JP4027211B2

JP4027211B2 - Room pressure control system

Info

Publication number: JP4027211B2
Application number: JP2002339470A
Authority: JP
Inventors: 勘十橋上; 明哉野尻; 秀司入江
Original assignee: Taikisha Ltd
Current assignee: Taikisha Ltd
Priority date: 2002-11-22
Filing date: 2002-11-22
Publication date: 2007-12-26
Anticipated expiration: 2022-11-22
Also published as: JP2004170046A

Description

【０００１】
【発明の属する技術分野】
本発明は室圧制御システムに関し、詳しくは、対象室の検出室圧と目標室圧との偏差に応じ前記対象室に対する給気量と排気量との収支を調整して前記対象室の室圧を目標室圧に調整する室圧制御手段を設けてある室圧制御システムに関する。
【０００２】
【従来の技術】
従来、この種の室圧制御システムにおいて、対象室の室圧が目標室圧から大きく外れる室圧異常を検出するには、図５（イ）に示す如く、対象室の検出室圧ｐが目標室圧ｐｓより所定圧だけ高い上限側の設定閾室圧ｐａを高圧側に逸脱した状態が設定時間Ｔにわたって継続したときや、図５（ロ）に示す如く、対象室の検出室圧ｐが目標室圧ｐｓより所定圧だけ低い下限側の設定閾室圧ｐｂを低圧側に逸脱した状態が設定時間Ｔにわたって継続したときに、異常であると判定する方式を採っていた。
【０００３】
そして、この方式により室圧異常の発生を検出すると、室圧異常に対する対応処理として、異常発生の報知を行わせたり、システムを自動停止（室圧調整の停止並びに対象室に対する給排気の停止）させるなどし、これによりシステムの保全を図るようにしていた（適当な先行技術文献がない）。
【０００４】
【発明が解決しようとする課題】
しかし、対象室に対する給気量と排気量との収支を調整して対象室の室圧ｐを目標室圧ｐｓに調整する室圧制御では、何らかの原因で室圧ｐが図５（ハ）に示す如く目標室圧ｐｓの付近を中心に大きな振幅で振動的に変動する室圧の異常振動Ｈ（室圧ハンチング）が発生することがあり、この室圧異常振動Ｈは、隣接室間の室圧逆転を招いて室内汚染を招く原因となるなど、システムの運転上で種々の障害要因になるが、前述の如き従来の室圧制御システムにおける異常検出では、この室圧の異常振動Ｈを的確に検出できず、その為、システムの運転において種々の障害を招いてしまう問題があった。
【０００５】
すなわち、検出室圧ｐが上限側の設定閾室圧ｐａを高圧側に逸脱した状態が設定時間Ｔｓにわたって継続したときや、検出室圧ｐが下限側の設定閾室圧ｐｂを低圧側に逸脱した状態が設定時間Ｔにわたって継続したときに、異常であると判定する図５（イ），（ロ）に示す方式では、図５（ハ）に示す如く周波数が高くて一つ一つの振動波の頂部が上限側や下限側の設定閾室圧ｐａ，ｐｂを逸脱した状態にある時間ΔＴが設定時間Ｔに満たない室圧異常振動Ｈを異常として検出することができず、かといって、上記設定時間Ｔを極短い時間（室圧異常振動Ｈにおける各振動波の頂部が設定閾室圧ｐａ，ｐｂを逸脱している時間ΔＴ程度の短い時間）にしたり、検出室圧ｐが単に上限側や下限側の設定閾室圧ｐａ，ｐｂを逸脱したことだけで異常であると判定する方式を採るのでは、対象室におけるドアの開閉などの影響で検出室圧ｐが単発的に設定閾室圧ｐａ，ｐｂを逸脱したに過ぎず、その後、速やかに正常に戻るような場合なども異常と誤判定され、その為に、異常発生の誤報知が頻繁に為される等して、却ってシステムの運転に支障を来たす問題が生じる。
【０００６】
この実情に鑑み、本発明の主たる課題は、合理的な判定方式を採ることで、上記の如き室圧の異常振動を的確に検出して、室圧異常振動の発生に対し適切に対応できるようにする点にある。
【０００７】
【課題を解決するための手段】
〔１〕請求項１に係る発明は室圧制御システムに係り、その特徴は、
対象室の検出室圧と目標室圧との偏差に応じ前記対象室に対する給気量と排気量との収支を調整して前記対象室の室圧を目標室圧に調整する室圧制御手段を設けてある室圧制御システムにおいて、
前記室圧制御手段による室圧調整下で、前記対象室の検出室圧が目標室圧から遠ざかる方向で設定閾室圧を反復的に逸脱する回数が設定閾時間の時間内に設定複数回数に達したとき、異常と判定して所定の対応処理を実行する保護手段を設けてある点にある。
【０００８】
つまり、この構成によれば、対象室の検出室圧が設定閾時間の時間内において設定閾室圧を目標室圧から遠ざかる方向で設定複数回数以上、反復的に逸脱したとき異常として判定するから、設定閾室圧、設定閾時間、設定複数回数の夫々に検出対象である室圧異常振動の振幅や周期に応じた適当な値を設定しておけば、対象室におけるドアの開閉などの影響で検出室圧が単発的に設定閾室圧を目標室圧から遠ざかる方向で逸脱したに過ぎない場合などまで異常と判定してしまうことを効果的に防止した状態で、室圧が目標室圧の付近を中心に大きな振幅で振動的に変動する室圧異常振動を的確に検出することができる。
【０００９】
そして、この異常であるとの判定（すなわち、室圧異常振動の発生の検出）に応じて保護手段が所定の対応処理を実行するから、室圧異常振動の発生に対し適切に対応することができ、これにより、室圧の異常振動に原因するシステム運転上の種々の障害を効果的に防止することができる。
【００１０】
なお、請求項１に係る発明の実施においては、設定閾室圧を目標室圧よりも高圧側に設定する形態、あるいは逆に、目標室圧よりも低圧側に設定する形態のいずれを採ってもよく、また、設定閾室圧を目標室圧よりも高圧側と低圧側との両方に設定し、上記逸脱回数が設定閾時間の時間内に設定複数回数に達したとき異常と判定して所定の対応処理を実行することを、それら高圧側（上限側）の設定閾室圧と低圧側（下限側）の設定閾室圧との各々について実施する形態を採ってもよい。
【００１１】
請求項１に係る発明の実施において、上記逸脱回数の計測を伴う設定閾時間の計測は、先の設定閾時間の計測が完了したときに次の設定閾時間の計測を開始する形態（略言すれば、先の設定閾時間と次の設定閾時間とに時間的ラップが無い形態）に限らず、先の設定閾時間の計測途中に次の設定閾時間の計測を開始する形態（略言すれば、先の設定閾時間と次の設定閾時間とに時間的ラップが有る形態）を採るようにしてもよい。
【００１２】
また、請求項１に係る発明の実施においては、設定閾室圧、設定閾時間、設定複数回数の夫々をシステムの運転状況などに応じて適宜変更するための手段を装備しておくのが望ましい。
【００１３】
〔２〕請求項２に係る発明は、請求項１に係る発明の実施に好適な実施形態を特定するものであり、その特徴は、
前記対応処理が異常の発生を報知する異常報知処理、又は、前記室圧制御手段の室圧調整特性を変更する特性変更処理である点にある。
【００１４】
つまり、前記対応処理として異常の発生を報知する異常報知処理を保護手段に実行させる構成を採れば、その報知に応じ管理者が室圧制御手段の室圧調整特性を変更する（具体例としては種々の制御パラメータを変更する）などの適当な操作を実施して室圧の異常振動を収束させることができ、また、前記対応処理として室圧制御手段の室圧調整特性を変更する特性変更処理を保護手段に実行させる構成を採れば、その室圧調整特性の変更により室圧の異常振動を自動的に収束させることができ、これらのことで、室圧の異常振動に原因するシステム運転上の種々の障害を防止することができる。
【００１５】
