problem of shortening the writing period for the purpose of high-speed driving for low voltage and high definition.
[0009]
In order to solve such a problem, in the AC type PDP, for example, by improving the characteristics of the dielectric protective film in the front panel, electrons are easily emitted from the film surface even when no electric field is applied to the dielectric protective film. The state, that is, the state where the electron emission ability is high. A dielectric protective film having a high electron emission capability is necessary for generating a gas discharge in the discharge cell, and a large number of initial electrons can be present.
[0010]
Therefore, in the AC type PDP having the dielectric protective film, the discharge delay time of the write discharge in the write period can be shortened, and high speed driving is possible.
[0011]
[Problems to be solved by the invention]
However, in the AC type PDP, when it is intended to shorten the discharge delay time in the writing discharge in the writing period, when electrons as charged particles are accumulated on the film surface as wall charges, the surface of the dielectric protective film By discharging electrons from, the absolute value of the negative polarity of the potential of the surface of the dielectric protective film becomes small. That is, the potential changes electrically in the positive polarity direction on the surface of the dielectric protective film. Therefore, the absolute amount of negative wall charges tends to decrease in the discharge cell.
[0012]
Therefore, during the sustain discharge period, even if a sustain pulse is applied to the electrode, the wall charge decreases, so the sum of the wall charge and the sustain pulse potential cannot exceed the discharge start voltage, and the discharge cell lights up. A writing failure that is a phenomenon of not occurring occurs.
The present invention has been made to solve such a problem, and provides a gas discharge panel capable of high-speed driving with a low driving voltage while suppressing the occurrence of an address failure in a writing period, and a method of manufacturing the same. The purpose is to do.
[0013]
[Means for Solving the Problems]
In the research process for solving the above problems, the present inventor has found that there is a relationship between the occurrence of an address failure and a substance other than the gas substrate (noble gas) present in the discharge space. Specifically, conventionally, the smaller the amount of substances other than the rare gas in the discharge space, the better, whereas the present inventor required a specific type of gas together with the rare gas in the discharge space. It has been found that address failure is less likely to occur in the mixed state even when driven at a high speed with a lower drive voltage than when only a rare gas is present.
[0014]
A gas discharge panel according to the present invention is a gas discharge panel having a discharge space in which a gas base is filled between two substrates arranged opposite to each other, and discharges the following auxiliary gas. It is characterized by having in the space.
(1-1) Carbon dioxide gas having a partial pressure of 0.05 mPa to 5 mPa
(1-2) Carbon dioxide gas having a partial pressure of 0.05 mPa to 0.5 mPa
(1-3) Carbon dioxide gas having a partial pressure of 0.1 mPa to 0.2 mPa
(1-4) Carbon dioxide gas having a partial pressure of 1 mPa to 5 mPa
(1-5) Carbon dioxide gas having a partial pressure of 1.5 mPa to 3 mPa
(1-6) Water vapor having a partial pressure of 1 mPa to 10 mPa
(1-7) Water vapor having a partial pressure of 2 mPa to 5 mPa
(1-8) Oxygen gas having a partial pressure of 0.3 mPa to 5 mPa
(1-9) Oxygen gas having a partial pressure of 1 mPa to 3 mPa
(1-10) Carbon dioxide gas having a partial pressure of 0.5 mPa to 1 mPa and oxygen gas having a partial pressure of 1 mPa to 5 mPa
(1-11) Carbon dioxide gas having a partial pressure of 0.5 mPa to 1 mPa and oxygen gas having a partial pressure of 2 mPa to 3 mPa
(1-12) Water vapor with a partial pressure of 5 mPa to 20 mPa and nitrogen gas with a partial pressure of 1 Pa to 6 Pa
(1-13) Water vapor having a partial pressure of 2 to 10 mPa and nitrogen gas having a partial pressure of 2 to 3 Pa
(1-14) Water vapor having a partial pressure of 1 mPa to 10 mPa and carbon dioxide gas having a partial pressure of 0.05 mPa to 0.5 mPa
(1-15) Water vapor having a partial pressure of 1 mPa to 8 mPa and carbon dioxide gas having a partial pressure of 0.1 mPa to 0.5 mPa
(1-16) Water vapor having a partial pressure of 2 mPa to 5 mPa and carbon dioxide gas having a partial pressure of 0.1 mPa to 0.2 mPa
(1-17) Water vapor having a partial pressure of 5 mPa to 20 mPa and oxygen gas having a partial pressure of 0.2 mPa to 2 mPa
(1-18) Water vapor having a partial pressure of 5 mPa to 10 mPa and oxygen gas having a partial pressure of 0.5 mPa to 1.5 mPa
As described above, in the gas discharge panel having the impurities as shown in (1-1) to (1-18) in the discharge space, the discharge start voltage is low and the electron emission ability is optimum. Therefore, in such a gas discharge panel, the occurrence of writing failure is suppressed during the writing period during driving, and the driving voltage can be lowered and the driving speed can be increased.
[0015]
Although the mechanism by which the gas discharge panel of the present invention has the above-mentioned advantages is not clear, it has been experimentally verified. This will be described later.
In the present specification, “partial pressure” refers to a partial pressure obtained when gas analysis is performed at room temperature without discharging the panel.
The above advantage is particularly noticeable in a gas discharge panel having a region in which a statistical delay time of the discharge delay time is 100 nsec or less during driving.
[0016]
Here, the “statistical delay time” is defined as a time obtained as follows. When only one cell in a single color and only one subfield emit light, and when the luminance weight of the subfield to emit light is 25 to 40 gradations out of 8 bit 256 gradations, the drop timing of the applied voltage of the write discharge is the starting point Laue plots the emission start time of the emission waveform. The statistical delay time obtained in this case is defined as the statistical delay time in this specification. The absolute value of the statistical delay time varies depending on the condition.
[0017]
Further, the superiority of the gas discharge panel is particularly when the dielectric protective film formed on the front panel of the two panels has a weight density of 70% to 85% of the single crystal weight density. Become prominent. A more desirable weight density of the dielectric protective film is 70% or more and 80% or less of the single crystal weight density.
The gas discharge display device having the gas discharge panel and the drive circuit can have the superiority of the above-described gas discharge panel as it is.
[0018]
Next, in the method for manufacturing a gas discharge panel according to the present invention, a discharge space is formed between two sealed substrates (discharge space forming step), and the remaining gas is exhausted to the discharge space ( Exhaust step) After this exhaust step, an auxiliary gas consisting of at least one selected from carbon dioxide, water vapor, oxygen, and nitrogen is introduced into the discharge space (auxiliary gas introduction step), and then the gas substrate is introduced. (Gas substrate introduction step).