なお、室圧制御手段の室圧調整特性を変更して室圧の異常振動を収束させる場合、システム全体の特性に応じた振動収束用の室圧調整特性を予め準備しておき、そして、室圧の異常振動が発生したとき、上記報知に応じた人為操作により、又は、上記特性変更処理により、室圧制御手段の室圧調整特性をそれまで特性から準備してある振動収束用の室圧調整特性へ切り換えるようにすれば、室圧異常振動を収束させ得る室圧調整特性を室圧異常振動の発生後に模索する形態で特性変更を行うのに比べ、迅速に室圧異常振動を収束させることができて、室圧の異常振動に原因するシステム運転上の種々の障害を一層確実に防止することができる。
【００１６】
また、前述の請求項１に係る発明の実施において、保護手段に実行させる対応処理は、上記の異常報知処理や特性変更処理に限られるものでなく、室圧の異常振動に原因するシステム運転上の種々の障害を防止する為のものであれば、どのような処理であってもよい。
【００１７】
〔３〕請求項３に係る発明は、請求項１又は２に係る発明の実施に好適な実施形態を特定するものであり、その特徴は、
前記保護手段を、前記室圧制御手段による室圧調整下で、前記逸脱回数が設定閾時間の時間内に設定複数回数に達したとき、前記対応処理を開始し、
その後、前記対応処理を継続して、前記逸脱回数が設定閾時間の時間内に設定複数回数に達しなくなったとき、前記対応処理を終了する構成にしてある点にある。
【００１８】
つまり、この構成によれば、逸脱回数が設定閾時間の時間内に設定複数回数に達しなくなったとき（すなわち、逸脱回数が設定閾時間の時間内に設定複数回数に達することで先に検出された室圧異常振動が収束した後）に、対応処理を終了するから、例えば、対応処理として前記の異常報知処理を実行させる場合にしても、対応処理としての異常報知の継続が不十分な為に室圧の異常振動が残存してしまうといったことを効果的に防止することができ、これにより、室圧の異常振動に原因するシステム運転上の種々の障害を一層確実に防止することができる。
【００１９】
〔４〕請求項４に係る発明は、請求項１〜３のいずれか１項に係る発明の実施に好適な実施形態を特定するものであり、その特徴は、
前記保護手段を、前記室圧制御手段による室圧調整の開始後、又は、前記逸脱回数が設定閾時間の時間内に設定複数回数に達しなくなった後、設定閾時間の計測を停止しておき、
その計測停止状態において前記対象室の検出室圧が目標室圧から遠ざかる方向で設定閾室圧を逸脱したとき、設定閾時間の計測及び前記逸脱回数の計測を開始する構成にしてある点にある。
【００２０】
つまり、この構成によれば、設定閾時間の計測を停止している状態において検出室圧が目標室圧から遠ざかる方向で設定閾室圧を逸脱したときに、設定閾時間の計測及び逸脱回数の計測を開始するから、室圧異常振動の発生時には、確実に、その発生最初期における設定複数回数の前記逸脱をもって異常と判定する（換言すれば、異常振動が発生してから設定複数回数目の振動波をもって異常と判定する）ことができて、異常の判定（異常検出）及びその判定に基づく対応処理を常に遅れなく早期に行うことができ、これにより、室圧の異常振動に原因するシステム運転上の種々の障害を一層確実に防止することができる。
【００２１】
すなわち、逸脱回数の計測を伴う設定閾時間の計測を単純に繰り返す構成では、室圧異常振動の発生が設定閾時間の計測途中であった為に、その回の計測における逸脱回数が設定複数回数に満たなかった場合、異常の判定は次回の計測で為されることになり、その分、室圧異常振動の発生に対し対応処理の実行が遅れるが、上記構成によれば、このような遅れを回避することができる。
【００２２】
〔５〕請求項５に係る発明は、請求項１〜４のいずれか１項に係る発明の実施に好適な構成を特定するものであり、その特徴は、
前記保護手段を、前記対象室の検出室圧が目標室圧から遠ざかる方向で設定閾室圧を逸脱した状態が設定認定時間にわたって継続したときに、その逸脱を認定し、
前記対象室の検出室圧が目標室圧から遠ざかる方向で設定閾室圧を逸脱した状態が設定認定時間よりも短い時間しか継続しなかったときには、その逸脱を非認定とする構成にしてある点にある。
【００２３】
つまり、種々の原因による室圧変動の中には、ドア開閉の影響などで室圧が上記の設定閾室圧を目標室圧から遠ざかる方向で単発的かつ極一瞬だけ逸脱するような変動も存在するが、そのような極一瞬の逸脱も室圧の異常振動における１回の逸脱と同等に逸脱として認定するのでは、設定閾時間の時間内に逸脱回数が設定複数回数に達するか否かをもって室圧の異常振動を検出する請求項１に係る発明の実施において、誤検出（すなわち、異常の誤判定）及び対応処理の誤実施を招いたり、逸脱回数が設定閾時間の時間内に設定複数回数に達しなくなったとき対応処理を終了する請求項３に係る発明の実施において、対応処理の誤継続を招いたり、また、計測停止状態において検出室圧が目標室圧から遠ざかる方向で設定閾室圧を逸脱したとき設定閾時間の計測及び逸脱回数の計測を開始する請求項４に係る発明の実施において、計測の誤開始を招くなどの不都合が生じる虞がある。
【００２４】
これに対し、上記構成によれば、検出室圧が目標室圧から遠ざかる方向で設定閾室圧を逸脱した状態が設定認定時間よりも短い時間しか継続しなかったときには、その逸脱を非認定とする（すなわち、逸脱が無かったとする）から、室圧異常振動における各振動波が設定閾室圧を逸脱している時間がシステムの特性によってほぼ一定していることに応じ、上記の設定認定時間として適当な時間を設定しておけば、上記の如きドアの開閉などの影響による極一瞬の逸脱と室圧の異常振動における各回の逸脱とを区別した状態で、保護手段を室圧の異常振動に対し的確に動作させることができ、これにより、上記の如き種々の不都合を効果的に回避することができる。
【００２５】
なお、請求項５に係る発明の実施においては、設定認定時間をシステムの運転状況などに応じて適宜変更するための手段を装備しておくのが望ましい。
【００２６】
【発明の実施の形態】
図１は複数の対象室１に対する空調システムを示し、２は給気ファンＦｓを介装した給気側主風路、３は排気ファンＦｒを介装した排気側主風路であり、各対象室１は給気側分岐風路２ａを介して給気側主風路２に対し並列に接続するとともに、排気側分岐風路３ａを介して排気側主風路３に対し同じく並列に接続してある。また、４は対象室１への供給空気を温湿度調整する空調機である。
【００２７】
Ｖｓは給気側分岐風路２ａの夫々に介装した給気側ダンパ、５は給気側分岐風路２ａの通風量ｑｓを検出する通風量センサ、６Ａは給気側ダンパＶｓを制御する給気側ダンパ制御器であり、これら給気側ダンパ制御器６Ａは、通風量センサ５による検出通風量ｑｓと中央制御器ＣＣから指定される目標通風量ｑｓｓとの偏差Δｑｓに応じ給気側ダンパＶｓの開度を調整して各給気側分岐風路２ａの通風量ｑｓ（すなわち、各対象室１の換気風量）を目標通風量ｑｓｓに調整する給気側ダンパ制御を実行する。
【００２８】
Ｖｒは排気側分岐風路３ａの夫々に介装した排気側ダンパ、７は対象室１の室圧ｐ（具体的には基準圧力と室内圧力との差圧）を検出する室圧センサ、６Ｂは排気側ダンパＶｒを制御する排気側ダンパ制御器であり、これら排気側ダンパ制御器６Ｂは、室圧センサ７による検出室圧ｐと中央制御器ＣＣから指定される目標室圧ｐｓとの偏差Δｐに応じ排気側ダンパＶｒの開度を調整して各対象室１の室圧ｐを目標室圧ｐｓに調整する排気側ダンパ制御を実行する。
【００２９】
８ａは給気側主風路２の風路圧ｆｓを検出する給気側圧力センサ、９Ａは給気ファンＦｓを制御する給気側ファン制御器であり、この給気側ファン制御器９Ａは、給気側圧力センサ８ａによる検出風路圧ｆｓと中央制御器ＣＣから指定される給気側目標風路圧ｆｓｓとの偏差Δｆｓに応じインバータ制御により給気ファンＦｓの出力を調整して給気側主風路２の風路圧ｆｓを給気側目標風路圧ｆｓｓに調整する給気側ファン制御を実行する。
【００３０】