[0019]
According to such a manufacturing method, a required amount of at least one auxiliary gas selected from carbon dioxide, water vapor, oxygen gas, and nitrogen gas can be mixed in the discharge space.
Therefore, with this manufacturing method, it is possible to manufacture a gas discharge panel that can suppress the occurrence of writing failure during the writing period during driving and can be driven at high speed with a low driving voltage.
[0020]
In the method of manufacturing a gas discharge panel according to the present invention, a discharge space is formed between two sealed substrates (discharge space forming step), and carbon dioxide gas is discharged into the discharge space after the discharge space forming step. Exhaust is performed until the remaining amount becomes 0.05 mPa to 0.5 mPa (exhaust step), and after this exhaust step, a gas base is introduced into the discharge space (gas base introduction step). Even if the gas discharge panel is manufactured, the same effect as the above manufacturing method can be obtained.
[0021]
In the above manufacturing method, at least one kind of gas (auxiliary gas) introduced or left in the discharge space is as shown in the following (2-1) to (2-9).
(2-1) Carbon dioxide gas whose partial pressure becomes 0.05 mPa or more and 5 mPa or less after the introduction of the gas substrate
(2-2) Carbon dioxide gas having a partial pressure of 0.05 mPa or more and 0.5 mPa or less after the introduction of the gas substrate
(2-3) Carbon dioxide gas whose partial pressure becomes 1 mPa or more and 5 mPa or less after the introduction of the gas substrate
(2-4) Water vapor whose partial pressure becomes 1 mPa or more and 10 mPa or less after the introduction of the gas substrate.
(2-5) Oxygen gas whose partial pressure becomes 0.3 mPa or more and 5 mPa or less after the introduction of the gas substrate
(2-6) Carbon dioxide gas having a partial pressure of 0.5 mPa to 1 mPa and oxygen gas having a partial pressure of 1 mPa to 5 mPa after the introduction of the gas substrate
(2-7) Water vapor having a partial pressure of 5 mPa to 20 mPa and nitrogen gas having a partial pressure of 1 Pa to 6 Pa after the introduction of the gas substrate
(2-8) Water vapor having a partial pressure of 1 mPa to 10 mPa and carbon dioxide gas having a partial pressure of 0.05 mPa to 0.5 mPa after introduction of the gas substrate
(2-9) Water vapor having a partial pressure of 5 mPa to 20 mPa and oxygen gas having a partial pressure of 0.2 mPa to 2 mPa after the introduction of the gas substrate
When the dielectric protective film of the gas discharge panel is formed by oblique deposition, the gas discharge panel manufactured using the manufacturing method described above exhibits particularly excellent characteristics.
[0022]
DETAILED DESCRIPTION OF THE INVENTION
1. Overall configuration of the panel
An AC type PDP (hereinafter simply referred to as “PDP”) 1 according to the present embodiment will be described with reference to FIG. FIG. 1 is a perspective view (partially sectional view) of the PDP 1 and shows a part of the display area in the panel.
[0023]
As shown in FIG. 1, the PDP 1 has a structure in which a front panel 10 and a rear panel 20 are arranged to face each other with a gap. The gap between the front panel 10 and the back panel 20 is partitioned into a plurality of discharge spaces 30 by a plurality of strips 24 protruding on the main surface of the back panel 20.
The front panel 10 has a plurality of display electrodes 12 mainly composed of Ag arranged on one main surface of the front glass substrate 11 in a stripe shape, on the surface of the front glass substrate 11 on which the display electrodes 12 are arranged. Is covered with a dielectric glass layer 13 made of lead-based low-melting glass. Further, a dielectric protective film 14 made of MgO is formed on the surface of the dielectric glass layer 13.
[0024]
Among the constituent elements of the front panel 10, the dielectric protective film 14 is formed here by depositing MgO. The dielectric protective film 14 preferably has characteristics that shorten the discharge delay time of the PDP 1 and increase the electron emission ability. A method for forming the dielectric protective film 14 will be described later.
When the dielectric protective film 14 is formed by obliquely depositing MgO, it is suitable for shortening the discharge delay time of the PDP 1 and increasing the electron emission ability.
[0025]
Further, the dielectric protective film 14 formed of MgO having a relatively low weight density of 70% or more and 85% or less of the single crystal material has a characteristic that the surface area per volume is large and the electron emission ability is high. . Furthermore, if the weight density of the dielectric protective film 14 is 70% or more and 80% or less of the single crystal material, it is more desirable from the above-mentioned characteristics.
[0026]
Therefore, the dielectric protective film 14 is preferably formed by obliquely depositing MgO, and the weight density of the dielectric protective film 14 is 70% or more and 85% or less, particularly 70% or more and 80% of the single crystal material. % Or less is preferable.
On the other hand, the back panel 20 has a plurality of data electrodes 22 arranged in a stripe pattern on the surface of the back glass substrate 21 facing the front panel 10, and the surface of the back glass substrate 21 on which the data electrodes 22 are disposed. The top is TiO₂Is covered with a dielectric glass layer 23 containing. Further, a partition wall 24 is provided on the surface of the dielectric glass layer 23 so as to be located between the data electrode 22 and the data electrode 22 in a direction parallel to the data electrode 22. On the inner wall surface of the groove formed by the dielectric glass layer 23 and the partition wall 24, red (R), green (G), and blue (B) phosphor layers 25 are formed separately for each groove. Has been. The phosphor used for forming the phosphor layer 25 is of an excitation light emission type.
[0027]
The front panel 10 and the back panel 20 are arranged so that the display electrodes 12 and the data electrodes 22 formed in each of the front panel 10 and the back panel 20 intersect with each other, and the outer periphery is sealed with an airtight seal layer (frit glass). (Not shown).
The discharge space 30 is a space surrounded by the dielectric protective film 14 and the phosphor layer 25 or the barrier ribs 24 of the front panel 10. The discharge space 30 is filled with a Ne—Xe-based or He—Xe-based gas (rare gas) as a gas substrate. In addition to this, the discharge space 30 is filled with an auxiliary gas, which will be described later.
[0028]
In the PDP 1, in the discharge space 30, each portion where the display electrode 12 and the data electrode 22 face each other when viewed from the outside of the front panel 10 (upper surface side in FIG. 1) corresponds to a light emitting cell.
2. Configuration of PDP display device
Next, the overall configuration of the PDP display device including the PDP 1 will be described with reference to FIG.