８ｂは排気側主風路３の風路圧ｆｒを検出する排気側圧力センサ、９Ｂは排気ファンＦｒを制御する排気側ファン制御器であり、この排気側ファン制御器９Ｂは、排気側圧力センサ８ｂによる検出風路圧ｆｒと中央制御器ＣＣから指定される排気側目標風路圧ｆｒｓとの偏差Δｆｒに応じインバータ制御により排気ファンＦｒの出力を調整して排気側主風路３の風路圧ｆｒを排気側目標風路圧ｆｒｓに調整する排気側ファン制御を実行する。
【００３１】
１０Ａ，１０Ｂは中央制御器ＣＣにおける給気側及び排気側の風路圧調整部であり、給気側の風路圧調整部１０Ａは、給気側ダンパ制御器６Ａによる前記の給気側ダンパ制御において給気側ダンパＶｓが所定の適正開度状態（本実施形態では図２に示す如く上下限値ｘ１，ｘ２ともに中間開度値に設定してある給気側の目標中間開度範囲Ｘの範囲内に全ての給気側ダンパＶｓの開度ａ１〜ａ３が入っている状態）になるように、給気側ダンパＶｓ夫々の検出開度ａ１〜ａ３に応じ給気側目標風路圧ｆｓｓを変更する給気側の風路圧調整制御を実行する。
【００３２】
また、排気側の風路圧調整部１０Ｂは、給気側と同様、排気側ダンパ制御器６Ｂによる前記の排気側ダンパ制御において排気側ダンパＶｒが所定の適正開度状態（本実施形態では同図２に示す如く上下限値ｙ１，ｙ２ともに中間開度値に設定してある排気側の目標中間開度範囲Ｙの範囲内に全ての排気側ダンパＶｒの開度ｂ１〜ｂ３が入っている状態）になるように、排気側ダンパＶｒ夫々の検出開度ｂ１〜ｂ３に応じ排気側目標風路圧ｆｒｓを変更する排気側の風路圧調整制御を実行する。
【００３３】
つまり、本実施形態では、給気側分岐風路２ａの通風量ｑｓを調整する給気側ダンパ制御の実施下において、上記の如き給気側の風路圧調整制御及び給気側ファン制御により給気側ダンパＶｓの開度ａ１〜ａ３が全て給気側の目標中間開度範囲Ｘ（ダンパ特性上で風量調整機能に優れた開度範囲）に入るようにすることで、その給気側ダンパ制御による通風量調整（対象室１に対する換気風量調整）を感度面及び精度面で良好に行なえるようにする。
【００３４】
また同様に、対象室１の室圧ｐを調整する排気側ダンパ制御の実施下において、上記の如き排気側の風路圧調整制御及び排気側ファン制御により排気側ダンパＶｒの開度ｂ１〜ｂ３が全て排気側の目標中間開度範囲Ｙ（ダンパ特性上で室圧調整機能に優れた開度範囲）に入るようにすることで、その排気側ダンパ制御による室圧調整を感度面及び精度面で良好に行なえるようにする。
【００３５】
給気側の風路圧調整制御において給気側の風路圧調整部１０Ａは、具体的には、給気側ダンパＶｓの検出開度ａ１〜ａ３のうち最大のものが給気側の目標中間開度範囲Ｘを大開度側に逸脱しているとき給気側目標風路圧ｆｓｓを上昇側に変更し、給気側ダンパＶｓの検出開度ａ１〜ａ３のうち最小のものが給気側の目標中間開度範囲Ｘを小開度側に逸脱しているとき給気側目標風路圧ｆｓｓを低下側に変更し、給気側ダンパＶｓの検出開度ａ１〜ａ３が全て給気側の目標中間開度範囲Ｘの範囲内にあるとき（図２に示す状態）には給気側目標風路圧ｆｓｓを現状値に維持する。
【００３６】
すなわち、給気側ダンパＶｓの検出開度ａ１〜ａ３のうち最大のものが給気側の目標中間開度範囲Ｘを大開度側に逸脱しているときは、給気側目標風路圧ｆｓｓを上昇側へ変更することにより、給気側ファン制御上で給気ファンＦｓの出力を上昇側に調整させて、この上昇側へのファン出力調整に対し給気側ダンパ制御上で給気側ダンパＶｓの夫々が閉じ側に開度調整されるようにし、また逆に、給気側ダンパＶｓの検出開度ａ１〜ａ３のうち最小のものが給気側の目標中間開度範囲Ｘを小開度側に逸脱しているときは、給気側目標風路圧ｆｓｓを低下側へ変更することにより、給気側ファン制御上で給気ファンＦｓの出力を低下側に調整させて、この低下側へのファン出力調整に対し給気側ダンパ制御上で給気側ダンパＶｓの夫々が開き側に開度調整されるようにし、これにより、給気側ダンパＶｓの開度ａ１〜ａ３が全て給気側の目標中間開度範囲Ｘに入るように（すなわち、給気側ダンパＶｓが適正開度状態になるように）する。
【００３７】
一方、排気側の風路圧調整制御において排気側の風路圧調整部１０Ｂは、具体的には、排気側ダンパＶｒの検出開度ｂ１〜ｂ３のうち最大のものが排気側の目標中間開度範囲Ｙを大開度側に逸脱しているとき排気側目標風路圧ｆｒｓを低下側に変更し、排気側ダンパＶｒの検出開度ｂ１〜ｂ３のうち最小のものが排気側の目標中間開度範囲Ｙを小開度側に逸脱しているとき排気側目標風路圧ｆｒｓを上昇側に変更し、排気側ダンパＶｒの検出開度ｂ１〜ｂ３が全て排気側の目標中間開度範囲Ｙの範囲内にあるとき（図２に示す状態）には排気側目標風路圧ｆｒｓを現状値に維持する。
【００３８】
すなわち、排気側ダンパＶｒの検出開度ｂ１〜ｂ３のうち最大のものが排気側の目標中間開度範囲Ｙを大開度側に逸脱しているときは、排気側目標風路圧ｆｒｓを低下側へ変更することにより、排気側ファン制御上で排気ファンＦｒの出力を上昇側に調整させて、この上昇側へのファン出力調整に対し排気側ダンパ制御上で排気側ダンパＶｒの夫々が閉じ側に開度調整されるようにし、また逆に、排気側ダンパＶｒの検出開度ｂ１〜ｂ３のうち最小のものが排気側の目標中間開度範囲Ｙを小開度側に逸脱しているときは、排気側目標風路圧ｆｒｓを上昇側へ変更することにより、排気側ファン制御上で排気ファンＦｒの出力を低下側に調整させて、この低下側へのファン出力調整に対し排気側ダンパ制御上で排気側ダンパＶｒの夫々が開き側に開度調整されるようにし、これにより、排気側ダンパＶｒの開度ｂ１〜ｂ３が全て排気側の目標中間開度範囲Ｙに入るように（すなわち、排気側ダンパＶｒが適正開度状態になるように）する。
【００３９】
同図１及び図３に示す如く、各対象室１の室圧ｐを調整する排気側のダンパ制御器６Ｂには、その調整対象である室圧ｐが図４に示す如く正常時の安定値（目標室圧ｐｓの近傍）を中心に大きな振幅で振動的に変動する室圧異常振動Ｈ（すなわち、室圧制御における制御ハンチング）の発生を検出する異常振動検出部１１を装備してあり、また、中央制御器ＣＣには、いずれかの排気側ダンパ制御器６Ｂにおいて室圧異常振動Ｈが検出されたとき、その排気側ダンパ制御器６Ｂからの異常ＯＮ信号ｈを受けて所定の対応処理を実行する異常振動対応部１２を装備してある。
【００４０】
そして具体的には、排気側ダンパ制御器６Ｂの異常振動検出部１１は、室圧異常振動Ｈの検出について次の（イ）〜（ハ）の処理を実行する（図４参照）。
【００４１】
（イ）対象室１に対する室圧調整の開始後（及び、後述（ハ）の計測停止の後）、室圧センサ７による検出室圧ｐが目標室圧ｐｓよりも所定圧だけ高い設定閾室圧ｐａを最初に高圧側へ逸脱したとき、設定閾時間Ｔｓの計測、及び、検出室圧ｐが設定閾室圧ｐａを反復的に高圧側へ逸脱する回数ｎの計測を開始する。
【００４２】
なお、上記逸脱については、検出室圧ｐが設定閾室圧ｐａを高圧側へ逸脱した状態が設定認定時間Ｔｎにわたって継続したとき（ΔＴ≧Ｔｎ）、その逸脱を認定する（すなわち、逸脱があったとする）のに対し、検出室圧ｐが設定閾室圧ｐａを高圧側へ逸脱した状態が設定認定時間Ｔｎよりも短い時間しか継続しなかったときには（ΔＴ＜Ｔｎ）、その逸脱を非認定とする（すなわち、逸脱がなかったとする）。
【００４３】
（ロ）設定閾時間Ｔｓの第１回目の計測において、その設定閾時間Ｔｓの時間内に上記逸脱回数ｎが設定複数回数ｎｓ（本例ではｎｓ＝５）に達したとき、室圧異常振動Ｈが発生したと判定し、中央制御器ＣＣに対し異常ＯＮ信号ｈを発信する。
【００４４】
また、設定閾時間Ｔｓの第１回目の計測の完了に続き設定閾時間Ｔｓ及び逸脱回数ｎの第２回目の計測を開始し、以後、各回の設定閾時間Ｔｓの計測において、その設定閾時間Ｔｓの時間内に逸脱回数ｎが設定複数回数ｎｓに達する場合は、その回の設定閾時間Ｔｓの計測の完了に続き、設定閾時間Ｔｓ及び逸脱回数ｎの次の回の計測を開始する。
【００４５】
（ハ）設定閾時間Ｔｓの第１回目の計測において、その設定閾時間Ｔｓの時間内に逸脱回数ｎが設定複数回数ｎｓに達しなかったときには、中央制御器ＣＣに対する異常ＯＮ信号ｈの発信は行わず、そしてまた、設定閾時間Ｔｓの第１回目の計測を完了すると、第２回目の計測には移らず設定閾時間Ｔｓ及び逸脱回数ｎの計測を停止して、その計測停止状態で再び前記（イ）における最初の逸脱を待つ状態になる。
【００４６】
また、設定閾時間Ｔｓの第２回目以降の回の計測において、その設定閾時間Ｔｓの時間内に逸脱回数ｎが設定複数回数ｎｓに達しなかったときには、その回の設定閾時間Ｔｓの計測を完了した時点で、中央制御器ＣＣに対し異常ＯＦＦ信号ｈ′を発信し、そして、次回の計測には移らず設定閾時間Ｔｓ及び逸脱回数ｎの計測を停止して、その計測停止状態で再び前記（イ）における最初の逸脱を待つ状態になる。
【００４７】
一方、中央制御器ＣＣの異常振動対応部１２は、前記の対応処理について次の（ニ），（ホ）の処理を実行する。
【００４８】
（ニ）いずれかの排気側ダンパ制御器６Ｂから異常ＯＮ信号ｈを受けると、前記対応処理の１つとして、異常発生を管理者に報知する異常報知処理を開始（警報を発令）する。
【００４９】
また、他の１つの対応処理として、室圧制御における室圧調整特性を変更することで室圧異常振動Ｈを収束させる特性変更処理を実行し、さらに具体的には、この特性変更処理として次のａ，ｂの処理を行う。
【００５０】
ａ．給気側及び排気側のファン制御器９Ａ，９Ｂが実行する給気側及び排気側ファン制御の制御パラメータ（例えば、それらファン制御で採用するＰＩＤ制御上の各種係数や、ファン出力の変更速度など）を振動収束用の制御パラメータに切り換える。
【００５１】
ｂ．給気側及び排気側夫々の各ダンパ制御器６Ａ、６Ｂが実行する給気側及び排気側ダンパ制御の制御パラメータ（例えば、それらダンパ制御で採用するＰＩＤ制御上の各種係数や、ダンパ開度の変更速度など）を振動収束用の制御パラメータに切り換える。
【００５２】
（ホ）異常ＯＮ信号ｈを発信した排気側ダンパ制御器６Ｂから、その後、異常ＯＦＦ信号ｈ′を受けると、異常発生の報知を停止して先の異常ＯＮ信号で開始した異常報知処理を終了する。
【００５３】
なお、振動収束用の制御パラメータは、システム特性上で室圧異常振動Ｈの収束に有効なものを予め検証準備して中央制御器ＣＣに格納してある。
【００５４】
以上、本実施形態において、給気側及び排気側のダンパ制御器６Ａ，６Ｂ、給気側及び排気側のファン制御器９Ａ，９Ｂ、並びに、給気側及び排気側の風路圧調整部１０Ａ，１０Ｂは、対象室１の検出室圧ｐと目標室圧ｐｓとの偏差Δｐに応じ給気量と排気量との収支を調整して対象室１の室圧ｐを目標室圧ｐｓに調整する室圧制御手段を構成する。
【００５５】
そして、排気側ダンパ制御器６Ｂにおける異常振動検出部１１、及び、中央制御器ＣＣにおける異常振動対応部１２は、室圧制御手段による室圧調整下で、対象室１の検出室圧ｐが目標室圧ｐｓから遠ざかる方向で設定閾室圧ｐａを反復的に逸脱する回数ｎが設定閾時間Ｔｓの時間内に設定複数回数ｎｓに達したとき、異常と判定して所定の対応処理を実行する保護手段を構成する。
【００５６】
また、この保護手段１１，１２は、前記逸脱回数ｎが設定閾時間Ｔｓの時間内に設定複数回数ｎｓに達したとき、前記対応処理の一つである異常報知処理を開始し、その後、その異常報知処理を継続して、逸脱回数ｎｓが設定閾時間Ｔｓの時間内に設定複数回数ｎｓに達しなくなったとき、異常報知処理を終了する構成にしてある。
【００５７】
さらに、この保護手段１１，１２は、室圧制御手段による室圧調整の開始後、又は、前記逸脱回数ｎが設定閾時間Ｔｓの時間内に設定複数回数ｎｓに達しなくなった後、設定閾時間Ｔｓの計測を停止しておき、その計測停止状態において対象室１の検出室圧ｐが目標室圧ｐｓから遠ざかる方向で設定閾室圧ｐａを逸脱したとき、設定閾時間Ｔｓの計測及び逸脱回数ｎの計測を開始する構成にしてある。
【００５８】
そしてまた、この保護手段１１，１２は、対象室１の検出室圧ｐが目標室圧ｐｓから遠ざかる方向で設定閾室圧ｐａを逸脱した状態が設定認定時間Ｔｎにわたって継続したときに、その逸脱を認定し、対象室１の検出室圧ｐが目標室圧ｐｓから遠ざかる方向で設定閾室圧ｐａを逸脱した状態が設定認定時間Ｔｎよりも短い時間しか継続しなかったときには、その逸脱を非認定とする構成にしてある。
【００５９】
〔別の実施形態〕
次に別実施形態を列記する。
【００６０】
前述の実施形態では、目標室圧ｐｓよりも所定圧だけ高い高圧側（上限側）の設定閾室圧ｐａのみを設ける例を示したが、目標室圧ｐｓよりも所定圧だけ低い低圧側（下限側）の設定閾室圧ｐｂのみを設け、検出室圧ｐが目標室圧ｐｓから遠ざかる方向（低下方向）で低圧側の設定閾室圧ｐｂを反復的に逸脱する回数ｎが設定閾時間Ｔｓの時間内に設定複数回数ｎｓに達したとき、異常と判定して所定の対応処理を実行するようにしてもよい。
【００６１】
また、高圧側の設定閾室圧ｐａと低圧側の設定閾室圧ｐｂとの両方を設け、逸脱回数ｎが設定閾時間Ｔｓの時間内に設定複数回数ｎｓに達したとき異常と判定して所定の対応処理を実行することを、それら高圧側の設定閾室圧ｐａと低圧側の設定閾室圧ｐｂとの各々について実施するようにしてもよい。
【００６２】
前述の実施形態では、逸脱回数の計測を伴う設定閾時間Ｔｓの計測について、先の設定閾時間Ｔｓの計測が完了したときに次の設定閾時間Ｔｓの計測を開始する例を示したが、場合によっては、先の設定閾時間Ｔｓの計測途中に次の設定閾時間Ｔｓの計測を開始する形態を採るようにしてもよい。
【００６３】
保護手段に実行させる対応処理は、前記の異常報知処理や特性変更処理に限られるものでなく、室圧の異常振動Ｈに原因するシステム運転上の種々の障害を防止する為のものであれば、どのような処理であってもよい。
【００６４】
本発明は、半導体製造工場や薬品・食品工場など、室圧管理を要する各種施設に適用することができる。
【図面の簡単な説明】
【図１】空調システムの全体構成図
【図２】風路圧（ファン出力）の調整形態を説明する図
【図３】保護手段のブロック図
【図４】保護手段の動作を説明するグラフ
【図５】（イ），（ロ）従来の異常判定方式を示すグラフ
（ハ）室圧異常振動を示すグラフ
【符号の説明】
１対象室
６Ａ，６Ｂ室圧制御手段
９Ａ，９Ｂ室圧制御手段
１０Ａ，１０Ｂ室圧制御手段
１１，１２保護手段
ｎ逸脱回数
ｎｓ設定複数回数
ｐ検出室圧
ｐａ設定閾室圧
ｐｓ目標室圧
Δｐ偏差
Ｔｎ設定認定時間
Ｔｓ設定閾時間[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a chamber pressure control system, and more specifically, adjusts a balance between an air supply amount and an exhaust amount with respect to the target chamber in accordance with a deviation between a detection chamber pressure and a target chamber pressure of the target chamber, and the chamber pressure of the target chamber. The present invention relates to a room pressure control system provided with a room pressure control means for adjusting the pressure to a target room pressure.