[0029]
As shown in FIG. 2, the PDP display device includes the PDP 1 and a driving device 100 for driving the PDP 1.
The driving apparatus 100 includes a display signal processing circuit 101, a timing control circuit 102, a power supply circuit 103, a sustain driver 104, a data driver 105, and a scan driver 106.
[0030]
The display signal processing circuit 101 extracts a display signal (field display signal) for each field from a display signal input from an external video output device, and displays a subfield display signal (subfield display) from the extracted field display signal. Signal) is created and stored in the built-in frame memory.
In addition, the display signal processing circuit 101 outputs a display signal to the data driver 105 line by line from the current subfield display signal stored in the frame memory, a horizontal synchronization signal, a vertical synchronization signal, etc. from the input display signal. The synchronization signal is detected, and the synchronization signal is sent to the timing control circuit 102 for each field or each subfield.
[0031]
The frame memory is a two-port frame memory having two memory areas for one field (stores eight subfield display signals) for each field, while writing a field display signal in one memory area, The operation of reading the field display signal written from the memory area is alternately performed.
The timing control circuit 102 generates a trigger signal that indicates the timing at which each pulse rises for each field or each subfield, and outputs the trigger signal to each driver 104, 105, 106.
[0032]
The sustain driver 104 has a sustain pulse generator and an erase pulse generator, generates a sustain pulse and an erase pulse based on the trigger signal sent from the timing control circuit 102, and applies them to the sustain electrode group. .
The scan driver 106 includes an initialization pulse generator and a scan pulse generator. The scan driver 106 generates an initialization pulse and a scan pulse based on a trigger signal sent from the timing control circuit 102, and scan electrodes of the PDP 1 Apply to group.
[0033]
The power supply circuit supplies driving power to the drivers 104, 105, and 106.
In the PDP display device having such a configuration, a subframe is composed of a series of sequences of an initialization period, a writing period, a sustain discharge period, and an erasing period.
In the initialization period, an initialization pulse is applied to the scan electrode group in the display electrode 12 to initialize the charge states of all the discharge cells.
[0034]
In the writing period, a data pulse is applied to a selected electrode in the data electrode 22 while sequentially applying a scan pulse to the scan electrode. In the electrode to which the data pulse is applied, wall charges are accumulated and image information is written.
In the sustain discharge period, a wall lower than the discharge start voltage between the sustain electrode (common electrode X) in the display electrode 12 and all the scan electrodes (Y1 to Yn), which is a wall generated by the immediately preceding discharge. By applying a pulse maintaining pulse having the same polarity as the charge, a discharge is generated in the discharge cell in which the wall charge is accumulated in the writing period, and light is emitted for a predetermined time.
[0035]
In the erasing period, wall charges in the discharge cells are erased by collectively applying a narrow erasing pulse to the scan electrode group.
That is, in the PDP 1, a discharge cell in which wall charges are generated by writing discharge in the writing period emits light in response to the application of the sustain pulse in the sustain discharge period.
3. Composition of gas filling discharge space
Next, the composition of the gas filled in the discharge space, which is a characteristic part in the present embodiment, will be described.
[0036]
The discharge space 30 of the PDP 1 is filled with a required amount of carbon dioxide gas as an auxiliary gas in addition to a rare gas such as a Ne—Xe gas or a He—Xe gas. The partial pressure of carbon dioxide gas in the discharge space is set within a range of 0.05 mPa to 5 mPa. In particular, it is desirable that the partial pressure of carbon dioxide gas is set within a range of 0.05 mPa to 0.5 mPa. However, the partial pressure here means a partial pressure obtained when a gas analysis is performed at room temperature without discharging the panel.
4). Method for manufacturing PDP1
4-1. Front panel fabrication
In the production of the front panel 10, first, a silver electrode paste is applied on the front glass substrate 11 by screen printing and then baked to form the display electrodes 12.
[0037]
Next, a paste containing a lead-based low-melting glass material is applied by screen printing so as to cover the surface of the front glass substrate 11 on which the display electrodes 12 are formed, and is fired (approximately 550 ° C. or higher and 590 ° C. or lower). Thus, the dielectric glass layer 13 is formed. For example, the composition of the dielectric glass layer 13 is 70% by weight of lead oxide (PbO), boron oxide (B₂O_Three) 15% by weight, silicon oxide (SiO₂) 15% by weight.
[0038]
In addition to the above method, the dielectric glass layer 13 may be formed by using bismuth-based low-melting glass or by laminating lead-based low-melting glass and bismuth-based low-melting glass.
Furthermore, in this embodiment, the dielectric protective film 14 made of MgO is formed on the dielectric glass layer 13 by a vacuum vapor deposition method, but it is preferable to perform oblique vapor deposition at the time of formation by the vacuum vapor deposition method. . The oblique deposition will be described with reference to FIG. FIG. 3 is a schematic configuration diagram of an apparatus for forming the dielectric protective film 14 by oblique vapor deposition.
[0039]
As shown in FIG. 3, a front glass substrate 11 in which a target 52 made of MgO is fixed to a support base (not shown) below and a dielectric glass layer 13 is formed above is inside the chamber 51. It is left still. As can be seen from the figure, the front glass substrate 11 is placed at a predetermined angle (β1, β2, β3) with respect to the target 52. For example, the predetermined angles (β1, β2, β3) are in the range of 60 ° to 80 °.
[0040]
Although not shown in FIG. 3, the actual chamber 51 includes a vacuum pump for reducing the pressure inside, a heater for heating the target 52, a heater for heating the front glass substrate 11, and the like. It has been.
The dielectric protective film 14 formed using such a forming apparatus has a large surface area with respect to volume and high electron emission ability.
[0041]
In the vacuum deposition, the front glass substrate 11 is at 200 ° C. or higher, preferably 300 ° C. or higher, and lower than the melting temperature of the front glass substrate 11 and the display electrode 12 or the dielectric glass layer 13. Keep heating within range.
As a result, the surface of the dielectric glass layer 13 is made of single crystal columnar crystals and has many gaps between the crystals (weight density is 70% or more and 85% or less of the single crystal material, depending on conditions. % To 80% or less) is formed.
[0042]
In this way, the front panel 10 is produced.
The dielectric protective film 14 is not necessarily formed by performing oblique vapor deposition, and may be formed by using a method other than the vacuum vapor deposition method, for example, a sputtering method or a coating method.
4-2. Fabrication of back panel 20
In producing the back panel 20, first, a data electrode 22 is formed by screen printing a silver electrode paste on the back glass substrate 21 and baking it.