[0002]
[Prior art]
Conventionally, in this type of chamber pressure control system, in order to detect an abnormal chamber pressure in which the chamber pressure in the target chamber greatly deviates from the target chamber pressure, as shown in FIG. When the state of deviating from the set threshold chamber pressure pa on the upper limit side, which is higher than the chamber pressure ps by a predetermined pressure, to the high pressure side continues for the set time T, or as shown in FIG. When the state where the lower limit set threshold chamber pressure pb, which is lower than the target chamber pressure ps by a predetermined pressure, deviates to the low pressure side continues for a set time T, a method of determining that there is an abnormality has been adopted.
[0003]
Then, when the occurrence of an abnormal chamber pressure is detected by this method, the occurrence of the abnormality is notified as a response process for the abnormal chamber pressure, or the system is automatically stopped (the adjustment of the chamber pressure is stopped and the supply / exhaust to the target chamber is stopped). As a result, the system is maintained (there is no appropriate prior art document).
[0004]
[Problems to be solved by the invention]
However, in the chamber pressure control in which the balance between the air supply amount and the exhaust amount with respect to the target chamber is adjusted to adjust the chamber pressure p of the target chamber to the target chamber pressure ps, the chamber pressure p is caused in FIG. As shown, an abnormal vibration H (chamber pressure hunting) of the chamber pressure that fluctuates with a large amplitude centering on the vicinity of the target chamber pressure ps may occur. This causes various obstacles in the operation of the system, such as causing pressure inversion and causing indoor contamination. However, in the abnormality detection in the conventional room pressure control system as described above, the abnormal vibration H of the room pressure is accurately detected. Therefore, there is a problem that various troubles are caused in the operation of the system.
[0005]
That is, when the detection chamber pressure p deviates from the upper limit set threshold chamber pressure pa to the high pressure side for a set time Ts, or the detection chamber pressure p deviates from the lower limit set threshold chamber pressure pb to the low pressure side. In the method shown in FIGS. 5 (a) and 5 (b), which is determined to be abnormal when the above state continues for a set time T, each vibration wave has a high frequency as shown in FIG. 5 (c). The room pressure abnormal vibration H in which the time ΔT in which the top part of the head has deviated from the set threshold chamber pressures pa and pb on the upper limit side and the lower limit side cannot be detected as an abnormality cannot be detected. The set time T is set to an extremely short time (a time when the top of each vibration wave in the abnormal chamber pressure vibration H deviates from the set threshold chamber pressures pa and pb), or the detection chamber pressure p is simply set to the upper limit. Only by deviating from the set threshold chamber pressures pa and pb Therefore, the detection chamber pressure p is merely deviated from the set threshold chamber pressures pa and pb due to the influence of opening and closing of the door in the target chamber, and then quickly returns to normal. In such a case, it is erroneously determined to be abnormal, and therefore, erroneous notification of the occurrence of the abnormality is frequently made, thereby causing a problem that hinders the operation of the system.
[0006]
In view of this situation, the main problem of the present invention is that by adopting a rational determination method, it is possible to accurately detect the abnormal vibration of the room pressure as described above and appropriately cope with the occurrence of the abnormal vibration of the room pressure. It is in the point to make.
[0007]
[Means for Solving the Problems]
[1] The invention according to claim 1 relates to a room pressure control system, the characteristics of which are as follows:
A chamber pressure control means for adjusting a balance between an air supply amount and an exhaust amount with respect to the target chamber according to a deviation between a detection chamber pressure and a target chamber pressure of the target chamber and adjusting the chamber pressure of the target chamber to the target chamber pressure; In the room pressure control system provided,
The number of times that the detection chamber pressure of the target chamber deviates repeatedly from the set threshold chamber pressure in the direction of moving away from the target chamber pressure under the chamber pressure adjustment by the chamber pressure control means is set multiple times within the set threshold time. When it reaches, a protection means is provided for determining that it is abnormal and executing a predetermined response process.
[0008]
That is, according to this configuration, when the detected chamber pressure of the target chamber repeatedly deviates more than a set number of times in the direction away from the target chamber pressure within the set threshold time, it is determined as abnormal. If an appropriate value is set according to the amplitude and cycle of the abnormal chamber pressure vibration to be detected for each of the set threshold room pressure, the set threshold time, and the set number of times, the effect of opening and closing the door in the target room will be affected. In the state where the detection chamber pressure is effectively prevented from being judged as abnormal even when the detection chamber pressure deviates from the target chamber pressure in a direction away from the target chamber pressure, the chamber pressure is effectively prevented. It is possible to accurately detect an abnormal vibration of the room pressure that fluctuates with a large amplitude around the vicinity of.
[0009]
Since the protection means executes a predetermined response process in response to the determination that the abnormality is present (that is, detection of occurrence of abnormal room pressure vibration), it is possible to appropriately respond to occurrence of abnormal room pressure vibration. Thus, various troubles in system operation caused by abnormal vibration of the room pressure can be effectively prevented.
[0010]
In carrying out the invention according to claim 1, either a mode in which the set threshold chamber pressure is set to a higher pressure side than the target chamber pressure or a mode in which the set threshold chamber pressure is set to a lower pressure side than the target chamber pressure is adopted. Also, if the set threshold chamber pressure is set to both the higher and lower pressure sides than the target chamber pressure, it is judged as abnormal when the number of deviations reaches a set number of times within the set threshold time. It is also possible to adopt a form in which the predetermined response processing is executed for each of the set threshold chamber pressure on the high pressure side (upper limit side) and the set threshold chamber pressure on the low pressure side (lower limit side).
[0011]
In the implementation of the invention according to claim 1, the measurement of the set threshold time accompanied by the measurement of the number of deviations is a mode in which measurement of the next set threshold time is started when the measurement of the previous set threshold time is completed (abbreviation) In this case, the measurement is not limited to the previous set threshold time and the next set threshold time, and the next set threshold time measurement is started during the measurement of the previous set threshold time (abbreviation). In this case, a mode in which there is a temporal wrap between the previous set threshold time and the next set threshold time may be adopted.
[0012]
In carrying out the invention according to claim 1, it is desirable to equip means for appropriately changing each of the set threshold chamber pressure, the set threshold time, and the set number of times according to the operating status of the system. .
[0013]
[2] The invention according to claim 2 specifies a preferred embodiment for carrying out the invention according to claim 1, and its features are as follows:
The response process is an abnormality notification process for notifying the occurrence of an abnormality or a characteristic changing process for changing a chamber pressure adjustment characteristic of the chamber pressure control means.
[0014]
That is, if the protection means is configured to execute an abnormality notification process for notifying the occurrence of an abnormality as the corresponding process, the manager changes the room pressure adjustment characteristic of the room pressure control means according to the notification (as a specific example, An appropriate operation such as changing various control parameters) can be performed to converge the abnormal vibration of the room pressure, and the characteristic change process for changing the room pressure adjustment characteristic of the room pressure control means as the corresponding process By adopting a configuration in which the protection means is executed, the abnormal vibration of the chamber pressure can be automatically converged by changing the chamber pressure adjustment characteristic. Various obstacles can be prevented.
[0015]
When changing the room pressure adjustment characteristic of the room pressure control means to converge the abnormal vibration of the room pressure, a chamber pressure adjustment characteristic for vibration convergence corresponding to the characteristics of the entire system is prepared in advance. When an abnormal vibration of pressure occurs, the chamber pressure for vibration convergence that has been prepared from the characteristics of the chamber pressure control characteristics of the chamber pressure control means by the manual operation according to the above notification or by the above characteristic change processing By switching to the adjustment characteristic, the abnormal chamber pressure vibration can be converged more quickly than when the characteristic change is made in the form of searching for the room pressure adjustment characteristic that can converge the abnormal room pressure vibration after the occurrence of the abnormal room pressure vibration. Therefore, various troubles in system operation caused by abnormal vibration of the room pressure can be prevented more reliably.
[0016]
Further, in the implementation of the invention according to claim 1, the corresponding processing to be executed by the protection means is not limited to the above-described abnormality notification processing and characteristic change processing, but in system operation caused by abnormal vibration of the room pressure. Any processing may be used as long as it is intended to prevent various problems.
[0017]
[3] The invention according to claim 3 specifies a preferred embodiment for carrying out the invention according to claim 1 or 2, and its features are as follows:
When the number of deviations reaches a set number of times within a set threshold time under room pressure adjustment by the room pressure control means, the protection means starts the handling process,
Thereafter, the handling process is continued, and the handling process is terminated when the number of deviations does not reach the set number of times within the set threshold time.
[0018]
In other words, according to this configuration, when the number of departures does not reach the set number of times within the set threshold time (that is, when the number of departures reaches the set number of times within the set threshold time, it is detected first. Since the response process is terminated after the abnormal vibration of the room pressure has converged), for example, even when the abnormality notification process is executed as the response process, the abnormality notification is not sufficiently continued as the response process. Thus, it is possible to effectively prevent the abnormal vibration of the room pressure from remaining, and thus it is possible to more reliably prevent various troubles in system operation caused by the abnormal vibration of the room pressure. .
[0019]
[4] The invention according to claim 4 specifies an embodiment suitable for carrying out the invention according to any one of claims 1 to 3, and the features thereof are as follows:
After the start of the chamber pressure adjustment by the chamber pressure control means or after the number of deviations does not reach the set multiple times within the set threshold time, the protection means stops measuring the set threshold time. ,
In the measurement stop state, when the detection chamber pressure of the target chamber deviates from the set threshold chamber pressure in a direction away from the target chamber pressure, measurement of the set threshold time and measurement of the number of deviations are started. .
[0020]
That is, according to this configuration, when the detection chamber pressure deviates from the set threshold chamber pressure in a direction away from the target chamber pressure in a state where measurement of the set threshold time is stopped, the measurement of the set threshold time and the number of deviations Since the measurement is started, when the abnormal vibration of the room pressure occurs, it is determined that the deviation is abnormal with the set number of deviations in the initial stage of occurrence (in other words, after the occurrence of abnormal vibration, the set number of times System can be determined abnormally with vibration waves), abnormality determination (abnormality detection) and corresponding processing based on the determination can always be performed early without delay, thereby causing abnormal vibration of the room pressure Various obstacles in operation can be prevented more reliably.
[0021]
In other words, in the configuration in which the measurement of the set threshold time accompanied by the measurement of the number of deviations is simply repeated, the occurrence of abnormal room pressure vibration was in the middle of the measurement of the set threshold time. If not, the determination of abnormality will be made in the next measurement, and the corresponding processing will be delayed for the occurrence of abnormal vibrations in the room pressure. Can be avoided.
[0022]
[5] The invention according to claim 5 specifies a configuration suitable for carrying out the invention according to any one of claims 1 to 4, and the characteristics thereof are as follows:
When the state in which the detected chamber pressure of the target chamber deviates from the set threshold chamber pressure in a direction away from the target chamber pressure continues for a set certification time, the protection means is authorized to deviate,
When the state in which the detection chamber pressure of the target chamber deviates from the set threshold chamber pressure in a direction away from the target chamber pressure continues for a time shorter than the set certification time, the deviation is not certified. It is in.
[0023]
In other words, among the fluctuations in the room pressure due to various causes, there are fluctuations in which the room pressure deviates from the above-mentioned set threshold room pressure away from the target room pressure in a direction that is far from the target room pressure. However, if such a momentary deviation is recognized as a deviation equivalent to a single deviation in abnormal vibration of the room pressure, whether or not the number of deviations reaches a set number of times within the set threshold time. In the implementation of the invention according to claim 1 for detecting abnormal vibration of the room pressure, erroneous detection (that is, erroneous determination of abnormality) and erroneous execution of corresponding processing, or the number of deviations is set within a set threshold time. In the implementation of the invention according to claim 3, wherein the corresponding process is terminated when the number of times is not reached, the erroneous setting of the corresponding process is caused, or the detection chamber pressure is set away from the target chamber pressure in the measurement stop state. When it deviates from pressure In the practice of the invention according to claim 4 for starting the measurement and the measurement of the deviation count between set threshold time, there is a possibility that inconvenience such as occurs leading to initiation erroneous measurement.
[0024]
On the other hand, according to the above configuration, when the state where the detection chamber pressure deviates from the set threshold chamber pressure in a direction away from the target chamber pressure continues for a time shorter than the set certification time, the deviation is regarded as non-certification. (That is, there is no deviation), the above set certification time depends on the fact that the time that each vibration wave in the abnormal chamber pressure vibration deviates from the set threshold chamber pressure is almost constant depending on the characteristics of the system. If an appropriate time is set as above, the protection means is used for abnormal vibration of the room pressure in a state in which the deviation from the instantaneous due to the opening and closing of the door as described above is distinguished from each deviation in the abnormal vibration of the room pressure. Accordingly, various inconveniences as described above can be effectively avoided.
[0025]
In carrying out the invention according to claim 5, it is desirable to equip means for appropriately changing the setting authorization time in accordance with the operation status of the system.
[0026]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 shows an air conditioning system for a plurality of target chambers 1, 2 is an air supply side main air passage with an air supply fan Fs, and 3 is an exhaust side main air passage with an exhaust fan Fr. The chamber 1 is connected in parallel to the air supply side main air passage 2 through the air supply side branch air passage 2a, and is also connected in parallel to the exhaust side main air passage 3 through the exhaust side branch air passage 3a. It is. Reference numeral 4 denotes an air conditioner that adjusts the temperature and humidity of the air supplied to the target room 1.
[0027]
Vs is an air supply side damper interposed in each of the air supply side branch air passages 2a, 5 is an air flow amount sensor for detecting the air flow amount qs of the air supply side branch air passage 2a, and 6A controls the air supply side damper Vs. These air supply side damper controllers 6A are provided on the air supply side according to the deviation Δqs between the detected air flow rate qs detected by the air flow rate sensor 5 and the target air flow rate qss specified by the central controller CC. The air supply side damper control is performed in which the opening degree of the damper Vs is adjusted to adjust the air flow rate qs of each air supply side branch air passage 2a (that is, the air flow rate of each target chamber 1) to the target air flow rate qss.
[0028]
Vr is an exhaust side damper interposed in each of the exhaust side branch air passages 3a, 7 is a chamber pressure sensor for detecting a chamber pressure p (specifically, a differential pressure between the reference pressure and the chamber pressure) of the target chamber 1, and 6B. Is an exhaust-side damper controller that controls the exhaust-side damper Vr, and these exhaust-side damper controllers 6B differ between the detection chamber pressure p detected by the chamber pressure sensor 7 and the target chamber pressure ps designated by the central controller CC. Exhaust side damper control for adjusting the chamber pressure p of each target chamber 1 to the target chamber pressure ps by adjusting the opening of the exhaust side damper Vr according to Δp is executed.
[0029]
8a is an air supply side pressure sensor for detecting the air passage pressure fs of the air supply side main air passage 2, 9A is an air supply side fan controller for controlling the air supply fan Fs, and this air supply side fan controller 9A is The output of the air supply fan Fs is adjusted by inverter control according to the deviation Δfs between the air path pressure fs detected by the air supply side pressure sensor 8a and the air supply side target air path pressure fss designated by the central controller CC. The air supply side fan control for adjusting the air path pressure fs of the air side main air path 2 to the air supply side target air path pressure fss is executed.
[0030]
8b is an exhaust side pressure sensor that detects the air path pressure fr of the exhaust side main air path 3, and 9B is an exhaust side fan controller that controls the exhaust fan Fr. The exhaust side fan controller 9B is an exhaust side pressure sensor. The air path of the exhaust side main air path 3 is adjusted by adjusting the output of the exhaust fan Fr by inverter control according to the deviation Δfr between the detected air path pressure fr by 8b and the exhaust side target air path pressure frs specified by the central controller CC. Exhaust-side fan control is performed to adjust the pressure fr to the exhaust-side target wind path pressure frs.
[0031]
Reference numerals 10A and 10B denote air supply side and exhaust side air passage pressure adjustment units in the central controller CC, and the air supply side air passage pressure adjustment unit 10A includes the air supply side damper by the air supply side damper controller 6A. In the control, the air supply side damper Vs is in a predetermined appropriate opening state (in this embodiment, the upper and lower limit values x1 and x2 are set to intermediate opening values as shown in FIG. 2). In other words, the air supply side target wind path pressure is determined according to the detected openings a1 to a3 of the air supply side dampers Vs so that the air supply side dampers Vs have the openings a1 to a3). The air path pressure adjustment control on the air supply side for changing fss is executed.