[0043]
Next, titanium oxide (TiO 2) is covered so as to cover the surface of the rear glass substrate 21 on which the data electrodes 22 are formed.₂) A (white) dielectric glass layer 23 is formed by applying a paste of glass material containing particles by a screen printing method and baking (approx. 550 ° C. or more and 590 ° C. or less).
The partition wall 24 is formed by applying a glass paste for partition walls on the dielectric glass layer 23 by screen printing and baking.
[0044]
Next, phosphor pastes of red (R), green (G), and blue (B) are applied to the wall portion of the groove formed by the partition wall 24 and the dielectric glass layer 23 using a screen printing method. The phosphor layer 25 is formed by applying and baking in air (for example, at 500 ° C. for 10 minutes). Here, as the phosphor material for forming the phosphor layer 25,
Blue phosphor; BaMgAl_TenO₁₇: Eu
Green phosphor: Zn₂SiO_Four: Mn
Red phosphor: (Y, Gd) BO_Three: Eu
Will be used.
[0045]
The back panel 20 is produced as described above.
In the formation of the phosphor layer 25, a photosensitive resin sheet containing phosphor materials of each color is prepared, and this is attached to the surface of the rear glass substrate 21 on the side where the partition walls 24 project, and photo A method of removing unnecessary portions by patterning and developing by a lithography method, an ink jet method, a line jet method, or the like can also be used.
[0046]
4-3. Sealing the front panel 10 and the back panel 20
Sealing of the front panel 10 and the back panel 20 thus manufactured will be described with reference to FIG.
As shown in FIG. 4A, the front panel 10 and the back panel 20 are sealed so that the dielectric protective film 14 and the phosphor layer 25 formed on each of them face each other. The sealing is preferably performed using frit glass on the outer peripheral portion of one or both of the front panel 10 and the back panel 20.
[0047]
As shown in FIG. 4A, the front glass 10 is provided with a vent hole 101 for introducing exhaust gas, rare gas, carbon dioxide gas and the like.
Next, as shown in FIG. 4B, a vent pipe 61 is connected to the vent hole 101 provided in the front panel 10, and the inside of the discharge space 30 is evacuated through this (for example, 360 ° C.). Above 450 ° C., over 6 hours).
[0048]
When the discharge space 30 is evacuated, the panel is fired in parallel.
Moreover, it is preferable that the timing of starting the vacuum evacuation is a time when the temperature of the frit glass at the time of sealing in FIG. 4A is lower than the softening point. This is not the case when the atmosphere around the panel is a vacuum.
This evacuation is preferably performed until the residual gas pressure in the discharge space 30 becomes 0.02 mPa or less (high vacuum state). The component of the residual gas is similar to the atmospheric component at normal temperature, and nitrogen, oxygen, and hydrogen occupy a large part.
[0049]
As shown in FIG. 4C, a required amount of carbon dioxide gas as auxiliary gas is introduced into the discharge space 30 after being evacuated through the vent pipe 61. As described above, the amount of carbon dioxide introduced is such that the partial pressure in the discharge space 30 is in the range of 0.05 mPa to 5 mPa, and preferably in the range of 0.05 mPa to 0.5 mPa.
[0050]
As shown in FIG. 4D, a so-called rare gas such as a Ne—Xe gas or a He—Xe gas is introduced through a vent pipe 61. The amount of rare gas introduced is such that the pressure in the discharge space 30 is in the range of 40 kPa to 80 kPa.
Finally, although not shown, the front panel 10 is removed after the vent pipe 61 is removed so that carbon dioxide gas and rare gas do not leak or other impurities are not mixed into the discharge space 30. The PDP 1 is completed by closing the vent hole 61 provided in the.
[0051]
As described above, together with the rare gas as the gas substrate, carbon dioxide is mixed in the discharge space 30 so that the partial pressure is in the range of 0.05 mPa to 5 mPa, preferably 0.05 mPa to 0.5 mPa. By doing so, in the PDP 1, it is possible to obtain an optimum value of the electron emission ability that the formed dielectric protective film 14 can have while the discharge start voltage is low.
[0052]
Therefore, the PDP 1 can suppress the occurrence of writing failure during the writing period during driving, and can be driven at high speed with a low discharge voltage.
Further, the superiority of such PDP1 becomes remarkable when the dielectric protective film (MgO) has a high electron emission ability and a short statistical delay time among the discharge delay times. For example, when the applied voltage is 265 V and the dielectric protective film has such a characteristic that the statistical delay time is 40 nsec or more and 100 nsec or less when a pulse of 1.7 μsec is displayed at only one point on the screen, the effect is obtained. Become prominent.
[0053]
Note that the electron emission ability is an originally optimum value from the viewpoint that it is difficult to cause a write failure when the discharge space 30 is filled with only a rare gas. However, in the state where only the rare gas is filled in the discharge space 30, a low discharge start voltage cannot be realized. Therefore, the PDP 1 has the two functions of suppressing the occurrence of writing failure and lowering the discharge start voltage by mixing carbon dioxide gas having a partial pressure of 0.05 mPa to 0.5 mPa in the discharge space 30 as described above. It is compatible.
[0054]
Although the mechanism by which the PDP 1 exhibits the above-mentioned effects has not been elucidated in detail, the type of impurities and the optimum amount to be mixed are confirmed by experiments to be described later.
By the way, the PDP 1 in which carbon dioxide gas is mixed in the discharge space 30 with the partial pressure as described above satisfies a discharge start voltage and an electron emission ability which are desirable as a display panel. The temperature of the surface facing the discharge space 30 is greatly affected. Specifically, in the PDP 1 in which the dielectric protective film 14 is formed using MgO, when the surface temperature of the dielectric protective film 14 is lowered, the electron emission ability is also lowered accordingly.
[0055]
Immediately after the initialization period when the panel is driven, due to the temperature dependence of the electron emission ability, the absolute amount of accumulated wall charges is reduced. In addition, the activation of the discharge space 30 during the initialization period causes temperature dependence. Sex does not get too big. As a result, in this state, the amount of decrease in wall charge becomes very large, leading from a writing failure to a display failure.
[0056]
Therefore, with the partial pressure of carbon dioxide gas, if the environmental temperature is in the range of 25 to 40 ° C, it can be said that it is sufficient to obtain the optimum value of the electron emission ability of MgO. When the environmental temperature is assumed, it is desirable to set the partial pressure of carbon dioxide gas to 0.1 mPa to 0.2 mPa.
In the above embodiment, the features of the present invention have been described using the PDP as an example. However, the discharge space is filled with a rare gas, and the wall discharge is accumulated at the time of driving. If it is a gas discharge display device, the same effect can be obtained with the same configuration.
[0057]
Further, in the manufacturing method of the PDP 1, after the discharge space 30 is evacuated to a high vacuum of 0.02 mPa or less, carbon dioxide gas as an auxiliary gas is introduced, and then a rare gas that is a gas substrate is introduced. As long as the partial pressure of the carbon dioxide gas in the discharge space 30 can be within the above range, the procedure method may be anything other than the above. For example, as a method of mixing the required amount of carbon dioxide in the discharge space 30, the exhaust conditions (heating temperature, exhaust time, etc.) are optimized, and the exhaust gas is evacuated with the required amount of carbon dioxide left, and a rare gas is present there There is also a method of introducing only.
[0058]
As another method, a mixed gas is prepared in advance by mixing a required amount of carbon dioxide gas and a rare gas, and the mixed gas is evacuated to a high vacuum (for example, 0.02 mPa or less). There is also a method in which pure noble gas is introduced until it is introduced into the discharge space 30 and then the pressure in the discharge space 30 becomes a predetermined pressure.
That is, the present invention is not particularly limited or restricted except for the essential part of the present invention in which a required amount of auxiliary gas is mixed in a rare gas as a gas substrate in the discharge space 30.
(Modification)
In the above embodiment, in addition to the rare gas, carbon dioxide gas having a partial pressure in the range of 0.05 mPa to 5 mPa, preferably 0.05 mPa to 0.5 mPa, is mixed in the discharge space 30. If the type and the partial pressure of the auxiliary gas to be mixed are within the following types and ranges, the gas discharge panel can obtain the same effect as the above PDP1.
(1) Carbon dioxide gas having a partial pressure of 1 mPa to 5 mPa
(2) Carbon dioxide gas having a partial pressure of 1.5 mPa to 3 mPa
(3) Water vapor having a partial pressure of 1 mPa to 10 mPa
(4) Water vapor having a partial pressure of 2 mPa to 5 mPa
(5) Oxygen gas having a partial pressure of 0.3 mPa to 5 mPa
(6) Oxygen gas having a partial pressure of 1 mPa to 3 mPa
(7) Carbon dioxide gas having a partial pressure of 0.5 mPa to 1 mPa and oxygen gas having a partial pressure of 1 mPa to 5 mPa
(8) Carbon dioxide gas having a partial pressure of 0.5 mPa to 1 mPa and oxygen gas having a partial pressure of 2 mPa to 3 mPa
(9) Water vapor with a partial pressure of 5 mPa to 20 mPa and nitrogen gas with a partial pressure of 1 Pa to 6 Pa
(10) Water vapor having a partial pressure of 2 mPa to 10 mPa and nitrogen gas having a partial pressure of 2 Pa to 3 Pa
(11) Water vapor having a partial pressure of 1 mPa to 10 mPa and carbon dioxide gas having a partial pressure of 0.05 mPa to 0.5 mPa
(12) Water vapor having a partial pressure of 1 mPa to 8 mPa and carbon dioxide gas having a partial pressure of 0.1 mPa to 0.5 mPa
(13) Water vapor having a partial pressure of 2 mPa to 5 mPa and carbon dioxide gas having a partial pressure of 0.1 mPa to 0.2 mPa
(14) Water vapor having a partial pressure of 5 mPa to 20 mPa and oxygen gas having a partial pressure of 0.2 mPa to 2 mPa
(15) Water vapor having a partial pressure of 5 mPa to 10 mPa and oxygen gas having a partial pressure of 0.5 mPa to 1.5 mPa
Although the above (1) to (15) do not describe what mixes nitrogen gas alone in the discharge space 30, even in this case, the gas discharge panel has the same advantage as described above. There is a possibility that
[0059]
Further, it is generally considered that if impurities other than rare gas remain in the discharge space 30, the life of the PDP is shortened and the light emission performance is deteriorated, but the partial pressure within the above specified range is considered. If it remains, there is little influence and it does not cause a problem in practical use.
(Confirmation experiment)
As described above, by mixing impurities of the above composition and partial pressure in the discharge space 30, the PDP can be driven at a high speed with a low discharge voltage without causing a write failure during a write period during driving. However, the confirmation experiment as the basis for this will be described below.
[0060]
First, the structure of the apparatus used for experiment is demonstrated using FIG.
As shown in FIG. 5, in the experiment, a discharge sample capable of writing discharge was formed in the sealed container 201.
The discharge sample includes a front panel sample 202 on which an electrode 212 is formed, and a back panel sample 203 on which an electrode 213 is formed.
[0061]
A drive circuit 204 is connected to the electrode 212 in the front panel sample 202, and a drive waveform as shown in the figure is repeatedly applied.
On the other hand, the electrode 213 in the back panel sample 203 is grounded via the capacitor 205.
The sealed container 201 is filled with Ne-Xe (Ne; 95%, Xe; 5%) gas as a gas substrate at a pressure of about 50 to 70 kPa, and a necessary amount of auxiliary gas is mixed. ing. In this experiment, the discharge sample was evaluated after changing the component and partial pressure of the auxiliary gas.
[0062]
In such an experimental apparatus, when a drive waveform pulse as shown in FIG. 5 is applied from the drive circuit 204 to the electrode 212 of the front panel sample 202, a write discharge occurs between the electrode 212 and the electrode 213, A charge flows from the electrode 213 through the capacitor 205. At this time, a potential difference is generated between both ends of the capacitor 205. In this experiment, the waveform of this potential difference is measured using the oscilloscope 206 to obtain the amount of flowing electric charge. This is obtained because the amount of charge accumulated in the capacitor 205 is equivalent to a value obtained by temporally integrating the flowing charge.
[0063]
Therefore, the amount of charge movement per time can be obtained by differentiating the amount of charge with time.
In this experiment, when an electric field is not actively applied from the outside after the initialization voltage is applied, in order to capture the state in which the electric charge on the back panel sample 203 side gradually moves from the surface of the front panel sample 202, The displacement (ΔV 210) of how the potential difference of the capacitor 205 changes between 800 nsec after applying the initialization voltage was measured as the electron emission ability (arbitrary unit).
[0064]
Regarding the measurement results, each value (discharge start voltage, electron emission ability) when no auxiliary gas was mixed was used as a reference value, and each obtained value was divided by this reference value and indicated as a relative value. However, in an actual experiment, it is unrealistic to set the impurity in the sealed container 201 to 0. Therefore, when the residual gas pressure is evacuated to 0.02 mPa and only the rare gas is filled. Each value obtained in the above was used as a reference value.