[0032]
In addition, the exhaust-side air path pressure adjusting unit 10B is configured so that the exhaust-side damper Vr is in a predetermined appropriate opening state in the exhaust-side damper control by the exhaust-side damper controller 6B (in the present embodiment, the same as in the supply side). As shown in FIG. 2, the openings b1 to b3 of all the exhaust side dampers Vr are within the range of the target intermediate opening range Y on the exhaust side in which both the upper and lower limit values y1 and y2 are set to the intermediate opening values. The exhaust side air passage pressure adjustment control is executed to change the exhaust side target air passage pressure frs in accordance with the detected openings b1 to b3 of the exhaust side dampers Vr.
[0033]
That is, in this embodiment, under the air supply side damper control for adjusting the air flow amount qs of the air supply side branch air passage 2a, the air supply side air path pressure adjustment control and the air supply side fan control as described above are performed. By making all the openings a1 to a3 of the supply side damper Vs fall within the target intermediate opening range X on the supply side (opening range having an excellent air volume adjustment function on the damper characteristics), the supply side Ventilation adjustment by damper control (adjustment of ventilation air volume for the target room 1) can be satisfactorily performed in terms of sensitivity and accuracy.
[0034]
Similarly, under the exhaust-side damper control for adjusting the chamber pressure p of the target chamber 1, the openings b1 to b3 of the exhaust-side damper Vr are controlled by the exhaust-side air passage pressure adjustment control and the exhaust-side fan control as described above. Is within the target intermediate opening range Y on the exhaust side (opening range with excellent chamber pressure adjustment function on the damper characteristics), so that the chamber pressure adjustment by the exhaust side damper control can be performed in terms of sensitivity and accuracy. To be able to do well.
[0035]
In the air supply side air path pressure adjustment control, specifically, the air supply side air path pressure adjustment unit 10A has the largest one of the detected openings a1 to a3 of the air supply side damper Vs as the target on the air supply side. When the intermediate opening range X deviates to the large opening side, the supply side target wind path pressure fss is changed to the rising side, and the smallest one of the detection openings a1 to a3 of the supply side damper Vs is supplied. When the target intermediate opening range X on the side deviates to the small opening side, the air supply side target wind path pressure fss is changed to the lower side, and all the detected openings a1 to a3 of the air supply side damper Vs are supplied. When it is within the target intermediate opening range X on the side (the state shown in FIG. 2), the supply-side target wind path pressure fss is maintained at the current value.
[0036]
That is, when the maximum detected opening degree a1 to a3 of the supply side damper Vs deviates from the target intermediate opening range X on the supply side to the large opening side, the supply side target wind path pressure fss. Is changed to the rising side, the output of the supply fan Fs is adjusted to the rising side on the supply side fan control, and the supply side on the supply side damper control is adjusted for the fan output adjustment to the rising side. The opening of each of the dampers Vs is adjusted to the closing side, and conversely, the smallest one of the detected openings a1 to a3 of the supply side damper Vs reduces the target intermediate opening range X on the supply side. When deviating to the opening degree side, the output side of the supply air fan Fs is adjusted to the lower side on the air supply side fan control by changing the air supply side target wind path pressure fss to the lower side. Each of the supply side dampers Vs is opened on the supply side damper control for the fan output adjustment to the lower side. The opening degree is adjusted so that all the opening degrees a1 to a3 of the supply side damper Vs fall within the target intermediate opening range X on the supply side (that is, the supply side damper Vs has an appropriate opening degree). To be in a state).
[0037]
On the other hand, in the exhaust-side air path pressure adjustment control, the exhaust-side air path pressure adjusting unit 10B is specifically configured such that the largest one of the detected openings b1 to b3 of the exhaust-side damper Vr is the target intermediate opening on the exhaust side. When the degree range Y deviates to the large opening side, the exhaust side target wind path pressure frs is changed to the lower side, and the smallest one of the detected openings b1 to b3 of the exhaust side damper Vr is the target intermediate opening on the exhaust side. When the degree range Y deviates to the small opening side, the exhaust side target wind path pressure frs is changed to the rising side, and all the detected openings b1 to b3 of the exhaust side damper Vr are the target intermediate opening range Y on the exhaust side. Is within the range (the state shown in FIG. 2), the exhaust-side target wind path pressure frs is maintained at the current value.
[0038]
That is, when the maximum detected opening degree b1 to b3 of the exhaust side damper Vr deviates from the exhaust side target intermediate opening range Y to the large opening side, the exhaust side target wind path pressure frs is reduced. The output of the exhaust fan Fr is adjusted to the upward side on the exhaust side fan control, and the exhaust side damper Vr is closed on the exhaust side damper control with respect to the fan output adjustment to the upward side. Conversely, when the minimum one of the detected openings b1 to b3 of the exhaust side damper Vr deviates from the target intermediate opening range Y on the exhaust side to the small opening side. Changes the exhaust-side target wind path pressure frs to the increase side, thereby adjusting the output of the exhaust fan Fr to the decrease side on the exhaust-side fan control, and the exhaust-side damper for the fan output adjustment to the decrease side Each of the exhaust side dampers Vr is open on control. The opening degree is adjusted so that all the opening degrees b1 to b3 of the exhaust side damper Vr are within the target intermediate opening range Y on the exhaust side (that is, the exhaust side damper Vr is in the proper opening state). Like).
[0039]
As shown in FIG. 1 and FIG. 3, the exhaust-side damper controller 6B for adjusting the chamber pressure p of each target chamber 1 has a stable value when the chamber pressure p to be adjusted is normal as shown in FIG. It is equipped with an abnormal vibration detector 11 that detects the occurrence of abnormal room pressure vibration H (ie, control hunting in the room pressure control) that fluctuates with a large amplitude centering on (near the target room pressure ps). Further, the central controller CC receives an abnormal ON signal h from the exhaust-side damper controller 6B when any one of the exhaust-side damper controllers 6B detects a room pressure abnormal vibration H, and performs a predetermined response process. The abnormal vibration response unit 12 for executing
[0040]
Specifically, the abnormal vibration detection unit 11 of the exhaust-side damper controller 6B executes the following processes (a) to (c) for detecting the room pressure abnormal vibration H (see FIG. 4).
[0041]
(A) After the start of the chamber pressure adjustment for the target chamber 1 (and after the measurement stop described later in (c)), the set threshold chamber in which the detected chamber pressure p by the chamber pressure sensor 7 is higher than the target chamber pressure ps by a predetermined pressure. When the pressure pa first deviates to the high pressure side, measurement of the set threshold time Ts and measurement of the number n of times that the detection chamber pressure p repeatedly deviates from the set threshold chamber pressure pa to the high pressure side are started.
[0042]
As for the above deviation, when the state in which the detection chamber pressure p deviates from the set threshold chamber pressure pa to the high pressure side continues for the set certification time Tn (ΔT ≧ Tn), the deviation is certified (that is, there is a deviation). On the other hand, if the detection chamber pressure p deviates from the set threshold chamber pressure pa to the high-pressure side for only a shorter time than the set certification time Tn (ΔT <Tn), the deviation is not certified. (That is, there was no deviation).
[0043]
(B) In the first measurement of the set threshold time Ts, when the number of deviations n reaches a set number of times ns (ns = 5 in this example) within the set threshold time Ts, the abnormal chamber pressure vibration It is determined that H has occurred, and an abnormal ON signal h is transmitted to the central controller CC.
[0044]
Also, following the completion of the first measurement of the set threshold time Ts, the second measurement of the set threshold time Ts and the number of deviations n is started, and thereafter the set threshold time in each measurement of the set threshold time Ts. When the number of departures n reaches the set number of times ns within the time Ts, the measurement of the next time after the set threshold time Ts and the number of departures n is started following the completion of the measurement of the set threshold time Ts of that time.
[0045]
(C) In the first measurement of the set threshold time Ts, if the deviation number n does not reach the set multiple times ns within the set threshold time Ts, the transmission of the abnormal ON signal h to the central controller CC is When the first measurement of the set threshold time Ts is completed, the measurement of the set threshold time Ts and the number of deviations n is stopped without moving to the second measurement, and again in the measurement stopped state. It will be in the state which waits for the first deviation in said (a).