(Experiment 1) When carbon dioxide is used as auxiliary gas
In Experiment 1, the discharge start voltage and the electron emission ability when only carbon dioxide gas was mixed as an auxiliary gas in the sealed container 201 were measured and shown in FIG.
[0065]
As shown in FIG. 6, the discharge start voltage decreases as the partial pressure increases in the range where the partial pressure of carbon dioxide gas is less than 0.05 mPa. And the discharge start voltage when the partial pressure of carbon dioxide gas is in the range of 0.05 to 5 mPa is lower than when no auxiliary gas is mixed (V₀-7) to (V₀-8) Stable at V. The discharge start voltage in the range where the carbon dioxide partial pressure is larger than 5 mPa increases as the partial pressure increases. Here, V in the figure₀Is a discharge start voltage when the carbon dioxide partial pressure is approximately 0.001 mPa and is a reference voltage.
[0066]
  On the other hand, the electron emission ability is stable at 1.02 to 1.04 when the partial pressure of carbon dioxide gas is 0.5 mPa or less. The partial pressure of carbon dioxide is0.05mPaIf it exceeds, the curve indicating the electron emission ability starts to increase, and takes a peak value (1.08) when the partial pressure of carbon dioxide is 0.7 to 0.8 mPa. The electron emission ability gradually decreases from the peak value when the partial pressure of carbon dioxide gas is increased above 0.8 mPa. It can be seen that when the partial pressure of the carbon dioxide gas is made higher than 5 mPa, the degree of decrease in the electron emission ability is large.
[0067]
The lower the desirable numerical range of the discharge start voltage, the better.
On the other hand, a desirable range of the electron emission ability will be described with reference to FIG.
As shown in FIG. 12, the range of desirable electron emission ability also changes depending on the environmental temperature. For example, when the environmental temperature is 25 ° C., it can be said that a desirable range is that the display defect occurrence rate is less than 1% and the electron emission ability is 1.17 or less.
[0068]
  Similarly, when the environmental temperature is 10 ° C., a desirable range of the electron emission ability is 1.12 or less. And when environmental temperature is 0 degreeC, the desirable range of electron emission ability will be 1.07 or less. When the environmental temperature is 25 ° C., the carbon dioxide partial pressure desirable from the viewpoint of the discharge start voltage is in the range of 0.05 mPa to 5 mPa,This range satisfies the above desirable range even at 10 ° C. and 0 ° C.
[0069]
  (Experiment 2) When oxygen gas is used as auxiliary gas
  In Experiment 2, the discharge start voltage and the electron emission ability when oxygen gas was mixed as an auxiliary gas in the sealed container 201 were measured and are shown in FIG.
[0070]
As shown in FIG. 7, when the partial pressure of oxygen gas is less than 0.3 mPa, both the discharge start voltage and the electron emission ability are stable without change.
In the range where the partial pressure of oxygen gas is 0.3 mPa or more, the discharge start voltage increases with the partial pressure of oxygen gas, and the electron emission ability decreases on the contrary. It can be seen that the degree of increase in the discharge start voltage and the degree of decrease in the electron emission ability increase as the partial pressure of oxygen gas exceeds 5 mPa.
[0071]
  The lower the desirable numerical range of the discharge start voltage, the better. On the other hand, when FIG. 12 is used about the desirable range of electron emission ability, when environmental temperature is 0 degreeC, the desirable range of electron emission ability will be 1.07 or less.. From the experimental results shown in FIG. 7, in order to satisfy the desirable numerical range, the oxygen gas partial pressure is0.01 mPa to 0.3 mPaIt can be seen that it should be set within the range.
[0072]
  (Experiment 3) When steam is used as auxiliary gas
  In Experiment 3, the discharge start voltage and the electron emission ability when water vapor was mixed as an auxiliary gas in the sealed container 201 were measured and shown in FIG. As shown in FIG. 8, the discharge start voltage gradually decreases when the partial pressure of water vapor is less than 1 mPa, and when the partial pressure of water vapor is 1 mPa or more and 20 mPa or less.V ₀ -5 (V)It is stable in degree. When the partial pressure of water vapor exceeds 20 mPa, the discharge start voltage decreases, but when the partial pressure of water vapor exceeds 100 mPa, it starts to increase rapidly.
[0073]
On the other hand, the electron emission ability increases as the partial pressure of water vapor increases in the range where the partial pressure of water vapor is 20 mPa or less. However, when the partial pressure of water vapor exceeds 10 mPa, the degree of increase becomes large. The electron emission ability takes a peak value when the partial pressure of water vapor is about 20 mPa, and then decreases.
Desirable numerical ranges of the discharge start voltage and the electron emission ability are the same as those in Experiment 1 and Experiment 2.
[0074]
  The lower the desirable numerical range of the discharge start voltage, the better. On the other hand, regarding the desirable range of the electron emission ability, when FIG. 12 is used, when the environmental temperature is 25 ° C., the desirable range of the electron emission ability is 1.17 or less.From the experimental results shown in FIG. 8, the water vapor partial pressure is in the range of 1 mPa to 10 mPa. And when considering environmental temperature of 10 degreeC, what is necessary is just to set in the range of 2 mPa or more and 5 mPa or less.
  (Experiment 4) When nitrogen gas is used as auxiliary gas
  As described above, in the current gas discharge panel having a dielectric protective film made of MgO, the merit of mixing nitrogen gas alone as an auxiliary gas cannot be found, but only a confirmation experiment was performed.
[0075]
  As shown in FIG. 9, when nitrogen gas is mixed, the discharge start voltage is stable in the range where the partial pressure is less than 0.8 Pa. As the partial pressure of nitrogen gas is increased, the discharge start voltage gradually increases, and when it exceeds 8 Pa, it is decreased. On the other hand, the electron emission ability is not substantially affected by the partial pressure of nitrogen gas, and is substantially constant.1.0Keep.
[0076]
As can be seen from the above results, even if nitrogen gas alone is mixed in the discharge space 30 as an impurity, there is not much merit in the gas discharge panel having the current dielectric protective film, but it depends on the conditions of the dielectric protective film. Then, even if nitrogen gas is mixed alone as an impurity in the discharge space 30, it can be expected to obtain the above-described advantage.
(Experiment 5) When carbon dioxide gas and oxygen gas are used in combination as auxiliary gas
In Experiment 5, the discharge start voltage and the electron emission ability when carbon dioxide gas and oxygen gas were mixed and mixed as auxiliary gases in the sealed container 201 were measured. Since this result is an algebraic sum of the result obtained when the carbon dioxide gas is mixed alone and the result obtained when the oxygen gas is mixed alone, the illustration is omitted.
[0077]
From the experimental results, when carbon dioxide and oxygen gas are mixed and mixed as auxiliary gases in the discharge space of the gas discharge panel, the partial pressure of carbon dioxide is set to 0.5 mPa to 1 mPa and the partial pressure of oxygen gas If it is set to 1 mPa or more and 5 mPa or less, it is optimal in terms of both the discharge start voltage and the electron emission ability.
In the above results, the desirable range of the partial pressure of carbon dioxide is 0.5 mPa or more and 1 mPa or less because the demerit of the increase in the electron emission ability that occurs when carbon dioxide is mixed alone is mixed with oxygen gas. It is because it can balance well. That is, in this combination, when carbon dioxide gas is mixed alone, an amount considered to be excessive is introduced, and the demerit of the increase in electron emission ability caused by this is canceled by introducing oxygen gas.
[0078]
  Therefore, when carbon dioxide gas and oxygen gas are mixed and mixed in the discharge space, superior characteristics in terms of both the discharge start voltage and the electron emission ability can be obtained compared to the case where each is mixed alone. Can do.
[0081]
(Experiment 7) When water vapor and carbon dioxide gas are used in combination as auxiliary gas
  In Experiment 7, the discharge start voltage and the electron emission ability when water vapor and carbon dioxide gas were combined and mixed as auxiliary gas in the sealed container 201 were measured and are shown in FIGS. 10 and 11. FIG. 10 shows a change in electron emission ability, and FIG. 11 shows a change in discharge start voltage.
[0082]
As shown in FIG. 10, when water vapor and carbon dioxide are mixed in the sealed container 201, the electron emission ability has a peak value when the water vapor partial pressure is around 20 mPa, regardless of the partial pressure of carbon dioxide.
Further, when viewing FIG. 10 in terms of the partial pressure of carbon dioxide, the electron emission ability increases with the increase in partial pressure of carbon dioxide when the partial pressure of carbon dioxide is within the range of 0 mPa (water vapor only) to 0.665 mPa. It gets higher.
[0083]
However, when the partial pressure of carbon dioxide gas is 6.65 mPa, the electron emission ability is lower than that when carbon dioxide is not mixed.
Next, as shown in FIG. 11, the discharge start voltage has a similar relationship with the characteristics when only water vapor is mixed even when carbon dioxide is mixed with water vapor in the sealed container 201. . That is, the discharge start voltage takes a minimum value when the partial pressure of water vapor is 20 to 100 mPa.
[0084]
When looking at FIG. 11 from the aspect of partial pressure of carbon dioxide, the discharge start voltage has a part where the order is changed, but the partial pressure of carbon dioxide is 0.665 mPa, 0.0665 mPa, 6.65 mPa, 0 mPa (water vapor Only) in order.
When viewed as a gas discharge panel, desirable numerical ranges of the discharge start voltage and the electron emission capability are as described above.
[0085]
  From the experimental results shown in FIG. 10 and FIG. 11, in order to satisfy or approach the above desirable numerical range, the water vapor partial pressure is set to 1 mPa to 10 mPa and the carbon dioxide partial pressure is set to0.0665 mPaIf it is set to 0.665 mPa or lessSince the electron emission ability is also about 1.17 or less, the electron emission ability at an environmental temperature of 25 ° C. is a desirable range from FIG.good. In the above, the water vapor partial pressure is 1 mPa or more and 8 mPa or less,Carbon dioxide partial pressure is 0.0665 mPa or more and 0.665 mPa or lessIf set toSince the electron emission ability is also about 1.07 or less, it is a desirable range of electron emission ability at an environmental temperature of 0 ° C. from FIG..
[0086]
  The reason why the characteristics (discharge start voltage, electron emission ability) of the gas discharge panel are excellent by setting such a numerical range is the same as that of the above-described embodiment, and is excellent also with respect to changes in environmental temperature. This is because the characteristics are maintained.
[0087]
(Experiment 8) When water vapor and oxygen gas are used in combination as auxiliary gas
In Experiment 8, the discharge start voltage and the electron emission ability were measured when water vapor and oxygen gas were mixed and mixed as auxiliary gas in the sealed container 201. Also in this experiment, since the result was captured as an algebraic sum as in Experiment 5 and Experiment 6, the illustration was omitted.
[0088]
  As a result of the experiment, when water vapor and oxygen gas are combined and mixed as auxiliary gas in the discharge space of the gas discharge panel, the partial pressure of water vapor is set to 5 mPa to 20 mPa, and the partial pressure of oxygen gas is0.5If it is set to mPa or more and 2 mPa or less,From FIG. 12, since it becomes 1.07 or less which becomes a desirable range of the electron emission ability at an environmental temperature of 0 ° C.,The desired range of the discharge start voltage and the electron emission ability is satisfied.
[0089]
In the experiments 1 to 8, each data of the discharge start voltage and the electron emission ability is shown as a relative value based on a numerical value when the amount of the auxiliary gas mixed is almost zero. The above data was obtained by experiments using the experimental apparatus shown in FIG. 5, but the appropriate partial pressures of various auxiliary gases derived from the experimental results are also effective when the design value is changed. It is confirmed that.
[0090]
  For reference, the design values of the experimental apparatus are as follows: main discharge gap 60-100 μm, main discharge electrode width 100-300 μm, partition wall height 110-130 μm, filling gas pressure 50-70.kPa, a rare gas that is a sealing rare gas, is a mixed gas of 5% Xe on a Ne basis.
[0091]
【The invention's effect】
As described above, the gas discharge panel of the present invention has a low discharge start voltage and an optimum electron emission ability together with the gas substrate in the discharge space. Therefore, in such a gas discharge panel, the occurrence of an address failure is suppressed during the writing period during driving, and the driving voltage can be lowered and the driving speed can be increased.
[0092]
In the method of manufacturing a gas discharge panel according to the present invention, a discharge space is formed between two sealed substrates (discharge space forming step), and the residual gas pressure is 0.1 mPa or less with respect to the discharge space. The exhaust gas is exhausted (exhaust step), and after this exhaust step, an auxiliary gas consisting of at least one selected from carbon dioxide, water vapor, oxygen, and nitrogen is introduced into the discharge space (auxiliary gas introduction step), Since the gas substrate is then introduced (gas substrate introduction step), a required amount of at least one auxiliary gas selected from carbon dioxide, water vapor, oxygen gas, and nitrogen gas is mixed in the discharge space. Can do.