[0046]
Further, in the second and subsequent measurements of the set threshold time Ts, if the deviation number n does not reach the set multiple times ns within the set threshold time Ts, the set threshold time Ts is measured for that time. Upon completion, an abnormal OFF signal h ′ is transmitted to the central controller CC, and the measurement of the set threshold time Ts and the number of deviations n is stopped without moving to the next measurement, and again in the measurement stopped state. It will be in the state which waits for the first deviation in said (a).
[0047]
On the other hand, the abnormal vibration handling unit 12 of the central controller CC executes the following processes (d) and (e) for the handling process.
[0048]
(D) When an abnormality ON signal h is received from any one of the exhaust side damper controllers 6B, an abnormality notification process for notifying an administrator of the occurrence of an abnormality is started (an alarm is issued) as one of the countermeasure processes.
[0049]
Further, as another corresponding process, a characteristic change process for converging the room pressure abnormal vibration H by changing the room pressure adjustment characteristic in the room pressure control is executed. More specifically, the characteristic change process is as follows. Processes a and b are performed.
[0050]
a. Control parameters for supply side and exhaust side fan control executed by the supply side and exhaust side fan controllers 9A, 9B (for example, various coefficients for PID control used in the fan control, fan output changing speed, etc. ) Is switched to the control parameter for vibration convergence.
[0051]
b. Control parameters for supply side and exhaust side damper control executed by each of the damper controllers 6A and 6B on the supply side and the exhaust side (for example, various coefficients for PID control employed in the damper control, Change the change speed to a control parameter for vibration convergence.
[0052]
(E) After receiving the abnormality OFF signal h ′ from the exhaust side damper controller 6B that has transmitted the abnormality ON signal h, the abnormality notification process started by the previous abnormality ON signal is stopped when the abnormality OFF signal h ′ is received. To do.
[0053]
Note that the vibration convergence control parameters that are effective for convergence of the abnormal room pressure vibration H in terms of system characteristics are prepared in advance for verification and stored in the central controller CC.
[0054]
As described above, in the present embodiment, the supply-side and exhaust-side damper controllers 6A and 6B, the supply-side and exhaust-side fan controllers 9A and 9B, and the supply-side and exhaust-side air passage pressure adjusting units 10A. , 10B adjusts the balance between the air supply amount and the exhaust amount according to the deviation Δp between the detection chamber pressure p and the target chamber pressure ps of the target chamber 1 to adjust the chamber pressure p of the target chamber 1 to the target chamber pressure ps. The chamber pressure control means is configured.
[0055]
Then, the abnormal vibration detection unit 11 in the exhaust side damper controller 6B and the abnormal vibration response unit 12 in the central controller CC have the detection chamber pressure p in the target chamber 1 as the target under the chamber pressure adjustment by the chamber pressure control means. When the number n of repetitively deviating from the set threshold chamber pressure pa in the direction away from the chamber pressure ps reaches the set number of times ns within the set threshold time Ts, it is determined as abnormal and predetermined response processing is executed. Constitutes a protection means;
[0056]
Further, the protection means 11, 12 starts an abnormality notification process which is one of the corresponding processes when the deviation number n reaches the set plural times ns within the set threshold time Ts, and thereafter The abnormality notification process is continued, and when the number of deviations ns does not reach the set multiple times ns within the set threshold time Ts, the abnormality notification process is terminated.
[0057]
Further, the protection means 11, 12 has a set threshold time after the start of the chamber pressure adjustment by the room pressure control means, or after the deviation number n does not reach the set number of times ns within the set threshold time Ts. When the measurement of Ts is stopped, and the detection chamber pressure p of the target chamber 1 deviates from the set threshold chamber pressure pa in a direction away from the target chamber pressure ps in the measurement stop state, the set threshold time Ts is measured and the number of departures It is set as the structure which starts measurement of n.
[0058]
Further, when the state where the detection chamber pressure p of the target chamber 1 deviates from the set threshold chamber pressure pa in a direction away from the target chamber pressure ps continues for the set authorization time Tn, the protection means 11 and 12 When the state in which the detection chamber pressure p of the target chamber 1 deviates from the set threshold chamber pressure pa in a direction away from the target chamber pressure ps continues for a time shorter than the set approval time Tn, the deviation is not determined. It is configured to be certified.
[0059]
[Another embodiment]
Next, another embodiment will be listed.
[0060]
In the above-described embodiment, an example in which only the set threshold chamber pressure pa on the high pressure side (upper limit side) higher than the target chamber pressure ps by a predetermined pressure is provided. Only the set threshold chamber pressure pb on the lower limit side is provided, and the number n of times that the detection chamber pressure p deviates from the set threshold chamber pressure pb on the low pressure side in the direction (decrease direction) away from the target chamber pressure ps is the set threshold time. When the set number of times ns is reached within the time Ts, it may be determined as abnormal and a predetermined response process may be executed.
[0061]
Further, both the high-pressure-side set threshold chamber pressure pa and the low-pressure-side set threshold chamber pressure pb are provided, and it is determined that there is an abnormality when the number of deviations n reaches a set number of times ns within the set threshold time Ts. The predetermined response processing may be performed for each of the high pressure side set threshold chamber pressure pa and the low pressure side set threshold chamber pressure pb.
[0062]
In the above-described embodiment, the measurement of the set threshold time Ts accompanied by the measurement of the number of deviations has been described. However, when the measurement of the previous set threshold time Ts is completed, the measurement of the next set threshold time Ts is started. In some cases, the measurement of the next set threshold time Ts may be started during the measurement of the previous set threshold time Ts.
[0063]
Corresponding processing to be executed by the protection means is not limited to the above-described abnormality notification processing or characteristic change processing, but may be any means for preventing various troubles in system operation caused by abnormal vibration H of the room pressure. Any processing may be performed.
[0064]
The present invention can be applied to various facilities that require room pressure management, such as semiconductor manufacturing factories and chemical / food factories.
[Brief description of the drawings]
FIG. 1 is an overall configuration diagram of an air conditioning system
FIG. 2 is a diagram for explaining an adjustment mode of air passage pressure (fan output)
FIG. 3 is a block diagram of protection means.
FIG. 4 is a graph illustrating the operation of the protection means
FIGS. 5A and 5B are graphs showing a conventional abnormality determination method.
(C) Graph showing abnormal vibration of room pressure
[Explanation of symbols]
1 target room
6A, 6B Room pressure control means
9A, 9B Room pressure control means
10A, 10B Room pressure control means
11,12 Protection measures
n Number of departures
ns Setting multiple times
p Detection chamber pressure
pa Set threshold chamber pressure
ps Target room pressure
Δp deviation
Tn setting authorization time
Ts setting threshold time

Claims

A chamber pressure control means for adjusting a balance between an air supply amount and an exhaust amount with respect to the target chamber according to a deviation between a detection chamber pressure and a target chamber pressure of the target chamber and adjusting the chamber pressure of the target chamber to the target chamber pressure; A room pressure control system provided,
The number of times that the detection chamber pressure of the target chamber deviates repeatedly from the set threshold chamber pressure in the direction of moving away from the target chamber pressure under the chamber pressure adjustment by the chamber pressure control means is set multiple times within the set threshold time. A room pressure control system provided with a protection means for determining that an abnormality has occurred and executing a predetermined response process.

The room pressure control system according to claim 1, wherein the corresponding process is an abnormality notification process for notifying occurrence of an abnormality, or a characteristic changing process for changing a room pressure adjustment characteristic of the room pressure control means.

When the number of deviations reaches a set number of times within a set threshold time under room pressure adjustment by the room pressure control means, the protection means starts the handling process,
3. The room pressure control according to claim 1, wherein the response process is continued and the response process is terminated when the number of deviations does not reach the set multiple times within a set threshold time. system.

After the start of the chamber pressure adjustment by the chamber pressure control means or after the number of deviations does not reach the set multiple times within the set threshold time, the protection means stops measuring the set threshold time. ,
The measurement threshold value measurement and the measurement of the number of deviations are started when the detection chamber pressure of the target chamber deviates from the set threshold chamber pressure in a direction away from the target chamber pressure in the measurement stop state. The room pressure control system of any one of -3.

When the state in which the detected chamber pressure of the target chamber deviates from the set threshold chamber pressure in a direction away from the target chamber pressure continues for a set certification time, the protection means is authorized to deviate,
When the detection chamber pressure of the target chamber deviates from the set threshold chamber pressure in a direction away from the target chamber pressure and continues for a time shorter than the set certification time, the deviation is not certified. Item 5. The room pressure control system according to any one of Items 1 to 4.