[0093]
Therefore, in this manufacturing method, it is possible to manufacture a gas discharge panel that can suppress the occurrence of an address failure during a writing period during driving and can be driven at a high speed with a low driving voltage.
[Brief description of the drawings]
FIG. 1 is a perspective view (partially sectional view) of a PDP 1 according to an embodiment of the present invention.
FIG. 2 is a block diagram showing an overall configuration of a PDP display device according to an embodiment of the present invention.
FIG. 3 is a schematic configuration diagram of an apparatus for forming a dielectric protective film 14 by oblique vapor deposition.
FIG. 4 is a schematic view of each process of sealing, exhaust, and gas introduction.
FIG. 5 is a schematic view of an experimental apparatus used in a confirmation experiment.
FIG. 6 is a characteristic diagram showing the relationship between the partial pressure of carbon dioxide mixed in a sealed container, the discharge start voltage, and the electron emission ability.
FIG. 7 is a characteristic diagram showing the relationship between the partial pressure of oxygen gas mixed in the sealed container, the discharge start voltage, and the electron emission ability.
FIG. 8 is a characteristic diagram showing the relationship between the partial pressure of water vapor mixed in the sealed container, the discharge start voltage, and the electron emission ability.
FIG. 9 is a characteristic diagram showing the relationship between the partial pressure of nitrogen gas mixed in a sealed container, the discharge start voltage, and the electron emission ability.
FIG. 10 is a characteristic diagram showing the relationship between each partial pressure of water vapor and carbon dioxide mixed in an airtight container and electron emission ability.
FIG. 11 is a characteristic diagram showing the relationship between each partial pressure of water vapor and carbon dioxide mixed in a sealed container and the discharge start voltage.
FIG. 12 is a characteristic diagram showing a relationship between electron emission ability and display defect occurrence rate at each temperature.
[Explanation of symbols]
1. PDP
10. Front panel
12 Display electrode
14 Dielectric protective film
20. Back panel
22. Data electrode
30. Discharge space

Claims (9)

A gas discharge panel having a discharge space in which a gas substrate is filled between two substrates arranged opposite to each other,
The main discharge gap is 60 to 100 μm, the main discharge electrode width is 100 to 300 μm, the partition wall height is 110 to 130 μm, the filling gas pressure is 50 to 70 kPa, and the rare gas sealed is a Ne base containing a mixed gas of 5% Xe,
The discharge space is filled with carbon dioxide gas having a partial pressure of 0.05 mPa to 5 mPa. A gas discharge panel having a discharge space in which a gas substrate is filled between two substrates arranged opposite to each other,
The main discharge gap is 60 to 100 μm, the main discharge electrode width is 100 to 300 μm, the partition wall height is 110 to 130 μm, and the filling gas pressure is 50 to 70 kPa.
Containing 5% gas mixture,
The discharge space is filled with water vapor having a partial pressure of 1 to 10 mPa and carbon dioxide gas having a partial pressure of 0.0665 to 0.665 mPa. In the discharge space, water vapor having a partial pressure of 1 mPa or more and 8 mPa or less, and a partial pressure of 0.0665 mPa or more.
The gas discharge panel according to claim 2 , wherein the gas discharge panel is filled with a carbon dioxide gas of 0.665 mPa or less. Furthermore, it has a dielectric protective film,
2. The gas discharge panel according to claim 1, wherein the dielectric protective film is made of MgO and has a weight density of 70% to 85% of a single crystal weight density. The gas discharge panel according to claim 4 , wherein the dielectric protective film has a weight density of 70% or more and 80% or less of a single crystal weight density. A gas discharge display device comprising the gas discharge panel according to claim 1,
A gas discharge display device characterized by having a discharge region having a statistical delay time of 100 nsec or less during a panel drive. Gas having a main discharge gap of 60 to 100 μm, a main discharge electrode width of 100 to 300 μm, a partition wall height of 110 to 130 μm, a filling gas pressure of 50 to 70 kPa, and a sealed rare gas containing a mixed gas of 5% Xe with Ne A method for manufacturing a discharge panel, comprising:
A step of forming a discharge space between two substrates, a step of exhausting a residual gas in the space to the discharge space, and a step of exhausting the carbon dioxide gas, water vapor, Introducing at least one gas selected from oxygen gas and nitrogen gas; and introducing the gas substrate into the discharge space after introducing the at least one gas. Have
The method of manufacturing a gas discharge panel, wherein the at least one gas is a carbon dioxide gas having a partial pressure of 0.05 mPa or more and 5 mPa or less after the gas substrate is introduced. Gas having a main discharge gap of 60 to 100 μm, a main discharge electrode width of 100 to 300 μm, a partition wall height of 110 to 130 μm, a filling gas pressure of 50 to 70 kPa, and a sealed rare gas containing a mixed gas of 5% Xe with Ne A method for manufacturing a discharge panel, comprising:
A step of forming a discharge space between two substrates, a step of exhausting a residual gas in the space to the discharge space, and a step of exhausting the carbon dioxide gas, water vapor, Introducing at least one gas selected from oxygen gas and nitrogen gas; and introducing the gas substrate into the discharge space after introducing the at least one gas. Have
The at least one gas is a carbon dioxide gas having a partial pressure of 0.5 mPa to 1 mPa and an oxygen gas having a partial pressure of 1 mPa to 5 mPa after introduction of the gas substrate. A method for producing a gas discharge panel, which is characterized. Gas having a main discharge gap of 60 to 100 μm, a main discharge electrode width of 100 to 300 μm, a partition wall height of 110 to 130 μm, a filling gas pressure of 50 to 70 kPa, and a sealed rare gas containing a mixed gas of 5% Xe with Ne A method for manufacturing a discharge panel, comprising:
A step of forming a discharge space between two substrates, a step of exhausting a residual gas in the space to the discharge space, and a step of exhausting the carbon dioxide gas, water vapor, Introducing at least one gas selected from oxygen gas and nitrogen gas; and introducing the gas substrate into the discharge space after introducing the at least one gas. Have
The at least one gas is a water vapor having a partial pressure of 1 mPa to 10 mPa and a carbon dioxide gas having a partial pressure of 0.0665 mPa to 0.665 mPa in a state after the gas substrate is introduced. A method for producing a gas discharge panel, comprising:

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